TW201233605A - Substrate container, mask blank package, transfer mask package and film-coated glass substrate container - Google Patents

Substrate container, mask blank package, transfer mask package and film-coated glass substrate container Download PDF

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Publication number
TW201233605A
TW201233605A TW101105610A TW101105610A TW201233605A TW 201233605 A TW201233605 A TW 201233605A TW 101105610 A TW101105610 A TW 101105610A TW 101105610 A TW101105610 A TW 101105610A TW 201233605 A TW201233605 A TW 201233605A
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Taiwan
Prior art keywords
groove
substrate
glass substrate
coated glass
film
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TW101105610A
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Chinese (zh)
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TWI526376B (en
Inventor
Hideto Arai
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Hoya Corp
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Publication of TWI526376B publication Critical patent/TWI526376B/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D77/00—Packages formed by enclosing articles or materials in preformed containers, e.g. boxes, cartons, sacks or bags
    • B65D77/22—Details
    • B65D77/24—Inserts or accessories added or incorporated during filling of containers
    • B65D77/26—Elements or devices for locating or protecting articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Packages (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)

Abstract

To improve a sectional shape of a groove of a substrate container in which an outer peripheral end face of a film-coated glass substrate of a mask blank, a transfer mask, or the like is inserted and held, thereby preventing a film formed on a substrate surface from interfering with a groove side surface and being separated and peeled off. A mask blank package 1 includes a mask blank 10 housed in a container 20 in a sealed state. The container 20 has a main body 30 provided with holding grooves 43 and 45 formed on left, right, and bottom walls thereof to receive and hold left, right, and bottom peripheral end faces 11b of the mask blank 10. The holding groove 43 (45) has a groove bottom surface 43a (45a) and groove side surfaces 43b, 43c (45b, 45c). An inside corner formed between the bottom surface and each of the side surfaces has an angle θ a, θ b appropriately selected so as to prevent the side surface from interfering with an end of a light-shielding film and a resist film of the mask blank 10.

Description

201233605 六、發明說明： 【發明所屬之技術領域】 本發明係關於運送在玻璃基板表面疊層有遮光 光阻膜之構成的遮罩基底、疊層有已圖案化之遮光 轉印遮罩專的覆膜玻璃基板用的基板收納容器。 【先前技術】 遮罩基底、轉印遮罩等之基板，一般而言機械 弱，在其用途上需要進行管理以使表面不附著微細 等。&在此種基板出庫時，將基板收納於密閉狀態 器内而不讓灰塵等侵入。另外’為了不會傷害到表 必須在僅保持基板外周緣部分之狀態下來收納基板 在專利文獻1中提出有以縱置狀態來密閉性地 大型尺寸之基板（大型精密薄片狀（半）製品）用的縱 器。在此從型容器中，藉由於支撐構件及一對保持 上分別形成支撐用溝及一對保持用溝，可在容器内 縱置狀態之基板下側的外周端面部分及左右之外周 部分。另外，當於收納有基板之本體部蓋上蓋體部 藉由介於該些之間的〇型環將内部保持為密閉狀態 另外，保持基板之外周端面用之溝，亦如該專 獻所揭示，係作成自溝底面朝向溝開口側左右擴展 形截面’ X可從兩側把持基板之外周端面部分，而 碰觸到基板之表面。 [專利文獻]日本特開2005-173556號公報 【發明内容】 (發明所欲解決之課題） 膜及 膜的 性脆 灰塵 之容 面， 〇 收納 型容 構件 保持 端面 時， 利文 之梯 不會 201233605 在此，若未適宜地設定把持基板之外周端面部分用 之溝的截面形狀的話，如遮罩基底、轉印遮罩等，在玻 璃基板之表面形成有薄膜之構造中，恐有玻璃基板表面 之薄膜端部干涉溝側面之虞。當該些部分被干涉時，薄 膜之一部分被剝離，而會引起灰塵附著於薄膜表面等之 弊害，較不理想。 參照第5圖進行說明’在覆膜基板、例如遮罩基底i 00 中’玻璃基板10 1係使用在外周端面之兩側的邊緣施以倒 角者，另外，在該玻璃基板101之表面102上疊層有遮光 膜103及光阻膜104。遮光膜103及光阻膜1〇4之外周緣1〇5 係在成膜之後，除去自玻璃基板1 〇 1之倒角面1 〇2a超出至 外側的部分。作為用以收納該構成之遮罩基底1 〇〇用的容 器1 10的溝120，係在左右之側面121，122與玻璃基板1〇1 之倒角面1 02a形成大致相同之傾斜角度的情況，在將遮 罩基底100插入該溝120時’遮光膜及光阻膜之外周緣1〇5 會碰觸到溝側面1 2卜而產生將膜之一部分剝離等的弊害 另外’即使在插入時膜未被剝離時，由於運送時所受 到之振動等’而使遮罩基底100之外周端面從溝處朝向上 浮起的方向振動時，因膜之外周緣i 05反覆地碰觸到溝側 面1 21，而仍會產生剝離等之弊害。 本發明之課題係鑒於此種情況，推出一種基板收納 容器，其用以改良插入保持遮罩基底、轉印遮罩等之覆 膜玻璃基板之外周端面用的基板收納容器之溝的截面形 狀，而不會產生形成於基板表面之膜干涉至溝側面而被 剝離等的弊害。 201233605 (解決課題之手段） 為了解決上述課題’本發明係於表面形成有薄膜，201233605 VI. [Technical Field] The present invention relates to a mask substrate in which a light-shielding photoresist film is laminated on a surface of a glass substrate, and a patterned light-shielding transfer mask is laminated. A substrate storage container for a coated glass substrate. [Prior Art] A substrate such as a mask substrate, a transfer mask, or the like is generally mechanically weak, and needs to be managed for its use so that the surface does not adhere to fine particles or the like. & When such a substrate is shipped out, the substrate is housed in a sealed state without intrusion of dust or the like. In addition, in order to prevent damage to the watch, it is necessary to store the substrate in a state in which only the outer peripheral portion of the substrate is held. Patent Document 1 proposes a substrate having a large size (large-sized precision flaky (half) product) which is hermetically sealed in a vertical state. The vertical device used. In the above-described type of container, the support groove and the pair of holding grooves are formed by the support member and the pair of holding grooves, so that the outer peripheral end portion and the left and right outer peripheral portions of the lower side of the substrate can be vertically placed in the container. Further, the cover portion of the main body portion in which the substrate is housed is held in a sealed state by the 〇-shaped ring interposed therebetween, and the groove for the outer peripheral end surface of the substrate is held, as disclosed in the exclusive section. It is formed such that the left and right extended cross-sections