CN107102512B

CN107102512B - Dustproof thin film assembly storage container

Info

Publication number: CN107102512B
Application number: CN201710083586.6A
Authority: CN
Inventors: 关原一敏
Original assignee: Shin Etsu Chemical Co Ltd
Current assignee: Shin Etsu Chemical Co Ltd
Priority date: 2016-02-22
Filing date: 2017-02-16
Publication date: 2020-12-18
Anticipated expiration: 2037-02-16
Also published as: TWI624718B; CN107102512A; JP2017151130A; KR20170098700A; JP6604651B2; TW201730667A

Abstract

Provided is a dustproof thin film component containing container for containing a dustproof thin film component without a stripping sheet, which has small influence of dimensional error caused by change along with time and manufacture and is easy to manage and operate. The dustproof thin film assembly receiving container is composed of a dustproof thin film assembly receiving container body and a cover body which is embedded in the dustproof thin film assembly receiving container body and is sealed, and is used for receiving a dustproof thin film assembly without a stripping sheet.

Description

Dustproof thin film assembly storage container

Technical Field

The present invention relates to a dust-proof film package housing container for housing a dust-proof film package used as a dust catcher in manufacturing a semiconductor device, a printed circuit board, a liquid crystal panel, an organic EL panel, or the like.

Background

In semiconductor manufacturing such as LSI and super LSI, or in manufacturing liquid crystal panels, a pattern is formed by irradiating a semiconductor wafer or a liquid crystal panel with light, and in this case, if a photomask or a reticle (hereinafter, collectively referred to as "photomask") used has dust adhered thereto, the dust absorbs or bends light, so that the transferred pattern is deformed, the corners are irregular, the substrate is blackened and stained, and the like, and thus the size, quality, appearance, and the like are deteriorated.

Therefore, these operations are usually performed in a clean room, but even then, it is difficult to keep the photomask clean frequently, so that exposure is performed after attaching a dust-proof pellicle member as a dust remover to the surface of the photomask. Thus, the foreign matter is not directly attached to the surface of the photomask but is attached to the pellicle, and the foreign matter on the pellicle is irrelevant to the transfer by aligning the focus with the pattern of the photomask during photolithography.

In general, such a pellicle is formed by attaching or bonding a transparent pellicle film made of nitrocellulose, cellulose acetate, fluororesin or the like, which transmits light well, to the upper end face of a pellicle frame made of aluminum, steel, stainless steel, process plastic or the like. In addition, an adhesive layer made of polybutene resin, polyvinyl acetate resin, acrylic resin, silicone resin, or the like, and a release layer (release sheet) for protecting the adhesive layer are provided on the lower end surface of the pellicle frame for attaching the pellicle to the photomask.

The release sheet is generally used by coating and cutting a release agent on a thin film of about 100-200 μm such as a PET resin to a desired shape, but since the film is thin, the release sheet is in the form of a string to be formed into a frame shape having almost the same shape as the outer shape of the frame, and thus is difficult to clean. In addition, handling of the mask adhesive layer is extremely inconvenient in the operation of attaching the mask adhesive layer and the like. Further, when the dustproof thin film assembly is taken out from the container by the automatic device, a step of peeling off the peeling sheet is necessary, but the peeling sheet is thin and has an unstable shape, and the like, so that the dustproof thin film assembly is not suitable for being handled by the automatic device.

Since the release sheet having such problems is peeled off and discarded when the dustproof pellicle assembly is used only for protecting the adhesive, the problems do not occur unless the release sheet is used.

As a result, the present inventors have invented a dustproof pellicle assembly without using a release sheet and a storage container for storing the dustproof pellicle assembly (see, for example, patent documents 1 and 2). These dustproof thin film module storage containers described in patent documents 1 and 2 are configured such that an uncoated region where a mask adhesive layer is not applied is formed outside a dustproof thin film module frame, the uncoated region is supported by a dustproof thin film module frame supporting device provided on a dustproof thin film module storage container body, and a needle is inserted into a non-through hole provided on an outer side surface of the dustproof thin film module frame to fix the dustproof thin film module (see a comparative example described below). In this way, since the peeling sheet is not used for the dust-proof pellicle stored in the dust-proof pellicle storage container, there is no need to peel the peeling sheet, and there is no fear that the peeling sheet comes into contact with the pellicle film when peeled, and it becomes easy to take out the dust-proof pellicle by an automatic device, which is a great advantage.

However, even in the dustproof thin film module storage container of patent document 1, there are some problems in management and application, that is, for example, in the dustproof thin film module storage container, the dustproof thin film module is supported by the dustproof thin film module frame supporting device in the vertical direction, and the horizontal direction is limited by inserting the needle into the hole of the outer side surface of the frame, so that the dustproof thin film module is fixed on the dustproof thin film module storage container, so that if the needle and the hole of the outer side surface of the frame are not correctly opposite, or the distance of the axial direction of the needle is different from the design, the needle cannot be inserted into the hole, and the dustproof thin film module cannot be fixed well, which becomes a problem.

In addition, in the case of a large-sized pellicle assembly storage container, manufacturing errors are large in the whole pellicle assembly storage container, and in the case of a resin-made pellicle assembly storage container, dimensional variations due to temperature changes and moisture absorption occur, and it becomes difficult to strictly manage the assembly position of the needles. Therefore, during storage after the container is manufactured, the position of the needle needs to be adjusted again, and there is a problem that dust is generated due to friction between the needle and the dustproof thin film assembly frame caused by dimensional change after the dustproof thin film assembly is stored.

Documents of the prior art

Patent document 1: japanese laid-open patent publication No. 2009-128635

Patent document 2: japanese patent laid-open No. 2011-34020

Disclosure of Invention

The present invention has been made in view of the above problems, and an object of the present invention is to provide a dust-proof pellicle assembly storage container which is free from a peeling sheet, has little influence of a dimensional error due to manufacturing and a change over time, and is easy to manage and operate.

The present invention is a dustproof thin film assembly receiving container which is composed of a dustproof thin film assembly receiving container body and a cover body which is embedded and sealed in the dustproof thin film assembly receiving container body and receives a dustproof thin film assembly without a stripping sheet, and is characterized in that a dustproof thin film assembly frame supporting device and a fixer holding device are arranged on the dustproof thin film assembly receiving container body and support a dustproof thin film assembly frame with a mask adhesive layer coating area and an uncoated area, and the fixer holding device holds a plate-shaped frame fixer inserted in a groove arranged on the outer side surface of the dustproof thin film assembly frame while the dustproof thin film assembly frame supporting device supports the mask adhesive layer uncoated area of the dustproof thin film assembly frame.

In addition, the present invention is characterized in that the holder holding means has a groove or a hole into which the frame holder is fitted, and the frame holder is held movably in a substantially horizontal direction.

Then, it is preferable that a part of the frame holder of the present invention is pressed from above by the cover body, and the position thereof is fixed; the frame retainer of the present invention may be partially pressed from above by an elastic body provided on the inner side of the cover body, thereby fixing the position thereof. Alternatively, the adhesive tape may be used for attachment and fixation.

In addition, the frame holder according to the present invention is preferably configured such that the rear end thereof is in contact with the inner surface of the cover body to restrict the movement in the horizontal direction, or such that the rear end thereof is in contact with the elastic body provided on the inner surface of the cover body to restrict the movement in the horizontal direction.

Effects of the invention

According to the present invention, the frame holder is inserted into the groove provided on the outer side surface of the dustproof thin film assembly frame to fix the dustproof thin film assembly, and the elastic body provided on the inner surface or the inner surface of the cover body is pressed against the frame holder to fix the dustproof thin film assembly, so that the allowable range of the dimensional error is large.

Drawings

Fig. 1 is a plan view of an embodiment of the dustproof thin film assembly storage container of the present invention.

FIG. 2 is a sectional view A-A of FIG. 1 showing an embodiment of the present invention.

FIG. 3 is a sectional view B-B of FIG. 1 showing an embodiment of the present invention.

Fig. 4 is an enlarged view of a portion C of fig. 2 showing an embodiment of the present invention.

Fig. 5 is an enlarged view of a portion D in fig. 3, showing an embodiment of the present invention.

Fig. 6 is a perspective view of the entire dustproof thin film assembly storage container of the present invention.

Fig. 7 is a perspective view of a state where the frame holder is inserted into the groove of the holder holding device and held.

Fig. 8 is a perspective view of a state where the frame holder is inserted into the corner hole of the holder holding device and held.

Fig. 9 is a perspective view of the state in which the frame holder adhesive tape is held by the holder holding device.

Fig. 10 is a sectional view showing a state in which the frame holder is fixed by pressing the elastic body inside the cover.

Fig. 11 is a plan view of a dustproof thin film assembly storage container using a needle of a comparative example.

Fig. 12 is a perspective view of a state in which the needle holder for the needle of the comparative example is held.

Detailed Description

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings, but the present invention is not limited thereto. The present invention is particularly effective when applied to a large pellicle with a side length of more than 500mm, but the present invention is not limited to the size and use of the pellicle.

Fig. 1 to 10 show an embodiment of the present invention. In fig. 1, the lid 12 that is fitted and stopped to the dustproof thin film module storage container body 11 at the peripheral edge portion is omitted for the sake of description. As shown in fig. 1, the pellicle housing container body 11 of the present invention is provided with a pellicle frame support device 13, a frame holder 14, and a holder holding device 15. On the other hand, as shown in fig. 4, on the housed dustproof thin film assembly 20, a mask adhesive layer 22 is provided along the inner periphery of the lower end face of the dustproof thin film assembly frame 21, and a mask adhesive layer non-coating region 23 is provided on the outer periphery. Then, the opposite surface thereof is provided with a pellicle film 25 stretched tightly by a pellicle film adhesive layer 24.

The housed dustproof thin film assembly 20 is preferably provided with a mask adhesive layer uncoated region 23 having a width of at least 1mm on the outer periphery of the surface of the dustproof thin film assembly frame 21 on which the mask adhesive layer 22 is provided, but the other modes are not limited.

The pellicle frame support means 13 is preferably provided at least 1, more preferably at least 2, on each side of the pellicle frame 21. The positions and the number thereof are preferably determined in consideration of the deflection by the weight in the downward direction of the pellicle frame 21 and the vibration during transportation.

The dustproof pellicle frame supporting device 13 is stepped as shown in fig. 4, and has a mask adhesive layer uncoated region 23 of the dustproof pellicle frame 21 on the step portion 13 a. The step shape is preferably a vertical surface 13b having a height of 20% or more of the height of the dustproof pellicle assembly frame 21, and is preferably a tapered surface 13c whose upper portion is opened outward at an angle of 5 to 45 °. The height of the top of the pellicle frame support device 13 is preferably lower than the surface of the pellicle film 25, because it is to be avoided from interfering with the device in the operation of removing the pellicle 20 by an automatic device or a removal jig.

The shape of the pellicle frame support apparatus 13 is not limited to the shape shown in fig. 4, and may be changed as appropriate according to the shape of the pellicle frame 21. Further, if the movement of the pellicle unit 20 in the horizontal direction can be restricted by another method, a planar shape without a step may be used.

The pellicle frame support device 13 is preferably made of a material that is soft, such as a resin or an elastomer, and that is less likely to generate dust when in contact with the pellicle frame 21, and is preferably manufactured by a one-shot molding method such as injection molding, cast molding, or photo-molding. Specific examples of the material include thermoplastic elastomers such as styrene, polyester, olefin, polyamide, and polyurethane; as rubbers, nitrile rubbers, fluororubbers, ethylene propylene rubbers, chloroprene rubbers, silicone rubbers and the like. Here, styrene-based or polyester-based elastomers are particularly preferable because they have advantages that the surface adhesion is small and the dust-proof pellicle assembly frame 21 placed thereon is not easily stuck.

