TWI624859B - Dust-proof film module and installation method thereof - Google Patents
Dust-proof film module and installation method thereof Download PDFInfo
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- TWI624859B TWI624859B TW105114794A TW105114794A TWI624859B TW I624859 B TWI624859 B TW I624859B TW 105114794 A TW105114794 A TW 105114794A TW 105114794 A TW105114794 A TW 105114794A TW I624859 B TWI624859 B TW I624859B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
本發明的目的為提供一種，即使離焦距離間隙距離小，防塵薄膜組件框架的剛性低的防塵薄膜組件，也可容易地處理，從防塵薄膜組件收納容器安全取出，從而可以無缺陷地向光掩模等貼附的防塵薄膜組件以及其安裝方法。本發明的防塵薄膜組件，在防塵薄膜組件框架11的防塵薄膜接著層側設置可裝可卸的防塵薄膜組件支持裝置20的同時，離焦距離間隙距離／外尺寸對角長的值為0.0001~0.003。再者，防塵薄膜組件支持裝置20，由平板狀或者框狀的支持體16構成，通過在支持體16被設置的微黏著性物質，在防塵薄膜組件框架11的防塵薄膜接著層側可裝可卸地設置。An object of the present invention is to provide a dust-proof film module with a low rigidity of a dust-proof film module frame, which can be easily handled even if the defocus distance is small. The dust-proof film module can be safely taken out from the dust-proof film module storage container, and can be directed to the light without defects. A dust-proof thin film module attached with a mask or the like and a method of mounting the same. In the dustproof film module of the present invention, a detachable dustproof film module supporting device 20 is provided on the dustproof film adhering layer side of the dustproof film module frame 11, and the value of the distance from the focal distance / the diagonal length of the outer dimension is 0.0001 ~ 0.003. In addition, the dust-proof film module supporting device 20 is composed of a flat or frame-shaped support 16. The micro-adhesive substance provided on the support 16 can be installed on the dust-proof film adhesive layer side of the dust-proof film module frame 11. Ground floor setting.
Description
本發明涉及在半導體裝置，IC封裝體，印刷基板，液晶面板或者有機EL面板等製造時，作為灰塵防止器使用的防塵薄膜組件以及其安裝方法。The present invention relates to a dust-proof thin-film module used as a dust preventer during the manufacture of a semiconductor device, an IC package, a printed circuit board, a liquid crystal panel, or an organic EL panel, and a method of mounting the same.
在LSI，超LSI等的半導體或液晶面板等的製造中，要將紫外線等的波長短的光向光掩模照射，使用在半導體晶片或者液晶用玻璃上製作圖案的曝光機。此時，如在使用的光掩模上附著灰塵，該灰塵對紫外光進行折射、反射，使轉印的圖案変形，短路等，會有品質受損的問題。In the manufacture of semiconductors such as LSIs, ultra-LSIs, and liquid crystal panels, a short-wavelength light such as ultraviolet rays is irradiated onto a photomask, and an exposure machine is used to make a pattern on a semiconductor wafer or glass for liquid crystal. At this time, if dust is adhered to the used photomask, the dust refracts and reflects ultraviolet light, and causes the transferred pattern to be shaped and short-circuited, which may cause a problem of quality deterioration.
因此，這些的操作通常在無塵室中進行，但是即使如此，保持光掩模的清浄也是困難的，所以要在光掩模表面將作為灰塵防止器的防塵薄膜組件貼附後進行曝光。於該情況，異物不會再光掩模的表面上直接附著，而是在防塵薄膜組件上附著，所以光刻時只要將焦點對準在光掩模的圖案，防塵薄膜組件上的異物就與轉印無關了。Therefore, these operations are usually performed in a clean room, but even so, it is difficult to maintain the cleanness of the photomask. Therefore, the surface of the photomask is attached with a dust-proof film module as a dust preventer and exposed. In this case, the foreign matter will not be directly attached to the surface of the photomask, but will be attached to the dustproof thin film module. Therefore, as long as the focus is on the pattern of the photomask during photolithography, the foreign matter on the dustproof thin film module will The transfer is irrelevant.
再者，作為一部分的特殊用途，在光掩模以外的曝光機內的光學部件安裝的防塵薄膜組件也存在。曝光機內內反光鏡，透鏡，窗等，紫外光反射，透過的光學部件很多，這些光學部件，從光源將紫外光導向光掩模以及工件（半導體晶片或者液晶基板）。這些光學部件上如果有異物以及汙物附著，極易對曝光品的品質發生影響，他們的清潔度雖不及光掩模的清浄度，但是，對於這些光學部件也要在可能的限度內有保持清浄的必要。In addition, as a part of special applications, there is also a dust-proof film module mounted on an optical component in an exposure machine other than a photomask. Inside the exposure machine, there are many optical components such as reflectors, lenses, windows, etc. that reflect and transmit ultraviolet light. These optical components guide the ultraviolet light from the light source to the photomask and the workpiece (semiconductor wafer or liquid crystal substrate). If foreign matter and dirt adhere to these optical components, it is easy to affect the quality of the exposed product. Although their cleanliness is not as clean as that of the photomask, they must be maintained to the extent possible. Necessity of cleanliness.
進而，這些光學部件，是進行了精密的位置調整被安裝的，因此，在製造現場將個別的部件卸下進行清洗是極為困難的。因此，如果發生了髒汙，其清洗以及再調整就需要很多的時間，或造成嚴重的工作效率的低下。因此，為了防止這種情況，在一部分的曝光裝置中，不僅光掩模，這些光學部件上也要安裝上防塵薄膜組件，在發生髒汙時，將防塵薄膜更換即可。Furthermore, since these optical components are mounted with precise position adjustment, it is extremely difficult to remove and clean individual components at the manufacturing site. Therefore, if soiling occurs, it takes a lot of time to clean and readjust, or it causes serious inefficiency. Therefore, in order to prevent this, in some of the exposure devices, not only the photomask, but also these optical components must be equipped with a dustproof film module, and when the dirt occurs, the dustproof film can be replaced.
這樣的防塵薄膜組件，一般說來，是將由良好透光的硝酸纖維素，醋酸纖維素或者氟樹脂等組成的透明的防塵薄膜貼附在有鋁、不銹鋼、工程塑料等製成的防塵薄膜組件框架的一個端面上而構成。再者，在防塵薄膜組件框架的另一端面上，設置為了安裝在光掩模的有環氧樹脂，聚醋酸乙烯基酯樹脂，丙烯酸樹脂，矽樹脂等組成的黏著層以及為了保護黏著層的離型層（剝離片）。Generally, such a dust-proof film module is a dust-proof film module made of aluminum, stainless steel, engineering plastic, etc., which is a transparent dust-proof film composed of nitrocellulose, cellulose acetate, or fluororesin, which has good light transmission. The frame is formed on one end surface. Furthermore, an adhesive layer made of epoxy resin, polyvinyl acetate resin, acrylic resin, silicone resin, etc. is provided on the other end surface of the dust-proof film module frame for mounting on the photomask, and a protective layer for protecting the adhesive layer is provided. Release layer (release sheet).
在防塵薄膜組件中，有安裝在光掩模上的防塵薄膜組件和安裝在其以外的光學部件的防塵薄膜組件，這兩者之間在構造上沒有大的不同。重要的是，在光學部件上安裝的防塵薄膜組件，與頻繁更換的光掩模用相比，要長期間使用，所以要求有更高的耐光性。再者，在光掩模用的防塵薄膜組件中，一般用黏著劑安裝，光學部件用的防塵薄膜組件中為設置沒有黏著性的襯墊層，用螺釘等機械固定裝置安裝。Among the dust-proof film modules, there are a dust-proof film module mounted on a photomask and a dust-proof film module mounted on an optical component other than the dust-proof film module, and there is no major difference in structure between the two. It is important that a dust-proof thin film module mounted on an optical component is used for a longer period of time than a photomask for frequent replacement, and therefore requires higher light resistance. In addition, a dust-proof film module for a photomask is generally mounted with an adhesive, and a dust-proof film module for an optical component is provided with a non-adhesive gasket layer, and is mounted with a mechanical fixing device such as a screw.
例如，在專利文獻１中記載了如下內容：在防塵薄膜組件框架的光掩模側的端面上設置具有襯墊的功能的彈性體層，對其用螺釘等的締結裝置加壓而能保持高的密封性的防塵薄膜組件。該防塵薄膜組件不需要光掩模黏著層，而且給光掩模造成的變形極小。進而，在這樣的防塵薄膜組件中，由於從被保護面（光掩模的圖案面等）到防塵薄膜面的距離（以下稱離焦距離間隙距離）越大異物的離焦性越高，所以離焦距離間隙距離大的優選。 [先行技術文獻] [專利文獻]For example, Patent Document 1 describes that an elastomer layer having a function of a gasket is provided on an end face on the photomask side of a dust-proof film module frame, and an attachment device such as a screw can be pressed to maintain a high Hermetically sealed dust-tight membrane module. The dust-proof thin-film module does not require a photomask adhesive layer, and has minimal deformation to the photomask. Furthermore, in such a dust-proof film module, the greater the distance from the surface to be protected (the pattern surface of the photomask, etc.) to the dust-proof film surface (hereinafter referred to as the defocus distance gap distance), the higher the defocusing property of the foreign object. It is preferable that the defocus distance is large. [Antecedent Literature] [Patent Literature]
[專利文獻１]特開2014-211591[Patent Document 1] JP 2014-211591
但是，近年，為了減少在防塵薄膜組件貼附時的光掩模的變形，使用可以使防塵薄膜組件框架的高度方向的剛性變低的離焦距離間隙距離的低的防塵薄膜組件。再者，由於裝置的空間的問題，與以往相比具有低的離焦距離間隙距離的防塵薄膜組件的使用也變得多了起來，特別是，在光學部件用的防塵薄膜組件之中，有離焦距離間隙距離為1mm以下之物。However, in recent years, in order to reduce deformation of a photomask when attaching a dustproof film module, a dustproof film module having a low defocus distance can be used which can reduce rigidity of the height of the dustproof film module frame in the height direction. In addition, due to the space problem of the device, the use of dust-proof film modules having a lower defocus distance gap distance than in the past has been increased. In particular, among the dust-proof film modules for optical components, there are Defocus distance is less than 1mm.
這樣的離焦距離間隙距離低的防塵薄膜組件的情況下，由於防塵薄膜組件框架的高度方向的剛性極低，處理時框架的撓曲以及扭曲變大，所以具有處理困難的問題。特別是，從防塵薄膜組件收納容器取出時，除了防塵薄膜組件的處理困難之外，在防塵薄膜組件的安裝時問題也大，在處理時由於防塵薄膜組件框架設計上的形狀不能被保持，防塵薄膜發生褶皺以及扭曲，如原封不動地將其進行安裝，就會發生問題。In the case of such a dust-proof film module having a low defocus distance, the rigidity of the dust-proof film module frame in the height direction is extremely low, and deflection and distortion of the frame during processing become large, which poses a problem of difficulty in handling. In particular, when taking out the dust-proof membrane module storage container, in addition to the difficulty in handling the dust-proof membrane module, the installation of the dust-proof membrane module also has a large problem. The shape of the frame design of the dust-proof membrane module cannot be maintained during handling, and it is dust-proof. The film is wrinkled and twisted, and problems can occur if it is installed intact.
因此，本發明就是為瞭解決上述的問題而成的，本發明的目的是提供一種即使離焦距離間隙距離小，防塵薄膜組件框架的剛性低的防塵薄膜組件，也可容易地對其進行處理，從防塵薄膜組件收納容器中安全取出，可以沒有缺陷地安裝於光掩模等的防塵薄膜組件以及其安裝方法。Therefore, the present invention is made to solve the above-mentioned problems, and an object of the present invention is to provide a dust-proof film module with a low rigidity of a dust-proof film module frame, which can be easily processed even if the defocus distance is small. It can be safely taken out from the dust-proof film module storage container, and can be installed on a dust-proof film module such as a photomask without defects and an installation method thereof.
本發明的防塵薄膜組件特徵還在於，在防塵薄膜組件框架的防塵薄膜接著層側設置可裝可卸的防塵薄膜組件支持裝置的同時，離焦距離間隙距離／外尺寸對角長的值為0.0001~0.003。The dustproof film module of the present invention is further characterized in that a removable dustproof film module support device is provided on the side of the dustproof film module frame of the dustproof film module and a removable dustproof film module supporting device is installed. ~ 0.003.
再者，本發明的防塵薄膜組件特徵還在於，該防塵薄膜組件支持裝置由平板狀或者框狀的支持體構成，通過在該支持體設置的微黏著性物質，而在防塵薄膜組件框架的防塵薄膜接著層側被可裝可卸設置。進而，該微黏著性物質優選在支持體的多處被分割而配置，所述微黏著性物質的黏著力，在垂直方向以0.5mm/s的速度剝離的情況下，為0.01~0.5N的範圍。Furthermore, the dust-proof film module of the present invention is further characterized in that the dust-proof film module supporting device is composed of a flat or frame-shaped support, and the dust-proof film module frame is protected against dust by a micro-adhesive substance provided on the support. The film is detachably provided on the layer side. Furthermore, the micro-adhesive substance is preferably divided and arranged at a plurality of places on the support. When the micro-adhesive substance is peeled off at a speed of 0.5 mm / s in the vertical direction, it is 0.01 to 0.5 N. range.
進而，發明的防塵薄膜組件優選，所述微黏著性物質為從矽樹脂或者聚氨酯選擇的凝膠狀物質，在防塵薄膜組件支持裝置中，優選設置有為了處理時使用的把持部。 Furthermore, in the dust-proof film module of the invention, it is preferable that the micro-adhesive substance is a gel-like material selected from silicone resin or polyurethane, and it is preferable that the dust-proof film module support device is provided with a holding portion for handling.
本發明的安裝方法特徵還在於，在防塵薄膜組件被貼附於被安裝面之後，防塵薄膜組件框架上設置的防塵薄膜組件支持裝置被卸下。 The installation method of the present invention is further characterized in that after the dustproof film module is attached to the surface to be mounted, the dustproof film module supporting device provided on the dustproof film module frame is removed.
根據本發明，提供一種即使是離焦距離間隙距離小，防塵薄膜組件框架的剛性低的防塵薄膜組件，其處理也容易，可以沒有防塵薄膜組件框架的変形以及防塵薄膜的褶皺等的缺陷地安裝於光掩模等的防塵薄膜組件以及其安裝方法。 According to the present invention, it is possible to provide a dust-proof film module with a low rigidity of the dust-proof film module frame, which is easy to handle even if the distance from the focal distance is small. The dust-proof film module frame can be installed without defects such as the shape of the dust-proof film module frame and wrinkles of the dust-proof film Film module for photomasks and the like, and mounting method thereof.
以下，對本發明的一實施方式基於附圖進行詳細說明，但是本發明並不限於此。Hereinafter, one embodiment of the present invention will be described in detail based on the drawings, but the present invention is not limited thereto.
本發明的防塵薄膜組件中，如圖4表示的那樣，在防塵薄膜組件10的防塵薄膜接著層12側配置防塵薄膜組件支持裝置20，兩者是通過締結裝置17締結的。圖5為，矩形的防塵薄膜組件10和防塵薄膜組件支持裝置20分離的狀態。In the dust-proof film module of the present invention, as shown in FIG. 4, a dust-proof film module supporting device 20 is disposed on the dust-proof film adhesive layer 12 side of the dust-proof film module 10, and the two are connected by the connecting device 17. FIG. 5 shows a state where the rectangular dust-proof film module 10 and the dust-proof film module supporting device 20 are separated.
本發明的防塵薄膜組件10的離焦距離間隙距離（包括光掩模黏著層的高度）和外尺寸對角長的比（離焦距離間隙距離／外尺寸對角長）為0.0001~0.003，在框的一個端面上，設置防塵薄膜接著層12，防塵薄膜14在其上繃緊設置。再者，在其相對的面，光掩模黏著層13被設置，其表面根據需要設置保護光掩模黏著層13的剝離片15。 在此，所謂外尺寸對角長，如圖10表示的那樣，為矩形的防塵薄膜組件的長邊外圈和短邊外圈延長線交差點間的長度。一般地，矩形的防塵薄膜組件框架中，角部的外側有若干R切角，此處的外尺寸對角長將該R部忽略。The ratio of the defocus distance gap distance (including the height of the photomask adhesive layer) and the diagonal length of the outer diameter of the dust-proof film module 10 of the present invention (the off-focus distance gap distance / outer dimension diagonal length) is 0.0001 to 0.003. On one end surface of the frame, a dust-proof film adhesive layer 12 is provided, and the dust-proof film 14 is stretched thereon. In addition, a photomask adhesive layer 13 is provided on an opposite surface thereof, and a peeling sheet 15 for protecting the photomask adhesive layer 13 is provided on a surface thereof as needed. Here, the outer dimension is diagonally long, as shown in FIG. 10, and is a length between the intersection of the long side outer ring and the short side outer ring extension line of the rectangular dust-proof film module. Generally, in a rectangular dust-proof film module frame, there are several R-cut corners on the outer side of the corner portion, and the outer dimension here is diagonally long to ignore the R portion.
在離焦距離間隙距離／外尺寸對角長的值為0.0001未滿的防塵薄膜組件，由於作為防塵薄膜組件10，其形狀維持困難，所以其採用困難。再者，超過0.003，由於具有一定的剛性，處理時的問題少，所以適用本發明的好處不多。 因此，本發明被施用的「剛性低的防塵薄膜組件」，雖然與受材質有關，但是材質為鋁合金的情況下，離焦距離間隙距離／外尺寸對角長低於0.003的尺寸的防塵薄膜組件為優選。A dustproof film module having a value of the diagonal distance / outer dimension diagonal value of less than 0.0001 is out of focus. Since it is difficult to maintain the shape of the dustproof film module 10, its adoption is difficult. Furthermore, when it exceeds 0.003, it has a certain degree of rigidity and there are few problems in handling, so the advantages of applying the present invention are not great. Therefore, although the "low-rigid dust-proof film module" to which the present invention is applied is related to the receiving material, when the material is an aluminum alloy, the dust-proof film having a size of the defocus distance gap / outer dimension diagonal length of less than 0.003 Components are preferred.
