JP2014098913A - Method for withdrawing large-sized pellicle from housing container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for withdrawing a large-sized pellicle from a housing container, in which the large-sized pellicle can easily be withdrawn from the housing container by surely grasping a frame body of the pellicle so that a strain or a warp is not generated when the pellicle is stuck to a photomask or the like.SOLUTION: The large-sized pellicle comprises: the frame body having a polygonal shape comprising a plurality of sides; a pellicle film stuck to the upper edge surface of the frame body; and a tacky adhesive material applied to the lower edge surface of the frame body and has the longest side of 1 m or longer length. Grasping convex parts or grasping concave parts are formed on each of the sides of the frame body. The sides of the frame body are grasped simultaneously by using at least one of the grasping convex parts or grasping concave parts formed on each of the sides. As a result, the large-sized pellicle can easily be withdrawn from the housing container by surely grasping the frame body of the pellicle so that the strain or the warp is not generated when the pellicle is stuck to the photomask or the like.

Description

  The present invention prevents foreign matter from adhering to a photomask or a reticle used in a lithography process when manufacturing a thin film transistor (TFT), a color filter (CF), or the like constituting an LSI or a liquid crystal display (LCD). The present invention relates to a frame that is a constituent member of a pellicle used in the above. In particular, the present invention relates to a frame that is a constituent member of a large-sized pellicle for liquid crystal and has a long side length of 1 m or more.

  The present invention relates to a frame body that is a constituent member of a pellicle. First, the pellicle will be described.

  2. Description of the Related Art Conventionally, in the manufacture of semiconductor devices, in a lithography process for forming a circuit pattern on a wafer, dust prevention means generally called a pellicle is used to prevent foreign matter from adhering to a photomask or reticle. . The pellicle has a shape matching the shape of the photomask or reticle, and a transparent polymer film (such as nitrocellulose, cellulose derivative, or fluoropolymer with a thickness of 10 μm or less on the upper edge surface of a frame of about several millimeters thick ( (Hereinafter referred to as “pellicle membrane”). In general, the pellicle is often shipped in the form of a product in which an adhesive is applied to the lower edge surface of the frame and a protective film is laminated on the adhesive layer.

  The adhesive layer is for fixing the pellicle to a photomask or reticle, and the protective film is used to maintain the adhesive strength of the adhesive until the adhesive layer is used for the adhesive layer. The adhesive surface of the material layer is protected.

  Such a pellicle is generally supplied from a pellicle manufacturer to a manufacturer that manufactures a photomask or a reticle (hereinafter referred to as a “mask manufacturer”). The mask manufacturer peels off the protective film from the pellicle, attaches the pellicle to the photomask or reticle with an adhesive layer, and then performs lithography on the mask or reticle, such as a semiconductor device manufacturer or a liquid crystal panel manufacturer. To supply.

  The pellicle must be handled so that it does not adhere to the pellicle because it is used as a dustproof means. Normally, when handling a pellicle, a pin-shaped jig is inserted into a hole formed on the outer surface of the frame body, and holding the jig body prevents the pellicle from being touched directly by human hands. It is common (see, for example, Patent Document 1). Also, by forming a groove for inserting the rotation lever on the outer surface of the frame body, it is gripped by using a jig having the rotation lever, and by holding the main body of the jig, the pellicle is not directly touched by human hands. It has also been proposed (see, for example, Patent Document 2).

  Further, when the pellicle is transported from the pellicle manufacturer to the mask manufacturer, the pellicle is generally transported by putting the pellicle in a hermetically sealed storage container so that dust does not adhere. Naturally, since the pellicle is required to be securely fixed in the storage container, the pellicle is fixed to the storage container by inserting a pin-shaped jig into the hole formed in the outer surface of the frame. There has also been proposed a method (see, for example, Patent Document 3).

  In addition, a method of fixing the pellicle to the storage container by sandwiching a horizontal protrusion formed on the outer surface of the frame body between a tray and a lid constituting the storage container has been proposed (see, for example, Patent Document 4 or 5). .)

  Further, not only the function of gripping and fixing the pellicle by the protrusions or grooves or holes formed on the outer surface of the frame body, various studies have been made on the frame shape of the pellicle. For example, in order to ensure the air permeability between the inside and the outside of the pellicle, it has been proposed to provide a hole with a filter penetrating from the outer surface to the inner surface of the frame (see, for example, Patent Document 6).

  Further, the distance (standoff) control from the pattern surface of the photomask to the pellicle film (see, for example, Patent Documents 7 to 9), the protrusion control of the mask adhesive material (for example, refer to Patent Document 10 or 11), and mask adhesion. In order to form a level difference in the material (see, for example, Patent Document 12) and to secure a pressurizing region at the time of application to a photomask (see, for example, Patent Document 13), a groove or Various shapes with protrusions and steps have been proposed.

  In recent years, with the increase in size of LCDs, photomasks and pellicles used therefor have also increased in size, and those with the longest side exceeding 1 m have been put on the market. In the future, increasing the size of pellicle and photomask is considered essential for increasing the size of LCD and improving production efficiency.

  In the case of a large photomask, the material is often a synthetic quartz substrate, and the material cost is very high. For this reason, the photomask size is generally designed to be as small as possible with respect to the set effective exposure area size.

  In the case of a large pellicle that is attached to a large photomask, the width of the frame of the pellicle that is affixed between the effective exposure area and the outer edge of the photomask is also limited due to restrictions on the photomask size. Even if the size is increased, the actual situation is that the width of the frame cannot be increased.

  Furthermore, since the distance (standoff) from the pattern surface of the photomask to the pellicle film is limited by the optical system of the exposure machine, the height of the frame is also limited. Even if the pellicle is enlarged, the frame The fact is that the height of can not be increased.

On the other hand, as a method for suppressing the deflection of the frame of a large pellicle having an area of the pellicle film of 1000 cm ² or more, it has been proposed that the width of the long side of the frame is made larger than the width of the short side (Patent Literature). 14).

