CN106168735A - Dustproof film component and its installation method - Google Patents
Dustproof film component and its installation method Download PDFInfo
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- CN106168735A CN106168735A CN201610323191.4A CN201610323191A CN106168735A CN 106168735 A CN106168735 A CN 106168735A CN 201610323191 A CN201610323191 A CN 201610323191A CN 106168735 A CN106168735 A CN 106168735A
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- Prior art keywords
- dustproof film
- film component
- dustproof
- photomask
- support
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
Abstract
The purpose of the present invention is for providing a kind of dustproof film component, even if out of focus is apart from little, the rigidity of dustproof film component framework is low, it is possible to easily process, safely remove from Pellicle container kit, such that it is able to the zero defect dustproof film component that attaches to photomask etc. of ground and its installation method.The dustproof film component of the present invention, while the dustproof film following layer side of dustproof film component framework 11 arranges mounted and removable dustproof film component support device 20, out of focus distance/outside dimension is 0.0001～0.003 to the value of angular length.Furthermore, dustproof film component supports device 20, is made up of the support 16 of tabular or frame-shaped, by the micro-adhesive being set at support 16, arranges in the dustproof film following layer side of dustproof film component framework 11 mounted and removablely.
Description
Technical field
The present invention relates at semiconductor device, IC packaging body, printed base plate, when liquid crystal panel or organic EL panel etc. manufacture, the dustproof film component used as dust preventer and its installation method.
Background technology
In the manufacture of the quasiconductor of LSI, super LSI etc. or liquid crystal panel etc., light short for the wavelength of ultraviolet etc. to be irradiated to photomask, use the exposure machine of pattern-making on semiconductor wafer or liquid crystal glass.Now, such as adhesive dust on the photomask used, ultraviolet light is reflected by this dust, reflection, makes the pattern deformation of transfer, and short circuit etc., quality can be impaired.
Therefore, these operation is generally carried out in dust free room, but even so, the cleaning keeping photomask is also difficult, so will be exposed after the dustproof film component attaching of dust preventer at photomask surface.In this occasion, foreign body in the attachment directly on a surface of photomask, but will not adhere on dustproof film component, as long as so focus to be aligned in during photoetching the pattern of photomask, the foreign body on dustproof film component just with transfer unrelated.
Furthermore, as the specific use of a part, the dustproof film component that the optics in the exposure machine beyond photomask is installed there is also.Illuminator in exposure machine, lens, window etc., ultraviolet light reflection, the optics that passes through are a lot, these opticses, from light source, ultraviolet light guide photomask and workpiece (semiconductor wafer or crystal liquid substrate).If having foreign body and dirt attachment on these opticses, easily the quality of exposure product is made a difference, though their cleannes are not as good as the cleannes of photomask, but, in possible limit, the necessity keeping cleaning is also had for these opticses.
And then, these opticses, it is by the position adjustment of precision and mounted, therefore, has been carried out being extremely difficult manufacturing on-the-spot unloaded by individual other parts.Therefore, if it occur that dirty, it cleans and adjusts and is accomplished by a lot of time, or causes the low of serious work efficiency.Therefore, in order to prevent this situation, in the exposure device of a part, not only photomask, dustproof film component to be installed on these opticses, when occurring dirty, dustproof film is changed.
Such dustproof film component, it is, in general, that be that the transparent dustproof film of the composition such as cellulose acetate or fluororesin is attached to by aluminum by the celluloid by good printing opacity, rustless steel, an end face of the dustproof film component framework that engineering plastics etc. are made is constituted.Furthermore, on the other end of dustproof film component framework, arrange in order to install photomask by epoxy resin, polyvinyl acetate base ester resin, acrylic resin, the adhesion coating of the composition such as silicones and in order to protect the release layer (stripping film) of adhesion coating.
In dustproof film component, there is the dustproof film component of the dustproof film component installed on the photomask and the optics being arranged on beyond it, between both, constructively there is no big difference.It is essential that the dustproof film component installed on optics, compared with the dustproof film component of the photomask frequently changed, use between for a long time, it requires higher light resistance.Furthermore, in the dustproof film component of photomask, typically install with sticker, dustproof film component used for optical part do not have adhesive laying for setting, install with mechanical fastening systems such as screws.
Such as, in patent documentation 1, describe, the end face of the photomask side of dustproof film component framework arranges the elastomer layer of the function with liner, it is pressurizeed with the conclusion device of screw etc., obtains keeping the dustproof film component of high sealing.This dustproof film component, it is not necessary to photomask adhesion coating, and the deformation caused to photomask is minimum.And then, in such dustproof film component, due to from the highest to the out of focus of distance (hereinafter referred to as out of focus distance) the biggest foreign body in dustproof film face by protection face (pattern plane etc. of photomask), so out of focus is apart from big preferred.
