KR101223967B1 - Pellicle container - Google Patents

Pellicle container Download PDF

Info

Publication number
KR101223967B1
KR101223967B1 KR1020050126676A KR20050126676A KR101223967B1 KR 101223967 B1 KR101223967 B1 KR 101223967B1 KR 1020050126676 A KR1020050126676 A KR 1020050126676A KR 20050126676 A KR20050126676 A KR 20050126676A KR 101223967 B1 KR101223967 B1 KR 101223967B1
Authority
KR
South Korea
Prior art keywords
pellicle
container
frame
container body
resin
Prior art date
Application number
KR1020050126676A
Other languages
Korean (ko)
Other versions
KR20060102264A (en
Inventor
사토시 노자키
카즈토시 세키하라
Original Assignee
신에쓰 가가꾸 고교 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 신에쓰 가가꾸 고교 가부시끼가이샤 filed Critical 신에쓰 가가꾸 고교 가부시끼가이샤
Publication of KR20060102264A publication Critical patent/KR20060102264A/en
Application granted granted Critical
Publication of KR101223967B1 publication Critical patent/KR101223967B1/en

Links

Images

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/42—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for ampoules; for lamp bulbs; for electronic valves or tubes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Library & Information Science (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

수납하는 펠리클에 이물이 부착되지 않도록 하고, 펠리클의 오염손상을 방지해서 품질을 유지할 수 있는 포토리소그래피용 펠리클 수납용기를 제공한다.Provided is a pellicle container for photolithography which prevents foreign matter from adhering to a pellicle to be stored and prevents damage to the pellicle and maintains quality.

펠리클을 적재하는 용기본체와, 펠리클을 피복함과 아울러 용기본체와 서로 둘레 가장자리에서 끼워 맞춰져 걸리는 덮개체로 이루어지는 펠리클 수납용기에 있어서, 펠리클 프레임 외측면에 형성된 구멍에 프레임유지핀을 삽입해서 펠리클을 유지한다. 상기 용기본체가 수지이며, 상기 용기본체에 금속부품이 접합되어 있는 것인 것, 펠리클을 유지하는 상기 프레임유지핀을 위치결정하는 위치결정부품과 용기본체에 접합된 상기 금속부품이 기계적으로 연결되어 있는 것, 펠리클을 유지하는 상기 프레임유지핀의 펠리클 프레임과의 접촉부에 탄성체를 설치한 것이 각각 바람직하고, 또한, 상기 용기본체 및 상기 덮개체의 재질이 수지이며, 그들의 표면저항값이 1×1012Ω/square 이하인 대전방지성능을 갖고 있는 것이 더욱 바람직하다.In a pellicle container comprising a container body for loading a pellicle and a cover body which covers the pellicle and is fitted at the circumferential edges with each other, the pellicle is held by inserting a frame retaining pin into a hole formed in the outer surface of the pellicle frame. do. The container body is made of resin, and the metal parts are joined to the container body, the positioning parts for positioning the frame holding pin for holding the pellicle and the metal parts joined to the container body are mechanically connected. It is preferable that an elastic body is provided at the contact portion with the pellicle frame of the frame holding pin for holding the pellicle, and the material of the container body and the cover body is resin, and the surface resistance thereof is 1 × 10. More preferably, it has an antistatic performance of 12 Ω / square or less.

Description

펠리클 수납용기{PELLICLE CONTAINER}Pellicle container {PELLICLE CONTAINER}

도 1은, 본 발명에 의한 펠리클 수납용기의 일실시형태를 나타내는 단면설명도이다.1 is an explanatory cross-sectional view showing an embodiment of a pellicle container according to the present invention.

도 2는, 본 발명에 의한 펠리클 수납용기의 일실시형태의 프레임 유지부를 나타내는 부분확대도이다.Fig. 2 is a partially enlarged view showing the frame holder of the embodiment of the pellicle storage container according to the present invention.

도 3은, 본 발명에 의한 펠리클 수납용기의 일실시형태의 용기본체의 표면을 설명하는 도면이며, (a)는 표면설명도, (b)는 용기본체의 단면설명도이다.3 is a view for explaining the surface of the container body of one embodiment of the pellicle container according to the present invention, (a) is a surface explanatory diagram and (b) is a cross-sectional explanatory diagram of the container body.

도 4는, 본 발명에 의한 펠리클 수납용기의 일실시형태의 용기본체의 이면을 설명하는 도면이며, (a)는 용기본체의 단면설명도, (b)는 이면설명도이다.4 is a view for explaining the back surface of the container body of one embodiment of the pellicle container according to the present invention, (a) is a cross-sectional explanatory view of the container body, and (b) is a back explanatory view.

도 5는, 종래의 펠리클 수납용기를 나타내는 설명도이다.5 is an explanatory view showing a conventional pellicle container.

<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

1 용기본체1 container body

2 덮개체2 cover

3 프레임유지핀3 Frame retaining pin

4 핀고정부품4-pin fixing part

5 보강 금속부품5 Reinforced metal parts

6 펠리클 프레임6 pellicle frame

7 펠리클막7 pellicle membrane

8 탄성체8 elastomer

9 연결용 나사9 Screw for connection

10 프레임 지그구멍10 frame jig hole

본 발명은 반도체 디바이스, 프린트 기판 혹은 액정 디스플레이 등을 제조할 때의 먼지막이로서 사용되는 리소그래피용 펠리클을 수용·보관·수송하는 펠리클 수납용기에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pellicle container containing, storing and transporting a pellicle for lithography which is used as a dust shield in manufacturing a semiconductor device, a printed board or a liquid crystal display.

LSI 등의 반도체 디바이스 혹은 액정 디스플레이 등의 제조에 있어서는, 반도체 웨이퍼 혹은 액정용 유리원판에 빛을 조사해서 패턴을 제작하지만, 이때에 사용하는 포토마스크 혹은 레티클(이하, 단순히 포토마스크라고 한다)에 먼지가 부착되어 있으면, 이 먼지가 빛을 가리거나, 구부리거나 해버리기 때문에 전사한 패턴이 손상된다는 문제가 있었다.In the manufacture of semiconductor devices such as LSI or liquid crystal displays, patterns are produced by irradiating light onto a semiconductor wafer or a glass disc for liquid crystal, but at this time, dust is formed on the photomask or reticle (hereinafter simply referred to as photomask) used. There is a problem that the transferred pattern is damaged because this dust obscures, bends or causes light to adhere.

이것 때문에 이들의 작업은 통상 클린룸내에서 행해지고 있지만, 그래도 포토마스크를 항상 청정하게 유지하는 것이 어렵다. 그래서, 포토마스크 표면에 먼지막이로서 펠리클을 점착하는 방법이 채택되어 있다.For this reason, these operations are normally performed in a clean room, but it is still difficult to keep a photomask clean all the time. Therefore, the method of sticking a pellicle as a dust film on the photomask surface is employ | adopted.

이 경우, 이물은 포토마스크의 표면 위에는 직접 부착되지 않고, 펠리클 위에 부착되기 때문에 리소그래피시에 초점을 포토마스크의 패턴 위에 맞춰 두면, 펠 리클 위의 이물은 전사에 관계되지 않게 된다.In this case, the foreign matter is not directly attached on the surface of the photomask, but is attached on the pellicle, so that when the lithography focuses on the pattern of the photomask, the foreign material on the pellicle becomes irrelevant to the transfer.

그러나, 펠리클에는 마스크에 점착된 후에는, 그들이 형성하는 폐쇄공간의 외부로부터 내부로 이물이 침입하는 것을 막는 효과는 있지만, 펠리클 자체에 이물이 부착되어 있고, 또한 그것이 폐쇄공간의 내부에 있을 경우에는 포토마스크 표면으로의 이물부착을 막는 것은 곤란하다. 따라서, 펠리클 자체에 높은 청정성이 요구되는 것은 물론, 보관, 수송에 사용하는 펠리클 수납용기에도 그 청정성을 유지할 수 있는 성능이 강하게 요구된다.However, the pellicle has the effect of preventing foreign matter from entering the interior from the outside of the closed space they form after being adhered to the mask, but when the foreign matter is attached to the pellicle itself and it is inside the closed space, It is difficult to prevent foreign matter adhesion to the photomask surface. Therefore, not only high cleanliness is required for the pellicle itself, but also a pellicle container used for storage and transportation is strongly required for its performance capable of maintaining cleanliness.

상기와 같이 펠리클 수납용기에는 펠리클의 보관, 수송 중에 펠리클의 청정성을 유지할 수 있는 성능이 강하게 요구되고, 그것을 위해서는 발진원(發塵源)이 될 수 있는 요인을 될 수 있는 한 적게 하는 것이 중요하다.As described above, the pellicle container is strongly required to maintain the cleanliness of the pellicle during the storage and transportation of the pellicle, and for this purpose, it is important to reduce as little as possible the source of oscillation. .

발진원이 될 수 있는 요인에는 펠리클 수납용기를 구성하는 부품의 재질, 전기적 특성, 청정도, 펠리클 수납용기를 구성하는 부품 사이의 접촉, 펠리클 수납용기와 펠리클의 접촉, 펠리클 수납용기로의 외력에 의한 마찰 등을 들 수 있다.Factors that may be a source of oscillation include material, electrical characteristics, and cleanliness of the components constituting the pellicle container, contact between the components constituting the pellicle container, contact between the pellicle container and the pellicle, and external force to the pellicle container. Friction and the like.

따라서 펠리클 수납용기를 구성하는 재료의 재질, 강도, 전기적 특성 및 펠리클의 고정방법 등의 여러 가지 요소를 배려할 필요가 있다.Therefore, it is necessary to consider various factors such as the material, strength, electrical characteristics of the material constituting the pellicle container, and the method of fixing the pellicle.

일반적인 반도체용 펠리클 수납용기는 펠리클을 적재하는 용기본체와, 펠리클을 유지함과 아울러 용기본체와 서로 둘레 가장자리부에서 끼워 맞춰져 걸리는 덮개체로 구성되어 있고, 각각의 재질은 수지이며, 덮개체는 투명성을 갖고 있다.A typical pellicle container for semiconductors is composed of a container body for loading pellicles and a lid body which holds the pellicle and is fitted to each other at the peripheral edges of the container body. Each material is resin and the cover body has transparency. have.

반도체용 펠리클 수납용기에 펠리클을 고정하는 방법으로서 몇 개의 방법이 제안되어 있다.Several methods are proposed as a method of fixing a pellicle to a pellicle container for semiconductors.

그 하나는 펠리클 프레임의 상단면을 덮개체 내벽으로 누르는 방법이다(특허문헌1 참조).One is the method of pressing the upper end surface of a pellicle frame to an inner wall of a lid body (refer patent document 1).

이 특허문헌1에 나타내어지는 바와 같은 펠리클 프레임의 상단면을 덮개체 내벽으로 누르는 방법은, 단순한 부품구성으로 확실하게 펠리클 프레임을 유지한다는 이점은 있지만, 일반적으로 펠리클 수납용기는 수지로 되어 있기 때문에 용기 외부로부터의 힘에 약해서, 외력에 의해 펠리클 수납용기 전체에 비틀어짐이 생겼을 경우 등에는 펠리클 프레임에 강한 힘이 작용해 버려서, 발진이나 변형될 가능성이 높아진다.The method of pressing the upper surface of the pellicle frame as shown in the patent document 1 to the inner wall of the lid has the advantage that the pellicle frame is reliably held in a simple part configuration, but in general, the pellicle storage container is made of resin. In the case where the external force is weak and the whole pellicle container is twisted due to external force, a strong force acts on the pellicle frame, which increases the possibility of oscillation or deformation.

그 현상은 한 변의 길이가 400㎜를 넘는 대형 액정용 펠리클에서는 더욱 현저하게 된다.This phenomenon becomes more prominent in large liquid crystal pellicles whose length is larger than 400 mm.

다른 방법으로서 용기본체에 리브 구조를 도입해서 강성을 높이는 방법도 제안되어 있다(특허문헌2 참조).As another method, a method of increasing the rigidity by introducing a rib structure into the container body is also proposed (see Patent Document 2).

특허문헌2에 나타내어지는 바와 같은, 용기본체에 리브 구조를 도입해서 강성을 높이는 방법은 염천하의 트랙 수송이나 공중수송 등의 수송 중의 바깥 기온의 변화에 기초하는 열변형을 저감한다는 이점은 있지만, 사용하는 측의 작업자가 용기의 가장자리를 한쪽으로 들었을 때의 비틀어짐을 펠리클에 영향을 주지 않는 레벨로 억제하는 것까지는 곤란하다.The method of increasing the rigidity by introducing a rib structure into the container body as shown in Patent Literature 2 has the advantage of reducing the thermal deformation based on the change of the outside temperature during transportation such as track transportation under air or air transportation. It is difficult to suppress the distortion when the operator of the side to use lifts the edge of a container to one side to the level which does not affect a pellicle.

