KR101623666B1 - 기판 처리 장치, 및 기판 처리 방법 - Google Patents

기판 처리 장치, 및 기판 처리 방법 Download PDF

Info

Publication number
KR101623666B1
KR101623666B1 KR1020147014111A KR20147014111A KR101623666B1 KR 101623666 B1 KR101623666 B1 KR 101623666B1 KR 1020147014111 A KR1020147014111 A KR 1020147014111A KR 20147014111 A KR20147014111 A KR 20147014111A KR 101623666 B1 KR101623666 B1 KR 101623666B1
Authority
KR
South Korea
Prior art keywords
substrate
roller
axis direction
guide member
tension
Prior art date
Application number
KR1020147014111A
Other languages
English (en)
Korean (ko)
Other versions
KR20140087024A (ko
Inventor
마사카즈 호리
게이 나라
무네야스 요코타
Original Assignee
가부시키가이샤 니콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 니콘 filed Critical 가부시키가이샤 니콘
Publication of KR20140087024A publication Critical patent/KR20140087024A/ko
Application granted granted Critical
Publication of KR101623666B1 publication Critical patent/KR101623666B1/ko

Links

Images

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H37/00—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
    • B65H23/188—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web
    • B65H23/1882—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web and controlling longitudinal register of web
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/24—Registering, tensioning, smoothing or guiding webs longitudinally by fluid action, e.g. to retard the running web
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/13—Details of longitudinal profile
    • B65H2404/131—Details of longitudinal profile shape
    • B65H2404/1314—Details of longitudinal profile shape convex
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/10—Means using fluid made only for exhausting gaseous medium
    • B65H2406/11—Means using fluid made only for exhausting gaseous medium producing fluidised bed
    • B65H2406/111—Means using fluid made only for exhausting gaseous medium producing fluidised bed for handling material along a curved path, e.g. fluidised turning bar
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/10—Size; Dimensions
    • B65H2511/12—Width
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/50—Occurence
    • B65H2511/51—Presence
    • B65H2511/512—Marks, e.g. invisible to the human eye; Patterns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00—Sensing or detecting means
    • B65H2553/40—Sensing or detecting means using optical, e.g. photographic, elements
    • B65H2553/42—Cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2601/00—Problem to be solved or advantage achieved
    • B65H2601/20—Avoiding or preventing undesirable effects
    • B65H2601/25—Damages to handled material
    • B65H2601/254—Permanent deformation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/03—Image reproduction devices
    • B65H2801/15—Digital printing machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/61—Display device manufacture, e.g. liquid crystal displays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
  • Liquid Crystal (AREA)
  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Nonlinear Science (AREA)
  • Electroluminescent Light Sources (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Engineering & Computer Science (AREA)
KR1020147014111A 2011-11-04 2012-09-27 기판 처리 장치, 및 기판 처리 방법 KR101623666B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011242788 2011-11-04
JPJP-P-2011-242788 2011-11-04
PCT/JP2012/074830 WO2013065429A1 (ja) 2011-11-04 2012-09-27 基板処理装置、及び基板処理方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020157036743A Division KR101623695B1 (ko) 2011-11-04 2012-09-27 기판 처리 장치, 및 기판 처리 방법

Publications (2)

Publication Number Publication Date
KR20140087024A KR20140087024A (ko) 2014-07-08
KR101623666B1 true KR101623666B1 (ko) 2016-05-31

Family

ID=48191787

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020157036743A KR101623695B1 (ko) 2011-11-04 2012-09-27 기판 처리 장치, 및 기판 처리 방법
KR1020147014111A KR101623666B1 (ko) 2011-11-04 2012-09-27 기판 처리 장치, 및 기판 처리 방법

Family Applications Before (1)

Application Number Title Priority Date Filing Date
KR1020157036743A KR101623695B1 (ko) 2011-11-04 2012-09-27 기판 처리 장치, 및 기판 처리 방법

Country Status (5)