  Also, in recent years, when a pellicle is removed from the storage container, the protective film and the adhesive material can be attached to the tray so that a manufacturer such as a mask can directly attach the pellicle to the mask when the pellicle is removed from the storage container. A method of taking out the pellicle from the interface is used, and a method of taking out the pellicle without causing distortion or bending of the pellicle at the time of taking out is required (see, for example, Patent Document 15).

JP-A-9-204039 JP 2005-326634 A JP 2006-267179 A Japanese Patent Laid-Open No. 10-48812 Japanese Patent Laid-Open No. 10-48811 JP 2001-133960 A JP 2002-182373 A JP 2002-182371 A JP 2000-298333 A JP 2005-338722 A JP 2000-292910 A Japanese Patent Laying-Open No. 2006-163035, FIG. JP 2005-308901 A JP 2001-109135 A JP 2007-017811 A

  As described above, in a large pellicle, due to restrictions on the width and height of the frame, the deflection of the side of the frame has become larger as the size of the pellicle increases. As a result of studying the production of a large pellicle having the longest side of 1.4 m to 2.0 m, the present inventor has found that it is extremely difficult to hold the frame by the conventional method.

  That is, as described in Patent Documents 1 to 5 described above, gripping or fixing by inserting jigs such as pins and slides into grooves and holes formed on the outer surfaces of two opposite sides of the frame. In the conventional method, due to the deflection of the side of the frame, jigs such as pins and slides can easily be removed from the grooves and holes, and it is no longer possible to grip and fix with the grooves and holes on the outer surface of the frame. It is in. For example, in the case of a method of inserting a pin into a hole (Patent Document 1) or a method of inserting a rotating lever into a groove (Patent Document 2), the load is concentrated because it becomes a support at almost one point on each side of the frame. It may easily come off due to the deflection of the side of the frame.

  High rigidity by changing the material of the frame is also considered as a countermeasure, but in view of the quality of dustlessness and the like required for the pellicle, the actual situation is that the material of the frame cannot be easily changed.

  Up to now, various frame shapes have been devised as described above, but basically, the shape of the frame within the range of the width and height of the restricted frame (For example, refer to Patent Documents 6 to 12), it does not sufficiently contribute to the high rigidity of the frame.

  Moreover, the device of the frame shape outside the range of the width / height of the frame has been studied (for example, see Patent Document 4 or 5). This can be said to be an excellent technique against the restrictions on the frame at the time of filing. That is, at the time of filing of Patent Document 4 or 5, the pellicle for LSI use was the mainstream, so the photomask size for LSI use is generally 5 to 7 inches (127 to 178 mm) on one side, and is used for liquid crystal displays (LCD). Therefore, it was possible to make the photomask size relatively larger than the pellicle size compared to the large photomask size. For this reason, the idea of the frame shape outside the range of the width and height of the frame has not been a problem.

  However, in order to reduce the size of the photomask as much as possible, that is, the size and width of the frame will be more than necessary to meet the challenges that will become more apparent as more large pellicles become more widespread in the future. There is a need to improve the method of gripping the pellicle for the problem that it cannot be increased.

  With regard to the take-out method, for example, while holding a pellicle in which a tab (pressing margin) corresponding to a protective film arranged near the center of the side of a rectangular frame is fixed to a pellicle storage container with an adhesive tape is held by a pellicle holder In addition, there is a method in which the pellicle is separated by separating the distance between the holder and the storage container while detecting the load applied to the pellicle holder (for example, Patent Document 13). However, in this method, in the case of a large pellicle, the tab (pressing allowance) arranged at the center of the side is held in the storage container with an adhesive tape, so even if it is peeled off while detecting the load, It is considered that the deflection of the frame cannot be avoided (see FIG. 9 of Patent Document 13).

  In other words, in addition to being able to securely grip the pellicle frame, there is a need for a method that allows the pellicle to be taken out without causing the frame to bend or twist when the pellicle is subsequently taken out of the storage container. is there. In particular, for large pellicles where the weight of the pellicle itself increases and handling becomes difficult, it is not only necessary to securely hold it during storage, transportation, and storage, but also directly after removal from the storage container. Therefore, there is a demand for a method for removing the pellicle from the interface between the protective film and the adhesive without causing distortion of the pellicle.

  That is, the present invention can reliably hold the pellicle frame during handling, storage, transport and storage, and generates distortion and deflection when affixed to a photomask or the like. There is provided a pellicle frame that allows a pellicle to be easily taken out of a storage container. Also provided is a method for gripping a large pellicle using the pellicle frame.

  As a result of intensive studies to solve the above-mentioned problems, the present inventors form convex or concave portions for gripping on all sides of the pellicle frame so as not to be restricted by the photomask. Thus, it was recalled that the above-mentioned problem of gripping a large pellicle having the longest side length of 1.4 m to 2.0 m could be solved. As a result of the examination, it was found that the means can be effectively used for a large pellicle having the longest side having a length of 1 m or more, and the present invention has been completed. That is, the present invention is as follows.

1. A method for removing a large pellicle from a storage container, wherein the frame of the large pellicle has a polygonal shape including a plurality of sides, and the frame is bonded to an upper edge surface of the frame. A pellicle film and an adhesive applied to the lower edge surface of the frame, the longest side of the frame having a length of 1 m or more, and the frame has all sides A method of taking out a large pellicle from a storage container, each having a gripping convex part or a concave part, and gripping and taking out at least one gripping convex part or concave part on all sides of the frame.
2. 2. The method for taking out a large pellicle from the storage container according to 1 above, wherein the gripping convex portion or concave portion is a groove or a hole.
3. 3. The method for taking out a large pellicle from the storage container according to 1 or 2 above, wherein all the convex portions or concave portions for gripping are grasped and taken out at all sides of the frame of the large pellicle.

  With the frame of the large pellicle of the present invention and the method of gripping the frame, it is possible to securely grip the frame when handling the pellicle and storing, transporting, and storing it. When pasting, the pellicle can be easily taken out from the storage container without causing distortion or deflection.

