CN109388017A - Pellicle component framework and pellicle component - Google Patents
Pellicle component framework and pellicle component Download PDFInfo
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- CN109388017A CN109388017A CN201810891458.9A CN201810891458A CN109388017A CN 109388017 A CN109388017 A CN 109388017A CN 201810891458 A CN201810891458 A CN 201810891458A CN 109388017 A CN109388017 A CN 109388017A
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- pellicle
- inclined surface
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- component framework
- pellicle component
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
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- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The pellicle component framework tightened and pellicle of the pellicle occurred when the purpose of the present invention is to provide the inner edge portions that can be prevented due to the adhesive layer on pellicle component framework from cross-section observation for curved surface are without tightening and the kind pellicle component of excellent appearance.The present invention is a kind of pellicle component framework of frame-shaped, on the face of setting pellicle, equipped with the inclined surface declined from inner edge laterally outer side, is equipped with flat surface from the outer rim in outer rim lateral terminal to the face of setting pellicle of the inclined surface.In addition, the present invention is a kind of pellicle component, on the face of the setting pellicle of the pellicle component framework, it is equipped with adhesive layer on inclined surface and on flat surface, the adhesive layer is provided with pellicle.
Description
Technical field
The present invention relates in manufacturing semiconductor devices, liquid crystal display, organic el display etc. for dust-proof pellicle
Component framework and pellicle component (pellicle).
Background technique
It is former to semiconductor crystal wafer, liquid crystal in the manufacture of manufacture, the liquid crystal displays of semiconductors such as LSI, super LSI etc.
Plate irradiation light forms pattern, but if photomask used at this time or reticle mask (being only denoted as photomask below) are attached
Have dust, then can there are the following problems: edge be roughening, substrate is dirty black etc., leads to size, quality, appearance damage.
Therefore, these operations carry out usually in dust free room, but are even so also difficult to keep photomask and always clean,
Therefore photomask surface is attached for being exposed after dust-proof pellicle component.In this case, foreign matter will not be directly attached
In the surface of photomask, and be attached on pellicle component, as long as therefore focus is made to be aligned in the figure of photomask in photoetching
In case, the foreign matter on pellicle component is had nothing to do with transfer.
In general, pellicle component is constituted as follows: including the table of aluminium, steel, carbon steel, stainless steel, engineering plastics etc.
What the unilateral end face setting of film structural component frame made that light transmits well includes nitrocellulose, cellulose acetate or fluororesin etc.
Transparent pellicle, and the opposite side end face of pellicle component framework setting for installation into photomask include polybutene resin,
The adhesive layer of polyvinyl acetate resins, acrylic resin, organic siliconresin etc. and spacer (reference for protecting adhesive layer
Patent document 1,2).
Existing technical literature
Patent document
Patent document 1: special open 2005-338722 bulletin
Patent document 2: special open 2008-176102 bulletin
Summary of the invention
Problems to be solved by the invention
In general, pellicle is that adhesive layer on the face for being formed in pellicle component framework is arranged.Coated in pellicle component
The contact angle protuberance that bonding agent on the face of frame is determined with the surface state by its surface tension and pellicle component framework, becomes
Convex form.If the convex form is significant, only the vertex of convex form nearby is contacted with pellicle, therefore it is small there are bond area and
The weak problem with the bonding force of pellicle.
In addition, the inner edge portion of adhesive layer when from cross-section observation be curved surface, if therefore pellicle be adhered to the region, such as scheme
11, shown in Figure 12, film can be tightened and generate small gauffer sometimes, become apparent problem.In particular, in liquid crystal, organic
In large pellicle component used in the manufacture of the display of EL etc. etc., frame width is big, and film adhesive layer is also thick, therefore can be significant
There is the problem.
Therefore, it needs flatly to apply as far as possible for the adhesive layer of pellicle to be arranged, in patent document 1, propose
The method that pellicle component framework surface is arranged slot to control the shape of adhesive layer.In addition, being proposed in patent document 2 such as lower section
Method: using the bonding agent compared with low viscosity, inhibit the height of adhesive layer using capillarity on one side, it is coated on width on one side
Big pellicle component framework.
The method that patent document 1 and 2 is recorded can make the vertex of film adhesive layer be lower, it is ensured that with the bond area of pellicle this
Aspect can be solved the problems, such as fully.However, the curved surface for completely eliminating the inner edge portion of the adhesive layer formed by surface tension is not achieved,
The different pellicle being surely fully solved in the near its inner edge generation of film adhesive layer is tightened and (draws I contraction れ).
In addition, in the case where the bonding dosage of coating is few, there are also following problems in method described in Patent Document 1:
The surface of film adhesive layer becomes concavity, airtrapping occurs between pellicle at it, it is difficult to be bonded.
Therefore, the present invention is to complete in view of the above problems, and its purpose is to provide can prevent due to film adhesive layer
The pellicle component framework tightened and pellicle of the pellicle occurred when inner edge portion is from cross-section observation for curved surface are without tightening and appearance is excellent
Different pellicle component.
The solution to the problem
Pellicle component framework and pellicle component of the invention is as follows.
(1) a kind of pellicle component framework is the pellicle component framework of frame-shaped, which is characterized in that on the face of setting pellicle,
Equipped with the inclined surface declined from inner edge laterally outer side, from the outer rim lateral terminal of the inclined surface to the outer of the face of above-mentioned setting pellicle
Edge is equipped with flat surface.
(2) the pellicle component framework according to invention 1, which is characterized in that above-mentioned inclined surface is arranged in above-mentioned setting table
On the complete cycle in the face of film.
(3) the pellicle component framework according to invention 1 or 2, which is characterized in that the width of above-mentioned inclined surface is above-mentioned sets
Set 50% or less the width in the face of pellicle.
(4) according to invention 1 to 3 in any one described in pellicle component framework, which is characterized in that above-mentioned inclined surface with
Face angulation perpendicular to above-mentioned flat surface is 60~89 °.
(5) the pellicle component framework according to any one in invention 1 to 4, which is characterized in that above-mentioned inclined surface
Inner edge side beginning is located at the position with the inner edge in the face of above-mentioned setting pellicle within 0.2mm.
(6) the pellicle component framework according to any one in invention 1 to 5, which is characterized in that above-mentioned inclined surface
Inner edge side beginning is the inner edge in the face of above-mentioned setting pellicle.
(7) the pellicle component framework according to any one in invention 1 to 6, which is characterized in that above-mentioned inclined surface
Width is 0.3~3mm.
(8) the pellicle component framework according to any one in invention 1 to 7, which is characterized in that above-mentioned inclined surface
Height is 0.03~0.3mm.
(9) the pellicle component framework according to any one in invention 1 to 8, which is characterized in that above-mentioned inclined surface is
It is made of plane.
(10) the pellicle component framework according to any one in invention 1 to 8, which is characterized in that above-mentioned inclined surface
It is to be made of curved surface.
(11) a kind of pellicle component, including pellicle component framework described in any one in invention 1 to 10, above-mentioned pellicle
Component is characterized in that, on above-mentioned inclined surface and above-mentioned flat on the face of the above-mentioned setting pellicle of above-mentioned pellicle component framework
Smooth face is equipped with adhesive layer, and the adhesive layer is provided with above-mentioned pellicle.
(12) a kind of pellicle component is provided with pellicle, above-mentioned pellicle across adhesive layer on the pellicle component framework of frame-shaped
Component is characterized in that, on the pellicle bonding plane of above-mentioned adhesive layer, equipped with from the inner edge laterally outer side of the pellicle bonding plane
The inclined surface of decline, the thickness of the above-mentioned adhesive layer at the inner edge side beginning of the inclined surface are less than the outer rim lateral terminal of above-mentioned inclined surface
Above-mentioned adhesive layer thickness.
Invention effect
According to the present invention, the pellicle near film adhesive layer can be obtained not tighten and the pellicle component of excellent appearance.
Detailed description of the invention
Fig. 1 is the top view for illustrating an embodiment of pellicle component framework of the invention.
Fig. 2 is the figure for illustrating an embodiment of pellicle component framework of the invention, is the Section A-A figure in Fig. 1.
Fig. 3 is the figure for illustrating an embodiment of pellicle component framework of the invention, is the section B-B figure in Fig. 1.
Fig. 4 is the figure for illustrating an embodiment of pellicle component framework of the invention, is the enlarged drawing in the portion C in Fig. 2.
Fig. 5 is the sectional view for illustrating an embodiment of pellicle component framework of the invention.
Fig. 6 is the sectional view for illustrating an embodiment of pellicle component framework of the invention.
Fig. 7 is the perspective view for illustrating an embodiment of pellicle component framework of the invention.