Look-ahead technique document
Patent documentation
<patent documentation 1>JP 2014-211591
But, in recent years, in order to reduce the deformation of the photomask when dustproof film component attaches, use the dustproof film component of the low out of focus distance of the rigidity step-down of the short transverse that can make dustproof film component framework.Furthermore, due to the problem in the space of device, the use of the dustproof film component with low out of focus distance compared with the past also becomes many, particularly, among dustproof film component used for optical part, has out of focus distance for 1mm with purgation thing.
Such out of focus is apart from the occasion of low dustproof film component, and owing to the rigidity of the short transverse of dustproof film component framework is extremely low, during process, flexure and the distortion of framework become big, so the problem with difficult treatment.Particularly, when Pellicle container kit takes out, in addition to the difficult treatment of dustproof film component, during the installation of dustproof film component, problem is the biggest, can not be kept due to the shape in dustproof film component Frame Design during process, dustproof film generation fold and distortion, as intactly installed, will occur problem.
Summary of the invention
Therefore, the present invention, it is contemplated to solve above-mentioned problem, the purpose of the present invention is exactly, even if provide a kind of out of focus apart from little, the dustproof film component that the rigidity of dustproof film component framework is low, it is possible to easily it is processed, safely remove from Pellicle container kit, can dustproof film component and its installation method not being installed on photomask etc. defectively.
The dustproof film component of the present invention is further characterized in that, while the dustproof film following layer side of dustproof film component framework arranges mounted and removable dustproof film component support device, out of focus distance/outside dimension is 0.0001～0.003 to the value of angular length.
Furthermore, the dustproof film component of the present invention is further characterized in that, this dustproof film component supports that device is made up of the support of tabular or frame-shaped, and this support is by the micro-adhesive arranged, in the dustproof film following layer side of dustproof film component framework by mounted and removable setting.And then, this micro-adhesive in the divided configuration in the many places of support, the adhesion strength of described micro-adhesive, in the occasion that vertical direction is peeled off with the speed of 0.5mm/s, is preferably the scope of 0.01～0.5N.
And then, the dustproof film component of the present invention is preferred, and described micro-adhesive is the spawn selected from silicones or polyurethane, in dustproof film component supports device, and the handle part used when being preferably provided at process.
The installation method of the present invention is further characterized in that, after dustproof film component is attached at installed surface photomask, the dustproof film component that dustproof film component framework is arranged supports that device is removed.
The effect of invention
According to the present invention, even providing a kind of out of focus apart from little, the dustproof film component that the rigidity of dustproof film component framework is low, it processes also easy, and the defect such as the deformation of dustproof film component framework and the fold of dustproof film can not had to be installed on dustproof film component and its installation method of photomask etc..
Accompanying drawing explanation
The plane graph of the dustproof film component of Fig. 1 present invention.
The Section A-A figure of Fig. 2 Fig. 1.
The section B-B figure of Fig. 3 Fig. 1.
The C portion enlarged drawing of Fig. 4 Fig. 2.
The oblique view of the state that the dustproof film component of the rectangle of Fig. 5 present invention separates with the dustproof film component support device for this dustproof film component.
Fig. 6 supports the oblique view of device at the dustproof film component that circular dustproof film component is used.
The oblique view of Fig. 7 Pellicle container kit.
The D-D sectional view of Fig. 8 Fig. 7.
The order schematic cross-section that the dustproof film component of Fig. 9 present invention is installed on the photomask.
The schematic diagram of Figure 10 " outside dimension is to angular length ".
Detailed description of the invention
Hereinafter, one embodiment of the present invention is described in detail based on accompanying drawing, but the present invention is not limited to this.
In the dustproof film component of the present invention, as Fig. 4 represents, in dustproof film following layer 12 side of dustproof film component 10, configuration dustproof film component supports device 20, and both conclude by concluding device 17.Fig. 5 is, the dustproof film component 10 of rectangle and dustproof film component support the state that device 20 separates.
Out of focus distance (including the height of photomask adhesion coating) of the dustproof film component 10 of the present invention and outside dimension are 0.0001～0.003 to the ratio (out of focus distance/outside dimension is to angular length) of angular length, on an end face of frame, arranging dustproof film following layer 12, dustproof film 14 tightens setting thereon.Furthermore, in the face that it is relative, photomask adhesion coating 13 is set, and its surface is arranged as required to protect the stripping film 15 of photomask adhesion coating 13.
Here, so-called outside dimension is to angular length, as Figure 10 represents, for the length between the outer ring, long limit of dustproof film component of rectangle and minor face outer ring extended line crossing.Usually, in the dustproof film component framework of rectangle, there is some R faces corner cut in the outside in corner, and this R portion is ignored by outside dimension herein by angular length.
Out of focus distance/outside dimension to the value of angular length be 0.0001 less than dustproof film component, owing to as dustproof film component 10, its shape maintains difficulty, so it uses difficulty.Furthermore, more than 0.003, owing to having certain rigidity, problem during process is few, so it is few to be suitable for benefit of the invention.