그 밖의 고정방법으로서, 펠리클에 도착(塗着)된 점착재를 보호하는 보호 필름을 압압체를 사용하여 고정함으로써 간접적으로 펠리클 프레임을 고정하는 방법도 제안되어 있다(특허문헌3 참조).As another fixing method, there is also proposed a method of indirectly fixing the pellicle frame by fixing a protective film that protects the pressure-sensitive adhesive that has arrived on the pellicle using a press body (see Patent Document 3).

이 특허문헌2에 나타내어지는 바와 같은, 펠리클에 도착된 점착재를 보호하는 보호 필름을 압압체를 사용해서 고정함으로써 간접적으로 펠리클 프레임을 고정하는 방법은, 펠리클 프레임 자체에는 접촉하지 않고 보호 필름을 클램프함으로써, 펠리클 수납용기 외부로부터의 힘에 대해서 펠리클 프레임으로의 영향은 적은 이점이 있지만, 보호 필름에는 점착재로부터의 박리를 용이하게 하기 위해서 이형제가 도포되어 있는 것이 일반적이기 때문에, 수송 중의 진동에 의해 보호 필름으로부터 펠리클 프레임이 박리될 가능성이 있다.The method of indirectly fixing a pellicle frame by fixing the protective film which protects the adhesive material which reached the pellicle using a press body as shown in this patent document 2 clamps a protective film without contacting a pellicle frame itself. By doing so, although the influence on the pellicle frame has little advantage with respect to the force from the outside of the pellicle storage container, a release agent is generally applied to the protective film in order to facilitate peeling from the adhesive material. There is a possibility that the pellicle frame is peeled off from the protective film.

그것을 막기 위해서 보호 필름의 이형제로서 중박리 타입의 것을 사용했을 경우는, 보호 필름을 점착제로부터 박리할 때에 점착제의 변형을 초래하고, 펠리클을 마스크에 점착했을 때에 그 변형 개소가 마스크에 점착되지 않아서, 에어 패스를 발생시켜 버리는 문제가 있다.In order to prevent it, when the thing of the heavy peeling type is used as a mold release agent of a protective film, it causes a deformation | transformation of an adhesive when peeling a protective film from an adhesive, and when the pellicle adheres to a mask, the deformation part does not adhere to a mask, There is a problem of generating an air pass.

[특허문헌1] 일본 실용신안공고 평 6-45965호 공보[Patent Document 1] Japanese Utility Model Publication Hei 6-45965

[특허문헌2] 일본 특허공개 2000-173887호 공보[Patent Document 2] Japanese Patent Application Laid-Open No. 2000-173887

[특허문헌3] 일본 특허공개 평 11-052553호 공보[Patent Document 3] Japanese Patent Application Laid-Open No. 11-052553

본 발명은 상기와 같은 문제를 감안하여 이루어진 것으로, 그 목적은 보관, 수송, 조작 중에 있어서 수납하는 펠리클에 이물이 부착되지 않도록 함과 아울러, 펠리클의 오염손상을 방지해서 품질을 유지할 수 있는 포토리소그래피용 펠리클 수납용기를 제공하는 것에 있다.The present invention has been made in view of the above problems, and an object thereof is to prevent foreign matter from adhering to a pellicle to be stored during storage, transportation, and operation, and to prevent contamination of the pellicle and to maintain the quality of photolithography. It is to provide the pellicle container for.

상기 과제를 해결하기 위한 본 발명은 펠리클을 적재하는 용기본체와, 펠리클을 피복함과 아울러 용기본체와 서로 둘레 가장자리부에서 끼워 맞춰져 걸리는 덮개체로 이루어지는 펠리클 수납용기에 있어서, 펠리클 프레임 외측면에 형성된 구멍에 프레임유지핀을 삽입해서 펠리클을 유지하는 것을 특징으로 한다. 상기 용기본체가 수지이고, 상기 용기본체에 금속부품이 접합되어 있는 것인 것, 펠리클을 유지하는 상기 프레임유지핀을 위치결정하는 위치결정부품과 용기본체에 접합된 상기 금속부품이 기계적으로 연결되어 있는 것, 펠리클을 유지하는 상기 프레임유지핀의 펠리클 프레임과의 접촉부에 탄성체를 설치한 것이 각각 바람직하고, 또한, 상기 용기본체 및 상기 덮개체의 재질이 수지이며, 그들의 표면저항값이 1×1012Ω/square 이하인 대전방지성능을 갖고 있는 것이 더욱 바람직하다.The present invention for solving the above problems is a pellicle container containing a container body for loading a pellicle and a cover body which covers the pellicle and is fitted on the circumferential edge of the container body, the hole formed on the outer surface of the pellicle frame Inserting a frame retaining pin into the pellicle is characterized in that to hold. The container body is made of resin, and metal parts are joined to the container body, a positioning part for positioning the frame holding pin for holding a pellicle and the metal part bonded to the container body are mechanically connected. It is preferable that an elastic body is provided at the contact portion with the pellicle frame of the frame holding pin for holding the pellicle, and the material of the container body and the cover body is resin, and the surface resistance thereof is 1 × 10. More preferably, it has an antistatic performance of 12 Ω / square or less.

본 발명에 따르면, 펠리클 프레임을 확실하게 파지하면서 접촉부를 최대한 적게 해서 발진의 가능성을 저감함과 아울러, 강성을 높인 용기본체에 그 프레임유지핀을 설치함으로써, 외력으로부터 받는 펠리클로의 영향을 저감하는 효과를 갖는다. 또한, 그 용기본체가 수지이고 또한 그 용기본체에 금속부품을 접합하는 실시형태에 따르면, 경량이라는 이점을 가지는 수지에 대해서 그 결점인 변형을 커버하는 효과가 있고, 필요한 부분에만 외력에 대한 형상유지기능을 갖게 할 수 있다.According to the present invention, while holding the pellicle frame securely, the contact portion is reduced as much as possible to reduce the possibility of oscillation, and the frame retaining pin is provided on the container body having increased rigidity, thereby reducing the influence of the pellicle from external force. Has an effect. Further, according to the embodiment in which the container body is a resin and the metal parts are bonded to the container body, there is an effect of covering the deformation, which is a drawback, with respect to the resin having the advantage of being lightweight, and maintaining the shape of the external force only in necessary parts. I can have a function.

