TWI491977B - Manufacturing method of pellicle and divided frame assembly formed by combining multiple divided frame parallely - Google Patents

Description

Method for manufacturing pellicle film assembly and split frame assembly formed by juxtaposing a plurality of divided frames

The present invention relates to a method of manufacturing a pellicle for use as a dust cover for a photolithography mask or the like in the manufacture of a circuit for manufacturing an LSI or a liquid crystal display.

In the manufacture of semiconductors such as LSI and super LSI, or in the manufacture of liquid crystal displays, etc., a photolithography operation for patterning a semiconductor wafer or a liquid crystal original plate is performed. At this time, if dust adheres to the mask or the reticle, the dust is transferred, so that the pattern is deformed, the edges become irregular, and the substrate is dirty. Thus, the work is usually carried out in a clean room, but even this is often difficult to keep the reticle clean. For example, in the photolithography, the pellicle is placed on the photomask, so that the foreign matter on the photomask can be prevented from adhering. By exposing the focus to the pattern of the mask, it is possible to transfer without being affected by the dust adhering to the dust-proof film.

In recent years, there has been a strong demand for low cost of the pellicle film assembly. In dustproof Among the manufacturing costs of the film module, the highest proportion is the manufacturing process of the pellicle film. In the manufacturing process of the conventional pellicle film assembly, only one pellicle film can be obtained in one filming process of the pellicle film, and the process requires at least several hours. Patent Document 1 describes the method for producing a pellicle film.

Further, it is preferable that the deflection of the frame is as small as possible, and the pellicle film attached to the frame cannot be wrinkled. Patent Document 2 describes a method in which the tension of the pellicle film is adjusted to prevent the occurrence of wrinkles.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-157229

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2011-158585

With the pellicle film obtained by the film forming process, the tension in the film is required to be uniform. When one of the pellicle films obtained by one film forming process is divided into a plurality of pieces, the direction and distribution thereof or any one of them is not uniform. In the case where a large tension side of the tension exists, the frame is deflected due to the tension; on the other hand, in the case where the loose side of the tension is present, although the deflection of the frame does not occur, it is only applied to the frame. With a little force, the dust-proof film will wrinkle. The pellicle component in which the wrinkles occur deteriorates the optical exposure quality and causes a problem of reduced exposure area.

The present invention is an invention for solving the above problems. An object of the present invention is to provide a method for manufacturing a plurality of pellicle assemblies by one film forming process, and to prevent deflection of the frame and wrinkles of the pell film by removing the unevenness of the tension of the pellicle film. method.

The object of the present invention can be achieved by the following technical solutions:

A method of manufacturing a pellicle according to a method of manufacturing a pellicle for attaching a pellicle to a frame, wherein a pellicle is attached to a temporary frame and has a ratio After the outer frame of the temporary frame is small, the plurality of side-by-side split frames are separated from the dust-proof film on the temporary frame, and the dust-proof film is cut off from the temporary frame along the outer side of the split frame. The split frame is separated, and the dust-proof film attached to each of the split frames is attached to the frame, and the split frame is removed.

A method for producing a pellicle film assembly, which is a method for producing a pellicle film assembly in which a pellicle film is stretched and attached to a frame, wherein a plurality of pellicle films on a film-forming substrate are juxtaposed Attached to the combined split frame, the pellicle is separated from the film-forming substrate along the outer edge of the split frame, and the combined split frame is separated, and the pellicle film on each of the split frames is attached to the frame. After that, remove the split box.

3. The method of manufacturing a pellicle according to claim 1 or 2, characterized in that when the pellicle film attached to the frame is attached to the frame, a force of compression or stretching is applied to the frame, and the pellicle is attached. After that, the force is released.

4. A method of manufacturing a pellicle according to claim 1 or 2, characterized in that when the pellicle film attached to the frame is attached to the frame, a force of compression or stretching is applied to the frame, and after the pellicle is attached , the force is released.

A pellicle assembly characterized by: the pellicle assembly It is produced by the method of any one of the first to fourth aspects.

