KR101213017B1 - 연마장치 및 연마방법 - Google Patents

연마장치 및 연마방법 Download PDF

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Publication number
KR101213017B1
KR101213017B1 KR1020077004421A KR20077004421A KR101213017B1 KR 101213017 B1 KR101213017 B1 KR 101213017B1 KR 1020077004421 A KR1020077004421 A KR 1020077004421A KR 20077004421 A KR20077004421 A KR 20077004421A KR 101213017 B1 KR101213017 B1 KR 101213017B1
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KR
South Korea
Prior art keywords
substrate
polishing
unit
polishing unit
support
Prior art date
Application number
KR1020077004421A
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English (en)
Korean (ko)
Other versions
KR20070046886A (ko
Inventor
아키라 에지마타니
Original Assignee
미쓰보시 다이야몬도 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 미쓰보시 다이야몬도 고교 가부시키가이샤 filed Critical 미쓰보시 다이야몬도 고교 가부시키가이샤
Publication of KR20070046886A publication Critical patent/KR20070046886A/ko
Application granted granted Critical
Publication of KR101213017B1 publication Critical patent/KR101213017B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Liquid Crystal (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
KR1020077004421A 2004-09-03 2005-09-01 연마장치 및 연마방법 KR101213017B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00291950 2004-09-03
JP2004291950 2004-09-03

Publications (2)

Publication Number Publication Date
KR20070046886A KR20070046886A (ko) 2007-05-03
KR101213017B1 true KR101213017B1 (ko) 2012-12-17

Family

ID=36000156

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077004421A KR101213017B1 (ko) 2004-09-03 2005-09-01 연마장치 및 연마방법

Country Status (7)

Country Link
US (1) US20090029627A1 (zh)
EP (1) EP1800797A4 (zh)
JP (1) JP4920416B2 (zh)
KR (1) KR101213017B1 (zh)
CN (1) CN101005921B (zh)
TW (1) TWI394638B (zh)
WO (1) WO2006025507A1 (zh)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8585467B2 (en) * 2008-10-31 2013-11-19 Corning Incorporated Linear pressure feed grinding with voice coil
JP5321813B2 (ja) * 2009-03-11 2013-10-23 株式会社東京精密 面取り加工装置及び面取り加工方法
JP2010264549A (ja) * 2009-05-14 2010-11-25 Olympus Corp ワーク貼付部材および研磨加工方法
JP5384220B2 (ja) * 2009-06-22 2014-01-08 東京応化工業株式会社 アライメント装置およびアライメント方法
KR101377819B1 (ko) 2012-04-25 2014-03-25 현대제철 주식회사 엣지결함개선기능이 구비된 슬라브가공장치 및 그 제어방법
US20140080384A1 (en) * 2012-09-17 2014-03-20 Shenzhen China Star Optoelectronics Technology Co., Ltd. Edge-grinding machine for liquid crystal panel
JP6050086B2 (ja) * 2012-10-30 2016-12-21 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス基板の製造方法
CN103273394B (zh) * 2013-05-08 2015-11-25 深圳市华星光电技术有限公司 一种磨边机及其定盘装置
JP6398902B2 (ja) 2014-08-19 2018-10-03 信越化学工業株式会社 インプリント・リソグラフィ用角形基板及びその製造方法
JP6344566B2 (ja) * 2014-09-26 2018-06-20 日本電気硝子株式会社 ガラス板の端部加工装置及び端部加工方法
CN105729267B (zh) * 2016-02-03 2018-06-12 华中科技大学 一种基于视觉控制的磨边装置及方法
US10685863B2 (en) 2018-04-27 2020-06-16 Semiconductor Components Industries, Llc Wafer thinning systems and related methods
CN109333317B (zh) * 2018-12-10 2019-12-27 江西立德传动设备有限公司 一种机械设备加工抛光装置
CN109434664A (zh) * 2018-12-25 2019-03-08 广东大雅智能厨电股份有限公司 一种自动跟踪轮廓的抛光装置
JP2020163529A (ja) * 2019-03-29 2020-10-08 株式会社荏原製作所 基板を保持するための研磨ヘッドおよび基板処理装置
CN112476151B (zh) * 2020-11-23 2022-02-11 华辰精密装备（昆山）股份有限公司 轧辊支撑方法及用于支撑轧辊的中心架系统
KR102531086B1 (ko) * 2021-01-06 2023-05-11 (주)미래컴퍼니 연마 장치 및 연마 방법
CN113118893B (zh) * 2021-04-19 2022-04-22 秦皇岛永祯钢结构制造有限公司 一种装配式钢结构预制件精加工系统
CN113211286A (zh) * 2021-06-03 2021-08-06 陈平 一种出口木材家具用自动抛光设备
CN115026697B (zh) * 2022-06-10 2023-12-22 宁夏钢铁(集团)有限责任公司 一种耐腐蚀不锈钢覆层钢筋的制备装置及使用方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001114524A (ja) 1999-10-12 2001-04-24 Bando Kiko Kk ガラス板の加工機械
US20020019201A1 (en) 2000-01-03 2002-02-14 Bushell Scott B. Apparatus for grinding rigid materials

