KR101438161B1 - 프로브 카드 컨테이너 - Google Patents

프로브 카드 컨테이너 Download PDF

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Publication number
KR101438161B1
KR101438161B1 KR1020110131656A KR20110131656A KR101438161B1 KR 101438161 B1 KR101438161 B1 KR 101438161B1 KR 1020110131656 A KR1020110131656 A KR 1020110131656A KR 20110131656 A KR20110131656 A KR 20110131656A KR 101438161 B1 KR101438161 B1 KR 101438161B1
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South Korea
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English (en)
Korean (ko)
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KR20130025316A (ko
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모리히로 사이토
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가부시키가이샤 교도
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67363—Closed carriers specially adapted for containing substrates other than wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
KR1020110131656A 2011-09-01 2011-12-09 프로브 카드 컨테이너 Active KR101438161B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011005135U JP3171687U (ja) 2011-09-01 2011-09-01 プローブカード収納ケース
JPJP-U-2011-005135 2011-09-01

Publications (2)

Publication Number Publication Date
KR20130025316A KR20130025316A (ko) 2013-03-11
KR101438161B1 true KR101438161B1 (ko) 2014-09-04

Family

ID=47756748

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110131656A Active KR101438161B1 (ko) 2011-09-01 2011-12-09 프로브 카드 컨테이너

Country Status (4)

Country Link
US (1) US8490796B2 (enExample)
JP (1) JP3171687U (enExample)
KR (1) KR101438161B1 (enExample)
TW (1) TWI451999B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160109748A (ko) * 2015-03-13 2016-09-21 세메스 주식회사 캐리어 유닛 및 이를 저장하는 시스템

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3171687U (ja) 2011-09-01 2011-11-10 株式会社協同 プローブカード収納ケース
JP6054150B2 (ja) * 2012-11-22 2016-12-27 日本電子材料株式会社 プローブカードケース及びプローブカードの搬送方法
JP6185285B2 (ja) * 2013-05-14 2017-08-23 日本電子材料株式会社 係止機構及びその係止機構を備えた車輪付き収納ケース
KR101595940B1 (ko) * 2014-10-23 2016-02-19 주식회사 인아텍 반도체 관련 부품을 테스트하는 다양한 사이즈의 프루브카드를 운반하는 안전 케이스
JP6595025B2 (ja) * 2018-02-27 2019-10-23 株式会社協同 プローブカード収納ケース
JP2019149435A (ja) * 2018-02-27 2019-09-05 株式会社協同 プローブカード収納ケース
JP2019197010A (ja) * 2018-05-11 2019-11-14 株式会社協同 プローブカード収納ケース
MX2019015279A (es) * 2018-12-27 2020-07-24 Big Time Products Llc Contenedor de almacenamiento de lados blandos con armazón de exosqueleto.
TWI862256B (zh) * 2023-05-02 2024-11-11 家登精密工業股份有限公司 探針卡之定位環及保護盒
KR102888617B1 (ko) 2023-07-05 2025-11-20 가부시키가이샤 교도 포토마스크 수납 케이스
KR102655758B1 (ko) * 2023-07-14 2024-04-12 이동욱 프로브 카드 캐리어

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6561328B1 (en) * 2002-03-26 2003-05-13 Ming-Ter Huang Multifunctional container
KR200383169Y1 (ko) 2005-01-31 2005-05-03 구남호 보조 체인바퀴가 부설된 여행용 가방
KR20110007660U (ko) * 2010-01-27 2011-08-03 리노공업주식회사 프로브 카드용 캐리어

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2521840A1 (fr) 1982-02-24 1983-08-26 Delsey Soc Valise a roulettes
JPH03171687A (ja) 1989-11-29 1991-07-25 Matsushita Electric Ind Co Ltd レーザダイオード駆動装置
JPH0667366B2 (ja) 1990-07-31 1994-08-31 義夫 渡辺 真空掃除機用ノズル装置
JPH07285604A (ja) 1994-04-21 1995-10-31 Gifu Plast Ind Co Ltd 屋外ゴミ収集用容器
US5695068A (en) * 1994-09-09 1997-12-09 Digital Equipment Corporation Probe card shipping and handling system
JPH11127935A (ja) 1997-10-29 1999-05-18 Fuji Kowa Kogyo Kk 精密機器運搬用ケース
DE19748088A1 (de) 1997-10-30 1999-05-12 Wacker Siltronic Halbleitermat Verfahren und Vorrichtung zum Erkennen einer Fehllage einer Halbleiterscheibe
JP3035519B2 (ja) 1998-01-22 2000-04-24 株式会社山本製作所 穀粒貯蔵庫
JP3887253B2 (ja) * 2002-03-19 2007-02-28 日鉱金属株式会社 スパッタリングターゲット用運搬箱
JP2004170267A (ja) 2002-11-20 2004-06-17 Tokyo Seimitsu Co Ltd プローブカード搬送台車
JP2009107638A (ja) 2007-10-26 2009-05-21 Daiwa Seiko Inc 保冷箱
US8350191B2 (en) * 2008-05-21 2013-01-08 Formfactor, Inc. Probe card thermal conditioning system
JP3171687U (ja) 2011-09-01 2011-11-10 株式会社協同 プローブカード収納ケース

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6561328B1 (en) * 2002-03-26 2003-05-13 Ming-Ter Huang Multifunctional container
KR200383169Y1 (ko) 2005-01-31 2005-05-03 구남호 보조 체인바퀴가 부설된 여행용 가방
KR20110007660U (ko) * 2010-01-27 2011-08-03 리노공업주식회사 프로브 카드용 캐리어

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160109748A (ko) * 2015-03-13 2016-09-21 세메스 주식회사 캐리어 유닛 및 이를 저장하는 시스템
KR102221110B1 (ko) 2015-03-13 2021-02-26 세메스 주식회사 캐리어 유닛 및 이를 저장하는 시스템

Also Published As

Publication number Publication date
JP3171687U (ja) 2011-11-10
US20130056390A1 (en) 2013-03-07
KR20130025316A (ko) 2013-03-11
US8490796B2 (en) 2013-07-23
TWI451999B (zh) 2014-09-11
TW201311522A (zh) 2013-03-16

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