Country Link
JP (5) JP5842925B2 (ja)
KR (2) KR101623695B1 (ja)
CN (2) CN103958379B (ja)
TW (1) TWI541932B (ja)
WO (1) WO2013065429A1 (ja)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101979562B1 (ko) * 2013-04-30 2019-05-16 가부시키가이샤 니콘 원통 마스크
TWI692830B (zh) * 2014-09-04 2020-05-01 日商尼康股份有限公司 處理系統
JP5799181B1 (ja) 2015-01-07 2015-10-21 住友化学株式会社 有機電子素子の製造方法
JP6447151B2 (ja) * 2015-01-14 2019-01-09 株式会社Ihi テンション制御装置及び搬送装置
TWI720911B (zh) * 2015-02-27 2021-03-01 日商尼康股份有限公司 圖案描繪裝置
JP2019079595A (ja) * 2016-03-18 2019-05-23 コニカミノルタ株式会社 有機エレクトロルミネッセンス素子のパターニング方法及びパターニング装置
JP2019079594A (ja) * 2016-03-18 2019-05-23 コニカミノルタ株式会社 有機エレクトロルミネッセンス素子の発光パターン形成方法
KR102379193B1 (ko) * 2016-05-19 2022-03-28 가부시키가이샤 니콘 기판 지지 장치, 노광 장치, 및 패터닝 장치
CN106226968B (zh) * 2016-09-30 2018-11-09 成都捷翼电子科技有限公司 一种卷对卷柔性电子纸贴合装置及贴合方法
JP6824713B2 (ja) * 2016-11-30 2021-02-03 キヤノン株式会社 インプリント方法、インプリント装置、型、および物品の製造方法
JP6818395B2 (ja) * 2016-12-22 2021-01-20 株式会社オーク製作所 露光装置
JP6461235B2 (ja) * 2017-05-22 2019-01-30 キヤノントッキ株式会社 基板載置装置、成膜装置、基板載置方法、成膜方法、および電子デバイスの製造方法
US11802069B2 (en) 2017-10-30 2023-10-31 Corning Incorporated Systems and methods for processing thin glass ribbons
KR102100550B1 (ko) * 2018-01-29 2020-04-13 충북대학교 산학협력단 구리 전극 제작 방법 및 구리 전극 제작 시스템
JP7058385B2 (ja) * 2018-03-23 2022-04-22 株式会社浅野研究所 差圧成形装置、及び、差圧成形方法
WO2020055524A1 (en) * 2018-09-10 2020-03-19 Ball Corporation Method and apparatus for controlling an operation performed on a continuous sheet of material
TW202100832A (zh) * 2019-03-11 2021-01-01 以色列商核心流有限公司 用於卷對卷製程之流體流腹板張力裝置
CN109850657B (zh) * 2019-04-15 2022-09-06 厦门前润科技有限公司 一种高延展柔性材料的分切机及其恒定宽度的控制方法
NO20190876A1 (en) * 2019-07-11 2021-01-12 Visitech As Real time Registration Lithography system
US11690475B2 (en) 2019-12-31 2023-07-04 Zhejiang Shaoxing Supor Domestic Electrical Appliance Co., Ltd Cooking appliance
CN112340455B (zh) * 2020-11-10 2022-02-08 深圳市全洲自动化设备有限公司 一种为玻璃工件贴偏光片的贴片生产线

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000302290A (ja) * 1999-04-21 2000-10-31 Kyocera Corp 用紙供給装置
JP2011037587A (ja) * 2009-08-11 2011-02-24 Fuji Electric Holdings Co Ltd 基板搬送位置制御装置
WO2011099562A1 (ja) * 2010-02-12 2011-08-18 株式会社ニコン 帯状のシート基板のための搬送装置及び処理装置