Fig. 8 is the perspective view for illustrating an embodiment of pellicle component of the invention.
Fig. 9 is the amplification sectional view for illustrating an embodiment of pellicle component of the invention.
Figure 10 is the sectional view for illustrating an embodiment of pellicle component of the invention, shows adhesive applicating work
Sequence.
Figure 11 is the perspective view for illustrating the pellicle component of conventional example (comparative example).
Figure 12 is the perspective view for illustrating the near its inner edge of pellicle component framework of conventional example (comparative example).
Figure 13 is the sectional view for illustrating the pellicle component of conventional example (comparative example).
Figure 14 is the sectional view for illustrating the pellicle component framework of conventional example (comparative example).
Description of symbols
11 pellicle component frameworks
12 film bonding planes
The inclined surface 12a
12b flat surface
13 mask adhesive surfaces
14 perpendicular to flat surface face
51 curved surfaces
52 inclined surface
53 inclined surface
61 planar portions
62 reversed dip faces
80 pellicle components
81 pellicles
82 film adhesive layers
83 mask adhesive layers
84 ventholes
85 fixture holes
86 slots
87 filters
88 spacers
The film bonding plane of 92 film adhesive layers
The inclined surface of 92a film bonding plane
The flat surface of 92b film bonding plane
110 pellicle components
111 pellicle component frameworks
112 film adhesive layers
112a curved face part
113 mask adhesive layers
114 ventholes
115 fixture holes
116 slots
117 filters
118 spacers
119 pellicles
120 tighten
The inner edge side beginning of the inclined surface a
The outer rim lateral terminal of the inclined surface b
The width of the inclined surface w
The width of w ' flat surface
The height of the inclined surface h
The angle of the inclined surface α
The width of the film bonding plane of W pellicle component framework
The height of H pellicle component framework main part.
Specific embodiment
Hereinafter, illustrate embodiments of the present invention referring to attached drawing, but the present invention is not restricted to these mode.
Present invention can apply to the pellicle components of all sizes, purposes, especially be applied to hem width be more than 5mm, mainly
For display manufacturing purposes large pellicle component in the case where effect it is big.This is because, in large-scale and pellicle component framework
The big pellicle component of width in film adhesive layer it is also thick, deteriorated appearance when pellicle is tightened is also significant.
Fig. 1~4 are an embodiments for showing pellicle component framework of the invention.Fig. 1 is top view, and Fig. 2 is in Fig. 1
Section A-A figure, Fig. 3 is the section B-B figure in Fig. 1, and Fig. 4 is the enlarged drawing in the portion C in Fig. 2.
On the face (film bonding plane) 12 of the setting pellicle of the pellicle component framework 11 of frame-shaped, it is equipped with from inner edge laterally outer
The inclined surface 12a of side decline is equipped with flat surface 12b from the outer rim in outer rim lateral terminal b to the face of setting pellicle of inclined surface.?
This, is equipped with inclined surface 12a on the complete cycle in the face of setting pellicle.
Next, the number that the height h of inclined surface 12a, inclined angle alpha, width w are described in detail, but are enumerated below
Value is viscosity, the coating amount, rate of drying of the width and used film bonding agent according to applied pellicle component framework
Etc. characters and suitably determine.
The width w of preferred angled face 12a is 50% or less the width W of the film bonding plane 12 of pellicle component framework 11.This
Sample can substantially ensure the region of the flat surface 12b as pressurised zone when pellicle component is installed on photomask.It is therefore preferable that
The width w ' of flat surface 12b is 50% or more of the width W of the film bonding plane 12 of pellicle component framework 11, as long as a result, half
Have 1mm or more in the small-sized pellicle component of conductor manufacture, have in the large-scale pellicle component of display manufacturing 2mm with
On, pressurised zone can be used as enough.
Inclined surface 12a relative to flat surface 12b be it is outstanding, it is not parallel with the mask adhesive surface 13 on opposite, thus
When pellicle component is installed on photomask, be possible to occur if the region to inclined surface 12a is pressurizeed positional shift,
It attaches bad.So pressurised zone when flat surface 12b is used as pellicle component being installed on photomask, therefore it is preferably flat
Face 12b is parallel with face (the mask adhesive surface) 13 that be installed on photomask of pellicle component framework.