另一方面，防塵薄膜組件10的離焦距離間隙距離，由使用的曝光裝置側的要求事項來進行決定，例如，長邊為150mm左右的邊長的短的半導體用防塵薄膜組件中，於離焦距離間隙距離為0.5mm以下的情況下，處理時問題易於發生。再者，長邊為900~1700mm的液晶中使用的大型的防塵薄膜組件中，即使於離焦距離間隙距離為7mm的情況下，處理時也難說具有充分的剛性，低於6mm，處理困難的問題發生。稍微小型的長邊為400~800mm程度的液晶用的防塵薄膜組件，如果離焦距離間隙距離為2.5mm以下，處理時問題易於發生。因此，本發明施用的「離焦距離間隙距離小的防塵薄膜組件」為，雖然根據防塵薄膜組件10的邊長不同而不同，但是優選離焦距離間隙距離的具體的的數值為0.2~6mm程度的防塵薄膜組件。On the other hand, the defocus distance of the dust-proof film module 10 is determined by the requirements on the side of the exposure device to be used. For example, in a short semiconductor dust-proof film module with a long side of about 150 mm, When the focal distance is 0.5 mm or less, problems tend to occur during processing. In addition, in the large-scale dust-proof film module used in liquid crystals with long sides of 900 to 1700 mm, even when the defocus distance is 7 mm, it is difficult to say that they have sufficient rigidity during processing. Below 6 mm, it is difficult to handle. The problem occurred. If the dust-proof film module for liquid crystals with a slightly smaller long side of about 400 to 800 mm is used, if the defocus distance is 2.5 mm or less, problems during processing are likely to occur. Therefore, the "dust-proof film module with a small defocus distance gap" applied by the present invention is different depending on the side length of the dust-proof film module 10, but the specific value of the defocus distance gap distance is preferably about 0.2 to 6 mm. Dust-proof membrane module.
防塵薄膜組件框架11的形狀，在圖1～圖4的實施方式中為矩形，但是，角部有斜邊的八角形以及圓形等他的形狀也可，沒有特別的限定。在圓形的防塵薄膜組件10的情況下，上述的外尺寸對角長相當於外尺寸直徑。The shape of the dust-proof film module frame 11 is rectangular in the embodiments of FIGS. 1 to 4. However, other shapes such as an octagon with a beveled corner and a circle may be used, and are not particularly limited. In the case of the circular dust-proof membrane module 10, the diagonal length of the above-mentioned outer dimension corresponds to the outer dimension diameter.
防塵薄膜組件框架11的材質為，鋁合金，鎂合金等的輕合金，不銹鋼，碳素鋼等鐵系合金，還具有GFRP，CFRP等的纖維強化塑料。特別是，以使用不銹鋼等的剛性高，耐食性也好金屬為優選，優選用雷射切斷，切削加工等的加工方法製作為好。纖維強化塑料的情況，在膜張力方向的剛性確保的點來看，為優選，但是，本發明的那樣的離焦距離間隙距離小的防塵薄膜組件中，由於剛性具有各向異性，易於產生扭曲，其處理有些困難。The material of the dust-proof film module frame 11 is light alloys such as aluminum alloys, magnesium alloys, iron-based alloys such as stainless steel, carbon steel, and fiber-reinforced plastics such as GFRP and CFRP. In particular, it is preferable to use a metal that has high rigidity and good food resistance, such as stainless steel, and is preferably produced by a processing method such as laser cutting and cutting. In the case of fiber-reinforced plastic, it is preferable from the viewpoint of ensuring rigidity in the direction of film tension. However, in the dust-proof thin-film module having a small defocus distance gap as in the present invention, the rigidity is anisotropic, and distortion easily occurs. , Its handling is somewhat difficult.
防塵薄膜組件框架11任何一個材質，優選在其表面實施防銹，發塵防止以及耐光性的材料進行塗裝，電鍍，陽極氧化處理等的表面處理。再者，使用時，為了對曝光光的反射進行防止，使附著異物的觀察容易，黒色為特別優選。Any material of the dust-proof film module frame 11 is preferably subjected to surface treatment such as rust prevention, dust prevention, and light fastness, such as coating, plating, and anodizing. In addition, in order to prevent reflection of the exposure light during use, and to facilitate observation of a foreign substance attached, black is particularly preferred.
防塵薄膜接著層12為，使用矽樹脂，氟系樹脂，丙烯酸系樹脂等的公知的接著劑，用空氣加壓式分佈器等的塗布裝置在防塵薄膜組件框架11上平滑塗布而形成。The dust-proof film adhesive layer 12 is formed by smoothly coating the dust-proof film module frame 11 with a coating device such as an air-pressure spreader using a known adhesive such as silicone resin, fluorine-based resin, or acrylic resin.
防塵薄膜14，依據使用的曝光機的光源波長，選擇氟系樹脂，纖維素系樹脂等組成的膜材料，用旋塗法，模塗布法等，在平滑基板上成膜，乾燥後從基板上剝離而得到。再者，根據需要設置反射防止層也可。於曝光機內的光學部件用的防塵薄膜組件的情況，為了使更換頻度變低，使用耐光性優良的氟系樹脂為特別優選。According to the light source wavelength of the exposure machine used, the dust-proof film 14 is formed of a film material composed of fluorine resin, cellulose resin, etc., and is formed on a smooth substrate by a spin coating method, a die coating method, etc., and dried from the substrate. Obtained. Furthermore, an anti-reflection layer may be provided as necessary. In the case of a dust-proof film module for an optical component in an exposure machine, in order to reduce the frequency of replacement, it is particularly preferable to use a fluorine-based resin having excellent light resistance.
防塵薄膜14的膜厚，對透過率，膜強度進行考慮，綜合判斷來設定為好，但是厚度以0.2~10μm的範圍為好。進而，防塵薄膜14，為了不產生褶皺以及鬆弛，另外為了不使防塵薄膜組件框架11過度的撓曲，加以適當的張力，與防塵薄膜組件框架11上的防塵薄膜接著層12接著為優選。The film thickness of the dust-proof film 14 is determined by considering transmittance and film strength, and it is preferably set by comprehensive judgment, but the thickness is preferably in the range of 0.2 to 10 μm. Further, the dust-proof film 14 is preferably bonded to the dust-proof film adhesive layer 12 on the dust-proof film module frame 11 in order to prevent wrinkles and slacks and to prevent the dust-proof film module frame 11 from being flexed excessively.
光掩模黏著層13可以使用橡膠系黏著劑、矽系黏著劑、丙烯酸系黏著劑、熱溶性黏著劑等的公知的材料。再者，根據需要，其表面進行平坦化處理為好。進而，其表面根據需要安裝保護光掩模黏著層13剝離片15，但是，該剝離片15為，在厚度0.05~0.3程度的PET等組成的薄膜的一個面上進行離型劑塗布，使其與光掩模黏著層13的外形相合而切斷，使用。The photomask adhesive layer 13 may be a known material such as a rubber-based adhesive, a silicon-based adhesive, an acrylic-based adhesive, or a hot-melt adhesive. Furthermore, if necessary, the surface may be flattened. Further, a peeling sheet 15 for protecting the photomask adhesive layer 13 is mounted on the surface as required. However, the peeling sheet 15 is coated with a release agent on one surface of a film made of PET or the like having a thickness of about 0.05 to 0.3 to make it It is cut | disconnected and used according to the external shape of the photomask adhesive layer 13, and is used.
於光掩模用的防塵薄膜組件10的情況，一般說來，用光掩模黏著層13，將防塵薄膜組件10黏著在光掩模91而安裝，但是，近年，代替光掩模黏著層13，設置實質上沒有黏著性的彈性體組成的襯墊層，用夾子以及螺栓等的機械的裝置來進行安裝的方法也出現了，本發明使用這種方法也可。In the case of the dust-proof thin film module 10 for a photo mask, generally, the photo-mask adhesive layer 13 is used to attach the dust-proof thin-film module 10 to the photo mask 91, but in recent years, it has replaced the photo-mask adhesive layer 13 There is also a method of providing a cushion layer composed of an elastomer having substantially no adhesiveness, and mounting it with mechanical devices such as clips and bolts. The present invention may also use this method.
再者，於曝光機內的光學部件用的防塵薄膜組件10的情況，可以在裝置側設置夾持機構、螺釘、扣環、夾子、靜電力、磁力等各種各樣的種類的固定裝置。因此，不一定非使用具有黏著力的光掩模黏著層13不可。在裝置側設置襯墊層的情況，可以在防塵薄膜組件框架11的表面不設置任何與光掩模黏著層以及襯墊層類似之物。本發明在這樣的情況下也可採用。Furthermore, in the case of the dust-proof film module 10 for optical components in an exposure machine, various types of fixing devices such as a clamping mechanism, a screw, a buckle, a clip, an electrostatic force, and a magnetic force may be provided on the device side. Therefore, it is not necessary to use the photomask adhesive layer 13 having an adhesive force. When a cushion layer is provided on the device side, the surface of the dust-proof film module frame 11 may not be provided with anything similar to a photomask adhesive layer and a cushion layer. The present invention can also be adopted in such a case.
以上那樣的部件構成的防塵薄膜組件10可以和在防塵薄膜接著層12側配置的平板狀或者框狀防塵薄膜組件支持裝置20通過締結裝置17締結成一體為好。進而，該防塵薄膜組件10，在安裝之前，與防塵薄膜組件支持裝置20一體運用・搬運，在防塵薄膜組件10向被保護面安裝之後，將締結裝置17的締結解除，防塵薄膜組件支持裝置20卸下。It is preferable that the dustproof film module 10 constituted by the above-mentioned components can be integrated with the flat-shaped or frame-shaped dustproof film module supporting device 20 disposed on the dustproof film adhesive layer 12 side by the connecting device 17. Furthermore, before installation, the dustproof film module 10 is integrated with the dustproof film module support device 20 and transported. After the dustproof film module 10 is installed on the protected surface, the connection of the connecting device 17 is released, and the dustproof film module support device 20 Remove.