According to the method for producing a pellicle according to the present invention, a plurality of pellicle films can be obtained by one film forming process. Further, when the pellicle film is placed on the frame, the tension of the pellicle film is made uniform, whereby a sufficiently practical pellicle film assembly in which the pellicle film does not wrinkle can be obtained while satisfying the required accuracy of the amount of deflection of the frame.

2, 2a‧‧‧ framework

3‧‧‧Plastic film

3a‧‧‧Dust film material solution

4‧‧‧vents

5‧‧‧ Fixture hole

6‧‧‧Photomask layer

7‧‧‧Filter

8‧‧‧Dust film adhesive layer

9‧‧‧Separator

10‧‧‧Pneumatic film assembly

21‧‧‧Scratch box

22‧‧‧Next layer

24‧‧‧ Film Formation Substrate

31‧‧

32‧‧‧ heating device

41‧‧‧ split box

42‧‧‧Next layer

43‧‧‧ clip

45‧‧‧ needle

46‧‧‧Location decision hole

50‧‧‧film attachment device

51‧‧‧ mounting table

52‧‧‧Fixed Department

53‧‧‧ Lifting platform

54‧‧‧Control Department

55‧‧‧Compression stretching device

56‧‧‧Connecting Department

57‧‧‧ load cell

58‧‧‧

X-X, Y-Y‧‧‧ dividing line

F‧‧‧ force

Fig. 1 is a perspective view showing an example of a pellicle film manufactured by the production method of the present invention.

Fig. 2 is a view showing an example of a film formation process of a pellicle film.

FIG. 3 is a perspective view illustrating an example of a method of dividing a dust-proof film after the split frame is placed on the pellicle film.

Fig. 4 is a perspective view for explaining an example of a method of attaching a dividing frame to which a force of compression or stretching is applied to a frame.

Fig. 5 is a perspective view for explaining another example of a method of dividing a dust-proof film after the split frame is attached to the pellicle film.

FIG. 6 is a perspective view illustrating an example of a method of attaching a dust-proof film to a frame that has been deformed by applying a tensile force, and understanding the unevenness of the tension of each side of the dust-proof film.

Hereinafter, preferred embodiments of the present invention will be described in detail, but The scope of the invention is not limited thereto.

A perspective view of the pellicle assembly 10 manufactured by the manufacturing method of the present invention (Fig. 1). The upper end surface of the frame 2 is formed by a pellicle film subsequent layer 8, whereby the pellicle film 3 is stretched and attached. On the side of the long side of the frame 2, a vent hole 4 and a jig hole 5 are formed. The vent 4 has a dustproof filter 7 therein. The lower end surface of the frame 2 has a mask cover layer 6 for attaching the mask, and further has a separator 9 for protecting the mask cover layer 6.

Fig. 2 is an example of a film forming process of a pellicle film used in the present invention. As shown in (a) of FIG. 2, the mold 31 is horizontally moved on the film formation substrate 24, and the dust-proof film material solution 3a is applied. As shown in (b) of FIG. 2, the film formation substrate 24 is placed on the heating device 32, and the solvent contained in the pellicle material solution 3a is evaporated by heating, and then cooled. As shown in (c) of FIG. 2, on the pellicle film 3, the temporary frame 21 (a part of the cut-off section) on which the adhesive layer 22 is applied to one end surface is followed. As shown in (d) of FIG. 2, the temporary frame 21 is lifted, and the pellicle film 3 is peeled off from the film formation substrate 24, and the pellicle film 3 temporarily attached to the temporary frame 21 is obtained.

