TWI588598B - Take-up of the pellicle assembly container and pellicle unit Out of the way - Google Patents

Description

Pneumatic film assembly storage container and dustproof film assembly Method

The present invention relates to a pellicle container storage container for storing, storing, and transporting a pellicle for a lithography used as a dust remover when manufacturing a semiconductor device, a printed circuit board, or a liquid crystal display. And a method of taking out the pellicle assembly from the pellicle container storage container.

In the manufacture of semiconductors such as large scale integrated circuits (LSI) and Very Large Scale Integration (VLSI), or in the manufacture of liquid crystal displays, etc., it is necessary to perform semiconductor wafers or liquid crystal original boards. Light irradiation to perform patterning. At this time, as a photomask or a reticle (hereinafter, simply referred to as a "mask"), dust is attached, and the dust absorbs light or bends the light, thereby causing the light to be bent. The transferred pattern is deformed, the edges are not aligned, and the substrate is dirty, and the like, and the size, quality, appearance, and the like are also damaged.

Therefore, these operations are usually performed in a clean room, but even in this case, it is difficult to always keep the mask clean. Therefore, after attaching the pellicle as a dust protector to the surface of the mask, the light is exposed. In this case, the foreign matter does not adhere directly to the surface of the mask, but adheres to the pellicle assembly, so that the focus can be aligned with the pattern of the mask during the lithography, and the foreign matter on the pellicle assembly is turned. Print Nothing.

The pellicle film assembly is generally a pellicle film made of a highly transparent nitrocellulose, cellulose acetate or fluororesin, and a pellicle film made of aluminum, stainless steel, or a resin composite material. The upper end surface of the component frame is attached or attached. Further, at the lower end of the pellicle frame, an adhesive layer made of polybutene resin, polyvinyl acetate resin, acrylic resin, enamel resin or the like for mounting the photomask, and a release layer for protecting the adhesive layer are provided (separation) Separator).

However, such a pellicle film assembly has an effect of preventing intrusion of foreign matter to the inside of the closed space formed by the reticle, but when the pellicle is attached to the inside of the closed space, it is inside the closed space. It is difficult to prevent adhesion of foreign matter to the mask. Therefore, it is also required to have high cleanability to the pellicle assembly itself, and to maintain the cleanability of the pellicle container storage container to be used during storage and transportation. Specifically, it is required to have a material having excellent charging prevention performance, which is less likely to generate dust even during friction, a structure that can prevent the contact between the pellicle and the constituent members as much as possible, and a high rigidity against deformation when an external force is applied. structure.

Such a pellicle assembly container is usually made of Acrylonitrile butadiene styrene (ABS), polymethyl methacrylate (PMMA), or polycarbonate (Polycarbonate, A resin such as PC) is produced by injection molding or vacuum forming. The reason for using such a molding method is that it has the following advantages: smooth surface, adhesion of foreign matter, and There is less possibility of dust generation; integral forming, the possibility of dust and foreign matter intrusion in seams is small; objects of complicated shape are easy to manufacture; mass production is excellent, and cost is low.

For example, a storage container for a pellicle for a semiconductor and a printed circuit board has a side length of about 200 to 300 mm, and is usually produced by injection molding. The pellicle assembly container having a side length of 200 to 300 mm is required to have high rigidity which is hard to be deformed when an external force is applied in order to maintain the cleanability of the pellicle container storage container. Originally, it is easy to ensure rigidity when used in a small size, and In the injection molding, since the thickness is easily changed locally, since the wall thickness at an important position can be reinforced, there is little problem in terms of rigidity.

On the other hand, a large-sized pellicle container storage container having a side length of more than 500 mm, which is mainly used for a liquid crystal pellicle, is generally produced by vacuum forming using a synthetic resin sheet such as ABS or PMMA. This is because the flow distance of the resin is too long from the injection molding of one or several gates into the mold at a high speed, and thus the manufacturing method becomes difficult. In the case of vacuum forming, the mold is covered with a heated resin sheet, and a large product can be easily formed by only vacuum suction. However, it is not possible to form an object having a thick wall thickness, and the rib can be reinforced. However, basically, only sheets having the same plate thickness are bent, so that it is difficult to produce a highly rigid object.

Incidentally, in the case of the pellicle container storage container, in addition to the above-described problem of rigidity, there is a problem in how the pellicle film assembly is stored in the pellicle film container. For example, Patent Document 1 describes that a pellicle film assembly is placed on a mounting table and supported by a support body, and the inside of the cover body is provided. The contact portion of the surface presses the upper end surface of the pellicle frame to hold and fix the pellicle module without moving up and down and horizontally. According to this method, the dust-proof film module and the respective portions of the container are rubbed against each other, and there is an advantage that dust or the like is less likely to occur, and the number of components is small. Therefore, it is generally used in a small-sized semiconductor pellicle.

However, in the case of using the storage method, the lid body and the pellicle container storage container body are formed with high precision, and cannot be used in a large liquid crystal pellicle container storage container having a side length of more than 500 mm. The reason for this is that in the case of vacuum forming of such a large-sized pellicle container storage container, it is difficult to obtain a molded article having high precision, and the rigidity of the container itself is difficult to secure, and it is difficult to avoid the container during handling and transportation. The deformation, in which case, the friction of the container and the pellicle frame is generated to cause dust, and the quality is lowered.

Therefore, as a method of accommodating a large-sized pellicle having a side length of more than 500 mm, Patent Document 2 describes that a part of a liner that protects the viscous adhesion layer protrudes outward, and an adhesive tape is used. A method of accommodating it on the container body. However, in the case of this storage method, there is a problem that the work has to be performed by a human hand, and it is difficult to fix it on a tray in a clean state. In addition, when the tape is peeled off and taken out, there is a fear that a human hand approaches the vicinity of the pellicle frame, and foreign matter adheres.

Further, Patent Document 3 describes a storage method in which a needle insertion needle is provided on the outer surface of the pellicle frame to fix the pellicle assembly on the container body. In the case of this storage method, due to the hand during loading and unloading The pellicle is not approached, and the possibility of adhesion of foreign matter from the worker is small. However, there is a problem that the insertion position of the needle is continuously maintained during transportation. In order to solve this problem, Patent Document 4 describes a method of fixing a needle to an insertion position. According to this method, a simple structure can be used, and the needle can be reliably fixed during transportation.

Further, Patent Document 5 describes a dust-proof membrane module storage container in which the foreign matter adhered during the removal of the needle is further reduced, and the lid of the container is closed, and the dust can be removed from the outside of the container. The film assembly is operated with a fixed needle to remove the pellicle assembly from the container body. In the case of the pellicle assembly container, the release of the needle, which is likely to cause foreign matter adhesion to the pellicle, is performed in a state in which the cover is closed, and is operated from the outside of the container. : When the needle is released, foreign matter from the worker adheres to the pellicle.

In addition, in the dust-proof membrane module storage container, after the pellicle film assembly is released from the container body, the lid body is opened, and the pellicle film assembly is taken out by a processing jig or the like, so that the worker is close to the dustproof The time required for the film assembly is shortened, so that the possibility of adhesion of foreign matter from the worker is greatly reduced. Further, if the needle is first released, the operation of opening the lid and taking out the pellicle assembly is facilitated, and in particular, the removal operation of the pellicle assembly by the automatic machine becomes suitable.

[Advanced technical literature]

[Patent Literature]

[Patent Document 1] Japan Real Fair 6-45965

[Patent Document 2] Japanese Patent Laid-Open No. 2004-361647

[Patent Document 3] Japanese Patent No. 4391435

[Patent Document 4] Japanese Patent No. 5586559

[Patent Document 5] Japanese Patent No. 5586560

However, the pellicle assembly container described in Patent Document 5 has a problem that the structure of the pellicle assembly fixing portion 18 is complicated. For example, in the pellicle fixing portion 18, as the rotation preventing member for preventing the rotation of the needle 28, the columnar portion 44 formed by the rear end portion of the needle 28 and the stopper portion where the unevenness is stopped is protruded. Therefore, there is a problem in that it is difficult to ensure the mounting accuracy of the rotation preventing member in terms of manufacturing and operation. In addition, since the needle 28, the needle attachment portion 32, and the like and the rotation preventing member are attached by the opening portion 14a provided on the side surface of the large cover body of the manufacturing error, it is difficult to perform the positional accuracy of the tip end portion of the needle 28. Management issues. Therefore, in the case where the pellicle pack storage container is mass-produced, the position adjustment work of the needle 28 and the rotation preventing member must be performed individually for each of the pellicle container storage containers, and it is practically difficult to use the amount of the product. problem.

Therefore, the present invention has been made in view of the above problems of the pellicle container storage container, and the object of the present invention is to provide an improved object. The dust-proof membrane module storage container is easy to manufacture and mass-produce the dust-proof membrane module storage container, and has a simple structure. Even when the lid body is fitted to the container body, the needle can be fitted and removed. Further, a method of taking out a pellicle is provided, and when the pellicle is taken out from the pellicle container, the adhesion of foreign matter is reduced.

In order to achieve the above object, the present inventors have made intensive studies on the needle of the conventional pellicle assembly fixing portion, and the needle operation portion is provided while the needle is fitted and released. The subsequent device has been modified to make it possible to simplify the complicated structure of the conventional pellicle assembly fixing portion.