Preferred angled face 12a is 60~89 ° with face 14 angulation (inclination angle) α perpendicular to flat surface 12b, more excellent
It is selected as 80~87 °.If inclined angle alpha is more than 89 °, it is unable to give full play the effect for preventing pellicle from tightening.Inclined angle alpha is smaller,
The effect for then making the inner edge of film adhesive layer sharpened is bigger, and the inner edge appearance of pellicle also increases accordingly.But if inclined angle alpha
Less than 60 °, then sharp keen edge is possible to cause to damage to the pellicle being bonded, and in the manufacture of pellicle component framework
When, manipulation when can be easy to produce burr, defect, in addition, pellicle component manufacture when with being difficult to non-involvement air by pellicle and film
Adhesive layer bonding.
From the easness of design, processing, preferred angled face 12a is made of a plane as shown in Figure 4, but can also
To be made of shown in (b) of such as Fig. 52 or more planes 52,53.By 51 structure of curved surface shown in (a) alternatively, it is also possible to such as Fig. 5
At.In these cases it is preferred to which 2 or more planes and curved surface constitute concave surface, this can make inclined surface and the boundary of flat surface not
It is eye-catching.
In addition, inclined angle alpha is the inclined surface (curved surface) at inner edge side beginning a in the case where constituting inclined surface by curved surface
51 tangent line 54 and the face angulation perpendicular to flat surface.In addition, the case where the plane by 2 or more constitutes inclined surface
Under, inclined angle alpha is the face 52 comprising inner edge side beginning a and the face angulation perpendicular to flat surface.
In addition, from the easness of design, processing, the inner edge side beginning a and pellicle component framework 11 in preferred angled face
Film bonding plane inner edge it is consistent, but can also be as shown in (a) of Fig. 6, (b) of Fig. 6, from inner edge side beginning a to film bonding plane
Inner edge setting planar portions 61 or from outer edge side to inner edge side decline inclined surface (reversed dip face) 62.If be arranged this flat
Face 61 or reversed dip face 62, then can make the angle at the angle with the inner edge side beginning vertex a become larger, therefore in pellicle component frame
The generation of burr, flash, defect etc. can be prevented in the processing of frame.
Furthermore it is preferred that the inner edge side beginning a of inclined surface is located at the position with the inner edge in the face of setting pellicle within 0.2mm
It sets.
In the case that in inclined surface, 12a 1 plane as shown in Figure 4 is constituted, inclined angle alpha by inclined surface 12a width w and
Height h is determined.Width w is smaller, in addition, height h is bigger, then inclined angle alpha is smaller, can more expect reliably to prevent pellicle from tightening
Effect.
On the other hand, the height of pellicle component entirety is determined according to the specification of used exposure device, therefore
The height h of inclined surface 12a is bigger, then the height H of pellicle component framework main part is smaller.As a result, pellicle component framework
Sectional area reduces, rigidity, strength reduction.In addition, height h is bigger, then pellicle is adhered to film with being more difficult to non-involvement air and is glued
Connect layer.It is therefore preferable that the height h of inclined surface 12a is the 0.5~5% of the height (h+H) of pellicle component framework entirety.In addition, excellent
Selecting height h is the range of 0.03~0.3mm, the more preferably range of 0.05~0.15mm.
In addition, in the case where increasing the width w of inclined surface 12a, in order to make inclined angle alpha become desired range
The height h for needing to make inclined surface 12a becomes larger, as previously mentioned, this becomes appearance sometimes and uses upper problem.It is therefore preferable that
The width w of inclined surface 12a is the range of 0.3~3mm, the more preferably range of 0.5~1.5mm.
Although in addition, in particular, using the length of pellicle component framework for the large-scale pellicle component of display applications more
The pellicle component of different size on side and short side, but in such a situation it is preferred in long side and short side, inclined surface 12a is
Identical size, shape.It is very convenient when through machining production inclined surface 12a by being formed as same size, shape,
In addition, the appearance of the connection shape in corner can be made smooth.Fig. 7 shows the angle part of pellicle component framework 11, includes like this
Inclined surface 12a is formed as equally all right inside by side of different size, corner.
The material of pellicle component framework 11 used in the present invention is other than it can use general aluminium alloy, moreover it is possible to use
The fiber-reinforced plastics such as the ceramics such as magnesium alloy, steel, carbon steel, stainless steel, invar, SiN, SiC, engineering plastics, CFRP.About manufacture
Method most preferably carries out machine cut processing from plate, tubing in the case where metal system material, but in order to cut down cost
Also it can be carried out the assembling of rodlike material, from die casting or lose the manufacture that the casting piece of wax etc. carries out.In addition, using plastics system material
In the case of, other than carrying out machine cut processing from plate, it can also utilize injection molding.
Fig. 8 is the solid for showing the embodiment that pellicle component 80 is constituted using above-mentioned pellicle component framework 11
Figure, Fig. 9 is the enlarged section of long side.Pellicle component framework 11, which can also be set as needed, makes the logical of the inside and outside ventilation of pellicle component
Stomata 84, the fixture hole 85 of manipulation, slot 86 when manufacture, attaching.In addition, in the mask adhesive surface of setting mask adhesive layer 83
In 13, also can in order to control the shape of mask adhesive layer 83, width and step, chamfering, slot (not shown) are set.
It is equipped with film adhesive layer 82 on the film bonding plane 12 in the shape of a frame of pellicle component framework 11, is bonded with pellicle here
81.In addition, mask adhesive layer 83 is equipped on the mask adhesive surface 13 on its opposite, on the surface of adhesive layer 83, in order to protect
Adhesive layer is set as needed the release agent for applying organic silicon-type or fluorine system to the film with a thickness of 0.5mm PET below etc. and forms
Spacer 88.Moreover, dust intrusion is internal in order to prevent at the venthole 84 of side for being set to pellicle component framework 11,
The filter 87 of the sheet of multiple aperture plasma membranes such as including PTFE is equipped with across adhesive layer (not shown).
Film adhesive layer 82 can use material well known to acrylic acid series bonding agent, fluorine system bonding agent, silicon-type bonding agent etc..
These bonding agents are diluted etc. with solvent appropriate and adjust viscosity, and are coated on forming the liquid measure of desired thickness
On the film bonding plane 12 of one side as pellicle component framework 11.Applying device can be using well known to air pressurized formula distributor etc.
Device.The thickness of film adhesive layer 82 needs to be determined according to bonding force, the easness of bonding, appearance, as an example preferably 20
~300 μm of range.
Figure 10 is the state shown when foring film adhesive layer 82.After just applying bonding agent, as Figure 10 (a) that
Sample, glued dose of inclined surface 12a buries.Then, as (b) of Figure 10, with the continuous drying of solvent bonding agent along
Inclined surface 12a is shunk, and the inner edge side beginning a of inclined surface 12a is exposed.Also, finally as (c) of Figure 10, inclined surface 12a
Inner edge side beginning a at film adhesive layer 82 thickness it is smaller than the thickness of the adhesive layer at the outer rim lateral terminal b of inclined surface 12a
(thin) is formed as thin to the effect of curved surface that can ignore the surface tension due to film adhesive layer 82 and generate.At this point, viscous
The face (film bonding plane) 92 contacted with pellicle 81 for connecing layer has the inclined surface 92a declined from inner edge laterally outer side.
Also, it, will not be in film in the case that the thickness of the film adhesive layer 82 at the inner edge side beginning a of inclined surface 12a is thin
Form as shown in fig. 13 that curved face part 112a is like that along the bonding plane in the direction of pellicle 119 in adhesive layer 82, therefore film is bonded
The case where being partly bonded in layer 82 there is no pellicle 81, therefore the table as shown in (a) of Figure 13 of conventional example can be prevented
Film 81 is partly contacted, is bonded and there is a situation where tighten.
The inner edge side beginning of the inclined surface 92a of film bonding plane 92 does not need the centainly film bonding plane with pellicle component framework 11
12 inner edge is consistent, it is preferred that it is consistent with the inner edge side beginning of film adhesive layer 82.The reason is that at (c) of such as Figure 10
Shown in film adhesive layer 82 form the inner edge side beginning to the inclined surface 92a than film bonding plane 92 in the case where the inner edge side, though
The shape of adhesive layer is so additionally depended on, but it some times happens that pellicle is tightened.