Therefore, " dustproof film component that rigidity is low " that the present invention is applied, although relevant with by material, but material is the occasion of aluminium alloy, and out of focus distance/outside dimension is preferred to the dustproof film component of the size that angular length is less than 0.003.
On the other hand, the out of focus distance of dustproof film component 10, the requirement item of the exposure device side used determine, such as, long limit is in the short quasiconductor dustproof film component of the length of side of about 150mm, the occasion that out of focus distance is below 0.5mm, and during process, problem is prone to occur.Furthermore, long limit be 900～1700mm liquid crystal in the large-scale dustproof film component that uses, even if the occasion that out of focus distance is 7mm, the most hard to say during process have sufficient rigidity, and less than 6mm, the problem of difficult treatment occurs.The most hypomegetic long limit is the dustproof film component of the liquid crystal of 400～800mm degree, if out of focus distance is below 2.5mm, during process, problem is prone to occur.Therefore, the present invention uses " out of focus is apart from little dustproof film component " is, although different and different according to the length of side of dustproof film component 10, but the concrete dustproof film component that numerical value is 0.2～6mm degree of preferred out of focus distance.
The shape of dustproof film component framework 11, is rectangle in the embodiment of Fig. 1～Fig. 4, but, corner have hypotenuse octagonal and circular etc. he shape also can, there is no particular limitation.The occasion of circular dustproof film component 10, above-mentioned outside dimension diagonal angle length is equivalent to outside dimension diameter.
The material of dustproof film component framework 11 is, aluminium alloy, the light-alloy of magnesium alloy etc., rustless steel, the iron-based alloy such as carbon steel, also has the fiber-reinforced plastic of GFRP, CFRP etc..Particularly, high with the rigidity using rustless steel etc., corrosion resistance might as well metal be preferably, preferably with laser cutting, the processing method making of machining etc. is preferably.The occasion of fiber-reinforced plastic, from the point of view of the point that the rigidity in layer tension direction guarantees, for preferably, but, the out of focus as the present invention is in little dustproof film component, owing to rigidity has anisotropy, it is easy to produce distortion, and it processes some difficulty.
Any one material of dustproof film component framework 11, preferably implements antirust on its surface, sends out dirt and prevents and sunproof material carries out application, plating, and the surface of anodized etc. processes.Furthermore, during use, in order to prevent the reflection of exposure light, the observation making attachment foreign body is easy, and black is particularly preferred.
Dustproof film following layer 12 is, uses silicones, fluorine resin, the known solid of acrylic resin etc., with the apparatus for coating of air pressurized formula distributor etc. on dustproof film component framework 11 smooth coating and formed.
The membrane material of the compositions such as dustproof film 14, according to the optical source wavelength of the exposure machine used, selects fluorine resin, cellulose-based resin, by spin-coating method, mould rubbing method etc., film forming on smooth substrate, peels off from substrate after drying and obtains.Furthermore, it is arranged as required to antireflection layer and also may be used.The occasion of the dustproof film component used for optical part in exposure machine, in order to make replacing frequency step-down, the fluorine resin using light resistance excellent is particularly preferred.
The thickness of dustproof film 14, to transmitance, film-strength accounts for, and comprehensive descision sets preferably, but thickness with 0.2～10 μm in the range of good.And then, dustproof film 14, in order to not produce fold and lax, in addition to do not make the excessive flexure of dustproof film component framework 11, in addition suitable tension force, is then preferred with the dustproof film following layer 12 on dustproof film component framework 11.
Photomask adhesion coating 13, it is possible to use rubber series sticker, silicon system sticker, acrylic acid series sticker, the known material of hot melt sticker etc..Furthermore, as required, its surface carries out planarization and processes preferably.And then, protection photomask adhesion coating 13 stripping film 15 is installed on its surface as required, but; this stripping film 15 is; carry out mould release coating on one face of the thin film of the composition such as the PET in thickness 0.05～0.3mm degree so that it is be harmonious with the profile of photomask adhesion coating 13 and cut off, use.
The occasion of the dustproof film component 10 of photomask, generally, by light mask adhesion layer 13, dustproof film component 10 is adhered to photomask 91 and installs, but, in recent years, replace photomask adhesion coating 13, arranging the laying formed essentially without adhesive elastomer, the method carrying out installing with the device of the machinery of clip and bolt etc. also occurs in that, the present invention makes the most also may be used.
Furthermore, the occasion of the dustproof film component 10 used for optical part in exposure machine, clamping device, screw, clasp, clip, electrostatic force, the fixing device of the various kinds such as magnetic force can be set in device side.Therefore, it is not necessary to non-usage has the photomask adhesion coating 13 of adhesion strength can not.The occasion of laying is set in device side, any thing similar with photomask adhesion coating and laying can be not provided with on the surface of dustproof film component framework 11.The present invention, in such occasion, it is possible to use.
