JP2011164404A - Pellicle storage container - Google Patents

Pellicle storage container Download PDF

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JP2011164404A
JP2011164404A JP2010027825A JP2010027825A JP2011164404A JP 2011164404 A JP2011164404 A JP 2011164404A JP 2010027825 A JP2010027825 A JP 2010027825A JP 2010027825 A JP2010027825 A JP 2010027825A JP 2011164404 A JP2011164404 A JP 2011164404A
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storage container
pellicle
pellicle storage
resin
screw
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Kazutoshi Sekihara
一敏 関原
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Shin Etsu Chemical Co Ltd
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Shin Etsu Chemical Co Ltd
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Priority to JP2010027825A priority Critical patent/JP2011164404A/en
Priority to KR1020100129178A priority patent/KR20110093592A/en
Priority to TW100104440A priority patent/TWI424947B/en
Priority to CN2011100356991A priority patent/CN102169847B/en
Publication of JP2011164404A publication Critical patent/JP2011164404A/en
Priority to HK11112967.1A priority patent/HK1158819A1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Packages (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pellicle storage container capable of keeping the inside of the container clean even when functional components such as a handle, a pellicle fixing member and a reinforcing material are attached to the container. <P>SOLUTION: The pellicle storage container comprises a pellicle storage container body 20 for mounting a pellicle, and a lid covering the pellicle and mating and locking the pellicle storage container body 20 in a rim portion, wherein a functional component comprising one of a handle, a fixing member for a pellicle and a reinforcing material is attached to the container body 20 or the lid made of a resin by a screw fastening means, and the surface of a male screw or a female screw is not exposed inside the container body 20 or the lid. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、半導体デバイス、プリント基板あるいは液晶ディスプレイ等を製造する際のゴミ除けとして使用されるリソグラフィー用ペリクルを収納、保管、輸送するペリクル収納容器に関する。   The present invention relates to a pellicle storage container for storing, storing, and transporting a pellicle for lithography used as a dust remover when manufacturing a semiconductor device, a printed circuit board, a liquid crystal display, or the like.

ＬＳＩ、超ＬＳＩなどの半導体製造或は液晶ディスプレイ等の製造においては、半導体ウエハーあるいは液晶用原板に光を照射してパターンを作製するが、この時に用いるフォトマスクあるいはレチクル（以下、短にフォトマスクと記述）にゴミが付着していると、このゴミが光を吸収したり、光を曲げてしまうために、転写したパターンが変形したり、エッジががさついたものとなるほか、下地が黒く汚れたりするなど、寸法、品質、外観などが損なわれるという問題があった。   In the manufacture of semiconductors such as LSI and VLSI, or in the manufacture of liquid crystal displays, patterns are produced by irradiating a semiconductor wafer or liquid crystal master plate with light. A photomask or reticle (hereinafter referred to as a photomask for short) used at this time is used. If the dust adheres to this, the dust will absorb light or bend the light, so the transferred pattern will be deformed, the edges will be sticky, and the ground will be black. There has been a problem that dimensions, quality, appearance, etc. are impaired.

このため、これらの作業は通常クリーンルームで行われているが、それでもフォトマスクを常に清浄に保つことが難しい。そこで、フォトマスク表面にゴミよけとしてペリクルを貼り付けした後に露光を行っている。この場合、異物はフォトマスクの表面には直接付着せず、ペリクル上に付着するため、リソグラフィー時に焦点をフォトマスクのパターン上に合わせておけば、ペリクル上の異物は転写に無関係となる。   For this reason, these operations are usually performed in a clean room, but it is still difficult to keep the photomask clean. Therefore, exposure is performed after a pellicle is attached to the surface of the photomask to prevent dust. In this case, the foreign matter does not adhere directly to the surface of the photomask but adheres to the pellicle. Therefore, if the focus is set on the pattern of the photomask during lithography, the foreign matter on the pellicle becomes irrelevant to the transfer.

一般に、ペリクルは、光を良く透過させるニトロセルロース、酢酸セルロースあるいはフッ素樹脂などからなる透明なペリクル膜を、アルミニウム、ステンレス、ポリエチレンなどからなるペリクルフレームの上端面に貼り付けないし接着する。さらに、ペリクルフレームの下端にはフォトマスクに装着するためのポリブデン樹脂、ポリ酢酸ビニル樹脂、アクリル樹脂等からなる粘着層、及び粘着層の保護を目的とした離型層（セパレータ）が設けられる。   In general, a pellicle has a transparent pellicle film made of nitrocellulose, cellulose acetate, fluororesin, or the like that transmits light well, and is attached or bonded to the upper end surface of a pellicle frame made of aluminum, stainless steel, polyethylene, or the like. Further, an adhesive layer made of polybuden resin, polyvinyl acetate resin, acrylic resin or the like for mounting on a photomask, and a release layer (separator) for the purpose of protecting the adhesive layer are provided at the lower end of the pellicle frame.

