JP2008216846A - Pellicle storage container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pellicle storage container in which a structural body is fixed with a fixing tool to the backside of a pellicle mount face to reinforce the rigidity of the pellicle storage container and flatness is directly imparted to the pellicle mount face to prevent deformation of the adhesive material for a mask, as well as to facilitate recycling of the structural body, and further, possibility of production of dust is suppressed as much as possible even when a through hole for attaching the fixing tool is present. <P>SOLUTION: The pellicle storage container 1 for storing a pellicle 2 comprises at least a lid 4 and a pellicle mount base 3 for mounting the pellicle 2 and is characterized in that: a structural body 7 is placed on the opposite face of the pellicle mount base 3 to the pellicle mount face 3a; and the structural body 7 is fixed to the pellicle mount base 3 with a fixing tool 8 inserted through a washer 9 into the through hole 3b provided in the pellicle mount base 3. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention is to prevent foreign matter from adhering to a photomask or a reticle used in a lithography process when manufacturing a semiconductor device such as an LSI (Large Scale Integrated Circuit) or a TFT type LCD (Thin Film Transistor Liquid Crystal Display). The present invention relates to a pellicle storage container for storing, storing and transporting a pellicle used, and more particularly to a pellicle storage container suitable for a large pellicle for liquid crystal.

  2. Description of the Related Art Conventionally, in the manufacture of semiconductor circuit patterns and the like, foreign matter is prevented from adhering to a photomask or a reticle by using a dustproof means generally called a pellicle. The pellicle has a shape that matches the shape of the photomask or reticle, and a transparent polymer film (such as nitrocellulose, cellulose derivative, or fluorine-based polymer having a thickness of 10 μm or less on the upper edge surface of a pellicle frame having a thickness of about several millimeters. (Hereinafter referred to as “pellicle film”) and a mask adhesive material is applied to the lower edge surface of the pellicle frame, and a release paper or the like is applied to the mask adhesive material with a predetermined adhesive force. A protective film is adhered.

  The mask adhesive is for fixing the pellicle to a photomask or reticle, and the protective film is used for maintaining the adhesive force of the mask adhesive until the mask adhesive is used for the mask. In addition, the adhesive surface of the mask pressure-sensitive adhesive material is protected.

  In transporting this pellicle from the manufacturer to the user, in order to prevent foreign matter from adhering to the pellicle film or the like, or to prevent the pellicle from being damaged, the pellicle storage container comprising a pellicle mounting table and a lid In general, it is stored in a dust-proof bag or the like and transported.

The pellicle storage container is generally manufactured by injection molding or vacuum molding using a resin material. However, 5 inch (12.7 mm) and 6 inch (15.24 mm) pellicle storage containers for semiconductors are often formed by injection molding, but large pellicle storage containers with an area of 1000 cm ² or more are thin-walled. In many cases, vacuum molding is performed because a large integral molded product can be easily formed.

  It is assumed that the shape of the pellicle storage container does not change, and a sealing property for preventing dust from adhering to the pellicle and a holding property capable of reliably holding the pellicle film in a non-contact state are required.

  When the pellicle mounting table or the lid is warped or twisted, the deformation is transferred to the mask adhesive. When the pellicle mounting table is warped, a part of the mask adhesive material is locally weighted, and the mask adhesive material may be deformed. Further, when the lid is warped or twisted, the pellicle is pressed against the pellicle mounting table, and the warp of the pellicle mounting table may be transferred to the mask adhesive.

  In addition, when the lid comes into contact with the pellicle film due to warpage or deflection, the pellicle film may be damaged and the pellicle function may not be performed.

  Normally, the pellicle is attached to a mask or reticle pattern, and the pellicle is disposed on the lower surface side of the mask or reticle when the mask or reticle is protected or exposed. For this reason, the large pellicle has a large weight, so even a small sticking failure that does not cause a problem with a small pellicle will spread over time, creating a gap that connects the inside and outside of the pellicle, called an air path, and foreign matter enters the pellicle from that location Intrusion may cause the pellicle to fail.

Deformation is unlikely to be a problem with a small pellicle storage container, but in the case of a large pellicle storage container with a size of 1000 cm ² or more, it is stored by bending, twisting or stacking when carrying with both ends. In some cases, deformation due to its own weight or warpage due to temperature may occur.

  In particular, a large pellicle storage container has a larger area than a 5-inch or 6-inch semiconductor pellicle storage container, and thus warps and twists of the pellicle storage container increase. Therefore, the deformation of the pellicle storage container is easily transferred to the mask adhesive material, and the frequency of occurrence of defective sticking increases.

  Therefore, as described in JP-A-2005-49765 (Patent Document 1), the present applicant attaches a reinforcing plate to the pellicle mounting table to prevent deformation of the pellicle storage container. A technique for preventing the deformation is proposed.

  A container with improved flatness is described in Japanese Patent Application Laid-Open No. 08-062828 (Patent Document 2).

Japanese Patent Laying-Open No. 2005-49765 (FIG. 6) Japanese Patent Application Laid-Open No. 08-0662828

  However, the technique disclosed in Patent Document 1 uses a reinforcing plate having a thickness of about 5 mm or less, which is effective in improving large warpage and twisting of the pellicle storage container during handling, but is not suitable for mounting a pellicle frame. There is no guarantee that the flatness of the mounting surface will be sufficiently secured, and from the viewpoint of preventing deformation of the mask adhesive, the flatness of the pellicle storage container obtained by the reinforcing effect is not sufficient, and the pellicle frame is mounted. When the mounting surface is bent or uneven, the deformation is transferred to the mask adhesive, resulting in insufficient adhesion to the photomask or reticle, or a gap between the inside and outside of the pellicle, called an air path. If foreign matter enters the pellicle from that location, the function of the pellicle may not be achieved.

  In addition, since the reinforcing plate of Patent Document 1 is filled with a resin material and bonded, it is difficult to separate the reinforcing plate from the pellicle storage container for recycling.

  Moreover, in the technique of patent document 2, it is a container which improved the flatness by what was shape | molded or installed the glass plate in a container, and originally said that a flatness is directly provided to a container with a bending and an unevenness | corrugation. It is not a thing. Further, since there is no reinforcing material, bending and twisting when carrying the container with both ends cannot be eliminated.

  The present invention solves the above-described problems, and an object of the present invention is to reinforce the rigidity of the pellicle storage container by fixing the structure to the back side of the pellicle mounting surface with a fixture, and to mount the pellicle mounting surface. It is intended to provide a pellicle storage container that directly imparts flatness to the mask, prevents deformation of the mask adhesive, and allows the structure to be recycled. In addition, a penetration for mounting the fixture is provided. It is to minimize the possibility of dust generation even if there is a hole.

  To achieve the above object, a first configuration of a pellicle storage container according to the present invention is a pellicle storage container including at least a lid for storing a pellicle and a pellicle mounting table on which the pellicle is mounted. A structure is disposed on the surface of the pellicle mounting table opposite to the pellicle mounting surface, and the structure is inserted into a through hole provided in the pellicle mounting table through a washer. A pellicle storage container characterized by being fixed to the pellicle mounting table.

  The second configuration of the pellicle storage container according to the present invention is characterized in that, in the first configuration, the washer is made of resin.

  Furthermore, the third configuration of the pellicle storage container according to the present invention is such that the washer in the second configuration is disposed at least between the fixture and the pellicle mounting table, and covers a side surface of the fixture. It is characterized by.

  According to the pellicle storage container of the present invention, the structure body is arranged such that at least the mounting surface of the pellicle is opposed to the surface of the pellicle mounting table opposite to the mounting surface of the pellicle via the pellicle mounting table. And the structure is fixed to the pellicle mounting table by a mounting table via a washer using a fixture inserted in a through hole provided in the pellicle mounting table. The mounting table and the structural body are integrated by ensuring the holding and fixing of the pellicle on the mounting table, so that the pellicle storage container is prevented from being bent and twisted while being carried by holding both ends of the pellicle storage container. It was possible to impart flatness directly to the surface, thereby preventing deformation of the mask adhesive.

