TW201730667A - Dustproof film assembly receiving container which comprises a dustproof film assembly receiving container body and a cover fited to the dustproof film assembly receiving container body - Google Patents

Abstract

To provide a dustproof film assembly receiving container that receives a dustproof film assembly having no peeling plate, which is insignificantly influenced by the time variation and error of production size and is easy to manage and use. A dustproof film assembly receiving container comprises a dustproof film assembly receiving container body and a cover fitted to the dustproof film assembly receiving container body for sealing so as to receive a dustproof film assembly having no peeling plate therein. Disposed on the dustproof film assembly receiving container body are a dustproof film assembly frame support device that supports a dustproof film assembly frame having an adhesive layer coating area and a non-coating area for shielding and a retainer holding device. With the dustproof film assembly frame support device supporting the shielding adhesive layer non-coating area of the dustproof film assembly frame, the retainer holding device holds a plate-like frame retainer. The plate-like frame retainer is inserted into and disposed in a groove on an outside surface of the dustproof film assembly frame.

Description

Dust-proof film assembly storage container

The present invention relates to a pellicle assembly container that is housed in a pellicle for use as a dustproof device in the manufacture of a semiconductor device, a printed circuit board, a liquid crystal panel, or an organic EL panel.

In the production of a semiconductor such as a large scale integrated circuit (LSI), a super LSI, or a liquid crystal panel, a semiconductor wafer or a liquid crystal original plate is subjected to light irradiation to form a pattern. A light mask or a reticle (hereinafter, collectively referred to as a "light mask") has a dust adhesion, and since the dust absorbs light or bends the light, the transferred pattern is deformed and the edges are uneven. The substrate is also blackened and soiled, and thus the size, quality, appearance, and the like are impaired.

Therefore, these operations are usually performed in a clean room, but even in this case, it is difficult to keep the holding light mask constantly cleaned, and therefore, the light-shielding film assembly as a dust remover is attached to the surface of the light mask, and then exposed. In this way, the foreign matter is not directly attached to the surface of the light mask, but is attached to the dustproof film assembly, so that in the light lithography, as long as the focus is directed to the pattern of the light mask, the foreign matter on the dustproof film assembly is Transfer does not matter.

The pellicle film assembly is generally a transparent pellicle film composed of nitrocellulose, cellulose acetate or fluororesin which is well-transparent, attached or adhered to a dust-proof film assembly frame made of aluminum, steel, stainless steel, engineering plastics, or the like. Formed on the upper end surface. Further, at the lower end of the pellicle frame, an adhesive layer made of polybutene resin, polyvinyl acetate resin, acrylic resin, enamel resin or the like for attaching the pellicle film to the light mask is provided, and the adhesive layer is provided for protection. The release layer is the release layer (release sheet).

The release sheet is usually coated with a release agent on a thin film of about 100 μm to 200 μm such as polyethylene terephthalate (PET) resin, and cut into a desired shape to be used. However, since the film has a small thickness, it has a frame shape almost the same as the outer shape of the frame, so that it has a rope shape and has a problem that it is difficult to clean. Further, in the operation of attaching to the masking adhesive layer or the like, the handling thereof is extremely inconvenient. Further, when the pellicle assembly is taken out from the container by the automatic device, the step of peeling off the release sheet is necessary, but the release sheet is in the form of a film, and its shape or dynamic instability is also unsuitable for processing by an automatic device. problem.

The peeling sheet having the above problem is only a protective adhesive, and is peeled off when the pellicle is used, so that the problem does not occur as long as the peeling sheet is not used.

Thus, the inventors of the present invention have previously invented a pellicle film assembly that does not use a peeling sheet and a storage container that houses the pellicle film assembly (see, for example, Patent Document 1 and Patent Document 2). In the pellicle assembly container described in Patent Documents 1 and 2, an uncoated region in which the mask adhesive layer is not applied is formed on the outer side of the pellicle frame, and the uncoated region is placed in the pellicle assembly. While the pellicle frame support device on the container body is supported, a pin is inserted into a non-through hole provided in the outer surface of the pellicle frame to fix the pellicle assembly (refer to the comparative example described below). In this way, since the release sheet is not used for the pellicle film container accommodated in the pellicle container storage container, it is not necessary to peel off the release sheet, and there is no fear of contacting the pellicle film when the release sheet is peeled off, so that the pellicle can be easily assembled by an automatic device. Take out, this is a big advantage.