The division frame 41 shown in (a) of Fig. 3 is formed of a material having a plurality of flexibility, and a layer 42 is formed on one end surface thereof. Further, a plurality of parallel rows are used, and the position is determined by the needle 45 and the position determining hole 46 (see (b) in Fig. 3), and the joint is opened by the clip 43 opened in the inward direction. The outer size of the combined split frame 41 is smaller than the inner size of the temporary frame 21. On the pellicle film 3 temporarily attached to the temporary frame 21, the dividing frame 41 is placed next to the adhesive layer 42. Using a knife edge The pellicle film 3 is cut off from the outer side of the division frame 41, and after being removed from the temporary frame 21, the clip 43 is removed and cut off at the dividing line X-X, Y-Y. As shown in (b) of FIG. 3, the pellicle film 3 is divided in a state subsequent to the division frame 41.

4 is a perspective view showing a process in which the pellicle film 3 is attached to the frame 2 by the film attaching device 50. The frame 2 has a mask back layer 6, a pellicle film 8 and a separator 9 (refer to Fig. 1) which are omitted in the figure. The film joining device 50 has a rectangular shape, and includes a mounting table 51 on which the dividing frame 41 is placed, and a fixing portion 52 provided at at least one of the corner portions, and a lifting load provided on the inside of the mounting table 51. The table 53 and the compression stretching device 55 provided on at least one of the sides of the mounting table 51.

The division frame 41 is positionally determined by the fixing unit 52, and is placed on the mounting table 51. An elevating mechanism (not shown) is provided on the lower surface of the elevating mount 53 and is raised to move the frame 2 placed upward and attached to the pellicle film 3.

The compression stretching device 55 is movable in a direction perpendicular to each side of the division frame 41, and applies a force of compression or stretching detected by a load cell 57 to the grip portion 54 via the coupling portion 56. Here, the term "compression" means that the direction in which the force is applied is from the outer side to the inner side with respect to the side of the frame, and the stretching is performed in a substantially opposite direction. The two-dot line and the double-dotted line formed by the line segment indicate the state in which the force is applied, and a compressive force is applied to the long sides of the pair of the divided frames 41, and a tensile force is applied to the short sides. When the tension of the pellicle film 3 is not uniform, the table 58 is moved to apply a compressive or tensile force to the dividing frame 41, and after the tension becomes uniform on each side, The frame 2 is attached to the pellicle film 3. Thereafter, the force is released, and the excess portion of the pellicle 3 is cut by a cutter, and the pellicle assembly 10 shown in Fig. 1 is completed.

Fig. 5 shows another embodiment of the method of dividing the pellicle of the present invention. The split frame 41 is placed on the pellicle film 3 on the film formation substrate 24, and after being separated from the film formation substrate 24, the pellicle film 3 is supported by the division frame 41. Then, the clip 43 is removed, and the pellicle film 3 is cut along the outer sides of the dividing lines X-X, Y-Y and the dividing frame 41, and the divided frame 41 to which the pellicle film 3 is attached is obtained. According to the present embodiment, since the temporary frame is not used, the number of steps is smaller than that of the above-described embodiment, and the division of the pellicle film can be quickly performed.

Another embodiment of the pellard film of Fig. 4 in the subsequent engineering of the frame is a frame that replaces the frame 2 and deforms it by applying a compressive or tensile force.

Fig. 6 shows an example of a method of deforming the frame and releasing the unevenness of the tension of the pellicle film. When the tension of the pellicle film is high, a tensile force is applied to each side to form an arc shape that is convex toward the outside of the frame 2a. When the force of releasing the pellicle film and releasing the tension, the force F returning to the inner side of each side is generated and becomes linear, whereby the tension of the pellicle film is reduced, and the deflection of the frame is prevented. As means for applying the force, the same thing as the compression stretching device 55 shown in Fig. 4 can be used. The direction and magnitude of the force applied to each side of the frame by the load detecting means such as a load cell are appropriately adjusted to eliminate the unevenness of the tension of the pellicle film.

Further, the method of making the tension of the pellicle film uniform by the film following device 50 of Fig. 4 and the method of deforming the frame of Fig. 6 to make the tension of the pellicle film uniform may be used, and the two may be used in combination. Furthermore, the sides of the frame The outer side may be formed in advance as a circular arc shape, and may be combined by a method in which the tension of the pellicle film is slightly linear.