  Further, by using a washer made of resin, the gap between the fixture and the through hole can be minimized, and dust entering through the through hole can be suppressed.

  Of course, the structure can be easily separated from the pellicle storage container by releasing the fixing of the fixing tool, and can be recycled.

  An embodiment of a pellicle storage container according to the present invention will be specifically described with reference to the drawings. FIG. 1 is a perspective explanatory view showing a configuration of a pellicle storage container according to the present invention, FIG. 2 is a cross-sectional explanatory view showing a state in which pellicle storage containers according to the present invention are stacked, and FIG. 3 is a view for explaining a fixing structure of a fixture. FIG. 4 is a diagram for explaining the case of bending and unevenness in the gap between the pellicle mounting surface of the pellicle mounting table and the pellicle frame, and FIG. 5 is a perspective view showing the configuration of the holder for gripping the pellicle. 6 is a cross-sectional explanatory view showing a state in which the height position of the holder for gripping the pellicle is regulated by the top surface of the fixture, and FIG. 7 shows a situation in which the position in the film surface direction of the pellicle is regulated by the side surface of the fixture. FIG. 8 is a cross-sectional explanatory view showing the structure of another pellicle storage container formed with a flat structure as a whole, FIG. 9 is a perspective explanatory view showing the structure of various structures, FIG. 10 and FIG. Is the structure of various other structures FIG. 12 is a diagram showing the configuration of various washers.

  As a material of the structure 7 shown in FIGS. 9 to 11, a material having rigidity for maintaining the shape of the structure 7 such as metal, engineering plastic, reinforced plastic, ceramics, or the like can be used.

  When the structure 7 is attached to the pellicle mounting table 3, the structure 7 is in contact with the pellicle mounting surface 3 a of the pellicle mounting table 3 and is flush with the lowest surface of the pellicle mounting table 3. The shape is not particularly limited as long as the shape protrudes from the lowest surface. For example, a frame having a rectangular cross section as shown in FIGS. 9A and 10A to 10C is simple. However, in order to reduce the weight of the structure 7, the mounting of the pellicle referred to in the present invention is used. A plurality of (many) holes may be formed within a range in which the flatness of the mounting surface 3a is maintained, or it may be configured in an L-shaped cross section as shown in FIGS. 9B, 11B, and 11C. .

  Further, the structure 7 may be solid as shown in FIGS. 10A to 10C, or may be hollow as shown in FIG. Further, as shown in FIGS. 10A, 11A, and 11B, the upper surface of the structure 7 is formed over substantially the entire width direction of the back surface of the pellicle mounting surface 3a. Alternatively, as shown in FIGS. 10 (b), 10 (c) and 11 (c), it may be formed on a part of the back surface of the pellicle mounting surface 3a in the width direction. Further, as shown in FIG. 10C, the pellicle 2 may be mounted at a position deviated from the structure 7 fixed on the back surface side of the pellicle mounting surface 3a.

  The shape of the surface of the structure 7 that contacts the pellicle mounting table 3 is not particularly limited as long as the flatness of the pellicle mounting surface 3a in the present invention can be ensured. For example, although a flat surface is ideal, it may be a curved surface that contacts only the back surface side of the pellicle mounting surface 3a of the pellicle mounting table 3, or an uneven shape that contacts the back surface side of the pellicle mounting surface 3a at a plurality of points. But it ’s okay.

  The structure 7 can be manufactured by molding or cutting the material. The dimensions of the structure 7 according to the present invention are determined by the size of the pellicle mounting table 3 and the pellicle frame 2a mounted thereon.

  As a material of the fixture 8, a material having strength and rigidity necessary for fixing, such as metal, engineering plastic, reinforced plastic, ceramics, or the like, can be used.

  The shape of the fixture 8 is not particularly limited as long as it can be inserted into the through hole 3 b provided in the pellicle mounting table 3. For example, the bar shape is simple and pins and screws can be used.

  If the fixture 8 is a screw, it is desirable that the structure 7 can be firmly fastened to the pellicle mounting table 3 and the fastening can be easily released.

