JPH0228234Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a substrate storage container for storing substrates made of glass, quartz, crystal materials, etc., or film-coated substrates (hereinafter simply referred to as "substrates") in which these substrates are coated with thin films.

This substrate storage container is especially suitable for semiconductor manufacturing substrates,
In other words, for photomask blanks in which a transparent conductive film, chrome film, antireflection film, etc. are laminated on a glass substrate, and photomasks in which a predetermined pattern is formed on this blank, in order to form a fine pattern, Handled in a dust-free and photosensitive dark room.

As shown in the perspective view of FIG. 1 and the cross-sectional view of FIG. 2, the conventional substrate storage container has a plurality of grooves 2 extending from the opening side (upper side) of the storage box 1 toward the bottom side (lower side). are formed on a pair of inner surfaces facing each other,
A plurality of substrates 3 are stored one by one in parallel to each other at intervals in the opposing grooves 2, 2, and the storage box 1
is stored in the outer storage box 4. The board 3 stored in this manner has its upper end surface protruding from the openings of the inner storage box 1 and the outer storage box 4, and the container lid 5.
When it is placed on the outer storage box 4, it is fixed by coming into contact with the abutting member 6 inserted and fixed to the inner ceiling of the container lid 5. Note that this substrate storage container has two storage boxes, an inner box 1 and an outer storage box 4, for storing the container body 7.
Although it is made up of parts, the storage box 1, which is used when substrates 3 are immersed in cleaning chemicals, moved between various manufacturing processes, and stored, is used as a part of the storage container. There is.

However, since the abutment member 6 described above is independent of the container lid 5, it must be cleaned in advance and used separately in order to clean the inside of the substrate storage container. Since manual work is required during installation, dust tends to adhere to the inside of the container lid 5 and the abutting member 6, which has the drawback of reducing the effectiveness of the previous cleaning process by half. Furthermore, since it is necessary to attach the abutment member 6 to the container lid 5, there is a drawback that the number of man-hours increases accordingly.

The purpose of the present invention is to eliminate the above-mentioned drawbacks, eliminate the need for attaching the contact member 6 to the container lid 5, and prevent dust from adhering to the inside of the container lid 5 and the contact member 6. The goal is to provide the following. Hereinafter, the present invention will be explained in detail with reference to the drawings. Note that the same reference numerals as those shown in FIG. 2 indicate the same components.

First, as shown in the perspective view of FIG. 3 and the cross-sectional view of the substrate storage container in FIG. Contact members 9, 9 and one protrusion 1 between them
0 and the main body of the container lid 8 are integrally formed of an elastic material such as ABS resin, polyethylene, or polyamide. The arrangement direction of the contact members 9, 9 and the protrusion 10 is perpendicular to the main surfaces of the plurality of substrates 3 which are housed parallel to each other at regular intervals. Furthermore, as shown in FIG. 4, since one board 3 corresponds to one abutting part 91, the grooves 2, 2 for housing the board 3 also correspond to one abutting part 91. located at the location. And the contact members 9, 9
emanates from the connecting portions 11, 11 of the container lid 8 with the inner ceiling toward the container body 7 side, which is the downward direction, toward the container body 7 side, and proceeds obliquely toward the protrusion 10, and reaches the end thereof. Container lid 8 at parts 12, 12
extends parallel to the ceiling plane. This end 1
The distance from the ceiling plane of the container lids 8 of No. 2 and 12 is the distance from the ceiling plane of the substrate 3 when the substrate 3 is stored in the inner storage box 1 and the container lid 8 is placed over the outer storage box 4 in which the inner storage box 1 is stored. The distance is set to be somewhat longer than the distance from the upper end surface of the container lid 8 to the ceiling plane of the container lid 8.

Therefore, the ends 1 of the abutment members 9, 9 mentioned above
When the lower surfaces of the ends of the substrates 2 and 12 are placed over the container body 7 containing the substrate 3, they come into contact with the upper end surface of the substrate 3, thereby fixing the substrate 3 in abutment. By forming slits 13, 13 in the abutment members 9, 9 in accordance with the arrangement spacing of the plurality of substrates 3, an independent elastic force is applied to the abutment with each substrate. , and from the connecting parts 11, 11 to the end part 1
By gradually reducing the wall thickness up to 2 and 12, flexibility can be given to the contact members 9 and 9 themselves. Note that the protrusion 10 serves as a stopper when the elastic limit of the contact members 9, 9 is exceeded when the substrate 3 vibrates up and down due to vibration or impact.

In the above embodiment, the container main body 7 is composed of two parts, the inner storage box 1 and the outer storage box 4, but the inner storage box 1
may be omitted, and the container body may have grooves 2, 2 formed in the outer storage box 4. Also, although the main surface shape of the substrate 3 is square, it may be circular.

As described above, according to the present invention, it is possible to eliminate the need for attaching the contact member to the container lid, and to leave the cleaned container lid as is without touching the inside of the container lid. It can be placed over the container body to prevent dirt from entering the container. Further, by forming the abutting member as described above, elasticity and flexibility can be independently imparted to each substrate.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing storage of a conventional substrate storage container, Fig. 2 is a sectional view of the substrate storage container of Fig. 1 after storage, and Fig. 3 is a perspective view showing an embodiment of the container lid according to the present invention. FIG. 4 is a cross-sectional view of the substrate storage container using the container lid of FIG. 3 after storage. 1... Storage box, 2... Groove, 3... Board, 4...
...Outer storage box, 7...Container body, 8...Container lid, 9
...Abutting member, 12...End, 13...Slit, 91...Abutting portion.

Claims (1)

[Scope of utility model registration request] A substrate storage container in which a substrate is stored in each of a pair of opposing grooves provided inside the container body, and a contact member that comes into contact with the upper end surface of the substrate is provided on the inner ceiling of the container lid. In the above, the abutment member includes a plurality of abutment portions and a slit provided between the abutment portions, and is integrally formed with the container lid, and the abutment portions are arranged in the same direction as the arrangement direction of the substrates. and are arranged at positions corresponding to each of the substrate and the groove, and further have a protruding shape extending downward from the inner ceiling of the container lid, toward the container body, and progressing in an oblique direction. A substrate storage device characterized in that the bottom surface of the end of the contact portion contacts the upper end surface of the substrate, and each of the contact portions exerts an independent elastic force to fix the corresponding substrate. container.