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0393939U (zh) * 1990-01-12 1991-09-25
JP2503832B2 (ja) * 1992-03-30 1996-06-05 坂東機工株式会社 ガラス板の数値制御加工装置
EP0703497A1 (en) * 1994-09-22 1996-03-27 Eastman Kodak Company Apparatus for separating a multi-image, parent sheet into discrete, single-image, finished sheets
JPH08197402A (ja) * 1995-01-25 1996-08-06 Mitsuboshi Daiyamondo Kogyo Kk ガラス基板の研磨方法および装置
JPH10138105A (ja) * 1996-11-11 1998-05-26 Nippon Steel Corp 板状材料の端部研削装置
CN101967039B (zh) * 2002-01-16 2013-05-08 三星钻石工业股份有限公司 脆材基板划刻器及划刻和断开系统
JP2003251551A (ja) * 2002-02-28 2003-09-09 Nakamura Tome Precision Ind Co Ltd 液晶基板等の加工方法及びその装置
JP2003275995A (ja) * 2002-03-25 2003-09-30 Access Consulting:Kk 円形状シート切断方法およびその装置
JP2004099424A (ja) * 2002-07-16 2004-04-02 Shiraitekku:Kk ガラスの加工装置
US7125319B2 (en) * 2003-10-27 2006-10-24 Corning Incorporated Apparatus and method for grinding and/or polishing an edge of a glass sheet
JP2005324291A (ja) * 2004-05-14 2005-11-24 Hitachi Zosen Corp 研磨補助具およびこれを備えた研磨装置
JP4037386B2 (ja) * 2004-05-18 2008-01-23 中村留精密工業株式会社 ワークの側辺加工方法及び装置
JP4290611B2 (ja) * 2004-07-13 2009-07-08 中村留精密工業株式会社 側辺加工装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001114524A (ja) 1999-10-12 2001-04-24 Bando Kiko Kk ガラス板の加工機械
US20020019201A1 (en) 2000-01-03 2002-02-14 Bushell Scott B. Apparatus for grinding rigid materials

Also Published As

Publication number Publication date
CN101005921A (zh) 2007-07-25
US20090029627A1 (en) 2009-01-29
TW200618936A (en) 2006-06-16
JP4920416B2 (ja) 2012-04-18
JPWO2006025507A1 (ja) 2008-05-08
CN101005921B (zh) 2010-10-27
WO2006025507A1 (ja) 2006-03-09
EP1800797A1 (en) 2007-06-27
KR20070046886A (ko) 2007-05-03
TWI394638B (zh) 2013-05-01
EP1800797A4 (en) 2011-01-26

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