Certainly, in pellicle component framework 11 as shown in Figure 4 and Figure 5, it is believed that the hardly shape of film adhesive layer 82
Inner edge side, but the especially table shown in (b) such as Fig. 6 are leaned on to the inner edge side beginning than inclined surface 92a of film bonding plane 92
In film structural component frame 11, it is contemplated that have the case where film adhesive layer 82 is formed in reversed dip face 62.In this case, such as
Fruit film adhesive layer 82 forms to the inner edge side beginning a than inclined surface 92a and leans on inner edge side, then the film adhesive layer 82 of the inner edge side is sometimes
It will form curved face part 112a shown in (a) such as Figure 13, (b), and become the reason of pellicle 81 is tightened.In addition, such as Fig. 6
(a) it in pellicle component framework 11 shown in, if film adhesive layer 82 is formed until the planar portions 61 of inner edge, is also possible to same
Tightening for pellicle 81 occurs for sample, but if planar portions 61 are not excessive but narrow, even if film adhesive layer 82 is formed extremely
Until inner edge side, the case where 81 part of pellicle bonding will not occur, therefore tightening for pellicle 81 hardly occurs, so not
Problem can especially be become.
Therefore, in the case where the shape of the pellicle component framework 11 shown in (b) of (a), Fig. 6 such as Fig. 6, preferably flat
It is not provided with adhesive layer on face 61, reversed dip face 62, but the width in planar portions 61, reversed dip face 62 is sufficiently narrow, anti-
To inclined surface 62 the gradient it is small it is equal in the case where, be not limited.
Pellicle 81 can use in method well known to spin-coating method, slot coated method etc. by cellulose-based resin, fluorine resin etc.
Membrane material solution be coated on smooth substrate and make it dry solidify and the table of thickness manufacture, such as 0.1~10 μm degree
Film.
The material of mask adhesive layer 83 can use known in acrylic resin, polybutene resin, SEBS, organic siliconresin etc.
Material, with film adhesive layer 82 it is also possible to be diluted as needed with solvent appropriate, and distributed using air pressurized formula
Device etc. is coated on mask adhesive surface 13.As shown in figure 9, the shape about mask adhesive layer 83, bonds in addition to being only set to mask
Other than a part of region in face 13, it is also possible to be arranged or be formed in entire surface by multiple row.In addition, its cross sectional shape can be
Convex, also can be implemented mask adhesive layer 83 height adjustment and implement to improve flatness crushing processing become it is flat
Face.
Also, about the pellicle component constituted as described above, as shown in figure 9, film adhesive layer 82 inner edge side almost
It not will form the curved surface of the convex form formed due to surface tension, or even if foring curved surface is also that can ignore what it was influenced
Degree, therefore, until pellicle 81 is seamlessly bonded to the inner edge of film adhesive layer 82 completely, pellicle 81 will not envelope adhesive layer 82
It stretches and tightens.As a result, the appearance of pellicle 81 is greatly improved in the near its inner edge of pellicle component framework 11.
[embodiment]
1 > of < embodiment
Hereinafter, showing embodiment to further illustrate the present invention.
Fig. 8, Fig. 9 show the vertical of the pellicle component made using Fig. 1, Fig. 2, Fig. 3 and pellicle component framework shown in Fig. 4
Body figure and sectional view.
Pellicle component framework 11 is to make using 5000 line aluminium alloys and by machining, and implement black oxidation
Aluminium film processing.At this point, the size of pellicle component framework 11 are as follows: external dimensions be 756 × 937.5mm, inside dimension be 740 ×
925.5mm is highly 5.8mm.On the face (film bonding plane) 12 of setting pellicle, it is equipped on complete cycle from inner edge laterally outer side
The inclined surface 12a of decline is formed with flat surface 12b from the outer rim in outer rim lateral terminal b to the face of setting pellicle of inclined surface 12a.
The width of inclined surface 12a is w=1mm, is highly h=0.1mm, inclined angle alpha is about 84.3 °, the width of flat surface
For long side 7mm, short side 5mm.In addition, the inner edge side beginning a of inclined surface 12a and the inner edge of film bonding plane are consistent.By the table
Film structural component frame 11 moves in 10 grades of dust free rooms, is cleaned with interfacial agent and pure water, is completely dried it.
Application dilution with toluene is applied on mask adhesive surface 13 using air pressurized formula distributor to the pellicle component framework 11
Silicone adhesive (SHIN-ETSU HANTOTAI's chemical industry (strain) manufacture) afterwards forms mask adhesive layer 83.In addition, on film bonding plane 12,
Using the silicone adhesive (SHIN-ETSU HANTOTAI's chemical industry (strain) manufacture) of air pressurized formula distributor coating as pellicle bonding agent makes it
With a thickness of about 80 μm, and form film adhesive layer 82.Then, it is heated at 120 DEG C or more, completely removes solvent, and made
Silicone adhesive is heating and curing.