That is, the present invention is a pellicle assembly container including: a container body that houses the pellicle assembly; and a cover that covers the container body and is fitted and stopped at a peripheral portion thereof, wherein the container body is loaded on the container body Provided are: a needle, and a needle supporting device, wherein a horizontally movable leading end portion of the needle is inserted into a recess provided on a side of the pellicle frame, the needle supporting device fixes the needle; An opening that penetrates into the interior of the container body is provided, and the needle operating portion is provided in the needle, and the needle operating portion is provided in the direction from the needle body to the opening of the lid body. The upper end portion of the needle operation portion is attached to the adhesive sheet attached to seal the opening portion.

Further, it is preferable that the needle of the present invention is fitted and fixed to the needle supporting device by a turning operation centering on the needle shaft portion, and it is more preferable that the protruding portion provided on the needle is The notch portion provided on the needle support device is embedded Fixed.

Further, in the method for extracting a pellicle according to the present invention, the adhesive sheet attached to the opening of the lid of the pellicle container storage container is peeled off, and the opening is opened, and the lid is placed on the container body. In the state in which the fitting is stopped, the needle operating portion is operated from the outside of the lid body, the tip end portion of the needle inserted into the concave portion is pulled out, the pellicle assembly fixed to the container body is released, and then the lid body is removed , remove the pellicle assembly.

According to the present invention, there is provided a pellicle assembly container having a simple structure suitable for mass production, in which the needle of the pellicle assembly fixing portion can be surely fixed, and the pellicle assembly accommodated therein is not damaged. The possibility of adhesion to foreign matter to the pellicle assembly and high reliability. In addition, when the pellicle is taken out, the adhesive sheet of the lid is peeled off, the opening is opened, and the tip end portion of the needle inserted into the concave portion of the pellicle frame is pulled out, and the lid body is fitted in the container body as it is. Then, the pellicle film assembly can be easily released from the container body, whereby the adhesion of the foreign matter brought in by the worker with the take-out operation is reduced.

10‧‧‧Plastic membrane assembly storage container

11‧‧‧ container body

12‧‧‧ Cover

12a‧‧‧ openings

12b‧‧‧Adhesive film

13‧‧‧ needle

13a‧‧‧ Needle shaft

13b‧‧‧ needle body

13c‧‧‧Steps

13d‧‧‧Needle operation department

13e‧‧‧Protruding

13f‧‧‧ apex

14‧‧‧needle support device

14a‧‧‧Needle insertion

14b‧‧‧Importing Department

14c‧‧‧Gap section

15‧‧‧ Elastomers

20‧‧‧Pneumatic film assembly

21‧‧‧Plastic membrane assembly frame

22‧‧‧ recess

23‧‧‧Photo Mask Adhesive Layer

24‧‧‧Separator

25‧‧‧Pipe film assembly film adhesive layer

26‧‧‧Pattern film assembly film

30‧‧‧Plastic film assembly fixing part (Comparative example)

31‧‧‧ needle

31a‧‧‧ Needle shaft

31b‧‧‧ needle body

31c‧‧‧Steps

31e‧‧‧Protruding

31f‧‧‧ hexagonal hole

Fig. 1 is a perspective view of an embodiment of the present invention.

Fig. 2 is a plan view showing an embodiment of the present invention.

Fig. 3 is a plan view (cover perspective) of an embodiment of the present invention.

Fig. 4 is a cross-sectional view taken along line AA of Fig. 3 according to an embodiment of the present invention.

Fig. 5 is an enlarged view of a portion B of Fig. 4 (a pellicle assembly fixing portion) according to an embodiment of the present invention.

Fig. 6 is a perspective view of a needle supporting device according to another embodiment of the present invention.

Fig. 7 is a perspective view of a needle having a projection according to another embodiment of the present invention.

Fig. 8 is a perspective view showing a combination of a needle having a projection and a needle supporting device according to another embodiment of the present invention.

Fig. 9 is a perspective view of a pellicle assembly fixing portion in which a needle having a projection portion and a notch portion of a needle supporting device are combined according to another embodiment of the present invention.

Fig. 10 is a perspective view of a pellicle assembly fixing portion of a comparative example.

Hereinafter, an embodiment of the present invention will be described in detail based on the drawings. The present invention has a large effect in the case of housing a container for storing a dust-proof membrane module having a side length of more than 500 mm and mainly used for a large-sized pellicle module for display manufacturing purposes, but it is also applicable to a side length. The pellicle for manufacturing a semiconductor substrate having a thickness of about 150 mm or a printed circuit board having a side length of about 300 mm is not limited in its use and size.

