TWI574102B - Piege film assembly container - Google Patents

Description

Dust-proof film assembly storage container

The present invention relates to a pellicle assembly storage container which is a storage container for a pellicle for use as a dust preventor for manufacturing a semiconductor device, an IC package, a printed substrate, a liquid crystal display, an organic EL display, or the like, and is suitable for at least A large pellicle assembly with a side length of more than 1000mm.

In the manufacture of a semiconductor such as an LSI or a super LSI, or a liquid crystal display, a semiconductor wafer or a liquid crystal glass plate is irradiated with ultraviolet light to form a pattern. However, if dust is adhered to the photomask used at this time, the dust will be formed. The ultraviolet light is blocked or reflected, so that deformation, short circuit, and the like of the transferred pattern occur, and the quality is impaired.

Therefore, these operations are usually performed in a clean room, but even so, it is difficult to keep the reticle clean frequently. Therefore, it is necessary to attach the pellicle film as a dustproof device to the surface of the photomask before performing exposure. In this case, the foreign matter does not directly adhere to the surface of the photomask, but adheres to the pellicle assembly, whereby the foreign matter on the pellicle component becomes as long as the focus is on the pattern of the photomask. Transfer has nothing to do.

The pellicle film assembly is generally a transparent dust-proof film composed of nitrocellulose, cellulose acetate or fluororesin which is well transmitted light, and then It is made up of the upper end surface of the dust-proof film assembly frame made of aluminum, stainless steel, engineering plastics, and the like. Further, at the lower end of the pellicle frame, an adhesive layer made of polybutene resin, polyvinyl acetate resin, acrylic resin, fluorene resin or the like for mounting on the reticle is provided, and the adhesive layer is protected. Release layer (separation sheet).

On the other hand, a pellicle assembly container for accommodating such a pellicle, in particular, a large pellicle having a side length of more than 1000 mm, is a pellicle assembly container body in which a pellicle is placed. A lid member that is fitted to the peripheral portion and sealed is sealed. Further, these component materials are produced by vacuum forming or pressure forming a resin plate having a thickness of about 2 to 8 mm. This method can be produced by integrally molding even if it is large, and therefore has a small amount of internal dust generation and is produced. The advantage is high and can be manufactured at low cost.

In order to improve the visibility of the foreign matter to be adhered, it is preferable that the dust-proof membrane module storage container body is black, and the cover body is preferably transparent or colored translucent in order to be able to visually recognize the pellicle film stored therein (refer to Patent Document 1). . Further, from such a viewpoint, in almost all cases, ABS resin is used as the material of the container body, and ABS resin or acrylic resin is used as the material of the lid.

Then, with the increase in the size of the display panel in recent years, the size of the pellicle is also increased, and the side length is more than 1000 mm, and the dustproof film module is gradually increased in size. The problem of the change in the size of the storage container over time becomes remarkable. Therefore, for example, in Patent Document 2, as a countermeasure against this, a structure of a reinforcing body combined with a container body made of resin has been proposed.

However, it is considered that the change in the dimensional change of the pellicle assembly container is a characteristic of the material itself before molding, moisture absorption, relaxation of internal stress generated during molding, and environmental conditions such as temperature. Various factors are mixed together, so it is difficult to solve them.

[Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Special Opening 2001-100394

[Patent Document 2] Japanese Special Open 2013-205690

In addition, when the change in the dimensional change occurs and the fitting of the pellicle assembly container main body and the lid body is shifted, the gap therebetween is increased, and foreign matter is not intruded into the pellicle container storage container from the outside. There will be concerns about the occurrence of scratches and dust. In addition, in the pellicle assembly container having the positioning unit inside the fixing of the pellicle assembly, the position is deviated from the normal position due to the dimensional change, and thus the situation in which the pellicle is not accommodated or shaken may occur. It becomes a problem that it becomes easy to generate foreign matter.

Accordingly, the present invention has been made in view of the above problems, and an object thereof is to provide a dustproof of a large-sized pellicle assembly having a side length of more than 1000 mm, which is small in change over time, and which does not reduce internal cleanliness even if used for a long period of time. Membrane assembly storage container.

