KR20060086880A - 반도체 집적 회로 - Google Patents
반도체 집적 회로 Download PDFInfo
- Publication number
- KR20060086880A KR20060086880A KR1020060008212A KR20060008212A KR20060086880A KR 20060086880 A KR20060086880 A KR 20060086880A KR 1020060008212 A KR1020060008212 A KR 1020060008212A KR 20060008212 A KR20060008212 A KR 20060008212A KR 20060086880 A KR20060086880 A KR 20060086880A
- Authority
- KR
- South Korea
- Prior art keywords
- metal
- integrated circuit
- semiconductor integrated
- wiring
- bit lines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 86
- 239000000872 buffer Substances 0.000 claims abstract description 50
- 229910052751 metal Inorganic materials 0.000 claims description 88
- 239000002184 metal Substances 0.000 claims description 88
- 238000000034 method Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 12
- 239000012212 insulator Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 24
- 239000011229 interlayer Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 16
- 230000008859 change Effects 0.000 description 6
- 230000009467 reduction Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/10—Integrated device layouts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/90—Masterslice integrated circuits
- H10D84/998—Input and output buffer/driver structures
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Semiconductor Integrated Circuits (AREA)
- Static Random-Access Memory (AREA)
- Microcomputers (AREA)
- Dram (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005020111A JP4693428B2 (ja) | 2005-01-27 | 2005-01-27 | 半導体集積回路 |
| JPJP-P-2005-00020111 | 2005-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20060086880A true KR20060086880A (ko) | 2006-08-01 |
Family
ID=36695849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020060008212A Ceased KR20060086880A (ko) | 2005-01-27 | 2006-01-26 | 반도체 집적 회로 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7358548B2 (enExample) |
| JP (1) | JP4693428B2 (enExample) |
| KR (1) | KR20060086880A (enExample) |
| CN (1) | CN100536133C (enExample) |
| TW (1) | TW200644161A (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4693428B2 (ja) * | 2005-01-27 | 2011-06-01 | ルネサスエレクトロニクス株式会社 | 半導体集積回路 |
| TWI381385B (zh) * | 2007-05-04 | 2013-01-01 | Macronix Int Co Ltd | 具有嵌入式多類型記憶體的記憶體結構 |
| KR100798896B1 (ko) * | 2007-06-07 | 2008-01-29 | 주식회사 실리콘웍스 | 반도체 칩의 패드 배치 구조 |
| US8138787B2 (en) * | 2008-07-13 | 2012-03-20 | Altera Corporation | Apparatus and method for input/output module that optimizes frequency performance in a circuit |
| JP5419431B2 (ja) * | 2008-11-28 | 2014-02-19 | ルネサスエレクトロニクス株式会社 | 半導体記憶装置 |
| JP5503208B2 (ja) | 2009-07-24 | 2014-05-28 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP2017135308A (ja) * | 2016-01-29 | 2017-08-03 | セイコーエプソン株式会社 | 半導体集積回路装置及びそのレイアウト設計方法、並びに、電子機器 |
| US11367478B2 (en) | 2020-01-14 | 2022-06-21 | Changxin Memory Technologies, Inc. | Integrated circuit structure and memory |
| WO2021143050A1 (zh) * | 2020-01-14 | 2021-07-22 | 长鑫存储技术有限公司 | 集成电路结构和存储器 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4454591A (en) * | 1980-05-29 | 1984-06-12 | Texas Instruments Incorporated | Interface system for bus line control |
| US5300796A (en) * | 1988-06-29 | 1994-04-05 | Hitachi, Ltd. | Semiconductor device having an internal cell array region and a peripheral region surrounding the internal cell array for providing input/output basic cells |
| JPH08125130A (ja) | 1994-10-26 | 1996-05-17 | Matsushita Electric Ind Co Ltd | 半導体集積回路 |
| JPH09232437A (ja) * | 1996-02-27 | 1997-09-05 | Hitachi Ltd | 半導体集積回路装置およびそれを用いたコンピュータシステム |
| JP3380465B2 (ja) * | 1998-06-29 | 2003-02-24 | 松下電器産業株式会社 | 半導体装置 |
| JP3374967B2 (ja) * | 1998-10-26 | 2003-02-10 | 日本電気株式会社 | 半導体集積回路 |
| JP2002050742A (ja) * | 2000-07-31 | 2002-02-15 | Nec Corp | 半導体装置およびその製造方法 |
| JP4904619B2 (ja) * | 2000-11-29 | 2012-03-28 | 富士通セミコンダクター株式会社 | 半導体装置 |
| US6502231B1 (en) * | 2001-05-31 | 2002-12-31 | Applied Micro Circuits Corporation | Integrated circuit template cell system and method |
| JP2003158195A (ja) * | 2001-11-20 | 2003-05-30 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
| DE10220923B4 (de) * | 2002-05-10 | 2006-10-26 | Infineon Technologies Ag | Verfahren zur Herstellung eines nicht-flüchtigen Flash-Halbleiterspeichers |
| US6735108B2 (en) * | 2002-07-08 | 2004-05-11 | Micron Technology, Inc. | ROM embedded DRAM with anti-fuse programming |
| US7003750B2 (en) * | 2002-08-01 | 2006-02-21 | Sun Microsystems, Inc. | Topology based wire shielding generation |
| JP4190865B2 (ja) * | 2002-11-11 | 2008-12-03 | Necエレクトロニクス株式会社 | 半導体メモリ |
| JP4624660B2 (ja) * | 2003-10-09 | 2011-02-02 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US7006370B1 (en) * | 2003-11-18 | 2006-02-28 | Lsi Logic Corporation | Memory cell architecture |
| JP4693428B2 (ja) * | 2005-01-27 | 2011-06-01 | ルネサスエレクトロニクス株式会社 | 半導体集積回路 |
-
2005
- 2005-01-27 JP JP2005020111A patent/JP4693428B2/ja not_active Expired - Fee Related
-
2006
- 2006-01-10 US US11/328,194 patent/US7358548B2/en not_active Expired - Fee Related
- 2006-01-10 TW TW095100837A patent/TW200644161A/zh unknown
- 2006-01-26 KR KR1020060008212A patent/KR20060086880A/ko not_active Ceased
- 2006-01-27 CN CNB2006100024302A patent/CN100536133C/zh not_active Expired - Fee Related
-
2008
- 2008-02-25 US US12/071,624 patent/US20080149966A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US20060163615A1 (en) | 2006-07-27 |
| JP2006210607A (ja) | 2006-08-10 |
| CN1819196A (zh) | 2006-08-16 |
| US7358548B2 (en) | 2008-04-15 |
| CN100536133C (zh) | 2009-09-02 |
| JP4693428B2 (ja) | 2011-06-01 |
| US20080149966A1 (en) | 2008-06-26 |
| TW200644161A (en) | 2006-12-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20060126 |
|
| PG1501 | Laying open of application | ||
| N231 | Notification of change of applicant | ||
| PN2301 | Change of applicant |
Patent event date: 20100916 Comment text: Notification of Change of Applicant Patent event code: PN23011R01D |
|
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20101129 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 20060126 Comment text: Patent Application |
|
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20111117 Patent event code: PE09021S01D |
|
| E601 | Decision to refuse application | ||
| PE0601 | Decision on rejection of patent |
Patent event date: 20120229 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 20111117 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |