KR100997968B1 - 박막 트랜지스터 표시판의 제조 방법 - Google Patents
박막 트랜지스터 표시판의 제조 방법 Download PDFInfo
- Publication number
- KR100997968B1 KR100997968B1 KR1020030071092A KR20030071092A KR100997968B1 KR 100997968 B1 KR100997968 B1 KR 100997968B1 KR 1020030071092 A KR1020030071092 A KR 1020030071092A KR 20030071092 A KR20030071092 A KR 20030071092A KR 100997968 B1 KR100997968 B1 KR 100997968B1
- Authority
- KR
- South Korea
- Prior art keywords
- electrode
- gate
- thin film
- drain electrode
- line
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract description 66
- 238000004519 manufacturing process Methods 0.000 title abstract description 25
- 238000000034 method Methods 0.000 claims abstract description 40
- 230000008569 process Effects 0.000 claims abstract description 35
- 239000004065 semiconductor Substances 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 18
- 238000000206 photolithography Methods 0.000 claims abstract description 17
- 230000001681 protective effect Effects 0.000 claims abstract description 8
- 238000005530 etching Methods 0.000 claims description 6
- 239000010408 film Substances 0.000 abstract description 47
- 230000003071 parasitic effect Effects 0.000 abstract description 9
- 239000003990 capacitor Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 46
- 239000004973 liquid crystal related substance Substances 0.000 description 39
- 229910052751 metal Inorganic materials 0.000 description 21
- 239000002184 metal Substances 0.000 description 21
- 238000003860 storage Methods 0.000 description 14
- 238000002161 passivation Methods 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 239000004020 conductor Substances 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 6
- 229910052750 molybdenum Inorganic materials 0.000 description 6
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910001182 Mo alloy Inorganic materials 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 235000011007 phosphoric acid Nutrition 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41733—Source or drain electrodes for field effect devices for thin film transistors with insulated gate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Nonlinear Science (AREA)
- Ceramic Engineering (AREA)
- Liquid Crystal (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
Claims (11)
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
- 기판 위에 게이트 전극을 가지는 게이트선을 형성하는 단계,상기 기판 위에 게이트 절연막을 적층하는 단계,상기 게이트 절연막 상부에 반도체층을 형성하는 단계,상기 반도체층과 접하는 소스 전극을 가지는 데이터선 및 상기 게이트 전극과 중첩하는 드레인 전극을 형성하는 단계,상기 반도체층을 덮는 보호막을 형성하는 단계,상기 드레인 전극과 연결되는 화소 전극을 형성하는 단계를 포함하며,상기 반도체층, 상기 데이터선 및 상기 드레인 전극 또는 상기 화소 전극은 사진 식각 공정의 노광 공정에서 감광막을 노광 및 현상한 감광막 패턴으로 식각 마스크로 사용하여 패터닝하며, 상기 드레인 전극과 중첩하는 상기 게이트 전극의 경계선은 상기 노광 공정에서 상기 감광막을 노광하는 스캐닝 방향에 대하여 수직하게 배치하는 박막 트랜지스터 표시판의 제조 방법.
- 제7항에서,상기 노광 공정은 서로 인접한 제1숏과 제2숏을 포함하는 다수의 숏으로 분할하여 노광하는 분할 노광 공정으로 실시하는 박막 트랜지스터 표시판의 제조 방법.
- 제7항에서,상기 드레인 전극은 상기 데이터선과 같은 방향으로 뻗어 있으며, 상기 소스 전극은 상기 드레인 전극을 둘러싸는 형태로 형성하고,상기 스캐닝 방향은 상기 데이터선과 같은 방향인 박막 트랜지스터 표시판의 제조 방법.
- 제9항에서,상기 드레인 전극과 중첩하는 상기 게이트 전극의 경계선은 상기 게이트선과 평행한 박막 트랜지스터 표시판의 제조 방법.
- 제10항에서,상기 드레인 전극은 상기 데이터선과 평행하게 형성하는 박막 트랜지스터 표시판의 제조 방법.
