KR101011854B1 - 리소그래피용 세정액 및 이것을 이용한 세정방법 - Google Patents
리소그래피용 세정액 및 이것을 이용한 세정방법 Download PDFInfo
- Publication number
- KR101011854B1 KR101011854B1 KR1020087017276A KR20087017276A KR101011854B1 KR 101011854 B1 KR101011854 B1 KR 101011854B1 KR 1020087017276 A KR1020087017276 A KR 1020087017276A KR 20087017276 A KR20087017276 A KR 20087017276A KR 101011854 B1 KR101011854 B1 KR 101011854B1
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- KR
- South Korea
- Prior art keywords
- cleaning
- lithography
- cleaning liquid
- washing
- component
- Prior art date
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- 238000004140 cleaning Methods 0.000 title claims abstract description 261
- 239000007788 liquid Substances 0.000 title claims abstract description 147
- 238000001459 lithography Methods 0.000 title claims abstract description 72
- 238000000034 method Methods 0.000 title claims description 63
- 239000003960 organic solvent Substances 0.000 claims abstract description 32
- 239000002904 solvent Substances 0.000 claims abstract description 18
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 claims abstract description 9
- 150000002576 ketones Chemical class 0.000 claims abstract description 9
- 150000005224 alkoxybenzenes Chemical class 0.000 claims abstract description 8
- 150000002596 lactones Chemical class 0.000 claims abstract description 7
- 238000005406 washing Methods 0.000 claims description 63
- 239000000758 substrate Substances 0.000 claims description 56
- 238000000576 coating method Methods 0.000 claims description 53
- 239000011248 coating agent Substances 0.000 claims description 52
- 239000000463 material Substances 0.000 claims description 51
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 19
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical group COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 claims description 17
- 239000000126 substance Substances 0.000 claims description 17
- 238000000671 immersion lithography Methods 0.000 claims description 15
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 13
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical group COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 claims description 10
- -1 aromatic alcohols Chemical class 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 9
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 5
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 claims description 5
- SYBYTAAJFKOIEJ-UHFFFAOYSA-N 3-Methylbutan-2-one Chemical compound CC(C)C(C)=O SYBYTAAJFKOIEJ-UHFFFAOYSA-N 0.000 claims description 4
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 claims description 2
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 claims description 2
- 230000002411 adverse Effects 0.000 abstract description 10
- 150000001298 alcohols Chemical class 0.000 abstract 1
- 125000003118 aryl group Chemical group 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000000203 mixture Substances 0.000 description 18
