JPS6314462Y2 - - Google Patents
Info
- Publication number
- JPS6314462Y2 JPS6314462Y2 JP1983017308U JP1730883U JPS6314462Y2 JP S6314462 Y2 JPS6314462 Y2 JP S6314462Y2 JP 1983017308 U JP1983017308 U JP 1983017308U JP 1730883 U JP1730883 U JP 1730883U JP S6314462 Y2 JPS6314462 Y2 JP S6314462Y2
- Authority
- JP
- Japan
- Prior art keywords
- convex portion
- opening
- tip
- storage box
- top surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 27
- 238000003860 storage Methods 0.000 claims description 21
- 239000010408 film Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- -1 etc. Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Description
【考案の詳細な説明】
本考案は、ガラス、石英、結晶素材などの基板
又はこれら基板に薄膜を被覆させた膜付基板（以
下、単に、「基板」という。）の製造に供される基
板収納箱に関する。[Detailed description of the invention] The present invention is a substrate that is used for manufacturing substrates made of glass, quartz, crystal materials, etc., or film-coated substrates (hereinafter simply referred to as "substrates") in which these substrates are coated with thin films. Regarding storage boxes.
この基板収納箱は、洗浄薬処理の浸漬処理や、
各種製造工程間における移動、保管を行う際に使
用されるものであるが、特に半導体製造用基板、
すなわち、透明導電膜、クロム膜、反射防止膜な
どをガラス基板上に積層させたフオトマスクブラ
ンクや、このブランクに所定のパターンを形成さ
せたフオトマスクにあつては、微細なパターンを
形成するために無塵でかつ感光防止の暗室内で取
扱われる。 This board storage box can be used for immersion treatment with cleaning chemicals,
It is used for transportation and storage between various manufacturing processes, especially semiconductor manufacturing substrates,
In other words, for photomask blanks in which a transparent conductive film, chrome film, antireflection film, etc. are laminated on a glass substrate, and photomasks in which a predetermined pattern is formed on this blank, in order to form a fine pattern, Handled in a dust-free and photosensitive dark room.
従来の基板収納箱は、第１図の斜視図及び第２
図の断面図で示すように、箱１の開口部２側から
底部３側に向けて凸部４と凹部５とからなる複数
の溝６が一対の内側面に互に対向させて形成さ
れ、複数の基板７が、対向する凹部５，５に一枚
ずつ互に間隔をおいて収納される。なお、開口部
２は基板７を収納する口であると共に、底部孔８
と側面孔９と併せて、洗浄薬処理の浸漬処理をす
る際に、液の循環を良くする流通孔である。 The conventional board storage box is shown in the perspective view of Fig. 1 and the perspective view of Fig. 2.
As shown in the cross-sectional view of the figure, a plurality of grooves 6 consisting of protrusions 4 and recesses 5 are formed on a pair of inner surfaces facing each other from the opening 2 side to the bottom 3 side of the box 1, A plurality of substrates 7 are housed one by one in the opposing recesses 5, 5 at intervals. Note that the opening 2 serves as an opening for housing the substrate 7, and also serves as a bottom hole 8.
Together with the side hole 9 and the side hole 9, it is a circulation hole that improves the circulation of the liquid when performing the immersion treatment of the cleaning agent treatment.
このような基板収納箱１は、基板７を対向する
凹部５，５に収納して保持するために、凹部５，
５の溝幅を基板７の板厚とほぼ嵌合する寸法にし
て、ガタを少なくしている。しかしながら、基板
７を収納する場所は、前述したように無塵でかつ
感光防止の暗室内であることから、収納の取扱い
を充分に注意しても、凸部４の上面と基板７の収
納側底端付近とが衝突しがちであり、その衝突個
所から微小なゴミを発生する欠点があつた。 Such a substrate storage box 1 has two recesses 5, 5 and 5, in order to store and hold the substrate 7 in the recesses 5, 5 facing each other.