這樣的防塵薄膜組件支持裝置20為，如圖5表示的那樣，框狀形的支持體16和防塵薄膜組件10締結的締結裝置17，由處理時使用的把持部18構成。支持體16為，雖然在該實施方式中為框狀，但是只要注意其不與防塵薄膜14接觸，平板狀也可，進行了補強了的框形狀也可。再者，防塵薄膜組件支持裝置的外形為與塵薄膜組件10的外形大略一致為佳，例如，圖6表示了圓形的防塵薄膜組件10中用的防塵薄膜組件支持裝置60，圓形的支持體61上，設置了締結裝置62和把持部63。Such a dust-proof film module supporting device 20 is, as shown in FIG. 5, a frame-shaped support body 16 and a dust-proof film module 10 connecting device 17, which is composed of a holding portion 18 used during processing. The support 16 has a frame shape in this embodiment, but as long as it is not in contact with the dust-proof film 14, it may be a flat shape, or a reinforced frame shape may be used. Furthermore, it is preferable that the outer shape of the dustproof film module support device is substantially the same as the shape of the dusty film module 10. For example, FIG. 6 shows the dustproof film module support device 60 used in the circular dustproof film module 10. The circular support The body 61 is provided with an association device 62 and a grip portion 63.
作為支持體16的材質，以鋁合金等的輕量，高剛性的金屬為優選，使用管材等的中空構造也優選。但是，在使用管材的情況下，為了防止發塵，有必要進行開口部堵塞處理。 在此，支持體16的防塵薄膜組件締結側的平面度為，雖然與其大小有關，但是為了防止締結的防塵薄膜組件發生扭曲等而造成安裝不良，優選至少為0.5mm，最佳為0.2mm以下。The material of the support 16 is preferably a lightweight, highly rigid metal such as an aluminum alloy, and a hollow structure using a tube or the like is also preferred. However, in the case of using a pipe, in order to prevent dust generation, it is necessary to perform an opening blocking process. Here, although the flatness of the dust-proof film module on the support side of the support 16 is related to its size, it is preferably at least 0.5 mm, and more preferably 0.2 mm or less, in order to prevent the installed dust-proof film module from being distorted due to distortion or the like. .
把持部18，是用於防塵薄膜組件的處理，所以優選用具有適當的強度的金屬以及工程塑料製作，由此可以直接用手，或者夾具等對其進行把持處理。The holding portion 18 is used for processing the dust-proof thin film module. Therefore, it is preferably made of metal and engineering plastic with appropriate strength, so that it can be directly held by hand or a jig or the like.
將防塵薄膜組件10和防塵薄膜組件支持裝置20締結的締結裝置17，由微黏著性物質構成，如圖5以及圖6表示的那樣，在防塵薄膜組件支持裝置20上多處分割配置。關於配置以及個數，只要在防塵薄膜組件10的框架的是否變形以及膜的褶皺等是否發生，以及安定固定與否來決定，但是在矩形的防塵薄膜組件10的情況，至少包括四個角部是必要的。The bonding device 17 that connects the dustproof film module 10 and the dustproof film module supporting device 20 is made of a microadhesive substance. As shown in FIGS. 5 and 6, the dustproof film module supporting device 20 is divided into a plurality of places. As for the arrangement and the number, it is determined as to whether the frame of the dustproof film module 10 is deformed, whether the film is wrinkled, and whether it is stably fixed. However, in the case of the rectangular dustproof film module 10, it includes at least four corners. necessary.
再者，在多處配置的締結裝置17的黏著力為，在垂直方向以0.5mm/s的速度剝離的情況下以0.01~0.5N的範圍為優選。0.01N未滿，固定力過小不能安定的保持，超過0.5N黏著力太強，從防塵薄膜組件10上將防塵薄膜組件支持裝置20卸下會變得困難。The adhesive force of the bonding devices 17 arranged at a plurality of locations is preferably in the range of 0.01 to 0.5 N when peeling at a speed of 0.5 mm / s in the vertical direction. 0.01N is not full, and the fixing force is too small to be held stably, and the adhesive force exceeding 0.5N is too strong, and it becomes difficult to remove the dustproof film module support device 20 from the dustproof film module 10.
作為締結裝置17的這樣的微黏著性物質，可以從矽樹脂或者聚氨酯選擇的凝膠狀物質為好，可以從板狀成形物切出加工，或向所希望的形狀模型注射成形。使用的凝膠狀物質，以對表面的黏著力加以考慮選擇為好，並且硬度也有加以考慮的必要。最合適的硬度，雖然與使用的厚度有關，但是作為選擇的素材本身的目標，以ASKER-C硬度計50以下好。超過50，防塵薄膜組件10安裝後，防塵薄膜組件支持裝置20會變得難以傾斜，締結裝置17的剝離困難。但是，如果在過於柔軟的情況下，形狀不安定，操作困難，針入度以超過90為好。As such a microadhesive substance of the bonding device 17, a gel-like substance selected from a silicone resin or polyurethane is preferable, and it can be cut out from a plate-shaped molded product, or injection-molded into a desired shape model. The gel-like substance used should be selected in consideration of the surface adhesion, and the hardness must also be considered. The most suitable hardness is related to the thickness used, but as the target of the selected material itself, the ASKER-C hardness tester is better than 50. When it exceeds 50, the dustproof film module support device 20 becomes difficult to incline after the dustproof film module 10 is installed, and peeling of the bonding device 17 is difficult. However, if it is too soft, the shape is unstable and the operation is difficult, and the penetration is preferably over 90.
該締結裝置17，可以在支持體16的一個面上安裝，僅由微黏著性物質構成也可，選擇的硬度，會由於尺寸變得過於柔軟，有形狀不能保持一定的危險。因此，締結裝置17的構成用樹脂以及金屬等的間隔物而僅在其上部用微黏著性物質構成為特別優選。於該情況，微黏著性物質的厚度為，以在先端為1~5mm為優選。The connecting device 17 may be mounted on one surface of the support 16 and may be composed of only a microadhesive substance. The hardness may be selected to be too soft due to the size, and the shape may not be maintained to a certain degree. Therefore, it is particularly preferable that the constituent resin and the spacer such as a metal, and the spacer of the bonding device 17 be formed of a slightly adhesive substance only on the upper portion. In this case, the thickness of the microadhesive substance is preferably 1 to 5 mm at the tip.
再者，締結裝置17，在圖1~6的實施方式中為圓柱狀，圓形截面，但是橢圓以及矩形等其他的截面形狀也可以。締結裝置17和防塵薄膜組件10的接觸形狀，可以為平面，但是，如為稍微有一點凸的曲面形狀，支持裝置20的卸下容易，優選。締結裝置17的大小以及形狀，和防塵薄膜組件的接觸面積，可以考慮締結防塵薄膜組件10的黏著力來決定，但是，從防止與防塵薄膜14的接觸的觀點來看，其接觸寬，以為薄膜接著層寬的70%以下為好。In the embodiment shown in FIGS. 1 to 6, the connecting device 17 has a cylindrical shape and a circular cross-section, but other cross-sectional shapes such as an ellipse and a rectangle may be used. The contact shape of the bonding device 17 and the dust-proof film module 10 may be a flat surface. However, if the curved shape is slightly convex, the support device 20 can be easily removed, which is preferable. The size and shape of the bonding device 17 and the contact area with the dust-proof film module can be determined in consideration of the adhesion of the dust-proof film module 10. However, from the viewpoint of preventing contact with the dust-proof film 14, the contact width is considered to be a thin film. It is preferable that the layer width be 70% or less.
進而，締結裝置17，在防塵薄膜組件框架11為碳鋼以及鐵系不銹鋼等的磁性材料的情況，可以考慮用磁石構成。防塵薄膜組件框架11，在除了全體都為磁性材料製作之外，將磁性體埋入，表面接著以及塗布等具有同等的功能的方法也可，在此情況下，締結裝置的磁力，可以選擇對防塵薄膜組件的支持，固定沒有問題的範圍即可。重要的是，對於磁力而言即使如何調整，締結時，要使其慢慢地固定也是很難的，並且相反地，在卸下的瞬間需要大的力，因此很難順利操作，從而有必要不使用永久磁石而使用電磁力，或是有必要追加利用機械的操作來磁力衰減的裝置。Furthermore, when the bonding device 17 is made of a magnetic material such as carbon steel and iron-based stainless steel, the dustproof film module frame 11 may be made of a magnet. The dust-proof membrane module frame 11 may be made of magnetic material, and the magnetic body may be embedded, the surface may be adhered, and the coating may be equivalent. In this case, the magnetic force of the device can be selected. Support the dustproof membrane module, and fix the range without problems. It is important that, even if it is adjusted for magnetic force, it is difficult to fix it slowly at the time of conclusion. On the contrary, it requires a large force at the moment of unloading, so it is difficult to operate smoothly and it is necessary. Instead of using permanent magnets, electromagnetic force is used, or it is necessary to add a device that uses magnetic operation to attenuate the magnetic force.
如本發明的離焦距離間隙距離的小的防塵薄膜組件10，剛性極低，沒有安定性，將防塵薄膜組件支持裝置20根據需要進行頻繁裝卸是困難的。因此，優選在防塵薄膜組件10的製作的階段，要將防塵薄膜組件10和防塵薄膜組件支持裝置20締結，直至在客戶使用防塵薄膜組件10的眼前，要進行一體運用、搬運。因此，從該觀點來看，防塵薄膜組件10和防塵薄膜組件支持裝置20優選通過締結裝置17以締結的狀態在防塵薄膜組件收納容器70中收納，保管以及搬運。For example, the dustproof film module 10 with a small defocus distance gap of the present invention has extremely low rigidity and no stability, and it is difficult to frequently mount and disassemble the dustproof film module supporting device 20 as needed. Therefore, it is preferable to conclude the dust-proof membrane module 10 and the dust-proof membrane module support device 20 at the stage of manufacturing the dust-proof membrane module 10 until the customer uses the dust-proof membrane module 10 for integrated operation and transportation. Therefore, from this viewpoint, the dust-proof film module 10 and the dust-proof film module supporting device 20 are preferably stored, stored, and transported in the dust-proof film module storage container 70 in the closed state by the connecting device 17.
圖7以及圖8為，收納本發明的防塵薄膜組件10的防塵薄膜組件收納容器70的圖。圖7為，全體的斜視圖，圖8為，圖7中的D-D線的截面圖。防塵薄膜組件收納容器70由防塵薄膜組件收納容器本體71和蓋體72構成，在防塵薄膜組件收納容器本體71中，將與防塵薄膜組件支持裝置20締結的防塵薄膜組件10載置，在周緣部嵌合密閉。優選該周緣部用黏著帶（未圖示）等密閉，或用夾子以及扣環（未圖示）等來固定，以不使蓋體７２從防塵薄膜組件收納容器本體７１滑落。7 and 8 are views of a dust-proof film module storage container 70 that accommodates the dust-proof film module 10 of the present invention. Fig. 7 is a perspective view of the whole, and Fig. 8 is a cross-sectional view taken along a line D-D in Fig. 7. The dust-proof membrane module storage container 70 is composed of a dust-proof membrane module storage container body 71 and a cover 72. In the dust-proof membrane module storage container body 71, the dust-proof membrane module 10 connected to the dust-proof membrane module support device 20 is placed, and the peripheral portion Mosaic sealed. Preferably, the peripheral edge portion is sealed with an adhesive tape (not shown) or the like, or fixed with a clip or a buckle (not shown) or the like so that the lid body 72 does not slide off the dust-proof film module storage container body 71.
防塵薄膜組件收納容器本體71以及蓋體72的材質為，使用厚度2~8mm的PMMA、PAN、ABS、PC、PVC等的樹脂，用注塑成型或者真空成形等的加工方法進行製作為好。防塵薄膜組件的邊長為超過1500mm那樣的特別大型的防塵薄膜組件，為了確保剛性，收納防塵薄膜組件收納容器本體71可以用鋁合金，鎂合金，不銹鋼等的金屬。再者，作為其他的提高剛性的裝置，可以將板狀或者棒狀的補強裝置安裝在外面。The material of the dustproof film module storage container body 71 and the lid body 72 is preferably made of a resin such as PMMA, PAN, ABS, PC, and PVC having a thickness of 2 to 8 mm, and is manufactured by processing methods such as injection molding or vacuum molding. The dustproof film module has a particularly large dustproof film module with a side length of more than 1500 mm. In order to ensure rigidity, the dustproof film module storage container body 71 can be made of metal such as aluminum alloy, magnesium alloy, and stainless steel. Furthermore, as another rigidity-improving device, a plate-shaped or rod-shaped reinforcing device may be mounted outside.
再者，防塵薄膜組件收納容器70，從易於觀察附著異物的觀點，黒色為優選，蓋體72，為了對其內部進行確認，優選透明。進而，可以通過材料的選擇或者表面的塗布，來確保導電性以及難燃性為優選。In addition, the dustproof film module storage container 70 is preferably black from the viewpoint of easy observation of adhered foreign matter, and the cover 72 is preferably transparent in order to confirm the inside thereof. Furthermore, it is preferable to ensure conductivity and flame retardancy by selection of a material or coating on a surface.
防塵薄膜組件支持裝置20的把持部18，可以搭載在防塵薄膜組件收納容器本體71上設置的固定部73上。再者，優選在該固定部73上設置和把持部18嵌合的溝以及凹陷等，使防塵薄膜組件支持裝置20不進行水平方向移動，進而把持部18的上端在蓋體72的內側被規制。支持防塵薄膜組件10以及防塵薄膜組件支持裝置20的高度，為了不對防塵薄膜組件10施加過大的負荷，下面以與防塵薄膜組件收納容器本體71的表面相接觸程度為優選。The holding portion 18 of the dust-proof film module supporting device 20 can be mounted on a fixing portion 73 provided on the dust-proof film module storage container body 71. Furthermore, it is preferable that grooves and depressions fitted into the holding portion 18 are provided on the fixing portion 73 so that the dustproof film module supporting device 20 does not move horizontally, and the upper end of the holding portion 18 is regulated inside the cover 72. . In order to support the height of the dustproof film module 10 and the dustproof film module supporting device 20, in order not to apply an excessive load to the dustproof film module 10, the degree of contact with the surface of the dustproof film module storage container body 71 is preferred below.
再者，固定部７３，為了防止劃擦發塵，以用PA、POM、PE、PEEK等的工程樹脂以及聚氨酯系，矽系，氟系，烯烴系等的彈性體構成，另外，如使其具有帶電防止性，也良好。進而，該固定部73為，可以用切削加工以及射出成型，注塑成形等的公知的方法製作，用螺栓等（未圖示）將其固定在防塵薄膜組件收納容器本體71上。In addition, the fixing portion 73 is made of engineering resins such as PA, POM, PE, and PEEK, and polyurethane-based, silicon-based, fluorine-based, and olefin-based elastomers in order to prevent scratches and dust. It has good antistatic properties and is also good. Further, the fixing portion 73 can be manufactured by a known method such as cutting, injection molding, injection molding, and the like, and is fixed to the dust-proof film module storage container body 71 with bolts or the like (not shown).
防塵薄膜組件10，如此，通過防塵薄膜組件支持裝置20，間接地在防塵薄膜組件收納容器70內被固定，防塵薄膜組件收納容器70的運輸中不發生移動，変形等的破損以及異物的附著就被防止。In this way, the dust-proof film module 10 is fixed indirectly in the dust-proof film module storage container 70 by the dust-proof film module support device 20, and the dust-proof film module storage container 70 does not move during transportation. Be prevented.
然後，圖9(a)、圖9(b)、圖9(c)、圖9(d)為，將本發明的防塵薄膜組件10安裝在被安裝面的光掩模91的方法（順序）的截面示意圖。Next, FIGS. 9 (a), 9 (b), 9 (c), and 9 (d) show a method (sequence) of mounting the dust-proof film module 10 of the present invention on a photomask 91 on a mounting surface. Schematic cross-section.
首先，將防塵薄膜組件收納容器70的蓋體72打開之後，把持把持部18，使防塵薄膜組件支持裝置20和締結裝置17通過締結的防塵薄膜組件10取出（未圖示）的同時，經過檢査等的所定的工程之後，將防塵薄膜組件10的剝離片15剝離，準備。進而，圖9(a)中，將準備的防塵薄膜組件10和防塵薄膜組件支持裝置20搬送，對光掩模91進行位置調整，與所定的安裝位置相合。First, after opening the cover 72 of the dustproof film module storage container 70, the holding portion 18 is held, and the dustproof film module support device 20 and the connecting device 17 are taken out (not shown) through the closed dustproof film module 10 and inspected. After the predetermined process, the peeling sheet 15 of the dust-proof film module 10 is peeled off and prepared. Further, in FIG. 9 (a), the prepared dust-proof film module 10 and the dust-proof film module supporting device 20 are transported, and the position of the photomask 91 is adjusted to match the predetermined mounting position.
然後，圖9(b)中，原封不動地使防塵薄膜組件10和光掩模91接近，使光掩模黏著層13接觸。該操作，可以用簡單的夾具手工進行，但是優選使用把持防塵薄膜組件支持裝置20使其移動的搬送裝置（未圖示）。另外，該階段中，光掩模黏著層13為輕輕接觸的狀態，雖然接著，但是沒有得到完全的接著力。Then, in FIG. 9 (b), the dust-proof film module 10 and the photomask 91 are brought close to each other, and the photomask adhesive layer 13 is brought into contact. Although this operation can be performed manually with a simple jig, it is preferable to use a transfer device (not shown) that holds and moves the dust-proof film module support device 20. In addition, at this stage, the photomask adhesive layer 13 is in a lightly contacted state, and although it is continued, a complete adhesive force is not obtained.
再者，圖9(c)中，進行將防塵薄膜組件支持裝置20從防塵薄膜組件10卸下（剝離）操作。隨著將防塵薄膜組件支持裝置20從防塵薄膜組件10斜向剝離的操作，從在支持體16上多個配置的微黏著性的締結裝置17的表面，依次將防塵薄膜組件10的剝離，在所有的地方的剝離終了後，防塵薄膜組件支持裝置20被從防塵薄膜組件10卸下。In addition, in FIG.9 (c), the dust-proof film module support apparatus 20 is detached (peeled) from the dust-proof film module 10. With the operation of obliquely peeling the dustproof film module supporting device 20 from the dustproof film module 10, the dustproof film module 10 is peeled off from the surface of the plurality of micro-adhesive bonding devices 17 arranged on the support 16 in order. After the peeling at all places is completed, the dust-proof film module supporting device 20 is removed from the dust-proof film module 10.