  The manufacturing method of the fixture 8 is not particularly limited, and can be manufactured by cutting or molding using a known technique.

  The dimension of the fixing tool 8 in the present invention is not particularly limited as long as it can be inserted into the through-hole 3b provided in the pellicle mounting table 3 and the structure 7 can be fixed to the pellicle mounting table 3.

  On the other hand, the material of the washer 9 is not limited as long as the through hole 3b can be sealed when the structure 7 is held and fixed to the pellicle mounting table 3 by using the fixture 8, but the material made of resin is better. Specific examples include nylon 6, nylon 66, polyethylene, fluorine-based polymer, etc. Among them, nylon 6 with high sealing properties is preferable.

  The washer 9 is only required to be disposed at least between the fixture 8 and the pellicle mounting table 3 and cover the side surface of the fixture 8. As shown in 3 (b), it is preferable that the fixture 8 does not protrude from the surface of the washer 9 when the structure 7 is held and fixed to the pellicle mounting table 3 by the fixture 8.

  This makes it possible to use the washer 9 as a guide for the metal frame holder 14 used when handling the pellicle frame 2a, as shown in FIGS.

  Since the periphery of the fixture 8 is covered with the resin washer 9, it is possible to prevent the pellicle 2 and the fixture 8 from coming into direct contact with each other, thereby preventing dust generation and damage due to rubbing.

  Furthermore, the washer 9 has an effect that the cross section of the washer 9 is deformed when the structure 7 is held and fixed to the pellicle mounting table 3 by the fixing tool 8 and the through hole 3b is sealed. In order to make the flatness imparted to the pellicle mounting table 3 of the structure 7 uniform, it is desirable that the mounting pressure (tightening torque) of the fixture 8 is constant. For this purpose, it is preferable to control the deformation amount of the washer 9. Specifically, the surface where the washer 9 is in contact with the pellicle mounting table 3 has a concave cross-sectional shape from the inner periphery to the outer periphery, and only the concave portion is the mounting pressure (tightening torque) of the fixture 8. The entire portion from the outer periphery to the inner periphery of the donut-shaped washer 9 is in contact with the pellicle mounting table 3. By controlling the deformation of the washer 9, eccentricity of the washer 9 due to excessive deformation can be prevented.

  The shape of the washer 9 viewed from the direction in which the fixture 8 is inserted may be any shape as long as it has a side wall 9a along the periphery of the head 8a of the fixture 8 so as to cover the side surface of the head 8a of the fixture 8. .

  For example, when the head 8a as viewed from the insertion direction of the fixture 8 is a screw having a circular shape, the washer 9 is also a screw as seen from the insertion direction of the fixture 8 as shown in FIG. The side wall 9a having a width so as to cover the side surface of the head 8a may be in a shape that is connected in a circular shape.

  1 and 2, reference numeral 1 denotes a pellicle storage container for storing a pellicle 2 in which a pellicle film 2c is attached to a pellicle frame 2a. At least a lid 4 and a pellicle mounting table 3 on which the pellicle 2 is mounted are provided. It is configured.

  The material of the pellicle mounting table 3 is not particularly limited, but acrylic resin, nylon resin, polycarbonate resin, polyethylene terephthalate resin, acrylonitrile / butadiene / styrene resin, and the like can be used. In addition to the above resins, polyester resins other than polyethylene terephthalate, olefin resins such as polyethylene and polypropylene, polystyrene resins such as polystyrene, acrylonitrile / styrene resins, and the like can also be used. You may give antistaticity to said resin. Resin reinforced plastics can also be used.

  In the pellicle mounting table 3, the mounting surface 3 a on which the pellicle 2 is mounted is configured by a top piece of a raised portion 6 having a U-shaped cross section formed along the periphery of the pellicle mounting table 3.

Since the pellicle mounting table 3 is bent in the vicinity of the outer periphery, the pellicle mounting table 3 has a certain degree of rigidity in the peripheral part, but the flat part has low strength, and if the area is 1000 cm ² or more, the rigidity of the pellicle storage container 1 as a whole is obtained. Is not sufficient, and warpage and deflection are likely to occur. Therefore, in the present invention, more preferably, the structural body 7 is attached to the outer surface of the pellicle mounting table 3 and inside the raised portion 6 on the surface opposite to the pellicle mounting surface 3a. Thereby, the rigidity of the entire pellicle storage container 1 can be dramatically improved.

