KR100955983B1 - Housing container of substrate, mask blank storing body and transfer mask storing body - Google Patents

Abstract

The present invention improves the cross-sectional shape of the groove of the substrate storage container in which the outer circumferential end surface of a glass substrate with a film such as a mask blank and a transfer mask is inserted and held, so that the film formed on the surface of the substrate interferes with the groove side surface and peels off. It is to ensure that no harm occurs.

The mask blank housing 1 has a structure in which the mask blank 10 is housed in a sealed state in the storage container 20. On the left and right and bottom of the container body 30 of the storage container 20, the holding grooves (43, 45) are formed, the outer peripheral surface (11b) of the left and right and lower sides of the mask blank (10) is held. 43 (45), the groove side surface is masked by appropriately setting the angles θa, θb of the recessed corners of the groove bottom surface 43a (45a) and the groove side surfaces 43b, 43c (45b, 45c). The end portion 14 of the light shielding film and the resist film of the blank 10 is prevented from interfering.

Description

Substrate storage container, mask blank housing and transfer mask housing {HOUSING CONTAINER OF SUBSTRATE, MASK BLANK STORING BODY AND TRANSFER MASK STORING BODY}

1 is a perspective view showing a mask blank housing to which the present invention is applied.

2 is a cross-sectional view showing the mask blank housing of FIG. 1, (a) is a cross-sectional view showing a case cut by the line aa of FIG. 1, (b) is a cross-sectional view showing a case cut by the bb line of (a). (C) is sectional drawing which showed the case cut | disconnected by the cc line of (a).

3 is a partially enlarged cross-sectional view illustrating a retaining groove of a storage container of the mask blank housing of FIG. 1.

4 is an explanatory diagram showing another example of the retaining groove.

5 is an explanatory diagram showing the damage caused by the interference between the mask blank and the holding groove.

Explanation of symbols on the main parts of the drawings

1: mask blank housing 10: mask blank

11: glass substrate 11a: surface

11b: outer circumferential section 11c, 11d: chamfer

11e: back side 12: light shielding film

13 resist film 14 end of film

20: storage container 30: container body

35, 36: side plate portion 37, 38: single plate portion

37a, 38a: Insertion groove 39: Bottom plate part

42, 44: substrate holding plate 43, 45: holding groove

43a, 45a: groove bottom 43b, 43c, 45b, 45c: groove side

50 container cover 58 elastic body

59: translucent plate

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate storage container used for conveying a glass substrate having a film such as a mask blank in which a light shielding film and a resist film are laminated on a surface of a glass substrate, and a transfer mask in which a patterned light shielding film is stacked.

Substrates, such as mask blanks and transfer masks, are generally mechanically fragile and need to be managed so that fine particles and the like do not adhere to the surface. When shipping such a substrate, it is necessary to store the substrate in a sealed container so that dust and the like do not enter. Moreover, in order not to damage a surface, it is necessary to accommodate a board | substrate in the state holding only the outer peripheral part of a board | substrate.

Patent Document 1 proposes a vertical container for hermetically storing a large-sized substrate (large precision sheet-like product) in a vertically placed state. In the vertical container, an outer circumferential surface portion and a left and right side of the lower side of the substrate in the vertical state in the container are formed by the support grooves and the pair of retention grooves respectively formed in the support member and the pair of retention members. The outer circumference of the cross section can be maintained. Moreover, when the cover body part is covered with the main body which accommodated the board | substrate, the inside is kept in the sealed state by the O-ring interposed between them.

In addition, the groove for holding the outer circumferential cross section of the substrate is a trapezoidal cross section extending from the groove bottom to the groove opening side from the groove bottom surface to the left and right sides, as disclosed in the above patent document. It can pinch from and it does not touch the board | substrate surface.

[Patent Document 1] Japanese Patent Laid-Open No. 2005-173556

Here, unless the cross-sectional shape of the groove for pinching the outer circumferential cross-section of the substrate is properly set, in the case where a thin film is formed on the surface of the glass substrate, such as a mask blank or a transfer mask, the end of the thin film on the surface of the glass substrate It may interfere with the groove side. If they interfere, it is not preferable because some of the thin films are peeled off, causing damage such as adhesion to the thin film surface.