しかしながら、ペリクルはマスクに貼付した後ではそれらが形成する閉空間の外部から内部への異物侵入効果はあるが、ペリクル自体に異物が付着して、かつそれが閉空間の内部にある場合には、フォトマスクへの異物付着を防ぐことは困難である。そのため、ペリクル自体に高い清浄性が求められることはもとより、保管、輸送に使用するペリクル収納容器にもその清浄性を維持しうる性能が強く求められる。具体的には、帯電防止性能に優れ、擦れた際にも発塵の少ない材質、ペリクルおよび構成部品間の接触を極力防ぐ構造、外力が加わった際の変形を防ぐ高剛性な構造・材質、といった点が要求される。   However, after attaching the pellicle to the mask, there is a foreign substance intrusion effect from the outside to the inside of the closed space formed by them, but when the foreign substance adheres to the pellicle itself and it is inside the closed space, It is difficult to prevent foreign matter from adhering to the photomask. For this reason, not only the pellicle itself is required to have high cleanliness, but also the pellicle storage container used for storage and transportation is strongly required to have a performance capable of maintaining the cleanliness. Specifically, it has excellent antistatic performance, is a material that generates little dust when rubbed, a structure that prevents contact between the pellicle and components as much as possible, a highly rigid structure and material that prevents deformation when external force is applied, Such points are required.

ペリクル収納容器は、通常、ＡＢＳ、アクリル等の樹脂を射出成形または真空成形することによって製造される。これらの成形方法が利用されるのは、表面が平滑で異物の付着や発塵の恐れが少ないこと、一体成形のため継ぎ目がなく発塵や異物侵入の恐れが少ないこと、複雑形状のものも容易に製造できること、量産性に優れ低コスト化が可能である、といったメリットがあるからである。外観の一例を図７に示す。ペリクルを載置するペリクル収納容器本体７１と、ペリクルを被覆すると共にペリクル収納容器本体と周縁部で嵌め合い係止するペリクル収納蓋体７２から構成され、ペリクル収納容器本体とペリクル収納蓋体とは粘着テープ（図示しない）またはクリップ７３により締結される。   The pellicle storage container is usually manufactured by injection molding or vacuum forming a resin such as ABS or acrylic. These molding methods are used because the surface is smooth and there is little risk of foreign matter adhesion and dust generation, because there is no seam because there is no joint and there is little risk of dust generation and foreign matter intrusion, and even complicated shapes This is because there are merits that it can be easily manufactured and is excellent in mass productivity and can be reduced in cost. An example of the appearance is shown in FIG. The pellicle storage container main body 71 on which the pellicle is placed, and the pellicle storage lid body 72 that covers the pellicle and fits and locks with the pellicle storage container main body at the periphery, and the pellicle storage container main body and the pellicle storage lid body are Fastened with adhesive tape (not shown) or clip 73.

半導体用やプリント基板用ペリクルの収納容器は、外形の辺長が概ね２００〜３００ｍｍ前後で、これらは通常、射出成形を利用して製造される。一方、主として液晶用ペリクルに使用される辺長が５００ｍｍを超えるような大型のペリクル収納容器は、一般にＡＢＳ、アクリル等の合成樹脂シートを真空成形したものが使用される。これは、１箇所もしくは数箇所のゲートから金型内に樹脂を高速注入する射出成形では樹脂の流れる距離が長すぎるため製法的に困難なためである。一方、真空成形法は、金型に加熱した樹脂シートを被せ、真空引きするだけで大型品も容易に成形が可能である。   Storage containers for semiconductor and printed circuit board pellicles have outer side lengths of approximately 200 to 300 mm, and these are usually manufactured using injection molding. On the other hand, a large pellicle storage container having a side length exceeding 500 mm mainly used for a liquid crystal pellicle is generally a vacuum-formed synthetic resin sheet such as ABS or acrylic. This is because, in the injection molding in which the resin is injected at a high speed into the mold from one or several gates, the resin flow distance is too long, which makes it difficult to manufacture. On the other hand, in the vacuum molding method, a large-sized product can be easily molded simply by placing a heated resin sheet on a mold and vacuuming.

ペリクル収納容器には、必要に応じ、取っ手、ペリクル固定部品、補強材などの機能部品が取り付けられることがある。この取り付け手段としては、手段の容易さ、信頼性からネジで行われるのが一般的である。ネジで取り付けた場合、隙間からの異物侵入や、洗浄時の水の侵入ならびに乾燥が問題になるため、例えば、この解決手段として、ネジの根元に樹脂製のワッシャを挟んで締結する手段が知られている（特許文献１参照）。   Functional parts such as a handle, a pellicle fixing part, and a reinforcing material may be attached to the pellicle storage container as necessary. This attachment means is generally performed with screws for the ease of means and reliability. When screws are attached, foreign matter intrusions through gaps, water intrusion during cleaning, and drying becomes a problem.For example, as a means for solving this problem, a means for fastening with a resin washer at the base of the screw is known. (See Patent Document 1).

しかし、ボルトの工具との嵌合部や表面の微小な凹凸を洗浄するのが困難であること、樹脂ワッシャを締め付けた際のワッシャからの発塵があるなどの問題があり、ペリクル収納容器内部の清浄性を保つ上では必ずしも完全なものではなかった。ネジ締結をやめ、接着や熱融着といった方法をとることも可能であるが、これらの方法は、位置関係を調節して取り付ける機能部品には使用しにくいうえ、信頼性の点でも問題があり、代替手段として適切ではない。   However, there are problems such as difficulty in cleaning the fitting part of the bolt with the tool and minute irregularities on the surface, and dust generation from the washer when the resin washer is tightened. In order to maintain cleanliness, it was not always perfect. It is also possible to stop the screw fastening, and take the method of bonding or heat fusion, but these methods are difficult to use for functional parts that are mounted by adjusting the positional relationship, and there is also a problem in terms of reliability Not suitable as an alternative.

特開２００８−２１６８４６号公報JP 2008-216846 A

本発明はこの問題に鑑みなされたもので、ハンドル、ペリクル固定部材、補強材などの機能部品をペリクル収納容器に取り付けた際でも、容器内部を清浄に保つことができるペリクル収納容器を得ることを目的とする。   The present invention has been made in view of this problem, and provides a pellicle storage container that can keep the inside of the container clean even when functional parts such as a handle, a pellicle fixing member, and a reinforcing material are attached to the pellicle storage container. Objective.

本発明による解決手段は、ペリクルを載置するペリクル収納容器本体と、ペリクルを被覆すると共にペリクル収納容器本体と周縁部で嵌め合い係止するペリクル収納容器蓋体とからなるペリクル収納容器において、樹脂製のペリクル収納容器本体あるいはペリクル収納容器蓋体に、取っ手、ペリクルの固定部材、補強材のいずれかからなる機能部品がネジ締結により取り付けられているとともに、ペリクル収納容器本体あるいはペリクル収納容器蓋体の内側にオスネジおよびメスネジの表面が露出していないことを特徴とするペリクル収納容器である。
ここで、上記ネジ締結手段はオスネジあるいはメスネジの周囲が一体の樹脂で被覆されているものであることが好ましい。 According to the present invention, there is provided a pellicle storage container comprising a pellicle storage container body on which a pellicle is placed, and a pellicle storage container lid that covers the pellicle and is fitted and locked at a peripheral edge of the pellicle storage container body. The pellicle storage container body or the pellicle storage container lid is mounted with a functional part consisting of any one of a handle, a pellicle fixing member, and a reinforcing member by screw fastening, and the pellicle storage container body or the pellicle storage container lid The pellicle storage container is characterized in that the surfaces of the male screw and the female screw are not exposed inside.
Here, the screw fastening means is preferably one in which the periphery of the male screw or the female screw is covered with an integral resin.

容器内部にネジ表面を露出させず、また、これを一体の樹脂で被覆したことで部品としての清浄性が向上するとともに、表面が平滑なため洗浄性も良好となる。   Since the screw surface is not exposed inside the container and this is covered with an integral resin, the cleanability as a part is improved and the surface is smooth, so that the cleaning property is also improved.

ここで、このネジ締結手段を被覆する樹脂は、接触するペリクル収納容器本体あるいはペリクル収納容器蓋体の材質と接着性を有する樹脂であることが好ましく、さらに、機能部品の固定後、接触部周囲の間隙を接着剤にて固着させてなることが更に好ましい。固定手段としてネジ締結を行い信頼性を確保しつつも、接着剤を併用することで締結部からの洗浄液の浸入を防止することができ、さらに、締結部周辺の締結により表面が荒れたり発塵した部分を被覆して発塵を防止することができる。   Here, the resin covering the screw fastening means is preferably a resin having adhesiveness to the material of the pellicle storage container main body or the pellicle storage container lid to be in contact, and after fixing the functional parts, More preferably, these gaps are fixed with an adhesive. While securing the reliability by fastening screws as a fixing means, it is possible to prevent the intrusion of cleaning liquid from the fastening part by using an adhesive together. The covered part can be covered to prevent dust generation.

また、上記接着剤に代えて、有機溶剤を使用して、溶解して間隙を密封することもでき、この場合には、洗浄液の浸入、発塵防止のほかに、接着剤からの発ガスによる汚染も防止することができ、さらに好適である。   Further, instead of the above adhesive, an organic solvent can be used to dissolve and seal the gap. In this case, in addition to the intrusion of cleaning liquid and prevention of dust generation, Contamination can also be prevented, which is more preferable.

本発明によれば、ハンドル、ペリクル固定部材、補強材などの機能部品をペリクル収納容器に取り付ける際に、ネジ締結により信頼性のある固定をすることができるとともに、その表面が樹脂で一体的に被覆されているため清浄性が著しく高く、さらに、接着剤または有機溶剤により接触部が固定されている場合には、洗浄液の浸入と発塵が防止され、ペリクル収納容器内部を清浄に保つことができるペリクル収納容器を得ることができる。   According to the present invention, when functional parts such as a handle, a pellicle fixing member, and a reinforcing material are attached to the pellicle storage container, it is possible to perform reliable fixing by screw fastening, and the surface thereof is integrated with resin. Since it is covered, the cleanliness is remarkably high. Furthermore, when the contact part is fixed with an adhesive or an organic solvent, the penetration of the cleaning liquid and the generation of dust are prevented, and the inside of the pellicle storage container can be kept clean. A pellicle storage container that can be obtained can be obtained.

本発明によるペリクル収納容器の一実施形態であって、ハンドルを取り付けた態様を示す平面図とＡ−Ａ線断面図である。It is one Embodiment of the pellicle storage container by this invention, Comprising: They are the top view and the AA sectional view taken on the line which attached the handle | steering_wheel. 本発明によるペリクル収納容器の他の実施形態であって、補強体を取り付けた態様を示す平面図とＢ−Ｂ線断面図である。It is other embodiment of the pellicle storage container by this invention, Comprising: They are the top view and the BB sectional drawing which show the aspect which attached the reinforcement body. 本発明による固定具の一実施形態であって、単一の固定具を示す平面図とＣ−Ｃ線断面図である。It is one Embodiment of the fixing tool by this invention, Comprising: The top view and CC sectional view which show a single fixing tool. 本発明による固定具の他の実施形態あって、ナット部を複数設けた例を示す平面図とＤ−Ｄ線断面図である。They are other embodiment of the fixing tool by this invention, Comprising: They are the top view and DD sectional view which show the example which provided the multiple nut part. 本発明による固定具周辺の断面概略図である。1 is a schematic cross-sectional view of the periphery of a fixture according to the present invention. 従来技術によるハンドルの取り付け方法の一例を示す断面説明図である。It is sectional explanatory drawing which shows an example of the attachment method of the handle | steering_wheel by a prior art. ペリクル収納容器の外観を示す斜視説明図である。It is perspective explanatory drawing which shows the external appearance of a pellicle storage container.

以下、本発明のペリクル収納容器の実施形態を添付図面に基づいて説明するが、本発明はこれらに限定されるものではない。
図１は本発明によるペリクル収納容器で、ペリクル収納容器蓋体にハンドルを設けたものに適用した実施形態である。 Hereinafter, embodiments of the pellicle storage container of the present invention will be described with reference to the accompanying drawings, but the present invention is not limited thereto.
FIG. 1 shows an embodiment in which the pellicle storage container according to the present invention is applied to a pellicle storage container lid provided with a handle.

ハンドル１１は、ペリクル収納容器蓋体１０に外側から六角孔付きボルト１２が挿入され、その内側には固定具１３が取り付けられている。六角孔付きボルト１２は、六角ボルトなど他の頭形状であっても構わない。固定具１３は内側に金属製のナット部が設けられている。固定具１３は、ナット部を圧入、接着して製造することができるほか、金属製のナット部とせず、樹脂に直接ネジ部を設けるか、さらにヘリサート加工などの補強措置を採ることも可能である。   The handle 11 has a hexagonal socket bolt 12 inserted into the pellicle storage container lid 10 from the outside, and a fixture 13 is attached to the inside thereof. The hexagon socket head cap bolt 12 may have another head shape such as a hexagon head bolt. The fixture 13 is provided with a metal nut portion inside. The fixture 13 can be manufactured by press-fitting and adhering the nut portion, and it is possible not to use a metal nut portion, but to provide a screw portion directly on the resin, or to take reinforcement measures such as helicate processing. is there.

しかし、最も好ましい実施形態は、ナット部をインサートして射出成型にて一体に製造したもので、その詳細は図３に示すような構造となっている。ナット部３０はステンレス鋼、真鍮などの金属を切削加工したもので、その外周は周囲の被覆樹脂体３１との接着力、密着性を高めるためにローレット加工などの表面を粗くする処置が施されていることが望ましい。   However, in the most preferred embodiment, the nut portion is inserted and manufactured integrally by injection molding, and the details thereof are as shown in FIG. The nut portion 30 is made by cutting a metal such as stainless steel or brass, and the outer periphery thereof is subjected to a roughening process such as knurling in order to increase the adhesive force and adhesion to the surrounding coating resin body 31. It is desirable that

そして、被覆樹脂体３１は、ネジ締め付けの際に押さえ易いよう平面部３２を設けることが良い。この平面部３２は、図３の実施形態では２面となっているが、もちろん、４面、６面、あるいは他の押さえ形状であっても構わない。しかし、複雑な形状や窪みのある形態は洗浄性が悪化するため、好ましくない。   And it is good for the coating resin body 31 to provide the plane part 32 so that it may be easy to hold down in the case of screw fastening. The planar portion 32 has two surfaces in the embodiment of FIG. 3, but may of course have four surfaces, six surfaces, or other pressing shapes. However, a complicated shape or a form with a depression is not preferable because the cleaning property is deteriorated.

また、ペリクル収納容器蓋体１０の材質としては、ＰＭＭＡ、ＡＢＳ、ＰＣ、ＰＶＣなどが好適に用いられる。色は透明または半透明であることが、内容物が視認できて好ましい。そして、この固定具１３の被覆樹脂体の材質は、ペリクル収納容器蓋体１０と接着性を有する材質とすることが良い。例えば、ペリクル収納容器蓋体１０の材質としてＡＢＳを用いた場合、固定具１３の被覆樹脂体の材質は同一のＡＢＳとするか、ＰＶＣ、ＰＳなどを好適に用いることができる。   Moreover, as a material of the pellicle storage container lid 10, PMMA, ABS, PC, PVC, or the like is preferably used. The color is preferably transparent or translucent because the contents can be visually recognized. The material of the covering resin body of the fixture 13 is preferably a material having adhesiveness to the pellicle storage container lid 10. For example, when ABS is used as the material of the pellicle storage container lid 10, the material of the covering resin body of the fixture 13 can be the same ABS, or PVC, PS, or the like can be suitably used.

この材質の選択にあたっては、ペリクル収納容器蓋体１０との接着性に加え、射出成型の容易さ、樹脂からの発ガスが少ないこと、吸水性が低いことなど、その他の物性についても総合的に考慮することが特に好ましい。   In selecting this material, in addition to adhesiveness with the pellicle storage container lid 10, other physical properties such as ease of injection molding, low gas generation from the resin, low water absorption, etc. It is particularly preferred to consider.

固定具１３のペリクル収納容器蓋体１０と接している接線部１４は、ハンドル１１を完全にネジ締結した後、接着剤（図示しない）を塗布し、固定することが好ましい。締め付け面に生じている微小な間隙に接着剤が充填されるうえ、固定の際の傷付き等も接着剤で被覆されるため発塵の恐れが低下する。このような接着剤としては、例えば、ペリクル収納容器蓋体の材質をＡＢＳとした場合には、アクリルダインＡ（商品名、サンプラテック社製）などが使用できる。   It is preferable that the tangential portion 14 in contact with the pellicle storage container lid 10 of the fixture 13 is fixed by applying an adhesive (not shown) after the handle 11 is completely screwed. Adhesive agent is filled in a minute gap formed on the tightening surface, and scratches at the time of fixing are covered with the adhesive agent, so that the risk of dust generation is reduced. As such an adhesive, for example, in the case where the material of the pellicle storage container lid is ABS, acrylic dyne A (trade name, manufactured by Sampratec) can be used.

そして、さらに好ましくは、接着剤に代えてペリクル収納容器蓋体１０、固定具１３の被覆樹脂体を共に溶解する有機溶剤のみを塗布することである。塗布後の固定具１３周辺の断面図を図５に示す。接線部１４に塗布された有機溶剤は固定具１３の被覆樹脂体３１およびペリクル収納容器蓋体１０に含浸し、溶解して、相互が溶解接着した溶着部５０が固定具１３の全周に渡って生ずる。   More preferably, instead of the adhesive, only the organic solvent that dissolves both the pellicle storage container lid 10 and the covering resin body of the fixture 13 is applied. A cross-sectional view of the periphery of the fixture 13 after application is shown in FIG. The organic solvent applied to the tangential portion 14 is impregnated into the covering resin body 31 and the pellicle storage container lid 10 of the fixture 13, dissolved, and the welded portion 50, which is melted and bonded to each other, extends over the entire circumference of the fixture 13. Occur.

これにより、固定具３１とペリクル収納容器蓋体１０の間隙から洗浄水が浸入することが完全に防止されるほか、隙間からの発塵防止ならびに洗浄性の向上を達成することができる。さらに、有機溶剤のみを使用することにより、樹脂が溶解して接着された後、塗布した有機溶剤は気化して容器表面から完全に無くなるため、接着成分からの発ガスによる不具合を完全に防止することができる。   Thereby, it is possible to completely prevent the cleaning water from entering from the gap between the fixture 31 and the pellicle storage container lid 10, and also to prevent dust generation from the gap and improve the cleaning performance. Furthermore, by using only organic solvent, after the resin is dissolved and bonded, the applied organic solvent is vaporized and disappears completely from the container surface, thus completely preventing problems caused by gas generation from the adhesive components. be able to.

このような溶剤の例としては、例えば、ペリクル収納容器蓋体１０、固定具１３の被覆樹脂体の材質をＡＢＳとした場合、ＭＥＫなどを好適に用いることができる。この選択は、使用する材質に合わせて、溶解性、蒸気圧、沸点などを考慮して適宜選択すれば良い。   As an example of such a solvent, for example, when the material of the covering resin body of the pellicle storage container lid 10 and the fixture 13 is ABS, MEK or the like can be suitably used. This selection may be appropriately selected in consideration of solubility, vapor pressure, boiling point, etc. according to the material to be used.

図２は、ペリクル収納容器本体に補強体を取り付けた実施形態を示したものである。補強体２１は容器本体２０の外側から挿入した六角孔付きボルト２２と固定具２３で固定されている。この固定具２３の詳細構造は図４に示すようになっており、ナット部３０は４箇所設けられている。   FIG. 2 shows an embodiment in which a reinforcing body is attached to the pellicle storage container main body. The reinforcing body 21 is fixed by a hexagon socket bolt 22 inserted from the outside of the container body 20 and a fixture 23. The detailed structure of the fixture 23 is as shown in FIG. 4, and four nut portions 30 are provided.

この実施形態においても前記ペリクル収納容器蓋体についての実施形態と同じく被覆樹脂体３１の材質を選択することが好ましい。そして、ネジ固定後の固定具２３とリクル収納容器本体２０との接線部２４は接着剤で接着するか、より好ましくは有機溶剤にて溶着することが良い。   Also in this embodiment, it is preferable to select the material of the covering resin body 31 as in the embodiment of the pellicle storage container lid. Then, the tangential portion 24 between the fixing tool 23 after fixing the screw and the recycle storage container main body 20 may be adhered with an adhesive or more preferably welded with an organic solvent.

以下、本発明の実施例を説明するが、本発明はこれらに限定されるものではない。   Examples of the present invention will be described below, but the present invention is not limited thereto.

［実施例１］
厚さ３ｍｍの透明ＰＭＭＡシート材を用い、真空成形法により外形１９００×１７５０ｍｍ、高さ１８０ｍｍの、図１に示すような形状のペリクル収納容器蓋体１０を成形し、外周部をＮＣルーターで所定寸法まで仕上げるとともに、ハンドル１１の取り付け孔を機械加工した。 [Example 1]
Using a transparent PMMA sheet material with a thickness of 3 mm, a pellicle storage container lid body 10 having an outer shape of 1900 × 1750 mm and a height of 180 mm as shown in FIG. While finishing to the size, the mounting hole of the handle 11 was machined.

また、図３に示すような構造の固定具１３を射出成型にて製作した。内側には真鍮製のナット部３０を設け、このナット部をインサートして黒色ＡＢＳを使用して被覆樹脂体３１を射出成型にて成型した。ここで、被覆樹脂体３１を黒色としたのは、表面に付着した異物を観察しやすくするためと、内部にインサートしたナット部３０を外部から見えないようにする外観上の配慮である。   Further, a fixture 13 having a structure as shown in FIG. 3 was manufactured by injection molding. A brass nut portion 30 was provided on the inner side, the nut portion was inserted, and the coated resin body 31 was molded by injection molding using black ABS. Here, the reason why the coating resin body 31 is made black is to make it easy to observe the foreign matter attached to the surface and to make the nut part 30 inserted in the interior invisible from the outside.

また、ハンドル１１はガラス補強繊維入りＡＢＳにて射出成型したものである。そして、この固定具１３とハンドル１１をステンレス製六角孔付きボルト１２（Ｍ８×３０ｍｍ）にて締結し、さらに固定具１３のペリクル収納容器蓋体１０との接触部に有機溶剤（ＭＥＫ）をマイクロシリンジ（図示しない）を用いて接線部１４の全周に渡って隙間無く塗布し、完全に乾燥させた。   The handle 11 is injection-molded with ABS containing glass reinforcing fibers. Then, the fixture 13 and the handle 11 are fastened with a stainless steel hexagon socket head bolt 12 (M8 × 30 mm), and an organic solvent (MEK) is added to the contact portion of the fixture 13 with the pellicle storage container lid 10. Using a syringe (not shown), the coating was applied over the entire circumference of the tangential portion 14 without any gaps, and was completely dried.

