CN103958379B - 基板处理装置及基板处理方法 - Google Patents

基板处理装置及基板处理方法 Download PDF

Info

Publication number
CN103958379B
CN103958379B CN201280053802.8A CN201280053802A CN103958379B CN 103958379 B CN103958379 B CN 103958379B CN 201280053802 A CN201280053802 A CN 201280053802A CN 103958379 B CN103958379 B CN 103958379B
Authority
CN
China
Prior art keywords
substrate
roller
tension force
pattern
guiding elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201280053802.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN103958379A (zh
Inventor
堀正和
奈良圭
横田宗泰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to CN201611176699.2A priority Critical patent/CN106919003B/zh
Publication of CN103958379A publication Critical patent/CN103958379A/zh
Application granted granted Critical
Publication of CN103958379B publication Critical patent/CN103958379B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H37/00—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
    • B65H23/188—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web
    • B65H23/1882—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web and controlling longitudinal register of web
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/24—Registering, tensioning, smoothing or guiding webs longitudinally by fluid action, e.g. to retard the running web
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/13—Details of longitudinal profile
    • B65H2404/131—Details of longitudinal profile shape
    • B65H2404/1314—Details of longitudinal profile shape convex
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/10—Means using fluid made only for exhausting gaseous medium
    • B65H2406/11—Means using fluid made only for exhausting gaseous medium producing fluidised bed
    • B65H2406/111—Means using fluid made only for exhausting gaseous medium producing fluidised bed for handling material along a curved path, e.g. fluidised turning bar
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/10—Size; Dimensions
    • B65H2511/12—Width
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/50—Occurence
    • B65H2511/51—Presence
    • B65H2511/512—Marks, e.g. invisible to the human eye; Patterns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00—Sensing or detecting means
    • B65H2553/40—Sensing or detecting means using optical, e.g. photographic, elements
    • B65H2553/42—Cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2601/00—Problem to be solved or advantage achieved
    • B65H2601/20—Avoiding or preventing undesirable effects
    • B65H2601/25—Damages to handled material
    • B65H2601/254—Permanent deformation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/03—Image reproduction devices
    • B65H2801/15—Digital printing machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/61—Display device manufacture, e.g. liquid crystal displays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
  • Liquid Crystal (AREA)
  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Nonlinear Science (AREA)
  • Electroluminescent Light Sources (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
CN201280053802.8A 2011-11-04 2012-09-27 基板处理装置及基板处理方法 Active CN103958379B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201611176699.2A CN106919003B (zh) 2011-11-04 2012-09-27 图案形成方法及装置、图案曝光方法、以及元件制造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011-242788 2011-11-04
JP2011242788 2011-11-04
PCT/JP2012/074830 WO2013065429A1 (ja) 2011-11-04 2012-09-27 基板処理装置、及び基板処理方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201611176699.2A Division CN106919003B (zh) 2011-11-04 2012-09-27 图案形成方法及装置、图案曝光方法、以及元件制造方法

Publications (2)

Publication Number Publication Date
CN103958379A CN103958379A (zh) 2014-07-30
CN103958379B true CN103958379B (zh) 2016-12-28

Family

ID=48191787

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201280053802.8A Active CN103958379B (zh) 2011-11-04 2012-09-27 基板处理装置及基板处理方法
CN201611176699.2A Active CN106919003B (zh) 2011-11-04 2012-09-27 图案形成方法及装置、图案曝光方法、以及元件制造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201611176699.2A Active CN106919003B (zh) 2011-11-04 2012-09-27 图案形成方法及装置、图案曝光方法、以及元件制造方法

Country Status (5)

