KR102901557B1 - 배선 회로 기판의 제조 방법 - Google Patents

배선 회로 기판의 제조 방법

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Publication number
KR102901557B1
KR102901557B1 KR1020227018620A KR20227018620A KR102901557B1 KR 102901557 B1 KR102901557 B1 KR 102901557B1 KR 1020227018620 A KR1020227018620 A KR 1020227018620A KR 20227018620 A KR20227018620 A KR 20227018620A KR 102901557 B1 KR102901557 B1 KR 102901557B1
Authority
KR
South Korea
Prior art keywords
wiring
resist
forming
thickness direction
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020227018620A
Other languages
English (en)
Korean (ko)
Other versions
KR20220113935A (ko
Inventor
마사키 이토
하야토 다카쿠라
겐야 다키모토
Original Assignee
닛토덴코 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 닛토덴코 가부시키가이샤 filed Critical 닛토덴코 가부시키가이샤
Publication of KR20220113935A publication Critical patent/KR20220113935A/ko
Application granted granted Critical
Publication of KR102901557B1 publication Critical patent/KR102901557B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
    • H05K3/184—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061—Etching masks
    • H05K3/064—Photoresists
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/094—Multilayer resist systems, e.g. planarising layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0338—Layered conductor, e.g. layered metal substrate, layered finish layer or layered thin film adhesion layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0344—Electroless sublayer, e.g. Ni, Co, Cd or Ag; Transferred electroless sublayer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0347—Overplating, e.g. for reinforcing conductors or bumps; Plating over filled vias
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09736—Varying thickness of a single conductor; Conductors in the same plane having different thicknesses
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0562—Details of resist
    • H05K2203/058—Additional resists used for the same purpose but in different areas, i.e. not stacked
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/14—Related to the order of processing steps
    • H05K2203/1476—Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Structure Of Printed Boards (AREA)
KR1020227018620A 2019-12-10 2020-11-27 배선 회로 기판의 제조 방법 Active KR102901557B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019222680A JP7019657B2 (ja) 2019-12-10 2019-12-10 配線回路基板の製造方法
JPJP-P-2019-222680 2019-12-10
PCT/JP2020/044169 WO2021117501A1 (ja) 2019-12-10 2020-11-27 配線回路基板の製造方法

Publications (2)

Publication Number Publication Date
KR20220113935A KR20220113935A (ko) 2022-08-17
KR102901557B1 true KR102901557B1 (ko) 2025-12-17

Family

ID=76312732

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227018620A Active KR102901557B1 (ko) 2019-12-10 2020-11-27 배선 회로 기판의 제조 방법

Country Status (6)

Country Link
US (1) US20230007783A1 (https=)
JP (1) JP7019657B2 (https=)
KR (1) KR102901557B1 (https=)
CN (1) CN114788423A (https=)
TW (1) TWI886182B (https=)
WO (1) WO2021117501A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7387453B2 (ja) * 2020-01-10 2023-11-28 住友電気工業株式会社 フレキシブルプリント配線板及びその製造方法
US12016130B2 (en) * 2021-05-26 2024-06-18 Samsung Electro-Mechanics Co., Ltd. Method of manufacturing printed circuit board
JP2022185667A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
JP2022185675A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
JP2022185677A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
JP2022185676A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
JP2022185679A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
JP2022185671A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
JP2022185678A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
JP2022185672A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
JP2022185673A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
JP2022185674A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
JP2022185669A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
JP2022185670A (ja) * 2021-06-03 2022-12-15 株式会社三洋物産 遊技機
US20250151208A1 (en) * 2023-11-06 2025-05-08 Dell Products L.P. Systems and methods for optimizing metal weight of conductive layers of circuit board

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010067317A (ja) * 2008-09-11 2010-03-25 Dainippon Printing Co Ltd サスペンション用基板
US20170170111A1 (en) * 2015-12-15 2017-06-15 Intel IP Corporation Semiconductor package having a variable redistribution layer thickness
JP2018157051A (ja) * 2017-03-17 2018-10-04 三菱マテリアル株式会社 バンプ付き配線基板の製造方法
JP2018174188A (ja) 2017-03-31 2018-11-08 大日本印刷株式会社 導電基板およびその製造方法

Family Cites Families (15)

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Publication number Priority date Publication date Assignee Title
US4159222A (en) * 1977-01-11 1979-06-26 Pactel Corporation Method of manufacturing high density fine line printed circuitry
JPH0832244A (ja) * 1994-07-12 1996-02-02 Toshiba Corp 多層配線基板
JP2806370B2 (ja) * 1996-07-16 1998-09-30 日本電気株式会社 パターン形成方法
JP2001007456A (ja) * 1999-06-17 2001-01-12 Toshiba Corp 配線回路基板
JP2002111174A (ja) * 2000-09-27 2002-04-12 Nitto Denko Corp 配線回路基板の製造方法
JP4268434B2 (ja) * 2003-04-09 2009-05-27 大日本印刷株式会社 配線基板の製造方法
JP4034772B2 (ja) * 2004-09-16 2008-01-16 Ｔｄｋ株式会社 多層基板及びその製造方法
JP2010171170A (ja) * 2009-01-22 2010-08-05 Hitachi Cable Ltd 銅回路配線基板およびその製造方法
JP5010669B2 (ja) * 2009-12-07 2012-08-29 パナソニック株式会社 配線基板及びその製造方法
KR101319808B1 (ko) * 2012-02-24 2013-10-17 삼성전기주식회사 경연성 인쇄회로기판 제조 방법
JP2016186986A (ja) * 2015-03-27 2016-10-27 株式会社フジクラ プリント配線板及びプリント配線板の製造方法
US9653406B2 (en) * 2015-04-16 2017-05-16 Taiwan Semiconductor Manufacturing Company, Ltd. Conductive traces in semiconductor devices and methods of forming same
WO2017011658A2 (en) * 2015-07-14 2017-01-19 Conocophillips Company Enhanced oil recovery response prediction
JP6778585B2 (ja) * 2016-11-02 2020-11-04 日東電工株式会社 配線回路基板およびその製造方法
JP7085328B2 (ja) * 2017-09-29 2022-06-16 日東電工株式会社 配線回路基板、その製造方法および撮像装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010067317A (ja) * 2008-09-11 2010-03-25 Dainippon Printing Co Ltd サスペンション用基板
US20170170111A1 (en) * 2015-12-15 2017-06-15 Intel IP Corporation Semiconductor package having a variable redistribution layer thickness
JP2018157051A (ja) * 2017-03-17 2018-10-04 三菱マテリアル株式会社 バンプ付き配線基板の製造方法
JP2018174188A (ja) 2017-03-31 2018-11-08 大日本印刷株式会社 導電基板およびその製造方法

Also Published As

Publication number Publication date
JP7019657B2 (ja) 2022-02-15
TW202137836A (zh) 2021-10-01
TWI886182B (zh) 2025-06-11
CN114788423A (zh) 2022-07-22
KR20220113935A (ko) 2022-08-17
WO2021117501A1 (ja) 2021-06-17
JP2021093434A (ja) 2021-06-17
US20230007783A1 (en) 2023-01-05

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