  As shown in FIG. 8, the pellicle mounting table 3 as a whole may have a flat structure. However, as shown in FIG. 2, only the mounting surface 3a of the pellicle 2 is flat, and the rest of the mounting surface 3a ( If the pellicle film 2c surface vibrates during transportation or the like, contact between the pellicle film 2c and the inside of the pellicle mounting table 3 can be prevented.

  Further, reinforcing the back surface of the pellicle mounting table 3 to provide flatness is effective for deflection due to its own weight, but is not effective for pushing up from below. Therefore, the part set lower than the mounting surface 3 a of the pellicle 2 is set so as not to protrude downward from the bottom surface 7 b of the structure 7.

  More preferably, the portion set lower than the mounting surface 3 a of the pellicle 2 is set so as to be flush with the bottom surface 7 b of the structure 7. In this way, a portion set lower than the mounting surface 3a of the pellicle 2 can be lightly contacted when placed on a mounting surface such as a table, thereby preventing deflection due to its own weight.

  The mounting surface 3 a of the pellicle 2 provided on the pellicle mounting table 3 is formed flat on the same plane over the entire pellicle storage container 1. If the mounting surface 3a on which the pellicle 2 is mounted is provided with an uneven shape by vacuum molding, injection molding or the like, local unevenness remains around the uneven shape, so that the flatness of the mounting surface 3a is deteriorated.

  Thus, the mounting surface 3a for mounting the pellicle 2 is formed flat on the same plane over the entire container of the pellicle storage container 1, so that the mounting surface for mounting the pellicle 2 over the entire container is provided. 3a can be directly imparted with flatness, thereby preventing deformation of the mask adhesive 2b provided on the lower surface of the pellicle frame 2a.

  The pellicle mounting table 3 is manufactured by vacuum molding or injection molding using a plate made of the above-described material.

  The size of the pellicle mounting table 3 in the present invention is determined by the size of the pellicle frame 2 a mounted on the pellicle mounting table 3.

  The material of the lid 4 of the pellicle storage container 1 is not particularly limited, and acrylic resin, nylon resin, polycarbonate resin, polyethylene terephthalate resin, acrylonitrile / butadiene / styrene resin, and the like can be used. In addition to the above resins, polyester resins other than polyethylene terephthalate, olefin resins such as polyethylene and polypropylene, polystyrene resins such as polystyrene, acrylonitrile / styrene resins, and the like can also be used. You may give antistaticity to said resin. Resin reinforced plastics can also be used.

  When the pellicle storage container 1 is stacked on the lid 4 of the pellicle storage container 1, it is necessary to prevent the pellicle mounting table 3 from being deformed by being pushed up from the lower cover 4.

  Therefore, the shape of the lid 4 of the pellicle storage container 1 is such that when the pellicle storage container 1 is stacked thereon, only the structure 7 of the stacked pellicle storage containers 1 contacts the lid 4. There must be. If it is the shape which satisfy | fills the said requirements, it will not specifically limit. For example, the lid 4 may be in contact with the entire bottom surface 7b of the structure 7 (the contact surface between the pellicle mounting table 3 and the structure 7), or the lid 4 contacts only the four corners of the bottom surface 7b of the structure 7. It may be in shape.

  The lid 4 of the pellicle storage container 1 is manufactured by vacuum molding or injection molding using a plate made of the above-described material.

  The dimensions of the lid 4 of the pellicle storage container 1 in the present invention are determined by the size of the pellicle mounting table 3.

  The pellicle 2 includes a pellicle film 2c, a pellicle frame 2a to which the pellicle film 2c is attached, a mask adhesive 2b for attaching the pellicle frame 2a to a mask or a reticle, and the like. On the surface of the mask adhesive material 2b, a release material 2d made of a protective film or the like such as release paper is stuck and placed on the pellicle placement table 3.

