KR20050118100A - 소자 전사 방법 및 표시장치 - Google Patents
소자 전사 방법 및 표시장치 Download PDFInfo
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- KR20050118100A KR20050118100A KR1020047016234A KR20047016234A KR20050118100A KR 20050118100 A KR20050118100 A KR 20050118100A KR 1020047016234 A KR1020047016234 A KR 1020047016234A KR 20047016234 A KR20047016234 A KR 20047016234A KR 20050118100 A KR20050118100 A KR 20050118100A
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- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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Abstract
Description
Claims (23)
- 제 1 기판 위에 배열된 소자를, 제 2 기판 위에 형성된 점착층(粘着層)에 매입(埋入)하는 공정과,상기 제 1 기판으로부터 상기 소자를 박리(剝離)하여, 상기 소자를 상기 점착층에 매입한 상태에서 보존유지하는 공정을 가지는 것을 특징으로 하는 소자 전사 방법.
- 제 1항에 있어서,상기 점착층에 상기 소자를 매입하여 보존유지한 후에, 상기 점착층을 경화 (硬化)하는 공정을 가지는 것을 특징으로 하는 소자 전사 방법.
- 제 2항에 있어서,상기 점착층을 경화한 후에, 상기 점착층 위에 제 1 전기 배선을 형성하는 공정을 가지는 것을 특징으로 하는 소자 전사 방법.
- 제 3항에 있어서,상기 점착층 위에 상기 제 1 전기 배선을 형성한 후에, 상기 점착층의 상기 제 1 전기 배선이 형성된 면에 제 3 기판을 첩부(貼付)하는 공정을 가지는 것을 특징으로 하는 소자 전사 방법.
- 제 4항에 있어서,상기 점착층의 상기 제 1 전기 배선이 형성된 면에 제 3 기판을 첩부한 후에, 상기 제 2 기판과 상기 점착층을 박리하는 공정을 가지는 것을 특징으로 하는 소자 전사 방법.
- 제 5항에 있어서,상기 제 2 기판과 상기 점착층을 박리한 후에, 상기 점착층에 상기 소자까지 도달하는 개구부를 형성하는 것을 특징으로 하는 소자 전사 방법.
- 제 6항에 있어서,상기 개구부에 도전성 재료를 충전함과 동시에, 상기 점착층 위에 제 2 전기 배선을 형성하는 공정을 가지는 것을 특징으로 하는 소자 전사 방법.
- 제 1항에 있어서,상기 소자를 상기 점착층에 매입하기 전에, 상기 제 1 기판 위에 형성된 가(假)접착층에 상기 소자를 접촉시키고, 상기 소자를 상기 가접착층에 가접착하는 것으로 상기 제 1 기판 위에 상기 소자를 배열하는 공정을 더 가지는 것을 특징으로 하는 소자 전사 방법.
- 제 8항에 있어서,상기 제 1 기판 위에 형성된 상기 가접착층의 점착력보다도, 상기 제 2 기판 위에 형성된 상기 점착층의 점착력이 큰 것을 특징으로 하는 소자 전사 방법.
- 제 9항에 있어서,상기 점착층 또는 상기 가접착층의 점착력을 변화시키고, 상기 가접착층의 점착력보다도 상기 점착층의 점착력을 크게 하는 것을 특징으로 하는 소자 전사 방법.
- 제 1항에 있어서,상기 점착층에 대한 매입은, 상기 소자를 부분적으로 매몰시키는 정도로 행하는 것을 특징으로 하는 소자 전사 방법.
- 제 1항에 있어서,상기 점착층은 절연성 재료에 의해 형성되는 것을 특징으로 하는 소자 전사 방법.
- 제 2 기판 위에 형성된 점착층에 한 쪽 소자가 매입된 상태에서, 제 1 기판 위에 배열된 다른 쪽 소자를 상기 점착층에 더 매입하는 공정과,상기 제 1 기판으로부터 상기 다른 쪽 소자를 박리하여, 상기 다른 쪽 소자를 상기 점착층에 매입한 상태에서 보존유지하는 공정을 가지는 것을 특징으로 하는 소자 전사 방법.
- 제 13항에 있어서,상기 한 쪽 소자와 상기 다른 쪽 소자는 다른 특성을 가지는 소자인 것을 특징으로 하는 소자 전사 방법.
- 제 13항에 있어서,상기 기판 위의 다른 영역에 상기 한 쪽 소자와 상기 다른 쪽 소자를 매입 하여 보존유지하는 것을 특징으로 하는 소자 전사 방법.