- 230000001681 protective effect Effects 0.000 description 17
- 239000011347 resin Substances 0.000 description 17
- 229920005989 resin Polymers 0.000 description 17
- 239000010703 silicon Substances 0.000 description 16
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 15
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 8
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 8
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 6
- 125000004432 carbon atom Chemical group C* 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 125000003545 alkoxy group Chemical group 0.000 description 5
- 238000013329 compounding Methods 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- OZJPLYNZGCXSJM-UHFFFAOYSA-N 5-valerolactone Chemical compound O=C1CCCCO1 OZJPLYNZGCXSJM-UHFFFAOYSA-N 0.000 description 4
- 229920000178 Acrylic resin Polymers 0.000 description 4
- 239000004925 Acrylic resin Substances 0.000 description 4
- WVDDGKGOMKODPV-UHFFFAOYSA-N Benzyl alcohol Chemical compound OCC1=CC=CC=C1 WVDDGKGOMKODPV-UHFFFAOYSA-N 0.000 description 4
- 239000000356 contaminant Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 125000001153 fluoro group Chemical group F* 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 229920003986 novolac Polymers 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- OHBQPCCCRFSCAX-UHFFFAOYSA-N 1,4-Dimethoxybenzene Chemical compound COC1=CC=C(OC)C=C1 OHBQPCCCRFSCAX-UHFFFAOYSA-N 0.000 description 2
- WAPNOHKVXSQRPX-UHFFFAOYSA-N 1-phenylethanol Chemical compound CC(O)C1=CC=CC=C1 WAPNOHKVXSQRPX-UHFFFAOYSA-N 0.000 description 2
- WRMNZCZEMHIOCP-UHFFFAOYSA-N 2-phenylethanol Chemical compound OCCC1=CC=CC=C1 WRMNZCZEMHIOCP-UHFFFAOYSA-N 0.000 description 2
- ASHGTJPOSUFTGB-UHFFFAOYSA-N 3-methoxyphenol Chemical compound COC1=CC=CC(O)=C1 ASHGTJPOSUFTGB-UHFFFAOYSA-N 0.000 description 2
- OIGWAXDAPKFNCQ-UHFFFAOYSA-N 4-isopropylbenzyl alcohol Chemical compound CC(C)C1=CC=C(CO)C=C1 OIGWAXDAPKFNCQ-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZFMSMUAANRJZFM-UHFFFAOYSA-N Estragole Chemical compound COC1=CC=C(CC=C)C=C1 ZFMSMUAANRJZFM-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- JBFHTYHTHYHCDJ-UHFFFAOYSA-N gamma-caprolactone Chemical compound CCC1CCC(=O)O1 JBFHTYHTHYHCDJ-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- LHGVFZTZFXWLCP-UHFFFAOYSA-N guaiacol Chemical compound COC1=CC=CC=C1O LHGVFZTZFXWLCP-UHFFFAOYSA-N 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 239000008155 medical solution Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- BVJSUAQZOZWCKN-UHFFFAOYSA-N p-hydroxybenzyl alcohol Chemical compound OCC1=CC=C(O)C=C1 BVJSUAQZOZWCKN-UHFFFAOYSA-N 0.000 description 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 229920000058 polyacrylate Polymers 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 125000004417 unsaturated alkyl group Chemical group 0.000 description 2
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 1