Country Link
JP (5) JP5842925B2 (ja)
KR (2) KR101623695B1 (ja)
CN (2) CN103958379B (ja)
TW (1) TWI541932B (ja)
WO (1) WO2013065429A1 (ja)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108227408B (zh) * 2013-04-30 2020-02-14 株式会社尼康 曝光装置及曝光方法
CN110297403B (zh) * 2014-09-04 2023-07-28 株式会社尼康 处理系统
JP5799181B1 (ja) 2015-01-07 2015-10-21 住友化学株式会社 有機電子素子の製造方法
JP6447151B2 (ja) 2015-01-14 2019-01-09 株式会社Ihi テンション制御装置及び搬送装置
CN108919610B (zh) * 2015-02-27 2021-02-02 株式会社尼康 基板处理装置及元件制造方法
JP2019079594A (ja) * 2016-03-18 2019-05-23 コニカミノルタ株式会社 有機エレクトロルミネッセンス素子の発光パターン形成方法
JP2019079595A (ja) * 2016-03-18 2019-05-23 コニカミノルタ株式会社 有機エレクトロルミネッセンス素子のパターニング方法及びパターニング装置
KR102379193B1 (ko) * 2016-05-19 2022-03-28 가부시키가이샤 니콘 기판 지지 장치, 노광 장치, 및 패터닝 장치
CN106226968B (zh) * 2016-09-30 2018-11-09 成都捷翼电子科技有限公司 一种卷对卷柔性电子纸贴合装置及贴合方法
JP6824713B2 (ja) * 2016-11-30 2021-02-03 キヤノン株式会社 インプリント方法、インプリント装置、型、および物品の製造方法
JP6818395B2 (ja) * 2016-12-22 2021-01-20 株式会社オーク製作所 露光装置
JP6461235B2 (ja) * 2017-05-22 2019-01-30 キヤノントッキ株式会社 基板載置装置、成膜装置、基板載置方法、成膜方法、および電子デバイスの製造方法
WO2019089518A1 (en) 2017-10-30 2019-05-09 Corning Incorporated Systems and methods for processing thin glass ribbons
KR102100550B1 (ko) * 2018-01-29 2020-04-13 충북대학교 산학협력단 구리 전극 제작 방법 및 구리 전극 제작 시스템
JP7058385B2 (ja) * 2018-03-23 2022-04-22 株式会社浅野研究所 差圧成形装置、及び、差圧成形方法
MX2021002774A (es) * 2018-09-10 2021-05-12 Ball Corp Método y aparato para controlar una operación realizada en una lámina continua de material.
TW202100832A (zh) * 2019-03-11 2021-01-01 以色列商核心流有限公司 用於卷對卷製程之流體流腹板張力裝置
CN109850657B (zh) * 2019-04-15 2022-09-06 厦门前润科技有限公司 一种高延展柔性材料的分切机及其恒定宽度的控制方法
JP7223211B2 (ja) 2019-12-31 2023-02-15 ゼジアン シャオシン スーポア ドメスティック エレクトリカル アプライアンス カンパニー リミテッド 調理器具
CN112340455B (zh) * 2020-11-10 2022-02-08 深圳市全洲自动化设备有限公司 一种为玻璃工件贴偏光片的贴片生产线

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2610064A1 (en) * 2005-06-06 2006-12-14 The Procter & Gamble Company Vectored air web handling apparatus
CN101219743A (zh) * 2008-01-18 2008-07-16 济南大学 用于预应力模具制造的变张力钢带缠绕装置及其控制方法
CN101274720A (zh) * 2007-03-27 2008-10-01 宝山钢铁股份有限公司 一种带钢张力调节方法及装置

