KR102257213B1 - 마스크 및 마스크 어셈블리 - Google Patents

마스크 및 마스크 어셈블리 Download PDF

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Publication number
KR102257213B1
KR102257213B1 KR1020207001822A KR20207001822A KR102257213B1 KR 102257213 B1 KR102257213 B1 KR 102257213B1 KR 1020207001822 A KR1020207001822 A KR 1020207001822A KR 20207001822 A KR20207001822 A KR 20207001822A KR 102257213 B1 KR102257213 B1 KR 102257213B1
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sub
mask
groove
deposition
masks
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Korean (ko)
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KR20200013782A (ko
Inventor
진구 리
멍화 강
멍판 왕
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쿤산 고-비젼녹스 옵토-일렉트로닉스 씨오., 엘티디.
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Assigned to 쑤저우 고비젼녹스 이노베이션 테크놀로지 컴퍼니 리미티드 reassignment 쑤저우 고비젼녹스 이노베이션 테크놀로지 컴퍼니 리미티드 권리의 전부이전등록 Assignors: 쿤산 고-비젼녹스 옵토-일렉트로닉스 씨오., 엘티디.
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • H01L51/0011—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
KR1020207001822A 2018-05-14 2018-08-30 마스크 및 마스크 어셈블리 Active KR102257213B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201810454597.5A CN108642440B (zh) 2018-05-14 2018-05-14 掩膜板及掩膜组件
CN201810454597.5 2018-05-14
PCT/CN2018/103296 WO2019218536A1 (zh) 2018-05-14 2018-08-30 掩膜板及掩膜组件

Publications (2)

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KR20200013782A KR20200013782A (ko) 2020-02-07
KR102257213B1 true KR102257213B1 (ko) 2021-05-27

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US (1) US20210355572A1 (https=)
EP (1) EP3623495A4 (https=)
JP (1) JP7029477B2 (https=)
KR (1) KR102257213B1 (https=)
CN (1) CN108642440B (https=)
TW (1) TWI690107B (https=)
WO (1) WO2019218536A1 (https=)