It is a perspective view for demonstrating one form (the recessed part for holding | grip is a groove | channel) of the frame of the large pellicle which concerns on this embodiment, and shows the large pellicle adhere | attached on the photomask. It is a figure explaining one form (a crevice for grasping is a groove) of a frame of a large-sized pellicle concerning this embodiment, and a partial expansion longitudinal section containing a frame is shown. It is a figure explaining one form (a crevice for grasping is a slot) concerning a frame of a large pellicle concerning this embodiment, and shows a frame of a large pellicle. It is a perspective view for demonstrating one form (The convex part for a holding | grip is plate shape) of the frame of the large pellicle which concerns on this embodiment, and shows the large pellicle adhere | attached on the photomask. It is a figure explaining one form (the convex part for a grip is plate shape) of the frame of the large sized pellicle concerning this embodiment, and the partial expansion longitudinal section containing a frame is shown. It is a figure explaining one form (the convex part for a holding | grip is plate shape) of the frame of the large pellicle which concerns on this embodiment, and shows the frame of a large pellicle. It is a perspective view for demonstrating one form of the frame of the conventional small pellicle, and shows the pellicle adhere | attached on the photomask. It is a figure for demonstrating one form of the frame of the conventional small pellicle, and the partial expanded longitudinal cross-sectional view containing the groove | channel of a frame is shown. It is a figure for demonstrating one form of the frame of the conventional small pellicle, and shows the frame of a pellicle. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example by which the groove | channel or hole for holding was dug from the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example by which the groove | channel or hole for holding was dug from the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example by which the groove | channel or hole for holding was dug from the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example by which the groove | channel or hole for holding was dug from the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example by which the groove | channel or hole for holding was dug from the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example by which the groove | channel or hole for holding was dug from the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example by which the groove | channel or hole for holding was dug from the outer surface of the frame. It is a partial expanded longitudinal sectional view which shows the various form examples of the frame body of the large pellicle concerning this embodiment, and is the form example by which the groove | channel or hole for holding was dug from the upper edge surface of the frame body. It is a partial expanded longitudinal sectional view which shows the various form examples of the frame body of the large pellicle concerning this embodiment, and is the form example by which the groove | channel or hole for holding was dug from the upper edge surface of the frame body. It is a partial expanded longitudinal sectional view which shows the various form examples of the frame body of the large pellicle concerning this embodiment, and is a form example by which the groove | channel or hole for holding was dug from the lower edge surface of the frame body. It is a partial expanded longitudinal sectional view which shows the various form examples of the frame body of the large pellicle concerning this embodiment, and is a form example by which the groove | channel or hole for holding was dug from the lower edge surface of the frame body. It is a partial expanded longitudinal sectional view which shows the various form examples of the frame of the large pellicle according to the present embodiment, and is an example in which a gripping groove or hole is dug from the inner surface of the frame. It is a partial expanded longitudinal sectional view which shows the various form examples of the frame of the large pellicle according to the present embodiment, and is an example in which a gripping groove or hole is dug from the inner surface of the frame. It is a partial expanded longitudinal sectional view which shows the various form examples of the frame of the large pellicle according to the present embodiment, and is an example in which a gripping groove or hole is dug from the inner surface of the frame. It is a partial expanded longitudinal sectional view which shows the various form examples of the frame of the large pellicle according to the present embodiment, and is an example in which a gripping groove or hole is dug from the inner surface of the frame. It is a partial expanded longitudinal sectional view which shows the various form examples of the frame of the large pellicle according to the present embodiment, and is an example in which a gripping groove or hole is dug from the inner surface of the frame. It is a partial expanded longitudinal sectional view which shows the various form examples of the frame of the large pellicle according to the present embodiment, and is an example in which a gripping groove or hole is dug from the inner surface of the frame. It is a partial expanded longitudinal sectional view which shows the various form examples of the frame of the large pellicle according to the present embodiment, and is an example in which a gripping groove or hole is dug from the inner surface of the frame. It is the elements on larger scale which show the various examples of the frame of the large-sized pellicle which concerns on this embodiment, and is an example with which the groove | channel or the hole for holding was provided with two or more. It is the elements on larger scale which show the various examples of the frame of the large-sized pellicle which concerns on this embodiment, and is an example with which the groove | channel or the hole for holding was provided with two or more. It is the elements on larger scale which show the various examples of the frame of the large-sized pellicle which concerns on this embodiment, and is an example with which the groove | channel or the hole for holding was provided with two or more. It is the schematic of the direction which looks at the pellicle film | membrane for demonstrating arrangement | positioning of the groove | channel for a holding | grip in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which looks at the pellicle film | membrane for demonstrating arrangement | positioning of the groove | channel for a holding | grip in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which looks at the pellicle film | membrane for demonstrating arrangement | positioning of the groove | channel for a holding | grip in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which looks at the pellicle film | membrane for demonstrating arrangement | positioning of the groove | channel for a holding | grip in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which looks at the pellicle film | membrane for demonstrating arrangement | positioning of the groove | channel for a holding | grip in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which looks at the pellicle film for demonstrating arrangement | positioning of the groove | channel for a holding | grip in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which looks at the pellicle film | membrane for demonstrating arrangement | positioning of the groove | channel for a holding | grip in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic seen from the side surface direction of the frame for demonstrating arrangement | positioning of the groove | channel for holding | grip in the frame of the large pellicle which concerns on this embodiment. It is the schematic seen from the side surface direction of the frame for demonstrating arrangement | positioning of the groove | channel for holding | grip in the frame of the large pellicle which concerns on this embodiment. It is a partial expanded longitudinal cross-sectional view for demonstrating an example of a form when holding and fixing the frame of the large pellicle which concerns on this embodiment with a holding member. It is a partial expanded longitudinal cross-sectional view for demonstrating an example of a form when holding and fixing the frame of the large pellicle which concerns on this embodiment with a holding member. It is a partial expanded longitudinal cross-sectional view for demonstrating an example of a form when holding and fixing the frame of the large pellicle which concerns on this embodiment with a holding member. It is a partial expanded longitudinal cross-sectional view for demonstrating an example of a form when holding and fixing the frame of the large pellicle which concerns on this embodiment with a holding member. It is a partial expanded longitudinal cross-sectional view for demonstrating an example of a form when holding and fixing the frame of the large pellicle which concerns on this embodiment with a holding member. It is a figure for demonstrating the example of the form of the groove | channel for holding | grip in the frame of the large pellicle which concerns on this embodiment, and is the partial schematic seen from the outer surface direction of the frame. It is a figure for demonstrating the form example of the groove | channel for holding | grip in the frame of the large pellicle which concerns on this embodiment, and is the partial schematic diagram seen from the direction which sees a pellicle film | membrane. It is a figure for demonstrating the form example of the groove | channel for holding | grip in the frame of the large pellicle which concerns on this embodiment, and is the partial schematic diagram seen from the direction which sees a pellicle film | membrane. It is a figure for demonstrating the form example of the groove | channel for holding | grip in the frame of the large pellicle which concerns on this embodiment, and is the partial schematic diagram seen from the direction which sees a pellicle film | membrane. It is a figure for demonstrating arrangement | positioning of the hole provided in the corner part in the frame of a large pellicle, and is the partial schematic seen from the outer surface direction of the frame. It is a figure for demonstrating arrangement | positioning of the hole provided in the corner part in the frame of a large pellicle, and is the partial schematic seen from the direction which looks at a pellicle film | membrane. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the outer surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the upper edge surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the upper edge surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the upper edge surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the upper edge surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the lower edge surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the lower edge surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the lower edge surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the lower edge surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the inner surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the inner surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the inner surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the inner surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the inner surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the inner surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is an example with which the protrusion part was provided in the inner surface of the frame. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example with which several protrusion part was provided. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example with which several protrusion part was provided. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example with which several protrusion part was provided. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example with which several protrusion part was provided. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example with which several protrusion part was provided. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example with which several protrusion part was provided. It is a partial expanded longitudinal cross-sectional view which shows the various form examples of the frame of the large sized pellicle which concerns on this embodiment, and is a form example with which several protrusion part was provided. It is the schematic of the direction which sees the pellicle film for demonstrating arrangement | positioning of a protrusion part in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which sees the pellicle film for demonstrating arrangement | positioning of a protrusion part in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which sees the pellicle film for demonstrating arrangement | positioning of a protrusion part in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which sees the pellicle film for demonstrating arrangement | positioning of a protrusion part in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which sees the pellicle film for demonstrating arrangement | positioning of a protrusion part in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which sees the pellicle film for demonstrating arrangement | positioning of a protrusion part in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which sees the pellicle film for demonstrating arrangement | positioning of a protrusion part in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which sees the pellicle film for demonstrating arrangement | positioning of a protrusion part in the frame of the large sized pellicle which concerns on this embodiment. It is the schematic of the direction which sees the pellicle film for demonstrating arrangement | positioning of a protrusion part in the frame of the large sized pellicle which concerns on this embodiment. FIG. 6 is a partially enlarged longitudinal sectional view showing a configuration in which a protrusion provided on a frame of a large pellicle is detachably fixed to a side of the frame, and shows screwing. FIG. 5 is a partially enlarged vertical sectional view showing a configuration in which a protrusion provided on a frame of a large pellicle is detachably fixed to a side of the frame, showing fixation by a coupler. FIG. 5 is a partially enlarged longitudinal sectional view when a protrusion provided on a frame of a large pellicle is detachably fixed to a side of the frame, and shows fixation by an elastic body. FIG. 5 is a partially enlarged longitudinal sectional view showing a configuration in which a protrusion provided on a frame of a large pellicle is detachably fixed to a side of the frame, showing fixation by pinching. It is a perspective view for demonstrating the other form (a protrusion part is rod shape) of the frame of the large pellicle which concerns on this embodiment, and shows the large pellicle adhere | attached on the photomask. It is a perspective view for demonstrating the other form (a protrusion part is rod shape) of the frame of the large pellicle which concerns on this embodiment, and shows the frame of a large pellicle. FIG. 13 is a schematic view in the direction of viewing a pellicle film for explaining the arrangement of rod-like protrusions in the frame of the large pellicle according to the present embodiment, and is the same as that in FIG. This is a case where protrusions are provided one by one. FIG. 13 is a schematic view in the direction of viewing a pellicle film for explaining the arrangement of rod-like protrusions in the frame of the large pellicle according to the present embodiment, and is the same as the form of FIG. This is a case where protrusions are provided one by one, and further, one protrusion is provided at each of the four corners. FIG. 13 is a schematic view in the direction of viewing the pellicle film for explaining the arrangement of the rod-like protrusions in the frame of the large pellicle according to the present embodiment, and is the same as the form of FIG. This is the case of integration. It is the elements on larger scale which include the protrusion part provided in the frame of the large pellicle, the protrusion part is L-shaped, and the side part where the front-end | tip bent is in contact with the photomask was shown. It is the elements on larger scale which include the protrusion part provided in the frame of a large pellicle, the protrusion part is L-shaped, and the front-end | tip stuck in the groove | channel provided in the photomask was shown. FIG. 5 is a partially enlarged longitudinal sectional view when a large pellicle is fixed by combining another part with a protrusion provided on a frame of the large pellicle. FIG. 5 is a partially enlarged longitudinal sectional view for explaining a state in which the frame body of the large pellicle according to the present embodiment is gripped / fixed by a gripping member, and shows a mode in which a protrusion having a rectangular cross section is gripped / fixed. It is a partial enlarged longitudinal sectional view for explaining a state when the frame body of the large pellicle according to the present embodiment is gripped and fixed by a gripping member, and is a protrusion provided on the outer side surface of the frame body, and the cross section is The form which hold | gripped and fixed the L-shaped protrusion part was shown. FIG. 6 is a partially enlarged longitudinal sectional view for explaining a state when the frame body of the large pellicle according to the present embodiment is gripped / fixed by a gripping member, and is a protrusion provided on the upper edge surface of the frame body, Shows a form in which the L-shaped protrusion is held and fixed. It is a partial enlarged vertical sectional view for explaining a state when the frame body of the large pellicle according to the present embodiment is held and fixed by the holding member, and is a protrusion provided on the inner surface of the frame body. The form which grasped and fixed the rectangular projection part was shown. 3 is a schematic diagram illustrating a planar shape of a protective film used in Example 1. FIG.

