1270745 (1) 九、發明說明 【發明所屬之技術領域】 本發明，是有關於對於爲了防止在製造構成LSI、液 晶顯示器（LCD )的薄膜晶體管（TFT )或濾色器（CF ) 等時的平版印刷過程所使用的光罩或十字線上附著異物所 使用，的防塵膜的面積是l〇〇〇cm2以上的大型防塵膜，可 以於穩定的狀態下被收納於由托盤及蓋所組成的殼的大型 防塵膜的收納方法及其收納構造體。 【先前技術】 以往，對於半導體電路圖案等的製造，是如後述的專 利文獻1，——般使用稱作防塵膜的防塵手段，防止異物附 著於光罩或十字線。防塵膜是在具有配合光罩或十字線形 狀的厚度數毫程度的框體的上緣面，展張接合厚度ΙΟμιη 以下的硝化纖維素或是纖維素誘導體或是氟聚合物等的透 明的高分子膜（以下稱防塵膜），且在該框體的下緣面塗 抹黏接材的同時，在.此黏接材上以預定的接合力黏接保護 薄膜。 前述黏接材，是將防塵膜固定於光罩或是十字線用， 且，保護薄膜是爲了使該黏接材直到被使用爲止可維持該 黏接材的接合力，而用來保護該黏接材的接合面。將此防 塵膜從製造者搬運至使用者時，爲了防止異物附著於防塵 膜等，或者是防止防塵膜損塲，一般是將該防塵膜收納於 由托盤及蓋組成的殼，進一步收納於防塵袋等來進行搬運 -4- (2) (2)1270745 本發明對象的可面積是收納1 0 0 0 c m 2以上的大型防塵 膜的由托盤及蓋構成的殼，通常是藉由真空成形法成形， 且大型防麈膜，是在被設置於托盤後藉由蓋住蓋而被收納 於殼內.。而且前述的殼的製造時，是被收納於殼內的大型 防塵膜的框體及蓋的間隔是被設計製造成0mm以上1mm 未滿的範圍，藉由此部分讓蓋抑制大型防塵膜，防止因運 送中等的振動而使大型防塵膜在殼內滑動摩擦而發生灰塵 〇 但是，面積是收納1 0 0 0 c m 2以上的防塵膜的大型的殼 中’有如以下問題。即，在大型的殼中，因爲具有防塵膜 及殼的游隙的問題，或者是殼無法滿足平坦性的要求等的 問題，而無法將大型防塵膜的全周及殼的蓋的間隔正確地 抑制於〇mm以上1 mm未滿，因此，欲一邊保持可滿足習 知的設計思想用的成形精度一邊製造大型的殼是困難的。 因此’將大型防塵膜收納於以習知的設計思想製造的 大型殻之中的情況時，大型防麈膜及蓋的間隔是以 0mm 使蓋與大型防塵膜接觸時，蓋因爲是按壓於大型防塵膜的 框體，所以在大型防塵膜的運送時等會在兩者間產生摩擦 而發生灰塵，而異物會附著於大型防麈膜。 且，大型防塵膜及蓋的間隔是在1 mm以上的情況時 ，無法藉由蓋按壓大型防塵膜而不穩定，運送時大型防塵 膜會在殼內移動或是振動，殼及大型防塵膜之間會發生摩 擦並發生灰塵，異物會附著於大型防塵膜。 -5- (3) (3)1270745 爲了解決前述的大多的問題，本件專利申請人，已經 完成後述的專利文獻2、專利文獻3或是專利文獻4的發 明，並已提出專利申請。 後述專利文獻2的技術，是將突出部立起突設於防塵 膜收納殼的托盤表面的同時，在此突出部的側面設置凹部 ，藉由將防塵膜的保護薄膜插入此凹部，來保持固定被載 置於托盤上的防塵膜的技術。且，專利文獻3的技術，是 在防塵膜的保護薄膜的下面塗抹好具有預定的黏接力的黏 φ 接材，將防塵膜搭載於托盤上時，藉由將保護薄膜黏接於 _ 托盤’而將防塵膜保持固定於托盤的技術。進一步，專利 文獻4的技術，是從殻的蓋的頂面吊下棒狀的按壓體，將 . 旨亥盍室住托盤時’藉由該按壓體從上方按壓被搭載於托盤 . 上的防塵膜的保護薄膜，將防麈膜保持固定於托盤的技術 - 〇 [專利文獻1 ]日本特公昭5 4 - 2 8 7 1 8號公報 [專利文獻2]日本特開平11-38597號公報 Φ [專利文獻3]日本特開平H-24238號公報 [專利文獻4]日本特開平n—52553號公報 【發明內容】 (本發明所欲解決的課題） 前述的專利文獻2乃至專利文獻4的發明，對於供在 收納習知一般所使用的5英吋或6英吋的半導體用的防塵 膜用的殼雖是非常有效，但是將此等的發明，應用在收納 -6- (4) (4)1270745 本發明對象的防塵膜的面積是1 000 cm 2以上的大型防塵膜 用的殼的情況時，是如後述，有若干的問題點。 專利文獻2的技術，是使用成本便宜製造容易的真空 成形方法，在立起突設於托盤的表面的突出部的側面形成 比較深的凹部，是具有無法獲得充分的成形精度的問題。 且，使用射出成形方法成形托盤的情況時，雖因成形精度 佳而成形可能，但是藉由射出成形方法成形本發明對象的 1 000 cm2以上的大型防塵膜的情況時，因爲需要非常大型 的成形機所以成本高並不實用的同時，托盤的尺寸因爲很 大，所以會發生成形變形，欲在突出部的側面精度佳地形 成窄深的凹部是有困難。 在專利文獻3的技術，是在防塵膜的保護薄膜的下面 塗抹黏接材並將保護薄膜貼合於托盤的表面的方法，其對 於小尺寸的半導體用防塵膜的殻雖有效，但是對於如本發 明的供收納大型防塵膜用的大型的殼時，因爲成形精度非 必定佳，在托盤的防塵膜搭載處會發生彎曲。因此由托盤 的彎曲所產生的變形會被複寫至保護薄膜，保護薄膜的一 部分會從黏接材剝離而使黏接材的黏接力下降，因這些原 因而使將防塵膜均一地貼付於光罩是困難的。 專利文獻4的技術，是藉由從殼的蓋的頂面吊下的按 壓體來按壓被搭載於托盤的防塵膜的保護薄膜來保持固定 防塵膜的方法。此技術的情況，如半導體防塵膜收納殼， 對於如5〜6英吋的小尺寸的殼的情況時雖可維持成形精 度，但是對於收納如前述本發明對象的大型防塵膜的大型 -7- (6) (6)1270745 前述按壓部重疊於托盤的表面上。且，在本發明中，因爲 藉由黏接帶將此按壓部黏接於托盤，就可藉由非常簡單的 作業將防塵膜在穩定狀態下確實地被保持固定於托盤。 進一步，在本發明，因爲是藉由柔軟性豊富的黏接帶 將大型防塵膜的保護薄膜貼合於托盤，所以即使托盤的成 形精度不佳的情況，或在托盤產生彎曲的情況，也不會有 任何影響，可將大型防塵膜正確且確實地保持固定於托盤 〇 本發明的第2態樣，是如本發明的第1態樣的大型防 塵膜的收納方法，其中，前述保護薄膜的按壓部是形成寬 度爲6mm以上，長度爲20mm以上。 在前述的第2態樣中，前述保護薄膜的按壓部的長度 爲50mm以上較佳，長度爲300mm以上更佳。且，大型防 塵膜的面積是4000cm2以上的情況時，若前述保護薄膜的 按壓部的長度爲3 00mm以上的話，特別有效。 在前述的第2態樣中，設在大型防塵膜的保護薄膜的 按壓部的尺寸，因爲寬形成6mm以上、長度20mm以上， 所以將大型防塵膜搭載於托盤時，可將此按壓部充分地重 疊於托盤的表面，且可藉由黏接帶將按壓部穩定確實地保 持固定於托盤的表面。 本發明的第3態樣，是如本發明的第1或是第2態樣 的大型防塵膜的收納方法，其中，搭載於前述殼的托盤的 大型防塵膜的框體及被蓋於該托盤的蓋之間具有至少1 以上的間隔。 -9- (8) (8)1270745 (發明之效果） 本發明，是爲了防止異物附著在製造構成液晶顯示器 (LCD )的薄膜晶體管（TFT )或濾色板（CF )等時的平 版印刷過程中所使用的光罩或十字線所使用，對於防塵膜 的面積爲1 000 cm2以上的大型防塵膜的收納方法及其收納 構造體可發揮效果。 在本發明的大型防麈膜的收納方法及其收納構造體， 因爲是將防麈膜的保護薄膜的外周緣的一部分或是全部朝 外側突出形成按壓部，所以將防塵膜搭載於托盤上時，具 有可將朝防塵膜的外框的外側突出的前述按壓部重疊於托 盤的表面上的效果。且，本發明，因爲是藉由黏接帶將此 按壓部黏接於托盤，所以也具有由非常簡單的作業就可在 穩定狀態下確實地保持固定防塵膜托盤的效果。進一步， 因爲將防塵膜的保護薄膜的具有柔軟性的按壓部藉由柔軟 性豊富的黏接帶貼合於托盤，所以即使托盤的成形精度不 足的情況，或者是於托盤產生彎曲的情況，也不會有任何 影響，具有可將防塵膜正確且確實地保持固定於托盤的效 果。 且本發明，設在防塵膜的保護薄膜的按壓部的尺寸， 是形成寬6mm以上、長度20mm以上的情況時，若將防塵 膜搭載於托盤時，可將此按壓部充分地重疊於托盤的表面 ，而具有藉由黏接帶將按壓部穩定確實地保持固定於托盤 的表面的效果。 -11 - (9) (9)1270745 且本發明，在被搭載於殼的托盤的大型防塵膜的框體 及蓋住此托盤的蓋之間，至少形成1 mm以上的間隔的情 況時，即使運送大型防塵膜的情況，也不需擔心因振動等 使大型防塵膜與蓋接觸摩擦。且，大型防塵膜’是如前述 藉由黏接帶在穩定狀態下被保持固定於托盤的情況時，不 需要由蓋按壓大型防塵膜，因此，殼的設計容易的同時， 具有即使殻的成形精度或變形的問題也可以全部解決的效 果。 [實施方式】 藉由圖具體說明本發明的大型防塵膜的收納方法及其 收納構造體的一實施例。第1圖是本發明的大型防塵膜的 收納方法及其收納構造體的縱剖面說明圖，第2圖是第1 圖的大型防塵膜的收納方法及其收納構造體的要部的擴大 說明圖，第3圖是使用於第1圖的大型防塵膜的收納方法 及其收納構造體的大型防塵膜用保護薄膜的平面圖’第4 圖也與第3圖同樣是使用於第1圖的大型防塵膜的收納方 法及其收納構造體的大型防塵膜用保護薄膜的平面圖。 對於第1圖及第2圖（a)及（b) ，A是大型防塵膜 ，如已詳述是防塵膜面積爲1〇〇〇 cm 2以上的大型防塵膜’ 由：框體1、及藉由接合劑2接合於該框體1的上緣面的 防塵膜3、及塗抹於前述框體的下緣面的黏接材4、及爲 了保護該黏接材4而被黏接於黏接材4的保護薄膜5所構 成。 -12- (10) (10)1270745 在前述實施例中，雖在框體1的下緣面塗抹黏接材4 ’但是預先使用黏接材4及使保護薄膜5層狀形成的層狀 黏接材的情況時，只在框體1的下緣面積層黏接層狀黏接 材也可以。但是，在本說明書中，也包含這種情況皆總稱 F塗抹」。接著，如前述結構大型防塵膜A，是被收納於 由托盤6及蓋7組成的殼B。蓋及托盤的嵌合面雖是橫跨 全周’藉由膠帶密封，或是在托盤6及蓋7的角落部安裝 夾子8也可以。 在前述大型防塵膜A的保護薄膜5的外周緣的外側是 突設：藉由後述的黏接帶黏接固定於托盤.6的表面的按壓 部5 a。此按壓部5 a的尺寸，經由本發明人等是返覆進行 各種實驗的結果發明，其寬W是6mm以上，長度L是 2 0mm以上較佳。具有這種尺寸的按壓部5a是可藉由黏接 帶9容易在穩定狀態下黏接固定於托盤6的表面。且，在 本發明中，上述長度L是50 mm以上較佳，上述長度L是 3 0 0mm以上更佳。且在防塵膜框體的至少2邊，形成各邊 的長度的5 %以上的按壓部的長度較佳，至少在相面對2 邊，形成各邊的長度的5 %以上的按壓部的長度較佳。然 而，對於上述的按壓部5a的寬W及長度L的上限，是當 按壓部到達托盤端部的情況。 