from the bottom surface of the groove toward the opening side of the groove X can grip the outer peripheral end portion of the substrate from both sides and touch the surface of the substrate. [Patent Document] JP-A-2005-173556 (Summary of the Invention) (Problems to be Solved by the Invention) The surface of the film and the film which is brittle and dusty, and when the storage type container member holds the end surface, the ladder of the Levin will not be 201233605 Here, if the cross-sectional shape of the groove for the outer peripheral end portion of the substrate is not appropriately set, such as a mask base, a transfer mask, or the like, a glass substrate surface is formed in a structure in which a thin film is formed on the surface of the glass substrate. The end of the film interferes with the side of the groove. When the portions are interfered, a part of the film is peeled off, which may cause dust to adhere to the surface of the film or the like, which is less desirable. Referring to Fig. 5, 'in the coated substrate, for example, in the mask substrate i 00, the glass substrate 10 1 is chamfered at the edges on both sides of the outer peripheral end surface, and the surface 102 of the glass substrate 101 is used. A light shielding film 103 and a photoresist film 104 are laminated on the upper surface. The outer peripheral edge 1〇5 of the light-shielding film 103 and the photoresist film 1〇4 is removed from the portion beyond the chamfered surface 1 〇 2a of the glass substrate 1 〇 1 after the film formation. The groove 120 as the container 1 10 for accommodating the mask base 1 of the above configuration is formed such that the left and right side faces 121 and 122 form substantially the same inclination angle with the chamfered surface 102a of the glass substrate 1〇1. When the mask substrate 100 is inserted into the groove 120, the peripheral edge 1〇5 of the light-shielding film and the photoresist film may touch the side surface of the groove to cause peeling of one part of the film, etc., even when inserted. When the film is not peeled off, the outer peripheral end surface of the mask base 100 is vibrated in the direction from the groove toward the upward movement due to the vibration or the like received during transportation, and the groove side surface is repeatedly touched by the outer periphery i 05 of the film 1 21, and there will still be defects such as stripping. In view of the above, a substrate storage container for improving the cross-sectional shape of a groove for inserting a substrate storage container for a peripheral end surface of a coated glass substrate such as a mask substrate or a transfer mask is proposed. Further, the film formed on the surface of the substrate does not interfere with the side surface of the groove and is peeled off. 201233605 (Means for Solving the Problem) In order to solve the above problems, the present invention is characterized in that a film is formed on the surface.

且用以收納該表面與外周端面之外角部分形+ * γ , A 刀形成為倒角面 的覆膜玻璃基板的基板收納容器’其特徵為：具有保持 該覆膜玻璃基板之該外周端面用的保持溝，該保持莫1 有溝底面、及對向之第丨及第2溝側面’該第1溝側面與$ 溝底面之内角的角度’係比該覆膜玻璃基板之該外周端 面與該倒角面所構成之角度更大。 在本發明中’溝底面與第1溝側面之内角的角度，係 比覆膜玻璃基板之外周端面與倒角面所構成之角度更大 。因此，在將覆膜玻璃基板之外周端面定位而插入保持 溝内，使該外周端面抵接於溝底面的狀態，保持溝之第丄 溝側面係朝離開覆膜玻璃基板之倒角面的方向傾斜，所 以膜之端部不會干涉到該第1溝側面。 在此，在本發明中，其特徵為：在該覆膜玻璃基板 之背面與其外周端面之外角部分亦形成倒角面的情況， 該保持溝中之該第2溝侧面與該溝底面之内角的角度，係 比該覆膜玻璃基板之該外周端面與其背面側之倒角面所 構成之角度更小。 若為此種構成時，在將覆膜破璃基板之外周端面插 入保持溝內，而使該外周端面抵捿於保持溝之溝底面的 狀1、下’覆膜玻璃基板之背面與倒角面所構成之外角抵 接於第2溝側面。藉由上述抵接，可形成覆膜玻璃基板在 保持溝的寬度方向上定位的狀態。 另外，在本發明令，其特徵為：形成有該保持溝之 201233605 基板保持構件，係 附著污染物等的情 洗。藉此，可經常 板0 以可裝卸之狀態被 況’可將基板保持 在無污染物之狀態 戈'裝。在保持溝中 構件拆下而予以清 下收納覆膜玻璃基 另外 口部之扁 之可裝卸 本體内部 矩形輪廓 溝，可確 在該 有紅色之 容器本體 之覆膜玻 工在本發明中’其特徵為：具有上端面成為開 平長方體形狀容器本體、及用以閉鎖該開口部 的容器蓋該基板保持構件係安裝於該容器 之底面及對向之-對側面。在縱置狀態下收納 之覆膜玻璃基板的•隋況’藉由該些三邊之保持 實地保持覆膜玻璃基板。 情況時，纟本發明中’其特徵為：該容器蓋具 半透明部分，且構成為可將該容器蓋覆蓋於該 上，以使該半透明部分與收容於該容器本體内 璃基板的背面對恃。 在將覆膜玻璃基板收納於容器本體内之後，以容器 蓋不會碰觸到覆膜玻璃基板的方式，一邊通過半透明部 刀以確β忍覆膜玻璃基板的位置，一邊蓋上容器蓋。另外 ’紅色之半透明部分係與所收納之覆膜玻璃基板的背面 對恃’所以’透過該半透明部分之光不會直接照射於基 板表面之膜上’因此’即使在形成有感光性之光阻膜等 的情況’仍不會造成該膜之感光。 其次’本發明係關於遮罩基底收納體者，其特徵為 :具有上述構成之基板收納容器，及收納於該基板收納 容器内之覆膜玻璃基板，該覆膜玻璃基板係疊層有遮光 膜及光阻膜之遮罩基底。 201233605 …另外’本發明係關於轉印遮罩基底收納體者，其特 徵為〔冑上述構成之基板收納容器，及收納於該基板 内合器内之边覆膜玻璃基板，該覆膜玻璃基板係形成 有已圖案化之遮光膜的轉印遮罩。 (發明效果） 在本發月之基板收納容器巾’所收納之覆膜玻璃基 板的膜’不會干涉至保持基板外周端面用之保持溝的溝 側面。因此，在收納或運送時，不會產生因上述干涉而 造成膜剝離等的弊宝，轿v + 并。所以在不會產生塵埃之較佳狀態 可收納保持覆膜玻璃基板。 ^ 【實施方式】 以下’參照圖面說明本發明之實施形態。 第1圖為顯示應用本發明之遮罩基底收納體的立體 圖及拆下蓋之狀態的局部立體圖。第2圖為沿著第丨圖中 之a-a線所切斷後之情況的剖視圖，沿著b-b線及c-c線所 切斷後之情況的各剖視圖。另外，第3圖為用於保持遮罩 基底之溝的局部放大剖視圖。遮罩基底收納體1係由矩形 之一片遮罩基底1 〇、及在密閉狀態收納該遮罩基底丨〇之 收納容器2 0所構成。 首先’被收納之遮罩基底1 〇，如第3圖所示，係於_ 定厚度之矩形玻璃基板丨丨的表面lla上疊層有遮光膜12 及光阻膜13的構成《玻璃基板11係矩形，其外周端面llb 兩侧之邊緣部分係為以45度倒角之倒角面11 c，11 d。疊層 於玻璃基板表面1 1 a之遮光膜12及光阻膜1 3的端部14，係 位於玻璃基板表面1 1 a與倒角面1 1 c之外角部分。例如， 201233605 玻璃基板1 1之厚度係8mm，遮光膜12之厚度約為i〇〇nm ’光阻膜1 3之厚度約為1 μιη。 其次，如第1圖所示，收納容器2〇係縱置型之扁平長 方體形狀的容器’由容器本體3〇及容器蓋5〇所構成。又 ’亦可設置將容器蓋50固定於容器本體3〇上用之固定件（ 未圖示）。容器蓋50之下緣框部分5丨係作成比形成容器本 體30之上端開口部31的上緣框部分32更大一圈，且可使 上緣框部分32正好嵌入該下緣框部分5丨的内側的大小。 在蓋上容器蓋50之狀態下，形成此下緣框部分51之 下端面係抵接於容器本體30之階梯面33的狀態◊在此狀 態下，藉由固定件（未圖示）將容器蓋5〇鎖緊固定於容器 本體30之側面，以使容器蓋5〇與容器本體3〇之接合面密 閉’而使該收納容器20之内部保持為密閉狀態。 參照第2及第3圖說明，容器本體3〇係由具備一對侧 板部分35,36、一對端板部分37,38、底板部分39及上端成 為階梯面33之矩形框狀部分4〇的塑膠成型品所構成。另 外，在一對端板部分37,38之内側面，分別以可裝卸之狀 態女裝有基板保持板42，在這些基板保持板42上形成有 用以分別保持遮罩基底丨〇之左右外周端面i丨b的保持溝 43。在底板部分39上亦以可裝卸之狀態配置有基板保持 板44在忒些基板保持板44上亦形成有用以保持遮罩基 底10下側之外周端面lib的保持溝45。 在本例中，在端板部分3 7，3 8之内側面形成有沿上下 方向延設的插入溝37a，38a，藉由將各基板保持板42從該 些上端開口垂直地插入，而可將各基板保持板42安裝於 201233605 端板部分3 7，3 8上，並從上端開口朝上方抽出而可拆下。 另外’底板部分39之基板保持板44，係在其兩端部插入 形成於端板部分37,38之插入溝37a，38a下端部的狀態下 被配置。