The dustproof film component 10 that the most such parts are constituted can with tabular configure in dustproof film following layer 12 side or frame-shaped dustproof film component support device 20 by conclusion device 17 conclude integral preferably.And then, this dustproof film component 10, before the mounting, support that device 20 one is used, carried with dustproof film component, at dustproof film component 10 after being installed by protection face, the conclusion concluding device 17 released, dustproof film component support device 20 unloads.
Such dustproof film component supports that device 20 is, as Fig. 5 represents, and the conclusion device 17 that the support 16 of frame-shaped shape and dustproof film component 10 are concluded, it is made up of the handle part 18 used when processing.Support 16 is, although be frame-shaped in this embodiment, but only it is noted that it does not contacts with dustproof film 14, tabular also can, the shaped as frame shape having carried out reinforcement also may be used.Furthermore, dustproof film component supports that the profile of device is the most consistent with the profile of dirt film assembly 10 to be preferred, such as, Fig. 6, illustrate the dustproof film component in the dustproof film component 10 of circle and support device 60, on circular support 61, it is provided with conclusion device 62 and handle part 63.
As the material of support 16, with the light weight of aluminium alloy etc., the metal of high rigidity is preferably, use the hollow structure of tubing etc. it is also preferred that.But, use the occasion of tubing, in order to prevent sending out dirt, it is necessary to carry out peristome plugging handling.
Here, the flatness that the dustproof film component of support 16 concludes side is, although relevant with its size, but cause installation bad to prevent the dustproof film component concluded to be distorted etc., more preferably at least 0.5mm, most preferably below 0.2mm.
Handle part 18, is the process for dustproof film component, it is advantageous to having the metal of suitable intensity and engineering plastics make, thus can directly use hands, or fixture etc. carries out holding process to it.
The conclusion device 17 that dustproof film component 10 and dustproof film component are supported device 20 conclude, is made up of micro-adhesive, as Fig. 5 and Fig. 6 represents, supports segmentation configuration in many places on device 20 at dustproof film component.About configuration and number, if dustproof film component 10 framework whether deform and whether the fold etc. of film occurs, and stable whether fixing determines, but the occasion of the dustproof film component 10 at rectangle, at least include that four corners are necessary.
Furthermore, the adhesion strength concluding device 17 in many places configuration is, peels off occasion 0.01～0.5N in the range of preferably in vertical direction with the speed of 0.5mm/s.0.01N is less than, the too small holding that can not stabilize of bed knife, too strong more than 0.5N adhesion strength, dustproof film component being supported from dustproof film component 10, device 20 unloads and can become difficulty.
As such micro-adhesive of conclusion device 17, processing can be cut out from tabular molding from the spawn of silicones or polyurethane selection preferably, or to desired shape injection moulding.The spawn used, takes in preferably selection with the adhesion strength to surface, and hardness also has the necessity taken in.Most suitable hardness, although relevant with the thickness used, but as the target of the material selected itself, good with ASKER-C durometer less than 50.More than 50, after dustproof film component 10 is installed, dustproof film component supports that device 20 can become to be difficult to tilt, and concludes the stripping difficulty of device 17.But, if excessively soft occasion, shape unease, operating difficulties, needle penetration is preferably more than 90.
This conclusion device 17, can install on support 16 a face, also can be only made up of micro-adhesive, the hardness of selection, can become excessively soft due to size, has shape can not keep certain danger.Therefore, conclude the composition of device 17, with the space agent of resin and metal etc., be configured to particularly preferred with micro-adhesive the most at an upper portion thereof.This occasion, the thickness of micro-adhesive is, being 1～5mm to be preferred at tip.
Furthermore, conclude device 17, be cylindric in the embodiment of Fig. 1～6, circular cross-section, but other cross sectional shape of ellipse and rectangle etc. can also.Conclude device 17 and the contact shape of dustproof film component 10, can be plane, but, as somewhat there being the most convex curve form, support that unloading of device 20 is easy, preferably.Conclude size and the shape of device 17, and the contact area of dustproof film component, it may be considered that the adhesion strength concluding dustproof film component 10 determines, but, from preventing with from the viewpoint of the contacting of dustproof film 14, it contacts width, thinks less than the 70% of thin film then slice width preferably.
And then, conclude device 17, in the occasion of the magnetic material that dustproof film component framework 11 is carbon steel and iron series stainless steel etc., it may be considered that constitute with Magnetitum.Dustproof film component framework 11, in addition to being all magnetic material making except entirety, magnetic is imbedded, surface is then and coating etc. has the method for equal function and also may be used, in these occasions, conclude the magnetic force of device, the support to dustproof film component can be selected, fixing no problem scope.It is essential that in the occasion of magnetic force, even if how to adjust, during conclusion, it is also very difficult for making it fixing at leisure, furthermore on the contrary, unloads moment, need big power, smooth operation becomes difficulty, shown in be necessary to consider not use permanet magnet, use electromagnetic force, or the operation with machinery, even if the additional of device of magnetic force decay is necessary.