The width of the groove 5 is set to a size that almost fits the thickness of the board 7 to reduce backlash. However, since the board 7 is stored in a dark room that is dust-free and protected from exposure to light as described above, even if the storage is handled with sufficient care, the upper surface of the convex portion 4 and the storage side of the board 7 It has the disadvantage that it tends to collide with the vicinity of the bottom end, and minute dust is generated from the collision location.
本発明の目的は、上記した欠点を除去し、基板
の収納作用を円滑にすると共に、ゴミの発生を防
止させた基板収納箱を提供することである。以
下、本考案を実施例図面を参照して詳細に説明す
る。 SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate storage box that eliminates the above-mentioned drawbacks, facilitates the storage of substrates, and prevents the generation of dust. Hereinafter, the present invention will be explained in detail with reference to the drawings.
本考案の一実施例は、第３図の全体斜視図、第
４図の断面図、第５図の溝の部分拡大平面図及び
第６図の溝の部分拡大斜視図で示され、第１図及
び第２図に示した符号と同一な符号は相互に同一
構成部分を示す。 One embodiment of the present invention is shown in an overall perspective view in FIG. 3, a sectional view in FIG. 4, a partially enlarged plan view of a groove in FIG. The same reference numerals as those shown in the figures and FIG. 2 indicate the same components.
本例の基板収納箱１０は、前述したと同様に、
その開口部２から底部３側に向けて凸部１１と凹
部１２とからなる複数の溝１３が相対向する一対
の内側面に互いに対向させて形成され、更に、凸
部１１と凹部１２の底面との連結面１４（凸部１
１の内側面側底面）からこの連結面１４に対向す
る凸部１１の先端に向つて、凸部１１の両側面を
結ぶ幅寸法W1、すなわち第３図に示すように基
板７の配列方向の幅寸法W1が、連結面１４から
実質的に凸部１１の先端に至るまで漸次小さくな
り、開口部２側の凸部１１の上面１５が底部３側
に傾斜している。そして、箱１０の開口端面上の
凸部１１と凹部１２の底面との連結部１６（本例
では稜）に向つて、開口部２側の凸部１１の部分
の両側面を結ぶ幅寸法W2が漸次小さく形成され
ている。すなわち、本例における凸部１１は、略
三角形状をなし、略三角形状を呈する凸部１１の
上面１５は、その先端が底部３側に向うように傾
斜している。さらに、開口部２近傍の凸部１１の
部分には、第６図に示すように略三角形状の傾斜
面１７が、凸部１１の上面１５と凸部１１の側面
とを連結すべく凸部１１の両側面側に形成されて
いる（ただし図では一方のみを示している。）。そ
のため、連結面１４（凸部１１の内側面側底面）
の開口部２の近傍の幅寸法W2が、凸部１１の上
面１５方向に向つて漸次小さくなつている。した
がつて、基板７の配列方向における。凹部１２の
幅寸法は、開口部２近傍においては、開口部２か
ら底部３（図面では上方から下方）に向つて漸次
大→小になつている。本例において、凸部１１が
略三角柱形であることのみならず、その上面１５
が底部３方向に傾斜し、かつ凸部１１の開口部２
近傍に傾斜面１７を形成した誘導構造を有してい
ることから、基板７の収納側底端が凸部１１の上
面１５の内側面側の幅寸法が大きい部分に当接し
ても、上面１５の傾斜に沿つて上面１５の幅寸法
が小さい先端方向に誘導され、すなわち互いに対
向する溝１３，１３間のほぼ中央に基板７が誘導
され、かつ傾斜面１７に沿つて凹部１２に基板７
が誘導収納される。したがつて、基板７の収納
を、凹部１２の幅寸法の小さいところから無理に
収納することなしに円滑に誘導させ、衝突時の破
損を防止することができる。 The board storage box 10 of this example is similar to that described above.