  Embodiments of the present invention will be described with reference to the accompanying drawings. The embodiment described below is an example of the configuration of the present invention, and the present invention is not limited to the following embodiment. Various modifications may be made as long as the effects of the present invention are achieved.

  The frame body of the large pellicle of the present invention is a frame body having a polygonal shape consisting of a plurality of sides, and a pellicle film bonded to the upper edge surface of the frame body, and a lower edge surface of the frame body. In the frame body of the large pellicle, the longest side of the frame body is 1 m or more in length, and the frame body has convex grips on all sides. It has a part or a recessed part. Here, the polygonal shape of the frame is generally a substantially quadrangular shape, but may be a polygonal shape having notches or R portions at corners.

  FIG. 1A is a perspective view for explaining one form of a frame of a large pellicle according to the present embodiment. FIGS. 1A and 1D include a large pellicle bonded to a photomask, and FIGS. 1B and 1E include a frame. Partially enlarged longitudinal sectional views, FIGS. 1C and F show a frame of a large pellicle. FIG. 2 is a perspective view for explaining one form (for example, the type of Patent Document 2) of a frame body of a conventional small pellicle, FIG. 2A is a pellicle bonded to a photomask, and FIG. 2B is a groove of the frame body FIG. 2C shows a frame of a pellicle.

  For example, as shown in FIG. 1, the large pellicle includes a frame body 10, a pellicle film 1 bonded to the upper edge surface 3 of the frame body 10, and an adhesive material 2 applied to the lower edge surface 4 of the frame body 10. It consists of. Here, the pellicle film 1 is bonded to the upper edge surface 3 of the frame 10 via an adhesive (not shown). In FIGS. 1A and 1B, the pellicle frame 10 is bonded to the photomask 9 via the adhesive material 2. Before being bonded to the photomask 9, the large pellicle has a structure in which a protective film (not shown) is adhered to the lower edge surface 4 of the frame body 10 via the adhesive material 2.

  As the material of the pellicle film 1, the material / shape of the adhesive material 2, the material of the adhesive, and the material / shape of the protective film, those conventionally used can be used.

  As the pellicle film, a transparent polymer film such as nitrocellulose, a cellulose derivative, or a fluoropolymer can be used. The thickness of the pellicle film is set in consideration of light transmittance and film strength. For example, the thickness is preferably 10 μm or less and 0.1 μm or more. An adhesive such as an acrylic resin adhesive, an epoxy resin adhesive, a silicone resin adhesive, or a fluorine-containing silicone adhesive is used to bond the pellicle film to the upper edge surface of the frame.

  As the adhesive, styrene ethylene butylene styrene, styrene ethylene propylene styrene, olefin-based hot-melt adhesive, silicone adhesive, acrylic adhesive, or an adhesive tape based on a foam can be used. The thickness of the adhesive material layer is set so that the total thickness of the frame and the adhesive material does not exceed the prescribed distance between the film and the mask. For example, the thickness is preferably 10 mm or less and 0.01 mm or more.

  As the protective film, a film made of polyethylene terephthalate resin or polyethylene resin can be used. A release agent such as a silicone release agent or a fluorine release agent may be applied to the surface of the protective film according to the adhesive strength of the adhesive material. The thickness of the protective film is preferably, for example, 1 mm or less and 0.01 mm or more.

  The material of the frame 10 is not particularly limited as long as the mechanical strength is maintained. For example, metals, resins, composites, and more specifically, aluminum and its alloys such as duralumin, iron and iron alloys such as stainless steel, engineering plastics, fiber reinforced plastics (FRP), and carbon fiber reinforced plastics. (CFRP). In view of the increase in weight due to the increase in size, it is preferable to use a lightweight and rigid material, such as aluminum or an alloy thereof.

  The manufacturing method of the frame 10 may be a manufacturing method generally performed conventionally. For example, a single plate may be cut and cut. If it is difficult to prepare an integral plate as the pellicle becomes larger, in addition to cutting and cutting, welding and molding (die casting if metal, injection molding if resin) are listed. It is done. At this time, it is preferable to integrally mold the gripping convex portion or concave portion. However, as will be described later, it is also preferable that the convex portion is molded as a detachable part and attached later.

  Further, the surface of the frame may be subjected to blackening treatment such as black chrome plating, black alumite, or black coating for preventing reflection. Moreover, you may apply | coat an adhesive material in order to capture a foreign material on the inner surface of a frame.

  The frame 10 of the large pellicle according to the present embodiment has the length of the longest side (hereinafter also referred to as “long side”. Similarly, the shortest side of the frame is also referred to as “short side”). The object is a large pellicle frame that is 1 m or longer. The width of the frame (FIGS. 1B and 1E) is equal to the length of the frame and the sides of the frame (the length L of the long side and the length S of the short side in FIGS. 1A and 1D). w) The height (h in FIGS. 1B and 1E) is small, and the rigidity must be lower than that of a small pellicle frame.

  When the length L of the long side of the frame 10 is 1 m or more, the tendency for the rigidity to decrease is noticeable. In the conventional pellicle frame 30 for LSI as shown in FIG. 2, the long side length L is at most 15 cm and the short side length S is at most 13 cm, and the width w of the frame 30 is at most And the height h were (w / h) = 0.3 to 0.8. However, in the frame of the large pellicle targeted by the present invention, the length L of the long side is 1 m or more, sometimes reaching 2 m, and may be further increased in size in the future. Note that the length S of the short side is, for example, 75 cm or more at the short side. Further, since the ratio of the width w to the height h of the frame of the large pellicle is large, for example, (w / h) = 1.5 to 4.0, the reduction in rigidity is large, and (w / h) In the frame body of = 2.3 to 4.0, the decrease in rigidity is particularly large. Note that (w / h) may exceed 4 due to further enlargement.

  Therefore, in the frame of the large pellicle targeted by the present invention, the amount of deflection in the normal direction of the surface of the pellicle film is very large as compared with the conventional frame. As described above, the way of bending the frame of the large pellicle is completely different from the way of bending the conventional small pellicle. Furthermore, since the ratio (w / h) of the width w to the height h of the frame is larger than that of the conventional frame and the sides of the frame itself are long, the tension of the pellicle film The amount of deflection in the direction parallel to the surface also increases. In the frame of the large pellicle according to the present embodiment, it is possible to correct the deformation of the frame due to the tension of the pellicle film by using the convex or concave portions for gripping. This point will be described later.

