KR101276970B1 - 회로 패턴 검사 장치 및 검사 방법 - Google Patents

회로 패턴 검사 장치 및 검사 방법 Download PDF

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Publication number
KR101276970B1
KR101276970B1 KR1020100074491A KR20100074491A KR101276970B1 KR 101276970 B1 KR101276970 B1 KR 101276970B1 KR 1020100074491 A KR1020100074491 A KR 1020100074491A KR 20100074491 A KR20100074491 A KR 20100074491A KR 101276970 B1 KR101276970 B1 KR 101276970B1
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KR
South Korea
Prior art keywords
signal
inspection
conductive pattern
defect
pattern
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KR1020100074491A
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English (en)
Korean (ko)
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KR20110014107A (ko
Inventor
히로시 하모리
마사또시 사까와
고오스께 가또오
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오에이치티 가부시끼가이샤
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Publication of KR20110014107A publication Critical patent/KR20110014107A/ko
Application granted granted Critical
Publication of KR101276970B1 publication Critical patent/KR101276970B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/3193—Tester hardware, i.e. output processing circuits with comparison between actual response and known fault free response
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/07—Non contact-making probes
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
KR1020100074491A 2009-08-04 2010-08-02 회로 패턴 검사 장치 및 검사 방법 KR101276970B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009181781A JP4644745B2 (ja) 2009-08-04 2009-08-04 回路パターン検査装置
JPJP-P-2009-181781 2009-08-04

Publications (2)

Publication Number Publication Date
KR20110014107A KR20110014107A (ko) 2011-02-10
KR101276970B1 true KR101276970B1 (ko) 2013-06-19

Family

ID=43762743

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100074491A KR101276970B1 (ko) 2009-08-04 2010-08-02 회로 패턴 검사 장치 및 검사 방법

Country Status (4)

Country Link
JP (1) JP4644745B2 (zh)
KR (1) KR101276970B1 (zh)
CN (1) CN101995545B (zh)
TW (1) TWI401452B (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5305111B2 (ja) 2011-01-21 2013-10-02 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5580247B2 (ja) * 2011-04-27 2014-08-27 株式会社ユニオンアロー・テクノロジー パターン検査装置
JP5899961B2 (ja) * 2012-01-24 2016-04-06 日本電産リード株式会社 絶縁検査装置及び絶縁検査方法
JP5865734B2 (ja) * 2012-03-01 2016-02-17 株式会社Ｓｃｒｅｅｎホールディングス 領域分類装置、そのプログラム、基板検査装置、および領域分類方法
JP2013210247A (ja) * 2012-03-30 2013-10-10 Nidec-Read Corp 絶縁検査装置及び絶縁検査方法
JP6069884B2 (ja) * 2012-05-08 2017-02-01 日本電産リード株式会社 絶縁検査方法及び絶縁検査装置
JP5417651B1 (ja) * 2013-01-08 2014-02-19 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5433876B1 (ja) * 2013-03-26 2014-03-05 オー・エイチ・ティー株式会社 回路パターン検査装置
JP6014950B1 (ja) * 2015-12-22 2016-10-26 オー・エイチ・ティー株式会社 導電体パターン検査装置
JP6714485B2 (ja) * 2016-09-28 2020-06-24 浜松ホトニクス株式会社 半導体デバイス検査方法及び半導体デバイス検査装置
WO2020059014A1 (ja) * 2018-09-18 2020-03-26 国立大学法人東北大学 容量検出エリアセンサ及び、その容量検出エリアセンサを有する導電パターン検査装置
CN110095704B (zh) * 2019-04-17 2022-02-22 深圳市华星光电半导体显示技术有限公司 检测阵列基板中电路缺陷的装置及方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040031097A (ko) * 2001-09-20 2004-04-09 오에이치티 가부시끼가이샤 검사 장치 및 검사 방법
JP2004191381A (ja) 2002-11-30 2004-07-08 Oht Inc 回路パターン検査装置及び回路パターン検査方法
JP2006200992A (ja) 2005-01-19 2006-08-03 Oht Inc 回路パターン検査装置およびその方法
JP2008026320A (ja) 2006-07-20 2008-02-07 Microinspection Inc 非接触シングルサイドプローブ及び、これを用いたパターン電極の断線・短絡検査装置及びその方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2838909B2 (ja) * 1990-11-20 1998-12-16 筒井 良三 目標信号強調装置並びにこの装置を使用した表示装置及び追尾装置
JP2002365325A (ja) * 2001-06-11 2002-12-18 Oht Inc 回路パターン検査装置並びに回路パターン検査方法及び記録媒体
JP2003035738A (ja) * 2001-07-19 2003-02-07 Omron Corp 部品実装基板の検査方法および部品実装基板用の検査装置
CN1720458B (zh) * 2002-11-30 2010-06-23 Oht株式会社 电路图案检查装置及电路图案检查方法
JP4497412B2 (ja) * 2004-10-04 2010-07-07 株式会社三英社製作所 送配電線路の事故原因判別方法及び装置
JP2006300665A (ja) * 2005-04-19 2006-11-02 Oht Inc 検査装置および導電パターン検査方法
JP4291843B2 (ja) * 2006-10-19 2009-07-08 株式会社東京カソード研究所 パターン検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040031097A (ko) * 2001-09-20 2004-04-09 오에이치티 가부시끼가이샤 검사 장치 및 검사 방법
JP2004191381A (ja) 2002-11-30 2004-07-08 Oht Inc 回路パターン検査装置及び回路パターン検査方法
JP2006200992A (ja) 2005-01-19 2006-08-03 Oht Inc 回路パターン検査装置およびその方法
JP2008026320A (ja) 2006-07-20 2008-02-07 Microinspection Inc 非接触シングルサイドプローブ及び、これを用いたパターン電極の断線・短絡検査装置及びその方法

Also Published As

Publication number Publication date
CN101995545B (zh) 2015-03-18
TWI401452B (zh) 2013-07-11
JP4644745B2 (ja) 2011-03-02
JP2011033542A (ja) 2011-02-17
KR20110014107A (ko) 2011-02-10
TW201122511A (en) 2011-07-01
CN101995545A (zh) 2011-03-30

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