- DPZNOMCNRMUKPS-UHFFFAOYSA-N 1,3-Dimethoxybenzene Chemical compound COC1=CC=CC(OC)=C1 DPZNOMCNRMUKPS-UHFFFAOYSA-N 0.000 description 1
- UALKQROXOHJHFG-UHFFFAOYSA-N 1-ethoxy-3-methylbenzene Chemical compound CCOC1=CC=CC(C)=C1 UALKQROXOHJHFG-UHFFFAOYSA-N 0.000 description 1
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- RZTOWFMDBDPERY-UHFFFAOYSA-N Delta-Hexanolactone Chemical compound CC1CCCC(=O)O1 RZTOWFMDBDPERY-UHFFFAOYSA-N 0.000 description 1
- DYUQAZSOFZSPHD-UHFFFAOYSA-N Phenylpropanol Chemical compound CCC(O)C1=CC=CC=C1 DYUQAZSOFZSPHD-UHFFFAOYSA-N 0.000 description 1
- XMUZQOKACOLCSS-UHFFFAOYSA-N [2-(hydroxymethyl)phenyl]methanol Chemical compound OCC1=CC=CC=C1CO XMUZQOKACOLCSS-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- XPNGNIFUDRPBFJ-UHFFFAOYSA-N alpha-methylbenzylalcohol Natural products CC1=CC=CC=C1CO XPNGNIFUDRPBFJ-UHFFFAOYSA-N 0.000 description 1
- ZIXLDMFVRPABBX-UHFFFAOYSA-N alpha-methylcyclopentanone Natural products CC1CCCC1=O ZIXLDMFVRPABBX-UHFFFAOYSA-N 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- QTQUJRIHTSIVOF-UHFFFAOYSA-N amino(phenyl)methanol Chemical compound NC(O)C1=CC=CC=C1 QTQUJRIHTSIVOF-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 150000001555 benzenes Chemical group 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 150000002168 ethanoic acid esters Chemical class 0.000 description 1
- NHOGGUYTANYCGQ-UHFFFAOYSA-N ethenoxybenzene Chemical group C=COC1=CC=CC=C1 NHOGGUYTANYCGQ-UHFFFAOYSA-N 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- JBTWLSYIZRCDFO-UHFFFAOYSA-N ethyl methyl carbonate Chemical class CCOC(=O)OC JBTWLSYIZRCDFO-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 150000003951 lactams Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- SFBTTWXNCQVIEC-UHFFFAOYSA-N o-Vinylanisole Chemical compound COC1=CC=CC=C1C=C SFBTTWXNCQVIEC-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 125000004368 propenyl group Chemical group C(=CC)* 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000011877 solvent mixture Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- RUVINXPYWBROJD-ONEGZZNKSA-N trans-anethole Chemical compound COC1=CC=C(\C=C\C)C=C1 RUVINXPYWBROJD-ONEGZZNKSA-N 0.000 description 1
- ABDKAPXRBAPSQN-UHFFFAOYSA-N veratrole Chemical compound COC1=CC=CC=C1OC ABDKAPXRBAPSQN-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5022—Organic solvents containing oxygen
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/34—Imagewise removal by selective transfer, e.g. peeling away
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02082—Cleaning product to be cleaned
- H01L21/02087—Cleaning of wafer edges
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Emergency Medicine (AREA)
- Life Sciences & Earth Sciences (AREA)
- Computer Hardware Design (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Detergent Compositions (AREA)
Abstract
Description
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
GBL |
ANS |
CH |
MEK |
컵 세정성 |
에지 세정성 |
에지 상면부 잔사 |
에지 측면부 잔사 |
