KR20200090350A - Cover Film for protecting adhesive sheet using adhesive chuck - Google Patents

Cover Film for protecting adhesive sheet using adhesive chuck Download PDF

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Publication number
KR20200090350A
KR20200090350A KR1020190007258A KR20190007258A KR20200090350A KR 20200090350 A KR20200090350 A KR 20200090350A KR 1020190007258 A KR1020190007258 A KR 1020190007258A KR 20190007258 A KR20190007258 A KR 20190007258A KR 20200090350 A KR20200090350 A KR 20200090350A
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South Korea
Prior art keywords
adhesive
cover film
adhesive sheet
protecting
film
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KR1020190007258A
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Korean (ko)
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KR102193721B1 (en
Inventor
이상민
임석규
임호성
서정국
윤경욱
염승호
최현기
신우재
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주식회사 야스
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Priority to KR1020190007258A priority Critical patent/KR102193721B1/en
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Publication of KR102193721B1 publication Critical patent/KR102193721B1/en

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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/40—Adhesives in the form of films or foils characterised by release liners
    • C09J7/403—Adhesives in the form of films or foils characterised by release liners characterised by the structure of the release feature

Abstract

The present invention relates to a cover film of a dual composite structure consisting of an adhesive portion and a non-adhesive portion to prevent a decrease in the adhesive strength of an adhesive sheet on an adhesive chuck due to the inflow of particles when a substrate is moved before a display process proceeds and solve a problem that the adhesive sheet sticks together when the cover film is detached.

Description

점착척의 점착시트 보호 용 커버 필름{Cover Film for protecting adhesive sheet using adhesive chuck}Cover Film for protecting adhesive sheet using adhesive chuck}

본 발명은 반도체, 디스플레이 제조를 위한 점착척의 점착시트 보호 용 커버필름에 관한 것이다. The present invention relates to a cover film for protecting an adhesive sheet of an adhesive chuck for semiconductor and display manufacturing.

점착척은 현재 디스플레이 산업에서 대량생산체제에 적합한 기판 이송 수단으로 사용되고 있다(공개특허 10-2015-0031106호 등). 점착척을 구성하는 점착시트는 기판 이송과 보관 과정에서 이물질(Particle)이 부착되어 점착력의 저하를 가져오게 된다. 이에 따라 디스플레이 제조 전처리 과정으로 점착 시트에 커버 필름을 부착하여 점착력 저하를 방지하는데, 커버필름 탈착 시 커버필름의 점착력으로 인해 점착시트가 같이 붙어서 탈착되는 문제점이 발생한다. 이러한 문제로 수작업으로 다시 점착시트를 부착시켜줘야 하며, 이는 곧 제조 효율을 저하시킨다.The adhesive chuck is currently used in the display industry as a substrate transfer means suitable for mass production systems (Patent Publication No. 10-2015-0031106, etc.). In the adhesive sheet constituting the adhesive chuck, particles are attached during substrate transfer and storage, leading to a decrease in adhesive strength. Accordingly, a cover film is attached to the pressure-sensitive adhesive sheet as a pre-processing process for display manufacturing to prevent deterioration of the adhesive strength, and when the cover film is detached, a problem arises in that the pressure-sensitive adhesive sheets are stuck together due to the adhesive strength of the cover film. Due to this problem, the adhesive sheet must be re-attached manually, which soon degrades manufacturing efficiency.

상기 문제에 따라 본 발명의 목적은 점착시트에 부착된 커버필름 탈착 시 점착시트가 같이 붙어서 나오는 문제점을 해결하는 데에 있다.According to the above problem, an object of the present invention is to solve the problem that the adhesive sheet sticks together when the cover film attached to the adhesive sheet is detached.

본 발명은 커버필름 탈착 시 점착시트가 같이 붙어서 나오는 문제점을 방지 하기 위해 점착 및 무점착의 이중복합구조 커버 필름을 구성하였다. The present invention constituted a double-composite structure cover film of adhesive and non-adhesive to prevent a problem that the adhesive sheet stuck together when the cover film was detached.

