KR101088501B1 - 성능개선된 ｍｅｍｓ 스캐닝 시스템 - Google Patents

성능개선된 ｍｅｍｓ 스캐닝 시스템 Download PDF

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Publication number
KR101088501B1
KR101088501B1 KR1020067018627A KR20067018627A KR101088501B1 KR 101088501 B1 KR101088501 B1 KR 101088501B1 KR 1020067018627 A KR1020067018627 A KR 1020067018627A KR 20067018627 A KR20067018627 A KR 20067018627A KR 101088501 B1 KR101088501 B1 KR 101088501B1
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South Korea
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delete delete
scan
scanner
mems
frequency
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Korean (ko)
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KR20070012651A (ko
Inventor
랜달 비. 스프라규
준 얀
제이슨 비. 타우셔
야트 오. 데이비스
존 알. 루이스
딘 알. 브라운
토마스 더블유. 몬타규
첸셀러 더블유. 브라운
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마이크로비젼, 인코퍼레이티드
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Pressure Sensors (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Laser Beam Printer (AREA)
  • Facsimile Heads (AREA)
KR1020067018627A 2004-02-09 2005-02-09 성능개선된 ｍｅｍｓ 스캐닝 시스템 Expired - Lifetime KR101088501B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US54289604P 2004-02-09 2004-02-09
US60/542,896 2004-02-09
US57113304P 2004-05-14 2004-05-14
US60/571,133 2004-05-14
PCT/US2005/004071 WO2005078509A2 (en) 2004-02-09 2005-02-09 Mems scanning system with improved performance

Publications (2)

Publication Number Publication Date
KR20070012651A KR20070012651A (ko) 2007-01-26
KR101088501B1 true KR101088501B1 (ko) 2011-12-01

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Family Applications (4)

Application Number Title Priority Date Filing Date
KR1020067018627A Expired - Lifetime KR101088501B1 (ko) 2004-02-09 2005-02-09 성능개선된 ｍｅｍｓ 스캐닝 시스템
KR1020067018624A Withdrawn KR20070012364A (ko) 2004-02-09 2005-02-09 Ｍｅｍｓ 스캐너 제조 방법 및 장치
KR1020067018625A Withdrawn KR20070012650A (ko) 2004-02-09 2005-02-09 광 빔 스캐닝 방법 및 장치
KR1020067018623A Withdrawn KR20070012649A (ko) 2004-02-09 2005-02-09 고성능 ｍｅｍｓ 스캐너

Family Applications After (3)

Application Number Title Priority Date Filing Date
KR1020067018624A Withdrawn KR20070012364A (ko) 2004-02-09 2005-02-09 Ｍｅｍｓ 스캐너 제조 방법 및 장치
KR1020067018625A Withdrawn KR20070012650A (ko) 2004-02-09 2005-02-09 광 빔 스캐닝 방법 및 장치
KR1020067018623A Withdrawn KR20070012649A (ko) 2004-02-09 2005-02-09 고성능 ｍｅｍｓ 스캐너

Country Status (6)

Country Link
US (3) US20050280879A1 (https=)
EP (4) EP1719012B9 (https=)
JP (4) JP2007525025A (https=)
KR (4) KR101088501B1 (https=)
AT (1) ATE551293T1 (https=)
WO (4) WO2005078508A2 (https=)

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