||
실 시 예 1 |
1 | 40 | 50 | - | 10 | ○ | ○ | ○ | ○ |
2 | 30 | 50 | - | 20 | ○ | ○ | ○ | ○ | |
3 | 5 | 90 | - | 5 | ○ | ○ | ○ | ○ | |
4 | 5 | 50 | 40 | 5 | ○ | ○ | ○ | ○ | |
5 | 10 | 40 | 40 | 10 | ○ | ○ | ○ | ○ | |
6 | 20 | 30 | 30 | 20 | ○ | ○ | ○ | ○ | |
7 | 20 | 40 | 40 | - | ○ | ○ | ○ | ○ | |
비 교 예 1 |
8 | 50 | 50 | - | - | ○ | △ | ○ | △ |
9 | 70 | - | - | 30 | ○ | △ | ○ | ● | |
10 | - | 70 | - | 30 | × | ○ | ○ | × |
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
GBL |
ANS |
CH |
MEK |
컵 세정성 |
에지 세정성 |
에지 상면부 잔사 |
에지 측면부 잔사 |
||
실 시 예 2 |
1 | 40 | 50 | - | 10 | ○ | ○ | ○ | ○ |
2 | 30 | 50 | - | 20 | ○ | ○ | ○ | ○ | |
3 | 5 | 90 | - | 5 | ○ | ○ | ○ | ○ | |
4 | 5 | 50 | 40 | 5 | ○ | ○ | ○ | ○ | |
5 | 10 | 40 | 40 | 10 | ○ | ○ | ○ | ○ | |
6 | 20 | 30 | 30 | 20 | ○ | ○ | ○ | ○ | |
7 | 20 | 40 | 40 | - | ○ | ○ | ○ | ○ | |
비 교 예 2 |
8 | 50 | 50 | - | - | ○ | ○ | ○ | ● |
9 | 70 | - | - | 30 | ○ | △ | ○ | ● | |
10 | - | 70 | - | 30 | ○ | △ | ○ | × |
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
GBL |
ANS |
CH |
MEK |
컵 세정성 |
에지 세정성 |
에지 상면부 잔사 |
에지 측면부 잔사 |
||
실 시 예 3 |
1 | 40 | 50 | - | 10 | ○ | ○ | ○ | ○ |
2 | 30 | 50 | - | 20 | ○ | ○ | ○ | ○ | |
3 | 5 | 90 | - | 5 | ○ | ○ | ○ | ○ | |
4 | 5 | 50 | 40 | 5 | ○ | ○ | ○ | ○ | |
5 | 10 | 40 | 40 | 10 | ○ | ○ | ○ | ○ | |
6 | 20 | 30 | 30 | 20 | ○ | ○ | ○ | ○ | |
7 | 20 | 40 | 40 | - | ○ | ○ | ○ | ○ | |
비 교 예 3 |
8 | 50 | 50 | - | - | ○ | △ | ○ | ● |
9 | 70 | - | - | 30 | ○ | △ | ○ | ● | |
10 | - | 70 | - | 30 | ○ | △ | ○ | △ |
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
GBL |
ANS |
CH |
MEK |
컵 세정성 |
에지 세정성 |
에지 상면부 잔사 |
에지 측면부 잔사 |
||
실 시 예 4 |
1 | 40 | 50 | - | 10 | ○ | ○ | ○ | ○ |
2 | 30 | 50 | - | 20 | ○ | ○ | ○ | ○ | |
3 | 5 | 90 | - | 5 | ○ | ○ | ○ | ○ | |
4 | 5 | 50 | 40 | 5 | ○ | ○ | ○ | ○ | |
5 | 10 | 40 | 40 | 10 | ○ | ○ | ○ | ○ | |
6 | 20 | 30 | 30 | 20 | ○ | ○ | ○ | ○ | |
7 | 20 | 40 | 40 | - | ○ | ○ | ○ | ○ | |
비 교 예 4 |
8 | 50 | 50 | - | - | ○ | △ | △ | ● |
9 | 70 | - | - | 30 | ○ | ○ | △ | ● | |
10 | - | 70 | - | 30 | × | △ | △ | △ |
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
GBL |
ANS |
CH |
MEK |
컵 세정성 |
에지 세정성 |
에지 상면부 잔사 |
에지 측면부 잔사 |
||
실 시 예 5 |
1 | 40 | 50 | - | 10 | ○ | ○ | ○ | ○ |
2 | 30 | 50 | - | 20 | ○ | ○ | ○ | ○ | |
3 | 5 | 90 | - | 5 | ○ | ○ | ○ | ○ | |
4 | 5 | 50 | 40 | 5 | ○ | ○ | ○ | ○ | |
5 | 10 | 40 | 40 | 10 | ○ | ○ | ○ | ○ | |
6 | 20 | 30 | 30 | 20 | ○ | ○ | ○ | ○ | |
7 | 20 | 40 | 40 | - | ○ | ○ | ○ | ○ | |
비 교 예 5 |
8 | 50 | 50 | - | - | ○ | △ | △ | ● |
9 | 70 | - | - | 30 | ○ | △ | ○ | ● | |
10 | - | 70 | - | 30 | ○ | △ | ○ | × |
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
GBL |
ANS |
CH |
MEK |
컵 세정성 |
에지 세정성 |
에지 상면부 잔사 |
에지 측면부 잔사 |
||
실 시 예 6 |
1 | 40 | 50 | - | 10 | ○ | ○ | ○ | ○ |
2 | 30 | 50 | - | 20 | ○ | ○ | ○ | ○ | |
3 | 5 | 90 | - | 5 | ○ | ○ | ○ | ○ | |
4 | 5 | 50 | 40 | 5 | ○ | ○ | ○ | ○ | |
5 | 10 | 40 | 40 | 10 | ○ | ○ | ○ | ○ | |
6 | 20 | 30 | 30 | 20 | ○ | ○ | ○ | ○ | |