A plurality of grooves 13 consisting of a convex portion 11 and a concave portion 12 are formed facing each other on a pair of opposing inner surfaces from the opening portion 2 toward the bottom portion 3 side, and furthermore, a plurality of grooves 13 consisting of a convex portion 11 and a concave portion 12 are formed to face each other. connection surface 14 (convex portion 1
1) to the tip of the convex part 11 facing this connecting surface 14, the width dimension W1 connecting both sides of the convex part 11, that is, the arrangement direction of the substrates 7 as shown in FIG. The width dimension W 1 becomes gradually smaller from the connecting surface 14 to substantially the tip of the protrusion 11, and the upper surface 15 of the protrusion 11 on the opening 2 side is inclined toward the bottom 3. Then, a width dimension W that connects both sides of the portion of the protrusion 11 on the opening 2 side toward the connecting portion 16 (in this example, the ridge) between the protrusion 11 on the opening end surface of the box 10 and the bottom surface of the recess 12 2 are gradually becoming smaller. That is, the convex portion 11 in this example has a substantially triangular shape, and the top surface 15 of the generally triangular convex portion 11 is inclined such that its tip faces toward the bottom portion 3 side. Further, as shown in FIG. 6, a substantially triangular inclined surface 17 is provided on the portion of the convex portion 11 near the opening 2 to connect the upper surface 15 of the convex portion 11 and the side surface of the convex portion 11. 11 (however, only one side is shown in the figure). Therefore, the connecting surface 14 (inner surface side bottom surface of the convex portion 11)
The width W 2 in the vicinity of the opening 2 gradually decreases toward the upper surface 15 of the convex portion 11 . Therefore, in the arrangement direction of the substrates 7. In the vicinity of the opening 2, the width of the recess 12 gradually increases from larger to smaller from the opening 2 toward the bottom 3 (from the top to the bottom in the drawing). In this example, not only is the convex portion 11 substantially triangular prism-shaped, but also the upper surface 15
is inclined in the bottom 3 direction, and the opening 2 of the convex portion 11
Since the guide structure has the inclined surface 17 formed nearby, even if the bottom end of the storage side of the board 7 comes into contact with the large width portion of the inner surface side of the upper surface 15 of the convex portion 11, the upper surface 15 The substrate 7 is guided along the slope toward the tip where the width dimension of the upper surface 15 is smaller, that is, the substrate 7 is guided approximately to the center between the mutually opposing grooves 13, 13, and the substrate 7 is guided into the recess 12 along the slope 17.
is guided and stored. Therefore, the board 7 can be smoothly accommodated without being forced into the recess 12 from the narrower width of the recess 12, and damage in the event of a collision can be prevented.
本考案による基板収納箱は、このような誘導構
造を有することから、手作業はもとより、自動化
による収納及び取り出しが可能になる。 Since the substrate storage box according to the present invention has such a guiding structure, storage and removal can be performed not only manually but also automatically.
なお、基板収納箱１０の材料は、特に限定され
ないが、ABS樹脂、ポリエチレン、ポリアミド
などが好適である。 Note that the material of the substrate storage box 10 is not particularly limited, but ABS resin, polyethylene, polyamide, etc. are suitable.
幅寸法W1とW2の漸次減少形状及び上面１５の
傾斜形状は、実施例では直線状であるが、曲線状
であつてもよい。 Although the gradually decreasing shape of the width dimensions W 1 and W 2 and the inclined shape of the upper surface 15 are linear in the embodiment, they may be curved.
第１図は従来の基板収納箱を示す斜視図、第２
図は第１図の切断線X1−X1個所の断面図、第３
図は本考案による基板収納箱を示す斜視図、第４
図は第３図の切断線X3−X3個所の断面図、第５
図は第３図に示した基板収納箱の溝の部分拡大平
面図、及び第６図は第３図に示した基板収納箱の
溝の部分拡大斜視図である。
２……開口部、３……底部、７……基板、１０
……基板収納箱、１１……凸部、１２……凹部、
１３……溝、１４……凸部と凹部の連結面（凸部
の底面）、１５……凸部上面、１６……開口端上
の凸部と凹部との連結部、１７……傾斜面。
Figure 1 is a perspective view of a conventional board storage box;
The figure is a cross-sectional view of the section line X 1 - X 1 in Figure 1.