  As a method for fixing the pellicle 2 to the pellicle mounting table 3, the protruding part of the release material 2 d is attached to the pellicle mounting table 3 with an adhesive tape, or is provided on the pellicle mounting table 3 in a locking groove formed on the pellicle frame 2 a. Any known method may be used, such as locking the locking member or holding and fixing the pellicle frame 2a between the pellicle mounting table 3 and the lid 4.

Here, the pellicle storage container 1 of the present embodiment is particularly suitable for the large pellicle 2 in which the area of the pellicle film 2c exceeds 1000 cm ² .

  As shown in FIG. 1, the pellicle 2 is stored by covering the pellicle mounting table 3 with a lid 4 in a state where the pellicle 2 is mounted on the mounting surface 3 a of the pellicle 2 of the pellicle mounting table 3. After the pellicle mounting table 3 and the lid 4 are combined, any known method may be used, such as sealing by inserting clips or the like at the four corners, or sealing the adhesive tape around the peripheral edge.

  A structure 7 is disposed on the surface of the pellicle mounting table 3 opposite to the mounting surface 3a of the pellicle 2 so that at least the mounting surface 3a of the pellicle 2 faces through the pellicle mounting table 3, The structure 7 is fixed to the pellicle mounting table 3 by screws and washers 9 as fixing tools 8 inserted through through holes 3 b provided in the pellicle mounting table 3.

  Preferably, a structure 7 having a rectangular cross section is fitted inside the raised portion 6 on the outer surface of the pellicle mounting table 3, and a screw as a fixing tool 8 is inserted into the through hole 3 b provided in the mounting surface 3 a of the pellicle 2. Is inserted through a washer 9 and screwed into a screw hole 7a formed in the structure 7.

  In order to effectively reinforce the pellicle storage container 1, it is more effective that the screw as the fixture 8 is attached in a direction perpendicular to the mounting surface 3a of the pellicle 2 serving as a reinforcing surface. is there. Further, as an auxiliary of screwing, an adhesive or a pressure sensitive adhesive may be used in combination between the structure 7 and the back surface of the mounting surface 3a.

  In this manner, the screw serving as the fixing tool 8 is inserted through the through hole 3b provided in the mounting surface 3a of the pellicle 2 of the pellicle mounting table 3 through the washer 9, and the screw hole 7a provided in the structure 7 is inserted. By being fastened, the structure 7 can reinforce the rigidity of the pellicle storage container 1 and can directly impart flatness to the placement surface 3a on which the pellicle 2 is placed. The deformation of 2b can be prevented. Further, it is possible to prevent dust from entering from the through hole 3b.

  In addition, by releasing the fastening of the screw serving as the fixture 8, the structure 7 can be easily separated from the pellicle mounting table 3 of the pellicle storage container 1 and can be recycled.

  However, in order to facilitate recycling, it is preferable to fix only by screwing. When an adhesive or a pressure-sensitive adhesive is used, it is difficult to separate the pellicle storage container 1 and the structure 7, and when the separation is performed, a large force is applied and the structure 7 is deformed. There is a possibility that the effect of improving the flatness is weakened.

  In this way, the bottom surface 7b of the structure 7 is flush with the peripheral surface 3d that becomes the lowest surface (the bottom surface at the lowest position) of the pellicle mounting table 3 of the pellicle storage container 1, or the pellicle mounting of the pellicle storage container 1 By being configured so as to protrude downward from the peripheral surface 3d which is the lowest surface of the mounting table 3, the bottom surface 7b of the structure 7 is surely placed on the mounting surface in a state where the pellicle storage container 1 is mounted on the table or the like. The pellicle mounting table 3 of the pellicle storage container 1 is in contact with the inner surface 3c of the pellicle storage table 1 and is pushed upward to prevent the pellicle mounting surface 3a from being bent and to ensure flatness.