However, even in such a dust-proof membrane module storage container, there is a problem in the management and operation level thereof. For example, in the dust-proof membrane module storage container of Patent Document 1, the dust-proof film assembly is supported by the pellicle frame in the vertical direction. The device supports a horizontal direction of inserting a pin into a hole in the outer side surface of the frame to regulate it so as to be fixed on the pellicle assembly container, so that the pin and the hole on the outer side of the frame cannot be correctly opposed. Or the distance in the axial direction of the pin is not the same as the design, and the pin cannot be inserted into the hole, so that the pellicle assembly cannot be well fixed.

In addition, in the case of a large-sized pellicle pack storage container, the manufacturing error of the pellicle assembly container as a whole is large, and when it is made of a resin, dimensional changes occur due to temperature changes and moisture absorption, making it difficult to precisely control The assembly position of the pin. Therefore, in the storage after the container is produced, it is necessary to readjust the position of the pin, and the dust generated by the friction between the pin and the pellicle frame due to the dimensional change after the storage of the pellicle is generated. problem. [Previous Technical Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-128635 (Patent Document 2) Japanese Patent Laid-Open No. 2011-34020

[Problems to be Solved by the Invention] The present invention has been made in view of the above problems, and an object of the present invention is to provide a storage container for a pellicle assembly without a release sheet, which changes with time and dimensional error due to manufacturing. A dustproof membrane module storage container that is small in impact and easy to manage and use. [Means for solving the problem]

The present invention is a pellicle assembly container including a pellicle assembly container main body and a cover that is sealed and fitted to the pellicle assembly container body, and that houses the pellicle assembly without the release sheet, and is characterized in that the pellicle assembly a dustproof film assembly frame supporting device and a holder holding device for supporting a pellicle frame having a masking adhesive layer coating region and an uncoated region, and a pellicle frame supporting device supporting the pellicle frame While the masking layer of the adhesive layer is not coated, the holder holding means holds a plate-like frame holder inserted into the groove provided on the outer side surface of the pellicle frame.

Further, the present invention is characterized in that the holder holding means has a groove or a hole fitted to the frame holder, and the holder frame holder is movable in a substantially horizontal direction.

Then, it is preferably a frame holder of the present invention, a part of which is pressed by the cover body from above, so that the position thereof is fixed; a frame holder of the present invention, a part of which can also be disposed on the inner side of the cover body Press it up to fix its position. In addition, it can be attached with an adhesive tape.

In addition, it is preferable that the frame holder of the present invention has a rear end that contacts the inner surface of the cover body and regulates the horizontal movement thereof, or the rear end thereof contacts the elastic body provided on the inner surface of the cover body, and regulates the horizontal direction thereof. The movement. [Effects of the Invention]

According to the present invention, the pellicle frame is fixed by inserting a plate-like frame holder into the groove provided on the outer surface of the pellicle frame, and the pellicle is fixed by the elastic member provided on the inner or inner surface of the cover. Since the frame holder has a large tolerance range for the dimensional error, it is less susceptible to changes in the container over time and dimensional errors caused by manufacturing, and has an advantage of being easy to manage and use.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings, but the present invention is not limited thereto. Further, the present invention is particularly effective when applied to a large-sized pellicle having a side length of more than 500 mm, but the present invention is not limited by the size and use of the pellicle.