Film adhesive layer 82 becomes the cross sectional shape as shown in (c) of Fig. 9 and Figure 10, at the inner edge side beginning a of inclined surface 12a
Film adhesive layer 82 thickness be less than inclined surface outer rim lateral terminal b at film adhesive layer 82 thickness.At this point, film adhesive layer 82
The face (film bonding plane) 92 contacted with pellicle there is the inclined surface 92a that declines from inner edge laterally outer side.In addition, film bonding plane
The inner edge side beginning of 92 inclined surface 92a is consistent with the inner edge side beginning of film adhesive layer 82.
Then, on the surface of mask adhesive layer 83, spacer 88 is assembled in order to carry out surface protection, the spacer 88
It is to the PET film release agent application with a thickness of 0.125mm, and cutting processing is roughly the same with the shape of pellicle component framework 11
Shape obtained from.Moreover, in the outside for the venthole 84 for being set to 11 side of pellicle component framework, it is viscous across acrylic resin
Close the membrane filter 87 that layer assembly (not shown) includes PTFE multiple aperture plasma membrane.
Finally, fluorine system polymer (Asahi Glass (strain) system) will be made to pass through slit on the quartz glass substrate for grinding smoothly
Rubbing method is attached with a thickness of about 2.2 μm of pellicle 81 across film adhesive layer 82 obtained from forming a film and be dried, removing,
And complete pellicle component 80.
The pellicle component 80 of completion is observed, as shown in figure 9, film adhesive layer 82 is formed as that film bonding is completely covered
Face 12, and the inner edge side beginning a of the inclined surface 12a of pellicle component framework 11 is more gone to, thickness is thinner, at inner edge side beginning
Cross sectional shape very thin near a, rising steeply for edge.
Also, about the pellicle component 80, the pellicle component framework of pellicle 81 is nearby observed, in pellicle component
On the inner edge complete cycle of frame 11, the non-bonding region of pellicle 81 is not observed nearly all in film adhesive layer 82.Furthermore, it is contemplated that
Vibration in conveying, and try to vibrate pellicle 81 by air-supply, but do not observe on pellicle 81 local gauffer,
It tightens, maintains good appearance.
1 > of < comparative example
As comparative example 1, the different pellicle component framework of from the identical size of above-described embodiment 1 and only cross sectional shape is used
111 make pellicle component 110 shown in Figure 11.Other than used pellicle component framework 111, manufacturing process, condition
It is all same as Example 1.The cross sectional shape of the pellicle component framework 111 used at this time is as shown in figure 14, without such as above-mentioned reality
The protrusion of the near its inner edge of such pellicle component framework 11 in example 1 is applied, is rectangular section.
In the pellicle 119 of the pellicle component 110 of completion, many places are produced in the near its inner edge of pellicle component framework 111
The small of film as best seen in the enlarged view of figure 12 tightens 120.In addition, producing tightening for film in the section of pellicle component 110
120 position on the other hand, does not generate the position for tightening 120 as (b) of Figure 13 as (a) of Figure 13.
In addition, although pellicle adhesive layer 112 is shaped generally as uniform thickness, due to the surface tension of adhesive layer
Effect, produces the curved face part 112a of convex near its inner edge.And, thus it is speculated that be in the big region of the relaxation of pellicle 119 or
When with the carrying between process, pellicle 119 is shaken, pellicle 119 is contacted and is bonded with curved face part 112a, and is produced and tightened
120.Also, this can make deteriorated appearance, thus be undesirable.
Claims (12)
1. a kind of pellicle component framework is the pellicle component framework of frame-shaped, which is characterized in that
Outer rim lateral terminal on the face of setting pellicle, equipped with the inclined surface declined from inner edge laterally outer side, from the inclined surface
Outer rim to the face of above-mentioned setting pellicle is equipped with flat surface.
2. pellicle component framework according to claim 1, which is characterized in that
Above-mentioned inclined surface is arranged on the complete cycle in the face of above-mentioned setting pellicle.
3. pellicle component framework according to claim 1 or 2, which is characterized in that
The width of above-mentioned inclined surface is 50% or less the width in the face of above-mentioned setting pellicle.
4. according to claim 1 to pellicle component framework described in any one in 3, which is characterized in that
Above-mentioned inclined surface is 60~89 ° with the face angulation perpendicular to above-mentioned flat surface.
