JPWO2022224573A1 - - Google Patents

Info

Publication number
JPWO2022224573A1
JPWO2022224573A1 JP2023516309A JP2023516309A JPWO2022224573A1 JP WO2022224573 A1 JPWO2022224573 A1 JP WO2022224573A1 JP 2023516309 A JP2023516309 A JP 2023516309A JP 2023516309 A JP2023516309 A JP 2023516309A JP WO2022224573 A1 JPWO2022224573 A1 JP WO2022224573A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023516309A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022224573A1 publication Critical patent/JPWO2022224573A1/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/101Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
JP2023516309A 2021-04-23 2022-02-18 Pending JPWO2022224573A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021073526 2021-04-23
PCT/JP2022/006579 WO2022224573A1 (ja) 2021-04-23 2022-02-18 駆動素子および光偏向素子

Publications (1)

Publication Number Publication Date
JPWO2022224573A1 true JPWO2022224573A1 (https=) 2022-10-27

Family

ID=83722807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023516309A Pending JPWO2022224573A1 (https=) 2021-04-23 2022-02-18

Country Status (3)

Country Link
US (1) US20240045198A1 (https=)
JP (1) JPWO2022224573A1 (https=)
WO (1) WO2022224573A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007522529A (ja) * 2004-02-09 2007-08-09 マイクロビジョン インコーポレイテッド 性能を改良したmems走査システム
JP2009204818A (ja) * 2008-02-27 2009-09-10 Denso Corp 光走査装置
WO2012172652A1 (ja) * 2011-06-15 2012-12-20 パイオニア株式会社 駆動装置
WO2013168275A1 (ja) * 2012-05-10 2013-11-14 パイオニア株式会社 駆動装置
US20140218700A1 (en) * 2011-09-04 2014-08-07 Maradin Technologies Ltd. Apparatus and methods for locking resonating frequency of a miniature system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007522529A (ja) * 2004-02-09 2007-08-09 マイクロビジョン インコーポレイテッド 性能を改良したmems走査システム
JP2009204818A (ja) * 2008-02-27 2009-09-10 Denso Corp 光走査装置
WO2012172652A1 (ja) * 2011-06-15 2012-12-20 パイオニア株式会社 駆動装置
US20140218700A1 (en) * 2011-09-04 2014-08-07 Maradin Technologies Ltd. Apparatus and methods for locking resonating frequency of a miniature system
WO2013168275A1 (ja) * 2012-05-10 2013-11-14 パイオニア株式会社 駆動装置

Also Published As

Publication number Publication date
US20240045198A1 (en) 2024-02-08
WO2022224573A1 (ja) 2022-10-27

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