The figure is a perspective view showing the board storage box according to the present invention.
The figure is a cross-sectional view of 3 points along the cutting line X 3 -X in Figure 3.
The figure is a partially enlarged plan view of the groove of the substrate storage box shown in FIG. 3, and FIG. 6 is a partially enlarged perspective view of the groove of the substrate storage box shown in FIG. 3. 2...Opening, 3...Bottom, 7...Substrate, 10
... Board storage box, 11 ... Convex part, 12 ... Concave part,
13...Groove, 14...Connection surface between the protrusion and recess (bottom surface of the protrusion), 15...Top surface of the protrusion, 16...Connection between the protrusion and the recess on the opening end, 17...Slope surface .
Claims (1)
ら該開口の下方に位置する底部側に向い、相対向
する一対の内側面に互いに対向させて形成され、
複数の基板を対向する前記凹部に一枚ずつ互いに
間隔をおいて収納する基板収納箱において、前記
基板の配列方向における、前記凸部の幅寸法が、
前記凸部の先端に対向する前記凸部の底面から実
質的に前記先端に至るまで前記先端に向つて漸次
小さく、かつ前記箱の開口近傍の前記凸部の上面
が、該上面の先端を前記底部側に向うようにして
傾斜しており、更に、前記配列方向における、前
記凸部の底面の幅寸法を、前記開口近傍において
前記凸部上面方向に向つて漸次小さくする、前記
凸部上面と前記凸部のそれぞれの側面とを連結し
た傾斜面を有していることを特徴とする基板収納
箱。 A plurality of grooves consisting of convex portions and concave portions are formed facing each other on a pair of opposing inner surfaces, facing from the opening side of the box to the bottom side located below the opening,
In a substrate storage box in which a plurality of substrates are stored one by one at intervals in the opposing recesses, the width dimension of the protrusion in the direction in which the substrates are arranged is:
The bottom surface of the convex portion opposite to the tip of the convex portion becomes gradually smaller toward the tip until substantially reaching the tip, and the top surface of the convex portion near the opening of the box makes the tip of the top surface The top surface of the convex portion is inclined toward the bottom side, and further, the width dimension of the bottom surface of the convex portion in the arrangement direction is gradually reduced toward the top surface of the convex portion in the vicinity of the opening. A substrate storage box characterized by having an inclined surface connecting each side surface of the convex portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983017308U JPS59123339U (en) | 1983-02-08 | 1983-02-08 | board storage box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983017308U JPS59123339U (en) | 1983-02-08 | 1983-02-08 | board storage box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59123339U JPS59123339U (en) | 1984-08-20 |
| JPS6314462Y2 true JPS6314462Y2 (en) | 1988-04-22 |
Family
ID=30148536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983017308U Granted JPS59123339U (en) | 1983-02-08 | 1983-02-08 | board storage box |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59123339U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007153374A (en) * | 2005-12-02 | 2007-06-21 | Sharp Corp | Storage box |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5285477A (en) * | 1976-01-09 | 1977-07-15 | Senken Kk | Wafer carrying container for integrated circuit |
| JPS54159170A (en) * | 1978-06-07 | 1979-12-15 | Hitachi Ltd | Tool for wafer processing |
| JPS5525353B2 (en) * | 1975-03-27 | 1980-07-05 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5525353U (en) * | 1978-08-07 | 1980-02-19 |
-
1983
- 1983-02-08 JP JP1983017308U patent/JPS59123339U/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5525353B2 (en) * | 1975-03-27 | 1980-07-05 | ||
| JPS5285477A (en) * | 1976-01-09 | 1977-07-15 | Senken Kk | Wafer carrying container for integrated circuit |
| JPS54159170A (en) * | 1978-06-07 | 1979-12-15 | Hitachi Ltd | Tool for wafer processing |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59123339U (en) | 1984-08-20 |
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