進而，最後，圖9(d)中，在快速將防塵薄膜組件支持裝置20卸下的同時，用另外設置的加壓裝置（未圖示），對卸下防塵薄膜組件支持裝置20的防塵薄膜組件10施加所定的負荷，通過光掩模黏著層13將防塵薄膜組件10完全安裝在光掩模91上。Finally, in FIG. 9 (d), the dustproof film module support device 20 is quickly detached, and a separate pressure device (not shown) is used to remove the dustproof film of the dustproof film module support device 20. The module 10 applies a predetermined load, and the dust-proof film module 10 is completely mounted on the photomask 91 through the photomask adhesive layer 13.
另外，該操作，採用與夾子等與光掩模黏著層不同的固定裝置的防塵薄膜組件的場合以及，即使防塵薄膜組件的安裝對象不是光掩模而是曝光機的光學部件也可同樣實施。在使所定的防塵薄膜組件固定裝置動作使防塵薄膜組件固定，將防塵薄膜組件支持裝置20斜向剝離卸下的點上沒有任何的不同。再者，圖9(a)~圖9(d)的實施方式中，從操作性和異物附著減低的觀點，將光掩模91傾斜配置，可在在該傾斜狀態下實施各操作，但是，用水平以及垂直等的另外的配置狀態實施也可。 [實施例]In addition, this operation can also be performed in the case of using a dustproof film module of a fixing device different from the photomask adhesive layer, such as a clip, and even if the dustproof film module is mounted on an optical component of an exposure machine instead of a photomask. There is no difference in the point where the predetermined dust-proof film module fixing device is operated to fix the dust-proof film module, and the dust-proof film module supporting device 20 is peeled off and removed obliquely. In addition, in the embodiments of FIGS. 9 (a) to 9 (d), the photomask 91 is tilted from the viewpoint of operability and reduction of foreign matter adhesion, and each operation can be performed in this tilted state. It is possible to carry out in other arrangement states such as horizontal and vertical. [Example]
以下，對本發明的實施例進行詳細說明。該實施例中，首先，製作如圖1～圖5那樣的防塵薄膜組件10以及防塵薄膜組件支持裝置20，對其製作順序進行說明，所有的操作為都在10級無塵室內中進行。Hereinafter, examples of the present invention will be described in detail. In this embodiment, first, a dust-proof film module 10 and a dust-proof film module support device 20 as shown in FIGS. 1 to 5 are manufactured, and the manufacturing sequence is described. All operations are performed in a Class 10 clean room.
防塵薄膜組件框架11為，將SUS304不銹鋼用雷射切斷和機械切削加工而成的，外尺寸756 x 913mm，內寸740 x 901mm，角部內側R2mm，角部外側R6mm，高度1.8mm。再者，防塵薄膜組件框架11的各長邊中，直徑0.4mm的通氣孔（未圖示）分別設置8個。進而，稜部為C0.2mm程度的切角（未圖示），全面進行Ra 0.5程度噴砂之後，進行黒色鎳電鍍。The dust-proof membrane module frame 11 is made by laser cutting and mechanical cutting of SUS304 stainless steel, and has an outer dimension of 756 x 913mm, an inner dimension of 740 x 901mm, a corner inner side of R2mm, a corner outer side of R6mm, and a height of 1.8mm. In addition, in each of the long sides of the dust-proof film module frame 11, eight ventilation holes (not shown) having a diameter of 0.4 mm are provided. Further, the edge portion was cut at an angle of C0.2 mm (not shown), and after the entire surface was subjected to sand blasting at an Ra 0.5 degree, ochre nickel plating was performed.
然後，將該防塵薄膜組件框架11用界面活性劑和純水良好洗浄乾燥之後，在框的一個端面上設置光掩模黏著層13，即將矽黏著劑（商品名；KR3700，信越化學工業（株）制）用在3軸直交機器人上搭載的空氣加壓式分佈器塗布。此時的光掩模黏著層的厚度為1.2mm，烘箱中130℃加熱完全硬化。再者，光掩模黏著層13的表面上，貼附剝離片15，該剝離片是在厚度125μm的PET薄膜的一個面上進行離型劑塗布，以與防塵薄膜組件框架11的外形大略一致的形狀切斷製作的。 另外，該防塵薄膜組件框架11，其垂直方向的剛性極低，不能處理，由此這些的操作，是在防塵薄膜組件框架１１被載置在鋁制的平板（未圖示）上的狀態下進行的。Then, after the dust-proof membrane module frame 11 was washed and dried well with a surfactant and pure water, a photomask adhesive layer 13 was provided on one end surface of the frame, that is, a silicon adhesive (trade name; KR3700, Shin-Etsu Chemical Industry Co., Ltd. (Manufactured by)) Coated with an air pressurized spreader mounted on a 3-axis orthogonal robot. At this time, the thickness of the photomask adhesive layer was 1.2 mm, and it was completely hardened by heating at 130 ° C in an oven. Furthermore, a release sheet 15 is attached to the surface of the photomask adhesive layer 13. The release sheet is coated with a release agent on one surface of a PET film having a thickness of 125 μm so as to be substantially consistent with the outer shape of the dust-proof film module frame 11. Made of cut shapes. In addition, the dust-proof membrane module frame 11 has extremely low rigidity in the vertical direction and cannot be handled. Therefore, these operations are performed while the dust-proof membrane module frame 11 is placed on an aluminum flat plate (not shown). ongoing.
光掩模黏著層13形成之後，將所述防塵薄膜組件框架11上下反轉，與上述同樣，光掩模黏著層13的相反的面上設置防塵薄膜接著層12，即將矽黏著劑（商品名；KR3700，信越化學工業（株）制）塗布至厚度50μm，烘箱130℃加熱，使其完全硬化。再者，PTFE多孔質膜組成的過濾器用丙烯酸黏著片接著（未圖示），長邊的通氣孔被覆蓋。After the photomask adhesive layer 13 is formed, the dustproof film module frame 11 is inverted upside down. As above, a dustproof film adhesive layer 12 is provided on the opposite side of the photomask adhesive layer 13, that is, a silicon adhesive (trade name) KR3700, manufactured by Shin-Etsu Chemical Co., Ltd., was applied to a thickness of 50 μm, and heated at 130 ° C. in an oven to completely harden it. In addition, the filter made of a porous PTFE membrane was adhered with an acrylic adhesive sheet (not shown), and the long side vent holes were covered.
防塵薄膜14，其材料為氟系樹脂（商品名；CYTOP，旭硝子（株）制）。進而，首先，在850x1200x厚度10mm的合成石英組成的成膜基板上用型塗法成膜，溶媒乾燥之後，在與基板外形同尺寸的暫用框上接著，從成膜基板剝離，得到厚度4.5μm的剝離膜。其後，該剝離膜在防塵薄膜組件框架11上的防塵薄膜接著層12上接著，成為防塵薄膜14，將防塵薄膜組件框架11外側的剩餘膜用刀切斷除去，防塵薄膜組件10的製作完成。The dust-proof film 14 is made of a fluorine-based resin (trade name; CYTOP, manufactured by Asahi Glass Co., Ltd.). Further, first, a film was formed on a film-forming substrate composed of synthetic quartz of 850x1200x thickness 10mm by a pattern coating method. After the solvent was dried, the film was separated from the film-forming substrate on a temporary frame having the same size as the substrate shape to obtain a thickness of 4.5. μm release film. Thereafter, the release film is adhered to the dust-proof film adhesive layer 12 on the dust-proof film module frame 11 to become a dust-proof film 14. The remaining film on the outside of the dust-proof film module frame 11 is cut and removed with a knife, and the production of the dust-proof film module 10 is completed. .
以以上的製作順序完成的防塵薄膜組件10，其光掩模黏著層13的厚度為1.2mm，與防塵薄膜組件框架11的高度1.8mm加在一起的高度，即離焦距離間隙距離為3.0mm。進而，所述防塵薄膜組件框架11的外尺寸對角長為1185.37mm，離焦距離間隙距離和外尺寸對角長的比（離焦距離間隙距離／外尺寸對角長）為0.0025。The thickness of the photomask adhesive layer 13 of the dustproof film module 10 completed in the above manufacturing sequence is 1.2mm, and the height is 1.8mm together with the height of the dustproof film module frame 11, that is, the defocus distance is 3.0mm. . Furthermore, the diagonal length of the outer dimension of the dust-proof film module frame 11 is 1185.37 mm, and the ratio of the defocus distance gap distance to the outer dimension diagonal length (the defocus distance gap distance / outer dimension diagonal length) is 0.0025.
然後，對防塵薄膜組件支持裝置20的製作順序進行說明，首先，防塵薄膜組件支持裝置20的構成支持體16為，將A6063鋁合金的20x20mm的方形管用焊接製成外尺寸780x940mm的框狀物，其一面用機械切削得到平面度0.2mm。在該面安裝18個締結裝置17，四個角部附近，用帶電防止POM製作的把持部18用螺栓（未圖示）安裝。Next, the manufacturing sequence of the dust-proof film module support device 20 will be described. First, the support 16 of the dust-proof film module support device 20 is formed by welding a square tube of 20x20mm of A6063 aluminum alloy into a frame with an outer size of 780x940mm. One side was mechanically cut to obtain a flatness of 0.2 mm. Eighteen connecting devices 17 are mounted on this surface, and the holding portions 18 made of the POM are fixed by bolts (not shown) near the four corners.