Referring to FIG. 5, in the glass substrate with a film, for example, the mask blank 100, a chamfered edge is used as the glass substrate 101 at both edges of the outer circumferential surface thereof. On the surface 102, a light shielding film 103 and a resist film 104 are stacked. As for the outer peripheral edge part 105 of the light shielding film 103 and the resist film 104, the part which protruded outward from the chamfered surface 102a of the glass substrate 101 after these film formation is removed. As the groove 120 of the container 110 used for accommodating the mask blank 100 having such a configuration, the left and right side surfaces 121 and 122 have an angle of inclination substantially equal to the chamfered surface 102a of the glass substrate 101. If there is, when the mask blank 100 is inserted into the groove 120, the outer peripheral edge portion 105 of the light shielding film and the resist film comes into contact with the groove side surface 121, causing a problem such as part of the film peeling off. do. In addition, even if the film is not peeled off during insertion, when the outer circumferential end surface of the mask blank 100 vibrates in the lifting direction from the groove due to vibration applied during conveyance or the like, the outer circumferential edge portion 105 of the film is repeated on the groove side surface 121. It comes in contact with each other, and damages such as peeling are generated.

SUMMARY OF THE INVENTION In view of these problems, an object of the present invention is to improve the cross-sectional shape of the groove of the substrate storage container in which the outer circumferential end surface of the glass substrate with a film such as a mask blank and a transfer mask is inserted and held, thereby forming a film formed on the surface of the substrate. The present invention proposes a substrate storage container in which no harmful effects such as peeling due to interference on the groove side are generated.

In order to solve the above problems, the present invention provides a substrate storage container for storing a glass substrate with a film having a thin film formed on the surface and the projecting edges of the surface and the outer circumferential surface are chamfered surfaces. And a holding groove for holding the outer circumferential end surface of the attached glass substrate, wherein the holding groove has a groove bottom surface and opposing first and second groove side surfaces, and the first groove side surface and the groove bottom surface. The angle of the indented edge of the surface is characterized in that it is larger than the angle formed by the outer peripheral surface and the chamfered surface of the glass substrate is attached.

In the present invention, the angle of the indented corner of the groove bottom surface and the first groove side surface is larger than the angle formed between the outer circumferential end surface and the chamfered surface of the glass substrate with film. Therefore, the first peripheral groove of the holding groove with respect to the chamfered surface of the glass substrate on which the membrane is attached is placed in the state where the outer peripheral surface of the glass substrate with the membrane is positioned and inserted into the holding groove and the outer peripheral surface is in contact with the groove bottom surface. Since the side faces are inclined away from each other, the end of the film does not interfere with the first groove side.

Here, in the present invention, when the protruding edge portion between the back surface of the glass substrate with the film and the outer circumferential surface is also a chamfered surface, the second groove side surface and the groove bottom surface of the holding groove are The angle of the recessed edge is smaller than the angle formed between the outer circumferential end surface of the substrate on which the film is attached and the chamfered surface on the back side.

In this way, the outer circumferential end surface of the glass substrate with a film is inserted into the holding groove so that the outer circumferential end surface is brought into contact with the groove bottom surface of the holding groove, and the back surface and the chamfered surface of the glass substrate with the film are formed. The edge abuts the second groove side. By contacting in this way, the positioning state in the width direction of the holding groove of the glass substrate with a film | membrane can be formed.

In addition, the present invention is characterized in that the substrate holding member on which the holding groove is formed is attached in a detachable state. When dirt or the like is attached to the holding groove, the substrate holding member can be removed and cleaned. Thereby, the glass substrate with a film | membrane can be accommodated in the state always free of dirt.

In addition, the present invention includes a container body having a flat rectangular parallelepiped shape whose upper surface is an opening portion, and a detachable container cover that seals the opening portion, wherein the substrate holding member includes a bottom surface inside the container body; It is attached to a pair of opposing side surfaces. When storing the glass substrate with a rectangular outline film | membrane in a vertically placed state, the glass substrate with a film | membrane with a film | membrane is hold | maintained by these three sides holding grooves.