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030071092A KR100997968B1 (ko) | 2003-10-13 | 2003-10-13 | 박막 트랜지스터 표시판의 제조 방법 |
TW093129429A TWI333693B (en) | 2003-10-13 | 2004-09-29 | Thin film transistor array panel and manufacturing method thereof |
US10/954,524 US7151279B2 (en) | 2003-10-13 | 2004-09-29 | Thin film transistor array panel and manufacturing method thereof |
CN2008101807703A CN101447491B (zh) | 2003-10-13 | 2004-10-12 | 薄膜晶体管阵列面板 |
CNB2004100839272A CN100514640C (zh) | 2003-10-13 | 2004-10-12 | 薄膜晶体管阵列面板及其制造方法 |
JP2004298534A JP2005123620A (ja) | 2003-10-13 | 2004-10-13 | 薄膜トランジスタ表示板及びその製造方法 |
US11/612,141 US7408200B2 (en) | 2003-10-13 | 2006-12-18 | Thin film transistor array panel and manufacturing method thereof |
US12/119,707 US7550329B2 (en) | 2003-10-13 | 2008-05-13 | Thin film transistor array panel and manufacturing method thereof |
JP2009095173A JP2009218604A (ja) | 2003-10-13 | 2009-04-09 | 薄膜トランジスタ表示板の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030071092A KR100997968B1 (ko) | 2003-10-13 | 2003-10-13 | 박막 트랜지스터 표시판의 제조 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050035428A KR20050035428A (ko) | 2005-04-18 |
KR100997968B1 true KR100997968B1 (ko) | 2010-12-02 |
Family
ID=34567638
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020030071092A KR100997968B1 (ko) | 2003-10-13 | 2003-10-13 | 박막 트랜지스터 표시판의 제조 방법 |
Country Status (5)
Country | Link |
---|---|
US (3) | US7151279B2 (ko) |
JP (2) | JP2005123620A (ko) |
KR (1) | KR100997968B1 (ko) |
CN (2) | CN101447491B (ko) |
TW (1) | TWI333693B (ko) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101061844B1 (ko) * | 2004-06-29 | 2011-09-02 | 삼성전자주식회사 | 박막 표시판의 제조 방법 |
KR101160825B1 (ko) * | 2004-08-18 | 2012-06-29 | 삼성전자주식회사 | 액정 표시 장치 |
KR101090253B1 (ko) * | 2004-10-06 | 2011-12-06 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 이를 포함하는 액정 표시 장치 |
KR20060097381A (ko) * | 2005-03-09 | 2006-09-14 | 삼성전자주식회사 | 박막 트랜지스터 기판 및 이의 제조 방법 |
KR101217157B1 (ko) * | 2005-10-20 | 2012-12-31 | 엘지디스플레이 주식회사 | 액정표시장치용 어레이 기판 및 그 제조 방법 |
JP5231719B2 (ja) * | 2006-03-30 | 2013-07-10 | 富士通株式会社 | 電界効果トランジスタの製造方法 |
KR20090061112A (ko) * | 2007-12-11 | 2009-06-16 | 삼성전자주식회사 | 박막 트랜지스터 및 이를 구비하는 액정 표시 장치 |
WO2010032640A1 (en) | 2008-09-19 | 2010-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8411239B2 (en) | 2009-02-13 | 2013-04-02 | Sharp Kabushiki Kaisha | Array substrate, liquid crystal display device, electronic device |
TWI484271B (zh) * | 2012-08-09 | 2015-05-11 | Au Optronics Corp | 畫素結構及畫素結構的製作方法 |
CN108305881B (zh) | 2018-03-23 | 2020-08-11 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法、显示面板、显示装置 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60192369A (ja) | 1984-03-13 | 1985-09-30 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタ |
JPH02285326A (ja) | 1989-04-27 | 1990-11-22 | Toshiba Corp | アクティブマトリックス型液晶表示素子 |
JPH03233431A (ja) | 1990-02-09 | 1991-10-17 | Hitachi Ltd | 液晶ディスプレイパネル |
JP2639282B2 (ja) | 1992-06-23 | 1997-08-06 | 松下電器産業株式会社 | 液晶表示パネル |
JPH06202158A (ja) | 1993-01-05 | 1994-07-22 | Nec Corp | アクティブマトリクス液晶表示装置とその製造方法 |
JP3316704B2 (ja) | 1993-06-10 | 2002-08-19 | 株式会社ニコン | 投影露光装置、走査露光方法、及び素子製造方法 |
US5777703A (en) * | 1994-09-30 | 1998-07-07 | Sanyo Electric Co., Ltd. | Active matrix type liquid crystal display apparatus with a projection part in the drain line |
JP3592419B2 (ja) * | 1995-12-21 | 2004-11-24 | 富士通ディスプレイテクノロジーズ株式会社 | 液晶表示パネル |
KR100495794B1 (ko) | 1997-10-17 | 2005-09-28 | 삼성전자주식회사 | 액정표시장치용박막트랜지스터 |
JP2985838B2 (ja) | 1997-07-18 | 1999-12-06 | 日本電気株式会社 | 薄膜トランジスタアレイ基板の製造方法 |
US6255130B1 (en) * | 1998-11-19 | 2001-07-03 | Samsung Electronics Co., Ltd. | Thin film transistor array panel and a method for manufacturing the same |
JP4796221B2 (ja) * | 1998-11-26 | 2011-10-19 | 三星電子株式会社 | 液晶表示装置用薄膜トランジスタ基板及びその製造方法 |
KR100670057B1 (ko) | 1999-12-23 | 2007-01-17 | 삼성전자주식회사 | 액정 표시 장치용 박막 트랜지스터 기판 |
JP4508354B2 (ja) | 2000-04-28 | 2010-07-21 | キヤノン株式会社 | 走査露光装置および走査露光方法 |
JP4401551B2 (ja) | 2000-09-21 | 2010-01-20 | エーユー オプトロニクス コーポレイション | 液晶表示装置の製造方法、表示装置の製造方法、及び液晶表示装置 |
JP4211250B2 (ja) * | 2000-10-12 | 2009-01-21 | セイコーエプソン株式会社 | トランジスタ及びそれを備える表示装置 |
KR100643559B1 (ko) | 2000-12-04 | 2006-11-10 | 엘지.필립스 엘시디 주식회사 | 액정표시장치용 어레이기판과 그 제조방법 |
KR100469342B1 (ko) | 2001-07-11 | 2005-02-02 | 엘지.필립스 엘시디 주식회사 | 액정표시소자 |
JP4346841B2 (ja) | 2001-08-01 | 2009-10-21 | シャープ株式会社 | 薄膜トランジスタ、液晶表示装置及び薄膜トランジスタの製造方法 |
JP3831868B2 (ja) * | 2001-08-13 | 2006-10-11 | 大林精工株式会社 | アクティブマトリックス表示装置とその製造方法 |
KR100740938B1 (ko) * | 2001-08-30 | 2007-07-19 | 삼성전자주식회사 | 레이저 조사 표지를 가지는 박막 트랜지스터 기판 |
KR100840313B1 (ko) * | 2001-10-12 | 2008-06-20 | 삼성전자주식회사 | 광시야각 액정 표시 장치 및 그 기판 |
KR100391157B1 (ko) | 2001-10-25 | 2003-07-16 | 엘지.필립스 엘시디 주식회사 | 액정 표시 장치용 어레이 기판 및 그의 제조 방법 |
KR100464208B1 (ko) | 2001-12-20 | 2005-01-03 | 엘지.필립스 엘시디 주식회사 | 액정 표시장치 및 그 구동방법 |
US7463321B2 (en) * | 2002-01-15 | 2008-12-09 | Samsung Electronics Co., Ltd | Liquid crystal display and method for fabricating the display with openings in the protective layer and gate insulating layer |
KR100859524B1 (ko) * | 2002-07-11 | 2008-09-22 | 삼성전자주식회사 | 박막 트랜지스터 기판 |
US6920060B2 (en) | 2002-08-14 | 2005-07-19 | Intel Corporation | Memory device, circuits and methods for operating a memory device |
TWI234043B (en) * | 2003-11-26 | 2005-06-11 | Hannstar Display Corp | Method of manufacturing liquid crystal display |
-
2003
- 2003-10-13 KR KR1020030071092A patent/KR100997968B1/ko active IP Right Grant
-
2004