그리고, 펠리클을 유지하는 프레임유지핀을 위치결정하는 부품과 용기본체에 접합된 금속부품이 기계적으로 연결되는 실시형태에 따르면, 보관, 수송, 조작 중에도 펠리클의 위치가 일정한 위치로 유지되어 발진, 변형을 저감할 수 있다.Further, according to the embodiment in which the parts for positioning the frame holding pin for holding the pellicle and the metal parts bonded to the container body are mechanically connected, the position of the pellicle is maintained at a constant position even during storage, transportation, and operation, so that oscillation and deformation are performed. Can be reduced.

또한, 펠리클을 유지하는 프레임유지핀의 펠리클 프레임과의 접촉부에 탄성체를 설치하는 실시형태에 따르면, 보관, 수송, 조작중의 펠리클에 대한 진동의 영향을 저감할 수 있다.Further, according to the embodiment in which the elastic body is provided in the contact portion of the frame holding pin holding the pellicle with the pellicle frame, the influence of vibration on the pellicle during storage, transportation and operation can be reduced.

용기본체 및 덮개체의 재질이 수지이며, 또한 표면저항값이 1×1012Ω/square 이하인 대전방지성능을 부여하는 실시형태에 따르면, 대형 액정 펠리클 수납용기에서는 특히 문제가 되는 포장 주머니와의 마찰에 의해 생기는 정전기를 방지하는 등의 이물부착방지의 효과가 얻어진다.According to an embodiment in which the material of the container body and the cover body is resin and imparting antistatic performance with a surface resistance value of 1 × 10 12 Ω / square or less, friction with a packaging bag which is particularly problematic in a large liquid crystal pellicle container. The effect of preventing foreign matter adhesion such as preventing static electricity generated by the same is obtained.

이하에, 도면을 참조하면서 본 발명의 실시형태를 설명하지만, 본 발명은 이것에 한정되는 것은 아니다.EMBODIMENT OF THE INVENTION Although embodiment of this invention is described below, referring drawings, this invention is not limited to this.

도 1은 본 발명에 의한 펠리클 수납용기의 일실시형태를 나타내는 단면설명도이며, 도 2는 그 일부확대도이다.1 is an explanatory cross-sectional view showing an embodiment of a pellicle container according to the present invention, Figure 2 is a partially enlarged view.

도 3은 본 발명에 의한 펠리클 수납용기의 일실시형태의 용기본체 표면설명도이며, 도 4는 용기본체 이면설명도이다.3 is an explanatory view of the container body surface of an embodiment of a pellicle container according to the present invention, Figure 4 is a back view of the container body.

도 1에 있어서, 본 발명의 펠리클 수납용기는 용기본체(1), 덮개체(2), 프레임유지핀(3), 핀고정부품(4), 보강 금속부품(5)에 의해 구성된다.In Fig. 1, the pellicle container of the present invention is composed of a container body 1, a lid 2, a frame holding pin 3, a pin fixing part 4 and a reinforcing metal part 5.

종래의 펠리클 수납용기와 마찬가지로, 용기본체(1)의 중앙에 한단 높은 적재대를 설치해서 펠리클을 적재하고, 용기본체(1)와 서로의 둘레 가장자리에서 끼워 맞춰져 걸리는 덮개체(2)를 덮어씌움으로써 폐쇄공간을 형성한다.Similar to the conventional pellicle container, the pellicle is loaded by installing a high loading stand in the center of the container body 1, and covering the container body 1 and the lid 2 which is fitted at the circumferential edges of each other. To form a closed space.

용기본체와 덮개체의 재질은 용기전체의 경량화를 고려해서 수지를 사용하는 것이 바람직하지만, 액정용 대형 펠리클의 경우는 특히 수지의 변형이 제품에 미치는 영향이 크고, 용기본체(1)의 휘어짐을 저감시키기 위해서 용기본체(1)의 이면에 보강 금속부품(5)을 접합한다.The material of the container body and the cover body is preferably made of resin in consideration of the weight of the whole container. However, in the case of large sized pellicles for liquid crystals, the deformation of the resin has a great influence on the product, and the warp of the container body 1 is prevented. In order to reduce, the reinforcing metal part 5 is bonded to the back surface of the container body 1.

펠리클이 대전하여, 그것이 원인으로 먼지가 부착되는 것을 방지하기 위해서, 용기본체(1)와 덮개체(2)에 사용되는 수지에는 대전방지성능이 부여되어 있는 것이 바람직하다. 대전방지성능으로서는 표면저항값이 1×1012Ω/square 이하인 것이 바람직하다.In order to prevent the pellicle from charging and dust from adhering to the cause, it is preferable that the resin used for the container body 1 and the lid 2 is provided with an antistatic performance. As the antistatic performance, the surface resistance value is preferably 1 × 10 12 Ω / square or less.

수지의 재질에 대해서는 특별히 한정되지 않지만, 아크릴 수지, 폴리에틸렌테레프탈레이트 수지, 아크릴로니트릴·부타디엔·스티렌 수지, 폴리스티렌 수지, 폴리카보네이트 수지, 염화비닐 수지, 폴리프로필렌 수지, 폴리에틸렌 수지, 아크릴로니트릴·에틸렌·스티렌 등을 사용하면 된다.The material of the resin is not particularly limited, but an acrylic resin, polyethylene terephthalate resin, acrylonitrile butadiene styrene resin, polystyrene resin, polycarbonate resin, vinyl chloride resin, polypropylene resin, polyethylene resin, acrylonitrile ethylene Use styrene or the like.

대전방지의 방식도 발진성에 문제가 없으면, 베이스 폴리머에 친수성 폴리머를 배합하는 방식, 도전막의 코팅, 도전재료의 혼련 등으로부터 선택하면 된다.If the antistatic method also has no problem in oscillation, it may be selected from a method of blending a hydrophilic polymer with the base polymer, coating of a conductive film, and kneading of a conductive material.

또한, 이 금속의 재료로서는 알루미늄, 스텐레스강, 탄소강, 동, 황동 등이 예시되고, 비중과 탄성율로부터 고려해서 알루미늄이 바람직하다.Moreover, as a material of this metal, aluminum, stainless steel, carbon steel, copper, brass, etc. are illustrated, and aluminum is preferable in consideration of specific gravity and an elasticity modulus.