5. according to claim 1 to pellicle component framework described in any one in 4, which is characterized in that
The inner edge side beginning of above-mentioned inclined surface is located at the position with the inner edge in the face of above-mentioned setting pellicle within 0.2mm.
6. according to claim 1 to pellicle component framework described in any one in 5, which is characterized in that
The inner edge side beginning of above-mentioned inclined surface is the inner edge in the face of above-mentioned setting pellicle.
7. according to claim 1 to pellicle component framework described in any one in 6, which is characterized in that
The width of above-mentioned inclined surface is 0.3~3mm.
8. according to claim 1 to pellicle component framework described in any one in 7, which is characterized in that
The height of above-mentioned inclined surface is 0.03~0.3mm.
9. according to claim 1 to pellicle component framework described in any one in 8, which is characterized in that
Above-mentioned inclined surface is made of plane.
10. according to claim 1 to pellicle component framework described in any one in 8, which is characterized in that
Above-mentioned inclined surface is made of curved surface.
11. a kind of pellicle component, including pellicle component framework described in any one in claims 1 to 10, above-mentioned pellicle
Component is characterized in that,
On the face of the above-mentioned setting pellicle of above-mentioned pellicle component framework, it is equipped on above-mentioned inclined surface and on above-mentioned flat surface viscous
Layer is connect, the adhesive layer is provided with above-mentioned pellicle.
12. a kind of pellicle component is provided with pellicle across adhesive layer on the pellicle component framework of frame-shaped, above-mentioned pellicle component
It is characterized in that,
On the pellicle bonding plane of above-mentioned adhesive layer, equipped with the inclination declined from the inner edge laterally outer side of the pellicle bonding plane
Face, the thickness of the above-mentioned adhesive layer at the inner edge side beginning of the inclined surface are less than the above-mentioned bonding of the outer rim lateral terminal of above-mentioned inclined surface
The thickness of layer.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-152245 | 2017-08-07 | ||
| JP2017152245A JP6861596B2 (en) | 2017-08-07 | 2017-08-07 | Pellicle frame and pellicle |
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| Publication Number | Publication Date |
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| CN109388017A true CN109388017A (en) | 2019-02-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810891458.9A Pending CN109388017A (en) | 2017-08-07 | 2018-08-07 | Pellicle component framework and pellicle component |
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| Country | Link |
|---|---|
| JP (1) | JP6861596B2 (en) |
| KR (1) | KR102635619B1 (en) |
| CN (1) | CN109388017A (en) |
| TW (2) | TWI834264B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113272133A (en) * | 2019-03-28 | 2021-08-17 | 日铁不锈钢株式会社 | Transparent coated stainless steel plate |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11454881B2 (en) | 2019-07-31 | 2022-09-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Pellicle design for mask application |
| KR20240017447A (en) | 2022-08-01 | 2024-02-08 | 주식회사 참그래핀 | A pellicle for protecting photomask of extreme ultra violet lithography and method thereof |
| KR20240017642A (en) | 2022-08-01 | 2024-02-08 | 주식회사 참그래핀 | A pellicle for protecting photomask of extreme ultra violet lithography and method thereof |
| KR20240135942A (en) | 2023-03-06 | 2024-09-13 | 주식회사 참그래핀 | A manufacturcing method of pellicle for protecting photomask of extreme ultra violet lithography |
| KR20240135940A (en) | 2023-03-06 | 2024-09-13 | 주식회사 참그래핀 | A manufacturcing method of pellicle for protecting photomask of extreme ultra violet lithography |
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- 2018-08-06 KR KR1020180091372A patent/KR102635619B1/en active IP Right Grant
- 2018-08-07 CN CN201810891458.9A patent/CN109388017A/en active Pending
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| US12091578B2 (en) | 2019-03-28 | 2024-09-17 | Nippon Steel Stainless Steel Corporation | Clear-coated stainless steel sheet |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102635619B1 (en) | 2024-02-08 |
| JP2019032388A (en) | 2019-02-28 |
| TW201931005A (en) | 2019-08-01 |
| TWI834264B (en) | 2024-03-01 |
| JP6861596B2 (en) | 2021-04-21 |
| TW202248749A (en) | 2022-12-16 |
| KR20190016005A (en) | 2019-02-15 |
| TWI779072B (en) | 2022-10-01 |
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