因此’在將基板保持板44之兩端部嵌入插入溝 37a，3 8a的狀態下落至底板部分39處，然後，當從上侧將 左右之基板保持板42插入該些插入溝37a，38a時，藉由該 些基板保持板42之下端面，以推壓並固定配置於底板部 为3 9之基板保持板4 4的兩端部。插入該些插入溝3 7 a，3 8 a 之左右基板保持板42，係藉由固定用螺絲（未圖示）而固 定於端板部分37,38上。 當沿左右基板保持板42之保持溝43而從上側插入遮 罩基底ίο時，藉由左右之保持溝43及底板部分39之基板 保持板44的保持溝45，而保持著遮罩基底1〇之左右及下 側之外周端面的三邊的狀態下，被收納於容器本體。 另外，容器蓋50係具備一對側板部分53,54、一對 板部分55’56、及頂板部分57之塑膠製品。在頂板部分 上沿外周端面之長邊方向以一定間隔設置有複數個彈 體58。在將遮罩基底10收納於容器本體％後並蓋上容 蓋50之狀態下，以藉由該些彈性體”形成朝下方頂麗 罩基底10上側之外周端面的狀態的方式，來設定彈性 58之安裝高度…匕，在蓋上容器蓋5〇且藉由固 將容器蓋50固定於容器本體30上之狀態下收納於其内 之遮罩基底1 〇，其上側之外周端 係藉由彈性體58而 朝1.方頂Μ ’其左右及下側之外周端面係藉由容写本 30之左右保持溝43及底側的保持溝心形成被保持為 -10- 201233605 鬆動之狀態。 其中，在本例之容器蓋 下緣框部分5 1之上側的部分 形成。其係在將容器蓋5〇襄 外側通過該半透明板59看見 分的構成。 50中，於一方側板部分53的 ’係由紅色之半透明板59所 卸於容器本體30上時，可從 内部之遮罩基底10之上端部 (保持溝之截面形狀） 其次，參照第3圖說明本例之保持溝43，45的截面形 狀。形成於左右之基板保持板42上及底側之基板保持板 44上之保持溝43,45的截面形狀係相同，所以僅針對形成 於底側之基板保持板44上之保持溝45進行說明，而省略 左右之保持溝4 3的詳細說明。 本例之保持溝45係由溝底面45a、及一對之溝側面 45b，45c所界定’其形成為朝向溝開口側擴開之梯形截面 形狀。溝底面45a與一方之溝側面45b相交而成之内角的 角度ea係被設定在如下的角度範圍内，本例中係設定為 150 度。 135度 < 0a< 180度 相對於此，溝底面4 5 a與另一方之溝側面4 5 c相交而 成之内角的角度Θ b係被設定在如下的角度範圍内，本例 中係設定為100度。 90 度 < 0b< 135 度 如前面之說明，在遮罩基底10之外周緣形成有倒角 面11c，lid，而表面11a與倒角面11c所成角度、背面lie 與倒角面1 1 d所成角度係45度。因此，如第3圖所示，當 -11- 201233605 以遮罩基底ίο之表面側（膜形成側）成為溝側面4讣側的 方式而將遮罩基底1 〇之外周端面i lb插入保持溝仍時，係 離開而使溝側面45b不會干涉至形成於表面之 ’: Μ尤膜及 光阻膜的端部14，而成為玻璃基板之背面i丨e與倒角面 1 Id的外角抵接於相反側之溝側面45c上的狀態。 形成於左右基板保持板42上之保持溝43亦為相同截 面，具備溝底面43a、及溝側面43b，43c，溝底面43&與溝 側面43b之内角的角度ea係如上述設定，溝底面43a與另 一方之溝側面43c之内角的角度eb亦係如上述設定。 因此可避免溝側面43b，45b干涉至形成於遮罩基底 10表面之遮光膜及光阻膜的端部14。又，遮罩基底1〇之 背面11 e及倒角面1 1 d的外角抵接於溝側面43c，45c，亦可 達成遮罩基底10在溝寬方向的定位。尤其是，如第3圖所 示，若以外周端面1 lb與表面側之倒角面！ lc的外角，與 保持溝4 3，4 5之溝底面4 3 a與溝側面4 3 b之内角及溝底面 45a與溝側面45b的内角成為一致的方式，來設定溝底面 43 a，45 a的寬度的話’可確實進行遮罩基底1〇在溝寬方向 的定位’因而可確實防止遮罩基底10之外周端面Ub在保 持溝4 3，4 5内朝溝寬方向的移動。 又，如第4圖所示’保持溝43(45)亦可將溝底面 43a(45a)與左右溝側面43b，43c(45b，45c)之内角的角度θ 設定在135度<0a< 180度範圍内之角度。在該情況時， 亦可避免遮罩基底表面之遮光膜及光阻膜的端部14與保 持溝43(45)之溝側面干涉。另外，若將溝底面與遮罩基 底之外周端面作成相同寬度的話，亦可進行遮罩基底在 -12- 201233605 溝寬方向的定位。 另外，亦可組合第3圖所示截面形狀之保持溝及第4 圖所示截面形狀之保持溝而採用。例如，左右基板保持 板42的保持溝43，可採用第3圖所示之保持溝，而底側之 基板保持板44的保持溝45,可採用第4圖所示之保持溝。 相反地，左右之基板保持板的保持溝，亦可採用第4圖所 示保持溝而底侧之基板保持板的保持溝，亦可採用第4 圖所示之保持溝。 如以上說明，在本例之遮罩基底收納體丨中，遮罩基 底10之左右及下側三邊之外周端面i lb，係藉由收納容器 20之容器本體30之左右保持溝43及底側之保持溝45所保 持，在此狀態下，遮罩基底1〇係藉由容器蓋5〇之彈性體 58所頂壓而不會晃動。另外，容器蓋5〇及容器本體“之 接合面係由密封材所密閉，以使收納有遮罩基底ι〇之内 部成為密閉n又，以不會干涉至形成於遮罩基底ι〇 表面之遮光膜及光阻膜的端部14的方式，來設定各保持 溝43,45之一方的溝側面43b，45b的傾斜角度。 因此，若使用本例之遮罩基底收納體丨的話，不會傷 及遮罩基底10,並且在表面不會附著灰塵或塵埃等，而 可進行遮罩基底ίο之移動及運送。尤其是，保持溝43,45 之溝側面43b，45b不會干涉至遮罩基底1〇之膜，所以，’在 將遮罩基底10放入或取出於收納容器20之作業時，或遮 罩基底收納體1之運輪或運送時，可確實防止因干涉而將 膜之端部剝離，而使得由此產生之塵埃附著於遮罩基底 表面的弊害。 -13- 201233605 另外，本例之遮罩基底收納體丨之收納容器2〇的容器 蓋50，係於其一方之側板部分安裝有紅色之半透明板μ 。容器蓋50係以該半透明板59面對被收納之遮罩基底α 的背面側的方式而覆蓋於容器本體3〇上。通過該半透明 板59可看見收納於容器本體3〇内之遮罩基底⑺的上端部 分，所以，在蓋上或取下容器蓋5〇時，可操作該容器蓋 50使其不會碰觸到遮罩基底1〇。另外，半透明板59係與 遮罩基底1 0之背面對恃。即使外部光線之一部分光線通 過半透明板59而照射至遮罩基底10的背面時，亦不會產 生使彳于形成於相反側之表面丨丨a之光阻膜丨3被感光等的 弊害。 在此，以容器蓋50之半透明板59面對收納於容器本 體3〇之遮罩基底10的背面側的方式，預先在容器本體30 上設置標示配置半透明板59之側的指標為較佳。 又’在上述例中，雖為針對遮罩基底收納體者，但 本發明亦可用作為將遮光膜加以圖案化之轉印遮罩收納 體收納合器。又，若為表面形成有膜之覆膜玻璃基板 的話’即使遮罩基底及轉印遮罩以外者，亦可應用本發 明。 【圖式簡單說明】 第1圖為，„、貝示應用本發明之遮罩基底收納體的立體 圖。 第2圖為顯示第丨圖之遮罩基底收納體的剖視圖，（a) 圖為沿著第1圖中之a_a線所切斷後之情況的剖視圖，（b) 圖為沿著（a)圖中之b_b線所切斷後之情況的剖視圖，及 -14- 201233605 (c)圖為沿著（a)圖中之c-c線所切斷後之情況的剖視圖。 第3圖為顯示第1圖之遮罩基底收納體之收納容器的 保持溝的局部放大剖視圖。 第4圖為顯示保持溝之另一例的說明圖。 第5圖為顯示遮罩基底與保持溝之干涉所產生的弊 害的說明圖。 【主要元件符號說明】 1 遮罩基底收納體 10 遮罩基底 11 玻璃基板 1 la 表面 1 lb 外周端面 1 lc,l Id 倒角面 lie 背面 12 遮光膜 13 光阻膜 14 膜的端部 20 收納容器 30 容器本體 3 1 上端開口部 32 上緣框部分 33 階梯面 35,36 側板部分 37,38 端板部分 37a，38a 插入溝 -15- 201233605 3 9 底 板 部 分 4 0 矩 形 框 狀 部分 42 基 板保 持 板 4:3 保 持 溝 43a 溝 底 面 43b， 43c 溝 側 面 44 基 板 保 持 板 45 保 持 溝 45a 溝 底 面 45b,45c 溝 側 面 5 0 容 器 蓋 5 1 下 緣 框 部 分 53,54 側 板 部 分 55,56 端 板 部 分 57 頂 板 部 分 58 彈 性 體 59 半 透 明 板 60 固 定 件 -16 -And a substrate storage container for accommodating a coated glass substrate having a chamfered surface formed by an angular portion of the surface and the outer peripheral end surface of the outer peripheral end surface, wherein the outer peripheral end surface for holding the coated glass substrate is provided The holding groove, the remaining bottom surface of the groove 1 and the opposite side and the second groove side surface 'the angle between the first groove side surface and the inner corner of the groove bottom surface' are smaller than the outer circumferential end surface of the coated glass substrate The chamfered surface forms a larger angle. In the present invention, the angle of the inner corner of the groove bottom surface and the first groove side surface is larger than the angle formed by the outer peripheral end surface and the chamfered surface of the cover glass substrate. Therefore, the outer peripheral end surface of the coated glass substrate is positioned and inserted into the holding groove, and the outer peripheral end surface is brought into contact with the bottom surface of the groove, and the side surface of the groove is kept away from the chamfered surface of the cover glass substrate. Tilting, the end of the film does not interfere with the side of the first groove. Here, in the present invention, a chamfered surface is formed on a corner portion of the back surface of the coated glass substrate and an outer peripheral end surface thereof, and an inner corner of the second groove side surface and the bottom surface of the groove in the holding groove The angle is smaller than the angle formed by the outer peripheral end surface of the coated glass substrate and the chamfered surface on the back side thereof. In the case of such a configuration, the outer peripheral end surface of the coated glass