JP4963041B2 - Pellicle storage container - Google Patents

Description

  The present invention is to prevent foreign matter from adhering to a photomask or a reticle used in a lithography process when manufacturing a semiconductor device such as an LSI (Large Scale Integrated Circuit) or a TFT type LCD (Thin Film Transistor Liquid Crystal Display). The present invention relates to a pellicle storage container for storing, transporting, and transporting a pellicle to be used, particularly a pellicle storage container suitable for a large liquid crystal pellicle, a method of moving a pellicle from the pellicle storage container, and storing the pellicle in the pellicle storage container The present invention relates to a method and a method for stacking pellicle storage containers.

  2. Description of the Related Art Conventionally, in the manufacture of semiconductor circuit patterns and the like, foreign matter is prevented from adhering to a photomask or a reticle by using a dustproof means generally called a pellicle. The pellicle has a shape that matches the shape of the photomask or reticle, and a transparent polymer film (such as nitrocellulose, cellulose derivative, or fluorine-based polymer having a thickness of 10 μm or less on the upper edge surface of a pellicle frame having a thickness of about several millimeters. (Hereinafter referred to as “pellicle film”) and a mask adhesive material is applied to the lower edge surface of the pellicle frame, and a release paper or the like is applied to the mask adhesive material with a predetermined adhesive force. A protective film is adhered.

  The mask adhesive is for fixing the pellicle to a photomask or reticle, and the protective film is used for maintaining the adhesive force of the mask adhesive until the mask adhesive is used for the mask. In addition, the adhesive surface of the mask pressure-sensitive adhesive material is protected. In transporting this pellicle from the manufacturer to the user, in order to prevent foreign matter from adhering to the pellicle film or the like, or to prevent the pellicle from being damaged, the pellicle storage container comprising a pellicle mounting table and a lid In general, it is stored in a dust-proof bag or the like and transported.

The pellicle storage container is generally manufactured by injection molding or vacuum molding using a resin material. However, 5 inch and 6 inch pellicle storage containers for semiconductors are often molded by injection molding, but large pellicle storage containers with an area of 1000 cm ² or more are thin and can be easily made into large one-piece molded products. In many cases, vacuum forming is performed.

  It is assumed that the shape of the pellicle storage container does not change, and a sealing property for preventing dust from adhering to the pellicle and a holding property capable of reliably holding the pellicle film in a non-contact state are required.

  When the pellicle mounting table or the lid is warped or twisted, the deformation is transferred to the mask adhesive. When the pellicle mounting table is warped, a part of the mask adhesive material is locally weighted, and the mask adhesive material may be deformed. Further, when the lid is warped or twisted, the pellicle is pressed against the pellicle mounting table, and the warp of the pellicle mounting table may be transferred to the mask adhesive.

  In addition, when the lid comes into contact with the pellicle film due to warpage or deflection, the pellicle film may be damaged and the pellicle function may not be performed.

  Normally, the pellicle is attached to a mask or reticle pattern, and the pellicle is disposed on the lower surface side of the mask or reticle when the mask or reticle is protected or exposed. For this reason, the large pellicle has a large weight, so even with a small sticking failure that does not cause a problem with a small pellicle, the sticking failure part spreads over time, creating a gap that connects the inside and outside of the pellicle, called an air path, and foreign matter enters the pellicle from that location. Intrusion may cause the pellicle to fail.

Deformation is unlikely to be a problem if it is a small pellicle storage container, but in the case of a large pellicle storage container of 1000 cm ² or more, it is stored by bending, twisting or stacking when carrying with both ends. In some cases, deformation due to its own weight or warpage due to temperature may occur.

  In particular, a large pellicle storage container has a larger area than a 5-inch or 6-inch semiconductor pellicle storage container, and thus warps and twists of the pellicle storage container increase. Therefore, the deformation of the pellicle storage container is easily transferred to the mask adhesive material, and the frequency of occurrence of defective sticking increases.

  Therefore, as described in JP-A-2005-49765 (Patent Document 1), the present applicant attaches a reinforcing plate to the pellicle mounting table to prevent deformation of the pellicle storage container. A technique for preventing the deformation is proposed.

  A container with improved flatness is described in Japanese Patent Application Laid-Open No. 08-062828 (Patent Document 2).

Japanese Patent Laying-Open No. 2005-49765 (FIG. 6) Japanese Patent Application Laid-Open No. 08-0662828

  However, the technique disclosed in Patent Document 1 uses a reinforcing plate having a thickness of about 5 mm or less, which is effective in improving large warpage and twisting of the pellicle storage container during handling, but is not suitable for mounting a pellicle frame. There is no guarantee that the flatness of the mounting surface will be sufficiently secured, and from the viewpoint of preventing deformation of the mask adhesive, the flatness of the pellicle storage container obtained by the reinforcing effect is not sufficient, and the pellicle frame is mounted. When the mounting surface is bent or uneven, the deformation is transferred to the mask adhesive, resulting in insufficient adhesion to the photomask or reticle, or a gap between the inside and outside of the pellicle, called an air path. If foreign matter enters the pellicle from that location, the function of the pellicle may not be achieved.

  In addition, since the reinforcing plate of Patent Document 1 is filled with a resin material and bonded, it is difficult to separate the reinforcing plate from the pellicle storage container for recycling.

  Moreover, in the technique of patent document 2, it is a container which improved the flatness by what was shape | molded or installed the glass plate in a container, and originally said that a flatness is directly provided to a container with a bending and an unevenness | corrugation. It is not a thing. Further, since there is no reinforcing material, bending and twisting when carrying the container with both ends cannot be eliminated.

  The present invention solves the above-described problems, and an object of the present invention is to reinforce the rigidity of the pellicle storage container by fixing the structure to the back side of the pellicle mounting surface with a fixture, and to mount the pellicle mounting surface. It is intended to provide a pellicle storage container that directly imparts flatness to the mask, prevents deformation of the mask adhesive, and allows the structure to be recycled.

To achieve the above object, a first configuration of a pellicle storage container according to the present invention is a pellicle storage container including at least a lid for storing a pellicle and a pellicle mounting table on which the pellicle is mounted. The pellicle mounting table has a structure disposed on a surface opposite to the pellicle mounting surface, and the structure is mounted on the pellicle mounting by a fixture inserted through a through hole provided in the pellicle mounting table. The fixing device is fixed to a mounting table, and the fixing device includes a plurality of fixing devices protruding upward from a pellicle mounting surface of the pellicle mounting table, and the through hole is sealed with a seal member.

  Further, the second configuration of the pellicle storage container according to the present invention is that, in the first configuration, the structure is disposed so as to face the mounting surface of the pellicle via the pellicle mounting table. Features.

  The third configuration of the pellicle storage container according to the present invention is characterized in that, in the first and second configurations, the fixture is a screw.

  According to a fourth configuration of the pellicle storage container of the present invention, in the first to third configurations, the bottom surface of the structure is flush with the lowest surface of the pellicle mounting table, or the structure. The bottom surface of the pellicle mounting table protrudes below the lowest surface of the pellicle mounting table.

  According to a fifth configuration of the pellicle storage container of the present invention, in the first to fourth configurations, the pellicle mounting surface of the pellicle mounting table is formed flat on the same plane over the entire container. It is characterized by that.

  According to a sixth configuration of the pellicle storage container of the present invention, in the first to fifth configurations, the placement surface and the pellicle frame when the pellicle frame is placed directly on the placement surface of the pellicle. The gap is 300 μm or less.

  Further, the pellicle moving method according to the present invention is a method of moving the pellicle from the pellicle storage container described above, wherein the height position of the holder for gripping the pellicle by the top surface of the fixture is regulated. Features.

  The pellicle storage method according to the present invention is a method for storing a pellicle in the above-described pellicle storage container, wherein the position of the pellicle in the film surface direction is regulated by the side surface of the fixture.

  The pellicle storage container stacking method according to the present invention is a stacking method in which a plurality of the above-described pellicle storage containers are stacked, and the structure of the pellicle storage container stacked on top is in contact with the lid of the lower pellicle storage container. It is characterized by stacking.

  According to the first configuration of the pellicle storage container of the present invention, at least the mounting surface of the pellicle faces the surface of the pellicle mounting table opposite to the mounting surface of the pellicle via the pellicle mounting table. And the structure is fixed to the pellicle mounting table by a fixture inserted through a through-hole provided in the pellicle mounting table. Reinforces rigidity and prevents bending and twisting when carrying both ends of the pellicle storage container, and can directly impart flatness to the mounting surface of the pellicle, thereby preventing deformation of the mask adhesive I can do it. Further, by releasing the fixing of the fixing tool, the structure can be easily separated from the pellicle storage container and can be recycled. Moreover, the penetration | invasion of the foreign material from a through-hole can be prevented by sealing the through-hole with the sealing member.

Moreover, the solid because Teigu is constituted by a plurality of fasteners projecting upward from the mounting surface of the pellicle pellicle mounting table, for grasping a pellicle by setting the projection height of the fixture properly It can be used as a guide for the holder.

Further, according to the third configuration of the pellicle storage container according to the present invention, since the fixing tool is a screw, the structure can be fixed to the pellicle mounting table with simple screwing, and the fastening can be easily released. Easy to use.

According to the fourth configuration of the pellicle storage container of the present invention, the bottom surface of the structure is flush with the lowest surface of the pellicle mounting table, or the bottom surface of the structure is the lowest surface of the pellicle mounting table. When the pellicle storage container is mounted, the bottom surface of the structure is always in contact with the mounting surface, and the pellicle generated when the bottom surface of the pellicle storage container is pushed upward The flatness can be ensured by preventing the mounting surface from being bent.

According to the fifth configuration of the pellicle storage container of the present invention, the pellicle mounting surface of the pellicle mounting table is formed flat on the same plane over the entire container, so that the pellicle extends over the entire container. The flatness of the mounting surface can be ensured, whereby the deformation of the mask adhesive can be prevented.

Further, according to the sixth configuration of the pellicle storage container according to the present invention, the gap between the pellicle mounting surface and the pellicle frame when the pellicle frame is directly mounted on the pellicle mounting table is 300 μm or less. The gap between the pellicle mounting surface and the pellicle frame can be maintained substantially constant, and local deformation in the height direction of the mask adhesive material existing therebetween can be prevented.

  Further, according to the method for moving a pellicle according to the present invention, when the height of the holder for gripping the pellicle is regulated by the top surface of the fixture, the holder is removed when the pellicle is taken out from the pellicle storage container. It is easy to insert into the guide insertion groove provided on the side portion of the, and handling becomes easy.

  Further, according to the pellicle storage method of the present invention, the position of the pellicle in the film surface direction is regulated by the side surface of the fixture, thereby preventing the pellicle from being displaced and stably storing the pellicle in the pellicle storage container. I can do it.

  Further, according to the method for stacking pellicle storage containers according to the present invention, the pellicle storage containers are stacked in multiple stages by stacking so that the structure of the pellicle storage containers stacked on top contacts the lid of the lower pellicle storage container. Even when stacked, the bottom surface of the structure of the upper pellicle storage container is always in contact with the lid surface of the upper pellicle storage container placed on the lid of the lower pellicle storage container, Deflection of the mounting surface of the pellicle that occurs when the bottom surface of the pellicle storage container is pushed up can be prevented to ensure flatness.

  An embodiment of a pellicle storage container, a pellicle moving method, a pellicle storage method, and a pellicle storage container stacking method according to the present invention will be specifically described with reference to the drawings. 1 is a perspective explanatory view showing the configuration of a pellicle storage container according to the present invention, FIG. 2 is a cross-sectional explanatory view showing a state in which pellicle storage containers according to the present invention are stacked, and FIG. FIG. 4 is a diagram for explaining the case of deflection and unevenness in the gap between the pellicle placement surface of the pellicle placement table and the pellicle frame, and FIG. 5 is a perspective view showing the configuration of a holder for gripping the pellicle 6 is a cross-sectional explanatory view showing a state in which the height position of the holder for gripping the pellicle is regulated by the top surface of the fixture, and FIG. 7 is a situation in which the position in the film surface direction of the pellicle is regulated by the side surface of the fixture. FIG. 8 is a cross-sectional explanatory view showing the configuration of another pellicle storage container in which the entire container is formed in a flat structure, FIG. 9 is a perspective explanatory view showing the configuration of various structures, FIG. Figure 11 shows various other structures FIG.

  As a material of the structure 7 shown in FIGS. 9 to 11, a material having rigidity for maintaining the shape of the structure 7 such as metal, engineering plastic, reinforced plastic, ceramics, or the like can be used.

  When the structure 7 is attached to the pellicle mounting table 3, the structure 7 is in contact with the mounting surface 3 a of the pellicle 2 of the pellicle mounting table 3 and protrudes from the lowest surface of the pellicle mounting table 3. There is no particular limitation as long as the shape is the same. For example, a frame having a rectangular cross section as shown in FIG. 9A and FIGS. 10A to 10C is simple. However, in order to reduce the weight of the structure 7, Even if a plurality of (many) holes are formed within the range in which the flatness of the mounting surface 3a is maintained, or the cross section is L-shaped as shown in FIGS. 9B, 11B, and 11C. good.

  Further, the structure 7 may be solid as shown in FIGS. 10A to 10C, or may be hollow as shown in FIG. Further, the upper surface of the structure 7 is formed over substantially the entire width direction of the back surface of the mounting surface 3a of the pellicle 2, as shown in FIGS. 10 (a) and 11 (a), 11 (b). Alternatively, as shown in FIGS. 10B, 10C, and 11C, it may be formed on a part of the back surface of the mounting surface 3a of the pellicle 2 in the width direction. Further, as shown in FIG. 10C, the pellicle 2 may be mounted at a position deviated from the structure 7 fixed on the back surface side of the mounting surface 3a of the pellicle 2.

  The shape of the surface of the structure 7 that contacts the pellicle mounting table 3 is not particularly limited as long as the flatness of the mounting surface 3a of the pellicle 2 in the present invention can be ensured. For example, a flat surface is ideal, but it may be a curved surface that contacts only the back surface side of the mounting surface 3a of the pellicle 2 of the pellicle mounting table 3, or contacts the back surface side of the mounting surface 3a of the pellicle 2 at a plurality of points. An uneven shape may be used.

  The structure 7 can be manufactured by molding or cutting the material.

  The dimensions of the structure 7 according to the present invention are determined by the size of the pellicle mounting table 3 and the pellicle frame 2a mounted thereon.

  As a material of the fixture, a material having strength and rigidity necessary for fixing, such as metal, engineering plastic, reinforced plastic, ceramics, and the like can be used.

  The shape of the fixture is not particularly limited as long as it can be inserted into the through hole 3 b provided in the pellicle mounting table 3. For example, the bar shape is simple and pins and screws 8 can be used.

  If the fixing tool is a screw 8, it is desirable that the structure 7 can be firmly fastened to the pellicle mounting table 3 and the fastening can be easily released.

  There is no particular limitation on the method of manufacturing the fixture, and it can be manufactured by cutting or molding using a known technique.