도 2에 확대해서 나타내는 바와 같이, 펠리클 프레임(6)의 고정은 프레임 외측면에 형성된 지그구멍(10)에 프레임유지핀(3)을 삽입함으로써 행한다. 펠리클 프레임을 보다 유연하게 파지하기 위해서 프레임유지핀(3)의 선단에 탄성체(8)를 설치하는 것이 바람직하다.As enlarged in FIG. 2, the pellicle frame 6 is fixed by inserting the frame holding pin 3 into the jig hole 10 formed in the frame outer surface. In order to grip the pellicle frame more flexibly, it is preferable to provide the elastic body 8 at the tip of the frame holding pin 3.

핀고정부품(4)은 프레임유지핀(3)의 위치결정을 행하는 부품이지만, 용기본체의 이면의 보강 금속부품(5)과 나사 등으로 기계적으로 연결함으로써, 용기외부로부터의 힘이나 열변형에 의한 용기본체의 비틀어짐에 대해서도 프레임유지핀의 위치정밀도를 유지하는 것이 가능하게 된다.The pin fixing part 4 is a part for positioning the frame holding pin 3, but by mechanically connecting the reinforcing metal part 5 on the back side of the container body with a screw or the like, the pin fixing part 4 is used to prevent the force and thermal deformation from the outside of the container. Even when the container body is twisted, it is possible to maintain the positional accuracy of the frame holding pin.

이 탄성체의 재료로서는 니트릴 고무, 스티렌 고무, 실리콘 고무, 불소 고무, 클로로네플렌 고무, 폴리우레탄 고무, 4불화에틸렌 수지, 폴리아크릴 고무, 에틸렌프로필렌 고무 등이 예시되고, 내구성의 점으로부터 실리콘 고무, 4불화에틸렌 고무가 바람직하다. 정전기대책을 위해 그들의 재료에 대전방지기능을 부여하면 더욱 좋다.Nitrile rubber, styrene rubber, silicone rubber, fluorine rubber, chloroneoprene rubber, polyurethane rubber, ethylene tetrafluoride resin, polyacryl rubber, ethylene propylene rubber, etc. are illustrated as a material of this elastic body. Preference is given to tetrafluoroethylene rubbers. It is even better to give their materials an antistatic function as a countermeasure against static electricity.

프레임유지핀(3)으로 펠리클 프레임(6)을 고정하는 개소는 3개소 이상 필요하고, 도 3에 나타내는 바와 같이 펠리클 프레임(6)의 모서리부 부근을 포함하는 4개소 이상이 바람직하다.Three or more locations for fixing the pellicle frame 6 with the frame holding pin 3 are required. As shown in FIG. 3, four or more locations including the edge portion of the pellicle frame 6 are preferable.

도 4에 용기본체의 이면의 평면도로서 나타내는 바와 같이, 보강 금속부품(5)은 용기본체(1)의 변형을 방지하기 위해서 용기본체의 이면에 설치되어 있다. 보강 금속부품(5)은 핀고정부품(4)과 기계적으로 연결되어 있는 것이 바람직하다. 보강 금속부품(5)은 단체에서라도 그 효과는 기대할 수 있지만, 도시와 같이 종횡으로 연결해서 설치함으로써 보다 높은 효과가 얻어진다.As shown in FIG. 4 as a plan view of the rear surface of the container body, the reinforcing metal parts 5 are provided on the rear surface of the container body in order to prevent deformation of the container body 1. The reinforcing metal part 5 is preferably connected to the pinned part 4 mechanically. Although the effect of the reinforcing metal parts 5 can be expected even in a single body, a higher effect can be obtained by connecting them vertically and horizontally as shown in the figure.

이하에 본 발명의 실시예를 설명하지만, 본 발명은 이것에 한정되는 것은 아니다.Although the Example of this invention is described below, this invention is not limited to this.

[실시예][Example]

도 1~도 4에 나타내는 펠리클 수납용기를 제작했다.The pellicle container shown in FIGS. 1-4 was produced.

펠리클 수납용기의 구성은 주로 대전방지성 ABS 수지((주)도레이제 상품명:토요락파렐TP10, 표면저항값 5×1011Ω/square)를 진공성형법에 의해 성형한 용기본체(1)와, 마찬가지로 대전방지성 ABS 수지((주)도레이제 상품명:토요락파렐TP10, 표면저항값 5×1011Ω/square)를 진공성형법에 의해 성형한 용기덮개체(2)로 이루어진다. 용기본체의 이면에는 단면이 40×6㎜인 알루미늄 합금제 보강 금속부품(5)을 설치하고, 도 4에 나타내는 바와 같이 5개의 보강 금속부품(5)을 종횡으로 교차해서 연결했다.The structure of the pellicle container is mainly composed of a container body (1) in which an antistatic ABS resin (Toray Co., Ltd. product name: Toyo Rock Farrel TP10, surface resistance value of 5 × 10 11 Ω / square) is molded by a vacuum molding method, Similarly, it consists of the container cover body 2 which formed the antistatic ABS resin (Toray Co., Ltd. brand name: Toray Rock Farrel TP10 and surface resistance value 5 * 10 <11> / square) by the vacuum molding method. The reinforcing metal parts 5 made of aluminum alloy whose cross section is 40x6 mm were provided in the back surface of the container main body, As shown in FIG.

또한, 용기본체 표면에 설치한 핀고정부품(4)과 용기본체 이면에 설치한 보강 금속부품(5)은 용기본체를 사이에 두고 M4의 나사에 의해 기계적으로 연결되었다. 또한, 핀고정부품(4)과 프레임유지핀(3)의 재질은 PPS로 이루어지고, 프레임유지핀(3)은 도 3에 나타내는 바와 같이 펠리클 프레임(6)의 모서리부 부근에 4개소 설치하고, 그 프레임유지핀(3)의 선단에는 불소 고무제 탄성체(8)를 설치했다.In addition, the pin fixing part 4 provided on the container body surface and the reinforcing metal part 5 provided on the back of the container body were mechanically connected by screws of M4 with the container body interposed therebetween. In addition, the pin fixing parts 4 and the frame holding pin 3 are made of PPS, and the frame holding pins 3 are provided at four positions near the corners of the pellicle frame 6 as shown in FIG. At the tip of the frame holding pin 3, an elastic body 8 made of fluororubber was provided.