즉, 본 발명은,That is, the present invention,

점착 척의 점착시트를 보호하는 점착시트 보호용 커버필름으로서,As a cover film for protecting an adhesive sheet protecting an adhesive sheet of an adhesive chuck,

상기 점착시트 부분을 커버하는 무점착부; 및An adhesive portion covering the adhesive sheet portion; And

상기 무점착부로부터 연장된 점착부;를 포함하여, 점착 척 위에 부착되어 점착시트의 오염을 방지하되, 커버필름을 떼어낼 때 상기 점착시트가 함께 박리되는 것을 방지한 것을 특징으로 하는 점착시트 보호용 커버필름을 제공한다.Adhesive attached to the adhesive chuck, including, to prevent contamination of the adhesive sheet attached to the adhesive chuck, including, when peeling the cover film to prevent the adhesive sheet from peeling together for protecting the adhesive sheet Provide a cover film.

상기에 있어서, 상기 점착시트 보호용 커버필름은 무점착 필름에 점착필름을 합지하여 제조되어 이중복합구조를 갖는 것을 특징으로 하는 점착시트 보호용 커버필름을 제공한다. In the above, the cover film for protecting the adhesive sheet is prepared by laminating the adhesive film on the adhesive film to provide a cover film for protecting the adhesive sheet, characterized in that it has a double composite structure.

상기에 있어서, 하나의 필름의 양 측면만 점착체를 도포하고, 중앙부분은 무점착 역할을 하도록 점착제 도포로부터 제외시켜 이중복합구조를 갖게 한 것을 특징으로 하는 점착시트 보호용 커버필름을 제공한다. In the above, it provides a cover film for protecting the adhesive sheet, characterized in that the adhesive layer is applied to both sides of only one film, and the central portion is excluded from the application of the adhesive so as to serve as a non-adhesive, thereby providing a double-composite structure.

상기에 있어서, 무점착부는 커버필름을 이루는 기저필름에 대해 일부는 부착되고 일부는 자유로운 날개부분을 구비하여 점착시트 부분을 포위하는 인갭슐레이션부를 더 포함하는 것을 특징으로 하는 점착시트 보호용 커버필름을 제공한다.In the above, the non-adhesive portion is provided with a cover film for protecting the adhesive sheet, characterized in that it further comprises an encapsulation portion surrounding the adhesive sheet portion with a part of the base film constituting the cover film and a part having a free wing portion. to provide.

상기에 있어서, 점착시트 보호용 커버필름은 투과율 10% 이상인 것을 특징으로 하는 점착시트 보호용 커버필름을 제공한다. In the above, the cover film for protecting the adhesive sheet provides a cover film for protecting the adhesive sheet, characterized in that the transmittance is 10% or more.

본 발명에 따르면 점착시트에 닿는 곳은 무점착 부분, 그리고 점착 부분은 기판 척에 닿음으로써 커버필름을 밀봉시켜 이물질(Particle) 투입을 방지하고, 커버필름 탈착 시 무점착 부분에 의해 점착시트가 같이 붙어서 나오는 문제점을 방지할 수 있어 생산 효율을 증가를 기대 할 수 있다.According to the present invention, where the adhesive sheet touches the non-adhesive part, and the adhesive part contacts the substrate chuck to seal the cover film to prevent the introduction of particles, and when the cover film is detached, the adhesive sheet is attached by the non-adhesive part. It can be expected to increase production efficiency because it can prevent sticking problems.

도 1은 커버필름 평면도이다.
도 2는 점착시트에 커버필름 부착 시 평면도이다.
도 3은 점착시트에 커버필름 부착 시 단면도이다.
도 4는 본 발명의 변형 실시예를 보여주는 단면도이다. 1 is a plan view of the cover film.
2 is a plan view when the cover film is attached to the adhesive sheet.
3 is a cross-sectional view when the cover film is attached to the adhesive sheet.
4 is a cross-sectional view showing a modified embodiment of the present invention.

이하, 첨부도면을 참조하여 본 발명의 바람직한 실시 예에 대해 상세히 설명한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 1은 본 발명에 따른 커버필름(100)을 보여준다. 커버필름(100)의 중앙은 점착시트에 닿는 부분으로 무점착부(120)로 처리되어 있으며, 닿지 않는 양 측면은 점착부분으로 커버필름(100)을 고정시키는 역할을 한다.1 shows a cover film 100 according to the present invention. The center of the cover film 100 is treated with a non-adhesive portion 120 as a portion that contacts the adhesive sheet, and both sides that do not touch serve to fix the cover film 100 with the adhesive portion.