  The dimension of the fixing tool in the present invention is not particularly limited as long as it can be inserted into the through hole 3 b provided in the pellicle mounting table 3 and the structure 7 can be fixed to the pellicle mounting table 3.

  1 and 2, reference numeral 1 denotes a pellicle storage container for storing a pellicle 2 in which a pellicle film 2c is attached to a pellicle frame 2a. At least a lid 4 and a pellicle mounting table 3 on which the pellicle 2 is mounted are provided. It is configured.

  The material of the pellicle mounting table 3 is not particularly limited, but acrylic resin, acrylonitrile resin, polycarbonate resin, polyethylene terephthalate resin, acrylonitrile / butadiene / styrene resin, and the like can be used. In addition to the above resins, polyester resins other than polyethylene terephthalate, olefin resins such as polyethylene and polypropylene, polystyrene resins such as polystyrene, acrylonitrile / styrene resins, and the like can also be used. You may give antistaticity to said resin. Resin reinforced plastics can also be used.

  In the pellicle mounting table 3, the mounting surface 3 a on which the pellicle 2 is mounted is configured by a top piece of a raised portion 6 having a U-shaped cross section formed along the periphery of the pellicle mounting table 3.

Since the periphery of the pellicle mounting table 3 is bent, the periphery has a certain degree of rigidity, but the strength of the flat part is weak, and if the area is 1000 cm ² or more, the rigidity of the entire pellicle storage container 1 is increased. Is not sufficient, and warpage and deflection are likely to occur. Therefore, in the present invention, more preferably, the structure 7 is attached to the inside of the raised portion 6 on the outer surface side of the pellicle mounting table 3. Thereby, the rigidity of the entire pellicle storage container 1 can be dramatically improved.

  As shown in FIG. 8, the entire pellicle mounting table 3 may have a flat structure. However, as shown in FIG. 2, only the mounting surface 3a of the pellicle 2 is flat, and the rest of the mounting surface 3a ( If the pellicle film 2c surface vibrates during transportation or the like, contact between the pellicle film 2c and the inside of the pellicle mounting table 3 can be prevented.

  Further, reinforcing the back surface of the pellicle mounting table 3 to provide flatness is effective for deflection due to its own weight, but is not effective for pushing up from below. Therefore, the part set lower than the mounting surface 3 a of the pellicle 2 is set so as not to protrude downward from the bottom surface 7 b of the structure 7.

  More preferably, the portion set lower than the mounting surface 3 a of the pellicle 2 is set so as to be flush with the bottom surface 7 b of the structure 7. In this way, a portion set lower than the mounting surface 3a of the pellicle 2 can be lightly contacted when placed on a mounting surface such as a table, thereby preventing deflection due to its own weight.

  The mounting surface 3 a of the pellicle 2 provided on the pellicle mounting table 3 is formed flat on the same plane over the entire pellicle storage container 1. If the mounting surface 3a on which the pellicle 2 is mounted is provided with an uneven shape by vacuum molding, injection molding or the like, local unevenness remains around the uneven shape, so that the flatness of the mounting surface 3a is deteriorated.

  Thus, the mounting surface 3a for mounting the pellicle 2 is formed flat on the same plane over the entire container of the pellicle storage container 1, so that the mounting surface for mounting the pellicle 2 over the entire container is provided. 3a can be directly imparted with flatness, thereby preventing deformation of the mask adhesive 2b provided on the lower surface of the pellicle frame 2a.

  The pellicle mounting table 3 is manufactured by vacuum molding or injection molding using a plate made of the above-described material.

  The size of the pellicle mounting table 3 in the present invention is determined by the size of the pellicle frame 2 a mounted on the pellicle mounting table 3.

  The material of the lid 4 of the pellicle storage container 1 is not particularly limited, but acrylic resin, acrylonitrile resin, polycarbonate resin, polyethylene terephthalate resin, acrylonitrile / butadiene / styrene resin and the like can be used. In addition to the above resins, polyester resins other than polyethylene terephthalate, olefin resins such as polyethylene and polypropylene, polystyrene resins such as polystyrene, acrylonitrile / styrene resins, and the like can also be used. You may give antistaticity to said resin. Resin reinforced plastics can also be used.

  When the pellicle storage container 1 is stacked on the lid 4 of the pellicle storage container 1, the pellicle mounting table 3 must be prevented from being deformed by being pushed up from the lower cover 4.

  Therefore, the shape of the lid 4 of the pellicle storage container 1 is such that when the pellicle storage container 1 is stacked thereon, only the structure 7 of the stacked pellicle storage containers 1 contacts the lid 4. There must be. If it is the shape which satisfy | fills the said requirements, it will not specifically limit. For example, the lid 4 may be in contact with the entire bottom surface 7b of the structure 7 (the contact surface between the pellicle mounting table 3 and the structure 7), or the lid 4 contacts only the four corners of the bottom surface 7b of the structure 7. It may be in shape.

  The lid 4 of the pellicle storage container 1 is manufactured by vacuum molding or injection molding using a plate made of the above-described material.

  The dimensions of the lid 4 of the pellicle storage container 1 in the present invention are determined by the size of the pellicle mounting table 3.