- 제 1 기판 위에 배열된 소자를 제 2 기판 위에 형성된 점착층에 매입하고,상기 제 1 기판으로부터 상기 소자를 박리하여, 상기 소자를 상기 점착층에 매입한 상태에서 보존유지시켜 상기 점착층을 경화하고,상기 점착층 위에 제 1 전기 배선을 형성하고, 상기 점착층의 상기 제 1 전기 배선이 형성된 면에 제 3 기판을 첩부하고, 상기 제 2 기판과 상기 점착층을 박리하며,상기 점착층에 상기 소자까지 도달하는 개구부를 형성하여, 상기 개구부에 도전성 재료를 충전함과 동시에, 상기 점착층 위에 제 2 전기 배선을 형성하여 얻어지는 것을 특징으로 하는 표시장치.
- 제 16항에 있어서,상기 제 1 전기 배선과 상기 제 2 전기 배선에 의해 상기 소자에 전압을 인가하여 단순 매트릭스 구동에 의해 표시를 행하는 것을 특징으로 하는 표시장치.
- 제 1 기판 위에 배열된 한 쪽 소자를 제 2 기판 위에 형성된 점착층에 매입하고, 상기 제 1 기판으로부터 상기 한 쪽 소자를 박리하여 상기 한 쪽 소자를 상기 점착층에 매입한 상태에서 보존유지하고,상기 점착층에 한 쪽 소자가 매입된 상태에서, 제 1 기판 위에 배열된 다른 쪽 소자를 상기 점착층에 더 매입하고, 상기 제 1 기판으로부터 상기 다른 쪽 소자를 박리하여 상기 다른 쪽 소자를 상기 점착층에 매입한 상태에서 보존유지하고,상기 한 쪽 소자 및 상기 다른 쪽 소자를 상기 점착층에 매입한 상태에서 보존유지시켜 상기 점착층을 경화하고,상기 점착층 위에 제 1 전기 배선을 형성하고, 상기 점착층의 상기 제 1 전기 배선이 형성된 면에 제 3 기판을 첩부하며, 상기 제 2 기판과 상기 점착층을 박리하고,상기 점착층에 상기 한 쪽 소자 또는 상기 다른 쪽 소자까지 도달하는 개구부를 형성하여, 상기 개구부에 도전성 재료를 충전함과 동시에, 상기 점착층 위에 제 2 전기 배선을 형성하여 얻어지는 것을 특징으로 하는 표시장치.
- 제 18항에 있어서,상기 한 쪽 소자와 상기 다른 쪽 소자는 다른 특성을 가지는 소자인 것을 특징으로 하는 표시장치.
- 제 18항에 있어서,상기 제 2 기판에서의 다른 영역에 상기 한 쪽 소자와 상기 다른 쪽 소자를 매입하여 보존유지하는 것을 특징으로 하는 표시장치.
- 제 18항에 있어서,상기 제 1 전기 배선과 상기 제 2 전기 배선에 의해 상기 한 쪽 소자 또는 상기 다른 쪽 소자에 전압을 인가하여 단순 매트릭스 구동에 의해 표시를 행하는 표시장치.
- 제 18항에 있어서,상기 한 쪽 소자 또는 상기 다른 쪽 소자가 표시 소자 또는 구동 회로 소자인 것을 특징으로 하는 표시장치.
- 제 22항에 있어서,상기 구동 회로 소자에 의해 상기 표시 소자에 전압을 인가하여 액티브 매트릭스 구동에 의해 표시를 행하는 것을 특징으로 하는 표시장치.
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WO2014083974A1 (ja) * | 2012-11-27 | 2014-06-05 | 日東電工株式会社 | 半導体装置の製造方法 |
KR20190121393A (ko) * | 2017-03-16 | 2019-10-25 | 코닝 인코포레이티드 | 마이크로-led들의 대량 전달을 위한 방법 및 프로세스 |
KR20210089555A (ko) * | 2020-01-08 | 2021-07-16 | 웨이브로드 주식회사 | 반도체 발광소자 칩을 전사하는 방법 |
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TW200426895A (en) | 2004-12-01 |
KR100982964B1 (ko) | 2010-09-17 |
US20050233504A1 (en) | 2005-10-20 |
JP4082242B2 (ja) | 2008-04-30 |
CN1698077A (zh) | 2005-11-16 |
US20080081400A1 (en) | 2008-04-03 |
TWI246107B (en) | 2005-12-21 |
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