The size of the pellicle frame support means 13 is preferably about 10 to 50mm along the length of the pellicle frame 21, and may be attached to the pellicle housing container body 11 by a known method such as adhesion. More preferably, as shown in the cross section of fig. 4, the lower surface of the pellicle frame support device 13 is a metal member that is internally threaded, and for example, a plate screw 17 is preferably insert-molded and fastened and fixed by a bolt 16 from the outside of the pellicle housing container body 11.

As shown in fig. 5, the plate-like frame holder 14 is inserted into a groove 26 provided on the outer surface of the pellicle frame 21. As shown in fig. 7 and 8, the frame holder 14 is further held by a groove 15a or a corner hole 15b in the horizontal direction of a holder holding device 15 provided in the pellicle storage container body 11. Fig. 7 shows an embodiment in which a groove 15a is provided in the anchor holding device 15, and fig. 8 shows an embodiment in which an angular hole 15b is provided in the anchor holding device 15. These grooves 15a and the corner holes 15b are preferably provided with a tolerance that allows smooth insertion and removal when fitted to the frame holder 14. The grooves 15a are advantageous in that they are more easily controlled in size, more easily molded, and more easily cleaned than the angular holes 15 b.

The dust-proof pellicle unit holder 14 has a tip end having a step 14a, but may have a tip end having an R-shape, a tapered shape, or a combination of several shapes. The overall shape may be appropriately changed.

The frame holder 14 and the holder holding device 15 are preferably made of resin such as ABS, PPS, POM, PEEK, or the like, and may be reinforced with additives as necessary. Examples of the production method include melt molding such as injection molding and transfer molding, and machining.

In the case of assembling to the dustproof thin film module storage container body 11, it is preferable to fasten by bolts (not shown) from the outside of the dustproof thin film module storage container in addition to adhesion. The retainer holding device 15 is most preferably manufactured by insert injection molding of a metal part having an internal thread in view of mass productivity, operability, and prevention of dust generation.

As shown in fig. 1, the frame holder 14 is provided at 4 positions near the corners of the long sides in this embodiment, but the installation position and the number can be determined as appropriate in consideration of the easiness of fixing the frame and the mutual influence with the pellicle assembly taking-out jig or the robot. For example, there is no problem even in 4 near the corner of the short side, and the short side and the long side may be arranged on both sides. The preferable setting position is a position near the corners of the frame where the frame has high rigidity, the frame has small deflection due to film tension, and the frame has a stable size, but if the frame has high rigidity, the frame is not disposed on the inner side.

If the frame holder 14 inserted into the groove 26 on the side surface of the dustproof film assembly frame is pulled out during transportation of the dustproof film assembly 20, the dustproof film assembly moves in the dustproof film assembly storage container 10, and the mask adhesive layer 22 may be adhered to the container, and may be stained or damaged. Accordingly, in order to fix the frame holder 14 to the holder holding device 15 well, the frame holder 14 is preferably fixed such that the inner surface of the lid 12 is brought into contact with or pressed against the upper surface of the frame holder 14. For example, as shown in fig. 5, it is preferable that an elastic body 51 made of resin, rubber, elastomer, or the like is provided inside the lid body 12, and the frame holder 14 is pressed and fixed by the elastic body 51. In this embodiment, the influence of the dimensional error can be further eliminated by the elastic body 51.

Suitable materials for the elastic body 51 include thermoplastic elastomers such as styrene, polyester, olefin, polyamide, and polyurethane, and examples of the rubber include nitrile rubber, fluororubber, ethylene propylene rubber, chloroprene rubber, silicone rubber, and urethane rubber. Among them, silicone rubber and urethane rubber are particularly preferable because of their easy availability, low dustiness, and low gas generation.