Such as the little dustproof film component 10 of the out of focus distance of the present invention, rigidity is extremely low, does not has stability, and it is difficult that dustproof film component being supported, device 20 the most frequently loads and unloads.It is therefore preferable that the stage of the making at dustproof film component 10, dustproof film component 10 and dustproof film component to be supported that device 20 is concluded, until using dustproof film component 10 at the moment client, will integrally use, carrying.Therefore, from the point of view of this viewpoint, dustproof film component 10 and dustproof film component support that device 20 is preferably received with the state concluded by conclusion device 17 in Pellicle container kit 70, keeping and carrying.
Fig. 7 and Fig. 8 is, the figure of the Pellicle container kit 70 of the dustproof film component 10 of the storage present invention.Fig. 7 is, all oblique views, Fig. 8 is, the sectional view of the line D-D in Fig. 7.Pellicle container kit 70, it is made up of Pellicle container kit body 71 and lid 72, in Pellicle container kit body 71, by supporting that the dustproof film component 10 that device 20 is concluded loads with dustproof film component, it is fitted together to airtight at circumference.Preferably this circumference, airtight with adhesion zone (not shown) etc., or fix with clip and clasp (not shown) etc., not make lid 72 from Pellicle container kit body 71 landing.
The material of Pellicle container kit body 71 and lid 72 is, uses the PMMA of thickness 2～8mm, the resin of PAN, ABS, PC, PVC etc., carries out making preferably by the processing method of injection mo(u)lding or vacuum forming etc..The length of side of dustproof film component is the dustproof film component the most large-scale more than as 1500mm, and in order to ensure rigidity, storage Pellicle container kit body 71 can use aluminium alloy, magnesium alloy, the metal of rustless steel etc..Furthermore, as the device of other raising rigidity, tabular or bar-shaped reinforcing device can be arranged on outside.
Furthermore, Pellicle container kit 70, from being prone to observe the viewpoint of attachment foreign body, black is preferably, lid 72, in order to its inside is confirmed, preferably clear.And then, can guarantee that electric conductivity and flame retardancy are preferred by the selection of material or the coating on surface.
Dustproof film component supports the handle part 18 of device 20, can be mounted on Pellicle container kit body 71 on the fixed part 73 arranged.Furthermore, preferably arrange on this fixed part 73 and ditch that handle part 18 is chimeric and depression etc., device 20 does not carry out horizontal direction and moves to make dustproof film component support, and then the upper end of handle part 18 in the inner side of lid 72 by regulation.Support that dustproof film component 10 and dustproof film component support the height of device 20, in order to dustproof film component 10 not added excessive load, below being preferred with the surface degree of contacting of Pellicle container kit body 71.
Furthermore, fixed part 73, in order to prevent scratching from sending out dirt, with PA, the engineering resin of POM, PE, PEEK etc. and polyurethane series, silicon system, fluorine system, the elastomer of olefin-based etc. is constituted, it addition, such as make it have charged preventing property, the most well.And then, this fixed part 73 is, can use machining and ejection formation, and the known method of injection molded etc. makes, and is fixed on Pellicle container kit body 71 with (not shown) such as bolts.
Dustproof film component 10, so, support device 20 by dustproof film component, indirectly fixed in Pellicle container kit 70, not being moved in the transport of Pellicle container kit 70, the breakage of deformation etc. and the attachment of foreign body are prevented from.
Then, Fig. 9 (a), (b), (c), (d) is, the dustproof film component 10 of the present invention is arranged on the schematic cross-section of the method (sequentially) of the photomask 91 in mounted face.
First, after the lid 72 of Pellicle container kit 70 is opened, hold handle part 18, while making dustproof film component support that device 20 and conclusion device 17 take out (not shown) by the dustproof film component 10 concluded, after the fixed engineering of inspection etc., the stripping film 15 of dustproof film component 10 is peeled off, prepares.And then, in Fig. 9 (a), dustproof film component 10 and the dustproof film component of preparation are supported that device 20 transports, photomask 91 is carried out position adjustment, is harmonious with fixed installation site.
Then, in Fig. 9 (b), intactly make dustproof film component 10 and photomask 91 close, make photomask adhesion coating 13 contact.This operation, can carry out with simple fixture is manual, but be preferably used and hold the carrying device (not shown) that dustproof film component supports device 20 to move it.It addition, in this stage, photomask adhesion coating 13 is the state contacted gently, although then, but do not obtain adhesion completely.
Furthermore, in Fig. 9 (c), carry out dustproof film component being supported, device 20 unloads (stripping) operation from dustproof film component 10.Along with dustproof film component being supported device 20 is from the operation of the oblique stripping of dustproof film component 10, surface from the micro-adhesive conclusion device 17 of configurations multiple on support 16, successively by the stripping of dustproof film component 10, after stripping in all of place ends, dustproof film component supports that device 20 is unloaded from dustproof film component 10.