  The frame of the present invention is generally a rectangle similar to the mask shape, but is not particularly limited as long as it corresponds to various shapes such as a mask and is a polygonal frame. In the present invention, a frame having a long side length of 1 m or more is targeted. However, if the shape of the frame is (1) a rectangle, the long side has a length of 1 m or more, (2 ) In the case of a square, a frame with a side length of 1 m or more, and (3) in the case of a polygon, a frame with a longest side length of 1 m or more. In the present invention, when the conditions described below are satisfied, the effect is further improved.

  First, an aspect in which the frame is a frame having gripping recesses on all sides will be described. The recess includes a groove or a hole. In the present invention, the groove is a recess formed on the outer surface, inner surface, upper edge surface, or lower edge surface of the frame body, and the circumferential length of the opening of the recess on these surfaces. Means a hole whose length in the height direction of the opening is 1.5 times or more, and a hole is a length in the circumferential direction of the opening that is one of the length in the height direction of the opening. It means less than 5 times.

  A gripping groove or hole formed in the frame will be described. FIG. 3 is a partially enlarged longitudinal sectional view showing various forms of the frame body of the large pellicle according to the present embodiment, and FIGS. 3A to 3G are forms in which a gripping groove or hole is dug from the outer surface of the frame body. It is an example. FIG. 4 is a partially enlarged longitudinal sectional view showing various examples of the frame body of the large pellicle according to the present embodiment, and FIGS. 4A to 4B show a groove or hole for gripping from the upper edge surface of the frame body. It is a form example. FIG. 5 is a partially enlarged longitudinal sectional view showing various forms of the frame body of the large pellicle according to the present embodiment, and FIGS. 5A to 5B show a groove or hole for gripping from the lower edge surface of the frame body. It is a form example. FIG. 6 is a partially enlarged longitudinal sectional view showing various forms of the frame body of the large pellicle according to the present embodiment. FIGS. 6A to 6G are forms in which a gripping groove or hole is dug from the inner surface of the frame body. It is an example.

  As shown in FIG. 3, the frame 10 of the large pellicle according to the present embodiment has a gripping groove or hole 7 directed inward from the outer surface 5 of the frame. Hereinafter, when there is no notice, it demonstrates as the groove | channel or hole 7 for a grip, without distinguishing a groove | channel and a hole.

  Further, as shown in FIG. 4, the frame 10 of the large pellicle according to the present embodiment may have a gripping groove or hole 7 facing downward from the upper edge surface 3 of the frame. Further, as shown in FIG. 5, the frame 10 of the large pellicle according to the present embodiment may have a gripping groove or hole 7 facing upward from the lower edge surface 4 of the frame. Further, as shown in FIG. 6, the frame body 10 of the large pellicle according to the present embodiment may have a gripping groove or hole 7 directed outward from the inner side surface 6 of the frame body.

  The surface of the frame to be provided with the gripping groove or hole can be set according to the design of the jig or device used for gripping. Preferred above. In addition, when a grip groove or hole is provided on the outer surface or the inner surface of the frame body, an extra force does not act on the adhesive layer of the pellicle film adhesive layer or the mask during gripping. It is preferably provided at a position separated from the upper edge surface and the lower edge surface. Therefore, it is more preferable that the gripping grooves or holes are provided on the outer surface of the frame body and at positions separated from the upper edge surface and the lower edge surface.

  The holding groove or hole 7 facing downward from the upper edge surface 3 of the frame body is dug in an oblique direction with respect to the normal direction in addition to the form dug in the normal direction of the upper edge surface 3. It is good also as a form. The holding groove or hole 7 facing upward from the lower edge surface 4 of the frame body is dug in an oblique direction with respect to the normal direction in addition to the shape dug in the normal direction of the lower edge surface 4. It is good also as a form. The groove or hole 7 for gripping facing the outer side from the inner side surface 6 of the frame body is not only in the form of being dug in the normal direction of the inner side surface 6 but also in the form of being dug in an oblique direction with respect to the normal direction. Also good. The depth of the groove or hole 7 for gripping is 0.01 to 0.9 times the width of the frame body in the case of the groove or hole 7 dug from the outer surface or the inner surface with reference to the surface of the frame body. The depth is preferable, a depth of 0.01 to 0.5 times is more preferable, and a depth of 0.01 to 0.3 times is more preferable. Further, in the case of the groove or hole 7 dug from the upper edge surface or the lower edge surface, the depth is preferably 0.1 to 1 times the height of the frame (where 1 times is the case of penetration), 0 A depth of 1 to 0.5 times is more preferable, and a depth of 0.1 to 0.3 times is more preferable.

  Further, the frame body 10 of the large pellicle according to the present embodiment may have a plurality of gripping grooves or holes 7 on each side of the frame body as shown in FIG. FIG. 7 is a partially enlarged longitudinal sectional view showing various examples of the frame body of the large pellicle according to the present embodiment, and FIGS. 7A to 7C are examples in which a plurality of gripping grooves or holes are provided. As a combination, in the case of having two gripping grooves or holes facing downward from the upper edge surface of the frame and two gripping grooves or holes facing upward from the lower edge surface of the frame, There are cases in which there are two gripping grooves or holes facing downward from the upper edge surface and two gripping grooves or holes facing outward from the inner surface of the frame (for example, FIG. 7A). In addition, there may be two gripping grooves or holes facing upward from the lower edge surface of the frame and two gripping grooves or holes facing outward from the inner surface of the frame (for example, FIG. 7C).

  In the frame 10 of the large pellicle according to the present embodiment, a gripping groove or hole facing downward from the upper edge surface of the frame, or a gripping groove or hole facing upward from the lower edge surface of the frame Alternatively, each of the holding grooves or holes facing outward from the inner surface of the frame has a gripping groove or hole facing inward from the outer surface of the frame. Also good. For example, in the case of having two gripping grooves or holes facing inward from the outer surface of the frame and two gripping grooves or holes facing downward from the upper edge surface of the frame (for example, FIG. 7B) If there are two gripping grooves or holes facing inward from the outer surface of the frame and two gripping grooves or holes facing upward from the lower edge surface of the frame, the inner direction from the outer surface of the frame There are cases where there are two gripping grooves or holes facing toward the outside and two gripping grooves or holes facing outward from the inner surface of the frame.