As shown in FIG. 1, the pellicle film container 10 includes a container body 11 on which the pellicle unit 20 is placed, and a lid body 12 that is fitted over the peripheral portion while covering the container body 11. . Cover 12 and container The body 11 is preferably joined by a clip (not shown) or a buckle (not shown), or sealed by an adhesive tape (not shown).

The container body 11 and the lid body 12 are made of resin such as ABS, PC, PMMA, or polyvinyl chloride (PVC) by injection molding or vacuum forming; preferably, it is easy to adhere to foreign matter. The degree of discovery makes the container body 11 black, and the lid body 12 is made transparent in order to facilitate confirmation of the inside. Moreover, from the viewpoint of prevention of adhesion of foreign matter, it is preferred to incorporate a conductive material into the resin material or apply a coating on the surface to impart a charging prevention function.

In a particularly large storage container having a side length of the pellicle of more than 1000 mm, in order to ensure rigidity, a reinforcing body made of metal or fiber reinforced plastic or the like may be attached to the outside of the container body 11, but the body of the pellicle assembly container 10 is provided. It can also be made of light metal such as aluminum alloy.

On the container body 11, as shown in Fig. 3, the needle support devices 14 are mounted by bolts (not shown), in which the needle shaft portion 13a of the needle 13 is inserted, so that it can be formed less biased and The gap that was smoothly pulled out.

Regarding the needle 13, a resin such as epoxy resin, ABS, polyphenylene sulfide (PPS), polyethylene (PE), polyaryletherketone (PEEK), or the like is used for injection molding or transfer molding. It is produced by integral molding such as transfer molding. If necessary, it is preferable to increase the strength by mixing a filler such as glass fiber or the like. Further, in order to secure the rigidity of the needle shaft portion 13a of the needle 13, a metal structure such as stainless steel may be used. It is also preferable that the needle shaft portion 13a of the needle 13 is press-fitted into the needle main body 13b made of resin or the like.

In the same manner as the needle 13, the needle support device 14 is preferably molded by injection molding, transfer molding, or the like using a resin such as epoxy resin, ABS, PPS, PE, or PEEK. The number of the needles 13 for fixing the pellicle frame 21 is four in the present embodiment. However, other numbers, for example, the pellicle frame having a particularly long side length may be six or eight. At the office. Further, in the present embodiment, the long side and the short side may be provided on the long side, but the short side may be provided.

A step portion 13c is provided at the tip end portion 13f of the needle 13, and the elastic body 15 is embedded in the step portion 13c. Preferably, the concave portion 22 of the pellicle frame 21 is not directly in contact with the needle member, which is because Prevent dust from happening. The shape is such that the ring-shaped object as illustrated in FIG. 5 is inserted into the small-diameter portion of the needle tip end, and the step portion itself is formed into an elastic body and attached (not shown). As the material of the elastic body 15, Nitrile rubber, Ethylene propylene rubber, silicone rubber, fluorine rubber or the like can be used.

Fig. 5 is a perspective view showing an embodiment of a pellicle fixing portion of the present invention. As shown in FIG. 5, the pellicle film assembly 20 is supported by the insertion of the needle 13 in the recess 22 provided near the corner of the pellicle frame 21, and the needle 13 is supported by the needle support device 14 on the container body 11. . Here, the needle 13 is provided with a needle operating portion 13d that extends from the needle body 13b toward one of the lids 12. Needle operation The portion 13d may be integrally molded by the same resin as the entire needle 13, or a hole may be provided in the needle body 13b, and a rod-shaped member made of a metal such as stainless steel may be press-fitted or formed.

As shown in FIG. 5, the lid body 12 near the upper side of the needle operation portion 13d is provided with an opening portion 12a penetrating therethrough, and the opening portion 12a is sealed by adhesion of the adhesive sheet 12b. The opening 12a is formed by cutting after the lid body 12 is formed, and is minimized in order to minimize the rigidity of the lid body 12, and the minimum size required for the operation of the needle operation portion 13d is it is good. Further, the shape may be circular, elliptical, rectangular, or the like, but from the viewpoint of improving cleanliness, it may be formed into a shape having no angle, preferably in the range of about 20 x 20 mm to 40 x 40 mm.

The needle operating portion 13d extending from the needle body 13b has a length at which the leading end reaches a position flush with the outer plane of the lid body 12, and the needle operating portion 13d is brought into contact with (adhere) and fixed to the adhesive sheet 12b. The adhesive sheet 12b is attached to seal the opening 12a.