  The pellicle 2 includes a pellicle film 2c, a pellicle frame 2a to which the pellicle film 2c is attached, a mask adhesive 2b for attaching the pellicle frame 2a to a mask or a reticle, and the like. On the surface of the mask adhesive material 2b, a release material 2d made of a protective film or the like such as release paper is stuck and placed on the pellicle placement table 3.

  As a method for fixing the pellicle 2 to the pellicle mounting table 3, the protruding part of the release material 2 d is attached to the pellicle mounting table 3 with an adhesive tape, or is provided on the pellicle mounting table 3 in a locking groove formed on the pellicle frame 2 a. Any known method may be used, such as locking the locking member or holding and fixing the pellicle frame 2a between the pellicle mounting table 3 and the lid 4.

Here, the pellicle storage container 1 of the present embodiment is particularly suitable for the large pellicle 2 in which the area of the pellicle film 2c exceeds 1000 cm ² .

  As shown in FIG. 1, the pellicle 2 is stored by covering the pellicle mounting table 3 with a lid 4 in a state where the pellicle 2 is mounted on the mounting surface 3 a of the pellicle 2 of the pellicle mounting table 3. After the pellicle mounting table 3 and the lid 4 are combined, any known method may be used, such as sealing by inserting clips or the like at the four corners, or sealing the adhesive tape around the peripheral edge.

  A structure 7 is disposed on the surface of the pellicle mounting table 3 opposite to the mounting surface 3a of the pellicle 2 so that at least the mounting surface 3a of the pellicle 2 faces through the pellicle mounting table 3, The structure 7 is fixed to the pellicle mounting table 3 with screws 8 serving as a fixing tool inserted into a through hole 3 b provided in the pellicle mounting table 3.

  Preferably, a structure 7 having a rectangular cross section is fitted inside the raised portion 6 on the outer surface of the pellicle mounting table 3, and a screw 8 serving as a fixing tool in the through hole 3 b provided in the mounting surface 3 a of the pellicle 2. Is inserted and screwed into a screw hole 7 a formed in the structure 7.

  Further, when the screw 8 is attached, the through hole 3b may be sealed in order to completely block the through hole 3b for the purpose of preventing the entry of foreign matter from the through hole 3b or to prevent the screw 8 from loosening. Is more effective.

  As a sealing member for sealing the through hole 3b, as shown in FIG. 3A, a washer 9 made of a material such as polyamide, silicon rubber, polypropylene or the like having a sealing property is used. And the mounting surface 3a of the pellicle mounting table 3, or as shown in FIG. 3B, the lower surface of the head 8a of the screw 8 has an area larger than the diameter of the through hole 3b. The screw 8 having a large width is pressed against and fixed to the mounting surface 3a of the pellicle mounting table 3, or the head 8a of the screw 8 and the mounting surface 3a of the pellicle mounting table 3 as shown in FIG. A through hole 3b is sealed with a caulking material 10 interposed therebetween, or as shown in FIG. 3 (d), a seal tape 11 is attached to the entire head 8a of the screw 8 including the through hole 3b. 3 is attached to the mounting surface 3a to seal the through hole 3b. As shown in (e), the entire head portion 8a of the screw 8 including the through hole 3b is covered with the cap member 12, and the cap member 12 is pressed against the mounting surface 3a of the pellicle mounting table 3 to seal the through hole 3b. You can stop. The cap member 12 may be configured to be pressed against the head 8a of the screw 8 and the mounting surface 3a of the pellicle mounting table 3, or may be bonded by an adhesive or the like.

  FIG. 3F shows that a screw 8 serving as a fixing tool is inserted from the bottom surface 7 b side of the through hole 7 c that penetrates the structure 7, and the screw 8 is inserted into the through hole 3 b provided on the mounting surface 3 a of the pellicle 2. It is inserted and screwed and fastened into the screw hole 13a of the block body 13 constituting the fixture. The block body 13 may use a nut. Further, the through hole 3b can be sealed with a sealing member as described above with reference to FIGS. 3 (a) to 3 (e).

  In order to effectively reinforce the pellicle storage container 1, it is more effective that the screw 8 is attached in a direction perpendicular to the mounting surface 3a of the pellicle 2 serving as a reinforcing surface. Further, as an auxiliary of screwing, an adhesive or a pressure sensitive adhesive may be used in combination between the structure 7 and the back surface of the mounting surface 3a.

  As described above, the screw 8 as a fixing tool is inserted into the through hole 3b provided in the placement surface 3a of the pellicle 2 of the pellicle placement table 3 and fastened to the screw hole 7a provided in the structure 7. The structure 7 can reinforce the rigidity of the pellicle storage container 1 and can directly impart flatness to the placement surface 3a on which the pellicle 2 is placed, thereby preventing deformation of the mask adhesive 2b of the pellicle 2 I can do it.

  Moreover, the structure 7 can be easily separated from the pellicle mounting table 3 of the pellicle storage container 1 by releasing the fastening of the screws 8 that serve as a fixture, and can be recycled.