  Further, there is a form in which a gripping groove or hole is dug from three of the four surfaces of the frame, or a form in which a gripping groove or hole is dug from all four surfaces of the frame. By providing gripping grooves or holes on a plurality of surfaces of the frame, gripping and fixing become more reliable. There is also an advantage that two or more types of gripping tools that grip different surfaces of the frame can be handled by the same single frame.

  In addition to the gripping groove or hole 7 described above, the frame 10 of the large pellicle according to the present embodiment has a ventilation hole (when the pellicle is attached to the mask, the pellicle, the space confined by the mask, the outside, May have holes or grooves used for other purposes, such as holes used for ventilation. In order to provide a hole or groove for use in such another application, it is necessary that the gripping convex part or concave part be a groove or hole partially provided in the side part of the frame. The degree of freedom is higher, which is more preferable.

  The cross-sectional shape of the gripping groove or hole 7 is rectangular (for example, FIG. 6A), trapezoid (for example, FIG. 4A, FIG. 5A, FIG. 6E), polygonal, circular / semicircular or elliptical (for example, FIG. 6B), etc. Does not matter. Further, for example, as shown in FIG. 4A, the groove width or the inner diameter of the hole may be reduced along the direction in which the groove or the hole becomes deeper. If necessary, the curvature R or the C surface may be provided at the corner of the groove or hole.

  In the frame of the large pellicle according to the present embodiment, it is preferable that the gripping groove or hole 7 has a space portion 7a that extends to the back. For example, it is L-shaped (for example, FIGS. 3C, 4B, 5B, 6C and G, and 7C) and T-shaped (for example, FIGS. 3D and 6D). Compared with the case where there is no space portion 7a that extends in the back, the gripping member can be hooked, so gripping and fixing are more reliable. In addition, as the shape of the space portion that extends in the back, even if the cross-sectional shape in the width direction of the frame body extends in the back as described above, or the cross-sectional shape in the height direction of the frame body extends in the back, The cross-sectional shape in the length direction of the frame may be widened to the back.

  It is also preferable to have a space portion in which a grip groove or hole is narrowed in the back. In this case, when a gripping member smaller than the entrance of the groove or hole is inserted, the gripping member is positioned in contact with the narrowed portion at the back, thereby preventing the gripping member from being displaced with respect to the groove or hole. Can be gripped. As the shape of the space portion narrowed in the back, even if the cross-sectional shape in the width direction of the frame is narrowed in the back as shown in FIGS. 3B, 4A, and 5A, the cross-sectional shape in the height direction of the frame is It may be narrowed in the back or may have a cross-sectional shape in the length direction of the frame narrowed in the back.

  As an example of the cross-sectional shape in the length direction of the frame, which is narrow in the back, there is a circumferential groove partially present on the side, and the circumferential length of the opening of the groove is the groove. The groove is larger than the depth of the groove (referred to as the shortest distance between the opening of the groove and the deepest part of the groove) (see FIG. 12). Further, there is a case where the circumferential length of the opening of the groove is smaller than the depth of the groove of the groove. A frame having a gripping portion having such a shape can be gripped while being positioned by a plate-shaped gripping tool whose tip is narrowed in the groove. The ratio of the length of the groove opening in the circumferential direction to the groove depth is preferably 0.5 to 30 times, more preferably 2 to 20 times, and most preferably 3 to 10 times. If the ratio is 0.5 or more, the gripping member can be easily inserted, and if the ratio is 30 or less, the gripping tool is not easily detached.

  As shown in FIG. 3, the frame of the large pellicle according to the present embodiment has a holding groove having a space portion 7a extending inward from the outer surface 5 of the frame 10 and extending inward. Or it is the form which has the hole 7. FIG. Here, the gripping grooves or holes 7 facing inward from the outer surface 5 of the frame body are dug in an oblique direction with respect to the normal direction in addition to the form dug in the normal direction of the outer surface 5. It is good also as a form. The shape of the space portion 7a extending in the back of the frame of the large pellicle according to the present embodiment is, for example, an L shape (for example, FIGS. 3C and G) and a T shape (for example, FIG. 3D). Compared with the case where there is no space portion 7a extending in the back, the gripping member can be hooked, so that gripping is more reliable.

  8 and 9 are schematic views in the direction of viewing the pellicle film for explaining the arrangement of the holding grooves or holes 7 in the frame of the large pellicle according to the present embodiment. As shown in FIGS. 8A, C and D and FIG. 9, the arrangement of the gripping grooves or holes 7 extends over the entire periphery of the side of the frame 10 as long as there are gripping recesses on all four sides. May be arranged (FIG. 8A), or may be partially arranged on the side of the frame 10 (FIGS. 8C to 9D, 9A to 9C). In the case of partial arrangement, it is possible to arrange a gripping groove or hole at a specific position of the frame body in accordance with the position of a gripping member such as a jig or a device. In the case where a gripping groove is partially disposed, it is preferably disposed on any side portion of the frame. When gripping the frame of the pellicle, it is possible to uniformly disperse the load due to its own weight, and to suppress the occurrence of deflection. On the other hand, as shown in a comparative example to be described later, in an aspect (FIG. 8B) having gripping convex portions or concave portions on only two opposing sides, the occurrence of bending cannot be sufficiently suppressed.

  When the holding recess is a groove in the frame of the large pellicle according to the present embodiment, the length occupied by the holding recess with respect to the length of each side is 10% or more. It is more preferable that the uneven load can be uniformly dispersed. More preferably, it is 20% or more, and most preferably 30% or more. In addition, when it is necessary to leave room for forming a part having a function other than gripping in the frame, the length occupied by the gripping recesses is 90% or less of the length of each side. It is preferable that More preferably, it is 80% or less, and most preferably 70% or less. It is preferable that the arrangement of the holding recesses on each side is symmetric with respect to the center of each side so that the load bias due to its own weight can be uniformly dispersed.