도 2는 본 발명에 따른 점착시트(200)에 커버필름(100)을 부착한 상태를 보여준다. 커버필름(100)의 무점착부(120)의 폭은 점착시트(200)의 폭보다 커야 하며, 점착부(110)와 점착시트(200)는 서로 닿지 않도록 한다.2 shows a state in which the cover film 100 is attached to the adhesive sheet 200 according to the present invention. The width of the non-adhesive portion 120 of the cover film 100 should be greater than the width of the adhesive sheet 200, and the adhesive portion 110 and the adhesive sheet 200 do not contact each other.

도 3은 본 발명에 따른 척 플레이트(300)에 점착시트(200)와 커버필름(100) 부착 시 단면도이다. 무점착부(120)은 점착시트(200)와 닿아있으며, 점착부(110)는 척 플레이트(300)와 부착하여 커버필름(100)을 고정시키며, 점착시트(200)를 완벽히 차폐하도록 하여 이물질(Particle)이 유입되지 못하도록 역할을 한다.3 is a cross-sectional view of the adhesive sheet 200 and the cover film 100 attached to the chuck plate 300 according to the present invention. The adhesion-free portion 120 is in contact with the adhesive sheet 200, and the adhesive portion 110 is attached to the chuck plate 300 to fix the cover film 100, so that the adhesive sheet 200 is completely shielded so that foreign matter It plays a role to prevent (Particle) from entering.

이와 같은 커버필름은 점착 척 위에 부착되어 점착시트의 오염을 방지하며, 커버필름을 떼어낼 때 무점착부로 인해 점착시트가 함께 박리되는 것을 방지한다. Such a cover film is attached on the adhesive chuck to prevent contamination of the adhesive sheet, and prevents the adhesive sheet from being peeled off due to a non-adhesive portion when the cover film is removed.

상기 점착시트 보호용 커버필름의 제조는 무점착 필름을 바탕으로 하여 점착부에 점착필름을 합지 부착하여 제조될 수 있다. 무점착 필름을 준비하고, 점착시이트에 대응될 부분(중심부)을 제외한 양 측면부를 따라 점착필름을 합지함으로써 커버필름은 이중복합구조를 갖게 된다. The manufacture of the cover film for protecting the adhesive sheet may be prepared by laminating the adhesive film on the adhesive part based on the adhesive film. The cover film has a double-composite structure by preparing a non-adhesive film and laminating the adhesive films along both side portions except for the portion (center portion) corresponding to the adhesive sheet.

또한, 무점착 필름을 준비하고 무점착 필름의 중앙부분을 제외하고 양 측면만 점착체를 도포하여 이중복합구조를 갖는 커버필름을 만들 수도 있다. In addition, it is also possible to prepare a non-adhesive film and apply a pressure-sensitive adhesive on both sides except for the central portion of the non-adhesive film to make a cover film having a double-composite structure.

점착시트 보호용 커버필름은 투과율 10% 이상이 되게 하는 것이 바람직하다.It is preferable that the cover film for protecting the adhesive sheet has a transmittance of 10% or more.

도 4는 본 발명의 또 다른 실시예이다.4 is another embodiment of the present invention.

여기서는 무점착부(120)는 인캡슐레이션부(125)를 구비한다. 인캡슐레이션부(125)는 점착시트(200)를 포위하는 역할을 하며, 외부의 습윤이나 환경으로부터 차단시킬 수 있으며, 결과적으로 1차적으로 점착부(110)에서 한번 차폐가 되고, 2차적으로 인캡슐레이션부를 갖는 무점착 부분(120)에서 차폐가 이루어진다.Here, the adhesive-free portion 120 includes an encapsulation portion 125. The encapsulation unit 125 serves to surround the adhesive sheet 200, and can be blocked from external wetting or the environment. As a result, it is primarily shielded once by the adhesive unit 110, and secondaryly Shielding is made in the non-adhesive portion 120 having an encapsulation portion.

