KR20070088629A - 세라믹 기판, 전자 장치 및 세라믹 기판의 제조 방법 - Google Patents
세라믹 기판, 전자 장치 및 세라믹 기판의 제조 방법 Download PDFInfo
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- KR20070088629A KR20070088629A KR1020077010564A KR20077010564A KR20070088629A KR 20070088629 A KR20070088629 A KR 20070088629A KR 1020077010564 A KR1020077010564 A KR 1020077010564A KR 20077010564 A KR20077010564 A KR 20077010564A KR 20070088629 A KR20070088629 A KR 20070088629A
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Abstract
Description
Claims (12)
- 세라믹 기판 본체와,상기 세라믹 기판 본체의 한쪽 주면에 형성된 도체부의 일부로부터 상기 세라믹 기판 본체의 상기 한쪽 주면에 걸치도록 배치된 글라스 층을 구비하고,상기 글라스 층은상기 도체부의 일부로부터 상기 세라믹 기판 본체의 상기 한쪽 주면에 걸치도록 배치되고, 제 1 글라스 재료로 이루어진 제 1 글라스 층과,상기 제 1 글라스 층 상에 형성되고, 상기 제 1 글라스 층을 구성하는 제 1 글라스 재료와는 상이한 제 2 글라스 재료로 이루어진 제 2 글라스 층을 구비하고,상기 제 1 글라스 재료는 상기 제 2 글라스 재료보다도 상기 세라믹 기판 본체와의 밀착성이 양호한 재료이며, 상기 제 2 글라스 재료는 상기 제 1 글라스 재료보다도 도금 내성이 우수한 재료인 것을 특징으로 하는 세라믹 기판.
- 제 1 항에 있어서,상기 세라믹 기판 본체를 구성하는 세라믹은 글라스를 함유하고,상기 제 1 글라스 재료는 상기 세라믹 기판 본체를 구성하는 세라믹에 포함되어 있는 글라스와 동일한 계의 글라스 재료임과 아울러,상기 제 2 글라스 재료는 상기 제 1 글라스 재료보다도 도금액에 용출되기 어려운 글라스 재료인 것을 특징으로 하는 세라믹 기판.
- 제 1 항 또는 제 2 항에 있어서,상기 글라스 층은 상기 세라믹 기판 본체의 한쪽 주면에 형성된 상기 도체부의 외주를 피복하도록 형성되어 있는 것을 특징으로 하는 세라믹 기판.
- 제 1 항 ~ 제 3 항 중 어느 한 항에 있어서,상기 제 2 글라스 층은 상기 제 1 글라스 층 전체를 피복하도록 형성되어 있는 것을 특징으로 하는 세라믹 기판.
- 제 1 항 ~ 제 4 항 중 어느 한 항에 있어서,상기 제 1 글라스 재료는 붕규산계 글라스를 포함하는 것이며, 상기 제 2 글라스 재료는 Si, B, 및 Zn을 주성분으로 하는 글라스를 포함하는 것을 특징으로 하는 세라믹 기판.
- 제 1 항 ~ 제 5 항 중 어느 한 항에 있어서,상기 도체부의 표면에 도금막이 형성되어 있는 것을 특징으로 하는 세라믹 기판.
- 제 1 항 ~ 제 6 항 중 어느 한 항에 기재된 세라믹 기판의 상기 도체부는 땜납을 통해 실장 기판에 접속되어 있는 것을 특징으로 하는 전자 장치.
- 복수의 세라믹 그린 시트가 적층된 적층체의 한쪽 주면에 도체부가 형성되고, 상기 도체부의 일부로부터 상기 적층체의 상기 한쪽 주면에 걸치도록 제 1 글라스 재료로 이루어진 제 1 글라스 층이 형성되고, 상기 제 1 글라스 층 상에 상기 제 1 글라스 층을 구성하는 상기 제 1 글라스 재료와는 상이한 제 2 글라스 재료로 이루어진 제 2 글라스 층이 형성된 구조를 갖고, 상기 제 1 글라스 재료는 상기 제 2 글라스 재료보다도 상기 세라믹 기판 본체와의 밀착성이 양호한 재료로 이루어지고, 상기 제 2 글라스 재료는 상기 제 1 글라스 재료보다도 도금 내성이 우수한 재료로 이루어지는 미소성의 세라믹 적층체를 형성하는 공정과,상기 미소성의 세라믹 적층체를 소성하는 공정을 구비하는 것을 특징으로 하는 세라믹 기판의 제조 방법.
- 제 8 항에 있어서,상기 도체부의 외주를 피복하도록 제 1 글라스 층을 형성하는 것을 특징으로 하는 세라믹 기판의 제조 방법.
- 제 8 항 또는 제 9 항에 있어서,상기 제 1 글라스 층 전체를 피복하도록 상기 제 2 글라스 층을 형성하는 것을 특징으로 하는 세라믹 기판의 제조 방법.
- 제 8 항 ~ 제 10 항 중 어느 한 항에 있어서,상기 세라믹 적층체를 소성하는 공정에 있어서, 상기 세라믹 적층체의 적어도 한쪽 주면 상에 상기 세라믹 적층체를 소성하는 온도에서는 실질적으로 소결되지 않은 세라믹 재료로 이루어진 수축 억제용 그린 시트를 배치한 상태에서 상기 세라믹 적층체의 소성을 행하는 것을 특징으로 하는 세라믹 기판의 제조 방법.
- 제 8 항 ~ 제 11 항 중 어느 한 항에 있어서,상기 세라믹 적층체를 소성하는 공정 후에 상기 도체부의 표면에 도금막을 형성하는 공정을 구비하는 것을 특징으로 하는 세라믹 기판의 제조 방법.
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