이 완성된 펠리클 수납용기에, 바깥 치수 782×474×6㎜인 알루미늄 합금제 펠리클 프레임(6)의 한쪽 끝면에, 펠리클막 접착제로서 실리콘 점착제(신에쓰 가가꾸 고교(주)제 상품명:KR120), 다른 쪽 끝면에 마스크 점착제로서 실리콘 점착제(신에쓰 가가꾸 고교(주)제 상품명:KR120)를 도포하여 가열에 의해 큐어시키고, 또한 불소계 폴리머(상품명 싸이톱, 아사히가라스(주)제)를 스핀 코트법에 의해 얻은 두께 약 4㎛의 펠리클막(7)을 이 펠리클 프레임(6)에 부착된 펠리클을 수납하며, 도쿄-후쿠오카 사이를 왕복으로 공중수송해서 수송 전후의 펠리클막 위의 이물증가수를 계측했다.In this finished pellicle container, a silicone adhesive (Shin-Etsu Chemical Co., Ltd. make) brand name is used as a pellicle film adhesive on one end surface of the aluminum alloy pellicle frame 6 having an outer dimension of 782 × 474 × 6 mm. On the other end, a silicone pressure sensitive adhesive (trade name: KR120 manufactured by Shin-Etsu Chemical Co., Ltd.) was applied as a mask pressure sensitive adhesive to cure by heating, and further a fluorine-based polymer (trade name Cytop, manufactured by Asahi Glass Co., Ltd.) was added. A pellicle film 7 having a thickness of about 4 탆 obtained by the spin coating method is stored in the pellicle attached to the pellicle frame 6, and is transported by air in a reciprocating manner between Tokyo and Fukuoka to increase foreign matter on the pellicle film before and after transportation. The number was measured.

클래스100의 클린룸내에서 펠리클 수납용기로부터 펠리클을 꺼내고, 암실내에서 40만 럭스의 빛을 조사해서 펠리클막(7) 표면의 이물증가수를 조사한 결과, 펠리클막(7) 위에 이물의 증가는 없고, 또한, 펠리클을 구성하는 부품의 변형, 손상도 보여지지 않았다. 또한, 수송 후의 펠리클막의 대전량을 ION SYSTEM사(미국 캘리포니아주)제 ION SYSTEM/MODEL775로 측정한 결과, -0.1㎸였다.The pellicle was removed from the pellicle container in a clean room of Class 100, and the amount of foreign matter on the surface of the pellicle film 7 was investigated by irradiating 400,000 lux of light in the dark room. In addition, deformation and damage of the parts constituting the pellicle were not observed. Moreover, it was -0.1 kPa when the charge amount of the pellicle film | membrane after transport was measured by ION SYSTEM / MODEL775 made from ION SYSTEM (California, USA).

[비교예][Comparative Example]

도 5에 나타내는 바와 같은, 종래 공지의 펠리클 프레임(6)의 상단면을 덮개체 내벽(2)으로 누르는 구성의 펠리클 수납용기를 제작했다. 용기본체(1) 및 덮개체(2)의 재질은 표면저항값 1018Ω/square 이상의 아크릴성 수지를 사용했다.As shown in FIG. 5, the pellicle container of the structure which presses the upper end surface of the conventionally well-known pellicle frame 6 by the cover inner wall 2 was produced. As the material of the container body 1 and the lid 2, an acrylic resin having a surface resistance of 10 18 Ω / square or more was used.

이 펠리클 수납용기에, 바깥 치수 782×474×6㎜인 알루미늄 합금제 펠리클 프레임(6)의 한쪽 끝면에, 펠리클막 접착제로서 실리콘 점착제(신에쓰 가가꾸 고교(주)제 상품명:KR120), 다른 쪽 끝면에 마스크 점착제로서 실리콘 점착제(신에쓰 가가꾸 고교(주)제 상품명:KR120)를 도포하여 가열에 의해 큐어시키고, 또한 불소계 폴리머(상품명 싸이톱, 아사히가라스(주)제)를 스핀 코트법에 의해 얻은 두께 약 4㎛의 펠리클막(7)을 이 펠리클 프레임(6)에 부착된 펠리클을 수납하고, 동경-후쿠오카 사이를 왕복으로 공중수송해서 수송 전후의 펠리클막 위의 이물증가수를 계측했다.In this pellicle container, a silicone adhesive (Shin-Etsu Chemical Co., Ltd. product name: KR120) made by a pellicle film adhesive on one end surface of the aluminum alloy pellicle frame 6 having an outer dimension of 782 × 474 × 6 mm. A silicone pressure sensitive adhesive (trade name: KR120 manufactured by Shin-Etsu Chemical Co., Ltd.) is applied as a mask pressure sensitive adhesive to the end surface, and cured by heating, and spin coating a fluorine-based polymer (trade name Cytop, manufactured by Asahi Glass Co., Ltd.). The pellicle film 7 having a thickness of about 4 탆 obtained by the method was stored in the pellicle attached to the pellicle frame 6, and air transport was carried out between Tokyo and Fukuoka by reciprocating to increase the number of foreign substances on the pellicle film before and after transportation. Measured.

클래스100의 클린룸내에서 펠리클 수납용기로부터 펠리클을 꺼내고, 암실내에서 40만 럭스의 빛을 조사해서 펠리클막(7) 표면의 이물증가수를 조사한 결과, 펠리클막(7) 위에는 10㎛ 이상의 이물이 48개 증가하고, 또한, 펠리클막 접착제 덮개체와 접촉하는 부분에 수송 이전에는 없었던 압착흔적이 보여졌다. 또한, 수송 후의 펠리클막의 대전량을 ION SYSTEM/MODEL775로 측정한 결과, -3.8㎸로 대전되어 있는 것을 나타냈다.The pellicle was removed from the pellicle container in a class 100 clean room, and the amount of foreign matter on the surface of the pellicle film 7 was investigated by irradiating 400,000 lux of light in the dark room. Increasing the number of 48 pieces, the compression traces that were not present before the transport were also seen in the portion in contact with the pellicle membrane adhesive cover. Moreover, when the charge amount of the pellicle film | membrane after transport was measured by ION SYSTEM / MODEL775, it showed that it was charged at -3.8 kPa.