In this case, in the present invention, the container cover is provided with a red translucent portion, and the container cover is covered with the container body so that the translucent portion is replaced on the rear surface of the glass substrate with a film to be stored in the container body. It is characterized by being able to.

After storing the glass substrate with a film on the container body, the container cover can be covered while checking the position of the glass substrate with the film through the translucent portion so that the container cover does not touch the glass substrate with the film. In addition, since the red translucent portion is replaced by the back surface of the substrate on which the film to be stored is stored, the light transmitted through the translucent portion does not directly irradiate the film on the substrate surface, so that even when a photosensitive resist film or the like is formed, The film is not exposed.

Next, the present invention relates to a mask blank housing, comprising a substrate storage container having the above-described configuration and a glass substrate with the film housed in the substrate storage container, wherein the glass substrate with the film includes a light shielding film and a resist. The film is characterized in that the mask blank is laminated.

In addition, the present invention relates to a transfer mask housing, comprising a substrate storage container having the above-described configuration and a glass substrate with a film housed in the substrate storage container, wherein the glass substrate with a film includes: It is characterized by the fact that it is a transfer mask in which a patterned light shielding film is formed.

Embodiment

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to drawings.

1 is a perspective view showing a mask blank housing to which the present invention is applied and a partial perspective view showing a state where a cover is removed. FIG. 2 is a cross-sectional view illustrating a case where lines are cut along a-a, b-b and c-c lines of FIG. 1, respectively. 3 is a partially enlarged sectional view showing the cross-sectional shape of the groove for holding the mask blank. The mask blank storage body 1 is comprised from the rectangular mask blank 10 and the storage container 20 which accommodates the said mask blank 10 in the sealed state.

First, as the mask blank 10 housed, as shown in FIG. 3, the light shielding film 12 and the resist film 13 are laminated | stacked on the surface 11a of the rectangular glass substrate 11 which has a fixed thickness. It is made up of. The glass substrate 11 is rectangular in shape, and the edge portions at both sides of the outer peripheral surface 11b are chamfered surfaces 11c and 11d chamfered at 45 degrees. The end portions 14 of the light shielding film 12 and the resist film 13 laminated on the surface 11a of the glass substrate are located at the protruding edge portions of the surface 11a of the glass substrate and the chamfered surface 11c. For example, the glass substrate 11 has a thickness of 8 mm, the thickness of the light shielding film 12 is about 100 nm, and the thickness of the resist film 13 is about 1 micron.

Next, as shown in FIG. 1, the storage container 20 is a container having a flat rectangular parallelepiped shape, which is formed of a container body 30 and a container cover 50. Moreover, you may provide the fixture (not shown) for fixing the container cover 50 to the container main body 30. FIG. The lower edge frame portion 51 of the container cover 50 is slightly larger than the upper edge frame portion 32 defining the upper opening portion 31 of the container body 30, and the lower edge frame portion 51. The upper edge frame portion 32 is sized to fit precisely inside.

In the state which covered the container cover 50, the lower end surface of the lower edge frame part 51 is in contact with the end surface 33 of the container main body 30. As shown in FIG. In this state, the container cover 50 is fastened and fixed to the container body 30 side by a fastener (not shown), and the fitting surface of the container cover 50 and the container body 30 is sealed, and the storage container 20 The inside of) is kept sealed.

Referring to FIGS. 2 and 3, the container body 30 includes a pair of side plate portions 35 and 36, a pair of end plate portions 37 and 38, a bottom plate portion 39 and The upper end is made of a plastic molded article having a rectangular frame portion 40 having a cross section 33. Moreover, the board | substrate holding plate 42 is attached to the inner surface of a pair of single board | plate part 37 and 38 in the state which can be attached and detached, respectively, and the mask blank 10 is attached to these board | substrate holding plate 42, respectively. Retaining grooves 43 are formed to hold the left and right outer circumferential cross sections 11b, respectively. Substrate holding plate 44 is disposed on bottom plate portion 39 in a detachable and attachable state, and retaining groove for holding outer peripheral end face 11b of mask blank 10 on the holding plate 44. 45 is formed.

