KR20060095517A - 진동형 자이로센서 및 진동 소자의 제조 방법 - Google Patents

진동형 자이로센서 및 진동 소자의 제조 방법 Download PDF

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Publication number
KR20060095517A
KR20060095517A KR20060019298A KR20060019298A KR20060095517A KR 20060095517 A KR20060095517 A KR 20060095517A KR 20060019298 A KR20060019298 A KR 20060019298A KR 20060019298 A KR20060019298 A KR 20060019298A KR 20060095517 A KR20060095517 A KR 20060095517A
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KR
South Korea
Prior art keywords
vibrator
layer
vibration
gyro sensor
electrode layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR20060019298A
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English (en)
Korean (ko)
Inventor
데루오 이나구마
준이찌 혼다
고지 스즈끼
가즈오 다까하시
에이지 나까시오
Original Assignee
소니 가부시끼 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 소니 가부시끼 가이샤 filed Critical 소니 가부시끼 가이샤
Publication of KR20060095517A publication Critical patent/KR20060095517A/ko
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V15/00—Protecting lighting devices from damage
    • F21V15/01—Housings, e.g. material or assembling of housing parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V1/00—Shades for light sources, i.e. lampshades for table, floor, wall or ceiling lamps
    • F21V1/14—Covers for frames; Frameless shades
    • F21V1/16—Covers for frames; Frameless shades characterised by the material
    • F21V1/22—Covers for frames; Frameless shades characterised by the material the material being plastics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V1/00—Shades for light sources, i.e. lampshades for table, floor, wall or ceiling lamps
    • F21V1/14—Covers for frames; Frameless shades
    • F21V1/16—Covers for frames; Frameless shades characterised by the material
    • F21V1/24—Covers for frames; Frameless shades characterised by the material the material being metal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
    • F21V17/10—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages characterised by specific fastening means or way of fastening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V19/00—Fastening of light sources or lamp holders
    • F21V19/0075—Fastening of light sources or lamp holders of tubular light sources, e.g. ring-shaped fluorescent light sources
    • F21V19/008—Fastening of light sources or lamp holders of tubular light sources, e.g. ring-shaped fluorescent light sources of straight tubular light sources, e.g. straight fluorescent tubes, soffit lamps
    • F21V19/0085—Fastening of light sources or lamp holders of tubular light sources, e.g. ring-shaped fluorescent light sources of straight tubular light sources, e.g. straight fluorescent tubes, soffit lamps at least one conductive element acting as a support means, e.g. resilient contact blades, piston-like contact
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0285—Vibration sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
KR20060019298A 2005-02-28 2006-02-28 진동형 자이로센서 및 진동 소자의 제조 방법 Ceased KR20060095517A (ko)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00054844 2005-02-28
JP2005054844 2005-02-28
JP2005080473 2005-03-18
JPJP-P-2005-00080473 2005-03-18
JPJP-P-2005-00176870 2005-06-16
JPJP-P-2005-00176869 2005-06-16
JP2005176869 2005-06-16
JP2005176870 2005-06-16
JP2005374324A JP5135683B2 (ja) 2005-02-28 2005-12-27 振動型ジャイロセンサ及び振動素子の製造方法
JPJP-P-2005-00374324 2005-12-27

Publications (1)

Publication Number Publication Date
KR20060095517A true KR20060095517A (ko) 2006-08-31

Family

ID=36581200

Family Applications (1)

Application Number Title Priority Date Filing Date
KR20060019298A Ceased KR20060095517A (ko) 2005-02-28 2006-02-28 진동형 자이로센서 및 진동 소자의 제조 방법

Country Status (5)

Country Link
US (1) US7723901B2 (https=)
EP (1) EP1696206B1 (https=)
JP (1) JP5135683B2 (https=)
KR (1) KR20060095517A (https=)
CN (1) CN1831478B (https=)