As another embodiment for fixing the frame holder 14, as shown in fig. 9, a method is adopted in which the shape of the holder holding device 91 is a shape having a flat surface portion, and the frame holder 14 is fixed to the holder holding device 91 by an adhesive tape 92. In this embodiment, although there is a risk that foreign matter may adhere to the pellicle assembly 20 from the hand of the operator or the like when the adhesive tape 92 is attached and detached, there is an advantage that the operation is simple and the positional relationship with the cover 12 may not be considered in the fixing of the frame holder 14 in the design and operation.

In another embodiment, the rear end of the frame holder 14 is brought into contact with the inner surface of the lid 12 to restrict movement in the horizontal direction (the direction in which the frame holder is pulled out from the groove). In this embodiment, as shown in fig. 10, it is preferable that the elastic body 101 is attached to and in contact with the inner surface of the lid 12. In this embodiment, the frame fixing device 14 is restricted by the elastic body 101, so that dimensional errors of the respective members can be further absorbed, and thus, the inconvenience caused by the dimensional errors can be eliminated.

The dustproof thin film module housing container body 11 and the lid 12 are preferably manufactured by vacuum forming or pressure forming using a resin plate of acrylic, ABS, PVC, PC, or the like having a thickness of about 2 to 8 mm. The one side is 200mm or less and can be made small by injection molding, and in this case, a suitable rib or the like can be provided for rigidity and flatness improvement.

The dustproof thin film assembly housing container body 11 is preferably black in order to improve visibility of foreign matter adhering thereto. The cover 12 is preferably transparent or colored and translucent so as to make the housed dustproof film assembly 20 visible, and may be black for reasons such as weather resistance. Both the dust-proof film module housing container body 11 and the lid 12 are suitable from the viewpoint of preventing adhesion of foreign substances in order to impart a charge-preventing function to the resin itself or to apply a charge-preventing coating to the surface thereof. Further, addition of a flame retardant material to the resin itself or use of a flame retardant resin is more preferable from the viewpoint of imparting flame retardancy and safety.

In a particularly large-sized case where the side length of the dustproof thin film module storage container body 11 exceeds 1000mm, it is preferable that a reinforcing material made of metal and fiber-reinforced resin is attached to the outer side of the resin molded product or the storage container body is made of metal. The material used when the container itself is metal is preferably a light alloy such as an aluminum alloy or a magnesium alloy, but a thin plate of stainless steel or carbon steel may be used. As the molding method, integral molding such as casting is preferable, but the molding may be performed by joining the respective structural members by means such as welding, adhesion, or screw fastening after the respective structural members are manufactured by press molding or the like. In addition, the inside of the case may be hollow for light weight.

In addition, the dustproof thin film module storage container body 11 and the lid body 12 may be provided with a handle and a fastener (not shown) for fixing the lid body in consideration of convenience in use together. Further, the dustproof thin film module storage container body 11 may be provided with legs and the like (not shown) in consideration of conveyance by a forklift or the like.

Examples

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

First, the dustproof thin film module storage container 10 as shown in fig. 1 to 6 is manufactured. The dustproof thin film assembly container body 11 is made by using a black flame-retardant charged ABS resin plate with a thickness of 5mm to prevent vacuum forming. On the other hand, the lid 12 was fitted to the peripheral edge portion of the dustproof thin film module storage container body 11, and the container was manufactured by vacuum forming a transparent polycarbonate resin plate having a thickness of 5mm, and after the forming, the entire surface thereof was coated with a charge preventing agent (trade name SEPLEGYDA, manufactured by shin-Etsu Polymer Co., Ltd.). The external dimensions after mounting are 1350 × 1535 × 120 mm.

The pellicle frame supporting device 13 is made of a polyester elastomer (product name Hytrel, manufactured by dongli dupont) by inserting a stainless plate nut 17 into the interior thereof and injection molding. Then, the pellicle frame support device 13 thus produced is disposed on the pellicle housing container body 11 and assembled from the back side by 2 bolts 16.

The assembly position of the pellicle frame support means 13 is shown in figure 1 with the long side, the short side and all 4. The position of the dust-proof pellicle is determined by considering the mutual influence of a processing jig for holding the dust-proof pellicle or a dust-proof pellicle holding mechanism of a robot when the dust-proof pellicle is taken out.

