KR100955983B1 - 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크수납체 - Google Patents

기판수납용기, 마스크 블랭크 수납체 및 전사 마스크수납체 Download PDF

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Publication number
KR100955983B1
KR100955983B1 KR1020060119149A KR20060119149A KR100955983B1 KR 100955983 B1 KR100955983 B1 KR 100955983B1 KR 1020060119149 A KR1020060119149 A KR 1020060119149A KR 20060119149 A KR20060119149 A KR 20060119149A KR 100955983 B1 KR100955983 B1 KR 100955983B1
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KR
South Korea
Prior art keywords
film
groove
substrate
glass substrate
mask blank
Prior art date
Application number
KR1020060119149A
Other languages
English (en)
Korean (ko)
Other versions
KR20070057028A (ko
Inventor
히데토 아라이
Original Assignee
호야 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 호야 가부시키가이샤 filed Critical 호야 가부시키가이샤
Publication of KR20070057028A publication Critical patent/KR20070057028A/ko
Application granted granted Critical
Publication of KR100955983B1 publication Critical patent/KR100955983B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D77/00—Packages formed by enclosing articles or materials in preformed containers, e.g. boxes, cartons, sacks or bags
    • B65D77/22—Details
    • B65D77/24—Inserts or accessories added or incorporated during filling of containers
    • B65D77/26—Elements or devices for locating or protecting articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Packages (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
KR1020060119149A 2005-11-30 2006-11-29 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크수납체 KR100955983B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005345272A JP4801981B2 (ja) 2005-11-30 2005-11-30 基板収納容器、膜付きガラス基板収納体、マスクブランク収納体、および転写マスク収納体
JPJP-P-2005-00345272 2005-11-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020090118398A Division KR101067200B1 (ko) 2005-11-30 2009-12-02 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크 수납체

Publications (2)

Publication Number Publication Date
KR20070057028A KR20070057028A (ko) 2007-06-04
KR100955983B1 true KR100955983B1 (ko) 2010-05-04

Family

ID=38207282

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020060119149A KR100955983B1 (ko) 2005-11-30 2006-11-29 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크수납체
KR1020090118398A KR101067200B1 (ko) 2005-11-30 2009-12-02 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크 수납체
KR1020110008974A KR101141484B1 (ko) 2005-11-30 2011-01-28 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크 수납체

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020090118398A KR101067200B1 (ko) 2005-11-30 2009-12-02 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크 수납체
KR1020110008974A KR101141484B1 (ko) 2005-11-30 2011-01-28 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크 수납체

Country Status (3)

Country Link
JP (1) JP4801981B2 (ja)
KR (3) KR100955983B1 (ja)
TW (2) TWI367850B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5153399B2 (ja) * 2008-03-19 2013-02-27 三洋電機株式会社 基板ケース及び処理方法
WO2014136247A1 (ja) * 2013-03-07 2014-09-12 ミライアル株式会社 基板収納容器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06204328A (ja) * 1992-12-25 1994-07-22 Mitsubishi Materials Corp ウェーハケース
KR100216108B1 (ko) * 1993-11-09 1999-08-16 오가와 쓰토무 글래스기판 반송용 박스
JP2005173556A (ja) * 2003-11-18 2005-06-30 Net Plastic:Kk 大型精密シート状（半）製品用密封容器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59113442A (ja) * 1982-12-18 1984-06-30 Konishiroku Photo Ind Co Ltd フオトマスク素材の保存方法
JPH0135474Y2 (ja) * 1986-05-30 1989-10-30
JPH04116193A (ja) * 1990-09-05 1992-04-16 Nkk Corp 耐食性および溶接性に優れた複層電解クロメート処理鋼板
JPH04116193U (ja) * 1991-03-28 1992-10-16 ホーヤ株式会社 基板収納ケース用載置台
KR20000014678U (ko) * 1998-12-30 2000-07-25 김영환 반도체장치의 마스크캐리어 박스
JP2001240179A (ja) * 2000-02-29 2001-09-04 Shin Etsu Polymer Co Ltd 精密基板収納容器
JP2003300583A (ja) * 2002-04-09 2003-10-21 Sekisui Plastics Co Ltd 板状体の搬送用箱
JP2004059075A (ja) * 2002-07-29 2004-02-26 Nissho Iwai Plastic Corp ガラス基板搬送用ボックス
JP4363114B2 (ja) * 2003-07-25 2009-11-11 凸版印刷株式会社 板状基板処理用ラック
JP3995049B2 (ja) * 2003-08-20 2007-10-24 旭平硝子加工株式会社 ガラス基板搬送用ボックス
KR20050057889A (ko) * 2003-12-11 2005-06-16 김성모 평판표시장치용 기판 저장을 위한 수납박스

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06204328A (ja) * 1992-12-25 1994-07-22 Mitsubishi Materials Corp ウェーハケース
KR100216108B1 (ko) * 1993-11-09 1999-08-16 오가와 쓰토무 글래스기판 반송용 박스
JP2005173556A (ja) * 2003-11-18 2005-06-30 Net Plastic:Kk 大型精密シート状（半）製品用密封容器

Also Published As

Publication number Publication date
KR101141484B1 (ko) 2012-05-04
KR20110026450A (ko) 2011-03-15
TWI367850B (en) 2012-07-11
JP2007145397A (ja) 2007-06-14
TWI526376B (zh) 2016-03-21
TW200728168A (en) 2007-08-01
JP4801981B2 (ja) 2011-10-26
KR20070057028A (ko) 2007-06-04
KR101067200B1 (ko) 2011-09-22
TW201233605A (en) 2012-08-16
KR20100004906A (ko) 2010-01-13

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