1 to 10 show an embodiment of the present invention. In FIG. 1, for the sake of explanation, the lid body 12 that is fitted and stopped with the pellicle assembly container main body 11 at the peripheral edge portion is omitted. In the pellicle assembly container body 11 of the present invention, as shown in Fig. 1, a pellicle frame support device 13, a frame holder 14, and a holder holding device 15 are provided. On the other hand, as shown in FIG. 4, the dust-absorbent film unit 20 accommodated is provided with a mask adhesive layer 22 on the inner circumference of the lower end surface which is frame-shaped along the pellicle frame 21, and a mask on the outer peripheral portion. The adhesive layer is uncoated with the area 23. Then, the pellicle film 25 is placed on the opposite surface of the pellicle film.

The dust-proof film unit 20 to be housed is preferably a region 23 having a wide uncoated masking adhesive layer having a width of at least 1 mm on the outer periphery of the surface of the dust-proof film module frame 21 on which the masking adhesive layer 22 is provided, but not the other Ways to limit.

The pellicle frame support device 13 is preferably provided on at least one side of each side of the pellicle frame 21, preferably two or more. The position and the number are preferably determined in consideration of the oscillation caused by the self-weight deflection of the pellicle frame 21 in the downward direction and the vibration during transportation.

The pellicle frame support device 13 has a stepped shape as shown in FIG. 4, and has a mask adhesive layer uncoated region 23 of the pellicle frame 21 on the step portion 13a. The stepped shape preferably has a height of 20% or more of the vertical surface 13b of the pellicle frame 21, and the upper surface thereof is preferably a tapered surface 13c which is opened outward at an angle of 5 to 45 degrees. In addition, the height of the top portion of the pellicle frame support device 13 is higher than that of the pellicle film 25 in the operation of taking out the pellicle assembly 20 to be used for the automatic device or the removal jig, in order to avoid interference with the device. The surface is also low as preferred.

The shape of the pellicle frame support device 13 is not limited to the shape shown in FIG. 4, and can be appropriately changed depending on the shape of the pellicle frame 21. Further, if the horizontal movement of the pellicle film assembly 20 can be regulated by other methods, the planar shape having no step can be used.

The pellicle frame support device 13 is preferably a material that is soft to the resin, an elastomer, or the like, and which is less likely to cause dust in contact with the pellicle frame 21, and is formed by primary molding such as injection molding, casting, and light shaping. It is preferred to make it. Specific examples of the material include thermoplastic elastomers such as styrene-based, polyester-based, olefin-based, polyamidiamine-based, and polyurethane-based resins; and rubber, nitrile rubber, fluororubber, ethylene propylene rubber, chloroprene rubber, and ruthenium Rubber, etc. Among them, the styrene-based or polyester-based elastomer has a surface adhesive force and is small, and the pellicle frame 21 placed thereon is less likely to adhere, and is particularly preferable.

The size of the pellicle frame support device 13 is preferably 10 mm to 50 mm along the length of the pellicle frame 21, and can be attached to the pellicle container housing body 11 by a known method. More preferably, as shown in the cross section of Fig. 4, the lower surface of the pellicle frame support device 13 is a metal member machined into an internal thread, for example, a plate nut 17 is insert-molded, and the container body is received from the pellicle assembly by bolts 16. The outer contraction of 11 is preferably fixed.

In the groove 26 provided on the outer surface of the pellicle frame 21, as shown in Fig. 5, the plate-like frame holder 14 is inserted. As shown in FIG. 7 and FIG. 8, the frame holder 14 is further held in the horizontal groove 15a or the corner hole 15b of the holder holding device 15 provided in the pellicle container storage container body 11. Fig. 7 shows an embodiment in which the groove 15a is provided in the holder holding device 15, and Fig. 8 shows an embodiment in which the corner hole 15b is provided in the holder holding device 15. These grooves 15a or the corner holes 15b are preferably provided so as to be able to be smoothly inserted and removed when fitting with the frame holder 14. The groove 15a is advantageous in terms of ease of dimensional management, formability, and good detergency as compared with the corner hole 15b.

Further, the pellicle film holder 14 has a shape in which the tip end has a step 14a. However, the tip end may have a combination of an R shape, a tapered shape, or a plurality of shapes, and the overall shape may be appropriately changed.