Further, on the dustproof thin film module storage container body 11, a holder holding device 15 made of ABS resin by injection molding is fixed from the inside with bolts (not shown). When the fixture holding device 15 is fixed, the dust-proof pellicle unit holder 14 inserted into the fixture holding device 15 is adjusted in position so that the groove 26 shown in fig. 5 provided on the outer side surface of the dust-proof pellicle unit frame 21 is fitted.

Then, the dustproof thin film assembly storage container 10 was carried into a 10-stage clean room, washed well with a surfactant and pure water, and completely dried.

Then, in order to evaluate the dustproof thin film assembly housing container 10, the dustproof thin film assembly 20 was manufactured. First, a frame made of a5052 aluminum alloy having an outer dimension of 1366 × 1136mm, a frame width of 12mm, and a frame height of 5.8mm was machined to produce a pellicle frame 21. In addition, through holes (not shown) 4 having a diameter of 1.5mm were provided as ventilation holes on each of the long sides of the pellicle frame 21, and grooves 26 having a height of 3mm, a depth of 2.3mm and a length of 40mm were provided in the vicinity of the corners of the long sides. Then, the surface was sandblasted to about Ra0.6, and then black oxidation treatment was performed.

Further, a silicone adhesive (manufactured by shin-Etsu chemical Co., Ltd.) diluted with toluene was applied to one surface of the frame of the pellicle frame 21 by an air pressure distributor, and a coating region of the mask adhesive layer 22 having a height of 1.2mm and a width of 5mm was formed along the inner periphery thereof. An uncoated region 23 of an uncoated mask adhesive layer having a width of 7mm was formed on the outer periphery of a pellicle frame 21 having a frame width of 12 mm.

Further, a silicon adhesive (manufactured by shin-Etsu chemical Co., Ltd.) diluted with toluene was applied by an air pressure type dispenser on the surface opposite to the surface of the mask adhesive layer 22 on which the pellicle frame 21 was formed, to form a pellicle film adhesive layer 24. Then, a 4.1 μm thick film made of a fluorine-based resin (product name: Cytop, manufactured by asahi glass corporation) was stretched as a dustproof thin film module film 25 on the dustproof thin film module film adhesive layer 24, and the vent holes provided on each long side were covered with a filter made of a PTFE film (not shown), thereby completing the dustproof thin film module 20.

The pellicle 20 thus produced is inspected for foreign matter in a dark room, and then placed on the pellicle frame support device 13 on the cleaned pellicle housing container body 11, and as shown in fig. 5, the frame holder 14 is slid on the holder holding device 15 and inserted into the groove 26 on the outer surface of the pellicle frame 21. Then, the lid body 12 is closed over the dustproof thin film module storage container body 11, and the peripheral edge portion thereof is sealed with an adhesive tape (not shown), thereby completing the storage of the dustproof thin film module 20 in the dustproof thin film module storage container 10.

When the pellicle 20 is stored, an elastic body 51 made of silicone rubber having a hardness of 50 (shore a) is attached to the inner side of the lid body 12 in the vicinity of the frame holder 14 at 4, as shown in fig. 5. When the cover 12 is placed on the dustproof thin film assembly housing container body 11, the elastic body 51 is adjusted to be in contact with the upper portion of the frame holder 14 and to be deformed by 0.2 to 1mm, as if it were crushed, so that the frame holder 14 is pressed and fixed to the holder holding device 15 by the elastic body 51.

Finally, the dustproof thin film assembly storage container 10 of the present invention was evaluated, and the dustproof thin film assembly storage container 10 in which the dustproof thin film assembly 20 not using the conventional peeling sheet was stored was lifted up to about waist height by 2 operators, and the operation of tilting from horizontal to substantially vertical was performed 5 times for each side (4 direction), and 20 times in total were performed. Thereafter, the pellicle 20 is opened in a clean room, and the damage of the pellicle 20 and the state of adhesion of foreign matter are checked in a dark room, and the pellicle 20 is completely not moved on the pellicle housing container body 11, and no increase in the amount of foreign matter adhering to the pellicle 20 is observed.

