KR101623695B1 - 기판 처리 장치, 및 기판 처리 방법 - Google Patents

기판 처리 장치, 및 기판 처리 방법 Download PDF

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Publication number
KR101623695B1
KR101623695B1 KR1020157036743A KR20157036743A KR101623695B1 KR 101623695 B1 KR101623695 B1 KR 101623695B1 KR 1020157036743 A KR1020157036743 A KR 1020157036743A KR 20157036743 A KR20157036743 A KR 20157036743A KR 101623695 B1 KR101623695 B1 KR 101623695B1
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KR
South Korea
Prior art keywords
substrate
sheet substrate
pattern
roller
axis direction
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KR1020157036743A
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English (en)
Korean (ko)
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KR20160006242A (ko
Inventor
마사카즈 호리
게이 나라
무네야스 요코타
Original Assignee
가부시키가이샤 니콘
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Publication of KR20160006242A publication Critical patent/KR20160006242A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H37/00—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
    • B65H23/188—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web
    • B65H23/1882—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web and controlling longitudinal register of web
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/24—Registering, tensioning, smoothing or guiding webs longitudinally by fluid action, e.g. to retard the running web
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
    • H01L51/50—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/13—Details of longitudinal profile
    • B65H2404/131—Details of longitudinal profile shape
    • B65H2404/1314—Details of longitudinal profile shape convex
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/10—Means using fluid made only for exhausting gaseous medium
    • B65H2406/11—Means using fluid made only for exhausting gaseous medium producing fluidised bed
    • B65H2406/111—Means using fluid made only for exhausting gaseous medium producing fluidised bed for handling material along a curved path, e.g. fluidised turning bar
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/10—Size; Dimensions
    • B65H2511/12—Width
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/50—Occurence
    • B65H2511/51—Presence
    • B65H2511/512—Marks, e.g. invisible to the human eye; Patterns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00—Sensing or detecting means
    • B65H2553/40—Sensing or detecting means using optical, e.g. photographic, elements
    • B65H2553/42—Cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2601/00—Problem to be solved or advantage achieved
    • B65H2601/20—Avoiding or preventing undesirable effects
    • B65H2601/25—Damages to handled material
    • B65H2601/254—Permanent deformation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/03—Image reproduction devices
    • B65H2801/15—Digital printing machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/61—Display device manufacture, e.g. liquid crystal displays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
  • Liquid Crystal (AREA)
  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Nonlinear Science (AREA)
  • Electroluminescent Light Sources (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
KR1020157036743A 2011-11-04 2012-09-27 기판 처리 장치, 및 기판 처리 방법 KR101623695B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011242788 2011-11-04
JPJP-P-2011-242788 2011-11-04
PCT/JP2012/074830 WO2013065429A1 (ja) 2011-11-04 2012-09-27 基板処理装置、及び基板処理方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020147014111A Division KR101623666B1 (ko) 2011-11-04 2012-09-27 기판 처리 장치, 및 기판 처리 방법

Publications (2)

Publication Number Publication Date
KR20160006242A KR20160006242A (ko) 2016-01-18
KR101623695B1 true KR101623695B1 (ko) 2016-05-23

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KR1020147014111A KR101623666B1 (ko) 2011-11-04 2012-09-27 기판 처리 장치, 및 기판 처리 방법
KR1020157036743A KR101623695B1 (ko) 2011-11-04 2012-09-27 기판 처리 장치, 및 기판 처리 방법

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Country Link
JP (5) JP5842925B2 (ja)
KR (2) KR101623666B1 (ja)
CN (2) CN103958379B (ja)
TW (1) TWI541932B (ja)
WO (1) WO2013065429A1 (ja)

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JP6818395B2 (ja) * 2016-12-22 2021-01-20 株式会社オーク製作所 露光装置
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Also Published As

Publication number Publication date
JP2016197241A (ja) 2016-11-24
JP5842925B2 (ja) 2016-01-13
TW201322361A (zh) 2013-06-01
CN106919003A (zh) 2017-07-04
KR101623666B1 (ko) 2016-05-31
KR20140087024A (ko) 2014-07-08
CN106919003B (zh) 2018-10-16
CN103958379B (zh) 2016-12-28
JP6308247B2 (ja) 2018-04-11
JP5962831B2 (ja) 2016-08-03
JP5822016B2 (ja) 2015-11-24
CN103958379A (zh) 2014-07-30
KR20160006242A (ko) 2016-01-18
JP2015034989A (ja) 2015-02-19
JP2016029484A (ja) 2016-03-03
JPWO2013065429A1 (ja) 2015-04-02
JP2018109786A (ja) 2018-07-12
TWI541932B (zh) 2016-07-11
WO2013065429A1 (ja) 2013-05-10

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