substrate is inserted into the holding groove, and the outer peripheral end surface is brought into contact with the bottom surface of the groove of the holding groove, and the back surface and chamfer of the lower-coated glass substrate. The outer corner formed by the surface abuts against the side surface of the second groove. By the above contact, a state in which the coated glass substrate is positioned in the width direction of the holding groove can be formed. Further, the present invention is characterized in that the 201233605 substrate holding member in which the holding groove is formed is attached with a contaminant or the like. Thereby, the board 0 can be kept in a detachable state, and the substrate can be kept in a state of no contamination. In the present invention, it is possible to remove the inner rectangular contour groove of the detachable body which accommodates the flat portion of the outer surface of the film-coated glass base by removing the member in the groove. The utility model is characterized in that the upper end surface is a flattened rectangular parallelepiped container body and a container cover for blocking the opening. The substrate holding member is attached to the bottom surface of the container and the opposite side surface. In the case of the coated glass substrate accommodated in the vertical state, the coated glass substrate is held by the three sides. In the present invention, the present invention is characterized in that the container cover has a translucent portion and is configured to cover the container cover so that the translucent portion and the back surface of the glass substrate housed in the container body are Right. After the coated glass substrate is housed in the container body, the container cover is covered by the translucent portion knife so that the position of the coated glass substrate is not changed by the container cover. . In addition, the 'translucent portion of red is opposite to the back surface of the coated glass substrate. Therefore, the light transmitted through the translucent portion is not directly irradiated onto the film on the surface of the substrate. Therefore, even if photosensitive is formed. The condition of the photoresist film or the like 'still does not cause the film to be sensitive. Next, the present invention relates to a substrate storage container having the above-described structure, and a coated glass substrate housed in the substrate storage container, wherein the coated glass substrate is laminated with a light shielding film. And a mask substrate of the photoresist film. In the present invention, the present invention relates to a substrate storage container having the above-described configuration, and a substrate-coated container having the above-described structure, and a coated glass substrate housed in the substrate internalizer, the coated glass substrate A transfer mask having a patterned light-shielding film formed thereon. (Effect of the invention) The film of the coated glass substrate accommodated in the substrate storage container towel of the present month does not interfere with the groove side surface of the holding groove for holding the outer peripheral end surface of the substrate. Therefore, during storage or transportation, there is no such thing as film peeling due to the above interference, and the car v + is combined. Therefore, the coated glass substrate can be accommodated and held in a state where dust does not occur. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a state in which a mask base storage body to which the present invention is applied and a state in which a cover is removed. Fig. 2 is a cross-sectional view showing a state in which the line a-a is cut along the line a-a in the first drawing, and is cut along the line b-b and the line c-c. Further, Fig. 3 is a partially enlarged cross-sectional view showing a groove for holding the mask base. The mask base storage body 1 is composed of a rectangular one-piece mask base 1 and a storage container 20 that accommodates the mask base 密 in a sealed state. First, the mask substrate 1 is accommodated. As shown in FIG. 3, the light-shielding film 12 and the photoresist film 13 are laminated on the surface 11a of the rectangular glass substrate 定 having a predetermined thickness. The rectangle is rectangular, and the edge portions on both sides of the outer peripheral end surface 11b are chamfered surfaces 11 c, 11 d which are chamfered at 45 degrees. The light-shielding film 12 and the end portion 14 of the photoresist film 13 laminated on the surface of the glass substrate are placed at the outer corner portions of the surface of the glass substrate 11a and the chamfered surface 1 1 c. For example, 201233605, the thickness of the glass substrate 11 is 8 mm, and the thickness of the light shielding film 12 is about i 〇〇 nm. The thickness of the photoresist film 13 is about 1 μm. Next, as shown in Fig. 1, the storage container 2 is a container of a flat rectangular parallelepiped shape of a vertical shape, and is composed of a container body 3 and a container lid 5. Further, a fixing member (not shown) for fixing the container cover 50 to the container body 3 can be provided. The lower edge frame portion 5 of the container cover 50 is formed to be larger than the upper edge frame portion 32 forming the upper end opening portion 31 of the container body 30, and the upper edge frame portion 32 can be fitted into