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JP5328007B2 (ja) * 2007-03-30 2013-10-30 パナソニック株式会社 圧電体素子及びその製造方法
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US20100100083A1 (en) * 2008-10-22 2010-04-22 Scott Lundahl Method of treatment for dermatologic disorders
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JP5206709B2 (ja) * 2009-03-18 2013-06-12 株式会社豊田中央研究所 可動体を備えている装置
US20110001394A1 (en) * 2009-07-02 2011-01-06 Eta Sa Piezoelectric thin-film tuning fork resonator
CN102668726B (zh) * 2009-12-24 2015-07-01 古河电气工业株式会社 注塑成型基板与实装零件的安装结构
JP5506035B2 (ja) * 2010-02-23 2014-05-28 富士フイルム株式会社 アクチュエータの製造方法
JP4905574B2 (ja) * 2010-03-25 2012-03-28 株式会社豊田中央研究所 可動部分を備えている積層構造体
CA3116787C (en) 2010-06-16 2023-07-11 Mueller International, Llc Infrastructure monitoring devices, systems, and methods
JP5765087B2 (ja) * 2011-06-27 2015-08-19 セイコーエプソン株式会社 屈曲振動片、その製造方法及び電子機器
US9772250B2 (en) 2011-08-12 2017-09-26 Mueller International, Llc Leak detector and sensor
JP5982896B2 (ja) * 2012-03-13 2016-08-31 セイコーエプソン株式会社 センサー素子、センサーデバイスおよび電子機器
CN103369423A (zh) * 2013-07-25 2013-10-23 瑞声科技（南京）有限公司 入耳式耳机
DE102014101372B4 (de) * 2014-02-04 2015-10-08 Vega Grieshaber Kg Vibrationssensor mit geklebtem Antrieb
JP6519995B2 (ja) * 2014-06-30 2019-05-29 セイコーエプソン株式会社 振動素子、振動素子の製造方法、振動子、ジャイロセンサー、電子機器および移動体
JP6507565B2 (ja) * 2014-10-28 2019-05-08 セイコーエプソン株式会社 電子デバイス、電子機器および移動体
US10305178B2 (en) 2016-02-12 2019-05-28 Mueller International, Llc Nozzle cap multi-band antenna assembly
US10283857B2 (en) 2016-02-12 2019-05-07 Mueller International, Llc Nozzle cap multi-band antenna assembly
JP6759696B2 (ja) * 2016-05-13 2020-09-23 Tdk株式会社 レンズ駆動装置
JP6819216B2 (ja) * 2016-10-26 2021-01-27 セイコーエプソン株式会社 ジャイロセンサー、ジャイロセンサーの製造方法、電子機器および移動体
DE102017206388A1 (de) * 2017-04-13 2018-10-18 Robert Bosch Gmbh Verfahren zum Schutz einer MEMS-Einheit vor Infrarot-Untersuchungen sowie MEMS-Einheit
US10859462B2 (en) 2018-09-04 2020-12-08 Mueller International, Llc Hydrant cap leak detector with oriented sensor
US11342656B2 (en) 2018-12-28 2022-05-24 Mueller International, Llc Nozzle cap encapsulated antenna system
US11473993B2 (en) 2019-05-31 2022-10-18 Mueller International, Llc Hydrant nozzle cap
US11542690B2 (en) 2020-05-14 2023-01-03 Mueller International, Llc Hydrant nozzle cap adapter
CN114743935B (zh) * 2022-04-11 2024-08-30 中国工程物理研究院电子工程研究所 一种改善大功率器件封装互连层缺陷的方法
US12578245B2 (en) 2022-10-28 2026-03-17 Mueller International, Llc Self-leveling sensor assembly
DE102023202097A1 (de) * 2023-03-09 2024-09-12 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Vorrichtung zum Herstellen eines MEMS-Bauelementes

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Also Published As

Publication number Publication date
JP5135683B2 (ja) 2013-02-06
CN1831478A (zh) 2006-09-13
US20060202591A1 (en) 2006-09-14
JP2007024861A (ja) 2007-02-01
CN1831478B (zh) 2013-06-12
US7723901B2 (en) 2010-05-25
EP1696206A1 (en) 2006-08-30
EP1696206B1 (en) 2011-10-26

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