KR101206416B1 - 루테늄(Ｒｕ)타겟 제조를 위한 루테늄 분말 제조방법 - Google Patents

루테늄(Ｒｕ)타겟 제조를 위한 루테늄 분말 제조방법 Download PDF

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KR101206416B1
KR101206416B1 KR1020110042657A KR20110042657A KR101206416B1 KR 101206416 B1 KR101206416 B1 KR 101206416B1 KR 1020110042657 A KR1020110042657 A KR 1020110042657A KR 20110042657 A KR20110042657 A KR 20110042657A KR 101206416 B1 KR101206416 B1 KR 101206416B1
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KR
South Korea
Prior art keywords
powder
ruthenium
plasma
target
heat treatment
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KR1020110042657A
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English (en)
Korean (ko)
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KR20120124803A (ko
Inventor
윤원규
양승호
홍길수
김홍식
강동한
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희성금속 주식회사
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Priority to KR1020110042657A priority Critical patent/KR101206416B1/ko
Priority to JP2014509236A priority patent/JP5733732B2/ja
Priority to PCT/KR2012/000741 priority patent/WO2012150757A1/ko
Priority to SG2013079744A priority patent/SG194655A1/en
Priority to US14/115,597 priority patent/US20140123810A1/en
Publication of KR20120124803A publication Critical patent/KR20120124803A/ko
Application granted granted Critical
Publication of KR101206416B1 publication Critical patent/KR101206416B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/14—Making metallic powder or suspensions thereof using physical processes using electric discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/16—Making metallic powder or suspensions thereof using chemical processes
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0466—Alloys based on noble metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F2009/001—Making metallic powder or suspensions thereof from scrap particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/20—Recycling

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Nitrogen Condensed Heterocyclic Rings (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Manufacture And Refinement Of Metals (AREA)
KR1020110042657A 2011-05-04 2011-05-04 루테늄(Ｒｕ)타겟 제조를 위한 루테늄 분말 제조방법 KR101206416B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020110042657A KR101206416B1 (ko) 2011-05-04 2011-05-04 루테늄(Ｒｕ)타겟 제조를 위한 루테늄 분말 제조방법
JP2014509236A JP5733732B2 (ja) 2011-05-04 2012-01-31 ルテニウム（Ｒｕ）ターゲット製造のためのルテニウム粉末製造方法
PCT/KR2012/000741 WO2012150757A1 (ko) 2011-05-04 2012-01-31 루테늄(Ｒｕ)타겟 제조를 위한 루테늄 분말 제조방법
SG2013079744A SG194655A1 (en) 2011-05-04 2012-01-31 Preparation method of ruthenium (ru) powder for preparation of ruthenium target
US14/115,597 US20140123810A1 (en) 2011-05-04 2012-01-31 Preparation method of Ruthenium(Ru) powder for preparation of Ruthenium target

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110042657A KR101206416B1 (ko) 2011-05-04 2011-05-04 루테늄(Ｒｕ)타겟 제조를 위한 루테늄 분말 제조방법

Publications (2)

Publication Number Publication Date
KR20120124803A KR20120124803A (ko) 2012-11-14
KR101206416B1 true KR101206416B1 (ko) 2012-11-29

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110042657A KR101206416B1 (ko) 2011-05-04 2011-05-04 루테늄(Ｒｕ)타겟 제조를 위한 루테늄 분말 제조방법

Country Status (5)