the lower edge frame portion 5丨. The size of the inside. In a state in which the container cover 50 is closed, the lower end surface of the lower edge frame portion 51 is in a state of abutting against the step surface 33 of the container body 30. In this state, the container is fixed by a fixing member (not shown). The lid 5 is locked and fixed to the side surface of the container body 30 so that the container lid 5 is sealed to the joint surface of the container body 3, and the inside of the container container 20 is kept in a sealed state. Referring to Figures 2 and 3, the container body 3 is provided with a pair of side plate portions 35, 36, a pair of end plate portions 37, 38, a bottom plate portion 39, and a rectangular frame portion 4b having a stepped surface 33 at its upper end. Made up of plastic molded products. Further, on the inner side surfaces of the pair of end plate portions 37, 38, a substrate holding plate 42 is detachably attached, and a substrate holding plate 42 is formed on the substrate holding plates 42 to respectively hold the left and right outer peripheral end faces of the mask substrate 丨〇. The holding groove 43 of i丨b. The substrate holding plate 44 is also detachably attached to the bottom plate portion 39. Further, a holding groove 45 for holding the outer peripheral end surface lib of the lower side of the mask base 10 is formed on the substrate holding plates 44. In this example, the inner side surfaces of the end plate portions 3, 7 and 8 are formed with insertion grooves 37a, 38a extending in the up and down direction, and the substrate holding plates 42 are vertically inserted from the upper end openings. Each of the substrate holding plates 42 is attached to the 201233605 end plate portions 3, 7 3 8 and is detached from the upper end opening upward. Further, the substrate holding plate 44 of the bottom plate portion 39 is disposed in a state in which both end portions of the end plate portions 37, 38 are inserted into the lower end portions of the insertion grooves 37a, 38a. Therefore, 'the both ends of the substrate holding plate 44 are fitted into the insertion grooves 37a, 38a to fall to the bottom plate portion 39, and then, when the left and right substrate holding plates 42 are inserted into the insertion grooves 37a, 38a from the upper side, The lower end faces of the substrate holding plates 42 are pressed and fixed to both end portions of the substrate holding plate 44 which are disposed on the bottom plate portion 39. The left and right substrate holding plates 42 inserted into the insertion grooves 3 7 a, 3 8 a are fixed to the end plate portions 37, 38 by fixing screws (not shown). When the mask base ίο is inserted from the upper side along the holding grooves 43 of the left and right substrate holding plates 42, the mask substrate 1 is held by the holding grooves 45 of the substrate holding plates 44 of the left and right holding grooves 43 and the bottom plate portion 39. The left and right sides and the lower side of the outer peripheral end face are stored in the container body. Further, the container cover 50 is provided with a pair of side plate portions 53, 54, a pair of plate portions 55'56, and a plastic product of the top plate portion 57. A plurality of elastic bodies 58 are provided on the top plate portion at regular intervals along the longitudinal direction of the outer peripheral end surface. After the mask base 10 is housed in the container body % and the cover 50 is closed, the elastic body is formed so as to form the outer peripheral end surface of the upper side of the cover substrate 10 by the elastic body. The mounting height of 58 is 遮, the cover base 1 收纳 which is housed in the state in which the container cover 5 is closed and fixed by the container cover 50 to the container body 30, and the outer peripheral end of the upper side is The elastic body 58 is in a state in which the outer peripheral end faces of the left and right sides and the lower side are formed by the left and right holding grooves 43 of the container 30 and the holding groove center of the bottom side, and are kept in a state of being loosened to -10- 201233605. The portion on the upper side of the lower edge frame portion 51 of the container cover of this example is formed. It is formed by seeing the outer side of the container cover 5 through the translucent plate 59. In the case of one side plate portion 53 When the red translucent sheet 59 is unloaded on the container body 30, the upper end portion of the mask base 10 can be removed from the inside (the cross-sectional shape of the groove is maintained). Next, the holding groove 43 and 45 of this example will be described with reference to FIG. Cross-sectional shape. The substrate holding plate 4 formed on the left and right Since the cross-sectional shapes of the holding grooves 43, 45 on the upper and lower substrate holding plates 44 are the same, only the holding grooves 45 formed on the substrate holding plate 44 on the bottom side will be described, and the left and right holding grooves 4 will be omitted. The holding groove 45 of this example is defined by a groove bottom surface 45a and a pair of groove side surfaces 45b, 45c which are formed in a trapezoidal cross-sectional shape which is expanded toward the groove opening side. The groove bottom surface 45a and one groove are formed. The angle ea of the inner corner formed by the intersection of the side faces 45b is set within the following angular range, and is set to 150 degrees in this example. 