その後、このペリクル収納容器蓋体を界面活性剤と純水、ＰＶＡ製スポンジを使用して良くスクラブ洗浄し、純水ですすいだ後完全に乾燥させた。このペリクル収納容器蓋体のハンドル１０および固定具１３の周辺を暗室内で集光ランプ（光量３０万Ｌｘ）を照射しながら観察したが、この周囲に隙間や汚れ、異物付着などは見受けられず、非常に清浄な状態であった。   Thereafter, the pellicle storage container lid was thoroughly scrubbed using a surfactant, pure water, and a PVA sponge, rinsed with pure water, and completely dried. Although the periphery of the handle 10 and the fixture 13 of this pellicle storage container lid was observed in the dark room while irradiating a condenser lamp (light quantity 300,000 Lx), no gaps, dirt, foreign matter adhesion, etc. were found around this. It was in a very clean state.

［比較例］
外形が上記実施例と同一外形、寸法のハンドル付きペリクル収納容器蓋体を製作した。このハンドル部付近の断面は図６に示すようなものである。ハンドル６１にメスネジ部が設けられており、内側からシールワッシャ６２を挟んでステンレス製の六角孔付きボルト６３（Ｍ８×１５ｍｍ）で締め付け固定されている。このシールワッシャ６２の材質は、シール性を良くする為、ＰＴＦＥとし、厚さは２ｍｍとした。 [Comparative example]
A pellicle storage container lid with a handle having the same outer shape and dimensions as those of the above example was manufactured. The cross section near the handle is as shown in FIG. The handle 61 is provided with a female thread portion, and is fastened and fixed with a hexagon socket bolt 63 (M8 × 15 mm) made of stainless steel with a seal washer 62 sandwiched from the inside. The material of the seal washer 62 is PTFE and the thickness is 2 mm in order to improve the sealing performance.

このペリクル収納容器蓋体１０を上記実施例と同様にして洗浄、乾燥した後、暗室内にてハンドル部周辺を集光ランプ（光量３０万Ｌｘ）を照射しながら観察した。その結果、六角孔付きボルトの外周および六角孔内に異物が多数見受けられたほか、シールワッシャ６２の端部は六角孔付きボルト６３の締め付けにより若干の反り返り（めくれ）が生じているとともに、シールワッシャ６２とペリクル収納容器蓋体１０との隙間から洗浄水が滲み出て乾燥した跡（汚れ）があり、清浄とは言いがたい状態であった。   After this pellicle storage container lid 10 was washed and dried in the same manner as in the above example, the periphery of the handle portion was observed in the dark room while irradiating a condensing lamp (light quantity 300,000 Lx). As a result, a large number of foreign matters were found in the outer periphery of the hexagon socket head bolt and in the hexagon socket, and the end portion of the seal washer 62 was slightly warped (turned) by tightening the hexagon socket head bolt 63 and the seal washer. The cleaning water oozes out from the gap between the washer 62 and the pellicle storage container lid 10 and there is a trace (dirt) that is dried, which is difficult to say clean.

１０ ペリクル収納容器蓋体
１１ ハンドル
１２ 六角孔付きボルト
１３ 固定具
１４ 接線部
２０ ペリクル収納容器本体
２１ 補強体
２２ 六角孔付きボルト
２３ 固定具
２４ 接線部
３０ ナット部
３１ 被覆樹脂体
３２ 平面部
５０ 溶解部
６１ ハンドル
６２ シールワッシャ
６３ 六角孔付きボルト
７１ ペリクル収納容器本体
７２ ペリクル収納容器蓋体
７３ クリップ 10 Pellicle storage container lid 11 Handle 12 Hexagon socket head bolt 13 Fixing tool 14 Tangent part 20 Pellicle storage container body 21 Reinforcing body 22 Hexagon socket head bolt 23 Fixing tool 24 Tangent part 30 Nut part 31 Covering resin body 32 Flat part 50 Melting Portion 61 Handle 62 Seal washer 63 Hexagon socket head cap screw 71 Pellicle storage container body 72 Pellicle storage container lid 73 Clip

Claims (5)