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481463A (en) * 1977-12-12 1979-06-28 Fuji Electric Co Ltd Take-up motion system
JPS6019037U (ja) * 1983-07-18 1985-02-08 株式会社リコー 露光装置
JPS60205452A (ja) * 1984-03-30 1985-10-17 Canon Inc 露光方法
JP2758110B2 (ja) * 1992-10-15 1998-05-28 大日本スクリーン製造株式会社 殖版式画像記録装置
JPH0784291B2 (ja) * 1993-01-20 1995-09-13 クインライト電子精工株式会社 可撓性シート状物の耳端揃え装置
JP2000035677A (ja) * 1998-07-17 2000-02-02 Adtec Engineeng:Kk 露光装置
JP2000075497A (ja) * 1998-08-26 2000-03-14 Adtec Engineeng Co Ltd 露光装置
JP2000302290A (ja) * 1999-04-21 2000-10-31 Kyocera Corp 用紙供給装置
JP2001192158A (ja) * 1999-11-16 2001-07-17 Mas Fab Wifag ウェブ幅補正のための回転体構造
JP2002294547A (ja) * 2001-03-29 2002-10-09 Konica Corp 布帛捺染装置
JP2003312911A (ja) * 2002-04-24 2003-11-06 Nsk Ltd 偏張力補償機構及び該機構を備える露光装置
JP4060734B2 (ja) * 2003-03-06 2008-03-12 Ｔｄｋ株式会社 搬送方法、搬送装置、塗布方法及び塗布物製造方法
JP2004341280A (ja) * 2003-05-16 2004-12-02 Dainippon Printing Co Ltd カラーフィルタの製造装置、カラーフィルタの製造方法、及びカラーフィルタ
JP2004341279A (ja) * 2003-05-16 2004-12-02 Dainippon Printing Co Ltd カラーフィルタの製造装置、カラーフィルタの製造方法、及びカラーフィルタ
JP2005053615A (ja) * 2003-08-07 2005-03-03 Canon Sales Co Inc 加工装置
US7121496B2 (en) * 2003-10-23 2006-10-17 Hewlett-Packard Development Company, L.P. Method and system for correcting web deformation during a roll-to-roll process
US8547592B2 (en) * 2003-11-03 2013-10-01 Xeikon Ip Bv Device and method for digital exposure
JP2006098727A (ja) * 2004-09-29 2006-04-13 Fuji Photo Film Co Ltd 伸縮状態の検出手段を設けた長尺の可撓性記録媒体と、この可撓性記録媒体に伸縮状態を補正して画像を描画可能な描画方法及び装置
JP2006098726A (ja) * 2004-09-29 2006-04-13 Fuji Photo Film Co Ltd アライメント部の校正方法と、アライメント校正可能な描画装置と、搬送装置
JP4491311B2 (ja) * 2004-09-30 2010-06-30 富士フイルム株式会社 画像記録装置及び画像記録方法
WO2006100868A1 (ja) 2005-03-18 2006-09-28 Konica Minolta Holdings, Inc. 有機化合物層の形成方法、有機ｅｌ素子の製造方法、有機ｅｌ素子
JP2008233112A (ja) * 2005-06-22 2008-10-02 Fujifilm Holdings Corp カラーフィルタの製造方法、及びカラーフィルタ並びに表示装置
US20070148337A1 (en) * 2005-12-22 2007-06-28 Nichols Jonathan A Flame-perforated aperture masks
JP4888002B2 (ja) * 2006-09-25 2012-02-29 凸版印刷株式会社 アライメント用フィルム固定位置決め装置
KR100953495B1 (ko) * 2008-05-21 2010-04-16 건국대학교 산학협력단 롤투롤 방식 인쇄 방법 및 장치
JP2010014939A (ja) * 2008-07-03 2010-01-21 Nikon Corp 回路素子の製造装置及び製造方法
JP5534549B2 (ja) * 2009-03-13 2014-07-02 株式会社ニコン 転写装置、転写方法、及びデバイス製造方法
US8541163B2 (en) 2009-06-05 2013-09-24 Nikon Corporation Transporting method, transporting apparatus, exposure method, and exposure apparatus
JP5630113B2 (ja) * 2009-07-17 2014-11-26 株式会社ニコン パターン形成装置及びパターン形成方法、並びにデバイス製造方法
JP2011033907A (ja) * 2009-08-04 2011-02-17 Nikon Corp 照明装置、露光装置、照明方法、露光方法及びデバイス製造方法
JP2011037587A (ja) * 2009-08-11 2011-02-24 Fuji Electric Holdings Co Ltd 基板搬送位置制御装置
CN102803109B (zh) * 2010-02-12 2015-04-22 株式会社尼康 用于带状片材基板的搬送装置及处理装置
WO2011129369A1 (ja) * 2010-04-13 2011-10-20 株式会社ニコン 露光装置、基板処理装置及びデバイス製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2610064A1 (en) * 2005-06-06 2006-12-14 The Procter & Gamble Company Vectored air web handling apparatus
CN101274720A (zh) * 2007-03-27 2008-10-01 宝山钢铁股份有限公司 一种带钢张力调节方法及装置
CN101219743A (zh) * 2008-01-18 2008-07-16 济南大学 用于预应力模具制造的变张力钢带缠绕装置及其控制方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Study of Lateral Tape Motion and Tape Tension Transients;Bart Raeymaekers;《Study of Lateral Tape Motion and Tape Tension Transients》;20051231;正文第31-32、43-63页 *

Also Published As

Publication number Publication date
JP6308247B2 (ja) 2018-04-11
TW201322361A (zh) 2013-06-01
TWI541932B (zh) 2016-07-11
JP5842925B2 (ja) 2016-01-13
JP2016197241A (ja) 2016-11-24
KR20160006242A (ko) 2016-01-18
JP5962831B2 (ja) 2016-08-03
JP2018109786A (ja) 2018-07-12
JP5822016B2 (ja) 2015-11-24
KR101623666B1 (ko) 2016-05-31
KR101623695B1 (ko) 2016-05-23
JPWO2013065429A1 (ja) 2015-04-02
WO2013065429A1 (ja) 2013-05-10
JP2016029484A (ja) 2016-03-03
JP2015034989A (ja) 2015-02-19
CN106919003B (zh) 2018-10-16
KR20140087024A (ko) 2014-07-08
CN103958379A (zh) 2014-07-30
CN106919003A (zh) 2017-07-04

Similar Documents

Publication Publication Date Title
CN103958379B (zh) 基板处理装置及基板处理方法
CN102656679B (zh) 用于加工连续的多段柔性箔片的装置
TWI516378B (zh) 用於處理長形、連續可撓基板的設備和方法
CN105093861A (zh) 曝光装置
CN104620178B (zh) 基板处理装置及元件制造方法
GB2458986A (en) Apparatus for patterning thin films on continuous flexible substrates
TW201516580A (zh) 具有主動對準之卷對卷無光罩微影
JP2017215535A (ja) 露光装置
WO2013065451A1 (ja) 基板処理装置および基板処理方法
JP6070697B2 (ja) マスクユニット及び基板処理装置
KR102030009B1 (ko) 필름 제조 장치 및 방법
CN107209461A (zh) 基板处理装置、元件制造系统及元件制造方法
JP7175149B2 (ja) 露光装置および露光方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant