TWI834264B - Protective film frame, protective film component, photomask with protective film component attached, exposure method, semiconductor manufacturing method, and display manufacturing method - Google Patents

Abstract

The object of the present invention is to provide a pellicle frame that can prevent the pellicle from wrinkling caused by the inner edge of the adhesive layer on the pellicle frame being a curved surface when viewed in cross section; and to provide a pellicle assembly that does not The protective film does not wrinkle and has an excellent appearance. In order to achieve the above object, the present invention provides a frame-shaped protective film frame. On the surface where the protective film is to be installed, an inclined surface is provided that decreases from the inner edge side toward the outer edge side; and from the outer edge side of the inclined surface, Up to the outer edge of the surface on which the protective film is to be placed is set as a flat surface. Furthermore, a protective film assembly is provided, in which the surface of the protective film frame on which the protective film is to be disposed is provided with an adhesive layer on the inclined surface and the flat surface, and the protective film is disposed through the adhesive layer .

Description

Protective film frame, protective film component, photomask with protective film component attached, exposure method, semiconductor manufacturing method, and display manufacturing method

The present invention relates to a protective film frame and a protective film assembly for dust protection when manufacturing semiconductor devices, liquid crystal displays, organic EL displays, and the like.

In the manufacturing of semiconductors such as LSI (Large Scale Integrated Circuit), super-LSI, etc., or the manufacturing of liquid crystal displays, light is irradiated on the semiconductor wafer or liquid crystal original plate to form a pattern; the photomask or reticle used at this time ( If dust is attached to the photomask (hereinafter referred to simply as the photomask), the edges will become rough, the base will become black, etc., resulting in problems that impair the size, quality, and appearance.

Therefore, these operations are usually performed in a clean room. However, even then it is difficult to keep the photomask clean at all times; therefore, in order to prevent dust, a protective film component is pasted on the surface of the photomask before exposure. In this case, since the foreign matter will not directly adhere to the surface of the photomask, but will adhere to the pellicle film component, as long as the focus is on the pattern of the photomask during the photolithography process, the pellicle film component will Foreign matter on the paper will not affect the transfer.

Generally speaking, the structure of the protective film component is to install nitrocellulose or acetate fiber with good light penetration on one side edge of the protective film frame composed of aluminum, steel, carbon steel, stainless steel, engineering plastics, etc. A transparent protective film composed of plastic or fluororesin, etc.; and on the other edge of the protective film frame, polybutylene resin, polyvinyl acetate resin, acrylic resin, silicone resin, etc. are provided for mounting on the photomask. An adhesive layer composed of resin, etc., and a separator used to protect the adhesive layer (see Patent Documents 1 and 2). [Known technical documents] [Patent Document]

[Patent Document 1] Japanese Patent Application Publication No. 2005-338722 [Patent Document 2] Japanese Patent Application Publication No. 2008-176102

[Problem to be solved by the invention]

Usually, the pellicle is provided through an adhesive layer formed on the surface of the pellicle frame. The adhesive applied on the surface of the pellicle frame will bulge into a convex shape due to the contact angle determined by its surface tension and the surface state of the pellicle frame. If there is an obvious convex shape, the pellicle will only come into contact with the vicinity of the vertex of the convex shape, resulting in a small bonding area and poor adhesion to the pellicle.

Furthermore, since the inner edge of the adhesive layer has a curved surface when viewed in cross-section, if the protective film is adhered to this area, the film will produce tiny wrinkles caused by wrinkles, as shown in Figures 11 and 12. lines, which may cause appearance problems. In particular, this problem occurs significantly in large-scale pellicle film modules used for manufacturing displays such as liquid crystal and organic EL displays because the frame width is wide and the film bonding layer is thick.

Therefore, it is necessary to make the adhesive layer on which the pellicle is placed as flat as possible during coating. Patent Document 1 proposes a method of providing grooves on the surface of the pellicle frame to control the shape of the adhesive layer. Furthermore, Patent Document 2 proposes a method of using an adhesive with a lower viscosity, utilizing capillarity to suppress the height of the adhesive layer, and coating it on a wider pellicle frame.

The methods described in Patent Documents 1 and 2 can reduce the apex of the film adhesive layer and sufficiently solve the problem in terms of ensuring the bonding area with the pellicle film. However, it is still not possible to completely eliminate the curved surface at the inner edge of the adhesive layer due to surface tension; and it may not be possible to completely solve the wrinkles of the protective film that occur near the inner edge of the film adhesive layer.

Furthermore, another problem with the method described in Patent Document 1 is that when the amount of adhesive applied is reduced, the surface of the film adhesive layer becomes concave, and air accumulates between it and the pellicle film. Hard to follow.

Therefore, the present invention was developed in view of the above problems, and its purpose is to provide a protective film frame that can prevent the protective film from being wrinkled due to the inner edge of the film adhesive layer being a curved surface when viewed in cross section; and to provide a protective film frame. Thin film components will not wrinkle the protective film and have excellent appearance. [Technical means to solve problems]

The key points of the pellicle frame and pellicle assembly of the present invention are as follows. (1) A protective film frame, which is a frame-shaped protective film frame; on the surface where the protective film is to be installed, an inclined surface is provided that decreases from the inner edge side toward the outer edge side; and from the outer edge side of the inclined surface, Up to the outer edge of the surface on which the protective film is to be placed is set as a flat surface. (2) The protective film frame of item 1, wherein the inclined surface is provided on the entire circumference of the surface where the protective film is to be installed. (3) For the protective film frame of Item 1 or 2, the width of the inclined surface is less than 50% of the width of the surface where the protective film is to be installed. (4) The protective film frame of any one of items 1 to 3, wherein the angle between the inclined surface and the surface perpendicular to the flat surface is 60 to 89°. (5) The protective film frame of any one of items 1 to 4, wherein the starting end of the inner edge side of the inclined surface is located within 0.2 mm from the inner edge of the surface on which the protective film is to be installed. (6) The protective film frame of any one of items 1 to 5, wherein the starting end of the inner edge side of the inclined surface is the inner edge of the surface on which the protective film is to be installed. (7) The protective film frame of any one of items 1 to 6, wherein the width of the inclined surface is 0.3~3 mm. (8) The protective film frame of any one of items 1 to 7, wherein the height of the inclined surface is 0.03~0.3 mm. (9) The protective film frame of any one of items 1 to 8, wherein the inclined surface is composed of a flat surface. (10) The protective film frame of any one of items 1 to 8, wherein the inclined surface is composed of a curved surface. (11) A protective film assembly, consisting of a protective film frame as in any one of items 1 to 10; the surface on which the protective film is to be disposed in the protective film frame is located on the inclined surface and the An adhesive layer is provided on the flat surface, and the protective film is provided through the adhesive layer. (12) A protective film assembly in which the protective film is arranged on a frame-shaped protective film frame through an adhesive layer; on the protective film bonding surface of the adhesive layer, there is a protective film assembly facing outward from the inner edge side of the protective film bonding surface An inclined surface with lower edge side; the thickness of the bonding layer at the starting end of the inner edge side of the inclined surface is smaller than the thickness of the bonding layer at the terminal end of the outer edge side of the inclined surface. [Effects of the invention]

According to the present invention, the pellicle film near the film adhesive layer will not be wrinkled, and a pellicle film component with excellent appearance can be produced.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings, but the present invention is not limited thereto.

The present invention can be applied to protective film components of all sizes and uses; it is particularly effective when applied to large protective film components with a side width exceeding 5 mm and which are mainly used for display manufacturing. Because in a large pellicle assembly with a large width of the pellicle frame, the film adhesive layer will also become thicker, and the appearance deterioration will be more significant when the pellicle is wrinkled.

One embodiment of the protective film frame of the present invention is shown in FIGS. 1 to 4 . Figure 1 is a top view, Figure 2 is a cross-sectional view of A-A in Figure 1, Figure 3 is a cross-sectional view of B-B in Figure 1, and Figure 4 is an enlarged view of the C portion in Figure 2. Figures 15(a)~(c) respectively illustrate the front view, side view, and bottom view of the protective film frame in Figure 1.

On the "surface where the pellicle is to be installed" (film bonding surface) 12 of the frame-shaped pellicle frame 11, there is provided an inclined surface 12a that descends from the inner edge side toward the outer edge side; and the inclined surface ends from the outer edge side. b. Set the flat surface 12b to the outer edge of the surface where the protective film is to be installed. Here, on the surface where the protective film is to be installed, inclined surfaces 12a are provided throughout the entire circumference.

Next, the height h, inclination angle α, and width w of the inclined surface 12a will be described in detail. However, the values listed below depend on the width of the pellicle frame used, the viscosity and coating of the film adhesive used. Depending on the properties of cloth volume, drying speed, etc., it will be determined appropriately.

The width w of the inclined surface 12 a preferably accounts for 50% or less of the width W of the film bonding surface 12 of the pellicle frame 11 . In this way, a sufficient area can be secured for the flat surface 12b, which is used as a pressurized area when mounting the pellicle assembly on the photomask. Therefore, the width w´ of the flat surface 12b preferably accounts for more than 50% of the width W of the film bonding surface 12 of the pellicle frame 11; therefore, if the small pellicle component for semiconductor manufacturing has a thickness of 1 mm or more, it will be suitable for display manufacturing. If the large protective film component used is more than 2mm, there will be sufficient pressurized area available.

The inclined surface 12a protrudes relative to the flat surface 12b and is not parallel to the opposite photomask adhesive surface 13. Therefore, when the pellicle assembly is installed on the photomask, if the area of the inclined surface 12a is pressurized, it may cause There is a risk of misalignment or poor adhesion. Therefore, the flat surface 12b is used as a pressurized area when the pellicle assembly is mounted on the photomask, and is therefore preferably parallel to the surface (mask adhesive surface) 13 of the pellicle frame that is mounted on the photomask.

The angle (inclination angle) α between the inclined surface 12a and the surface 14 that is perpendicular to the flat surface 12b is preferably 60 to 89°, and more preferably 80 to 87°. If the inclination angle α exceeds 89°, the wrinkle prevention effect of the protective film cannot be fully exerted. The smaller the inclination angle α, the greater the effect of sharpening the inner edge of the film adhesion layer, thereby improving the appearance of the inner edge of the protective film. However, if the inclination angle α is less than 60°, there is a risk that the sharp edge will damage the attached protective film, and it will easily cause burrs or defects when manufacturing or removing the protective film frame; furthermore, when manufacturing the protective film When using a film assembly, it is difficult to adhere the pellicle film to the film adhesive layer without generating bubbles.

For the sake of easy design and processing, the inclined surface 12a is preferably composed of one plane as shown in Figure 4; however, it can also be composed of two or more planes 52 and 53 as shown in Figure 5(b). . Furthermore, it may also be composed of a curved surface 51 as shown in FIG. 5(a) . In these cases, it is preferred that two or more flat and curved surfaces form a concave surface so that the boundary between the inclined surface and the flat surface is not obvious. In addition, when the inclined surface is constituted by a curved surface, the inclination angle α is the angle formed by "the tangent 54 of the inclined surface (curved surface) 51 at the starting end a on the inner edge side" and "the plane perpendicular to the flat surface". Furthermore, when the inclined surface is composed of two or more planes, the inclination angle α is the angle formed by the "surface 52 including the inner edge side starting end a" and the "surface perpendicular to the flat surface".

Furthermore, the starting end a of the inner edge side of the inclined surface is preferably consistent with the inner edge of the film joint surface of the pellicle frame 11 from the viewpoint of easy design and processing; however, it can also be shown in Figure 6(a) and Figure 6 As shown in (b), a flat surface 61 is provided all the way from the starting end a on the inner edge side to the inner edge of the film bonding surface, or an inclined surface (inner slope) 62 is provided that decreases from the outer edge side toward the inner edge side. If such a planar portion 61 or an inner slope 62 is provided, the angle of the angle with the starting end a on the inner edge side as the apex can be increased. Therefore, burrs, edges, defects, etc. can be prevented during processing of the pellicle frame. Wait for it to happen. In addition, the starting end a of the inner edge side of the inclined surface is preferably located within 0.2 mm from the inner edge of the surface on which the protective film is to be installed.

As shown in FIG. 4 , when the inclined surface 12 a is formed as a flat surface, the inclination angle α depends on the width w and height h of the inclined surface 12 a. The smaller the width w and the larger the height h, the smaller the inclination angle α will be, and a more reliable anti-wrinkling effect of the pellicle film can be expected.

On the other hand, since the overall height of the pellicle assembly depends on the specifications of the exposure device used, the greater the height h of the inclined surface 12a, the smaller the height H of the main body of the pellicle frame will be. As a result, the cross-sectional area of the pellicle frame will be reduced, and the rigidity and strength will be reduced. Furthermore, the larger the height h is, the more difficult it is for the pellicle film to adhere to the film adhesive layer without generating bubbles. Therefore, the height h of the inclined surface 12a is preferably set to 0.5~5% of the overall height (h+H) of the pellicle frame. Furthermore, the preferred range is within the range of 0.03~0.3mm, and the more preferred range is within the range of 0.05~0.15mm.

Furthermore, when the width w of the inclined surface 12a is increased, in order to make the inclination angle α fall within the desired range, the height h of the inclined surface 12a needs to be increased; and as mentioned above, sometimes this may cause Appearance and usage problems. Therefore, the width w of the inclined surface 12a is preferably in the range of 0.3~3mm, and more preferably in the range of 0.5~1.5mm.