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481463A (en) * 1977-12-12 1979-06-28 Fuji Electric Co Ltd Take-up motion system
JPS6019037U (ja) * 1983-07-18 1985-02-08 株式会社リコー 露光装置
JPS60205452A (ja) * 1984-03-30 1985-10-17 Canon Inc 露光方法
JP2758110B2 (ja) * 1992-10-15 1998-05-28 大日本スクリーン製造株式会社 殖版式画像記録装置
JPH0784291B2 (ja) * 1993-01-20 1995-09-13 クインライト電子精工株式会社 可撓性シート状物の耳端揃え装置
JP2000035677A (ja) * 1998-07-17 2000-02-02 Adtec Engineeng:Kk 露光装置
JP2000075497A (ja) * 1998-08-26 2000-03-14 Adtec Engineeng Co Ltd 露光装置
JP2001192158A (ja) * 1999-11-16 2001-07-17 Mas Fab Wifag ウェブ幅補正のための回転体構造
JP2002294547A (ja) * 2001-03-29 2002-10-09 Konica Corp 布帛捺染装置
JP2003312911A (ja) * 2002-04-24 2003-11-06 Nsk Ltd 偏張力補償機構及び該機構を備える露光装置
JP4060734B2 (ja) * 2003-03-06 2008-03-12 Ｔｄｋ株式会社 搬送方法、搬送装置、塗布方法及び塗布物製造方法
JP2004341280A (ja) * 2003-05-16 2004-12-02 Dainippon Printing Co Ltd カラーフィルタの製造装置、カラーフィルタの製造方法、及びカラーフィルタ
JP2004341279A (ja) * 2003-05-16 2004-12-02 Dainippon Printing Co Ltd カラーフィルタの製造装置、カラーフィルタの製造方法、及びカラーフィルタ
JP2005053615A (ja) * 2003-08-07 2005-03-03 Canon Sales Co Inc 加工装置
US7121496B2 (en) * 2003-10-23 2006-10-17 Hewlett-Packard Development Company, L.P. Method and system for correcting web deformation during a roll-to-roll process
EP1683077B1 (de) * 2003-11-03 2016-05-25 Xeikon Prepress NV Vorrichtung und verfahren zum digitalen belichten
JP2006098726A (ja) * 2004-09-29 2006-04-13 Fuji Photo Film Co Ltd アライメント部の校正方法と、アライメント校正可能な描画装置と、搬送装置
JP2006098727A (ja) * 2004-09-29 2006-04-13 Fuji Photo Film Co Ltd 伸縮状態の検出手段を設けた長尺の可撓性記録媒体と、この可撓性記録媒体に伸縮状態を補正して画像を描画可能な描画方法及び装置
JP4491311B2 (ja) * 2004-09-30 2010-06-30 富士フイルム株式会社 画像記録装置及び画像記録方法
WO2006100868A1 (ja) 2005-03-18 2006-09-28 Konica Minolta Holdings, Inc. 有機化合物層の形成方法、有機ｅｌ素子の製造方法、有機ｅｌ素子
US7311234B2 (en) * 2005-06-06 2007-12-25 The Procter & Gamble Company Vectored air web handling apparatus
JP2008233112A (ja) * 2005-06-22 2008-10-02 Fujifilm Holdings Corp カラーフィルタの製造方法、及びカラーフィルタ並びに表示装置
US20070148337A1 (en) * 2005-12-22 2007-06-28 Nichols Jonathan A Flame-perforated aperture masks
JP4888002B2 (ja) * 2006-09-25 2012-02-29 凸版印刷株式会社 アライメント用フィルム固定位置決め装置
CN101274720B (zh) * 2007-03-27 2010-05-19 宝山钢铁股份有限公司 一种带钢张力调节方法及装置
CN100572242C (zh) * 2008-01-18 2009-12-23 济南大学 用于预应力模具制造的变张力钢带缠绕装置及其控制方法
KR100953495B1 (ko) * 2008-05-21 2010-04-16 건국대학교 산학협력단 롤투롤 방식 인쇄 방법 및 장치
JP2010014939A (ja) * 2008-07-03 2010-01-21 Nikon Corp 回路素子の製造装置及び製造方法
JP5534549B2 (ja) * 2009-03-13 2014-07-02 株式会社ニコン 転写装置、転写方法、及びデバイス製造方法
US8541163B2 (en) 2009-06-05 2013-09-24 Nikon Corporation Transporting method, transporting apparatus, exposure method, and exposure apparatus
JP5630113B2 (ja) * 2009-07-17 2014-11-26 株式会社ニコン パターン形成装置及びパターン形成方法、並びにデバイス製造方法
JP2011033907A (ja) * 2009-08-04 2011-02-17 Nikon Corp 照明装置、露光装置、照明方法、露光方法及びデバイス製造方法
JPWO2011129369A1 (ja) * 2010-04-13 2013-07-18 株式会社ニコン 露光装置、基板処理装置及びデバイス製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000302290A (ja) * 1999-04-21 2000-10-31 Kyocera Corp 用紙供給装置
JP2011037587A (ja) * 2009-08-11 2011-02-24 Fuji Electric Holdings Co Ltd 基板搬送位置制御装置
WO2011099562A1 (ja) * 2010-02-12 2011-08-18 株式会社ニコン 帯状のシート基板のための搬送装置及び処理装置

Also Published As

Publication number Publication date
CN106919003A (zh) 2017-07-04
KR101623695B1 (ko) 2016-05-23
TWI541932B (zh) 2016-07-11
KR20140087024A (ko) 2014-07-08
JP6308247B2 (ja) 2018-04-11
JP2016029484A (ja) 2016-03-03
JPWO2013065429A1 (ja) 2015-04-02
JP5822016B2 (ja) 2015-11-24
CN103958379A (zh) 2014-07-30
CN106919003B (zh) 2018-10-16
TW201322361A (zh) 2013-06-01
JP2015034989A (ja) 2015-02-19
CN103958379B (zh) 2016-12-28
WO2013065429A1 (ja) 2013-05-10
JP2016197241A (ja) 2016-11-24
JP5962831B2 (ja) 2016-08-03
KR20160006242A (ko) 2016-01-18
JP5842925B2 (ja) 2016-01-13
JP2018109786A (ja) 2018-07-12

Similar Documents

Publication Publication Date Title
KR101623666B1 (ko) 기판 처리 장치, 및 기판 처리 방법
KR101948467B1 (ko) 기판 처리 장치 및 기판 처리 방법
KR100734587B1 (ko) 리소그래피 장치, 디바이스 제조방법, 및 그에 의해제조되는 디바이스
KR20180087385A (ko) 노광 장치, 노광 시스템, 기판 처리 방법, 및 디바이스 제조 장치
WO2013035696A1 (ja) 基板搬送装置及び基板処理装置
WO2013065451A1 (ja) 基板処理装置および基板処理方法
JP6227757B2 (ja) 成膜装置及び成膜方法
TW201624142A (zh) 直接曝光裝置
JP6733778B2 (ja) 基板処理装置、及びデバイス製造方法
CN110320765B (zh) 曝光装置
JP6702404B2 (ja) デバイス製造システムおよびデバイス製造方法
JP7175149B2 (ja) 露光装置および露光方法

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
A107 Divisional application of patent
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20190429

Year of fee payment: 4