KR101520485B1 - 반도체 소자 및 그 제조 방법 - Google Patents

반도체 소자 및 그 제조 방법 Download PDF

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Publication number
KR101520485B1
KR101520485B1 KR1020080072871A KR20080072871A KR101520485B1 KR 101520485 B1 KR101520485 B1 KR 101520485B1 KR 1020080072871 A KR1020080072871 A KR 1020080072871A KR 20080072871 A KR20080072871 A KR 20080072871A KR 101520485 B1 KR101520485 B1 KR 101520485B1
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South Korea
Prior art keywords
region
gate electrode
drain region
source region
trench
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Expired - Fee Related
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KR1020080072871A
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English (en)
Korean (ko)
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KR20090012159A (ko
Inventor
마사유키 하시타니
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세이코 인스트루 가부시키가이샤
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Publication of KR20090012159A publication Critical patent/KR20090012159A/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/025—Manufacture or treatment forming recessed gates, e.g. by using local oxidation
    • H10D64/027—Manufacture or treatment forming recessed gates, e.g. by using local oxidation by etching at gate locations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0223—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/65—Lateral DMOS [LDMOS] FETs
    • H10D30/658—Lateral DMOS [LDMOS] FETs having trench gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149—Source or drain regions of field-effect devices
    • H10D62/151—Source or drain regions of field-effect devices of IGFETs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/213—Channel regions of field-effect devices
    • H10D62/221—Channel regions of field-effect devices of FETs
    • H10D62/235—Channel regions of field-effect devices of FETs of IGFETs
    • H10D62/292—Non-planar channels of IGFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/517—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers
    • H10D64/519—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers characterised by their top-view geometrical layouts

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  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
KR1020080072871A 2007-07-27 2008-07-25 반도체 소자 및 그 제조 방법 Expired - Fee Related KR101520485B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007195492A JP5165954B2 (ja) 2007-07-27 2007-07-27 半導体装置
JPJP-P-2007-00195492 2007-07-27

Publications (2)

Publication Number Publication Date
KR20090012159A KR20090012159A (ko) 2009-02-02
KR101520485B1 true KR101520485B1 (ko) 2015-05-14

Family

ID=40294497

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080072871A Expired - Fee Related KR101520485B1 (ko) 2007-07-27 2008-07-25 반도체 소자 및 그 제조 방법

Country Status (5)

Country Link
US (2) US8716142B2 (enExample)
JP (1) JP5165954B2 (enExample)
KR (1) KR101520485B1 (enExample)
CN (1) CN101355105B (enExample)
TW (1) TWI459472B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5738094B2 (ja) * 2010-09-14 2015-06-17 セイコーインスツル株式会社 半導体装置の製造方法
JP5881100B2 (ja) * 2011-12-22 2016-03-09 エスアイアイ・セミコンダクタ株式会社 半導体装置の製造方法
DE102015106688B4 (de) * 2015-04-29 2020-03-12 Infineon Technologies Ag Schalter mit einem feldeffekttransistor, insbesondere in einer integrierten schaltung zur verwendung in systemen mit lasten
JP2018089845A (ja) * 2016-12-02 2018-06-14 大日本印刷株式会社 個体認証用半導体チップ、個体認証媒体及び個体認証方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006019518A (ja) * 2004-07-01 2006-01-19 Seiko Instruments Inc 横型トレンチｍｏｓｆｅｔ