Furthermore, especially for large-scale pellicles used in displays, pellicle frames with different widths on the long side and the short side are often used; in this case, it is better to make the inclined surface 12a regardless of the long side or the short side. , the size and shape are all the same. By making them the same size and shape, it is more convenient to produce the inclined surface 12a by machining. Furthermore, the appearance of the connection shape of the corners can be smoothed. Figure 7 shows the corner portion of the pellicle frame 11; in this way, it is preferable to make the inclined surface 12a, including the edges and corners with different widths, all formed uniformly.

In addition to general aluminum alloys, the material used for the protective film frame 11 of the present invention can also be magnesium alloy, steel, carbon steel, stainless steel, invariant steel (INVAR), SiN (silicon nitride), SiC (carbide). Silicon) and other ceramics, engineering plastics, CFRP and other fiber-reinforced plastics. In terms of its manufacturing method, in the case of metal materials, it is best to mechanically cut plates or pipes; however, in order to reduce costs, it can also be assembly of rod-shaped materials, mold casting, lost-wax casting, etc. Cast products are manufactured. Furthermore, when using plastic materials, in addition to mechanical cutting from the plate, injection molding can also be used.

FIG. 8 is a perspective view of an embodiment using the above-mentioned pellicle frame 11 to form a pellicle assembly 80, and FIG. 9 is an enlarged cross-sectional view of the long side. If necessary, the protective film frame 11 may also be provided with ventilation holes 84 to allow ventilation inside and outside the protective film assembly; or may be provided with jig holes 85 or grooves 86 to serve as gripping points during manufacturing and pasting. Furthermore, for the purpose of controlling the shape or width of the mask adhesive layer 83 , steps, corners, or grooves (not shown) may also be provided on the mask adhesive surface 13 where the mask adhesive layer 83 is provided.

A film adhesive layer 82 is provided on the frame-shaped film bonding surface 12 of the pellicle frame 11 , where the pellicle 81 is bonded. Furthermore, as the opposite surface of the photomask adhesive surface 13, there is a photomask adhesive layer 83; in order to protect the adhesive layer, a spacer 88 will be provided on the surface as necessary. The spacer 88 is about the thickness of PET or the like. It is made by applying silicone release agent or fluorine release agent to the thin film below 0.5mm. Furthermore, the ventilation holes 84 provided on the side of the protective film frame 11 are formed by installing a porous membrane of PTFE (polytetrafluoroethylene) or the like through an adhesive layer (not shown) in order to prevent dust from intruding inside. Plate filter 87.

As the thin film adhesive layer 82, a well-known adhesive such as acrylic adhesive, fluorine adhesive, silicone resin adhesive, etc. can be used. These adhesives are diluted with an appropriate solvent to adjust the viscosity, and then the amount of liquid that will form the desired thickness is applied to the film bonding surface 12 that is one side of the pellicle frame 11 . As the coating tool, a known thing such as a pneumatic dispensing machine can be used. The thickness of the film adhesive layer 82 needs to be determined based on the adhesion strength, ease of adhesion, and appearance. However, in one example, it is preferably in the range of 20 to 300 μm.

FIG. 10 shows the state when the thin film adhesive layer 82 is formed. Immediately after the adhesive is applied, the inclined surface 12a will be buried in the adhesive as shown in Figure 10(a). Thereafter, as shown in Figure 10(b), as the solvent further dries, the adhesive shrinks along the inclined surface 12a, and the starting end a of the inner edge side of the inclined surface 12a is exposed. Then, as shown in FIG. 10(c) , the thickness of the film adhesive layer 82 at the starting end a on the inner edge side of the inclined surface 12a will be larger than the thickness of the adhesive layer 82 at the end b on the outer edge side of the inclined surface 12a. Smaller (thinner), it can be formed so thin that the influence of the "curved surface due to the surface tension of the film adhesive layer 82" can be ignored. At this time, among the adhesive layers, the surface (film adhesive surface) 92 in contact with the pellicle 81 has an inclined surface 92a that decreases from the inner edge side toward the outer edge side.

Then, if the thickness of the film adhesive layer 82 at the starting end a on the inner edge side of the inclined surface 12a is thin, the film adhesive layer 82 will not form a curved surface 112a as shown in FIG. 13 along the pellicle. 119 direction of the bonding surface; therefore, there will be no room for the protective film 81 to partially adhere to the film bonding layer 82, so it can prevent the protective film 81 from being partially contacted as shown in Figure 13(a) of the conventional art example. , and then lead to wrinkles.

The starting end of the inner edge side of the inclined surface 92 a of the film bonding surface 92 does not necessarily coincide with the inner edge of the film bonding surface 12 of the pellicle frame 11 , but preferably coincides with the starting end of the inner edge side of the film bonding layer 82 . This is because when the film bonding layer 82 shown in FIG. 10(c) is formed further to the inner edge side than the starting end of the inner edge side of the inclined surface 92a of the film bonding surface 92, the film bonding layer 82 is considered to be It depends on the shape, but sometimes it will cause the protective film to wrinkle.

However, in the pellicle frame 11 shown in FIGS. 4 and 5 , it is almost impossible for the film bonding layer 82 to be formed further to the inner edge side than the starting end of the inner edge side of the inclined surface 92 a of the film bonding surface 92 ; However, especially in the pellicle frame 11 shown in FIG. 6(b) , it is conceivable that the film adhesive layer 82 is formed on the inner slope 62 . In this case, if the film adhesive layer 82 is formed to the inner edge side of the inner edge side starting end a of the inclined surface 92a, the film adhesive layer 82 on the inner edge side may be formed as shown in Figure 13 (a), ( The curved surface 112a shown in b) causes the protective film 81 to wrinkle. Furthermore, even for the pellicle frame 11 as shown in FIG. 6(a) , if the film adhesive layer 82 is formed to the flat portion 61 of the inner edge, there is also a risk of the pellicle 81 being wrinkled; however, as long as the flat portion 61 If it is not too wide and narrow enough, even if the film bonding layer 82 is formed to the inner edge side, there will be no space for the protective film 81 to be partially bonded, so the protective film 81 will hardly wrinkle, so it will not causing problems.

Therefore, in the case of the shape of the pellicle frame 11 shown in FIGS. 6(a) and 6(b) , it is preferable not to provide an adhesive layer on the flat surface 61 or the inner slope 62; but as long as the adhesive layer is provided on the flat surface 61 Or if the width of the inner slope 62 is narrow enough, the slope of the inner slope 62 is small enough, etc., this is not the case.

The protective film 81 can be made, for example, with a thickness of about 0.1 to 10 μm by applying a film material solution of cellulose resin, fluororesin, etc. using known methods such as spin coating, slit coating, etc. It is produced by spreading it on a smooth substrate and drying it.

As for the material of the photomask adhesive layer 83, well-known materials such as acrylic resin, polybutylene resin, SEBS (styrene-ethylene/butylene-styrene block copolymer), silicone resin, etc. can be used; and The thin film adhesive layer 82 should similarly be diluted with an appropriate solvent if necessary, and then applied on the photomask adhesive surface 13 using a pneumatic dispensing machine or the like. The shape of the photomask adhesive layer 83 is not only provided in a local area of the photomask adhesive surface 13 as shown in FIG. 9 , but may also be provided in multiple rows or formed on the entire surface. Furthermore, the cross-sectional shape may be convex; the flat surface may also be squeezed in order to adjust the height of the photomask adhesive layer 83 and improve the flatness.

Then, in the pellicle composed as above, as shown in FIG. 9 , there is almost no "convex-shaped curved surface formed due to surface tension" on the inner edge side of the film adhesive layer 82 , or even though a curved surface is formed, The degree of its influence can also be ignored. Therefore, the protective film 81 is completely connected to the inner edge of the film adhesive layer 82 without any gaps, and the protective film 81 will not be pulled by the film adhesive layer 82 to cause wrinkles. As a result, the appearance of the pellicle 81 near the inner edge of the pellicle frame 11 can be greatly improved. [Example]

<Example 1> Examples are given below to illustrate the present invention more specifically.

Figures 8 and 9 show: a perspective view and a cross-sectional view of a pellicle assembly made using the pellicle frame shown in Figures 1, 2, 3 and 4.

The protective film frame 11 is made of 5000 series aluminum alloy, machined, and treated with black anodized aluminum. At this time, the dimensions of the protective film frame 11 are: the outer dimension is 756×937.5mm, the inner dimension is 740×925.5mm, and the height is 5.8mm. The surface (film joint surface) 12 where the protective film is to be installed is provided with an inclined surface 12a that decreases from the inner edge side toward the outer edge side throughout the entire circle, and from the outer edge side terminal b of the inclined surface 12a to the surface where the protective film is to be installed The surface of the film is formed into a flat surface 12b up to the outer edge.