Frame holder 14 and holder holding device 15 for acrylonitrile-butadiene-styrene (ABS), polyphenylene sulfide (PPS), polyoxymethylene (POM) A resin such as polyetheretherketone (PEEK) is preferably produced, and the additive may be reinforced as necessary. Examples of the production method include melt molding, mechanical cutting, and the like by injection molding, transfer molding, and the like.

When attaching to the pellicle container storage container main body 11, it is preferable to join a peg (not shown) from the outside of the pellicle assembly storage container. The holder holding device 15 is most preferably inserted into a metal part having an internal thread by injection molding from the viewpoint of mass productivity, operability, and prevention of generation of fine dust.

As shown in Fig. 1, in the embodiment, the frame holder 14 is disposed at four corners of the corner of the long side, but the position and the number of the arrangement can be considered in consideration of the ease of fixing the frame, and the pellicle film. The components are taken out of the fixture or the interaction of the automatic devices to make an appropriate decision. For example, there are no problems in the four corners of the short side corners, and it is also possible to arrange both the short side and the long side. As a preferable installation position, the rigidity of the frame is high, the frame deflection by the film tension is small, and the angle of the frame which is dimensionally stable is small. However, if the rigidity of the frame is high, there is no problem in that it is disposed on the inner side.

If the frame holder 14 inserted in the groove 26 on the side of the pellicle frame is pulled out in the transport compartment, the pellicle assembly 20 is moved within the container 10 to cover the adhesive layer 22 and the container, causing staining or Damaged. Thus, in order to secure the frame holder 14 to the holder holding device 15, the inner surface of the lid body 12 is preferably brought into contact with or pressed against the upper surface of the frame holder 14, and the frame holder 14 is fixed. For example, as shown in FIG. 5, an elastic body 51 made of resin, rubber, or elastomer is provided inside the lid body 12, and it is preferable that the fixing frame holder 14 is pressed by the elastic body 51. In this embodiment, the influence of the dimensional error can be further eliminated by the elastic body 51.

Specific examples of the material to be used for the elastomer 51 include a thermoplastic elastomer such as a styrene-based, polyester-based, olefin-based, polyamidiamine-based or polyurethane-based rubber. Examples of the rubber include a nitrile rubber and a fluororubber. Ethylene propylene rubber, neoprene rubber, ruthenium rubber, polyurethane rubber, and the like. Among them, those having low hardness are particularly preferred from the viewpoints of easy availability, low dustiness, and low gas generation.

Further, as another embodiment of the fixed frame holder 14, as shown in FIG. 9, the shape of the holder holding device 91 is a shape having a flat portion, and the frame holder 14 is attached by the adhesive tape 92. The manner of fixing on the holder holding device 91. In this embodiment, when the adhesive tape 92 is assembled and removed, there is a problem that foreign matter adheres to the pellicle assembly 20 from the operator's hand or the like. However, it is easy to operate, and in design and operation, the frame holder is fixed. The fixing of 14 has the advantage that the positional relationship with the cover 12 can be ignored.

In addition, as another embodiment, the rear end of the frame holder 14 is brought into contact with the inner surface of the lid body 12, and the movement in the horizontal direction (the direction in which the groove is pulled out) is regulated. In this embodiment, as shown in FIG. 10, it is preferable to attach the elastic body 101 to the inner surface of the lid body 12 to make a contact. In this embodiment, the frame fixing device 14 is regulated by the elastic body 101, whereby the dimensional error of each member can be further absorbed, thereby eliminating the inconvenience caused by the dimensional error.

The pellicle assembly container body 11 and the lid body 12 are vacuum formed by using a resin plate such as acrylic, ABS, polyvinyl chloride (PVC), or polycarbonate (PC) having a thickness of about 2 mm to 8 mm. It is preferable to make it by press forming. In the case of a small one having a side of 200 mm or less, it can also be produced by injection molding. In this case, an appropriate reinforcing rib or the like can be provided for rigidity and flatness.