  However, in order to facilitate recycling, it is preferable to fix only by screwing. When an adhesive or a pressure-sensitive adhesive is used, it is difficult to separate the pellicle storage container 1 and the structure 7, and when the separation is performed, a large force is applied and the structure 7 is deformed. There is a possibility that the effect of improving the flatness is weakened.

  In this way, the bottom surface 7b of the structure 7 is flush with the peripheral surface 3d that becomes the lowest surface (the bottom surface at the lowest position) of the pellicle mounting table 3 of the pellicle storage container 1, or the pellicle mounting of the pellicle storage container 1 By being configured so as to protrude downward from the peripheral surface 3d which is the lowest surface of the mounting table 3, the bottom surface 7b of the structure 7 is surely placed on the mounting surface in a state where the pellicle storage container 1 is mounted on the table or the like. The flat surface can be ensured by preventing the mounting surface 3a of the pellicle 2 from being bent when the inner side surface 3c of the pellicle mounting table 3 of the pellicle storage container 1 is pushed upward.

  Further, as shown in FIG. 2, as a stacking method for stacking a plurality of pellicle storage containers 1, the bottom surface 7b of the structure 7 of the pellicle storage container 1 stacked on top is in contact with the lid 4 of the lower pellicle storage container 1. When the bottom surface 7b of the structure 7 of the upper pellicle storage container 1 is placed and supported on the lid 4 of the lower pellicle storage container 1 by stacking, the pellicle storage containers 1 are stacked in multiple stages. Even when the upper pellicle storage container 1 is placed on the lid 4 of the lower pellicle storage container 1, the bottom surface 7 b of the structure 7 of the upper pellicle storage container 1 always comes into contact with the surface of the lid 4. In addition, the inner surface 3c of the pellicle mounting table 3 of the pellicle storage container 1 is pushed upward (upward in FIG. 2) to prevent bending of the mounting surface 3a of the pellicle 2 and to ensure flatness. It can be.

  As shown in FIGS. 1 and 2, at least four corners of the upper surface of the lid 4 are formed in a protruding shape, and are configured to contact only the bottom surface 7 b of the structure 7 of the upper pellicle storage container 1. Has been.

  In order not to deform the mask adhesive 2b provided on the lower surface of the pellicle frame 2a, when the pellicle 2 is placed on the placement surface 3a, as shown in FIG. 4A, the placement surface 3a of the pellicle 2 is placed. If the deflection shape or the uneven shape of the pellicle contact portion of the pellicle is the same as that of the pellicle frame 2a when the pellicle 2 is placed on the placement surface 3a, the placement surface 3a and the pellicle frame 2a Therefore, the mask adhesive material 2b existing between them can be prevented from being deformed in the height direction.

  Therefore, the flatness of the mounting surface 3a on which the pellicle 2 is mounted in the present invention means that only the pellicle frame 2a without the mask adhesive material 2b is directly mounted on the mounting surface 3a of the pellicle mounting table 3. In this state, the gap between the pellicle frame 2a and the mounting surface 3a is 300 μm or less, preferably 100 μm or less, and more preferably 50 μm or less.

  That is, as shown in FIG. 4B, the bending shape of the pellicle contact portion of the mounting surface 3a of the pellicle 2 and the bending of the pellicle frame 2a in a state where the pellicle frame 2a is directly mounted on the mounting surface 3a. As shown in FIG. 4C, the concavo-convex shape of the pellicle contact portion of the mounting surface 3a of the pellicle 2 and the pellicle frame 2a on the mounting surface 3a are maintained. The gap W with the concave-convex shape of the pellicle frame 2a in a state where the pellicle is directly placed is kept at 300 μm or less at the maximum position. As a result, the mask adhesive material existing between the pellicle frame 2a and the placement surface 3a The deformation in the height direction of 2b can be prevented.

  The pellicle frame 2a is mounted at a place where the flatness of the mounting surface 3a referred to in the present invention is maintained, and the screws 8 are mounted on the pellicle mounting table 3 and the structure so that the mounting surface 3a referred to in the present invention is flat. The number of screwing and the screwing interval are appropriately set according to the material, size, shape, structure, etc. of the body 7.

  The fixture is composed of a plurality of screws 8 with a head 8a protruding above the mounting surface 3a of the pellicle 2 of the pellicle mounting table 3. In such a configuration, by appropriately setting the position of the screw 8 serving as a fixture and the height of the head 8a, the following position restricting means can be used.

  For example, as a method of moving the pellicle 2 from the pellicle storage container 1, the height of the holder 14 for holding the pellicle 2 as shown in FIGS. 5 and 6 by the top surface of the head 8a of the screw 8 serving as a fixture. The position can be regulated.

  That is, as shown in FIG. 6, the top surface of the head 8 a of the screw 8 serving as a fixture fastened to the structure 7 is set to a position that regulates the height position of the holder 14 for gripping the pellicle 2. When the pellicle 2 is taken out from the pellicle storage container 1, the top surface of the head 8a of the screw 8 serving as a fixture regulates the height position of the holder 14 for gripping the pellicle 2. 14 can be easily inserted into the guide insertion groove 2a1 provided on the side of the pellicle frame 2a of the pellicle 2 and can be handled easily. Thus, by adjusting the height of the head portion 8a of the screw 8, it can be used as a guide for the holder 14 for gripping the pellicle 2.