135 degrees < 0a < 180 degrees with respect to this, the groove bottom surface 4 5 a and the other side The angle Θ b of the inner corner formed by the intersection of the groove side faces 4 5 c is set within the following angular range, in this example, set to 100 degrees. 90 degrees < 0b < 135 degrees as previously explained, at the mask base 10, the outer periphery is formed with a chamfered surface 11c, lid, and the surface 11a is at an angle with the chamfered surface 11c, and the back surface lie is at an angle of 45 degrees with the chamfered surface 11d. Therefore, as shown in Fig. 3, When -11- 201233605 is made on the surface side (film formation side) of the mask base ίο When the outer peripheral end surface i lb of the mask substrate 1 插入 is inserted into the holding groove, the groove side surface 45 b does not interfere with the surface formed on the surface: the end of the Μ 膜 film and the photoresist film. In the portion 14 , the back surface i 丨 e of the glass substrate and the outer corner of the chamfered surface 1 Id are in contact with the groove side surface 45 c on the opposite side. The holding grooves 43 formed on the left and right substrate holding plates 42 also have the same cross section. The groove bottom surface 43a and the groove side surfaces 43b and 43c, the angle ea of the groove bottom surface 43& and the inner angle of the groove side surface 43b are set as described above, and the angle eb of the inner angle of the groove bottom surface 43a and the other groove side surface 43c is also set as described above. . Therefore, the groove side faces 43b, 45b can be prevented from interfering with the light shielding film formed on the surface of the mask substrate 10 and the end portion 14 of the photoresist film. Further, the outer corners of the back surface 11e and the chamfered surface 11d of the mask substrate 1 abut against the groove side surfaces 43c, 45c, and the positioning of the mask substrate 10 in the groove width direction can be achieved. In particular, as shown in Fig. 3, if the outer peripheral end face 1 lb and the chamfered surface on the surface side! The outer corner of lc is set so as to match the inner corner of the groove bottom surface 4 3 a of the groove 4 3, 4 5 and the inner side angle of the groove side surface 4 3 b and the inner angle of the groove bottom surface 45a and the groove side surface 45b, thereby setting the groove bottom surface 43 a, 45 a In the case of the width, the positioning of the mask substrate 1 in the groove width direction can be surely performed, and thus the movement of the outer peripheral end surface Ub of the mask substrate 10 in the groove width direction in the holding grooves 4 3, 45 can be surely prevented. Further, as shown in Fig. 4, the holding groove 43 (45) may set the angle θ of the inner corner of the groove bottom surface 43a (45a) and the left and right groove side surfaces 43b, 43c (45b, 45c) to 135 degrees < 0a < 180 The angle within the range. In this case, it is also possible to prevent the light shielding film on the surface of the mask and the end portion 14 of the photoresist film from interfering with the groove side surface of the holding groove 43 (45). Further, if the bottom surface of the groove is formed to have the same width as the outer circumferential end surface of the mask base, the positioning of the mask base in the groove width direction of -12-201233605 can also be performed. Further, it is also possible to combine the holding grooves of the cross-sectional shape shown in Fig. 3 and the holding grooves of the cross-sectional shape shown in Fig. 4 . For example, the holding grooves 43 of the left and right substrate holding plates 42 may be the holding grooves shown in Fig. 3, and the holding grooves 45 of the substrate holding plate 44 on the bottom side may be the holding grooves shown in Fig. 4. Conversely, the holding grooves of the left and right substrate holding plates may be the holding grooves of the substrate holding plate on the bottom side of the groove as shown in Fig. 4, or the holding grooves shown in Fig. 4 may be used. As described above, in the mask base storage body of the present embodiment, the left and right outer peripheral end faces i lb of the mask base 10 are held by the left and right retaining grooves 43 and the bottom of the container body 30 of the container 20 . The side holding groove 45 is held. In this state, the mask base 1 is pressed by the elastic body 58 of the container cover 5 without being shaken. In addition, the joint surface of the container lid 5〇 and the container body is sealed by a sealing material so that the inside of the mask base layer is sealed and closed so as not to interfere with the surface formed on the mask base. The angle between the light-shielding film and the end portion 14 of the photoresist film is set to the inclination angle of the groove side faces 43b and 45b of one of the holding grooves 43, 45. Therefore, if the mask base storage body of the present example is used, The substrate 10 is damaged, and dust, dust, and the like are not attached to the surface, and the movement and transportation of the substrate ίο can be performed. In particular, the groove sides 43b, 45b of the grooves 34, 45 are not interfered with the mask. Since the film of the substrate 1 is formed, it is possible to surely prevent the film from