The inclined surface 12a is: width w=1mm, height h=0.1mm; inclination angle α is about 84.3°; the width of the flat surface is 7mm on the long side and 5mm on the short side. In addition, the starting end a of the inner edge side of the inclined surface 12a coincides with the inner edge of the film bonding surface. Move the protective film frame 11 into a Class 10 clean room, wash it with surfactant and pure water, and then dry it completely. 16(a) to (d) respectively illustrate the top view, front view, side view, and bottom view of the pellicle frame drawn according to the dimensional proportions of Embodiment 1. Figure 17 is an enlarged view of D in Figure 16(a). Figure 18 is a cross-sectional view taken along line E-E in Figure 17.

The protective film frame 11 is fastened to the photomask adhesive surface 13, and a silicone resin adhesive (manufactured by Shin-Etsu Chemical Industry Co., Ltd.) diluted with toluene is applied using a pneumatic dispensing machine to form a photomask adhesion. Layer 83. Furthermore, a silicone resin adhesive (manufactured by Shin-Etsu Chemical Industry Co., Ltd.) as a protective film adhesive is applied on the film bonding surface 12 using a pneumatic dispenser so that the thickness becomes about 80 μm to form Thin film adhesion layer 82. Then, it is heated to above 120°C to completely remove the solvent and thermally cure the silicone resin adhesive.

The film adhesive layer 82 has a cross-sectional shape as shown in FIGS. 9 and 10(c), and the thickness of the film adhesive layer 82 at the starting end a of the inner edge side of the inclined surface 12a becomes smaller than the outer edge of the inclined surface. The thickness of the film adhesive layer 82 on the side terminal b. At this time, the surface 92 of the film adhesive layer 82 that is in contact with the pellicle (film adhesive surface) has an inclined surface 92a that decreases from the inner edge side toward the outer edge side. In addition, the starting end of the inner edge side of the inclined surface 92a of the film adhesive surface 92 coincides with the starting end of the inner edge side of the film adhesive layer 82.

After that, a spacer 88 is installed on the surface of the photomask adhesive layer 83 for surface protection. It is made of a PET film with a thickness of 0.125 mm and is coated with a release agent, and is roughly the same as the protective film frame 11 The outer shape has been partially cut away. Furthermore, a dust-proof filter 87 composed of a PTFE porous membrane is installed on the outside of the ventilation hole 84 provided on the side of the protective film frame 11 through an acrylic adhesive layer (not shown).

Finally, the protective film 81 with a thickness of about 2.2 μm is pasted through the film adhesive layer 82, and the protective film assembly 80 is completed; the protective film 81 is made of a fluoropolymer (Asahi Glass Co., Ltd. )) is formed into a film on a polished and smooth quartz glass substrate, and then dried and peeled off.

Under observation of the completed pellicle 80, the film bonding layer 82 is formed to completely cover the film bonding surface 12, as shown in FIG. , its thickness becomes thinner, and it becomes extremely thin near the starting end a on the inner edge side, resulting in a cross-sectional shape with a steep edge.

Then, regarding this pellicle 80 , observing the vicinity of the pellicle frame of the pellicle 81 , it was found that the entire inner edge of the pellicle frame 11 and the unbonded area of the pellicle 81 could hardly be observed in the film bonding layer 82 . Furthermore, assuming vibration during transportation, an attempt was made to vibrate the protective film 81 by blowing air. However, no local fine lines or wrinkles were observed on the protective film 81, and a good appearance was maintained.

＜Comparative example 1＞ As Comparative Example 1, a pellicle frame 111 having the same size as that of Example 1 except for a different cross-sectional shape was used to produce a pellicle assembly 110 shown in FIG. 11 . Except for the protective film frame 111 used, the manufacturing process and conditions are the same as those in Embodiment 1. The cross-sectional shape of the pellicle frame 111 used at this time is as shown in Fig. 14. It does not have protrusions near the inner edge of the pellicle frame 11 like the first embodiment, but has a rectangular cross-section.

In the pellicle 119 of the completed pellicle 110, tiny film wrinkles 120 occur everywhere near the inner edge of the pellicle frame 111 as shown in the enlarged view of FIG. 12 . Furthermore, in the cross-section of the pellicle 110, there are areas where wrinkles 120 of the film occur, as shown in Figure 13(a); on the other hand, there are areas where wrinkles 120 do not occur, as shown in Figure 13(b). Show.