  Further, as a method of storing the pellicle 2 in the pellicle storage container 1, as shown in FIG. 7, the position in the surface direction of the pellicle frame 2a can be regulated by the side surface of the head 8a of the screw 8 serving as a fixture.

  That is, the head 8a of the screw 8 serving as a fixture fastened to the structure 7 is formed in a square shape, and the side surface position of the head 8a is the position in the surface direction of the pellicle frame 2a (the left-right direction in FIG. 7). It is set to a position that regulates. As a result, the side surface of the head 8a of the screw 8 serving as a fixture comes into contact with the side surface of the pellicle frame 2a to regulate the position in the surface direction of the pellicle frame 2a, thereby stabilizing the pellicle 2 in the pellicle storage container 1. Can be stored.

  Thus, the screw 8 serving as a fixture can be used as a stopper for preventing the displacement of the pellicle 2.

  Specific Examples 1 to 6 and Comparative Example 1 are shown below, and their evaluation will be described in detail.

[Example 1]
As a fixture for fixing the structure 7 to the back surface side of the mounting surface 3a of the pellicle 2, a commercially available opening leg pin is inserted into a hole provided in the structure 7 instead of the screw hole 7a and the leg 7 is opened. Stopped. The pellicle 2 has a width of 474 mm × 782 mm and a height of 5.9 mm. The pellicle storage container 1 is a vacuum molded product of a 3 mm thick ABS resin plate and has a diameter of 910 mm × 600 mm. The surface 3a has an outer diameter of 530 mm × 840 mm, an inner diameter of 350 mm × 670 mm (upper surface dimension of one side of the annular ridge 6 is 90 mm × 85 mm), and the height of the mounting surface 3a of the pellicle 2 is around the pellicle mounting table 3 The structure 7 has a height of 20 mm from the level of the surface 3d, and the structure 7 is formed by cutting an aluminum plate into an outer diameter of 520 mm × 830 mm, an inner diameter of 360 mm × 680 mm (upper surface dimension of one side of the annular structure 7 80 mm × 75 mm), and a height of 15 mm The fixing position of the open leg pin serving as a fixture for the structure 7 is 10 mm inside from the outside diameter of the mounting surface 3 a of the pellicle 2 and 5 mm inside from the outside diameter of the structure 7. Corner There are a total of 12 corners and 2 sides (equal distance) on the mounting surface 3a of the pellicle 2, 5mm inside from the outer diameter on the mounting surface 3a of the pellicle 2 by vacuum forming on the mounting surface 3a of the pellicle 2 A total of four convex portions each having a height of 3 mm, a width of 10 mm, and a length of 50 mm were formed at the center of each side. The pellicle storage container 1 to be evaluated was placed on a flat surface alone.

[Example 2]
A fixing tool for fixing the structure 7 to the back surface side of the mounting surface 3a of the pellicle 2 is M4 × 16 (shaft outer diameter 4 mm × shaft length in a screw hole 7a provided in the structure 7 instead of the leg pin. 16 mm), and a polyamide washer was used as the washer 9.

Example 3
The structure was the same as in Example 1 except that the height of the structure 7 was changed to 25 mm.

Example 4
The configuration was the same as in Example 1 except that the convex portion formed as the stopper member of the pellicle 2 on the mounting surface 3a of the pellicle 2 was omitted.

Example 5
As shown in FIG. 1, a pellicle storage container 1 having a shape in which at least four corners of the upper surface of the cover 4 are in contact with only the bottom surface 7b of the structure 7 of the upper pellicle storage container 1 is formed. The pellicle storage container 1 to be evaluated was stacked as shown in FIG. Others were the same as in Example 1.

Example 6
In the same manner as in the second embodiment, an M4 × 16 (shaft outer diameter 4 mm × shaft length 16 mm) screw 8 is screwed and fixed to a screw hole 7 a provided in the structure 7 instead of the leg pin. Then, a polyamide washer is used as the washer 9, the height of the structure 7 is set to 25 mm as in the third embodiment, and the pellicle 2 is placed on the mounting surface 3a of the pellicle 2 as in the fourth embodiment. The convex portion formed as the stopper member is omitted, and the shape of the lid 4 is similar to that of the fifth embodiment. As shown in FIG. 1, at least four corners of the upper surface of the lid 4 are the upper pellicle storage container 1. A pellicle storage container 1 shaped so as to contact only the bottom surface 7b of the structure 7 was prepared, and the pellicle storage container 1 to be evaluated was stacked as shown in FIG. Others were the same as in Example 1.

[Comparative Example 1]
Instead of the structure 7, an aluminum plate having a thickness of 5 mm is fixed to the back side of the mounting surface 3 a of the pellicle 2 only by adhesion with an acrylic adhesive, and formed as a stopper member for the pellicle 2 on the mounting surface 3 a of the pellicle 2. The same configuration as in Example 1 was provided except that the convex portions were omitted.