As the material of the frame 2, aluminum, stainless steel, polyethylene, or the like can be used. As the light-transmitting dustproof film 3, nitrocellulose, cellulose acetate or fluororesin or the like can be used. The photomask adhesive layer 6 may be a polybutene resin, a polyvinyl acetate resin, an acrylic resin, a enamel resin or the like.

As the film formation substrate 24, quartz, low expansion glass, or the like can be used. The method of applying the pellicle material solution 3a can be carried out by a slit coating method, a spin coating method, a slit, a spin method, and a roll coating method. The heating device 32 can use a hot plate, an infrared lamp, an oven, or the like.

As the flexible material of the temporary frame 21 and the split frame 41, a light alloy such as an aluminum alloy or a magnesium alloy, an iron-based alloy such as stainless steel, carbon steel or tool steel, or GFRP, CFRP or the like can be used. Resin composites, etc. In the temporary frame 21, it is preferable to use stainless steel having high rigidity from the viewpoint of reducing the deflection of each side and increasing the tension of the pellicle film 3. In the division frame 41, since the foreign matter inspection is performed using the spotlight, an aluminum alloy which is lightweight and easy to apply color is preferable.

In FIG. 3 and FIG. 5, the division frame 41 is formed by four, but may be appropriately reduced as necessary, for example, two or six or more.

In Fig. 4, the grip portion 54 is a jig in which a left vertical shape or a hook shape is removed from the mouth, and one of the sides of the divided frame 41 may be provided in plurality. Further, the direction in which the force is applied is not limited to the illustrated direction, and the direction in which the force is applied to the opposite side and the magnitude of the applied force may be different.

[Examples]

The invention will be specifically described below by way of examples, but the invention is not limited thereto.

In the clean room of level 10, the production of the pellicle film is performed by the work shown in (a) to (d) of Fig. 2 . A pellicle film made of a fluororesin (trade name: manufactured by CYTOP Asahi Glass Co., Ltd.) diluted with a solvent by a smooth-polished quartz substrate of 1220 × 1400 mm is used for the film-forming substrate 24 shown in Fig. 2 (a). The material solution 3a is moved and coated from the die 31 while being discharged. After the solvent is dried in the airflow of the clean room as it is, the film formation substrate 24 is moved and heated on the heating device 32 (aluminum alloy heating plate) as shown in FIG. 2(b), and the applied pellicle film is applied. The solvent contained in the material solution 3a is completely evaporated to form the pellicle film 3 into a film.

After the film formation substrate 24 is cooled to room temperature, the temporary frame 21 is interposed between the pellicle film 3 and the subsequent layer 22 as shown in FIG. 2(c). Then, as shown in (d) of FIG. 2, the temporary frame 21 is gradually lifted upward by the static elimination means (not shown), and is peeled off from the film formation substrate 24, and the temporary frame 21 is attached with dustproof. Film 3.

After the foreign matter inspection with the above-mentioned pellicle film 3 in the dark room by the spotlight, as shown in FIG. 3(a), the holder (not shown) is held vertically. The adhesive layer 42 is applied to one end surface of a plurality of side-by-side divided frame 41 (outer size 1190 × 1360 mm) to be adhered to the pellicle film 3. Thereafter, the clips 43 are all removed, as shown in (b) of FIG. 3, outside the division frame 41, The pellicle film 3 is cut by a knife along the dividing line X-X, Y-Y.

In the division frame 41 following the pellicle film 3 of the above-described four configurations, the pellicle assembly is produced by one. As shown in FIG. 4, a hook-shaped grip portion 54 is attached to the center of each side of the division frame 41, and is placed on the mounting table 51, and a compressive or tensile force is applied by the compression stretching device 55. The applied force is evaluated by an experiment beforehand. The frame 2 is attached to the pellicle 3 while the applied force is maintained, and the excess film around is cut by a knife. The frame 2 is made of aluminum alloy, the outer inch is 353×592 mm, the inner inch is 340×580 mm, the height is 4.8 mm, and the surface is treated with a ruthenium oxide film. The pellicle film 8 and the photomask adhesive layer 6 (see FIG. 1) are made of a separator (9) made of a PET film on the surface of the photomask adhesive layer 6 by a ruthenium adhesive (manufactured by Shin-Etsu Chemical Co., Ltd.). Cover for protection. Further, in the vent hole 4, a membrane filter 7 made of PTFE is provided in an acrylic adhesive layer.