And then, finally, in Fig. 9 (d), while quickly dustproof film component being supported that device 20 unloads, with the pressue device (not shown) additionally arranged, support that the dustproof film component 10 of device 20 applies fixed load to unloading dustproof film component, by photomask adhesion coating 13, dustproof film component 10 is fully mounted on photomask 91.
It addition, this operation, use the dustproof film component of the fixing device different with photomask adhesion coating from clip etc. occasion and, even if the mounting object of dustproof film component is not photomask but the optics of exposure machine also can be implemented equally.Make fixed dustproof film component fixing device action make dustproof film component fix, dustproof film component is being supported does not has any difference on the point that the oblique stripping of device 20 unloads.Furthermore, in the embodiment of Fig. 9, adhere to the viewpoint lowered from operability and foreign body, by inclined for photomask 91, each operation can implemented under this heeling condition, but, also may be used with level and the vertical other configuration status enforcement waited.
Embodiment
Hereinafter, embodiments of the invention are described in detail.In this embodiment, first, making dustproof film component 10 and dustproof film component as Fig. 1～Fig. 5 and support device 20, illustrate its production order, all of operation is carried out in all in 10 grades of dust free rooms.
Dustproof film component framework 11 is, SUS 304 rustless steel laser cutting and machine cut is processed, outside dimension 756x913mm, interior cun of 740x901mm, R 2mm inside corner, R 6mm outside corner, highly 1.8mm.Furthermore, in each long limit of dustproof film component framework 11, the passage (not shown) of diameter 0.4mm is respectively provided with 8.And then, rib portion is the corner cut (not shown) of C 0.2mm degree, after carrying out Ra 0.5 degree sandblasting, carries out black nickel plating comprehensively.
Then, after this dustproof film component framework 11 is used interfacial agent and the good clean dry of pure water, an end face of frame arranges photomask adhesion coating 13, will silicon sticker (trade name；KR3700, SHIN-ETSU HANTOTAI's chemical industry (strain) is made) it is used in 3 axle orthogonal robot the air pressurized formula distributor coating carried.The thickness of photomask adhesion coating now is 1.2mm, and in baking oven, 130 DEG C of heating are fully hardened.Furthermore, on the surface of photomask adhesion coating 13, attaching stripping film 15, this stripping film is to carry out mould release coating on a face of the PET film of thickness 125 μm, cuts off making with the shape the most consistent with the profile of dustproof film component framework 11.
It addition, this dustproof film component framework 11, the rigidity of its vertical direction is extremely low, it is impossible to processing, thus these operation, is to be carried out when dustproof film component framework 11 is positioned on the flat board of aluminum (not shown).
After photomask adhesion coating 13 is formed, described dustproof film component framework about 11 is inverted, as described above, the contrary face of photomask adhesion coating 13 arranges dustproof film following layer 12, will silicon sticker (trade name；KR3700, SHIN-ETSU HANTOTAI's chemical industry (strain) is made) it is applied to thickness 50 μm, 130 DEG C of baking oven heating so that it is fully hardened.Furthermore, the filter acrylic acid adhesive sheet then (not shown) of PTFE multiple aperture plasma membrane composition, the passage on long limit is capped.
Dustproof film 14, its material is fluorine resin (trade name；CYTOP, Asahi Glass (strain) is made).And then, first, by type coating film forming in the substrate for film deposition that the synthetic quartz of 850x1200x thickness 10mm forms, after solvent is dried, with contour substrate with on the temporary frame of size then, peel off from substrate for film deposition, obtain the stripping film of thickness 4.5 μm.Thereafter, become dustproof film 14 on this stripping film dustproof film following layer 12 on dustproof film component framework 11 then, the residue film outside dustproof film component framework 11 is cut off to be removed, completing of dustproof film component 10 with cutter.
The dustproof film component 10 completed with above production order, the thickness of its photomask adhesion coating 13 is 1.2mm, and the height being added together with the height 1.8mm of dustproof film component framework 11, i.e. out of focus distance be, 3.0mm.And then, a length of 1185.37mm in outside dimension diagonal angle of described dustproof film component framework 11, out of focus distance and outside dimension are 0.0025 to the ratio (out of focus distance/outside dimension is to angular length) of angular length.
Then, the production order that dustproof film component is supported device 20 illustrates, first, dustproof film component supports that the composition support 16 of device 20 is, the rectangular tube of the 20x20mm of A6063 aluminium alloy welds the frame-shaped thing making outside dimension 780x940mm, and its one side machine cut obtains flatness 0.2mm.Install 18 in this face and conclude device 17, four adjacent corner, install with the charged handle part 18 preventing POM from making bolt (not shown).