In order to improve the visibility of the adhered foreign matter, the pellicle assembly container body 11 is preferably black. The lid body 12 is preferably transparent or colored translucent in order to make the stored pellicle film 20 visible, and may be black in view of weather resistance and the like. In addition, the pellicle assembly container body 11 and the lid body 12 are both provided with a charging prevention function for the resin itself or for charging prevention coating on the surface thereof, and are suitable from the viewpoint of preventing adhesion of foreign matter. Further, it is more preferable to add a flame retardant material to the resin itself or to use a flame retardant resin to impart flame retardancy.

In the dust-proof membrane module storage container main body 11, when the side length is particularly large, the thickness is more than 1000 mm, and it is preferable to apply a reinforcing material containing metal or fiber-reinforced resin to the outer side of the resin molded article or the storage container itself. The material used when the storage container itself is made of metal is preferably a light alloy such as an aluminum alloy or a magnesium alloy. However, a thin plate of stainless steel or carbon steel may be used. As the molding method, integral molding such as casting is preferable. However, it is also possible to join the respective structural members by a method such as welding, pressure-bonding, or screw-bonding after the respective structural members are formed by press molding or the like. In addition, in order to reduce the weight, it is also possible to make a hollow inside.

Moreover, the pellicle assembly container body 11 and the lid body 12 can be provided with a handle and a buckle (not shown) for fixing the lid body in consideration of convenience in use. Further, the pellicle assembly container body 11 may be provided with a leg or the like (not shown) that is transported by a forklift or the like. [Examples]

Hereinafter, embodiments of the present invention will be described in detail based on the drawings. First, the pellicle assembly container 10 as shown in FIGS. 1 to 6 is produced. The pellicle assembly container body 11 was produced by vacuum-forming the ABS resin sheet with a black flame retardant charge of 5 mm in thickness. On the other hand, the cover 12 is fitted to the pellicle assembly container main body 11 at the peripheral portion thereof, and is formed by vacuum molding using a transparent polycarbonate resin plate having a thickness of 5 mm. After the molding process, the entire antistatic agent is used ( Shin-Etsu Polymer Co., Ltd., trade name SEPLEGYDA). The external dimensions after installation are 1350 mm × 1535 mm × 120 mm.

In the pellicle frame support device 13, a polyester elastomer (manufactured by Toray DuPont Co., Ltd., trade name; Hytrel) was used as a material, and a plate nut 17 made of stainless steel was inserted into the inside to be injection molded. Then, the pellicle frame support device 13 thus produced is placed on the pellicle container storage container body 11, and assembled from the inside by two bolts 16.

As shown in Fig. 1, the assembly position of the pellicle frame support device 13 is four at the long side and the short side. The position is determined in such a manner that the pellicle assembly is taken out so as not to interfere with the processing jig that grips the pellicle assembly or the pellicle assembly holding mechanism of the automatic device.

Further, on the pellicle assembly container main body 11, the holder holding device 15 which is formed by injection molding of ABS resin is fixed by bolts (not shown) from the inside. When the holder holding device 15 is fixed, the position of the pellicle assembly holder 14 inserted into the holder holding device 15 is adjusted so that the pellicle assembly holder 14 and the outer surface of the pellicle frame 21 are shown in FIG. The groove 26 is fitted.

Then, the pellicle container storage container 10 is carried into a clean room of class 10, washed well with a surfactant and pure water, and completely dried.

Then, in order to evaluate the pellicle container storage container 10, the pellicle assembly 20 is produced. First, an A5052 aluminum alloy frame having an outer dimension of 1366 mm × 1136 mm, a frame width of 12 mm, and a frame height of 5.8 mm was mechanically machined to fabricate a pellicle frame 21 . Further, on each of the long sides of the pellicle frame 21, four through holes (not shown) having a diameter of 1.5 mm are provided as vent holes, and a height of 3 mm and a depth of 2.3 mm are provided at the corners of the long sides. , a groove 26 of 40 mm in length. Then, sandblasting was performed to have a surface of Ra 0.6 or so, followed by black anodizing.

In addition, the pellicle frame 21 was formed into a frame-like surface, and a ruthenium adhesive (manufactured by Shin-Etsu Chemical Co., Ltd.) diluted with toluene was applied by an air pressure type distributor, and a height of 1.2 was formed along the inner circumference thereof. The coated area of the mask adhesive layer 22 of mm, 5 mm wide. On the pellicle frame 21 having a frame width of 12 mm, an uncoated region 23 having a width of 7 mm uncoated with a masking adhesive layer was formed on the outer periphery thereof.

Further, on the opposite surface of the surface of the masking adhesive layer 22 on which the pellicle frame 21 was formed, a ruthenium adhesive (manufactured by Shin-Etsu Chemical Co., Ltd.) diluted with toluene was applied by an air pressure type distributor to form The pellicle film is attached to the layer 24. Then, a film having a thickness of 4.1 μm composed of a fluorine-based resin (trade name: Cytop, manufactured by Asahi Glass Co., Ltd.) is placed as a pellicle film 25 on the pellicle film layer 24, and is provided on the pellicle film 25 at the same time. The vent hole of each long side is covered with a filter (not shown) including a PTFE film to complete the pellicle assembly 20.

Then, the pellicle film assembly 20 thus produced is subjected to foreign matter inspection in the dark room, and then placed on the pellicle frame support device 13 on the cleaned pellicle container storage container body 11, as shown in FIG. The frame holder 14 slides on the holder holding device 15 and is inserted into the groove 26 on the outer side surface of the pellicle frame 21. Then, the lid body 12 is placed on the pellicle pack container main body 11 to be sealed, and the peripheral portion thereof is sealed with an adhesive tape (not shown) to complete the storage of the pellicle film assembly 20 in the pellicle pack storage container 10.

When the pellicle film assembly 20 is housed, the elastic body 51 made of a rubber of 50 (Shore A) is attached to the inner side of the cover body 12 of the frame holder 14 at four places as shown in Fig. 5 . on. When the lid body 12 is placed on the pellicle container storage container main body 11, the elastic body 51 is adjusted to be in contact with the upper portion of the frame holder 14 to obtain a crushing deformation of 0.2 mm to 1 mm. The action of the elastic body 51 causes the frame holder 14 to be pressed and fixed to the holder holding device 15.

Finally, as an evaluation of the pellicle assembly container 10 of the present invention, the pellicle assembly storage container 10 that houses the pellicle assembly 20 that does not use the conventional release sheet is lifted by two operators to a waist height, from the level to the level The operation of slightly tilting is performed five times for each side (four directions) for a total of 20 times. Thereafter, the inside of the clean room is opened, and the damage of the pellicle film assembly 20 and the adhesion of the foreign matter in the dark room are inspected. The pellicle film assembly 20 does not move at all on the pellicle pack container body 11, and no dust is found at all. Foreign matter adhering to the film assembly 20 is increased.

Further, the pellicle frame 21 was also inspected, and the foreign matter adhering or scratching of the portion in contact with the pellicle frame support device 13 was not observed, and the mask adhesive layer 22 was not found at all. Defects.

Then, the pellicle film container 10 is stored in an environment having a humidity of 40% to 70% and a temperature of 20 to 30° C. for one year, and the pellicle container storage container 10 is opened again one year later to remove the dust. The film module 20 is housed in the same manner as the test one year ago, and the pellicle frame 21 is placed on the pellicle frame support device 13, and since the pellicle holder 14 can be inserted into the groove 26, any time-dependent Changes or operational and management problems were not found. [Comparative example]

In the comparative example, first, the frame holder 14 of the pellicle assembly container 10 of the embodiment is replaced with the holder holding device 15, as shown in the plan view of Fig. 11, and the use of the pin 112 and the pin holding device 113 is used. The pellicle assembly of the fixing device houses the container 110. Fig. 12 is a perspective view showing a state in which the pin 112 and the pin holding device 113 are combined. In Fig. 11, in order to explain the dust-proof membrane module storage container body, the description of the lid body is omitted, and the structure of the lid body is basically the same as that of the embodiment.

The materials of the pin 112 and the pin holding device 113 of the comparative example were all ABS resin and were produced by injection molding. The pin 112 is constituted by a pin 112a, a projection 112b, and a thicker operation portion 112c while being supported by the pin holding device 113. Further, the pin 112 is engaged with the gap of the insertion and insertion, and the projection 112b is engaged with the concave portion 113a of the pin holding device by the screwing operation, and is fixed at the inserted position. Then, in order to prevent dust from being generated by sliding against the pellicle frame 121, the tip end of the pin 112a is provided with an elastic body 114 made of fluororubber.

Then, in the comparative example, the pellicle frame 121 of the same size as the embodiment was also subjected, and on the outer side of the long side, a non-penetrating circular hole 122 having a diameter of 2 mm and a depth of 2.5 mm was placed at a distance of 30 mm from the corner of the frame. The location setting is totaled at 4. Then, when the pellicle frame 121 is placed on the pellicle frame support device 13 on the pellicle container housing main body 111, the position of the pin holding device 113 is adjusted so that the pin 112 is inserted outside the pellicle frame 121. The side hole 122 is simultaneously fixed to the pellicle container storage container body 111 by a bolt (not shown).

Then, in the same manner as in the embodiment, the pellicle container storage container 110 is carried into a clean room of class 10, washed with a surfactant and pure water, and completely dried.

Then, in the comparative example, in order to evaluate the pellicle container storage container 110, in addition to the pellicle frame 121, the pellicle assembly 120 was produced by the same material and manufacturing process as the embodiment, and the pellicle assembly of the comparative example was used. The frame 121 also forms a region where the masking adhesive layer is applied and an uncoated region on the outer periphery thereof which is not coated with the masking adhesive layer. Therefore, the pellicle film assembly 120 of the comparative example and the pellicle film assembly 20 of the embodiment have the groove 26 in the outer side surface of the pellicle frame 21 of the embodiment, and the outer side of the pellicle frame 121 has a non-penetrating circle. Holes 122, except for this point, are identical.

After the foreign matter inspection of the pellicle film assembly 120 is performed in the dark room, it is housed in the pellicle film container 110, and the peripheral portion is sealed with an adhesive tape (not shown) to complete the pellicle container storage container 110.

Finally, as an evaluation of the pellicle assembly container 110 of the comparative example, the pellicle assembly container 110 in which the pellicle assembly 120 is housed is lifted by two operators to a waist height, approximately horizontally, as in the embodiment. The vertical tilting operation is performed five times for each side (four directions) for a total of 20 times. Thereafter, the inside of the clean room is opened, and the damage of the pellicle film assembly 120 and the adhesion of the foreign matter in the dark room are inspected. The pellicle film assembly 120 does not move at all on the pellicle assembly container body 111, and no dust is found at all. Foreign matter adhering to the film assembly 120 is increased.

In addition, the pellicle frame 121 was inspected, and the foreign matter adhering or scratching of the portion in contact with the pellicle frame support device 13 was not seen at all.

In the same manner as in the embodiment, the dust-proof membrane module storage container 110 is stored in an environment having a humidity of 50% and a temperature of 20° C. to 30° C. for one year, and the pellicle assembly container 110 is reopened one year later. When the same pellicle assembly 120 is to be housed, the positions of the holes 122 and the pins 112 of the pellicle frame 121 are not aligned, and a displacement of about 1.5 mm is generated in the horizontal direction, and the pin 112 cannot be inserted. For this reason, the size change of the pellicle assembly container body 111 over time causes the position of the pin 112 to be displaced. If the pellicle assembly 120 is to be housed, the position of the pin needs to be adjusted.