Furthermore, although the pellicle adhesive layer 112 is formed to have an almost uniform thickness, a convex curved portion 112 a is formed near the inner edge due to the surface tension of the adhesive layer. Then, it is inferred that in the relatively loose areas of the protective film 119, or when the protective film 119 shakes during transportation between steps, the protective film 119 will contact and then reach the curved surface 112a, resulting in the occurrence of wrinkles 120. . However, this is not ideal as it can lead to deterioration in appearance.

11: Protective film frame 12: Film bonding surface 12a,52,53: Inclined surface 12b: Flat surface 13: Photomask adhesive surface 14: A surface that is perpendicular to a flat surface 51:Surface 54: Tangent 61: Plane part 62:Inner bevel 80: Protective film component 81:Protective film 82: Film bonding layer 83: Photomask adhesive layer 84,114: Breathing holes 85,115: Jig hole 86: Groove 87:Filter 88:Isolation film 92: Film bonding surface of film bonding layer 92a: Inclined surface of film bonding surface 92b: Flat surface of film bonding surface 110: Protective film component 111: Protective film frame 112: Film bonding layer 112a: Curved face 113: Photomask adhesive layer 116: Groove 117:Filter 118:Isolation film 119:Protective film 120: Wrinkle a: Starting end of the inner edge of the inclined surface b: Terminal on the outer edge of the inclined surface w: width of the inclined surface w´: width of flat surface h: height of the inclined surface α: Angle of the inclined surface W: Width of the film joint surface of the protective film frame H: Height of the protective film frame body

[Fig. 1] A plan view illustrating one embodiment of the pellicle frame of the present invention. [Fig. 2] A diagram illustrating one embodiment of the pellicle frame of the present invention, which is a cross-sectional view taken along line A-A in Fig. 1. [Fig. 3] A diagram illustrating one embodiment of the pellicle frame of the present invention, which is a cross-sectional view taken along line B-B in Fig. 1. [Fig. 4] A diagram illustrating one embodiment of the pellicle frame of the present invention, which is an enlarged view of portion C in Fig. 2. [Fig. 5] (a) and (b) are cross-sectional views illustrating one embodiment of the pellicle frame of the present invention. [Fig. 6] (a) and (b) are cross-sectional views illustrating one embodiment of the pellicle frame of the present invention. [Fig. 7] A perspective view illustrating one embodiment of the pellicle frame of the present invention. [Fig. 8] A perspective view illustrating one embodiment of the pellicle film module of the present invention. [Fig. 9] An enlarged cross-sectional view illustrating one embodiment of the pellicle film module of the present invention. [Fig. 10] (a) to (c) are cross-sectional views illustrating one embodiment of the pellicle assembly of the present invention, illustrating the adhesive coating step. [Fig. 11] A perspective view illustrating a pellicle module according to a conventional technical example (comparative example). [Fig. 12] A perspective view illustrating the vicinity of the inner edge of the pellicle frame of a conventional example (comparative example). [Fig. 13] (a) and (b) are cross-sectional views illustrating a pellicle module according to a conventional technical example (comparative example). [Fig. 14] A cross-sectional view illustrating a pellicle frame of a conventional technical example (comparative example). [Figure 15] (a)~(c) respectively illustrate the front view, side view, and bottom view of the protective film frame in Figure 1. [Fig. 16] (a)~(d) respectively illustrate the top view, front view, side view, and bottom view of the pellicle frame drawn according to the dimensional proportions of Embodiment 1. [Figure 17] is an enlarged view of D in Figure 16(a). [Figure 18] is the E-E cross-sectional view in Figure 17.

11: Protective film frame

12: Film bonding surface

12a: Inclined surface

12b: Flat surface

13: Photomask adhesive surface

80: Protective film component

81:Protective film

82: Film bonding layer

83: Photomask adhesive layer

88:Isolation film

a: Starting end of the inner edge of the inclined surface

b: Terminal on the outer edge of the inclined surface

Claims (25)