7 | 20 | 40 | 40 | - | ○ | ○ | ○ | ○ | |
비 교 예 6 |
8 | 50 | 50 | - | - | ○ | △ | △ | ● |
9 | 70 | - | - | 30 | ○ | △ | ○ | ● | |
10 | - | 70 | - | 30 | ○ | △ | ○ | × |
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
PGME |
GBL |
ANS |
PGMEA |
컵 세정성 |
에지 세정성 |
에지 상부면 잔사 |
에지 측면부 잔사 |
||
실 시 예 8 |
1 | 45 | 5 | 50 | - | ○ | ○ | ○ | ○ |
2 | 30 | 20 | 50 | - | ○ | ○ | ○ | ○ | |
3 | 20 | 30 | 50 | - | ○ | ○ | ○ | ○ | |
비 교 예 8 |
4 | - | 50 | 50 | - | ○ | △ | ○ | △ |
5 | 30 | 70 | - | - | ○ | △ | ○ | ● | |
6 | 70 | - | - | 30 | ○ | ○ | ○ | ○ |
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
PGME |
GBL |
ANS |
PGMEA |
컵 세정성 |
에지 세정성 |
에지 상부면 잔사 |
에지 측면부 잔사 |
||
실 시 예 9 |
1 | 45 | 5 | 50 | - | ○ | ○ | ○ | ○ |
2 | 30 | 20 | 50 | - | ○ | ○ | ○ | ○ | |
3 | 20 | 30 | 50 | - | ○ | ○ | ○ | ○ | |
비 교 예 9 |
4 | - | 50 | 50 | - | ○ | ○ | ○ | ● |
5 | 30 | 70 | - | - | ○ | △ | ○ | ● | |
6 | 70 | - | - | 30 | ○ | △ | ○ | ○ |
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
PGME |
GBL |
ANS |
PGMEA |
컵 세정성 |
에지 세정성 |
에지 상부면 잔사 |
에지 측면부 잔사 |
||
실 시 예 10 |
1 | 45 | 5 | 50 | - | ○ | ○ | ○ | ○ |
2 | 30 | 20 | 50 | - | ○ | ○ | ○ | ○ | |
3 | 20 | 30 | 50 | - | ○ | ○ | ○ | ○ | |
비 교 예 10 |
4 | - | 50 | 50 | - | ○ | △ | ○ | ● |
5 | 30 | 70 | - | - | ○ | △ | ○ | ● | |
6 | 70 | - | - | 30 | ○ | △ | ○ | × |
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
PGME |
GBL |
ANS |
PGMEA |
컵 세정성 |
에지 세정성 |
에지 상부면 잔사 |
에지 측면부 잔사 |
||
실 시 예 11 |
1 | 45 | 5 | 50 | - | ○ | ○ | ○ | ○ |
2 | 30 | 20 | 50 | - | ○ | ○ | ○ | ○ | |
3 | 20 | 30 | 50 | - | ○ | ○ | ○ | ○ | |
비 교 예 11 |
4 | - | 50 | 50 | - | ○ | △ | △ | ● |
5 | 30 | 70 | - | - | ○ | ○ | △ | ● | |
6 | 70 | - | - | 30 | × | △ | △ | × |
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
PGME |
GBL |
ANS |
PGMEA |
컵 세정성 |
에지 세정성 |
에지 상부면 잔사 |
에지 측면부 잔사 |
||
실 시 예 12 |
1 | 45 | 5 | 50 | - | ○ | ○ | ○ | ○ |
2 | 30 | 20 | 50 | - | ○ | ○ | ○ | ○ | |
3 | 20 | 30 | 50 | - | ○ | ○ | ○ | ○ | |
비 교 예 12 |
4 | - | 50 | 50 | - | ○ | △ | △ | ● |
5 | 30 | 70 | - | - | ○ | △ | ○ | ● | |
6 | 70 | - | - | 30 | ○ | × | ○ | × |
예 |
시료 No. |
성분(질량%) | 물 성 | ||||||
PGME |
GBL |
ANS |
PGMEA |
컵 세정성 |
에지 세정성 |
에지 상부면 잔사 |
에지 측면부 잔사 |
||
실 시 예 13 |
1 | 45 | 5 | 50 | - | ○ | ○ | ○ | ○ |
2 | 30 | 20 | 50 | - | ○ | ○ | ○ | ○ | |
3 | 20 | 30 | 50 | - | ○ | ○ | ○ | ○ | |
비 교 예 13 |
4 | - | 50 | 50 | - | ○ | △ | △ | ● |
5 | 30 | 70 | - | - | ○ | △ | ○ | ● | |
6 | 70 | - | - | 30 | ○ | △ | ○ | △ |
Claims (14)
- (A) 케톤계 유기용제 및 글리콜에테르계 유기용제 중에서 선택되는 적어도 1종의 용제와, (B) 락톤계 유기용제 중에서 선택되는 적어도 1종의 용제와, (C) 알콕시벤젠 및 방향족알코올 중에서 선택되는 적어도 1종의 용제와의 조합으로 이루어지는 혼합유기용제를 함유하는 것을 특징으로 하는 리소그래피용 세정액.
- 제 1항에 있어서,혼합유기용제 중의 (A)성분의 함유비율이 3 ~ 60질량%, (B)성분의 함유비율이 3 ~ 60질량%, (C)성분의 함유비율이 20 ~ 90질량%인 것을 특징으로 하는 리소그래피용 세정액.
- 제 1항에 있어서,(A)성분이 케톤계 유기용제 중에서 선택되는 적어도 1종의 용제인 것을 특징으로 하는 리소그래피용 세정액.
- 제 3항에 있어서,케톤계 유기용제가, 아세톤, 메틸에틸케톤, 메틸이소프로필케톤, 메틸이소부틸케톤 및 시클로헥사논 중에서 선택되는 적어도 1종의 용제인 것을 특징으로 하는 리소그래피용 세정액.
- 제 1항에 있어서,(A)성분이 글리콜에테르계 유기용제 중에서 선택되는 적어도 1종의 용제인 것을 특징으로 하는 리소그래피용 세정액.