Country Link
US (1) US20140123810A1 (ja)
JP (1) JP5733732B2 (ja)
KR (1) KR101206416B1 (ja)
SG (1) SG194655A1 (ja)
WO (1) WO2012150757A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150003580A (ko) * 2013-07-01 2015-01-09 희성금속 주식회사 루테늄 분말 및 루테늄 타겟의 제조방법
KR20150049883A (ko) * 2013-10-31 2015-05-08 희성금속 주식회사 스퍼터링 폐 타겟의 재생방법 및 이에 의해 재생된 스퍼터링 타겟
KR20160050485A (ko) * 2014-10-29 2016-05-11 희성금속 주식회사 루테늄 또는 루테늄 합금계 스퍼터링 타겟의 제조방법 및 이로부터 제조된 루테늄 또는 루테늄 합금계 스퍼터링 타겟
KR20160050491A (ko) * 2014-10-29 2016-05-11 희성금속 주식회사 루테늄 또는 루테늄 합금계 스퍼터링 폐타겟의 재생방법 및 이로부터 제조된 균일한 결정립을 갖는 루테늄 또는 루테늄 합금계 재활용 스퍼터링 타겟
JP7296232B2 (ja) * 2019-03-27 2023-06-22 株式会社フルヤ金属 中実球状粉末の製造方法及び造形製品の製造方法
CN114105228B (zh) * 2021-11-25 2022-08-19 西北有色金属研究院 一种厚膜电阻用氧化钌的制备方法
CN114289727A (zh) * 2021-12-09 2022-04-08 贵研铂业股份有限公司 一种高均质微粒径高纯钌粉及其制备方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001342506A (ja) 2000-05-31 2001-12-14 Hitachi Metals Ltd 粉末原料の製造方法およびターゲット材の製造方法
JP2005154834A (ja) 2003-11-26 2005-06-16 Hitachi Metals Ltd ルテニウム超微粉末およびその製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09227965A (ja) * 1996-02-19 1997-09-02 Mitsubishi Materials Corp 精製金属ルテニウム粉末とその製造方法
JP2001020065A (ja) * 1999-07-07 2001-01-23 Hitachi Metals Ltd スパッタリング用ターゲット及びその製造方法ならびに高融点金属粉末材料
JP2007070650A (ja) * 2005-09-02 2007-03-22 Asahi Pretec Corp ルテニウム酸化物の製法およびルテニウム粉末の製法
CA2648771C (en) * 2006-04-14 2010-11-09 Hitachi Metals, Ltd. Process for producing low-oxygen metal powder
JP4527743B2 (ja) * 2007-03-09 2010-08-18 アサヒプリテック株式会社 ルテニウム金属粉末の製造方法
US8118906B2 (en) * 2007-10-29 2012-02-21 Heraeus Inc. Methodology for recycling Ru and Ru-alloy deposition targets and targets made of recycled Ru and Ru-based alloy powders
JP5294073B2 (ja) * 2008-03-25 2013-09-18 日立金属株式会社 Ｒｕターゲット材の製造方法
KR101143860B1 (ko) * 2009-12-24 2012-05-22 희성금속 주식회사 루테늄（Ｒｕ）폐타겟을 이용한 루테늄（Ｒｕ） 분말 및 루테늄（Ｒｕ） 타겟 재료 제조방법
KR101175676B1 (ko) * 2010-03-25 2012-08-22 희성금속 주식회사 폐 루테늄（Ｒｕ） 타겟을 이용한 고순도화 및 미세화된 루테늄（Ｒｕ）분말 제조법
KR101285284B1 (ko) * 2011-04-26 2013-07-11 희성금속 주식회사 폐 루테늄(Ｒｕ) 타겟을 이용한 초고순도 루테늄(Ｒｕ) 분말 및 타겟의 제조방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001342506A (ja) 2000-05-31 2001-12-14 Hitachi Metals Ltd 粉末原料の製造方法およびターゲット材の製造方法
JP2005154834A (ja) 2003-11-26 2005-06-16 Hitachi Metals Ltd ルテニウム超微粉末およびその製造方法

Also Published As

Publication number Publication date
WO2012150757A1 (ko) 2012-11-08
KR20120124803A (ko) 2012-11-14
SG194655A1 (en) 2013-12-30
US20140123810A1 (en) 2014-05-08
JP2014518939A (ja) 2014-08-07
JP5733732B2 (ja) 2015-06-10

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