KR20070049278A - 배선, 이를 포함하는 박막 트랜지스터 기판과 그 제조 방법 - Google Patents

배선, 이를 포함하는 박막 트랜지스터 기판과 그 제조 방법 Download PDF

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Publication number
KR20070049278A
KR20070049278A KR1020050106274A KR20050106274A KR20070049278A KR 20070049278 A KR20070049278 A KR 20070049278A KR 1020050106274 A KR1020050106274 A KR 1020050106274A KR 20050106274 A KR20050106274 A KR 20050106274A KR 20070049278 A KR20070049278 A KR 20070049278A
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KR
South Korea
Prior art keywords
film
copper
wiring
interlayer
alloy
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Ceased
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KR1020050106274A
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English (en)
Korean (ko)
Inventor
이제훈
김시열
김도현
김병범
정창오
이준영
배양호
강성욱
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삼성전자주식회사
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Priority to KR1020050106274A priority Critical patent/KR20070049278A/ko
Priority to JP2006276945A priority patent/JP2007134691A/ja
Priority to CNA2006101385505A priority patent/CN1964067A/zh
Priority to TW095141362A priority patent/TW200727491A/zh
Priority to US11/595,395 priority patent/US20070122649A1/en
Publication of KR20070049278A publication Critical patent/KR20070049278A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • H10D30/6739—Conductor-insulator-semiconductor electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743—Silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441—Interconnections, e.g. scanning lines
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G02F1/13629—Multilayer wirings
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G02F1/136295—Materials; Compositions; Manufacture processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12903—Cu-base component

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Thin Film Transistor (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
KR1020050106274A 2005-11-08 2005-11-08 배선, 이를 포함하는 박막 트랜지스터 기판과 그 제조 방법 Ceased KR20070049278A (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020050106274A KR20070049278A (ko) 2005-11-08 2005-11-08 배선, 이를 포함하는 박막 트랜지스터 기판과 그 제조 방법
JP2006276945A JP2007134691A (ja) 2005-11-08 2006-10-10 配線、これを含む薄膜トランジスタ基板、及びその製造方法
CNA2006101385505A CN1964067A (zh) 2005-11-08 2006-11-07 用于显示器的薄膜晶体管基板
TW095141362A TW200727491A (en) 2005-11-08 2006-11-08 Thin film transistor substrate for display
US11/595,395 US20070122649A1 (en) 2005-11-08 2006-11-08 Thin film transistor substrate for display

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050106274A KR20070049278A (ko) 2005-11-08 2005-11-08 배선, 이를 포함하는 박막 트랜지스터 기판과 그 제조 방법

Publications (1)

Publication Number Publication Date
KR20070049278A true KR20070049278A (ko) 2007-05-11

Family

ID=38083037

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050106274A Ceased KR20070049278A (ko) 2005-11-08 2005-11-08 배선, 이를 포함하는 박막 트랜지스터 기판과 그 제조 방법

Country Status (5)

Country Link
US (1) US20070122649A1 (enExample)
JP (1) JP2007134691A (enExample)
KR (1) KR20070049278A (enExample)
CN (1) CN1964067A (enExample)
TW (1) TW200727491A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101102891B1 (ko) * 2007-09-04 2012-01-10 삼성전자주식회사 배선구조 및 이를 이용한 박막 트랜지스터
KR20130015170A (ko) * 2011-08-02 2013-02-13 삼성디스플레이 주식회사 박막 트랜지스터 표시판 및 그 제조 방법

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KR101199533B1 (ko) * 2005-06-22 2012-11-09 삼성디스플레이 주식회사 식각액, 이를 이용하는 배선 형성 방법 및 박막 트랜지스터기판의 제조 방법
US7837929B2 (en) * 2005-10-20 2010-11-23 H.C. Starck Inc. Methods of making molybdenum titanium sputtering plates and targets
JP5214125B2 (ja) * 2006-09-11 2013-06-19 三星ディスプレイ株式會社 配線構造と配線形成方法及び薄膜トランジスタ基板とその製造方法
JP5412026B2 (ja) * 2006-09-11 2014-02-12 三星ディスプレイ株式會社 配線構造と配線形成方法及び薄膜トランジスタ基板とその製造方法
KR101326128B1 (ko) * 2006-09-29 2013-11-06 삼성디스플레이 주식회사 표시 장치용 배선, 식각액, 박막 트랜지스터 표시판 및 그제조 방법
JP5510769B2 (ja) * 2007-08-24 2014-06-04 日立金属株式会社 Ｃｕ系配線膜の成膜方法
TWI360708B (en) 2007-12-17 2012-03-21 Au Optronics Corp Pixel structure, display panel, elecro-optical app
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CN101217151B (zh) * 2008-01-03 2011-12-07 友达光电股份有限公司 像素结构、显示面板、光电装置及其制造方法
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KR20130043063A (ko) 2011-10-19 2013-04-29 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
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KR102164308B1 (ko) * 2013-12-30 2020-10-12 엘지디스플레이 주식회사 박막 트랜지스터 기판 및 그를 이용한 액정표시장치
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101102891B1 (ko) * 2007-09-04 2012-01-10 삼성전자주식회사 배선구조 및 이를 이용한 박막 트랜지스터
KR20130015170A (ko) * 2011-08-02 2013-02-13 삼성디스플레이 주식회사 박막 트랜지스터 표시판 및 그 제조 방법

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Publication number Publication date
US20070122649A1 (en) 2007-05-31
JP2007134691A (ja) 2007-05-31
TW200727491A (en) 2007-07-16
CN1964067A (zh) 2007-05-16

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