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CN208266253U (zh) * 2018-05-14 2018-12-21 昆山国显光电有限公司 掩膜板
US11326245B2 (en) 2018-05-14 2022-05-10 Kunshan Go-Visionox Opto-Electronics Co., Ltd. Masks for fabrication of organic lighting-emitting diode devices
CN109207920B (zh) * 2018-11-12 2021-02-09 京东方科技集团股份有限公司 掩模版
CN110760791A (zh) * 2019-02-28 2020-02-07 云谷（固安）科技有限公司 掩膜板及掩膜组件
CN109943804A (zh) * 2019-03-28 2019-06-28 京东方科技集团股份有限公司 一种沉积掩膜板
CN110018610A (zh) * 2019-04-25 2019-07-16 武汉天马微电子有限公司 掩模板、显示面板、显示面板的制作方法和显示装置
CN110004407B (zh) * 2019-05-21 2021-03-02 京东方科技集团股份有限公司 掩膜版组件及其制备方法
CN110364639B (zh) * 2019-07-15 2022-03-22 云谷（固安）科技有限公司 显示面板及其制作方法、掩膜板
CN110331377B (zh) * 2019-07-24 2021-10-29 京东方科技集团股份有限公司 掩膜片及其制作方法、开口掩膜板及其使用方法、薄膜沉积设备
CN110423983B (zh) * 2019-08-30 2021-11-16 京东方科技集团股份有限公司 掩膜版
CN110699637B (zh) 2019-10-17 2021-03-23 昆山国显光电有限公司 掩膜版的制作方法、掩膜版和显示面板的制作方法
CN210916231U (zh) * 2019-10-18 2020-07-03 昆山国显光电有限公司 一种掩膜版
CN110629158B (zh) * 2019-10-31 2021-01-05 昆山国显光电有限公司 一种掩膜版
CN110846614B (zh) * 2019-11-21 2022-03-25 昆山国显光电有限公司 一种掩膜版和蒸镀系统
KR102927690B1 (ko) * 2020-01-21 2026-02-13 엘지이노텍 주식회사 Oled 화소 증착을 위한 금속 재질의 증착용 마스크
TWI749533B (zh) * 2020-04-23 2021-12-11 旭暉應用材料股份有限公司 金屬掩膜
CN113621913A (zh) * 2020-05-08 2021-11-09 上海和辉光电股份有限公司 金属掩膜板
CN111647846B (zh) * 2020-05-29 2022-02-22 昆山国显光电有限公司 支撑条及掩膜版
CN111549316B (zh) * 2020-06-22 2022-07-15 京东方科技集团股份有限公司 蒸镀用掩膜版
CN111809147B (zh) * 2020-08-17 2023-04-18 昆山国显光电有限公司 掩膜板及蒸镀装置
CN111926291A (zh) * 2020-08-31 2020-11-13 合肥维信诺科技有限公司 掩膜板及掩膜板组件
KR20220055538A (ko) * 2020-10-26 2022-05-04 삼성디스플레이 주식회사 마스크 어셈블리 및 마스크 어셈블리의 제작 방법
CN112662994B (zh) * 2020-12-04 2023-04-25 合肥维信诺科技有限公司 掩膜版及其制备方法
TWI757041B (zh) * 2021-01-08 2022-03-01 達運精密工業股份有限公司 遮罩
CN113215529B (zh) * 2021-04-30 2023-05-12 合肥维信诺科技有限公司 精密掩膜板和掩膜板组件
KR102827235B1 (ko) * 2021-06-14 2025-07-01 삼성디스플레이 주식회사 마스크 및 그 마스크의 제조 방법
CN113832431B (zh) * 2021-11-02 2025-01-07 京东方科技集团股份有限公司 掩膜板及掩膜板结构
CN114032499A (zh) * 2021-11-18 2022-02-11 昆山国显光电有限公司 精密掩膜板和掩膜板
CN114134460B (zh) * 2021-11-29 2023-06-06 昆山国显光电有限公司 掩膜板
CN114107897A (zh) * 2021-11-29 2022-03-01 合肥维信诺科技有限公司 掩膜板及掩膜组件
US20230374646A1 (en) * 2022-05-17 2023-11-23 Samsung Display Co., Ltd. Mask for depositing emission layer, method of manufacturing the mask, and display apparatus manufactured using the mask
CN114645246B (zh) * 2022-05-23 2022-10-21 浙江众凌科技有限公司 一种金属遮罩
CN115433900B (zh) * 2022-09-29 2024-02-20 昆山国显光电有限公司 掩膜板和蒸镀装置
CN115449747B (zh) * 2022-10-19 2024-02-13 云谷（固安）科技有限公司 精密掩模版及其制作方法
CN116657099A (zh) * 2023-05-31 2023-08-29 京东方科技集团股份有限公司 遮挡用金属掩膜板、张网组件、掩膜板以及显示面板
CN117926176A (zh) * 2024-01-03 2024-04-26 云谷（固安）科技有限公司 掩膜版及其制备方法、蒸镀设备
CN121109946B (zh) * 2025-11-06 2026-03-06 浙江众凌科技有限公司 一种掩膜版

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CN107994054A (zh) 2017-11-07 2018-05-04 上海天马有机发光显示技术有限公司 一种有机电致发光显示面板、其制作方法及显示装置

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CN108642440B (zh) 2019-09-17
JP2020523478A (ja) 2020-08-06
CN108642440A (zh) 2018-10-12
EP3623495A1 (en) 2020-03-18
TWI690107B (zh) 2020-04-01
TW201907600A (zh) 2019-02-16
WO2019218536A1 (zh) 2019-11-21
KR20200013782A (ko) 2020-02-07
EP3623495A4 (en) 2020-08-26
JP7029477B2 (ja) 2022-03-03
US20210355572A1 (en) 2021-11-18

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