이상과 같이 본 발명에 따르면, 보관, 수송, 조작중에 있어서 수납하는 펠리클에 이물이 부착되지 않도록 함과 아울러, 펠리클의 오염손상을 방지해서 품질을 유지할 수 있다.According to the present invention as described above, it is possible to prevent foreign matter from adhering to the pellicle to be stored during storage, transportation and operation, and to prevent contamination of the pellicle, thereby maintaining the quality.

Claims (5)

펠리클을 적재하는 수지로 이루어진 용기본체, Container body made of resin for loading pellicle, 펠리클을 피복함과 아울러 용기본체와 서로 둘레 가장자리부에서 끼워 맞춰져 걸리는 덮개체,The cover body which covers the pellicle and is fitted to the container body with each other at the peripheral edges, 상기 용기본체에 접합된 금속부품,A metal part bonded to the container body, 펠리클 프레임 외측면에 형성된 구멍에 삽입되어 펠리클을 유지하는 프레임유지핀 및A frame retaining pin inserted into a hole formed in the outer surface of the pellicle frame and holding the pellicle; 상기 프레임유지핀을 위치결정하는 위치결정부품으로 이루어지는 펠리클 수납용기에 있어서, In a pellicle container comprising a positioning component for positioning the frame holding pin, 상기 금속부품과 상기 위치결정부품이 기계적으로 연결되어 있는 것을 특징으로 하는 펠리클 수납용기.A pellicle container, characterized in that the metal part and the positioning part is mechanically connected. 삭제delete 삭제delete 제 1항에 있어서, 펠리클을 유지하는 상기 프레임유지핀의 펠리클 프레임과의 접촉부에 탄성체를 설치한 것을 특징으로 하는 펠리클 수납용기.The pellicle container according to claim 1, wherein an elastic body is provided at a contact portion with the pellicle frame of the frame holding pin which holds the pellicle. 제 1항에 있어서, 상기 용기본체 및 상기 덮개체의 재질이 수지이며, 그들의 표면저항값이 1×1012Ω/square 이하인 대전방지성능을 갖고 있는 것을 특징으로 하는 펠리클 수납용기.The pellicle container according to claim 1, wherein the container body and the cover material are made of resin, and have an antistatic performance with a surface resistance of 1 × 10 12 Ω / square or less.
KR1020050126676A 2005-03-22 2005-12-21 Pellicle container KR101223967B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005081533A JP4391435B2 (en) 2005-03-22 2005-03-22 Pellicle storage container
JPJP-P-2005-00081533 2005-03-22

Publications (2)

Publication Number Publication Date
KR20060102264A KR20060102264A (en) 2006-09-27
KR101223967B1 true KR101223967B1 (en) 2013-01-18

Family

ID=37014532

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050126676A KR101223967B1 (en) 2005-03-22 2005-12-21 Pellicle container

Country Status (6)

Country Link
US (1) US20060213797A1 (en)
JP (1) JP4391435B2 (en)
KR (1) KR101223967B1 (en)
CN (1) CN100398413C (en)
HK (1) HK1096928A1 (en)
TW (1) TWI293477B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200014066A (en) 2018-07-31 2020-02-10 주식회사 시엠테크놀로지 Pellicle container
KR20200014061A (en) 2018-07-31 2020-02-10 주식회사 시엠테크놀로지 Pellicle container and particle removing method using the same
KR20200014070A (en) 2018-07-31 2020-02-10 주식회사 시엠테크놀로지 Pellicle container with diamond like carbon coating layer and method of fabricating the same

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4664746B2 (en) 2005-06-20 2011-04-06 信越化学工業株式会社 Large pellicle container for lithography
JP4963041B2 (en) * 2006-06-16 2012-06-27 旭化成イーマテリアルズ株式会社 Pellicle storage container
US7581372B2 (en) * 2006-08-17 2009-09-01 Microtome Precision, Inc. High cleanliness article transport system
JP4672636B2 (en) * 2006-11-02 2011-04-20 信越化学工業株式会社 Pellicle storage container
JP5052106B2 (en) * 2006-11-22 2012-10-17 旭化成イーマテリアルズ株式会社 How to store the pellicle
JP4796946B2 (en) * 2006-11-30 2011-10-19 信越化学工業株式会社 Pellicle storage container
JP2008216846A (en) * 2007-03-07 2008-09-18 Asahi Kasei Electronics Co Ltd Pellicle storage container
KR100847670B1 (en) 2007-05-03 2008-07-23 비아이 이엠티 주식회사 Composition for mask box and mask box using thereof
JP4955449B2 (en) * 2007-05-10 2012-06-20 信越化学工業株式会社 Pellicle storage container
WO2009008294A1 (en) * 2007-07-06 2009-01-15 Asahi Kasei E-Materials Corporation Frame of large pellicle and grasping method of frame
JP5051840B2 (en) * 2007-11-22 2012-10-17 信越化学工業株式会社 Method for storing a pellicle in a pellicle storage container
JP2011007827A (en) * 2009-06-23 2011-01-13 Shin Etsu Polymer Co Ltd Storage container for large precision member
JP2011034020A (en) * 2009-08-06 2011-02-17 Shin-Etsu Chemical Co Ltd Pellicle storage container
JP2011164404A (en) * 2010-02-10 2011-08-25 Shin-Etsu Chemical Co Ltd Pellicle storage container
JP5202557B2 (en) * 2010-03-05 2013-06-05 信越化学工業株式会社 Pellicle handling jig
JP5528190B2 (en) * 2010-04-23 2014-06-25 信越化学工業株式会社 Pellicle storage container
JP2012046239A (en) * 2010-08-30 2012-03-08 Shin-Etsu Chemical Co Ltd Corner clip for pellicle container case
JP2012103638A (en) * 2010-11-15 2012-05-31 Shin Etsu Chem Co Ltd Pellicle handling tool
JP5722760B2 (en) * 2011-02-08 2015-05-27 信越化学工業株式会社 Pellicle manufacturing kit
JP5649134B2 (en) * 2011-02-08 2015-01-07 信越化学工業株式会社 Pellicle frame
JP5586559B2 (en) * 2011-10-28 2014-09-10 信越化学工業株式会社 Pellicle container
JP5586560B2 (en) * 2011-10-28 2014-09-10 信越化学工業株式会社 Pellicle container
JP5684752B2 (en) * 2012-03-29 2015-03-18 信越化学工業株式会社 Pellicle storage container
CN102866577A (en) * 2012-09-17 2013-01-09 上海华力微电子有限公司 Mask conveying box and method for reducing mask pollution
KR102460875B1 (en) 2014-04-17 2022-10-31 신에쓰 가가꾸 고교 가부시끼가이샤 Pellicle container
JP6308676B2 (en) * 2014-12-18 2018-04-11 信越化学工業株式会社 Pellicle container for lithography.
JP2016151633A (en) * 2015-02-17 2016-08-22 信越化学工業株式会社 Pellicle-housing container
JP6275067B2 (en) * 2015-02-24 2018-02-07 信越化学工業株式会社 Pellicle storage container
JP6351178B2 (en) 2015-07-13 2018-07-04 信越化学工業株式会社 Pellicle storage container and pellicle removal method
JP6494111B2 (en) * 2015-11-09 2019-04-03 信越化学工業株式会社 Pellicle storage container packaging structure and packaging method thereof
JP6604651B2 (en) * 2016-02-22 2019-11-13 信越化学工業株式会社 Pellicle storage container
KR20200044262A (en) * 2018-10-18 2020-04-29 삼성디스플레이 주식회사 Tray for carrying disply panel
KR101987741B1 (en) * 2019-01-17 2019-06-12 피엠씨글로벌 주식회사 Photo mask keeping box
JP7538625B2 (en) * 2020-05-22 2024-08-22 三井化学株式会社 Pellicle case, holding unit and release film
JP2021189303A (en) * 2020-05-29 2021-12-13 旭化成株式会社 Pellicle case, tray and pellicle holding method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08110631A (en) * 1994-10-12 1996-04-30 Shin Etsu Polymer Co Ltd Pellicle housing container
JPH08133382A (en) * 1994-11-09 1996-05-28 Shin Etsu Polymer Co Ltd Pillicle container
JPH09204039A (en) * 1996-01-25 1997-08-05 Shin Etsu Chem Co Ltd Pellicle frame holder
JP2005049765A (en) * 2003-07-31 2005-02-24 Asahi Kasei Electronics Co Ltd Housing container for large pellicle