實施本發明的收納方法及其收納構造體時，如前述的 第1圖及第2圖，將大型防塵膜A搭載於殼B的托盤6的 中央部，且藉由使用預定的寬及長度的黏接帶9，將朝大 型防塵膜A的框體1的外方突出的保護薄膜5的按壓部 -13- (11) 1270745 5 a黏接於托盤6的表面，就可在非常穩定的狀態下將 防塵膜A簡單且確實地保持固定於托盤6的中央部。 在本發明的收納方法及其收納構造體中，是如前 因爲將朝大型防塵膜A的框體1的外方突出的保護薄 的具有柔軟性的按壓部5 a，藉由柔軟性豊富的黏接帶 黏接固定於殼B的托盤6的表面，即使殼B的托盤6 形精度不佳，或者是於托盤6產生彎曲，也與這些的 無關，可在穩定狀態下將大型防塵膜A簡單固定於托 〇 然而，黏接帶9雖是全面覆蓋按壓部5 a地貼合 ，但是只要可獲得黏接固定的效果，只覆蓋一部分的 也可以。 進一步，在本發明的收納方法及其收納構造體， 可以將大型防塵膜A在穩定的狀態下確實地保持固定 B的托盤6，所以不需要藉由殼B的蓋7按壓大型防 A，因此，蓋7及大型防塵膜A的框體1的間隔D可 1mm以上。因此，大型防塵膜A及蓋7因爲具有充分 隔，不會因運送時等的振動而使大型防塵膜A及蓋相 擦，就不必擔心灰塵發生的問題。且，上述間隔D， 型防塵膜殼的保管性、洗淨性的觀點的話，3 00mm以 佳。 將按壓部5 a設置在前述的大型防塵膜A的保護 5時，是例如第3圖（a )〜（d )，或如第4 ( a )〜 )圖所示，在保護薄膜5的外緣的外側突設寬W爲 大型 述， :膜5 9被 的成 問題 盤6 較佳 態樣 因爲 於殻 塵膜 形成 的間 互摩 從大 下較 薄膜 ^ ( d 6mm -14- (12) 1270745 以上、長度L爲20mm以上的按壓部5a。 即，在第3圖（a )的情況中，是在大型防塵] 中空的保護薄膜5的長邊的外側中央設置按壓部 造，同圖（b )的情況，是在中空的保護薄膜5的 外側中央設置按壓部5 a的構造。同圖（c )的情況 中空的保護薄膜5的長邊及短邊的外側中央分別設 部5 a的構造，且同圖（d )的情況，是在非中空的 膜5的長邊及短邊的外側中央分別設置按壓部5 a 〇 第4圖（a )的情況，是在中空的保護薄膜5 的外側中央及短邊的外側設置幾乎橫跨全長的按J 的構造，同圖（b )的情況，是分別在中空的保護 的長邊的外側的幾乎全長及短邊的中央設置按壓部 構造。且，在同圖（c )的情況中，分別橫跨中空 薄膜5的長邊及短邊的全長連續設置按壓部5 a的 在同圖（d )的情況中，分別橫跨非中空的保護薄g 長邊及短邊的全長連續設置按壓部5 a的構造。 然而，保護薄膜的形狀的例是如第5圖所示。 使用於本發明的保護薄膜的材質，如聚對苯二 二醇酯樹脂、聚乙烯樹脂等較佳。且，保護薄膜的 是30μηι〜500μηα較佳。 使用於本發明的殼的材質，是聚對苯二甲酸乙 樹脂或丙烯腈丁二烯苯乙烯樹脂、丙烯樹脂、聚碳 脂、聚氯乙烯樹脂等的樹脂也可以。且，使用帶電 摸Α的 5 a的構 短邊的 ，是在 置按壓 保護薄 的構造 的長邊 g部 5 a 薄膜5 5a的 的保護 構造。 莫5的 甲酸乙 厚度， 二醇酯 酸酯樹 防止型 -15- (13) (13)1270745 的樹脂也可以。特別是，使用外氣發生量少者較佳。 且，使用於本發明的黏接帶的基材’是例如’聚乙烯 、聚丙烯、聚對苯二甲酸乙二醇酯、聚氯乙烯或非織布等 也可以。且，黏接帶的糊，是例如可以使用丙烯系或聚乙 烯醇等。進一步，黏接帶，是外氣發生量少者較佳。且， 5S加帶電防止處理者也可以。 本發明人，使用具有如前述結構的本發明的大型防塵 膜的收納方法及其收納構造體進行實驗的結果，可獲得如 以下實施例所示的好結果。 [實施例1 ] 將分別在外形尺寸爲42 7mmX294mm、保護薄膜5的 長邊及短邊的中央部設置尺寸爲 WlOmmXLlOOmm的按壓 部5 a的大型防麈膜a，搭載於由AB S樹脂材真空成形的 殻B的托盤6上，藉由黏接帶9(帶尺寸：15mmX120mm )將前述按壓部5 a黏接固定於托盤6之後，將蓋7蓋住 該托盤6上’將夾子8安裝於此等的托盤6及蓋7的角落 部將兩者固定。此時，考慮成形精度而保持大型防塵膜A 的框體1及蓋7的間隔d爲3.6mm以上。在此狀態下將 大型防塵膜A長距離運送測試的結果，在大型防塵膜a 及殼B之間未被認定有發生摩擦，在大型防塵膜a的防塵 膜3 ’在框體1的周圍也認定未發現有灰塵的附著。且， 大型防M M A是在維持最初被搭載的狀態下被保持固定。 長距離運达測S式的最大衝擊値是1 Q c m / s 2。 -16- (14) (14)1270745 [實施例2] 將分別在外形尺寸爲90 5 mmX750mm、保護薄膜5的 長邊及短邊的中央部尺寸爲WlOmmXL 1 00mm的按壓部5a 的大型防塵膜A，搭載於由 AB S樹脂材真空成形的殻B 的托盤6上，藉由黏接帶9(帶尺寸：i5mmX120mm)將 前述按壓部5 a黏接固定於托盤6之後，將蓋7蓋住該托 盤6上，將夾子8安裝於此等的托盤6及蓋7的角落部將 兩者固定。此時，考慮成形精度而保持大型防塵膜A的框 體1及蓋7的間隔D爲3.6mm以上。由與前述實施例1 完全同一的條件進行運送測試的結果，在大型防塵膜A及 殼B之間未被認定有發生摩擦，在大型防麈膜A的防麈膜 3 ·，在框體1的周圍也認定未發現有灰麈的附著。且，大 型防塵膜A是與最初的搭載時同樣，在穩定的狀態下被保 持固定於托盤6上。 [實施例3〜6 ] 將設在防塵膜的外形尺寸及保護薄膜的長邊及短邊的 中央部的按壓部的尺寸（WXL )爲如下述表1的大型防塵 膜A，搭載於由ABS樹脂材真空成形的殻B的托盤6上 ，藉由黏接帶9將前述按壓部5 a黏接固定於托盤6之後 ，將蓋7蓋住該托盤6上，將此等的托盤6及蓋7的嵌合 部藉由膠帶全周密封。按壓帶尺寸及大型防塵膜A的框體 1及蓋7的間隔D，是如下述表1。對於這些的防塵膜殼 -17- (15) 1270745 ，由與前述實施例1完全同一的條件下進行運送測試的結 果，在大型防塵膜A及殼B之間未被認定有發生摩擦’且 大型防塵膜A是與最初的搭載時同樣’在穩定的狀態下被 保持固定於托盤6上。1270745 (1) EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to prevention of manufacturing a thin film transistor (TFT) or a color filter (CF) constituting an LSI or a liquid crystal display (LCD). A large-sized dust-proof film having a dust-proof film area of l〇〇〇cm2 or more used for attaching foreign matter to a mask or a crosshair used in the lithography process, and can be housed in a stable plate and covered by a tray and a cover. A large-sized dust-proof film storage method and a storage structure thereof. [Prior Art] Conventionally, the production of a semiconductor circuit pattern or the like is a patent document 1 which will be described later, and a dustproof means called a dustproof film is generally used to prevent foreign matter from adhering to a mask or a crosshair. The dust-proof film is a transparent high surface of a frame having a thickness of a few millimeters in a shape of a mask or a crosshair, and exhibits a thickness of nitrocellulose or a cellulose-inducing body or a fluoropolymer which is not more than ΙΟμηη. The molecular film (hereinafter referred to as a dust-proof film) is coated with a bonding material on the lower edge surface of the frame, and the protective film is adhered to the bonding material with a predetermined bonding force. The adhesive material is used for fixing the dustproof film to the reticle or the cross wire, and the protective film is used to protect the adhesive material to maintain the bonding force of the adhesive material until it is used. The joint surface of the material. When the dust-proof film is transported from the manufacturer to the user, in order to prevent foreign matter from adhering to the dust-proof film or the like, or to prevent damage of the dust-proof film, the dust-proof film is generally housed in a case composed of a tray and a cover, and further stored in a dustproof manner. (4) (2) 1270745 The object of the present invention is a casing made of a tray and a cover that accommodates a large dust-proof film of 1.00 cm 2 or more, usually by vacuum forming. The formed and large tamper-proof film is housed in the case by being placed on the tray and covered by the cover. Further, in the production of the above-mentioned case, the space between the frame and the cover of the large dust-proof film housed in the case is designed to be manufactured to a range of 0 mm or more and 1 mm, and the cover is prevented from suppressing the large dust-proof film. In the case of a large-sized case in which a large-sized dust-proof film is slid and rubbed in the case due to the vibration of the medium, the large-sized dust-proof film is immersed in the case, but the area is a large-sized case in which a dust-proof film of 100 cm 2 or more is accommodated. In other words, in a large-sized case, there is a problem of the clearance of the dust-proof film and the case, or the case where the case cannot satisfy the requirement of flatness, and the interval between the entire circumference of the large-sized dust-proof film and the cover of the case cannot be accurately corrected. Since it is less than 1 mm of 〇mm or less, it is difficult to manufacture a large-sized shell while maintaining the molding precision for the conventional design idea. Therefore, when a large dust-proof film is housed in a large-sized case manufactured by a conventional design idea, when the gap between the large tamper-proof film and the cover is 0 mm, the cover is pressed against the large-sized dust-proof film, and the cover is pressed against the large-sized dust-proof film. Since the dust-proof film has a frame, dust is generated between the large dust-proof film during transportation, and foreign matter adheres to the large tamper-evident film. When the distance between the large dust-proof film and the cover is 1 mm or more, it is not stable by pressing the large dust-proof film by the cover. When the large-sized dust-proof film is moved, the large dust-proof film moves or vibrates inside the case, and the case and the large dust-proof film are Friction and dust occur, and foreign matter adheres to the large dust-proof membrane. -5- (3) (3) 1270745 In order to solve most of the problems described above, the applicant of the present patent has completed the invention of Patent Document 2, Patent Document 3 or Patent Document 4 which will be described later, and has filed a patent application. In the technique of Patent Document 2 described later, the protruding portion is erected on the surface of the tray of the dustproof film storage case, and a concave portion is provided on the side surface of the protruding portion, and the protective film of the dustproof film is inserted into the concave portion to be fixed. The technology of the dust-proof film placed on the tray. Further, in the technique of Patent Document 3, a viscous material having a predetermined adhesive force is applied to the underside of the protective film of the dust-proof film, and when the dust-proof film is mounted on the tray, the protective film is adhered to the _ tray. The technique of keeping the dustproof film fixed to the tray. Further, in the technique of Patent Document 4, a rod-shaped pressing body is suspended from the top surface of the cover of the case, and when the tray is placed in the tray, the dust is mounted on the tray by pressing the pressing body from above. In the protective film of the film, the tamper-proof film is fixed to the tray. 专利 [Patent Document 1] Japanese Patent Publication No. Sho 5 4 - 2 8 7 1 8 [Patent Document 2] JP-A-H11-38597 Φ [ [Patent Document 3] Japanese Patent Laid-Open Publication No. H-50238 (Patent Document 4). It is very effective for housing a dustproof film for semiconductors of 5 inches or 6 inches which is generally used in storage, but these inventions are applied to storage -6-(4) (4) 1270745 When the area of the dust-proof film of the object of the present invention is a shell for a large-sized dust-proof film of 1 000 cm 2 or more, there are several problems as will be described later. According to the technique of Patent Document 2, a vacuum forming method which is easy to manufacture and which is easy to manufacture is used, and a relatively deep concave portion is formed on the side surface of the protruding portion which is erected on the surface of the tray, which has a problem that sufficient molding accuracy cannot be obtained. In the case where the tray is formed by the injection molding method, it is possible to form the tray by the molding method. However, when the large-sized dustproof film of 1 000 cm 2 or more which is the object of the present invention is molded by the injection molding method, a very large molding is required. Therefore, since the size of the tray is large and the size of the tray is large, deformation occurs, and it is difficult to form a narrow recess in the side surface of the protruding portion with high precision. The technique of Patent Document 3 is a method of applying a bonding material to the underside of a protective film of a dust-proof film and bonding the protective film to the surface of the tray, which is effective for a shell of a small-sized semiconductor dust-proof film, but In the case of accommodating a large-sized case for a large-sized dust-proof film of the present invention, since the molding precision is not necessarily good, bending occurs at the place where the dust-proof film of the tray is mounted. Therefore, the deformation caused by the bending of the tray is rewritten to the protective film, and a part of the protective film is peeled off from the adhesive to reduce the adhesive force of the adhesive. For these reasons, the dustproof film is uniformly applied to the mask. It is difficult. The technique of Patent Document 4 is a method of holding and fixing a dust-proof film by pressing a protective film of a dust-proof film mounted on a tray by a pressing body suspended from a top surface of a cover of a case. In the case of this technology, for example, a semiconductor dust-proof film housing case can maintain the molding accuracy in the case of a small-sized case of 5 to 6 inches, but a large-sized -7- for storing a large-sized dust-proof film as the object of the present invention described above. (6) (6) 1270745 The pressing portion is superposed on the surface of the tray. Further, in the present invention, since the pressing portion is adhered to the tray by the adhesive tape, the dust-proof film can be surely held and fixed to the tray in a stable state by a very simple operation. Further, in the present invention, since the protective film of the large dust-proof film is bonded to the tray by the flexible adhesive tape, even if the forming accuracy of the tray is not good or the tray is bent, In the second aspect of the present invention, the large-sized dustproof film can be accurately and surely held in a tray. The second aspect of the present invention is a storage method of a large-sized dustproof film according to the first aspect of the present invention. The pressing portion has a forming width of 6 mm or more and a length of 20 mm or more. In the second aspect described above, the length of the pressing portion of the protective film is preferably 50 mm or more, and more preferably 300 mm or more. Further, when the area of the large-sized dustproof film is 4,000 cm2 or more, it is particularly effective if the length of the pressing portion of the protective film is 300 mm or more. In the second aspect, the size of the pressing portion of the protective film of the large-sized dust-proof film is 6 mm or more and 20 mm or more in length. Therefore, when the large dust-proof film is mounted on the tray, the pressing portion can be sufficiently It overlaps the surface of the tray, and the pressing portion can be stably and fixedly fixed to the surface of the tray by the adhesive tape. According to a third aspect of the present invention, there is provided a method of accommodating a large-sized dust-proof film according to the first or second aspect of the present invention, wherein a frame of a large dust-proof film mounted on a tray of the casing and a tray are covered by the tray There is at least 1 space between the covers. -9- (8) (8) 1270745 (Effects of the Invention) The present invention is to prevent foreign matter from adhering to a lithographic process in manufacturing a thin film transistor (TFT) or a color filter (CF) constituting a liquid crystal display (LCD). The reticle or the crosshair used in the present invention can be used for the storage method of the large dust-proof film having a dust-proof membrane area of 1 000 cm 2 or more and the storage structure thereof. In the method for accommodating the large-sized smash-proof film of the present invention and the accommodating structure, the part of the outer peripheral edge of the protective film of the tamper-proof film is protruded outward to form the pressing portion, so that the dust-proof film is mounted on the tray. There is an effect that the pressing portion that protrudes toward the outer side of the outer frame of the dustproof film can be superposed on the surface of the tray. Further, according to the present invention, since the pressing portion is adhered to the tray by the adhesive tape, the effect of reliably fixing the dustproof film tray in a stable state can be achieved by a very simple operation. Further, since the flexible pressing portion of the protective film of the dust-proof film is bonded to the tray by the flexible adhesive tape, even if the forming accuracy of the tray is insufficient or the tray is bent, There is no effect, and there is an effect that the dustproof film can be accurately and surely held in the tray. In the case where the pressure-receiving portion of the protective film of the dust-proof film is formed to have a width of 6 mm or more and a length of 20 mm or more, when the dust-proof film is mounted on the tray, the pressing portion can be sufficiently overlapped on the tray. The surface has an effect of stably holding the pressing portion to the surface of the tray by the adhesive tape. -11 - (9) (9) 1270745 In the present invention, even when at least 1 mm or more is formed between the casing of the large dust-proof membrane of the tray mounted on the casing and the cover covering the tray, When transporting a large dust-proof film, there is no need to worry about the contact of the large dust-proof film with the cover due to vibration or the like. Further, when the large-sized dust-proof film is held in a stable state by the adhesive tape as described above, it is not necessary to press the large dust-proof film by the cover. Therefore, the design of the case is easy, and even if the case is formed, The problem of accuracy or deformation can also be solved completely. [Embodiment] An embodiment of a method for accommodating a large-sized dust-proof film of the present invention and a storage structure thereof will be specifically described. 1 is a longitudinal cross-sectional explanatory view of a storage method of a large-sized dust-proof film of the present invention and a storage structure thereof, and FIG. 2 is a view showing a method of accommodating a large-sized dust-proof film of the first embodiment and an enlarged view of a main part of the storage structure. 3 is a plan view of a large-sized dust-proof film storage method used in FIG. 1 and a plan view of a protective film for a large-sized dust-proof film that accommodates the structure. FIG. 4 is also a large dust-proof type used in FIG. A plan view of a film storage method and a protective film for a large dust-proof film that accommodates the structure. In the first and second figures (a) and (b), A is a large dust-proof film, and as described in detail, a large-sized dust-proof film having a dust-proof film area of 1 〇〇〇cm 2 or more is composed of: frame 1, and The dustproof film 3 joined to the upper edge surface of the frame 1 by the bonding agent 2, the bonding material 4 applied to the lower edge surface of the frame body, and the adhesive material 4 adhered to the bonding material 4 The protective film 5 of the material 4 is formed. -12- (10) (10) 1270745 In the foregoing embodiment, the adhesive material 4' is applied to the lower edge of the frame 1, but the adhesive material 4 and the layered adhesive layer formed by layering the protective film 5 are used in advance. In the case of the joining material, the layered adhesive material may be adhered only to the lower edge area of the frame 1. However, in this specification, this case is also referred to as F smear. Next, the large-sized dust-proof film A as described above is housed in a case B composed of the tray 6 and the lid 7. The fitting surface of the lid and the tray may be sealed by a tape across the entire circumference, or the clip 8 may be attached to the corners of the tray 6 and the lid 7. On the outer side of the outer peripheral edge of the protective film 5 of the large-sized dust-proof film A, a pressing portion 5a which is fixed to the surface of the tray 6. by an adhesive tape to be described later is protruded. The size of the pressing portion 5a was invented by the inventors of the present invention, and the width W was 6 mm or more, and the length L was preferably 20 mm or more. The pressing portion 5a having such a size is easily adhered to the surface of the tray 6 in a stable state by the adhesive tape 9. Further, in the present invention, the length L is preferably 50 mm or more, and the length L is preferably 300 mm or more. Further, at least two sides of the dust-proof film frame are preferably formed to have a length of 5% or more of the length of each side, and at least the length of the pressing portion of each side is formed at least 5% of the length of each side. Preferably. However, the upper limit of the width W and the length L of the above-described pressing portion 5a is a case where the pressing portion reaches the end portion of the tray. When the storage method of the present invention and the storage structure thereof are carried out, the large dust-proof film A is mounted on the center portion of the tray 6 of the case B by using the predetermined width and length, as in the first and second figures described above. The adhesive tape 9 adheres the pressing portion 13-(11) 1270745 5 a of the protective film 5 protruding toward the outside of the casing 1 of the large dust-proof film A to the surface of the tray 6, and is in a very stable state. The dust-proof film A is simply and surely held and fixed to the central portion of the tray 6. In the accommodating method and the accommodating structure of the present invention, the flexible pressing portion 5 a which protrudes outward from the outer surface of the casing 1 of the large-sized dust-proof film A is softened by flexibility. The adhesive tape is adhered to the surface of the tray 6 of the shell B, and even if the tray 6 of the shell B has a poor precision, or the tray 6 is bent, regardless of these, the large dustproof film A can be stabilized. It is simply fixed to the carrier. However, although the adhesive tape 9 is integrally covered with the pressing portion 5a, it is only necessary to cover a part as long as the effect of adhesion and fixation can be obtained. Further, in the storage method and the storage structure of the present invention, the large dust-proof film A can be surely held in the tray 6 fixed to B in a stable state. Therefore, it is not necessary to press the large-scale anti-A by the cover 7 of the case B. The distance D between the cover 7 and the casing 1 of the large dustproof film A can be 1 mm or more. Therefore, since the large dust-proof film A and the cover 7 are sufficiently spaced, the large dust-proof film A and the cover are not rubbed by vibration during transportation, and there is no need to worry about the occurrence of dust. Further, in the case of the above-mentioned interval D, the storage property and the detergency of the dust-proof membrane casing are preferably 300 mm. When the pressing portion 5 a is provided in the protection 5 of the large-sized dust-proof film A described above, for example, Figs. 3(a) to 3(d), or as shown in Fig. 4(a) to Fig. 4, outside the protective film 5 The width of the outer edge of the rim is large, and the film 5 is the problem of the disk 6 because the film is formed by the outer film of the shell dust film ( d 6mm -14- (12) 1270745 or more, the length L is 20 mm or more of the pressing portion 5a. That is, in the case of the third drawing (a), the pressing portion is provided at the outer center of the long side of the large dustproof protective film 5, and the same figure ( In the case of b), the pressing portion 5a is provided at the center of the outer side of the hollow protective film 5. In the case of the case of (c), the long side of the hollow protective film 5 and the outer center of the short side are respectively provided with the portion 5a. In the case of the same figure (d), the pressing portion 5 a is provided on the outer side of the long side and the short side of the non-hollow film 5, and the fourth protective sheet 5 is formed in the hollow protective film 5 . The outer center and the outer side of the short side are arranged to span almost the entire length of the structure according to J, as in the case of the figure (b), respectively, in the hollow protection In the same manner as in the figure (c), the pressing portion 5a is continuously provided over the entire length of the long side and the short side of the hollow film 5 in the outer side of the long side and the center of the short side. In the case of the same figure (d), the structure of the pressing portion 5a is continuously provided over the entire length of the long side and the short side of the non-hollow protective sheet g. However, an example of the shape of the protective film is as shown in Fig. 5. The material of the protective film used in the present invention, such as a polyparaphenylene terephthalate resin, a polyethylene resin, etc., is preferable, and the protective film is preferably 30 μm to 500 μη α. The material used for the shell of the present invention, It may be a resin such as polyethylene terephthalate resin, acrylonitrile butadiene styrene resin, acrylic resin, polycarbonate or polyvinyl chloride resin, and a short-side structure of 5 a with electric contact is used. It is a protective structure of the film 5 5a on the long side g portion 5 a structure of the protective thin plate. The thickness of the formic acid B of the Mo 5 , the resin of the diol ester tree preventing type -15-(13) (13) 1270745 Also, especially, the use of less external gas is less Moreover, the base material used in the adhesive tape of the present invention is, for example, 'polyethylene, polypropylene, polyethylene terephthalate, polyvinyl chloride or non-woven fabric, etc. Also, the adhesive tape For the paste, for example, propylene or polyvinyl alcohol can be used. Further, the adhesive tape is preferably one in which the amount of external air generation is small, and the 5S plus charge prevention processor may be used. The method of accommodating the large-sized dust-proof film of the present invention and the storage structure of the present invention, as a result of the experiment, can obtain good results as shown in the following examples. [Example 1] The protective film 5 will be respectively in an outer dimension of 42 7 mm X 294 mm. The large tamper-proof film a of the pressing portion 5 a having a size of W1OmmXL100 mm is provided in the center portion of the long side and the short side, and is mounted on the tray 6 of the shell B which is vacuum-formed from the AB S resin material, by the adhesive tape 9 (belt) Dimensions: 15 mm X 120 mm) After the pressing portion 5 a is adhered and fixed to the tray 6 , the lid 7 is placed over the tray 6 . The clip 6 is attached to the tray 6 and the corner portion of the lid 7 to fix the both. At this time, the interval d between the casing 1 and the lid 7 that holds the large dust-proof membrane A in consideration of the molding accuracy is 3.6 mm or more. As a result of the long-distance transport test of the large-sized dust-proof film A in this state, no friction is recognized between the large dust-proof film a and the shell B, and the dust-proof film 3' of the large-sized dust-proof film a is also around the casing 1. It was found that no dust was found to adhere. Further, the large anti-M M A is kept fixed while maintaining the initial state of being mounted. The maximum impact 値 of the long-distance transport S-type is 1 Q c m / s 2 . -16- (14) (14) 1270745 [Embodiment 2] A large-sized dust-proof film of the pressing portion 5a having a size of 90 mm × 750 mm and a central portion of the long and short sides of the protective film 5 of W10 mmL 1 00 mm A, mounted on the tray 6 of the shell B which is vacuum-formed from the AB S resin material, and the cover portion 5 a is adhered and fixed to the tray 6 by the adhesive tape 9 (band size: i5 mm×120 mm), and the cover 7 is covered. In the tray 6, the clip 8 is attached to the tray 6 and the corner portion of the lid 7, and the both are fixed. At this time, the interval D between the casing 1 and the lid 7 which hold the large dust-proof film A in consideration of the forming precision is 3.6 mm or more. As a result of carrying out the transport test under the same conditions as in the above-described first embodiment, no friction was observed between the large dust-proof film A and the shell B, and the tamper-proof film 3 of the large tamper-proof film A was in the frame 1 It was also found that there was no adhesion of ash. Further, the large dust-proof film A is held and fixed to the tray 6 in a stable state as in the case of the first mounting. [Examples 3 to 6] The size (WXL) of the pressing portion provided at the center portion of the outer diameter and the short side of the protective film is the large dustproof film A as shown in Table 1 below, and is mounted on the ABS. On the tray 6 of the shell B of the resin material vacuum formed, the pressing portion 5 a is adhered and fixed to the tray 6 by the adhesive tape 9, and the lid 7 is covered on the tray 6, and the tray 6 and the lid are replaced. The fitting portion of 7 is sealed by the entire circumference of the tape. The interval D between the frame 1 and the lid 7 for pressing the tape size and the large dust-proof film A is as shown in Table 1 below. With respect to the dust-proof membrane casing -17-(15) 1270745, the transportation test was carried out under the same conditions as in the above-described first embodiment, and no friction occurred between the large dust-proof membrane A and the shell B. The dust-proof film A is held and fixed to the tray 6 in a stable state as in the case of the first mounting.
