JP3171687U - プローブカード収納ケース - Google Patents
プローブカード収納ケース Download PDFInfo
- Publication number
- JP3171687U JP3171687U JP2011005135U JP2011005135U JP3171687U JP 3171687 U JP3171687 U JP 3171687U JP 2011005135 U JP2011005135 U JP 2011005135U JP 2011005135 U JP2011005135 U JP 2011005135U JP 3171687 U JP3171687 U JP 3171687U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- storage case
- case
- card storage
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67363—Closed carriers specially adapted for containing substrates other than wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67353—Closed carriers specially adapted for a single substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
Abstract
Description
2 下側ケース部
2a 底面
2b 一側面
2c 他側面
3 上側ケース部
4 プローブカード
5 ヒンジ部
6 固定具
7a ロック部
7b ロック部
8a 把手
8b 把手
9 移動用ローラ
10 非移動部材
11 窓部
12 支承面
13 専用棚
14 作業員
15 載置台
16 コーナ部
Claims (6)
- 下側ケース部と上側ケース部とによりプローブカードを収納する本体ケースと、上記本体ケースの一側面に設けた把手と、上記本体ケースの載置面に夫々設けた移動用ローラ及び非移動部材とよりなることを特徴とするプローブカード収納ケース。
- 下側ケース部と上側ケース部とによりプローブカードを収納する本体ケースと、上記本体ケースの一側面に設けた把手と、上記本体ケースの載置面と他側面とのコーナ部に設けた移動用ローラと、上記本体ケースの載置面に設けた非移動部材とよりなり、上記移動用ローラは斜め下方向に傾斜して設けられていることを特徴とするプローブカード収納ケース。
- 上記載置面が、上記下側本体ケース部の底面であることを特徴とする請求項1または2記載のプローブカード収納ケース。
- 上記非移動部材が、上記移動用ローラよりも把手側に設けられており、また、上記非移動部材が、上記移動用ローラより高く設けられていることを特徴とする請求項1、2または3記載のプローブカード収納ケース。
- 上記非移動部材が1又は複数であることを特徴とする請求項1、2、3または4記載のプローブカード収納ケース。
- 上記非移動部材が振動吸収部材を兼用することを特徴とする請求項1、2、3、4または5記載のプローブカード収納ケース。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011005135U JP3171687U (ja) | 2011-09-01 | 2011-09-01 | プローブカード収納ケース |
US13/304,166 US8490796B2 (en) | 2011-09-01 | 2011-11-23 | Probe card container with rollers |
TW100143151A TWI451999B (zh) | 2011-09-01 | 2011-11-24 | 探測器卡容器 |
KR1020110131656A KR101438161B1 (ko) | 2011-09-01 | 2011-12-09 | 프로브 카드 컨테이너 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011005135U JP3171687U (ja) | 2011-09-01 | 2011-09-01 | プローブカード収納ケース |
Publications (2)
Publication Number | Publication Date |
---|---|
JP3171687U true JP3171687U (ja) | 2011-11-10 |
JP3171687U7 JP3171687U7 (ja) | 2012-04-12 |
Family
ID=47756748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011005135U Expired - Lifetime JP3171687U (ja) | 2011-09-01 | 2011-09-01 | プローブカード収納ケース |
Country Status (4)
Country | Link |
---|---|
US (1) | US8490796B2 (ja) |
JP (1) | JP3171687U (ja) |
KR (1) | KR101438161B1 (ja) |
TW (1) | TWI451999B (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014080850A1 (ja) * | 2012-11-22 | 2014-05-30 | 東京エレクトロン株式会社 | プローブカードケース及びプローブカードの搬送方法 |
JP2014221661A (ja) * | 2013-05-14 | 2014-11-27 | 日本電子材料株式会社 | 係止機構及びその係止機構を備えた車輪付き収納ケース |
JP2019149435A (ja) * | 2018-02-27 | 2019-09-05 | 株式会社協同 | プローブカード収納ケース |
JP2019153604A (ja) * | 2018-02-27 | 2019-09-12 | 株式会社協同 | プローブカード収納ケース |
JP2019197010A (ja) * | 2018-05-11 | 2019-11-14 | 株式会社協同 | プローブカード収納ケース |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101595940B1 (ko) * | 2014-10-23 | 2016-02-19 | 주식회사 인아텍 | 반도체 관련 부품을 테스트하는 다양한 사이즈의 프루브카드를 운반하는 안전 케이스 |