When the pellicle film assembly 20 is taken out, the adhesive sheet 12b is peeled off, and the opening portion 12a appears, and the fixing of the needle operation portion 13d is released. Then, the tip end portion 13f of the needle 13 can be pulled out from the concave portion 22 of the pellicle frame 21 by the retracting operation of the needle operating portion 13d to release the fixing of the pellicle assembly 20 on the container body 11.

Further, before the lid body 12 is detached, the inside and the outside of the pellicle membrane storage container 10 are ventilated by the opening portion 12a, so that the lid body 12 is not detached. In addition, it is expected that the inside of the container becomes a negative pressure, and it is also possible to prevent the foreign matter from being caught.

The pellicle film assembly 20 of the present invention is not particularly limited except that the concave portion 22 is provided on the side surface of the pellicle frame 21. Further, the concave portion 22 is preferably a circular hole having a diameter of 0.5 to 4 mm and a depth of 1 to 5 mm due to fitting and processing with the tip end portion 13f of the needle 13, but other shapes are also possible.

The pellicle frame 21 is made of a metal such as an aluminum alloy, a resin or a resin composite material, and the like, and a vent hole (not shown) and a filter for covering the surface thereof may be provided thereon. ) (not shown). Further, on the side surface, grooves, recesses, and the like may be provided at various positions for the treatment.

On one surface of the pellicle frame 21, as shown in Fig. 5, a mask adhesive layer 23 is formed, and a separation sheet 24 for protection is attached to the surface. The pellicle frame 21 has a rectangular shape as a general shape, but may have other shapes such as a polygonal shape or a circular shape. The separator 24 may be omitted if there is another device instead of it for protecting the mask adhesive layer 23. Further, on the surface on the opposite side of the reticle adhesive layer 23, the pellicle film-attached layer 25 is provided, and the pellicle film 26 is stretched.

In an embodiment of the pellicle assembly fixing portion shown in Fig. 5, the fixing of the needle 13 on the needle supporting device 14 depends only on the adhesion of the adhesive sheet 12b and the needle operating device 13d, and there is a slight deficiency in reliability.

Therefore, in order to make the fixation of the needle 13 more reliable, the use of FIG. 6 and FIG. 7 In another embodiment shown, this is preferred. That is, the protrusion 13e is provided in a part of the needle 13, and the notch part 14c fitted in the protrusion part 13e is also provided in the needle support apparatus 14. In this embodiment, the fitting operation/release is made possible by the turning operation centering on the needle shaft portion 13a, and the operation portion 13d extending from the needle body 13b is also provided. Such a combination, such as the needle 13 by the turning operation When it is fixed, it becomes an embodiment of the pellicle assembly fixing part shown in FIG.

Fig. 9 is a perspective view showing another embodiment in which the needle 13 on the needle holding device 14 is more reliably fixed by the pellicle assembly fixing portion shown in Fig. 8 in addition to the adhesive sheet 12b and the needle operating device 13d.

In another embodiment shown in FIG. 9, the needle supporting device 14 has a needle insertion portion 14a as a hole and an introduction portion 14b of a U-shaped groove that is opened in one direction, as shown in FIG. A notch portion 14c is further provided in a part of the introduction portion 14b. As shown in FIG. 8, the projection 13e is inserted into the needle 13 until it collides with the depth of the introduction portion 14b of the needle holding device 14, and is designed to be rotated, the projection 13e and the notch portion 14c. Chimerism. Then, with this configuration, the needle can be engaged and released by the turning operation. The angle of rotation operation at this time is preferably from 30 to 180 degrees, more preferably from 45 to 90 degrees, from the viewpoints of workability and the accuracy of fitting.

Similarly to the embodiment shown in Fig. 5, the needle operation portion 13d has a length that is flush with the outer surface of the lid body 12, and the needle operation portion 13d is fixed (and then) in contact with the adhesive sheet 12b. The adhesive sheet 12b is attached so that the opening 12a can be sealed. In addition, in this other embodiment, such as As shown in Fig. 9, by fitting the notch portion 14c of the needle holding device 14 and the projection 13e of the needle 13, the position of the needle 13 is fixed, and the needle operating portion 13d is further passed through the adhesive sheet 12b on the lid 12. The contact is (fixed) and fixed, so that the position of the needle 13 can be fixed more surely.

In the embodiment shown in Figs. 5 and 9 of the present invention, the cover member 12 is not provided with any mechanical member for holding the position of the needle 13, and the manufacturing error of each member and the accumulation of assembly errors are small. Further, the fixing of the needle 13 and the operation from the outside are achieved by a simple configuration in which the needle operation portion 13d and the opening portion 12a and the adhesive sheet 12b provided on the lid body 12 are combined, and therefore the tolerance for the dimensional error is large. It is extremely suitable for mass production.