Further, the pellicle frame 21 was also inspected, and traces of foreign matter adhesion and scratches were not observed at the portion in contact with the pellicle frame support device 13, and defects such as contact traces were not found at all in the mask adhesive layer 22.

Then, the dustproof thin film assembly storage container 10 is kept in an environment with humidity of 40-70% and temperature of 20-30 ℃ for 1 year, after 1 year, the dustproof thin film assembly storage container 10 is bundled again, the dustproof thin film assembly 20 is stored in the same way as the test before 1 year, the dustproof thin film assembly frame 21 is placed on the dustproof thin film assembly frame supporting device 13, the dustproof thin film assembly fixer 14 can be inserted into the ditch 26, and no problem is found in the change with time, the operation and the management.

Comparative example

In the comparative example, first, the frame holder 14 and the holder holding device 15 of the pellicle film assembly housing container 10 of the example were replaced with each other, and a pellicle film assembly housing container 110 using a holding device constituted by a needle 112 and a needle holding device 113 as shown in the plan view of fig. 11 was produced. Fig. 12 is an oblique view of a state in which the needle 112 and the needle holder 113 are combined. In fig. 11, the description of the lid is omitted for the sake of explanation of the dustproof thin film module storage container main body, and the structure of the lid is basically the same as that of the embodiment.

The needle 112 and the needle holder 113 of the comparative example were both made of ABS resin and injection-molded. The needle 112 is composed of a needle shaft 112a, a projection 112b, and a thicker operation portion 112c, and is supported by a needle holder 113. The needle 112 is fitted with a gap which can be inserted and removed, and the protrusion 112b is engaged with the recess 113a of the needle holder by a rotating operation, and the inserted position is fixed. Then, an elastic body 114 made of a fluorine rubber is provided at the tip of the needle shaft 112a in order to prevent the occurrence of dust due to the sliding with the pellicle frame 121.

In the comparative example, a pellicle frame 121 having the same dimensions as those of the example was also formed, and non-through circular holes 122 having a diameter of 2mm and a depth of 2.5mm were provided on the outer surfaces of the long sides thereof at positions 30mm away from the corners of the frame for a total of 4. Then, when the pellicle frame 121 is placed on the pellicle frame support device 13 on the pellicle housing container body 111, the position of the pin holding device 113 is adjusted so that the pins 112 are inserted into the holes 122 on the outer side surface of the pellicle frame 121, and are fixed to the pellicle housing container body 111 with bolts (not shown).

Then, in the same manner as in the example, the pellicle storage container 110 was carried into a 10-stage clean room, washed with a surfactant and pure water, and completely dried.

Then, in the comparative example, in order to evaluate the dustproof thin film module storage container 110, the dustproof thin film module 120 was produced by using the same material and production process as those of the example except that the dustproof thin film module frame 121 was used, and the dustproof thin film module frame 121 of the comparative example also formed an uncoated region where the mask adhesive layer was not coated in the region where the mask adhesive layer was coated and the outer periphery thereof. Therefore, the pellicle 120 of the comparative example and the pellicle 20 of the example are identical except that the outer side surface of the pellicle frame 21 of the example has the groove 26 and the outer side surface of the pellicle frame 121 has the non-through circular hole 122.

After the dust-proof pellicle 120 is inspected for foreign matter in a dark room, it is stored in the dust-proof pellicle storage container 110, and the peripheral edge portion is sealed with an adhesive tape (not shown), whereby the dust-proof pellicle storage container 110 is completed.