  Further, as shown in FIG. 2, as a stacking method for stacking a plurality of pellicle storage containers 1, the bottom surface 7b of the structure 7 of the pellicle storage container 1 stacked on top is in contact with the lid 4 of the lower pellicle storage container 1. When the bottom surface 7b of the structure 7 of the upper pellicle storage container 1 is placed and supported on the lid 4 of the lower pellicle storage container 1 by stacking, the pellicle storage containers 1 are stacked in multiple stages. Even when the upper pellicle storage container 1 is placed on the lid 4 of the lower pellicle storage container 1, the bottom surface 7 b of the structure 7 of the upper pellicle storage container 1 always comes into contact with the surface of the lid 4. In addition, the inner surface 3c of the pellicle mounting table 3 of the pellicle storage container 1 is pushed upward (upward in FIG. 2) to prevent the pellicle mounting surface 3a from being bent and to ensure flatness. Can.

  As shown in FIGS. 1 and 2, at least four corners of the upper surface of the lid 4 are formed in a protruding shape, and are configured to contact only the bottom surface 7 b of the structure 7 of the upper pellicle storage container 1. Has been.

  In order not to deform the mask adhesive 2b provided on the lower surface of the pellicle frame 2a, when the pellicle 2 is placed on the placement surface 3a, as shown in FIG. 4A, the placement surface 3a of the pellicle 2 is placed. If the deflection shape or the uneven shape of the pellicle contact portion of the pellicle is the same as that of the pellicle frame 2a when the pellicle 2 is placed on the placement surface 3a, the placement surface 3a and the pellicle frame 2a Therefore, the mask adhesive material 2b existing between them can be prevented from being deformed in the height direction.

  Therefore, the flatness of the mounting surface 3a on which the pellicle 2 is mounted in the present invention means that only the pellicle frame 2a without the mask adhesive material 2b is directly mounted on the mounting surface 3a of the pellicle mounting table 3. In this state, the gap between the pellicle frame 2a and the mounting surface 3a is 300 μm or less, preferably 100 μm or less, and more preferably 50 μm or less.

  That is, as shown in FIG. 4B, the bending shape of the pellicle contact portion of the mounting surface 3a of the pellicle 2 and the bending of the pellicle frame 2a in a state where the pellicle frame 2a is directly mounted on the mounting surface 3a. As shown in FIG. 4C, the concavo-convex shape of the pellicle contact portion of the mounting surface 3a of the pellicle 2 and the pellicle frame 2a on the mounting surface 3a are maintained. The gap W with the concave-convex shape of the pellicle frame 2a in a state where the pellicle is directly placed is kept at 300 μm or less at the maximum position. As a result, the mask adhesive material existing between the pellicle frame 2a and the placement surface 3a The deformation in the height direction of 2b can be prevented.

  The pellicle frame 2a is mounted at a place where the flatness of the mounting surface 3a referred to in the present invention is maintained, and the screw serving as the fixture 8 is mounted on the pellicle so that the mounting surface 3a referred to in the present invention is flat. The number of screwing and the screwing interval are appropriately set according to the material, size, shape, and structure of the table 3 and the structure 7.

  The fixture 8 includes a plurality of screws with a head 8a protruding above the mounting surface 3a of the pellicle 2 of the pellicle mounting table 3. In such a configuration, by appropriately setting the position of the screw serving as the fixture 8 and the height of the head 8a, it can also serve as the following position restricting means.

  For example, as a method of moving the pellicle 2 from the pellicle storage container 1, a top surface corresponding to the height of the side wall 9a of the washer 9 disposed at a position higher than the top surface of the screw head 8a serving as the fixture 8 is provided. Utilizing this, the height position of the frame holder 14 for gripping the pellicle 2 can be regulated as shown in FIGS.

  That is, as shown in FIG. 6, the top surface corresponding to the height of the side wall 9a of the washer 9 disposed at a position higher than the top surface of the head 8a of the screw serving as the fixture 8 fastened to the structure 7. Is set to a position that regulates the height position of the frame holder 14 for gripping the pellicle 2, and the top surface corresponding to the height of the side wall 9 a of the washer 9 holds the frame holder for gripping the pellicle 2. By restricting the height position of 14, when removing the pellicle 2 from the pellicle storage container 1, the frame holder 14 can be easily inserted into the guide insertion groove 2 a 1 provided on the side of the pellicle frame 2 a of the pellicle 2. It becomes easy. Thus, by adjusting the height of the head 8a of the screw 8 and the height of the side wall 9a of the washer 9, it can be used as a guide for the frame holder 14 for gripping the pellicle 2.