Further, in the embodiment shown in Fig. 9, the operation method is not greatly different from the embodiment shown in Fig. 5, and only the rotation operation of the needle 13 is added. In other words, the adhesive sheet 12b attached to the lid 12 is peeled off, and after the opening 12a is opened, a needle engageable or similar tool is used from the outside of the lid 12 to rotate the needle operating portion 13d. 13 and the fitting of the needle supporting device 14 are released, and then retracted, and the leading end portion 13f of the needle 13 inserted into the concave portion 22 of the pellicle frame 21 is pulled out, thereby concluding the container body 11 and the pellicle assembly 20. Lifted. Then, the lid body 12 is removed, and the pellicle film assembly 20 can be taken out by a processing jig (not shown) or the like.

Therefore, even in the embodiment shown in Fig. 9, when the hand of the worker accompanying the release of the needle approaches the pellicle assembly, the pellicle assembly 20 is covered by the cover 12, so that the foreign matter from the worker can be attached. Decrease in magnitude.

[Examples]

Hereinafter, embodiments of the invention will be described in detail. In the embodiment, first, the container body 11 having the shape shown in Figs. 1, 2, 3, and 4 and the lid body 12 fitted thereto are formed by vacuum forming using a sheet of resin. Fig. 1 is a perspective view showing the state in which the two are combined, the outer size being 1080 x 960 mm and the height being 92 mm. The container body 11 is black and has a thickness of 5 mm of hard-to-burn ABS. The lid body 12 is a transparent, hard-to-burn PMMA having a thickness of 5 mm, and is subjected to charge-preventing coating after the molding (trade name: SEPLEGYDA, manufactured by Shin-Etsu Polymer Co., Ltd.).

Next, the ABS is injection-molded, and the needle supporting device 14 is produced, and the PPS is injection-molded to produce the needle 13. 6 and 7 are perspective views of detailed shapes, and Fig. 8 is a perspective view showing a state in which the two are combined.

As shown in FIG. 7, the needle 13 has a needle shaft portion 13a, a needle body 13b, a needle operation portion 13d, and a projection portion 13e. The needle shaft portion 13a is produced by mechanical cutting of SUS304 stainless steel, and is press-fitted into the needle body 13b in which the PPS resin is injection molded. Further, the needle operation portion 13d is also mechanically cut by SUS304 stainless steel, and is pressed into the hole provided in the needle body 13b. Further, a step portion 13c is provided at the tip end of the needle shaft portion 13a, in which an annular elastic body 15 made of fluororubber having a thickness of 0.5 mm is fitted.

On the other hand, the needle supporting device 14 has a needle insertion portion 14a, an introduction portion 14b, and a notch portion 14c as shown in Fig. 6 . Then, the needle shaft portion 13a of the needle 13 is inserted into the needle insertion portion 14a of the needle holding device 14, and is rotated 45 in the right direction. In the case of the degree, the protruding portion 13e is fitted into the notch portion 14c of the needle supporting device, and the needle 13 and the needle supporting device 14 are combined as shown in Fig. 8 .

Next, the components combined in the state shown in Fig. 8 are placed on the container body 11, and as shown in Fig. 9, the fitting position of the needle 13 in the concave portion 22 provided on the pellicle frame 21 is adjusted. The outside is mounted with stainless steel bolts (not shown). Further, when the lid body 12 is fitted to the container body 11, an angular hole 12a having a size of 20 x 30 mm is provided by machining in the field directly above the needle operating portion 13d.

Then, the pellicle assembly container 10 thus assembled is mass-produced at a time, and the pellicle assembly 20 is actually stored, and the state of the installation is confirmed. It is known that there are no parts exchange and readjustment, and 20 units are necessary. All of them maintain the quality of the complete use.

Next, the pellicle assembly container 10 is carried to the level 10 (Class The clean room of 10) is well washed with a surfactant and pure water, and then completely dried. Then, in order to evaluate the pellicle container storage container 10, the pellicle film assembly 20 was housed and a transport test was performed.

The pellicle assembly 20 used in this test has an outer dimension of 937.5 x 756 mm, an inner dimension of 925.5 x 740 mm, and a height of about 7.2 mm. Further, the pellicle frame 21 used was made of A5052 aluminum alloy, and was subjected to a surface black alumite treatment, and the outer dimensions were 937.5 x 756 mm, the inner dimensions were 925.5 x 740 mm, and the height was 5.8 mm. Further, the corner portion is the outer side R5, and the inner side is the R2 side, and at each of the long sides, four points of φ 1.5 mm are provided at intervals of 100 mm. A hole (not shown) and two recesses 22 having a diameter of φ 2.5 mm and a depth of 1.8 mm are provided at intervals of 850 mm. In the vent hole, a film made of polytetrafluoroethene (PTFE) was used, and the sheet filter was attached with an acrylate adhesive.