- 2004-09-29 TW TW093129429A patent/TWI333693B/zh active
- 2004-09-29 US US10/954,524 patent/US7151279B2/en active Active
- 2004-10-12 CN CN2008101807703A patent/CN101447491B/zh active Active
- 2004-10-12 CN CNB2004100839272A patent/CN100514640C/zh active Active
- 2004-10-13 JP JP2004298534A patent/JP2005123620A/ja active Pending
-
2006
- 2006-12-18 US US11/612,141 patent/US7408200B2/en active Active
-
2008
- 2008-05-13 US US12/119,707 patent/US7550329B2/en active Active
-
2009
- 2009-04-09 JP JP2009095173A patent/JP2009218604A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US7550329B2 (en) | 2009-06-23 |
JP2005123620A (ja) | 2005-05-12 |
US20080210943A1 (en) | 2008-09-04 |
CN101447491B (zh) | 2011-04-27 |
TWI333693B (en) | 2010-11-21 |
CN1610111A (zh) | 2005-04-27 |
TW200522364A (en) | 2005-07-01 |
JP2009218604A (ja) | 2009-09-24 |
KR20050035428A (ko) | 2005-04-18 |
CN100514640C (zh) | 2009-07-15 |
US20050104069A1 (en) | 2005-05-19 |
US20070091220A1 (en) | 2007-04-26 |
US7151279B2 (en) | 2006-12-19 |
CN101447491A (zh) | 2009-06-03 |
US7408200B2 (en) | 2008-08-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4977308B2 (ja) | 薄膜トランジスタ表示板及びその製造方法 | |
US20070211188A1 (en) | Thin film transistor array panel | |
JP2009218604A (ja) | 薄膜トランジスタ表示板の製造方法 | |
US8730418B2 (en) | Array substrate and method for manufacturing the same | |
KR20110021586A (ko) | 박막 트랜지스터 기판 및 그 제조 방법 | |
KR101383703B1 (ko) | 박막 트랜지스터 표시판 및 그의 제조 방법 | |
KR101006436B1 (ko) | 표시 장치용 박막 트랜지스터 표시판 | |
KR101090246B1 (ko) | 박막 트랜지스터 표시판 | |
KR101006435B1 (ko) | 노광 마스크, 이를 포함하는 노광 장치 및 이를 이용한표시 장치용 표시판의 제조 방법 | |
KR20050014060A (ko) | 박막 트랜지스터 표시판 및 그의 제조 방법 | |
KR100973806B1 (ko) | 박막 트랜지스터 표시판의 제조 방법 | |
KR101133754B1 (ko) | 액정 표시 장치 | |
KR20040097517A (ko) | 박막 트랜지스터 기판 | |
KR20050000129A (ko) | 액정 표시 장치 | |
KR20050063016A (ko) | 다중 도메인 박막 트랜지스터 표시판 및 이를 포함하는액정 표시 장치 | |
KR20060019819A (ko) | 액정 표시 장치 | |
KR101054337B1 (ko) | 표시 장치용 박막 트랜지스터 표시판 | |
KR100956342B1 (ko) | 박막 트랜지스터 기판 | |
KR100980011B1 (ko) | 다중 도메인 액정 표시 장치용 박막 트랜지스터 표시판 | |
KR100951354B1 (ko) | 박막 트랜지스터 표시판 | |
KR20050082666A (ko) | 박막 트랜지스터 표시판 및 이를 포함하는 액정 표시 장치 | |
KR20060016502A (ko) | 액정 표시 장치, 색필터 표시판 및 그 제조 방법 | |
KR20060020892A (ko) | 박막 트랜지스터 표시판 및 그의 제조 방법 | |
KR20050102442A (ko) | 박막 트랜지스터 표시판 및 그의 제조 방법 | |
KR20050008878A (ko) | 박막 트랜지스터 표시판 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20131031 Year of fee payment: 4 |
|
FPAY | Annual fee payment |
Payment date: 20141030 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20151030 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20171101 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20181101 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20191028 Year of fee payment: 10 |