再者，締結裝置17為，作為其材料使用2液混合的矽凝膠（商品名；KE1051，信越化學工業（株）制）注射成形之物，圓筒形的SUS304制的基底（未圖示）上注射成形，硬化。此時的締結裝置17和防塵薄膜組件10的接觸面的直徑，約4mm。然後，將該締結裝置17通過在SUS304制的基底部分設置的內螺紋，用螺栓（未圖示）安裝在支持體16上。In addition, the connection device 17 is a two-component mixed silicone gel (trade name; KE1051, manufactured by Shin-Etsu Chemical Industry Co., Ltd.), and a cylindrical substrate (not shown) made of SUS304. ) On injection molding and hardening. The diameter of the contact surface between the bonding device 17 and the dust-proof film module 10 at this time is about 4 mm. Then, the connecting device 17 is attached to the support body 16 with a screw (not shown) through an internal thread provided in a base portion made of SUS304.
進而，將以以上的順序製作的防塵薄膜組件支持裝置20對載置在平板上防塵薄膜組件10的位置進行調整，向防塵薄膜組件10的防塵薄膜接著層12以及接著的防塵薄膜14押附，用締結裝置17的黏著力將防塵薄膜組件支持裝置20接著於防塵薄膜組件10。此時的締結裝置17的黏著力為，事前用速度0.5mm/s剝離時確認的值的0.15N/處。Furthermore, the dust-proof film module supporting device 20 manufactured in the above order is adjusted to the position of the dust-proof film module 10 placed on the flat plate, and attached to the dust-proof film adhesive layer 12 and the subsequent dust-proof film 14 of the dust-proof film module 10, The dustproof film module support device 20 is adhered to the dustproof film module 10 by the adhesive force of the bonding device 17. The adhesive force of the bonding device 17 at this time was 0.15 N / place of the value confirmed at the time of peeling at a speed of 0.5 mm / s in advance.
最後，將與防塵薄膜組件10一體化的防塵薄膜組件支持裝置20以各種各樣的姿態搬運，對外觀，異物，膜的透過率等進行檢査，得知，防塵薄膜組件框架11的変形以及防塵薄膜14的褶皺等的缺陷沒有發生，再者，從締結裝置17脫落的部分也沒有發現，可以安定地進行防塵薄膜組件10的處理。Finally, the dustproof film module supporting device 20 integrated with the dustproof film module 10 was carried in various postures, and the appearance, foreign matter, and transmittance of the film were inspected. It was found that the dustproof film module frame 11 was shaped and dustproof. Defects such as wrinkles of the film 14 did not occur. Furthermore, no part was peeled off from the bonding device 17, and the dust-proof film module 10 can be processed stably.
然後，為了收納本發明的防塵薄膜組件10，圖7以及圖8所示的那樣，準備防塵薄膜組件收納容器70。其為用厚度5mm的帶電防止ABS樹脂板，真空成形制作之物。該防塵薄膜組件收納容器本體71上，防塵薄膜組件支持裝置20的把持部18嵌合的帶電防止PE制的固定部73用螺栓（未圖示）安裝，將該防塵薄膜組件收納容器70用界面活性劑和純水良好洗浄，完全乾燥。Then, in order to store the dust-proof film module 10 of the present invention, a dust-proof film module storage container 70 is prepared as shown in FIGS. 7 and 8. This is a 5 mm thick anti-charge ABS resin sheet, which is vacuum formed. On the dust-proof membrane module storage container body 71, the electrification prevention PE fixing portion 73 fitted with the holding portion 18 of the dust-proof membrane module support device 20 is attached with a bolt (not shown), and the dust-proof membrane module storage container 70 is used as an interface. The active agent and pure water are washed well and completely dried.
在防塵薄膜組件收納容器70中，將塵薄膜組件10和防塵薄膜組件支持裝置20收納。防塵薄膜組件支持裝置20的把持部18被收納在固定部73的溝中之後，處理時接觸的地方，用純水浸潤的PVA制擦布進行清洗。進而，將蓋體72蓋上，周緣部用PVC制黏著帶密封，最後，在蓋體72的內面收納的把持部18的上面接觸按壓，確認防塵薄膜組件支持裝置20以及防塵薄膜組件10被固定。In the dust-proof film module storage container 70, the dust-film module 10 and the dust-proof film module supporting device 20 are stored. After the holding portion 18 of the dust-proof membrane module supporting device 20 is housed in the groove of the fixing portion 73, the place where it comes into contact during processing is cleaned with a PVA wipe cloth soaked with pure water. Further, the lid body 72 was covered, and the peripheral edge portion was sealed with a PVC adhesive tape. Finally, the upper surface of the grip portion 18 accommodated on the inner surface of the lid body 72 was contacted and pressed to confirm that the dustproof film module support device 20 and the dustproof film module 10 were sealed. fixed.
進而，為了對其梱包形態進行評價，將防塵薄膜組件10、防塵薄膜組件收納容器支持裝置20收納的防塵薄膜組件收納容器70裝在緩衝材料瓦楞紙箱中，進行約1000km的卡車運輸，再一次搬運至無塵室內，對內部進行確認，得知防塵薄膜組件收納容器70內的防塵薄膜組件10與防塵薄膜組件支持裝置20處於結實地締結的狀態，防塵薄膜組件框架10的変形以及防塵薄膜14的褶皺等的缺陷沒有被發現。再者，固定部73和支持裝置18的劃擦產生的發塵也沒有發現。Furthermore, in order to evaluate the shape of the bag, the dust-proof film module 10 and the dust-proof film module storage container support device 20 accommodated the dust-proof film module storage container 70 in a cushioning corrugated cardboard box, and was transported by truck for about 1,000 km and transported again. Go to the clean room and check the inside. It is found that the dust-proof membrane module 10 and the dust-proof membrane module support device 20 in the dust-proof membrane module storage container 70 are firmly connected. The shape of the dust-proof membrane module frame 10 and the dust-proof membrane 14 Defects such as wrinkles were not found. Furthermore, dust generated by the scratches of the fixing portion 73 and the supporting device 18 was not found.
然後，按照圖9(a)~圖9(d)所示的順序，對本發明的防塵薄膜組件10的貼附狀態（安裝狀態）進行評價。首先，如圖9(a)表示的那樣，準備800x950x厚度10mm的石英玻璃組成的清浄的光掩模91，將其在檯子（未圖示）上以從垂直算起10°的傾斜狀態載置。進而，防塵薄膜組件支持裝置20，在使締結的防塵薄膜組件10向光掩模91接近的同時，邊進行位置調整邊以同樣的狀態接近，使其處於所定的貼附位置，如圖9(b)表示的那樣，使防塵薄膜組件10的光掩模黏著層13與光掩模91接觸。另外，光掩模黏著層13保護的剝離片15已經事前剝離。Then, in the order shown in FIGS. 9 (a) to 9 (d), the attached state (attached state) of the dust-proof film module 10 of the present invention is evaluated. First, as shown in FIG. 9 (a), a clean photomask 91 composed of 800x950x 10mm thick quartz glass is prepared, and it is placed on a table (not shown) in an inclined state of 10 ° from a vertical position. . Further, the dustproof film module supporting device 20 brings the concluded dustproof film module 10 closer to the photomask 91, and adjusts the position in the same state while adjusting the position, so that the dustproof film module 10 is at a predetermined attachment position, as shown in FIG. 9 ( As shown in b), the photomask adhesive layer 13 of the dust-proof thin film module 10 is brought into contact with the photomask 91. In addition, the peeling sheet 15 protected by the photomask adhesive layer 13 has been peeled beforehand.
然後，如圖9(c)表示的那樣，防塵薄膜組件支持裝置20被慢慢地傾斜移動，使締結裝置17從防塵薄膜組件10依次剝離，將防塵薄膜組件支持裝置20卸下。圖9(d)為，防塵薄膜組件支持裝置20卸下之後的防塵薄膜組件10的狀態。Then, as shown in FIG. 9 (c), the dust-proof film module support device 20 is slowly moved obliquely, so that the connecting device 17 is sequentially peeled from the dust-proof film module 10 in order, and the dust-proof film module support device 20 is removed. FIG. 9 (d) shows a state of the dustproof film module 10 after the dustproof film module supporting device 20 is removed.
進而，最後，將在光掩模91上暫時接著的防塵薄膜組件10用加壓裝置（未圖示）以加壓力120kgf加壓，使光掩模黏著層13以與光掩模91呈完全接著的狀態，對防塵薄膜組件10進行良好觀察，得知防塵薄膜組件框架11，在無変形地貼附的同時，防塵薄膜14也沒有發現褶皺以及鬆弛，被正常地安裝。Finally, the dust-proof film module 10 temporarily attached to the photomask 91 is pressurized with a pressing device (not shown) at a pressure of 120 kgf to make the photomask adhesive layer 13 completely adhere to the photomask 91. In the state of the dust film module 10, a good observation was made, and it was found that the dust film module frame 11 was attached to the dust film without any wrinkles, and no wrinkles and slack were found in the dust film 14, and the dust film 14 was normally installed.
比較例中，將離焦距離間隙距離小，防塵薄膜組件框架的剛性低的與實施例相同的防塵薄膜組件用相同的工序製作，比較例的防塵薄膜組件，與實施例的防塵薄膜組件10相比，在防塵薄膜組件框架上防塵薄膜組件支持裝置沒有設置的點上不同。In the comparative example, the same dust-proof film module as in the example was manufactured by the same process with a small defocus distance gap and a low rigidity of the dust-proof film module frame. The dust-proof film module of the comparative example was the same as the dust-proof film module 10 of the example. This is different from the point that the dust-proof membrane module supporting device is not provided on the dust-proof membrane module frame.