As the reticle adhesive layer 23, while using a ruthenium adhesive (manufactured by Shin-Etsu Chemical Co., Ltd.) having a thickness of about 1.2 mm, the release agent was applied as a separator 24 with a thickness of 0.1 mm for surface protection. Polyethylene terephthalate (PET) sheets were installed. As the adhesive layer 25 of the pellicle film 26, a ruthenium adhesive (manufactured by Shin-Etsu Chemical Co., Ltd.) having a thickness of about 0.1 mm is applied, and on the upper surface, fluorine having a thickness of 3.0 μm as the pellicle film 26 is adhered. Resin (trade name: CYTOP, manufactured by Asahi Glass Co., Ltd.).

Then, the pellicle film assembly 20 is carried into the dark room, and the foreign matter is inspected by the spotlight, and then placed on the container main body 11 of the pellicle assembly container 10, and the tip end portion 13f of the needle 13 is inserted into the pellicle assembly. The concave portion 22 on the side surface of the frame 21 is fitted to the notch portion 14c of the needle holding device 14 by a turning operation. Then, the lid member 12 is closed, and the adhesive sheet 12b made of a PET adhesive tape is attached to the opening 12a, and the opening 12a is sealed, and the adhesive sheet 12b and the needle operating portion appearing from the opening 12a are formed. The end of 13d is followed.

In addition, a PET-made adhesive tape (not shown) having a width of 35 mm is attached and fixed to the peripheral portion of the container body 11 and the lid body 12, and the PVC bag is electrically sealed by internal cleaning and cleaning, and is double-packed. Internal configuration with buffer The material is stored in a corrugated cardboard box (not shown).

The pellicle assembly container 10 thus packaged is loaded on a truck and transported for about 1000 km. Then, the dust-proof membrane module storage container 10 after the conveyance is carried into the clean room of the tenth stage, and the inside is confirmed, and it is found that the adhesive sheet 12b attached to the lid body 12 is kept in a sealed state.

Further, the adhesive sheet 12b is peeled off, and the inside of the container is visually observed. The protruding portion 13e of the needle 13 is fitted into the notch portion 14c of the needle holding device 14, and the tip end portion 13f of the needle 13 is also associated with the pellicle frame 21 The recess 22 is in a fitted state.

Then, the needle 13 is rotated by the operation portion 13d by the needle portion (not shown) having the rubber end, and the lid body 12 is removed by about 10 mm to the rear, and the lid body 12 is removed, and the inside is confirmed, and the dust-proof film can be seen. The assembly 20 is placed on the container body 11 without any abnormality. Then, in this state, the periphery was darkened, and the container body 11 and the pellicle film assembly 20 were irradiated with a spotlight, and the surface was observed, and it was found that no foreign matter adhered.

The dust-proof film module 20 is covered by the lid body 12 during the operation of pulling out the needle 13 and releasing the pellicle film assembly 20 from the container body 11, so that there is no need to worry that foreign matter from the operator's hand is attached to the pellicle. On the 20th, the job can be carried out extremely easily. Further, when the lid body 12 is detached, it is ventilated from the opening portion 12a, and the lid body 12 can be smoothly picked up.

Finally, the pellicle film assembly 20 released from the container body 11 is transported into the dark room using a dedicated processing jig (not shown), and is attached to the surface with a spotlight. The foreign matter is inspected, and the pellicle assembly 20 is completely free from foreign matter and is in an extremely clean state.

[Comparative example]

FIG. 10 is a perspective view of the pellicle assembly fixing portion 30 produced for comparison. In the comparative example, the pellicle assembly fixing portion 30 has the needle 31 and the needle supporting device 14, and the manner in which the needle is inserted and fixed in the concave portion of the pellicle frame is the same as that of the above embodiment, but As shown in Fig. 10, the needle 31 is different from the embodiment in that the device corresponding to the needle operating portion 13d of the embodiment is not provided. Further, the needle supporting device 14 is provided with the protruding portion 31e as in the embodiment.

In the needle 31 of the comparative example, the needle shaft portion 31a, the needle main body 31b, and the projection portion 31e are formed by press-fitting the needle shaft portion 31a made of SUS304 stainless steel into the needle main body 31b for injection molding of the PPS resin. Further, the protruding portion 31e is configured to be fitted to the notch portion 14c of the needle supporting device 14 when the needle 31 is rotated, and the protruding portion is covered when the needle 31 is slidably fixed. The height of 31e is set to a height to be in contact with the inner surface of the cover 12. Further, a hexagonal hole 31f for operation is provided at the end of the needle body 31b, and an elastic body 15 made of fluororubber is attached to the step portion 31c at the tip end of the needle shaft portion 31a.