A protective film frame is a frame-shaped protective film frame; on the surface where the protective film is to be installed, an inclined surface is provided that decreases from the inner edge side toward the outer edge side; and from the end of the outer edge side of the inclined surface to the surface where the protective film is to be installed The outer edge of the surface of the protective film is set as a flat surface; the angle between the inclined surface and the surface that is perpendicular to the flat surface is 60 to 89°. A protective film frame is a frame-shaped protective film frame; on the surface where the protective film is to be installed, an inclined surface is provided that decreases from the inner edge side toward the outer edge side; and from the end of the outer edge side of the inclined surface to the surface where the protective film is to be installed The outer edge of the surface of the protective film is set as a flat surface; the starting end of the inner edge side of the inclined surface is located within 0.2 mm from the inner edge of the surface where the protective film is to be installed. A protective film frame is a frame-shaped protective film frame; on the surface where the protective film is to be installed, an inclined surface is provided that decreases from the inner edge side toward the outer edge side; and from the end of the outer edge side of the inclined surface to the surface where the protective film is to be installed The outer edge of the surface of the protective film is set as a flat surface; the width of the inclined surface is 0.3~3mm. A protective film frame is a frame-shaped protective film frame; on the surface where the protective film is to be installed, an inclined surface is provided that decreases from the inner edge side toward the outer edge side; and from the end of the outer edge side of the inclined surface to the surface where the protective film is to be installed The outer edge of the surface of the protective film is set as a flat surface; the height of the inclined surface is 0.03~0.3mm. The protective film frame according to any one of claims 1 to 4, wherein the inclined surface is provided all around the surface where the protective film is to be installed. The protective film frame according to any one of claims 1 to 4, wherein the width of the inclined surface is less than 50% of the width of the surface on which the protective film is to be provided. The protective film frame according to any one of claims 2 to 4, wherein the angle between the inclined surface and the surface that is perpendicular to the flat surface is 60 to 89°. The protective film frame of claim 3 or 4, wherein the starting end of the inner edge side of the inclined surface is located within 0.2 mm from the inner edge of the surface on which the protective film is to be installed. The protective film frame according to any one of claims 1 to 4, wherein the starting end of the inner edge side of the inclined surface is the inner edge of the surface on which the protective film is to be disposed. For example, the protective film frame of claim 4, wherein the width of the inclined surface is 0.3~3mm. The protective film frame of any one of claims 1 to 4, wherein the inclined surface is composed of a plane or a curved surface. A protective film assembly is composed of a protective film frame according to any one of claims 1 to 11; in the protective film frame, the surface where the protective film is to be placed is provided on the inclined surface and the flat surface. There is an adhesive layer, and the protective film is provided through the adhesive layer. A protective film assembly, in which a protective film is arranged on a frame-shaped protective film frame through an adhesive layer; on the protective film bonding surface of the adhesive layer, there is a device that lowers from the inner edge side toward the outer edge side of the protective film bonding surface an inclined surface; the thickness of the bonding layer at the starting end of the inner edge side of the inclined surface is smaller than the inclined surface The thickness of the bonding layer at the end of the outer edge; the starting end of the inner edge of the inclined surface is located within 0.2 mm from the inner edge of the surface where the protective film is to be placed. A protective film assembly, in which a protective film is arranged on a frame-shaped protective film frame through an adhesive layer; on the protective film bonding surface of the adhesive layer, there is a device that lowers from the inner edge side toward the outer edge side of the protective film bonding surface The thickness of the bonding layer at the starting end of the inner edge of the inclined surface is less than the thickness of the bonding layer at the end of the outer edge of the inclined surface; the width of the inclined surface is 0.3~3mm. A protective film assembly, in which a protective film is arranged on a frame-shaped protective film frame through an adhesive layer; on the protective film bonding surface of the adhesive layer, there is a device that lowers from the inner edge side toward the outer edge side of the protective film bonding surface The thickness of the bonding layer at the starting end of the inner edge of the inclined surface is less than the thickness of the bonding layer at the end of the outer edge of the inclined surface; the height of the inclined surface is 0.03~0.3mm. The protective film assembly according to any one of claims 13 to 15, wherein the inclined surface is provided on the entire circumference of the surface where the protective film is to be provided. The protective film assembly according to any one of claims 13 to 15, wherein the width of the inclined surface is less than 50% of the width of the surface of the protective film. The protective film assembly of claim 14 or 15, wherein the starting end of the inner edge side of the inclined surface is located within 0.2 mm from the inner edge of the surface on which the protective film is to be disposed. The protective film assembly according to any one of claims 13 to 15, wherein the starting end of the inner edge side of the inclined surface is the inner edge of the surface on which the protective film is to be disposed. For example, the protective film component of claim 15, wherein the width of the inclined surface is 0.3~3mm. The protective film component of any one of claims 13 to 15, wherein the inclined surface is composed of a flat surface or a curved surface. A photomask with a protective film component attached, which is formed by installing the protective film component according to any one of claims 12 to 21 on the photomask. An exposure method using the protective film component according to any one of claims 12 to 21 for exposure. A manufacturing method of a semiconductor, including the step of using the protective film component according to any one of claims 12 to 21 for exposure. A method for manufacturing a display, including the step of using the protective film component according to any one of claims 12 to 21 for exposure.

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