  Further, as a method of storing the pellicle 2 in the pellicle storage container 1, the position of the pellicle frame 2a in the surface direction can be regulated by the side wall 9a of the washer 9.

  That is, the washer 9 fastened to the structure 7 together with the screw serving as the fixture 8 is formed in a circular shape, and the position of the side surface of the washer 9 regulates the position of the pellicle frame 2a in the surface direction (left-right direction in FIG. 7). It is set to the position to perform. As a result, the side surface of the washer 9 abuts against the side surface of the pellicle frame 2a to regulate the position in the surface direction of the pellicle frame 2a, whereby the pellicle 2 can be stably stored in the pellicle storage container 1.

  As described above, the washer 9 fixed by the screw serving as the fixing tool 8 can also be used as a stopper for preventing the displacement of the pellicle 2.

  12 (a) to 12 (i) are cross-sectional views showing the structures of various washers 9, and a groove portion 9b that accommodates the head portion 8a of the fixture 8 and a shaft portion of the fixture 8 that is communicated with the groove portion 9b are inserted therethrough. A through hole 9c is provided.

  When the pellicle storage container of the present invention is used, foreign matter adheres to a photomask or a reticle used in a lithography process when manufacturing a semiconductor device such as an LSI (Large Scale Integrated Circuit) or a TFT type LCD (Thin Film Transistor Liquid Crystal Display). This can be applied to a pellicle storage container for storing, storing, and transporting a pellicle used to prevent this, and is particularly suitable for a storage container for a large pellicle for liquid crystal.

It is a perspective explanatory view showing the configuration of the pellicle storage container according to the present invention. It is a section explanatory view showing signs that pellicle storage containers concerning the present invention were laminated. It is a figure explaining the various fixing structure of a fixing tool. It is a figure explaining the case of a deflection | deviation and the case of an unevenness | corrugation about the clearance gap between the mounting surface of the pellicle of a pellicle mounting base, and a pellicle frame. It is a perspective view which shows the structure of the holder for holding a pellicle. It is sectional explanatory drawing which shows a mode that the height position of the holder for holding a pellicle with the top | upper surface of a fixing tool is controlled. It is a cross-sectional explanatory view showing a state where the position of the pellicle in the film surface direction is regulated by the side surface of the fixture. It is a cross-sectional explanatory view showing the configuration of another pellicle storage container in which the entire container is formed in a flat structure. It is a perspective explanatory view showing the composition of various structures. It is a figure which shows the structure of other various structures. It is a figure which shows the structure of other various structures. It is sectional explanatory drawing of various washers.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Pellicle storage container 2 ... Pellicle 2a ... Pellicle frame
2a1 ... guide insertion groove 2b ... mask adhesive material 2c ... pellicle film 2d ... release material 3 ... pellicle mounting table 3a ... pellicle mounting surface 3b ... through hole 3c ... inside surface 3d ... peripheral surface 4 ... lid 6 ... raised portion DESCRIPTION OF SYMBOLS 7 ... Structure 7a ... Screw hole 7b ... Bottom 8 ... Fixing tool 8a ... Head 9 ... Washer 9a ... Side wall 9b ... Groove 9c ... Through-hole
14… Frame holder

Claims (3)

In a pellicle storage container composed of at least a lid for storing a pellicle and a pellicle mounting table on which the pellicle is mounted, a structure is disposed on a surface opposite to the pellicle mounting surface of the pellicle mounting table The pellicle storage container is characterized in that the structure is fixed to the pellicle mounting table by a fixture inserted in a through hole provided in the pellicle mounting table via a washer. The pellicle storage container according to claim 1, wherein the washer is made of a resin. The pellicle storage container according to claim 2, wherein the washer is disposed at least between the fixing tool and the pellicle mounting table and covers a side surface of the fixing tool.

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