In the comparative example, in the same manner as in the embodiment, after the pellicle assembly 20 of the same specification as that of the embodiment is housed in the container body, the lid body is fitted to the container body, and the pellicle assembly container is assembled. In the lid body 12, an object corresponding to the opening portion 12a and the adhesive sheet 12b of the embodiment is not provided.

Then, the dust-proof membrane module storage container thus assembled is loaded into the dust-proof chamber of the 10-stage after carrying out the same transport test, and then the cover is removed from the container body. After the internal confirmation, it was found that the pellicle film assembly 20 was in a state in which the needle 31 was securely fixed on the container body.

Further, after the operator's hand is well blown and washed, the hex wrench is carefully inserted into the hexagonal hole 31f at the rear end of the needle 31, and the needle 31 is rotated to release the fitting, and the needle 31 is moved backward. , pulled out from the recess 22 . Then, the state is kept dark, and the surroundings are observed by the spotlight, and the surface of the container body and the pellicle assembly 20 are observed, and the film surface of the pellicle film assembly 20 is cleaned, but the container body and the pellicle assembly are fixed. Around 30, it was found that there were several scattered foreign bodies with a size of 5~20μm.

Further, in the comparative example, the release operation of the needle 31 is performed in a state in which the lid body is detached from the container body, that is, a state in which the pellicle film surface is exposed, which is performed with great care, but as in the embodiment. The required time for the lid body to be released in the state in which the container body is fitted is about 1.5 times.

Finally, the pellicle film unit 20 that has been released from the container body is carried into the dark room using a dedicated processing jig (not shown), and the foreign matter adhering to the surface is inspected by the spotlight, and it is found that the pellicle film is provided on the film. One foreign matter having a diameter of 10 to 20 μm is attached. The foreign matter can be easily removed by a blow of a pressure of 2 kgf/cm ² , but the film surface of the pellicle film 20 is clean when viewed on the container body, so it is presumed that the pellicle assembly 20 is in the slave container. When the main body 11 is lifted, the foreign matter on the container body is rolled up and adheres to the film surface of the pellicle.

11‧‧‧ container body

12‧‧‧ Cover

12a‧‧‧ openings

12b‧‧‧Adhesive film

13‧‧‧ needle

13a‧‧‧ Needle shaft

13b‧‧‧ needle body

13c‧‧‧Steps

13d‧‧‧Needle operation department

13f‧‧‧ apex

14‧‧‧needle support device

15‧‧‧ Elastomers

20‧‧‧Pneumatic film assembly

21‧‧‧Plastic membrane assembly frame

22‧‧‧ recess

23‧‧‧Photo Mask Adhesive Layer

24‧‧‧Separator

25‧‧‧Pipe film assembly film adhesive layer

26‧‧‧Pattern film assembly film

Claims (4)

A dustproof membrane module storage container comprising: a container body for accommodating a pellicle film assembly; and a lid covering the container body, and engaging and stopping at a peripheral portion of the lid body, on the container body Provided with a needle and needle support device, wherein the needle has a step portion in which an elastic body is embedded, the needle is movable in a horizontal direction, and a tip end portion of the needle is located in front of the elastic body, the tip end portion a needle inserted into a side surface of the pellicle frame, the needle supporting device fixing the needle, wherein the lid body is provided with an opening penetrating into the interior of the container body, and the needle is disposed at the needle a needle operating portion, the needle operating portion is perpendicular to the needle shaft portion and extends upward from the needle body to an opening of the lid body, and the upper end portion of the needle operating portion is attached to seal the opening portion The attached adhesive sheet is in contact, and the needle operating portion is then fixed. The pellicle container storage container according to the first aspect of the invention, wherein the needle is fixed to the needle supporting device by a turning operation centering on the needle shaft portion. The pellicle assembly container according to the second aspect of the invention, wherein The needle is fixed by fitting a projection provided on the needle to a notch provided in the needle supporting device. A method for extracting a pellicle assembly according to any one of claims 1 to 3, wherein the pellicle assembly is taken out, wherein the cover is The adhesive sheet attached to the opening is peeled off, and after the opening is opened, the needle operating portion is attached from the outside of the cover in a state in which the lid is fitted and stopped in the container body. When the operation is performed, the tip end portion of the needle inserted into the concave portion is pulled out, the pellicle film assembly fixed to the container body is released, and then the lid body is removed to take out the pellicle film assembly.