In this example, insertion grooves 37a and 38a extending in the vertical direction are formed on the inner surfaces of the end plate portions 37 and 38, and each substrate holding plate 42 is inserted vertically from the upper end opening thereof. As a result, it can be attached to the end plate portions 37 and 38, and can be separated by pulling it upward from the upper end opening. Further, the substrate holding plate 44 of the bottom plate portion 39 is disposed in a state where both ends thereof are inserted into the lower ends of the insertion grooves 37a and 38a formed in the end plate portions 37 and 38. Therefore, both ends of the substrate holding plate 44 are dropped to the bottom plate portion 39 in the state of inserting the insertion grooves 37a and 38a, and the left and right substrate holding plates 42 are inserted from the upper side into the insertion grooves 37a, When it fits into 38a), the both ends of the board | substrate holding board 44 arrange | positioned at the bottom board part 39 are pressed and fixed by the lower end surface of these board | substrate holding board 42. As shown to FIG. The left and right substrate holding plates 42 sandwiched in the insertion grooves 37a and 38a are fixed to the end plate portions 37 and 38 by fixing screws (not shown).

When the mask blank 10 is inserted from above along the holding grooves 43 of the left and right substrate holding plates 42, the left and right holding grooves 43 and the board holding plate 44 of the bottom plate portion 39 are inserted. By the retaining groove 45 of the mask blank 10, the three sides of the outer circumferential end surface of the left and right sides and the lower side of the mask blank 10 are maintained, and it is in the state accommodated in the container main body 30.

On the other hand, the container cover 50 is made of plastic provided with a pair of side plate portions 53 and 54, a pair of end plate portions 55 and 56, and an upper plate portion 57. The upper plate portion 57 is provided with a plurality of elastic bodies 58 at regular intervals along the long side direction of the outer peripheral section. After the mask blank 10 is accommodated in the container body 30 and the container cover 50 is covered, the elastic peripheral body 58 has the outer circumferential end surface of the mask blank 10 pressed downward. The attachment height of the elastic body 58 is set so that it may be formed. Therefore, in the state which covered the container cover 50 and fixed the container cover 50 to the container main body 30 by the fastener 60, the mask blank 10 accommodated in the inside is the outer periphery of an upper side. The cross section is pressed down by the elastic body 58, and the left and right outer peripheral sections thereof are held without being rattled by the holding grooves 43 on the left and right sides of the container body 30 and the holding grooves 45 on the bottom side. Is formed.

Here, in the container cover 50 of this example, the part above the lower edge frame part 51 in one side plate part 53 is formed of the red translucent board 59. As shown in FIG. When the container cover 50 is attached and detached to the container body 30, the upper end portion of the mask blank 10 inside can be visually recognized through the translucent plate 57 from the outside.

(Section shape of holding groove)

Next, the cross-sectional shape of the holding grooves 43 and 45 of this example is demonstrated with reference to FIG. Since the cross-sectional shapes of the holding grooves 42 and 45 formed on the left and right substrate holding plates 42 and the bottom substrate holding plate 44 are the same, the holdings formed on the bottom and bottom substrate holding plates 44 are the same. The groove 45 will be described, and detailed description of the left and right holding grooves 42 will be omitted.

The retaining groove 45 of this example is defined by the groove bottom surface 45a and the pair of groove side surfaces 45b and 45c, and has a trapezoidal cross-sectional shape extending toward the groove opening side. The angle [theta] a of the recessed edge where the groove bottom surface 45a and one groove side surface 45b intersect becomes the following angle range, and is set to 150 degrees in this example.

135 ° <θa <180 °

On the other hand, the angle θb of the recessed edge where the groove bottom surface 45a and the other groove side surface 45c intersect becomes the following angle range, and is set to 100 ° in this example.

90 ° <θb <135 °

As described above, chamfered surfaces 11c and 11d are formed at the outer circumferential edges of the mask blank 10, and angles formed between the surface 11a and the chamfered surface 11c, and the back surface 11e and the chamfered surface 11d are provided. This angle is 45 degrees. Therefore, as shown in FIG. 3, the holding groove 45 holds the outer peripheral end surface 11b of the mask blank 10 so that the surface side (film formation side) of the mask blank 10 may become the side of the groove side surface 45b. When inserted into the grooves, the groove side surface 45b falls off so as not to interfere with the end portions 14 of the light shielding film and the resist film formed on the surface, and the rear surface 11e and the chamfer surface of the glass substrate on the opposite groove side surface 45c ( The protruding edge of 11d) abuts.