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JPH08264764A (ja) * 1995-03-22 1996-10-11 Toshiba Corp 半導体装置
JPH1065150A (ja) * 1996-08-14 1998-03-06 Yokogawa Electric Corp Ｄｍｏｓ ｆｅｔ
JP3405681B2 (ja) * 1997-07-31 2003-05-12 株式会社東芝 半導体装置
JP3461277B2 (ja) * 1998-01-23 2003-10-27 株式会社東芝 半導体装置及びその製造方法
US6066533A (en) * 1998-09-29 2000-05-23 Advanced Micro Devices, Inc. MOS transistor with dual metal gate structure
US6956263B1 (en) * 1999-12-28 2005-10-18 Intel Corporation Field effect transistor structure with self-aligned raised source/drain extensions
US6531347B1 (en) * 2000-02-08 2003-03-11 Advanced Micro Devices, Inc. Method of making recessed source drains to reduce fringing capacitance
JP4780818B2 (ja) * 2000-03-03 2011-09-28 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
JP3651802B2 (ja) * 2002-09-12 2005-05-25 株式会社東芝 半導体装置の製造方法
KR100521369B1 (ko) * 2002-12-18 2005-10-12 삼성전자주식회사 고속도 및 저전력 소모 반도체 소자 및 그 제조 방법
JP2005136150A (ja) * 2003-10-30 2005-05-26 Oki Electric Ind Co Ltd 半導体装置及びその製造方法
JP4837902B2 (ja) * 2004-06-24 2011-12-14 富士通セミコンダクター株式会社 半導体装置
JP5110776B2 (ja) 2004-07-01 2012-12-26 セイコーインスツル株式会社 半導体装置の製造方法
US7102201B2 (en) * 2004-07-15 2006-09-05 International Business Machines Corporation Strained semiconductor device structures
JP4515305B2 (ja) * 2005-03-29 2010-07-28 富士通セミコンダクター株式会社 ｐチャネルＭＯＳトランジスタおよびその製造方法、半導体集積回路装置の製造方法
JP4976658B2 (ja) * 2005-04-05 2012-07-18 セイコーインスツル株式会社 半導体装置の製造方法
US7569443B2 (en) * 2005-06-21 2009-08-04 Intel Corporation Complementary metal oxide semiconductor integrated circuit using raised source drain and replacement metal gate
KR100714307B1 (ko) * 2005-08-05 2007-05-02 삼성전자주식회사 활성영역 가장자리에 리세스영역을 갖는 반도체 장치 및 그형성방법
JP4410195B2 (ja) * 2006-01-06 2010-02-03 株式会社東芝 半導体装置及びその製造方法
DE102006015077B4 (de) * 2006-03-31 2010-12-23 Advanced Micro Devices, Inc., Sunnyvale Transistor mit abgesenkten Drain- und Source-Gebieten und Verfahren zur Herstellung desselben
US7410875B2 (en) * 2006-04-06 2008-08-12 United Microelectronics Corp. Semiconductor structure and fabrication thereof
US7719062B2 (en) * 2006-12-29 2010-05-18 Intel Corporation Tuned tensile stress low resistivity slot contact structure for n-type transistor performance enhancement
JP2008192985A (ja) * 2007-02-07 2008-08-21 Seiko Instruments Inc 半導体装置、及び半導体装置の製造方法
JP2009152394A (ja) * 2007-12-20 2009-07-09 Toshiba Corp 半導体装置及びその製造方法
JP5442951B2 (ja) * 2008-02-26 2014-03-19 セイコーインスツル株式会社 半導体装置の製造方法
JP4770885B2 (ja) * 2008-06-30 2011-09-14 ソニー株式会社 半導体装置

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2006019518A (ja) * 2004-07-01 2006-01-19 Seiko Instruments Inc 横型トレンチｍｏｓｆｅｔ

Also Published As

Publication number Publication date
US9276065B2 (en) 2016-03-01
JP2009032905A (ja) 2009-02-12
US20090026537A1 (en) 2009-01-29
CN101355105B (zh) 2012-06-27
TWI459472B (zh) 2014-11-01
CN101355105A (zh) 2009-01-28
US8716142B2 (en) 2014-05-06
US20140191313A1 (en) 2014-07-10
TW200924071A (en) 2009-06-01
KR20090012159A (ko) 2009-02-02
JP5165954B2 (ja) 2013-03-21

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