Thus, the pellicle assembly 10 shown in Fig. 1 is completed. The pellicle assembly 10 measures the amount of deflection of the frame 2 on the measuring device. As a result, the amount of deflection of the opposite side is 0.3 mm and 0.25 mm, and the amount of deflection of the other adjacent side is 0.2 mm and 0.23 mm, while the amount of deflection is within the allowable range, the opposite side It has almost the same amount of deflection. When the pellicle film assembly 10 was processed, defects such as occurrence of wrinkles on the pellicle film 3 on the frame 2 were not observed.

[Comparative example]

The film formation of the pellicle film is performed by the same process as in the above embodiment, and thereafter Under the condition that the tension of the pellicle film is not uniform, the pellicle film assembly is produced in the same manner as in the above embodiment.

When the pellicle was completed, the amount of deflection of the frame was measured, and the amount of deflection of the opposite side was 0.9 mm and 0.1 mm, and the deflection of the other pair of sides was 0.5 mm and 0. 15mm. While the value is in an unacceptable state, it is a very irregular state of deflection. Further, if the pellicle assembly is vertically stood, the long side with a deflection amount of 0.1 mm is faced upward, and a plurality of wrinkles can be observed near the center of the long side of the pell film. From the shape of the frame and the state of wrinkles occurring in the pellicle film, it is not usable as a pellicle.

[Industrial use possibilities]

For the printed circuit board, a pellicle for IC packaging or semiconductor manufacturing can be a small film in which a large pellicle for liquid crystal production is divided.

3‧‧‧Plastic film

21‧‧‧Scratch box

22‧‧‧Next layer

41‧‧‧ split box

42‧‧‧Next layer

43‧‧‧ clip

45‧‧‧ needle

46‧‧‧Location decision hole

X-X, Y-Y‧‧‧ dividing line

Claims (5)

A method for manufacturing a pellicle film assembly, which is a method for manufacturing a pellicle film assembly for attaching a pellicle film to a frame, characterized in that a pneumatic film is attached to a temporary frame, which has a temporary ratio After the dust-proof film on the temporary frame is followed by the dust-proof film on the temporary frame, the dust-proof film is separated from the temporary frame by the outer edge of the frame, and the combination is combined. The split frame is separated, and the dust-proof film attached to each of the split frames is attached to the frame, and the split frame is removed. A method for manufacturing a pellicle film assembly, which is a method for manufacturing a pellicle film assembly for attaching a pellicle film to a frame, wherein a plurality of pellicle films on a film formation substrate are attached to a plurality of side-by-side bonding The dividing frame separates the combined dividing frame while cutting the dust-proof film from the film forming substrate along the outer side of the dividing frame, and the dust-proof film attached to each of the divided frames is attached to the frame, and the dividing frame is Take it off. The method for producing a pellicle according to the first or second aspect of the invention, wherein the pellicle is attached to the frame when the pellicle film is attached to the frame, and a force of compression or stretching is applied to the frame, and After the pellicle is attached, the force is released. The method for manufacturing a pellicle according to the first or second aspect of the invention, wherein: when the pellicle film attached to the frame is attached to the frame, a force of compressing or stretching is applied to the frame, and After the dustproof film is attached, the force is released. A split frame assembly in which a plurality of split frames are combined in parallel, and a method for manufacturing a dustproof film assembly for attaching a dustproof film to a pellicle assembly frame, wherein each of the divided frames has a certain The flexible material is formed by forming an adhesive layer on one end surface thereof, and the positions of the plurality of divided frames are determined by the nails and the position determining holes, and are sandwiched and joined by the clips inward.