The holding grooves 43 formed on the left and right substrate holding plates 42 also have the same cross section, and have groove bottom surfaces 43a and groove side surfaces 43b and 43c, and groove bottom surfaces 43a and the groove bottom surfaces 43a. The angle θa of the recessed edge of the groove side surface 43b is set as described above, and the angle θb of the recessed edge of the groove bottom surface 43a and the other groove side surface 43c is also set as described above. It is.

Therefore, the groove side surfaces 43b and 45b can be prevented from interfering with the end portions 14 of the light shielding film and the resist film on the surface of the mask blank 10. In addition, the protruding edges of the back surface 11e and the chamfered surface 11d of the mask blank 10 touch the groove side surfaces 43c and 45c, so that the positioning of the mask blank 10 in the groove width direction is also performed. In particular, as shown in FIG. 3, the protruding edges of the outer circumferential end face 11b and the chamfered face 11c on the surface side of the groove bottom face 43a and the groove side face 43b of the retaining grooves 43 and 45. If the widths of the groove bottoms 43a and 45a are set to coincide with the recessed corners and the recessed edges of the groove bottom surface 45a and the groove side surface 45b, positioning of the mask blank 10 in the groove width direction is assured. In this way, it is possible to reliably prevent the outer circumferential end face 11b of the mask blank 10 from moving in the groove width direction in the retaining grooves 43 and 45.

As the retaining grooves 43 (45), as shown in Fig. 4, the angles θ of the corners of the groove bottom surfaces 43a (45a) and the left and right groove side surfaces 43b, 43c (45b, 45c) entered. May be set to an angle within the range of 135 ° <θ <180 °. Also in this case, the interference between the end portion 14 of the light shielding film and the resist film on the mask blank surface and the groove side surface of the retaining groove 43 (45) can be avoided. If the width of the groove bottom and the width of the outer circumferential end surface of the mask blank are the same, positioning of the mask blank in the groove width direction is also performed.

3 may be used in combination with the cross-sectional retaining groove shown in FIG. 3 and the cross-sectional retaining groove shown in FIG. For example, the holding groove shown in Fig. 3 is employed as the holding groove 43 of the left and right substrate holding plates 42, and the holding groove shown in Fig. 4 is used as the holding groove 45 of the substrate holding plate 44 on the bottom side. It can be adopted. On the contrary, what is shown in FIG. 4 is employ | adopted as the holding groove of the left and right board | substrate holding plates, and the thing shown in FIG. 4 can be employ | adopted as the holding groove of the board | substrate holding plate of the bottom side.

As explained above, in the mask blank storage body 1 of this example, the outer peripheral end surface 11b of the left and right sides and the lower side of the mask blank 10 hold | maintains the left and right of the container main body 30 of the storage container 20. The mask blank 10 is pressed by the elastic body 58 of the container cover 50 in such a state that the mask blank 10 is held by the groove 43 and the bottom retaining groove 45. In addition, the fitting surface of the container cover 50 and the container main body 30 is sealed by a seal material, and the inside in which the mask blank 10 is accommodated is sealed. Further, the inclination angles of one of the groove side surfaces 43b and 45b of each of the holding grooves 43 and 45 are set so as not to interfere with the end portions 14 of the light shielding film and the resist film formed on the surface of the mask blank 10. .

Therefore, when the mask blank housing 1 of this example is used, the mask blank 10 can be moved and transported without damaging the mask blank 10 and without adhering dust, dust, etc. to the surface. In particular, since the groove side surfaces 43b and 45b of the retaining grooves 43 and 45 do not interfere with the film of the mask blank 10, the mask blank 10 is put into and taken out of the storage container 20, or At the time of conveyance or transportation of the mask blank storage body 1, the end of the film is peeled off due to such interference, and it is possible to reliably prevent the damage that the dust generated thereby adheres to the surface of the mask blank.