Finally, in the evaluation of the dustproof thin film package storage container 110 of the comparative example, similarly to the example, the dustproof thin film package storage container 110 in which the dustproof thin film package 120 was stored was raised to about the waist height by 2 operators, and the operation of inclining from the horizontal to about the vertical was performed 5 times for each side (4 direction), and 20 times were totaled. Thereafter, the pellicle 120 is opened in a clean room, and the damage of the pellicle 120 and the state of adhesion of foreign matter are checked in a dark room, and the pellicle 120 is completely fixed to the pellicle housing container body 111, and the increase in the amount of foreign matter adhering to the pellicle 120 is not seen at all.

Further, the pellicle frame 121 was inspected, and traces of foreign matter adhesion, scratches, and the like at the portion in contact with the pellicle frame support device 13 were not seen at all.

However, when the used pellicle container 110 is stored in an environment with a humidity of 50% and a temperature of 20 to 30 ℃ for 1 year, and the pellicle container 100 is unpacked again after 1 year, and the same pellicle 120 is stored, the holes 122 of the pellicle frame 121 and the pins 112 cannot be aligned with each other, and a horizontal displacement of about 1.5mm occurs, and the pins 112 cannot be inserted. The reason for this is that the needle 112 is displaced due to a change in dimension of the dustproof thin film module housing container body 111 with time, and the position of the needle is readjusted to house the dustproof thin film module 120.

Description of the reference numerals

10 a dustproof thin film component containing container; 11 a dustproof thin film assembly receiving container body; 12 cover 13 dustproof thin film assembly frame supporting device; 13a step difference part; 13b vertical plane; 13c a conical surface; 14a frame retainer; 14a tip step portion; 15a holder retaining device; 15a groove; 15b corner holes; 16 bolts; 17 plate nuts; 20 a dust control pellicle assembly; 21 a pellicle assembly frame; 22 masking the adhesive layer; masking 23 uncoated areas of the adhesive layer; 24 a dustproof thin film assembly film adhesive layer; 25 a pellicle film; 26 grooves; 51 an elastomer; 91 a holder retaining device; 92 an adhesive tape; 101 an elastomer; 110 a dustproof thin film component receiving container; 111 a dustproof thin film assembly container body; 112 needles; 112a needle shaft; 112b are protruded; 112c an operation part; 113a needle holding device; 113a recess; 114 an elastomer; 120 a dust control pellicle assembly; 121 dustproof pellicle assembly frame (comparative example); 122 holes.

Claims

1. A dustproof thin film assembly receiving container which is composed of a dustproof thin film assembly receiving container body and a cover body which is embedded in the dustproof thin film assembly receiving container body and is sealed and receives a dustproof thin film assembly without a stripping sheet, characterized in that, the dustproof thin film assembly receiving container body is provided with a dustproof thin film assembly frame supporting device and a fixer holding device for supporting a dustproof thin film assembly frame with a mask adhesive layer coating area and an uncoated area, the fixer holding device holds a plate-shaped frame fixer inserted in a groove arranged on the outer side surface of the dustproof thin film assembly frame, the plate-shaped frame fixer is opposite to the outer side surface of the dustproof thin film assembly frame with the inserted groove, can move in a slightly vertical direction.

2. The dustproof film assembly storage container according to claim 1, wherein the holder holding means has a groove or a hole into which the frame holder is fitted, and the frame holder is held movably in a substantially horizontal direction.

3. The dustproof film assembly storage container according to claim 1 or 2, wherein a part of the frame holder is pressed from above by the lid body, so that the position thereof is fixed.

4. The dustproof film assembly storage container according to claim 1 or 2, wherein a part of the frame holder is pressed from above by an elastic body provided inside the cover body, so that the position thereof is fixed.

5. The dustproof film assembly storage container according to claim 1 or 2, wherein the frame holder is attached by an adhesive tape so as to be fixed to the holder holding means.

6. The dustproof thin film assembly storage container according to claim 1 or 2, wherein a rear end of the frame holder is in contact with an inner surface of the cover body, and movement in a horizontal direction is restricted.

7. The dustproof thin film assembly storage container according to claim 1 or 2, wherein a rear end of the frame holder is in contact with an elastic body provided on an inner surface of the lid body, and movement in a horizontal direction is restricted.