Furthermore, concluding device 17 is, as the Silica hydrogel (trade name of its materials'use 2 liquid mixing；KE1051, SHIN-ETSU HANTOTAI's chemical industry (strain) is made) thing of injection moulding, the upper injection moulding of the substrate (not shown) of columnar SUS304, hardening.The diameter of the contact surface concluding device 17 and dustproof film component 10 now, about 4mm.Then, by this conclusion device 17 by the female thread arranged in the base part of SUS304, it is arranged on support 16 with bolt (not shown).
And then, to support that device 20 is adjusted being positioned in the position of dustproof film component 10 on flat board with the dustproof film component of above sequentially built, give as security attached to dustproof film following layer 12 and the dustproof film 14 then of dustproof film component 10, support device 20 then in dustproof film component 10 dustproof film component by the adhesion strength concluding device 17.The adhesion strength concluding device 17 now is, at the 0.15N/ of the value confirmed when in advance peeling off by speed 0.5mm/s.
Finally, the dustproof film component integrated with dustproof film component 10 is supported that device 20 is carried with various attitudes, to outward appearance, foreign body, the transmitance of film etc. checks, learns, the defect of the deformation of dustproof film component framework 11 and the fold etc. of dustproof film 14 does not occur, furthermore, the part come off from conclusion device 17 does not the most find, can carry out the process of dustproof film component 10 unchangeably.
Then, in order to receive the dustproof film component 10 of the present invention, as shown in Fig. 7 and Fig. 8, prepare Pellicle container kit 70.It is with the charged ABS resin plate that prevents of thickness 5mm, the thing of vacuum forming making.On this Pellicle container kit body 71, the charged fixed part 73 bolt (not shown) preventing PE that dustproof film component supports the handle part 18 of device 20 chimeric is installed, this Pellicle container kit 70 interfacial agent and pure water are well cleaned, is completely dried.
In Pellicle container kit 70, by dustproof film component 10 and dustproof film group
Part supports that device 20 is received.After dustproof film component supports that the handle part 18 of device 20 is incorporated in the ditch of fixed part 73, the place of contact during process, it is carried out with the PVA wiper of pure water infiltration.And then, lid 72 is covered, circumference PVC adhesion zone seals, finally, the handle part 18 that the inner face at lid 72 is received pressing be contacted over, confirm that dustproof film component supports that device 20 and dustproof film component 10 are fixed.
And then, in order to its bale packing form is evaluated, by dustproof film component 10, Pellicle container kit supports that the Pellicle container kit 70 of device 20 storage is contained in padded coaming corrugated case, about 1000km truck transport, it is carried to again in dust free room, inside is confirmed, learning with dustproof film component, the dustproof film component 10 in Pellicle container kit 70 supports that device 20 is in the state firmly concluded, the defect of the deformation of dustproof film component framework 11 and the fold etc. of dustproof film 14 is not found.Furthermore, the dirt that the scratching of fixed part 73 and support device 18 produces the most does not finds.
Then, according to the order shown in Fig. 9 (a)～(d), the attaching state (installment state) of the dustproof film component 10 of the present invention is evaluated.First, as Fig. 9 (a) represents, prepare the photomask 91 of cleaning of the quartz glass composition of 800x950x thickness 10mm, by its on estrade (not shown) with from the heeling condition mounting vertically counting 10 °.And then, dustproof film component supports device 20, make the dustproof film component 10 of conclusion while photomask 91 is close, while it is close with same state to carry out position adjustment limit, it is at fixed sticking position, as as Fig. 9 (b) represents, the photomask adhesion coating 13 of dustproof film component 10 is made to contact with photomask 91.It addition, the stripping film 15 of photomask adhesion coating 13 protection is peeled off the most in advance.
Then, as Fig. 9 (c) represents, dustproof film component supports that device 20, by inclination movement at leisure, makes conclusion device 17 peel off successively from dustproof film component 10, dustproof film component being supported, device 20 unloads.Fig. 9 (d) is, dustproof film component support device 20 to unload after the state of dustproof film component 10.
And then, finally, the pressue device (not shown) of dustproof film component 10 the most then temporary transient on photomask 91 is pressurizeed with plus-pressure 120kgf, make photomask adhesion coating 13 with photomask 91 in state the most then, dustproof film component 10 is well observed, learns dustproof film component framework 11, while attaching without deformation, dustproof film 14 does not the most find fold and relaxes, and is normally installed.
Comparative example
In comparative example, by out of focus apart from little, the dustproof film component identical with embodiment that the rigidity of dustproof film component framework is low makes by identical operation, the dustproof film component of comparative example, compared with the dustproof film component 10 of embodiment, on dustproof film component framework, dustproof film component is supported on the point that device is not provided with different.