KR102221110B1 (ko) | 2015-03-13 | 2021-02-26 | 세메스 주식회사 | 캐리어 유닛 및 이를 저장하는 시스템 |
MX2019015279A (es) * | 2018-12-27 | 2020-07-24 | Big Time Products Llc | Contenedor de almacenamiento de lados blandos con armazón de exosqueleto. |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2521840A1 (fr) | 1982-02-24 | 1983-08-26 | Delsey Soc | Valise a roulettes |
JPH03171687A (ja) | 1989-11-29 | 1991-07-25 | Matsushita Electric Ind Co Ltd | レーザダイオード駆動装置 |
JPH0667366B2 (ja) | 1990-07-31 | 1994-08-31 | 義夫 渡辺 | 真空掃除機用ノズル装置 |
JPH07285604A (ja) | 1994-04-21 | 1995-10-31 | Gifu Plast Ind Co Ltd | 屋外ゴミ収集用容器 |
US5695068A (en) * | 1994-09-09 | 1997-12-09 | Digital Equipment Corporation | Probe card shipping and handling system |
JPH11127935A (ja) | 1997-10-29 | 1999-05-18 | Fuji Kowa Kogyo Kk | 精密機器運搬用ケース |
JP3887253B2 (ja) * | 2002-03-19 | 2007-02-28 | 日鉱金属株式会社 | スパッタリングターゲット用運搬箱 |
DE20204826U1 (de) * | 2002-03-26 | 2002-06-06 | Huang Ming Ter | Multifunktionsbehälter |
JP2004170267A (ja) | 2002-11-20 | 2004-06-17 | Tokyo Seimitsu Co Ltd | プローブカード搬送台車 |
KR200383169Y1 (ko) | 2005-01-31 | 2005-05-03 | 구남호 | 보조 체인바퀴가 부설된 여행용 가방 |
JP2009107638A (ja) | 2007-10-26 | 2009-05-21 | Daiwa Seiko Inc | 保冷箱 |
US8350191B2 (en) * | 2008-05-21 | 2013-01-08 | Formfactor, Inc. | Probe card thermal conditioning system |
KR20110007660U (ko) * | 2010-01-27 | 2011-08-03 | 리노공업주식회사 | 프로브 카드용 캐리어 |
-
2011
- 2011-09-01 JP JP2011005135U patent/JP3171687U/ja not_active Expired - Lifetime
- 2011-11-23 US US13/304,166 patent/US8490796B2/en active Active
- 2011-11-24 TW TW100143151A patent/TWI451999B/zh active
- 2011-12-09 KR KR1020110131656A patent/KR101438161B1/ko active IP Right Grant
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014080850A1 (ja) * | 2012-11-22 | 2014-05-30 | 東京エレクトロン株式会社 | プローブカードケース及びプローブカードの搬送方法 |
CN104813458A (zh) * | 2012-11-22 | 2015-07-29 | 东京毅力科创株式会社 | 探针卡盒和探针卡输送方法 |
US20150285838A1 (en) * | 2012-11-22 | 2015-10-08 | Tokyo Electron Limited | Probe card case and probe card transfer method |
CN104813458B (zh) * | 2012-11-22 | 2018-05-08 | 日本电子材料株式会社 | 探针卡盒和探针卡输送方法 |
US10184954B2 (en) * | 2012-11-22 | 2019-01-22 | Japan Electronic Materials Corp. | Probe card case and probe card transfer method |
JP2014221661A (ja) * | 2013-05-14 | 2014-11-27 | 日本電子材料株式会社 | 係止機構及びその係止機構を備えた車輪付き収納ケース |
JP2019149435A (ja) * | 2018-02-27 | 2019-09-05 | 株式会社協同 | プローブカード収納ケース |
JP2019153604A (ja) * | 2018-02-27 | 2019-09-12 | 株式会社協同 | プローブカード収納ケース |
JP2019197010A (ja) * | 2018-05-11 | 2019-11-14 | 株式会社協同 | プローブカード収納ケース |
Also Published As
Publication number | Publication date |
---|---|
US8490796B2 (en) | 2013-07-23 |
TWI451999B (zh) | 2014-09-11 |
TW201311522A (zh) | 2013-03-16 |
KR101438161B1 (ko) | 2014-09-04 |
KR20130025316A (ko) | 2013-03-11 |
US20130056390A1 (en) | 2013-03-07 |
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