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4842136A (en) * 1987-02-13 1989-06-27 Canon Kabushiki Kaisha Dust-proof container having improved construction for holding a reticle therein
US5042655A (en) * 1989-09-27 1991-08-27 E. I. Du Pont De Nemours & Co. Pellicle packaging and handling system
US5239261A (en) * 1992-01-27 1993-08-24 Tektronix, Inc. Probe apparatus for testing electronic circuits immersed in a liquid cryogen
JP3200776B2 (en) * 1992-08-06 2001-08-20 大日本印刷株式会社 PCB holding case
JPH06230561A (en) * 1993-01-29 1994-08-19 Shin Etsu Chem Co Ltd Production of pellicle for lithography
US5976307A (en) * 1998-03-13 1999-11-02 Dupont Photomasks, Inc. Method and apparatus for removing a pellicle frame from a photomask plate
JP4458310B2 (en) * 1999-09-28 2010-04-28 旭化成イーマテリアルズ株式会社 Pellicle storage container and foreign object inspection method thereof
US6693061B2 (en) * 2000-11-24 2004-02-17 Ricoh Company, Ltd. Light-permeable thermosensitive recording material
JP4345881B2 (en) * 2003-06-04 2009-10-14 旭化成イーマテリアルズ株式会社 Large pellicle storage method
JP2004361705A (en) * 2003-06-05 2004-12-24 Asahi Kasei Electronics Co Ltd Method for housing large pellicle
US6882408B2 (en) * 2003-06-25 2005-04-19 Powerchip Semiconductor Corp. Reticle transferring support and transferring method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08110631A (en) * 1994-10-12 1996-04-30 Shin Etsu Polymer Co Ltd Pellicle housing container
JPH08133382A (en) * 1994-11-09 1996-05-28 Shin Etsu Polymer Co Ltd Pillicle container
JPH09204039A (en) * 1996-01-25 1997-08-05 Shin Etsu Chem Co Ltd Pellicle frame holder
JP2005049765A (en) * 2003-07-31 2005-02-24 Asahi Kasei Electronics Co Ltd Housing container for large pellicle

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200014066A (en) 2018-07-31 2020-02-10 주식회사 시엠테크놀로지 Pellicle container
KR20200014061A (en) 2018-07-31 2020-02-10 주식회사 시엠테크놀로지 Pellicle container and particle removing method using the same
KR20200014070A (en) 2018-07-31 2020-02-10 주식회사 시엠테크놀로지 Pellicle container with diamond like carbon coating layer and method of fabricating the same

Also Published As

Publication number Publication date
JP2006267179A (en) 2006-10-05
US20060213797A1 (en) 2006-09-28
KR20060102264A (en) 2006-09-27
TWI293477B (en) 2008-02-11
JP4391435B2 (en) 2009-12-24
TW200634909A (en) 2006-10-01
CN1836988A (en) 2006-09-27
HK1096928A1 (en) 2007-06-15
CN100398413C (en) 2008-07-02

Similar Documents

Publication Publication Date Title
KR101223967B1 (en) Pellicle container
TWI388475B (en) Pellicle container
TWI384323B (en) A pellicle, a pellicle-receiving container for receiving a pellicle, and a method for storing a pellicle in a pellicle-receiving container
KR102666696B1 (en) Pellicle and mounting method thereof
WO2006087894A1 (en) Fixation carrier, production method of fixation carrier, use method of fixation carrier, and substrate reception container
KR20080099780A (en) Pellicle container
KR20230088663A (en) Pellicle storage container
KR20070117996A (en) Pellicle container and method of producing the same
TWI590999B (en) Pellicle storage container
TWI588598B (en) Take-up of the pellicle assembly container and pellicle unit Out of the way
CN107102512B (en) Dustproof thin film assembly storage container
KR101938158B1 (en) Pellicle container
JP2014190998A (en) Substrate housing case
CN210113201U (en) Photomask box and holder thereof
JP5586560B2 (en) Pellicle container
JP2013145328A (en) Pellicle accommodating container and pellicle storing method
JPWO2006059388A1 (en) Storage method for large pellicle
CN111605892A (en) Photomask box and holder thereof
JP2010217775A (en) Pellicle housing container
JPH03293355A (en) Pellicle housing container

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20151217

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20161221

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20180104

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20200106

Year of fee payment: 8