Furthermore, in comparative example, this dustproof film component framework is also low in the rigidity of its vertical direction, and owing to not processing, the mode loaded on the flat board of aluminum by dustproof film component framework intactly carries out the making of dustproof film component.And then, the dustproof film component of this work, irradiates to face with this state collection light modulation, carries out the inspection of outward appearance and foreign body, do not see special exception.
Then, in order to this dustproof film component being accommodated in the Pellicle container kit 70 identical with embodiment, laborious the lifting of operator 2 star's dustproof film component, but having occurred as soon as the distortion of dustproof film component framework at once, dustproof film there occurs fold.Therefore, although want directly attaching of photomask is evaluated, but, owing to this dustproof film component there occurs the distortion of dustproof film component framework in the stage processed, and dustproof film occurs in that fold, can not carry out attaching operation.
The explanation of symbol
10 dustproof film components
11 dustproof film component frameworks
12 dustproof film following layers
13 photomask adhesion coatings
14 dustproof films
15 stripping films
16 supports
17 conclude device
18 handle parts
20 dustproof film components support device
60 dustproof film components support device (circular)
61 supports (circular)
62 conclude device
70 Pellicle container kits
71 Pellicle container kit bodies
72 lids
73 fixed parts
91 photomasks.
Claims (7)
1. a dustproof film component, it is characterised in that the dustproof film of dustproof film component framework connects
Layer side and be provided with mounted and removable dustproof film component support device, out of focus distance/outside dimension diagonal angle
Long value is 0.0001～0.003.
Dustproof film component the most according to claim 1, it is characterised in that described dustproof film group
Part supports device, is made up of the support of tabular or frame-shaped, and it is by arranging on this support
Micro-adhesive, mounted and removable in the dustproof film following layer side of described dustproof film component framework
Be set.
Dustproof film component the most according to claim 2, it is characterised in that described micro-cohesiveness thing
Matter, by many places segmentation configuration on described support.
4. according to the dustproof film component of claim 2 or 3, gluing of described micro-adhesive
Put forth effort, in the occasion that vertical direction is peeled off with the speed of 0.5mm/s, be 0.01～0.5
The scope of N.
5. according to the dustproof film component of any one of claim 2 to 4, it is characterised in that institute
Stating micro-adhesive is the spawn selected from silicones or polyurethane resin.
6. according to the dustproof film component of any one of claim 1 to 5, at described dustproof film
Assembly is supported in device, the handle part used when being provided with process.
7. an installation method for dustproof film component, described in any one of claim 1 to 6
Dustproof film component after being attached at mounted face, described dustproof film component framework is set
The above-mentioned dustproof film component put supports that device is removed.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015100677A JP6376601B2 (en) | 2015-05-18 | 2015-05-18 | Pellicle support means, pellicle support apparatus and pellicle mounting method using the same |
| JP2015-100677 | 2015-05-18 |
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| Publication Number | Publication Date |
|---|---|
| CN106168735A true CN106168735A (en) | 2016-11-30 |
| CN106168735B CN106168735B (en) | 2020-01-03 |
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| CN201610323191.4A Active CN106168735B (en) | 2015-05-18 | 2016-05-16 | Dustproof pellicle and mounting method thereof |
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| Country | Link |
|---|---|
| JP (1) | JP6376601B2 (en) |
| KR (1) | KR20160135665A (en) |
| CN (1) | CN106168735B (en) |
| TW (1) | TWI624859B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111630453A (en) * | 2018-01-25 | 2020-09-04 | 株式会社 V 技术 | Dustproof pellicle frame holding device and dustproof pellicle frame holding method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6706575B2 (en) * | 2016-12-22 | 2020-06-10 | 信越化学工業株式会社 | Pellicle frame and pellicle using the same |
| JP2018180252A (en) * | 2017-04-12 | 2018-11-15 | 日本特殊陶業株式会社 | Pellicle frame and method for producing the same |
| JP7061288B2 (en) * | 2018-08-28 | 2022-04-28 | 日本軽金属株式会社 | Pellicle frame for flat panel display and its manufacturing method |
| JP7040427B2 (en) * | 2018-12-03 | 2022-03-23 | 信越化学工業株式会社 | Pellicle, exposure original plate with pellicle, exposure method and semiconductor manufacturing method |
| CN114641724A (en) * | 2019-12-13 | 2022-06-17 | 三井化学株式会社 | Method and device for disassembling protective membrane assembly |
| TWI784668B (en) * | 2020-08-20 | 2022-11-21 | 日商旭化成股份有限公司 | Dust-proof structure for alignment unit |
| JP7063962B2 (en) * | 2020-09-23 | 2022-05-09 | 信越化学工業株式会社 | Pellicle frame and pellicle |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN106168735B (en) | 2020-01-03 |
| TW201705210A (en) | 2017-02-01 |
| KR20160135665A (en) | 2016-11-28 |
| JP6376601B2 (en) | 2018-08-22 |
| JP2016218162A (en) | 2016-12-22 |
| TWI624859B (en) | 2018-05-21 |
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