  Table 1 below shows the evaluation results for Examples 1 to 6 and Comparative Example 1. In the twist evaluation of the pellicle storage container 1 shown in Table 1 below, the case where the pellicle storage container 1 is not twisted when carrying the both ends of the pellicle storage container 1 is “◯”, and the pellicle storage container 1 is slightly twisted. The case where the pellicle film 2c does not come into contact with the pellicle storage container 1 is indicated by “Δ”.

  In the evaluation of the flatness of the mounting surface 3a of the pellicle 2, the pellicle film 2c provided on the upper surface of the pellicle frame 2a of the pellicle 2, the mask adhesive material 2b provided on the lower surface, and the release material 2d are removed. Then, the lower surface of the pellicle frame 2a is directly mounted on the mounting surface 3a of the pellicle 2, and the lower surface of the pellicle frame 2a and the mounting surface 3a of the pellicle 2 are arranged as shown in FIGS. A value obtained by inserting a gap gauge into the gap W formed between and measuring the gap W is shown.

  As an application example of the present invention, it is possible to prevent foreign matter from adhering to a photomask or a reticle used in a lithography process when manufacturing a semiconductor device such as an LSI (Large Scale Integrated Circuit) or a TFT type LCD (Thin Film Transistor Liquid Crystal Display). It can be applied to a pellicle storage container for storing, transporting, and transporting a pellicle used for this purpose, and is particularly suitable for a storage container for a large pellicle for liquid crystal.

It is a perspective explanatory view showing the configuration of the pellicle storage container according to the present invention. It is a section explanatory view showing signs that pellicle storage containers concerning the present invention were laminated. It is a figure explaining the various fixing structure of a fixing tool. It is a figure explaining the case of a deflection | deviation and the case of an unevenness | corrugation about the clearance gap between the mounting surface of the pellicle of a pellicle mounting base, and a pellicle frame. It is a perspective view which shows the structure of the holder for holding a pellicle. It is sectional explanatory drawing which shows a mode that the height position of the holder for holding a pellicle with the top | upper surface of a fixing tool is controlled. It is a cross-sectional explanatory view showing a state where the position of the pellicle in the film surface direction is regulated by the side surface of the fixture. It is a cross-sectional explanatory view showing the configuration of another pellicle storage container in which the entire container is formed in a flat structure. It is a perspective explanatory view showing the composition of various structures. It is a figure which shows the structure of other various structures. It is a figure which shows the structure of other various structures.

DESCRIPTION OF SYMBOLS 1 ... Pellicle storage container 2 ... Pellicle 2a ... Pellicle frame
2a1 ... Guide insertion groove 2b ... Adhesive material for mask 2c ... Pellicle film 2d ... Releasing material 3 ... Pellicle mounting table 3a ... Pellicle mounting surface 3b ... Through hole 3c ... Inner side surface 3d ... Rear surface 4 ... Lid 6 ... Lump 7 ... Structure 7a ... Screw hole 7b ... Bottom surface 7c ... Through hole 8 ... Screw 8a ... Head 9 ... Washer
10 ... caulking material
11… Seal tape
12… Cap member
13… Block body
13a ... Screw hole
14 ... Holder

Claims (9)

In a pellicle storage container composed of at least a lid for storing a pellicle and a pellicle mounting table on which the pellicle is mounted,
A pellicle mounting table is arranged on a surface opposite to the pellicle mounting surface of the pellicle mounting table, and the structure is inserted into a through hole provided in the pellicle mounting table. Fixed to
The fixture is composed of a plurality of fixtures protruding upward from the pellicle placement surface of the pellicle placement table ,
A pellicle storage container, wherein the through hole is sealed with a seal member. 2. The pellicle storage container according to claim 1, wherein the structure is disposed so as to face a mounting surface of the pellicle via the pellicle mounting table. The pellicle storage container according to claim 1 or 2, wherein the fixing tool is a screw. The bottom surface of the structure and the lowest surface of the pellicle mounting table are flush with each other, or the bottom surface of the structure protrudes below the lowest surface of the pellicle mounting table. 4. The pellicle storage container according to any one of 3 above. The pellicle storage container according to any one of claims 1 to 4, wherein a pellicle mounting surface of the pellicle mounting table is formed flat on the same plane over the entire container. The clearance gap between this mounting surface and a pellicle frame when mounting a pellicle frame directly on the mounting surface of the said pellicle is 300 micrometers or less, The any one of Claims 1-5 characterized by the above-mentioned. Pellicle storage container. A method for moving a pellicle from the pellicle storage container according to any one of claims 1 to 6 ,
A method for moving a pellicle, wherein the height position of a holder for gripping the pellicle is regulated by the top surface of the fixture. A method for storing a pellicle in the pellicle storage container according to any one of claims 1 to 6 ,
A method of storing a pellicle, wherein a position of the pellicle in a film surface direction is regulated by a side surface of the fixture. A laminating method for stacking a plurality of pellicle storage containers according to any one of claims 1 to 6 ,
A pellicle storage container stacking method, wherein the pellicle storage container is stacked so that the structure of the pellicle storage container stacked on top is in contact with a lid of a lower pellicle storage container.

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