In addition, as for the container cover 50 of the storage container 20 of the mask blank storage body 1 of this example, the red translucent board 59 is attached to the one side plate part. The container cover 50 is covered with the container body 30 so that the translucent plate 59 faces the rear surface side of the mask blank 10 to be accommodated. Since the upper part of the mask blank 10 accommodated in the container body 30 can be visually recognized through the translucent plate 59, when the container cover 50 is covered or removed, the container cover 50 can be recognized. Can be handled so as not to contact the mask blank 10. In addition, the translucent plate 59 is opposed to the rear surface of the mask blank 10. When a part of the external light component of the external light is irradiated on the back surface of the mask blank 10 through the translucent plate 59, a problem occurs that the resist film 13 formed on the surface 11a on the reflection side is exposed to light. There is no.

Here, an indicator indicating the side on which the translucent plate 59 is positioned so that the translucent plate 59 of the container cover 50 faces the back side of the mask blank 10 housed in the container body 30 is a container body. It is preferable to provide it at (30).

Moreover, although the said example is related with the mask blank accommodating body, this invention can be used also as an accommodating body and accommodating container of the transfer mask in which the light shielding film is patterned. Furthermore, the present invention can be applied to a glass substrate having a film on its surface, even if it is other than a mask blank and a transfer mask.

In the substrate storage container of the present invention, the film of the glass substrate with the film to be stored does not interfere with the groove side surface of the holding groove for holding the substrate outer peripheral surface. As a result, no harmful effects such as peeling of the film are caused by such interference during storage or conveyance, so that the glass substrate with the film can be stored in an appropriate state in which dust does not occur.

Claims (12)

A substrate storage container for accommodating a glass substrate having a film formed on a surface thereof, and having a film on which a protruding edge portion between the front surface and an outer circumferential surface and a protruding edge portion of the back surface and the outer circumferential surface are both chamfered surfaces. It has a retaining groove for maintaining the outer circumferential cross section of the glass substrate to which the membrane is attached, The retaining groove has a groove bottom surface and opposing first and second groove side surfaces, The groove bottom surface is in contact with the outer circumferential end surface of the glass substrate to which the membrane is attached, The indented edge of the groove bottom surface and the first groove side coincides with the protruding edge of the outer circumferential end surface of the glass substrate with the film and the chamfered surface on the surface side, The angle between the first groove side surface and the recessed edge of the groove bottom surface is greater than the angle formed between the outer circumferential end surface of the glass substrate with the film and the chamfer surface on the surface side, The angle of the indented corner between the second groove side surface and the groove bottom surface is smaller than the angle formed between the outer circumferential end surface of the glass substrate to which the film is attached and the chamfered surface of the back surface side, And the second groove side faces a protruding edge between the back surface of the glass substrate having the film and the chamfered surface on the back side thereof. The method of claim 1, The angle of the indentation edge of the said 1st groove side surface and the said groove bottom surface is larger than 135 degrees, and less than 180 degrees board | substrate storage container. delete The method according to claim 1 or 2, The angle of the indentation edge of the said 2nd groove side surface and the said groove bottom surface is larger than 90 degrees, and less than 135 degrees board | substrate container. delete delete delete The method of claim 1, And a substrate holding member on which the holding groove is formed is attached in a detachable state. The method of claim 8, It has a flat rectangular parallelepiped container body having an upper end as an opening portion, and a detachable container cover that seals the opening portion. The substrate holding member is attached to the bottom surface of the inside of the container body and a pair of opposite side surfaces. The method of claim 9, The container cover has a red translucent portion, And a container cover to cover the container body such that the translucent portion is replaced by a rear surface of the glass substrate with a film to be stored in the container body. The substrate storage container according to claim 1, It has a glass substrate with a film accommodated in the said substrate storage container, And the glass substrate with the film is a mask blank in which a light shielding film and a resist film are laminated. The substrate storage container according to claim 1, It has a glass substrate with a film accommodated in the said substrate storage container, And the glass substrate with a film is a transfer mask on which a patterned light shielding film is formed.

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