ペリクルを載置するペリクル収納容器本体と、ペリクルを被覆すると共にペリクル収納容器本体と周縁部で嵌め合い係止するペリクル収納容器蓋体とからなるペリクル収納容器において、樹脂製のペリクル収納容器本体あるいはペリクル収納容器蓋体に、取っ手、ペリクルの固定部材、補強材のいずれかからなる機能部品がネジ締結手段により取り付けられているとともに、ペリクル収納容器本体あるいはペリクル収納容器蓋体の内側にオスネジ及びメスネジの表面が露出していないことを特徴とするペリクル収納容器。 In a pellicle storage container comprising a pellicle storage container main body on which a pellicle is placed, and a pellicle storage container lid that covers the pellicle and is fitted and locked at the periphery of the pellicle storage container main body, a resin pellicle storage container main body or A functional component consisting of a handle, a pellicle fixing member, or a reinforcing material is attached to the pellicle storage container lid by screw fastening means, and a male screw and a female screw are provided inside the pellicle storage container main body or the pellicle storage container lid. A pellicle storage container characterized in that the surface of the pellicle is not exposed. 上記ネジ締結手段はオスネジ、メスネジの周囲がネジ部と一体となった樹脂で被覆されているものである請求項１に記載のペリクル収納容器。 2. The pellicle storage container according to claim 1, wherein the screw fastening means is coated with a resin in which the periphery of the male screw and the female screw is integrated with the screw portion. 上記ネジ締結手段を被覆する樹脂は、接触する樹脂製のペリクル収納容器本体あるいはペリクル収納容器蓋体の材質と接着性を有する樹脂である請求項２に記載のペリクル収納容器。 The pellicle storage container according to claim 2, wherein the resin that covers the screw fastening means is a resin that has adhesiveness to the material of the resin-made pellicle storage container body or pellicle storage container lid. 上記ネジ締結手段は、機能部品の固定後、さらに接触部周囲の間隙を接着剤にて固着させてなる請求項３に記載のペリクル収納容器。 4. The pellicle storage container according to claim 3, wherein the screw fastening means further fixes a gap around the contact portion with an adhesive after the functional component is fixed. 上記ネジ締結手段は、機能部品の固定後、さらに接触部周囲の間隙を有機溶剤にて溶解して間隙を密封するものである請求項３に記載のペリクル収納容器。 4. The pellicle storage container according to claim 3, wherein the screw fastening means further seals the gap by dissolving the gap around the contact portion with an organic solvent after fixing the functional component.
JP2010027825A 2010-02-10 2010-02-10 Pellicle storage container Pending JP2011164404A (en)

Priority Applications (5)

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JP2010027825A JP2011164404A (en) 2010-02-10 2010-02-10 Pellicle storage container
KR1020100129178A KR20110093592A (en) 2010-02-10 2010-12-16 Container for receiving pellicle
TW100104440A TWI424947B (en) 2010-02-10 2011-02-10 Pellicle container
CN2011100356991A CN102169847B (en) 2010-02-10 2011-02-10 Dustproof film assembly receiving container
HK11112967.1A HK1158819A1 (en) 2010-02-10 2011-11-30 Pellicle container

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JP2016151633A (en) * 2015-02-17 2016-08-22 信越化学工業株式会社 Pellicle-housing container

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JP2008216846A (en) * 2007-03-07 2008-09-18 Asahi Kasei Electronics Co Ltd Pellicle storage container

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JP4796946B2 (en) * 2006-11-30 2011-10-19 信越化学工業株式会社 Pellicle storage container
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JP5051840B2 (en) * 2007-11-22 2012-10-17 信越化学工業株式会社 Method for storing a pellicle in a pellicle storage container

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JP2002029538A (en) * 2000-07-19 2002-01-29 Kooki Engineering:Kk Plastic bottle and manufacturing method thereof
JP2004279470A (en) * 2003-03-12 2004-10-07 Osaka Sealing Printing Co Ltd Attachment label
JP2006009853A (en) * 2004-06-23 2006-01-12 Toyoda Iron Works Co Ltd Fastening section structure of resin part
JP2006267179A (en) * 2005-03-22 2006-10-05 Shin Etsu Chem Co Ltd Pellicle storage container
JP2007245702A (en) * 2006-02-20 2007-09-27 Asahi Glass Co Ltd Method for manufacturing template and processed base material having transfer fine pattern
JP2007334069A (en) * 2006-06-16 2007-12-27 Asahi Kasei Electronics Co Ltd Pellicle storage container
JP2008216846A (en) * 2007-03-07 2008-09-18 Asahi Kasei Electronics Co Ltd Pellicle storage container

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CN102169847B (en) 2013-08-14
HK1158819A1 (en) 2012-07-20
KR20110093592A (en) 2011-08-18
CN102169847A (en) 2011-08-31
TWI424947B (en) 2014-02-01

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