이와 같은 커버필름은 무점착 필름에 점착제를 도포하거나 점착필름을 준비하여 기저 필름으로 하고 그 중앙부에 무점착 필름을 부착하되, 무점착 필름의 일부만 기저 필름의 중앙부에 부착하고 양단부는 날개와 같이 자유단으로 연장시켜 날개부분으로 점착시트(200)를 포위하여 봉지처리할 수 있게 한다. Such a cover film is a base film prepared by applying an adhesive to the non-adhesive film or preparing an adhesive film, and attaching a non-adhesive film to the central portion thereof, but only a part of the non-adhesive film is attached to the central portion of the base film and both ends are free as wings It extends to the stage so that the adhesive sheet 200 is enclosed with the wing portion to be sealed.

본 발명의 권리는 위에서 설명된 실시 예에 한정되지 않고 청구범위에 기재된 바에 의해 정의되며, 본 발명의 분야에서 통상의 지식을 가진 자가 청구범위에 기재된 권리범위 내에서 다양한 변형과 개작을 할 수 있다는 것은 자명하다.The rights of the present invention are not limited to the embodiments described above, but are defined by the claims, and those skilled in the art can make various modifications and adaptations within the scope of the claims. It is self-evident.

100 : 커버필름
110 : 점착부
120 : 무점착부
125: 인캡슐레이션부
200 : 점착시트
300: 척 플레이트100: cover film
110: adhesive portion
120: adhesion-free
125: encapsulation part
200: adhesive sheet
300: chuck plate

Claims (5)

점착 척의 점착시트를 보호하는 점착시트 보호용 커버필름으로서,
상기 점착시트 부분을 커버하는 무점착부; 및
상기 무점착부로부터 연장된 점착부;를 포함하여, 점착 척 위에 부착되어 점착시트의 오염을 방지하되, 커버필름을 떼어낼 때 상기 점착시트가 함께 박리되는 것을 방지한 것을 특징으로 하는 점착시트 보호용 커버필름.As a cover film for protecting the adhesive sheet to protect the adhesive sheet of the adhesive chuck,
An adhesive portion covering the adhesive sheet portion; And
Adhesive attached to the adhesive chuck, including, to prevent contamination of the adhesive sheet attached to the adhesive chuck, including, when removing the cover film for preventing the adhesive sheet from peeling together for protecting the adhesive sheet Cover film. 제1항에 있어서, 상기 점착시트 보호용 커버필름은 무점착 필름에 점착필름을 합지하여 제조되어 이중복합구조를 갖는 것을 특징으로 하는 점착시트 보호용 커버필름. The cover film for protecting an adhesive sheet according to claim 1, wherein the cover film for protecting an adhesive sheet is manufactured by laminating an adhesive film on an adhesive film and has a double-composite structure. 제1항에 있어서, 하나의 필름의 양 측면만 점착체를 도포하고, 중앙부분은 무점착 역할을 하도록 점착제 도포로부터 제외시켜 이중복합구조를 갖게 한 것을 특징으로 하는 점착시트 보호용 커버필름. The cover film for protecting an adhesive sheet according to claim 1, wherein only one side of the film is coated with the adhesive, and the central portion is excluded from the adhesive application so as to serve as a non-adhesive, thereby providing a double-composite structure. 제1항에 있어서, 상기 무점착부는 커버필름을 이루는 기저필름에 대해 일부는 부착되고 일부는 자유로운 날개부분을 구비하여 점착시트 부분을 포위하는 인갭슐레이션부를 더 포함하는 것을 특징으로 하는 점착시트 보호용 커버필름. The adhesive sheet of claim 1, wherein the non-adhesive portion further comprises an encapsulation portion surrounding the adhesive sheet portion with a part of the base film constituting the cover film and a part having a free wing portion. Cover film. 제1항 내지 제4항 중 어느 한 항에 있어서, 점착시트 보호용 커버필름은 투과율 10% 이상인 것을 특징으로 하는 점착시트 보호용 커버필름.


The cover film for protecting an adhesive sheet according to any one of claims 1 to 4, wherein the cover film for protecting an adhesive sheet has a transmittance of 10% or more.


KR1020190007258A 2019-01-21 2019-01-21 Cover Film for protecting adhesive sheet using adhesive chuck KR102193721B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220120121A (en) * 2021-02-23 2022-08-30 주식회사 야스 Adhesive Roll Film with triple-folding method

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