The inventors and the like conducted intensive research in order to achieve the above object, and It is known that among various factors that affect the dimensional change over time, in particular, the water absorption rate of the material used in the pellicle container storage container greatly affects the dimensional change over time. Therefore, when the water absorption rate of the material is further studied, it is found that the resin material having a water absorption rate of 0.2% or less (JIS K7209, method A, material thickness: 3 mm, 24 hours) can suppress the dimensional change over time to a minimum. The present invention has thus been completed.

That is, the present invention is a pellicle pack storage container that houses at least one rectangular pellicle assembly having a side length of more than 1000 mm, and is characterized in that the pellicle assembly container body and the lid body on which the pellicle assembly is placed have a water absorption rate of 0.2% or less. (JIS K7209, method A, material thickness: 3 mm, 24 h) is made of a resin material.

Further, in the pellicle container storage container of the present invention, the lid body is made of a resin material having a water absorption rate of 0.2% or less (JIS K7209, method A, material thickness: 3 mm, 24 hours), and the body may be composed of a metal material. Resin material. Further, the resin material used in the present invention preferably has a water absorption rate of 0.5% or less after 30 days (JIS K7209, method A, material thickness: 3 mm).

According to the present invention, the change in the size of the pellicle assembly container over time is extremely small, and the pellicle assembly fixing member provided in the pellicle assembly container is appropriately held while the pellicle assembly container body and the cover are properly fitted. Since the position does not change, there is an effect that the cleanliness of the stored pellicle can be maintained for a long period of time.

10‧‧‧Plastic membrane assembly storage container

11‧‧‧Plastic membrane module storage container body

12‧‧‧ Cover

13‧‧‧ needle

14‧‧‧needle support unit

20‧‧‧Pneumatic film assembly

21‧‧‧Plastic membrane assembly frame

22‧‧‧ Covering Adhesive Layer

23‧‧‧Separator

24‧‧‧Dust film adhesion layer

25‧‧‧Dust film

Fig. 1 is a plan view showing an outline of a pellicle container storage container according to the present invention.

Fig. 2 is a cross-sectional view along line AA of Fig. 1 showing an outline of a pellicle container storage container according to the present invention.

Fig. 3 is a cross-sectional view taken along line BB of Fig. 1 showing an outline of a pellicle container storage container according to the present invention.

Fig. 4 is a plan view showing the cover of the pellicle container storage container of the present invention removed.

Fig. 5 is a perspective view of the dust-proof membrane module storage container of the present invention.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings, but the present invention is not limited thereto.

The present invention can be applied to all pellicle container storage containers having the problem of reduced internal cleanliness caused by dimensional change over time, and particularly suitable as a pellicle assembly container for housing a very large type of pellicle assembly having a side length of more than 1000 mm. .

The pellicle assembly container 10 of the present invention comprises a pellicle assembly container body 11 and a lid 12. The pellicle assembly container body 11 mounts the pellicle assembly 20, and the lid body 12 and the pellicle assembly container body 11 are fitted and sealed at the peripheral edge portion, thereby protecting the pellicle film assembly 20 from external dust. Furthermore, the pellicle assembly 20 placed on the pellicle container storage container body 11 It is fixed to the pellicle assembly container body by a fixing unit composed of a pin 13 inserted in a non-through hole (not shown) provided on the side surface of the frame and a needle supporting unit 14 supporting the needle. 11 on.

The material of the pellicle assembly container body 11 and the lid body 12 of the present invention is a resin material having a water absorption rate of 0.2% or less in a measuring method of JIS K7209 (method A, 24h, material thickness: 3 mm). Water absorption is a phenomenon in which water intrudes into the mesh of molecules constituting the resin material, and if the water absorption rate exceeds 0.2%, the dimensional change becomes extremely large, which is not preferable. Examples of the resin material satisfying the conditions of the water absorption rate include rigid PVC, PE, PP, PC, and the like. Further, even if it is a material having a large water absorption rate such as ABS, the water absorption rate can be lowered by mixing the filler.

In addition, since the material is required to maintain a low level for a long period of time, it is more preferable to use a resin material having a water absorption ratio of 0.5% or less after 30 days in the measurement method of JIS K7209 (method A, material thickness: 3 mm). . The dust-proof film module storage container is a user who is in a humidity environment, and water absorption itself is unavoidable regardless of the use of a material having a low water absorption property. After the pellicle container storage container is manufactured, the water absorption is simultaneously performed over time, and the actual pellicle assembly container is used in a state where the moisture content is almost saturated. It is considered that if the water absorption rate in the saturated state is low and the difference from the initial water absorption rate is small, the dimensional stability is higher. As a standard, it is preferable that the water absorption rate is 0.5% or less after 30 days have elapsed. Further, as the resin material satisfying this condition, similarly to the above, a rigid PVC, PE, PP, PC, or the like can be exemplified.

Moreover, from the point of view of quality or cost, if the material is used The membrane module storage container main body 11 and the lid body 12 are preferably formed by vacuum forming or pressure forming a resin sheet having a thickness of 2 to 8 mm.

There are various reasons for the change in the size of the pellicle assembly container 10 over time. The water absorption rate of the material used in the pellicle container storage container 10 greatly affects the dimensional change over time, and therefore, if the use is satisfied, In the case of the resin material of the present invention, the dimensional change over time can be drastically reduced. As a result, the fitting state of the pellicle container storage container or the fixing state of the pellicle is not changed for a long period of time, and the cleanliness in the pellicle container storage container can be maintained, so that it can be used as a puff film which is practically free from problems. The component storage container satisfactorily maintains the quality of the stored pellicle.

In addition to the water absorption rate of the resin material of the present invention, in order to reduce the adhesion of foreign matter, it is preferred to knead the antistatic component in the resin or to apply a coating on the surface thereof to have antistatic properties. It is also preferred to add a flame retardant or the like such as a halogen compound to impart flame retardancy, or to use a resin having flame retardancy.

According to the present invention, in the case of at least one pellicle container storage container of the present invention having a side length of more than 1000 mm, the combustible material has a large volume and weight. Therefore, if the material has flame retardancy, it is a safety advantage. As a suitable resin satisfying these conditions, for example, PC, PVC or ABS in which an inorganic filler is mixed may be mentioned.

Further, in the pellicle assembly container main body 11 and the lid body 12, a reinforcing structure such as a rib or the like may be provided as needed, or a metal may be provided. Or a reinforcing unit made of resin, a handle for operation, or a buckle for fixing the lid.

Further, when the pellicle is more than 1500 mm in length, the pellicle assembly container is particularly required to have rigidity. Therefore, it is particularly preferable that only the lid body 12 is made of resin, and the pellicle film container body 11 is made of metal. When the pellicle film container body 11 is made of metal, a high-rigidity material such as steel or stainless steel may be used in addition to a lightweight material such as an aluminum alloy or a magnesium alloy.

Further, as a forming method in the above case, the sheet may be formed by bending, press molding, welding, or the like, or casting. In order to prevent rust and prevent the occurrence of dust, the surface thereof is preferably coated, and in particular, in addition to imparting antistatic properties, in order to improve the visibility of adhering foreign matter, black is preferred.

As a fixing means for fixing the pellicle film assembly 20 to the pellicle assembly container body 11, various well-known methods can be applied. In the embodiment shown in FIG. 4, the pellicle assembly container body 11 is provided with a needle supporting unit 14, and the needle 13 supported thereby is inserted into a non-penetrating hole (not shown) provided in the side surface of the pellicle frame. Thus, the pellicle assembly 20 is fixed, and other known methods can be used.

Further, in the embodiment shown in FIG. 4, the lower surface of the pellicle frame 21 is provided with a cover adhesive layer 22, and a separator 23 for protecting the cover adhesive layer 22 is attached thereto, in order not to cover The curtain adhesive layer 22 is in contact with the pellicle assembly container body 11, and a unit for supporting the pellicle frame 21 or the like may be separately provided, and the separation piece may be omitted.

[Examples]

Hereinafter, embodiments of the invention will be described in detail.

In the embodiment, the pellicle assembly container body 11 and the lid body 12 are first manufactured by vacuum forming using a PC (polycarbonate) plate having a thickness of 5 mm, and the polycarbonate sheet is cut before the vacuum forming. A 60×60 mm sample was cut and finished to a thickness of 3 mm, and the water absorption after 24 hours was measured in accordance with JIS K7209 (A method, 24h), and the value was 0.15%. Further, the water absorption rate after 30 days was further measured, and the value was 0.34%.

Then, the vacuum-prepared pellicle assembly container body 11 and the lid body 12 after vacuum forming are subjected to cutting processing by a CNC machine tool, and the surface thereof is coated with an antistatic paint (trade name: Seyuki Ryuji, Shin-Etsu Polymerization) Coated by Co., Ltd.) to harden it. Further, the needle supporting unit 13 is attached to the pellicle assembly container body 11 by bolting (not shown) from the outside. The pellicle container storage container 10 thus produced has a size of an outer dimension of 1100 x 1280 x a height of 120 mm. Moreover, the fitting portion of the pellicle assembly container body 11 and the lid body 12 is adjusted so that the gap between the sides is 0.3 to 0.5 mm.

On the other hand, the pellicle assembly 20 accommodated in the pellicle container storage container 10 of the present invention is produced in the following specifications. That is, the pellicle frame 21 was machined by machining A5052 aluminum alloy, and its size was set to an outer dimension of 910 x 1130 mm, an inner dimension of 890 x 1110 mm, and a height of 5.8 mm, and the surface thereof was subjected to black alumite treatment. Further, four vent holes (not shown) having a diameter of 1.5 mm are provided near the center of each long side, and diameters are provided near the corners of the respective sides. 2.5mm non-through clamp hole (not shown).

Then, an anthraquinone adhesive (trade name; KR-3700, Shin-Etsu Chemical Co., Ltd.) was formed as a mask adhesive layer 22 on the lower surface of the pellicle frame 21 with a thickness of 1.3 mm, and the surface was coated with a coating. A separator 23 composed of a PET film of a release agent was placed. Further, a filter (not shown) made of a PTFE porous film is attached to the vent hole on the side surface of the pellicle frame 21 by an acrylic adhesive. Further, an anthrone adhesive (trade name; KR-3700, Shin-Etsu Chemical Co., Ltd.) is applied as a dust-proof film adhesive layer 24 on the upper surface of the pellicle frame 21, and a fluororesin (trade name) is stretched thereon. ; CYTOP, Asahi Glass Co., Ltd.) is a dust-proof film 25 having a thickness of 4.5 μm.

The pellicle film assembly 20 thus produced is subjected to foreign matter inspection, and is fixed to the pellicle assembly container body 11 by the needle 13 and the needle holding unit 14, and sealed by the lid body 12. Thereafter, the periphery of the fitting portion was sealed with an adhesive tape made of PVC, and the bag was made of an antistatic polyethylene bag. Moreover, when the pellicle assembly 20 is housed, the pellicle assembly container 10 is cleaned and dried by a surfactant and pure water in a clean room of class 10.

Finally, the pellicle container storage container 10 in which the pellicle film assembly 20 is housed is placed in a room where the air conditioner is at a temperature of 22 to 28 ° C and a humidity of 30 to 55%, and is stored for one year.

Then, the dust-proof membrane module storage container 10 is carried into the clean room of the tenth stage, and the inside is checked, and the fitting state of the pellicle assembly container main body 11 and the lid body 12 is not particularly problematic. It can be opened and closed smoothly. Further, the periphery of the fitting portion was irradiated with a halogen lamp, and visual observation was carried out, and no particularly severe scratches were observed. Further, in the foreign matter inspection of the stored pellicle unit 20, no foreign matter or damage was observed, and the state was maintained in a normal state.

[Comparative example]

In the comparative example, first, the pellicle container storage container was manufactured in the same manner as in the examples. In this comparative example, ABS (acrylonitrile-butadiene-styrene) resin having a thickness of 5 mm was used for the material of the pellicle assembly container body, and a PMMA (acrylic) resin having a thickness of 5 mm was used for the lid body. The example is different. Further, the mold used for molding is finely adjusted in size according to the thermal expansion coefficient of each material, and is adjusted so that the gap between the pellicle assembly container main body and the lid is 0.3 to 0.5 mm on each side.