- 제 5항에 있어서,글리콜에테르계 유기용제가 알킬렌글리콜알킬에테르 중에서 선택되는 적어도 1종의 용제인 것을 특징으로 하는 리소그래피용 세정액.
- 제 6항에 있어서,알킬렌글리콜알킬에테르가 프로필렌글리콜모노메틸에테르인 것을 특징으로 하는 리소그래피용 세정액.
- 제 1항 내지 제 7항 중 어느 한 항에 있어서,(B)성분이 γ-부틸로락톤인 것을 특징으로 하는 리소그래피용 세정액.
- 제 1항 내지 제 7항 중 어느 한 항에 있어서,(C)성분이 아니솔인 것을 특징으로 하는 리소그래피용 세정액.
- 제 1항 내지 제 7항 중 어느 한 항에 있어서,액침 리소그래피법을 이용한 기재(基材)제조에 있어서의 세정공정에 있어서 이용되는 것을 특징으로 하는 리소그래피용 세정액.
- 액침 리소그래피법을 이용한 기재제조에 있어서의 세정공정에 있어서, 제 1항 내지 제 7항 중 어느 한 항에 기재된 리소그래피용 세정액을 이용해서, 기재의 세정을 실행하는 것을 특징으로 하는 기재의 세정방법.
- 제 11항에 있어서,세정공정이, 기재상에 도막을 형성한 후의 기판의 이면부 또는 단부 가장자리부분 혹은 이 쌍방에 부착된 불필요한 도막의 제거공정, 기재상에 도막을 형성한 후의 기재상에 존재하는 도막 전체의 제거공정, 및 도막형성용 재료를 도포하기 전의 기재의 세정공정 중에서 선택되는 적어도 하나의 세정공정인 것을 특징으로 하는 기재의 세정방법.
- 액침 리소그래피법을 이용한 기재제조에 있어서, 제 1항 내지 제 7항 중 어느 한 항에 기재된 리소그래피용 세정액을 이용해서, 도막을 형성하기 위한 약액 공급장치의 세정을 실행하는 것을 특징으로 하는 약액 공급장치의 세정방법.
- 제 8항에 있어서,(C)성분이 아니솔인 것을 특징으로 하는 리소그래피용 세정액.
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JP2006047002A JP4643467B2 (ja) | 2006-02-23 | 2006-02-23 | リソグラフィー用洗浄液、およびこれを用いた基材の洗浄方法、並びに薬液供給装置の洗浄方法 |
JPJP-P-2006-00082093 | 2006-03-24 | ||
JP2006082093A JP4476956B2 (ja) | 2006-03-24 | 2006-03-24 | リソグラフィー用洗浄液、およびこれを用いた基材の洗浄方法、並びに薬液供給装置の洗浄方法 |
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JP2009117832A (ja) * | 2007-11-06 | 2009-05-28 | Asml Netherlands Bv | リソグラフィの基板を準備する方法、基板、デバイス製造方法、密封コーティングアプリケータ及び密封コーティング測定装置 |
JP5119985B2 (ja) * | 2008-03-06 | 2013-01-16 | 株式会社豊田自動織機 | コーティング装置の洗浄状態確認方法及び洗浄状態確認装置 |
JP5658941B2 (ja) * | 2010-08-05 | 2015-01-28 | 東京応化工業株式会社 | レジストパターン形成方法 |
JP6187778B2 (ja) | 2012-07-19 | 2017-08-30 | 日産化学工業株式会社 | 半導体用洗浄液及びそれを用いた洗浄方法 |
JP6876717B2 (ja) * | 2016-11-18 | 2021-05-26 | 富士フイルム株式会社 | 薬液、パターン形成方法、及び、キット |
WO2018092763A1 (ja) | 2016-11-18 | 2018-05-24 | 富士フイルム株式会社 | 薬液、薬液収容体、パターン形成方法、及び、キット |
CN114080570A (zh) * | 2019-07-08 | 2022-02-22 | 默克专利股份有限公司 | 用于移除边缘保护层及残余金属硬掩模组分的冲洗剂及其使用方法 |
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US20090029893A1 (en) | 2009-01-29 |
WO2007097233A1 (ja) | 2007-08-30 |
TW200739280A (en) | 2007-10-16 |
KR20080080380A (ko) | 2008-09-03 |
TWI363253B (en) | 2012-05-01 |
US7884062B2 (en) | 2011-02-08 |
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