[表U 實施例 防塵膜尺寸 按壓部尺寸 間隔D 按壓帶尺寸 (WXL) 3 427X294 10X70 15 15X90 4 782X474 10X70 15 15X90 5 905X750 10X500 30 15X600 6 1136X783 10X500 30 15X600 [比較例1] 將外形尺寸爲427mmX294mm的大型防塵膜A ’在由 ABS樹脂材真空成形所成形的托盤6上’直接（不使用黏 接帶9)搭載，將蓋7蓋住托盤6並由夾子8固定’將蓋 7及大型防塵膜A的框體1的間隔D保特於設計尺寸 0.5 mm的狀態下，由與前述實施例1同一的條件進行運送 測試的結果，在大型防塵膜A及蓋7之間被認定有摩擦痕 跡，且在大型防塵膜A的防塵膜3的一部分被認定附著有 細灰麈。 [比較例2] 將外形寸尺寸爲42 7mmX294mm的大型防塵0旲A ’與 -18- (16) (16)1270745 比較例1同樣，直接搭載於托盤6上，考慮成形精度而保 持大型防麈膜A的框體1及蓋7的間隔D爲3 · 6mm以上 的狀態下’由與實施例1同一的條件進行運送測試的結果 ’在大型防塵膜A及蓋7之間被認定有摩擦痕跡，且在大 型防塵膜A的防塵膜3的一部分被認定附著有細灰塵。 (產業上的利用可能性） 使用本發明的大型防塵膜的收納方法及其收納構造體 的話’無關於殻的成形精度的高低或變形的有無，皆可將 大型防麈膜，在穩定的狀態下被收納於殼，不會損揚大型 防塵膜並可安全地運送。 【圖式簡單說明】 [第1圖]本發明的大型防塵膜的收納方法及其收納構 造體的縱剖面說明圖。 [第2圖]第1圖的大型防麈膜的收納方法及其收納構 造體的要部的擴大說明圖。 [第3圖]第1圖的大型防塵膜的收納方法及使用於其 收納構造體的大型防塵膜用保護薄膜的平面圖。 [第4圖]第1圖的大型防塵膜的收納方法及使用於其 收納構造體的大型防塵膜用保護薄膜的平面圖。 [第5圖]顯示保護薄膜的形狀的例的圖。 【主要元件符號說明】 -19- (17) 1270745 1 框體 2 接合齊!1 3 防塵膜 4 黏接材 5 保護薄膜 5 a 按壓部 6 托盤 7 蓋 8 夾子 9 黏接帶 -20-[Table U Example Dust film size Pressing portion size interval D Pressing tape size (WXL) 3 427X294 10X70 15 15X90 4 782X474 10X70 15 15X90 5 905X750 10X500 30 15X600 6 1136X783 10X500 30 15X600 [Comparative example 1] The external dimensions are 427 mm X 294 mm The large dust-proof film A' is mounted directly on the tray 6 formed by vacuum forming of the ABS resin material (without the adhesive tape 9), and the cover 7 is covered by the tray 6 and fixed by the clip 8 'the cover 7 and the large dust-proof film In the state where the interval D of the frame 1 of the A is fixed to a design size of 0.5 mm, the conveyance test is carried out under the same conditions as in the above-described first embodiment, and a frictional trace is recognized between the large dust-proof film A and the cover 7. Further, a part of the dust-proof film 3 of the large dust-proof film A was confirmed to have fine ash adhered thereto. [Comparative Example 2] A large-sized dustproof 0旲A' having a size of 42 7 mm X 294 mm was mounted on the tray 6 in the same manner as in Comparative Example 1 of -18-(16) (16) 1270745, and the large-scale tamper was kept in consideration of the forming accuracy. In the state where the interval D between the frame 1 and the lid 7 of the film A is 3.6 mm or more, the result of the conveyance test by the same conditions as in the first embodiment is found to have a rubbing trace between the large dustproof film A and the cover 7. Further, a part of the dust-proof film 3 of the large dust-proof film A was found to have fine dust adhered thereto. (Industrial Applicability) When the storage method of the large-sized dust-proof film of the present invention and the storage structure thereof are used, the large-scale tamper-proof film can be stabilized regardless of the high or low molding accuracy of the shell or the presence or absence of deformation. It is housed in the case and does not damage the large dust-proof film and can be transported safely. [Brief Description of the Drawings] [Fig. 1] A longitudinal cross-sectional explanatory view of a method of housing a large-sized dust-proof film of the present invention and a storage structure thereof. [Fig. 2] A method of accommodating a large tamper-evident film of Fig. 1 and an enlarged view of a main part of the accommodating structure. [Fig. 3] A plan view of a large-sized dust-proof film storage method of the first embodiment and a protective film for a large-sized dust-proof film used for the storage structure. [Fig. 4] A plan view of a large-sized dust-proof film storage method of the first embodiment and a protective film for a large-sized dust-proof film used for the storage structure. [Fig. 5] A view showing an example of the shape of a protective film. [Description of main components] -19- (17) 1270745 1 Frame 2 Bonded together! 1 3 Dust film 4 Adhesive material 5 Protective film 5 a Pressing part 6 Tray 7 Cover 8 Clip 9 Adhesive tape -20-