再者，比較例中，該防塵薄膜組件框架也在其垂直方向的剛性低，由於不能處理，將防塵薄膜組件框架在鋁制的平板上載置的方式原封不動地進行防塵薄膜組件的製作。進而，該作制的防塵薄膜組件，以該狀態用集光燈向膜面照射，進行外觀以及異物的檢査，沒有看到特別的異常。Furthermore, in the comparative example, the dust-proof film module frame also has low rigidity in the vertical direction. Since it cannot be handled, the dust-proof film module frame is manufactured intactly by placing the dust-proof film module frame on an aluminum flat plate. Furthermore, the produced dust-proof film module was irradiated with a spotlight to the film surface in this state, and the appearance and foreign matter were inspected. No particular abnormality was observed.
然後，為了將該防塵薄膜組件收納於與實施例相同的防塵薄膜組件收納容器70，操作者2名將防塵薄膜組件費力的抬起了，但是馬上就出現了防塵薄膜組件框架為扭曲，防塵薄膜發生了褶皺。因此，雖然想對光掩模的直接貼附進行評價，但是，由於該防塵薄膜組件在處理的階段發生了防塵薄膜組件框架的扭曲，以及防塵薄膜出現了褶皺，沒有能進行貼附操作。Then, in order to store the dustproof film module in the same dustproof film module storage container 70 as in the embodiment, two operators laboriously lifted up the dustproof film module, but immediately it appeared that the dustproof film module frame was distorted and the dustproof film occurred. Wrinkled. Therefore, although it is desired to evaluate the direct attachment of the photomask, the dustproof film module was distorted during the processing stage, and the dustproof film was wrinkled, so the attaching operation could not be performed.
10‧‧‧防塵薄膜組件
11‧‧‧防塵薄膜組件框架
12‧‧‧防塵薄膜接著層
13‧‧‧光掩模黏著層
14‧‧‧防塵薄膜
15‧‧‧剝離片
16‧‧‧支持體
17‧‧‧締結裝置
18‧‧‧把持部
20‧‧‧防塵薄膜組件支持裝置
60‧‧‧防塵薄膜組件支持裝置（圓形）
61‧‧‧支持體（圓形）
62‧‧‧締結裝置
70‧‧‧防塵薄膜組件收納容器
71‧‧‧防塵薄膜組件收納容器本體
72‧‧‧蓋體
73‧‧‧固定部
91‧‧‧光掩模10‧‧‧ Dust-proof membrane module
11‧‧‧ Dust-proof membrane module frame
12‧‧‧ dustproof film adhesive layer
13‧‧‧Photomask Adhesive Layer
14‧‧‧ dustproof film
15‧‧‧ peeling sheet
16‧‧‧ support
17‧‧‧ Concluding device
18‧‧‧ holding section
20‧‧‧ dust film support device
60‧‧‧ dust-proof membrane module support device (round)
61‧‧‧Support (round)
62‧‧‧Conclude device
70‧‧‧ dustproof film module storage container
71‧‧‧ dustproof film module storage container body
72‧‧‧ Cover
73‧‧‧Fixed section
91‧‧‧Photomask
圖1是本發明的防塵薄膜組件的平面圖。 FIG. 1 is a plan view of a dust-proof film module of the present invention.
圖2是圖1的A-A截面圖。 Fig. 2 is a cross-sectional view taken along A-A in Fig. 1.
圖3是圖1的B-B截面圖。 Fig. 3 is a B-B sectional view of Fig. 1.
圖4是圖2的C部拡大圖。 FIG. 4 is an enlarged view of part C of FIG. 2.
圖5是本發明的矩形的防塵薄膜組件和用於該防塵薄膜組件的防塵薄膜組件支持裝置分離的狀態的斜視圖。 FIG. 5 is a perspective view showing a state where a rectangular dust-proof film module and a dust-proof film module supporting device for the dust-proof film module of the present invention are separated.
圖6是在圓形的防塵薄膜組件施用的防塵薄膜組件支持裝置的斜視圖。 Fig. 6 is a perspective view of a dust-proof film module supporting device applied to a circular dust-proof film module.
圖7是防塵薄膜組件收納容器的斜視圖。 FIG. 7 is a perspective view of a dustproof film module storage container.
圖8是圖7的D-D截面圖。 Fig. 8 is a sectional view taken along the line D-D in Fig. 7.
圖9(a)~圖9(d)是本發明的防塵薄膜組件在光掩模上安裝的順序截面概大略圖。 圖10是「外尺寸對角長」的概大略圖。FIGS. 9 (a) to 9 (d) are schematic cross-sectional views of a sequence of mounting the dust-proof film module of the present invention on a photomask. Fig. 10 is a schematic diagram of "diagonal length of outer dimensions".
Claims (7)
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| JP2015100677A JP6376601B2 (en) | 2015-05-18 | 2015-05-18 | Pellicle support means, pellicle support apparatus and pellicle mounting method using the same |
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| TW201705210A TW201705210A (en) | 2017-02-01 |
| TWI624859B true TWI624859B (en) | 2018-05-21 |
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| TW105114794A TWI624859B (en) | 2015-05-18 | 2016-05-13 | Dust-proof film module and installation method thereof |
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| JP (1) | JP6376601B2 (en) |
| KR (1) | KR102666696B1 (en) |
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| TW (1) | TWI624859B (en) |
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| JP6706575B2 (en) * | 2016-12-22 | 2020-06-10 | 信越化学工業株式会社 | Pellicle frame and pellicle using the same |
| JP2018180252A (en) * | 2017-04-12 | 2018-11-15 | 日本特殊陶業株式会社 | Pellicle frame and method for producing the same |
| JP6921412B2 (en) * | 2018-01-25 | 2021-08-18 | 株式会社ブイ・テクノロジー | Pellicle frame gripping device and pellicle frame gripping method |
| JP7061288B2 (en) * | 2018-08-28 | 2022-04-28 | 日本軽金属株式会社 | Pellicle frame for flat panel display and its manufacturing method |
| JP7040427B2 (en) * | 2018-12-03 | 2022-03-23 | 信越化学工業株式会社 | Pellicle, exposure original plate with pellicle, exposure method and semiconductor manufacturing method |
| US20220390829A1 (en) * | 2019-12-13 | 2022-12-08 | Mitsui Chemicals, Inc. | Pellicle demounting method, and pellicle demounting device |
| CN115956224A (en) * | 2020-08-20 | 2023-04-11 | 旭化成株式会社 | Dustproof structure for alignment unit |
| JP7063962B2 (en) * | 2020-09-23 | 2022-05-09 | 信越化学工業株式会社 | Pellicle frame and pellicle |
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| US20050048376A1 (en) * | 2003-08-26 | 2005-03-03 | Intel Corporation | Mounting a pellicle to a frame |
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| US6736386B1 (en) * | 2001-04-10 | 2004-05-18 | Dupont Photomasks, Inc. | Covered photomask holder and method of using the same |
| JP4478558B2 (en) * | 2004-12-08 | 2010-06-09 | 大日本印刷株式会社 | Large pellicle transport method, transport jig and pellicle case |
| JP4478557B2 (en) * | 2004-12-08 | 2010-06-09 | 大日本印刷株式会社 | Large pellicle, pellicle transport method, pellicle case, and pellicle transfer device |
| JP4677632B2 (en) * | 2005-07-08 | 2011-04-27 | レーザーテック株式会社 | Pellicle liner or pellicle peeling apparatus, peeling method, and pattern substrate manufacturing method |
| WO2009008294A1 (en) * | 2007-07-06 | 2009-01-15 | Asahi Kasei E-Materials Corporation | Frame of large pellicle and grasping method of frame |
| JP4879308B2 (en) * | 2009-10-29 | 2012-02-22 | 信越化学工業株式会社 | Pellicle stripping jig and stripping method |
| JP5202557B2 (en) * | 2010-03-05 | 2013-06-05 | 信越化学工業株式会社 | Pellicle handling jig |
| JP5528190B2 (en) * | 2010-04-23 | 2014-06-25 | 信越化学工業株式会社 | Pellicle storage container |
| JP2012103638A (en) * | 2010-11-15 | 2012-05-31 | Shin Etsu Chem Co Ltd | Pellicle handling tool |
| JP5854511B2 (en) * | 2012-10-16 | 2016-02-09 | 信越化学工業株式会社 | Pellicle and pellicle attaching method |
| JP5984187B2 (en) | 2013-04-22 | 2016-09-06 | 信越化学工業株式会社 | Pellicle and photomask assembly |
| JP6004582B2 (en) * | 2013-04-30 | 2016-10-12 | 信越化学工業株式会社 | Pellicle |
| JP6261004B2 (en) * | 2014-01-20 | 2018-01-17 | 信越化学工業株式会社 | EUV pellicle, EUV assembly using the same, and method of assembling the same |
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| US20050048376A1 (en) * | 2003-08-26 | 2005-03-03 | Intel Corporation | Mounting a pellicle to a frame |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6376601B2 (en) | 2018-08-22 |
| CN106168735B (en) | 2020-01-03 |
| JP2016218162A (en) | 2016-12-22 |
| KR20160135665A (en) | 2016-11-28 |
| TW201705210A (en) | 2017-02-01 |
| KR102666696B1 (en) | 2024-05-20 |
| CN106168735A (en) | 2016-11-30 |
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