10‧‧‧Plastic membrane assembly storage container
11‧‧‧Plastic membrane module storage container body
12‧‧‧ Cover
13‧‧‧Plastic membrane module frame support device
13a‧‧‧Departure
13b‧‧‧Vertical
13c‧‧‧ Cone
14‧‧‧Frame holder
14a‧‧‧The apex section
15‧‧‧Fixator holder
15a‧‧‧ditch
15b‧‧‧corner hole
16‧‧‧Bolts
17‧‧‧Sheel nuts
20‧‧‧Pneumatic film assembly
21‧‧‧Plastic membrane assembly frame
22‧‧‧Mask Adhesive Layer
23‧‧‧Mask adhesive layer uncoated area
24‧‧‧Pattern film assembly film
25‧‧‧Plastic membrane module membrane
26‧‧‧ditch
51‧‧‧ Elastomers
91‧‧‧Fixator retaining device
92‧‧‧Adhesive tape
101‧‧‧ Elastomers
110‧‧‧Plastic membrane assembly storage container
111‧‧‧Plastic membrane module storage container body
112‧‧ ‧ sales
112a‧‧‧ pin
112b‧‧‧ Protrusion
112c‧‧‧Operation Department
113‧‧‧ pin retention device
113a‧‧‧ recess
114‧‧‧ Elastomers
120‧‧‧Pneumatic film assembly
121‧‧‧Plastic film assembly frame (comparative example)
122‧‧‧ hole

Fig. 1 is a plan view showing an embodiment of a pellicle container storage container according to the present invention. . Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1 showing an embodiment of the present invention. Fig. 3 is a cross-sectional view taken along line B-B of Fig. 1 showing an embodiment of the present invention. Fig. 4 is an enlarged view of a portion C of Fig. 2 showing an embodiment of the present invention. Fig. 5 is an enlarged view of a portion D of Fig. 3 showing an embodiment of the present invention. Fig. 6 is a perspective view showing the entire dust-proof membrane module storage container of the present invention. Fig. 7 is a perspective view showing a state in which a frame holder is inserted into a groove of a holder holding device. Fig. 8 is a perspective view showing a state in which a frame holder is inserted into a corner hole of a holder holding device. Fig. 9 is a perspective view showing a state in which an adhesive tape for a frame holder is held by a holder holding device. FIG. 10 is a cross-sectional view showing a state in which the elastic body inside the cover body for the frame holder is pressed and fixed. Fig. 11 is a plan view showing a pellicle assembly container using a pin of a comparative example. FIG. 12 is a perspective view showing a state in which the pin pin holding device of the comparative example is held.

10‧‧‧Plastic membrane assembly storage container

11‧‧‧Plastic membrane module storage container body

13‧‧‧Plastic membrane module frame support device

14‧‧‧Frame holder

15‧‧‧Fixator holder

20‧‧‧Pneumatic film assembly

21‧‧‧Plastic membrane assembly frame

25‧‧‧Plastic membrane module membrane

Claims (7)

A pellicle assembly container that houses a pellicle without a release sheet, and includes: a pellicle assembly container body; and a cover that fits and seals the pellicle container container; the pellicle assembly container The pellicle assembly container body is provided with a pellicle frame support device supporting the pellicle frame having the mask adhesive layer coating region and the uncoated region, and a holder holding device, a pellicle frame support device that holds a plate-shaped frame holder while the frame holder is inserted while the uncoated region of the mask adhesive layer of the pellicle frame is supported A groove on the outer side of the pellicle frame. The pellicle assembly container according to claim 1, wherein the holder holding device has a groove or a hole that fits the frame holder, and the frame holder is in a substantially horizontal direction It is movably held. The pellicle assembly container according to the first or second aspect of the invention, wherein the frame holder is partially pressed by the cover so that the position thereof is fixed. The pellicle assembly container according to the first or second aspect of the invention, wherein the frame holder has a part of the elastic body disposed on the inner side of the cover pressed from above, so that the frame is fixed. . The pellicle assembly container according to the first or second aspect of the invention, wherein the frame holder is attached by an adhesive tape to be fixed to the holder holding device. The pellicle assembly container according to the first or second aspect of the invention, wherein the frame holder has a rear end in contact with an inner surface of the cover, and a horizontal movement thereof is regulated. The pellicle assembly container according to the first or second aspect of the invention, wherein the frame holder has a rear end that is in contact with an elastic body disposed on an inner surface of the cover, and the horizontal movement thereof Regulated.