Then, the pellicle container storage container of the comparative example was subjected to a one-year storage test in the same manner as in the above-described embodiment. In other words, the water absorption rate of the material was measured in accordance with JIS K7209 (method A) before the formation of the pellicle assembly container main body and the lid body. As a result, the ABS resin used in the pellicle assembly container main body was 0.3% after 24 hours. It was 0.8% after 30 days. On the other hand, the acrylic resin used in the lid body was 0.3% after 24 hours, and 1.6% after 30 days.

Then, the pellicle film of the same specifications as the embodiment was inspected for foreign matter, and it was fixed to the pellicle assembly container body by a needle and a needle supporting unit, and sealed with a lid. Then, the periphery of the fitting portion was sealed with an adhesive tape made of PVC, and wrapped in an antistatic polyethylene bag. In addition, when the pellicle film assembly 20 is housed, the pellicle is housed in a dust-free chamber of class 10 with a surfactant and pure water. The device 10 is subjected to a good washing treatment and drying. Then, the dust-proof membrane module storage container was placed in a room having a room temperature of 22 to 28 ° C and a humidity of 30 to 55% in the same manner as in the example, and was left to stand for one year.

Then, one year later, the package body was placed in a clean room of the tenth stage, and the inside was opened, and the internal condition was confirmed, and the fitting of the cover body and the pellicle container storage container body was confirmed to be tight. Further, a part of the lid body is lifted, and the adhesive tape around the seal is peeled off, and at the same time, the container body of the pellicle is accommodated in a plurality of lifts. Then, the size of the removed lid was confirmed, and as a result, an elongation of about 5 mm was observed in the longitudinal direction, and an elongation of about 4 mm was observed in the short-side direction. In the pellicle assembly container main body, an elongation of about 1.5 mm was observed in the longitudinal direction, and an elongation of about 1.5 mm was also observed in the short-side direction.

In addition, foreign matter inspection was performed on the deposited pellicle film assembly 20, and as a result, a large amount of foreign matter of φ3 to 5 μm was adhered to the film surface, and five foreign materials of φ10 to 20 μm were adhered thereto, which was presumed to be due to the pellicle assembly container. The fitting of the main body and the lid is deteriorated, and the inside of the pellicle assembly container is ventilated, so that the inside is contaminated. Further, a lot of dust adheres to the peripheral portion of the jig hole of the pellicle frame of the insertion needle, and it is presumed that the reason for the change in the size of the pellicle assembly container body is that the fitting position of the needle is deviated and friction is generated with the pellicle frame.

10‧‧‧Plastic membrane assembly storage container

11‧‧‧Plastic membrane module storage container body

12‧‧‧ Cover

20‧‧‧Pneumatic film assembly

21‧‧‧Plastic membrane assembly frame

22‧‧‧ Covering Adhesive Layer

23‧‧‧Separator

24‧‧‧Dust film adhesion layer

25‧‧‧Dust film

Claims (3)

A pellicle assembly container which is a pellicle assembly container that houses at least one rectangular pellicle assembly having a side length of more than 1000 mm, and includes a pellicle assembly container body on which the pellicle assembly is placed and A cover body in which the peripheral edge portion is fitted and sealed, and the pellicle assembly container main body and the lid body are made of a resin material having a water absorption rate of 0.2% or less (JIS K7209, Method A, material thickness: 3 mm, 24 hours). A pellicle assembly container which is a pellicle assembly container that houses at least one rectangular pellicle assembly having a side length of more than 1000 mm, and includes a pellicle assembly container body on which the pellicle assembly is placed and a cover body that is fitted and sealed at a peripheral portion thereof, and the pellicle assembly container main body is made of a metal material, and the cover body has a water absorption rate of 0.2% or less (JIS K7209, Method A, material thickness: 3 mm, 24 h) Made of resin material. The pellicle container storage container according to the first or second aspect of the invention, wherein the water absorption of the resin material is 0.5% or less after 30 days (JIS K7209, method A, material thickness: 3 mm).