being interfered by interference when the mask substrate 10 is placed in or taken out of the container 20 or when the substrate of the substrate housing 1 is transported or transported. The end portion is peeled off, and the dust generated thereby adheres to the surface of the mask base. -13- 201233605 In addition, the container lid 50 of the storage container 2 of the mask base storage body of the present embodiment is attached to one of them. The side plate part is installed with a red translucent plate μ The container cover 50 is placed on the container body 3 so that the translucent plate 59 faces the back side of the mask base α to be accommodated. The translucent plate 59 can be seen to be received in the container body 3 The upper end portion of the cover base (7), so that when the cover is removed or the container cover 5 is removed, the container cover 50 can be operated so as not to touch the cover substrate 1 另外. In addition, the translucent plate 59 is attached to the cover. The back surface of the substrate 10 is opposed to each other. Even if a part of the external light passes through the translucent plate 59 and is irradiated onto the back surface of the mask substrate 10, the photoresist film which is formed on the surface 丨丨a formed on the opposite side is not generated. The 丨3 is damaged by light sensation, etc. Here, the translucent plate 59 of the container lid 50 faces the back side of the mask base 10 of the container body 3, and the container body 30 is previously provided with a semi-transparent mark. The index on the side of the plate 59 is preferable. In the above example, the cover substrate storage body is used. However, the present invention can also be used as a transfer mask storage body storage device in which a light shielding film is patterned. Moreover, if the film is formed on the surface of the film-coated glass base In the case of a plate, the present invention can be applied to a mask base and a transfer mask. [Brief Description of the Drawing] Fig. 1 is a perspective view showing a mask base storage body to which the present invention is applied. Fig. 2 is a cross-sectional view showing the mask base storage body of the second drawing, (a) is a cross-sectional view taken along the line a_a in Fig. 1, and (b) is a view along (a) A cross-sectional view of the case where the b_b line is cut, and -14-201233605 (c) is a cross-sectional view of the case after being cut along the cc line in (a). Fig. 3 is a partially enlarged cross-sectional view showing a holding groove of a storage container of the mask base storage body of Fig. 1. Fig. 4 is an explanatory view showing another example of the holding groove. Fig. 5 is an explanatory view showing the disadvantages caused by the interference between the mask base and the holding groove. [Main component symbol description] 1 Mask base storage body 10 Mask substrate 11 Glass substrate 1 la Surface 1 lb Outer peripheral end face 1 lc, l Id chamfered surface lie Back surface 12 Light-shielding film 13 Photoresist film 14 End portion of film 20 Storage Container 30 Container body 3 1 Upper end opening 32 Upper edge frame portion 33 Stepped surface 35, 36 Side plate portion 37, 38 End plate portion 37a, 38a Inserted into groove -15 - 201233605 3 9 Base plate portion 4 0 Rectangular frame portion 42 Substrate retention Plate 4:3 holding groove 43a groove bottom surface 43b, 43c groove side surface 44 holding plate 45 holding groove 45a groove bottom surface 45b, 45c groove side surface 5 0 container cover 5 1 lower edge frame portion 53, 54 side plate portion 55, 56 end plate portion 57 Top plate part 58 Elastomer 59 Translucent plate 60 Fixing piece-16 -

Claims (1)

201233605 七、申請專利範圍： 1. 一種基板收納容器，其用以收納表面形成有薄膜的覆 膜玻璃基板的基板收納谷器，其特徵為： 具備由上端開口部、一對側板部分、一對端板部 分與底板部分構成的容器本體、及用以閉鎖該上端開 口部之可裝卸的容器蓋； 在該容器本體中S亥一對端板部分及該底板部分之 各内側面，分別以可裝卸地安裝基板保持板； 該基板保持板係具有用於保持該覆膜玻璃基板的 外周端面之保持溝； 藉由女裝於该一對端板部分及該底板部分之各基 板保持板的保持溝，保持該覆膜玻璃基板的外周端面 〇 2. 如申睛專利範圍第1項之基板收納容器，其中在該一對 端板部分之各内側面沿從該上端開口部側至該底板部 分側之方向形成有插入溝； 該基板保持板係藉由從該上端開口部側插入該插 入溝而安裝於該端板部分。 3 * .如申請專利範圍第2項之基板收納容器，其中該基板保 持板係以將其兩端部插入於該一對端板部分的各插入 溝的狀態而安裝於該底板部分。 •如申請專利範圍第1項之基板收納容器，其中 該容器蓋係具備與該底板部分對恃的頂板部分； 在該頂板部分的内側面沿該頂板部分之長邊方向 %置有複數個彈性體； ° -17- 201233605 當該覆膜玻璃基板收納時，藉由安裝於該一對端 板部分及該底板部分之各基板保持板的保持溝與該複 數個彈性體，而保持該覆膜玻璃基板的外周端面。 5. 如申請專利範圍第1項之基板收納容器，其中該覆膜破 璃基板之形成有薄膜的表面與外周端面的外角部分、 及背面與外周端面的外角部分一起成為倒角面； 該保持溝係具備溝底面、及對向的第丨與第2溝側 面； 該溝底面抵接於該覆膜玻璃基板之該外周端面； 該溝底面與該第1溝側面之内角，係與該覆膜玻璃 基板之該外周端面與該表面側的倒角面之外角一致； 该第1溝側面與該溝底面之内角的角度，係比該覆 膜玻璃基板之該外周端面與該表面側的倒角面所構成 之角度大； 该溝底面與該第2溝側面之内角，係與該覆膜玻璃 基板之該外周端面與該背面側的倒角面之外角一致； 6亥第2溝側面與該溝底面之内角的角度，係比該覆 膜玻璃基板之該外周端面與該背面側的倒角面所構成 之角度大。 6. 如申請專利範圍第5項之基板收納容器，其中該第i溝 側面與該溝底面之内角的角度，係135。以上且18〇。以 下。 7. 如申请專利範圍第5項之基板收納容器，其中該第2溝 側面與該溝底面之内角的角度，係丨35。以上且丨8〇。以 下。 -18- 201233605 8:申範圍第5項之基板收納容器，其中該溝底面 之寬度係與該覆膜玻璃基板之該外周端面的寬度 〇 J 9.如申請專利範圍第1項之基板收納容器，其中該容器甚 具有紅色之半透明部分， 甲该备益蓋 且構成為可將該容器蓋覆蓋於該容器本體上， 使該半透明部分與收容於該 板的背面對峙。 *體内之覆膜玻璃基 1〇· —種遮罩基底收納體，其特徵為： 具有申請專利範圍第1至9項中任-項之基板收納 容器，及收納於該基板收納容器内之覆膜玻場基板，、、 該覆膜玻璃基板係疊層有遮光膜及光阻膜之遮罩 基底。 i 1 . 一種轉印遮罩收納體，其特徵為： 具有申請專利範圍第⑴項中任一項之基板收納 容器’及收納於該基板收納容器内之該覆膜玻璃基板 該覆膜玻璃基板係形成有被圖案化之遮光膜的轉 印遮罩。 12,種覆膜玻璃基板納容體，其特徵為. 具有申請專利冑圍第i至9項中任一項戶斤述之基板 收納容器，及收納於該基板收綱容器内之該覆膜玻璃 基板。 -19-201233605 VII. Patent Application Range: 1. A substrate storage container for accommodating a substrate storage tray having a film-coated glass substrate having a thin film formed thereon, comprising: an upper end opening portion, a pair of side plate portions, and a pair a container body formed by the end plate portion and the bottom plate portion, and a detachable container cover for blocking the upper end opening portion; in the container body, a pair of end plate portions and inner side surfaces of the bottom plate portion are respectively Loading and unloading the substrate holding plate; the substrate holding plate has a holding groove for holding the outer peripheral end surface of the coated glass substrate; and maintaining the substrate holding plates by the pair of end plate portions and the bottom plate portion The substrate storage container of the first aspect of the invention, wherein the inner side surfaces of the pair of end plate portions extend from the upper end opening side to the bottom plate portion. An insertion groove is formed in a side direction; the substrate holding plate is attached to the end plate portion by being inserted into the insertion groove from the upper end opening side. The substrate storage container according to the second aspect of the invention, wherein the substrate holding plate is attached to the bottom plate portion in a state in which both end portions are inserted into the respective insertion grooves of the pair of end plate portions. The substrate storage container according to claim 1, wherein the container cover has a top plate portion opposite to the bottom plate portion; and the inner side surface of the top plate portion has a plurality of elastic portions along a longitudinal direction of the top plate portion When the coated glass substrate is housed, the film is held by the holding grooves of the substrate holding plates attached to the pair of end plate portions and the bottom plate portion and the plurality of elastic bodies. The outer peripheral end surface of the glass substrate. 5. The substrate storage container according to claim 1, wherein the surface of the film-forming substrate on which the film is formed and the outer corner portion of the outer peripheral end surface, and the outer corner portion of the back surface and the outer peripheral end surface become chamfered surfaces; The groove system has a groove bottom surface and a facing second groove and a second groove side surface; the groove bottom surface is in contact with the outer circumferential end surface of the coated glass substrate; and the inner corner of the groove bottom surface and the first groove side surface is covered by the groove The outer peripheral end surface of the film glass substrate is aligned with the outer surface of the chamfered surface on the surface side; the angle between the first groove side surface and the inner corner of the groove bottom surface is lower than the outer circumferential end surface of the coated glass substrate and the surface side The angle formed by the corner surface is large; the inner angle of the bottom surface of the groove and the side surface of the second groove is the same as the outer circumferential end surface of the coated glass substrate and the outer surface of the chamfer surface of the back surface side; The angle of the inner angle of the bottom surface of the groove is larger than the angle formed by the outer circumferential end surface of the coated glass substrate and the chamfered surface on the back surface side. 6. The substrate storage container of claim 5, wherein an angle of an inner angle of the side surface of the i-th groove and the bottom surface of the groove is 135. Above and 18〇. the following. 7. The substrate storage container according to claim 5, wherein the angle between the side surface of the second groove and the inner angle of the bottom surface of the groove is 丨35. Above and 丨8〇. the following. The substrate storage container of the fifth aspect of the invention, wherein the width of the bottom surface of the groove is the width of the outer circumferential end surface of the coated glass substrate, and the substrate storage container of the first aspect of the invention is as claimed in claim 1. Wherein the container has a red translucent portion, and the cover is configured to cover the container body such that the translucent portion faces the back of the plate. The coated glass substrate of the present invention is characterized in that: the substrate storage container according to any one of claims 1 to 9 and the substrate storage container are housed in the substrate storage container. The coated glass substrate is a mask substrate on which a light shielding film and a photoresist film are laminated. A substrate storage container according to any one of the above claims, wherein the coated glass substrate is housed in the substrate storage container, and the coated glass substrate is provided. A transfer mask in which a patterned light shielding film is formed. 12. A coated glass substrate nanocapacitor, characterized in that: the substrate storage container according to any one of items i to 9 of the application, and the coating contained in the substrate collection container glass substrate. -19-
TW101105610A 2005-11-30 2006-11-28 Substrate container, mask blank package, transfer mask package and film-coated glass substrate container TWI526376B (en)

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TWI367850B (en) 2012-07-11
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KR101067200B1 (en) 2011-09-22
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TWI526376B (en) 2016-03-21
TW200728168A (en) 2007-08-01

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