KR101045036B1 - Ｉｃ 테스터 - Google Patents

Ｉｃ 테스터 Download PDF

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Publication number
KR101045036B1
KR101045036B1 KR1020070055950A KR20070055950A KR101045036B1 KR 101045036 B1 KR101045036 B1 KR 101045036B1 KR 1020070055950 A KR1020070055950 A KR 1020070055950A KR 20070055950 A KR20070055950 A KR 20070055950A KR 101045036 B1 KR101045036 B1 KR 101045036B1
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KR
South Korea
Prior art keywords
pin
pins
semiconductor integrated
integrated circuit
tester
Prior art date
Application number
KR1020070055950A
Other languages
English (en)
Korean (ko)
Other versions
KR20080091693A (ko
Inventor
히데키 나가누마
Original Assignee
요코가와 덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 요코가와 덴키 가부시키가이샤 filed Critical 요코가와 덴키 가부시키가이샤
Publication of KR20080091693A publication Critical patent/KR20080091693A/ko
Application granted granted Critical
Publication of KR101045036B1 publication Critical patent/KR101045036B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
KR1020070055950A 2007-04-09 2007-06-08 Ｉｃ 테스터 KR101045036B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-00101334 2007-04-09
JP2007101334A JP4978779B2 (ja) 2007-04-09 2007-04-09 半導体集積回路の試験方法及びｉｃテスタ

Publications (2)

Publication Number Publication Date
KR20080091693A KR20080091693A (ko) 2008-10-14
KR101045036B1 true KR101045036B1 (ko) 2011-06-30

Family

ID=39980331

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070055950A KR101045036B1 (ko) 2007-04-09 2007-06-08 Ｉｃ 테스터

Country Status (4)

Country Link
JP (1) JP4978779B2 (zh)
KR (1) KR101045036B1 (zh)
CN (1) CN101285864A (zh)
TW (1) TWI333079B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5003955B2 (ja) * 2007-11-21 2012-08-22 横河電機株式会社 Ｉｃテスタ
CN101697003B (zh) * 2009-11-06 2011-08-03 烽火通信科技股份有限公司 一种短路检测方法和短路检测装置
CN102244378B (zh) * 2010-05-11 2015-06-10 立锜科技股份有限公司 Ic的保护装置及方法
CN103544911A (zh) * 2012-07-17 2014-01-29 东莞万士达液晶显示器有限公司 电子装置
TWI461715B (zh) * 2012-12-06 2014-11-21 Wistron Corp 測試裝置以及電子裝置的測試方法
TWI618937B (zh) * 2016-12-27 2018-03-21 瑞昱半導體股份有限公司 積體電路測試方法
CN106771832B (zh) * 2017-02-23 2019-08-16 京东方科技集团股份有限公司 一种电路检测装置、电路检测方法及应用其的显示装置
US20210041488A1 (en) * 2019-08-11 2021-02-11 Nuvoton Technology Corporation Measuring Input Capacitance with Automatic Test Equipment (ATE)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06186302A (ja) * 1992-12-18 1994-07-08 Nippon Steel Corp 半導体装置
JP2002122623A (ja) 2000-10-12 2002-04-26 Yoshikazu Ichiyama 回路基板の短絡回路検出装置
KR20040063576A (ko) * 2003-01-08 2004-07-14 삼성전자주식회사 누설 전류 측정에 의한 반도체 장치의 출력핀들에 대한단락/단선 테스트 방법
JP2007019329A (ja) 2005-07-08 2007-01-25 Toyota Motor Corp 半導体装置およびその端子間短絡検出方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04128665A (ja) * 1990-09-19 1992-04-30 Nec Yamagata Ltd 半導体装置の開放・接触検出装置
JP2919147B2 (ja) * 1992-01-13 1999-07-12 九州日本電気株式会社 半導体集積回路の試験方法
JP3246543B2 (ja) * 1996-05-28 2002-01-15 日本電気株式会社 半導体装置の試験方法
JPH10339756A (ja) * 1997-06-10 1998-12-22 Yokogawa Electric Corp ピン間ショート検査方法及びその検査方法を用いたｌｓｉ試験装置
JP2001004968A (ja) * 1999-06-18 2001-01-12 Sharp Corp 液晶表示装置及びその検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06186302A (ja) * 1992-12-18 1994-07-08 Nippon Steel Corp 半導体装置
JP2002122623A (ja) 2000-10-12 2002-04-26 Yoshikazu Ichiyama 回路基板の短絡回路検出装置
KR20040063576A (ko) * 2003-01-08 2004-07-14 삼성전자주식회사 누설 전류 측정에 의한 반도체 장치의 출력핀들에 대한단락/단선 테스트 방법
JP2007019329A (ja) 2005-07-08 2007-01-25 Toyota Motor Corp 半導体装置およびその端子間短絡検出方法

Also Published As

Publication number Publication date
TWI333079B (en) 2010-11-11
JP2008256632A (ja) 2008-10-23
TW200841029A (en) 2008-10-16
KR20080091693A (ko) 2008-10-14
JP4978779B2 (ja) 2012-07-18
CN101285864A (zh) 2008-10-15

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