  When the holding recesses are holes in the frame of the large pellicle according to the present embodiment, it is preferable to arrange a plurality of them at any side of the frame. When gripping the frame of the pellicle, it is possible to uniformly disperse the load due to its own weight, and to suppress the occurrence of deflection.

  In the frame of the large pellicle according to the present embodiment, the holding groove 7 may be a stepped groove lacking one side of the side wall of the groove. Further, the holding hole 7 may be a vertically split cylindrical hole lacking one side of the side wall surface of the hole. That is, in the holding groove or hole 7, the side wall surface of the groove or the side wall surface of the hole may constitute a part of the surface of the frame body 10. As such a form, for example, there is a groove or hole having a shape in which the side wall surface of the groove or hole reaches the surface of the frame body and the side wall surface of the groove or hole is dug from the surface of the frame body. In addition, the hole of the vertically divided cylinder includes a hole cut in a longitudinal section not passing through the main axis as well as a hole having a semicircular cross section cut along a longitudinal section passing through the main axis. Examples of the cross-sectional shape are, for example, FIGS. 3F and G, FIGS. 6F and G, and FIG. 7B. In particular, a mode in which the side wall surface of the groove or the side wall surface of the hole constitutes a part of the lower edge surface of the frame body 10 (for example, FIGS. 3F and G, FIGS. 6F and G, and FIG. 7B) is preferable. Although the adhesive material 2 is affixed to the lower edge surface 4 of the frame 10, the distance between the lower edge surface 4 and the surface of the photomask 9 increases by the thickness of the adhesive material 2. Is easy to insert, and the diameter of the groove or hole can be reduced, so there is little risk of a decrease in the strength of the frame. However, when using the frame of the above-mentioned form, it is necessary to take care not to apply an excessive force to the adhesive material layer or the bonded portion of the pellicle film during gripping.

  In the frame of the large pellicle according to this embodiment, in order to prevent dust generation, the contact portion between the groove or hole and the gripping member may be subjected to some surface treatment on at least one of the groove or hole or the gripping member. good. For example, covering with cushion materials, such as silicone rubber, is mentioned.

  FIG. 10 is a schematic view seen from the side of the frame for explaining the arrangement of the gripping grooves 7 in the frame of the large pellicle according to the present embodiment. As shown in FIG. 10A, the gripping grooves 7 can be arranged obliquely from the upper edge surface side to the lower edge surface side in the side direction when viewed from the side surface direction of the frame body. Furthermore, as shown in FIG. 10B, it is also possible to repeatedly arrange in the side direction from the upper edge surface side to the lower edge surface side and from the lower edge surface side to the upper edge surface side as seen from the side surface direction of the frame. .

  Moreover, you may provide the hole penetrated in the diagonal direction as described in FIG. 13 in four corner parts in the outer surface of a frame. By providing such a through hole, it is possible to hold the through hole through a rod-shaped jig.

  In the frame of the large pellicle according to the present embodiment, the width of each groove or the inner diameter of the hole is smaller than the width W or height h of the frame on which the groove is provided, for example, on the upper edge surface 3 or the lower edge surface 4. When providing, the length of 0.01-1 times the width of a frame is preferable, the length of 0.01-0.5 times is more preferable, and 0.01-0.2 times is further more preferable. For example, when it is provided on the outer side surface 5 or the inner side surface 6, a length of 0.01 to 1 times the height of the frame body is preferable, a length of 0.01 to 0.5 times is more preferable, and 0.01 More preferably, it is -0.2 times. In addition, when the depth of a groove | channel or a hole is large, in order to avoid the fall of the rigidity of a frame, the one where the width | variety of a groove | channel or the internal diameter of a hole is small is preferable. When the space 7a that expands in the depth of the holding groove or hole 7 is provided, the width or inner diameter of the expanded space 7a is made smaller than the width W or height h of the frame.

  The holding groove or hole 7 is used for holding the pellicle frame (including both holding the frame before bonding the pellicle film and holding the frame after bonding the pellicle film). It is effectively used when handling the pellicle, when storing the pellicle in the storage container, and when taking out the pellicle from the storage container.

  A method of gripping and fixing a gripping groove or hole with a gripping member will be described. FIG. 11 is a partially enlarged vertical cross-sectional view for explaining a state in which the frame body of the large pellicle according to the present embodiment is held and fixed by the holding member, and FIG. 11A is for holding a T-shaped cross section. A gripping member 16 having a locking mechanism formed of an elastic body such as plastic is inserted into the groove or hole 7 and gripped and fixed. FIG. 11B is a grip with an L-shaped cross section provided on the upper edge surface of the frame body. FIG. 11C shows a configuration in which a grip member 16 having an L-shaped hook portion is inserted into a groove or hole 7 for gripping and fixing, FIG. 11C is an L-shaped cross section provided on the outer surface of the frame body, and the side wall surface is a frame FIG. 11D is a cross-sectional view of the lower edge surface of the frame body, in which a gripping member 16 having an L-shaped hook portion is inserted into a gripping groove or hole 7 constituting a part of the surface of the body. Has a trapezoidal gripping groove or hole 7 and an L-shaped grip FIG. 11E shows a state in which the tip of the material 16 is inserted and held and fixed. FIG. 11E shows that the holding member 16 is inserted and held and fixed in a holding groove or hole 7 having a rectangular cross section provided on the inner surface of the frame. The form. 11A to 11E, the gripping member 16 securely grips and fixes the gripping groove or hole.

  In the present invention, it is preferable to simultaneously grip at least one gripping convex portion or concave portion in each side portion of the frame body of the large pellicle described above in order to reduce bending. More preferably, all the convex portions or concave portions for gripping are simultaneously gripped at each side portion of the frame body of the large pellicle.

  Further, when the pellicle is peeled off from the photomask, it can be peeled after gripping the groove or hole for gripping, so that the peeling force can be reliably transmitted at the time of peeling.

  Secondly, an aspect in which the frame body has gripping convex portions on all the side portions will be described. As this convex part, there exist a plate-shaped thing or a rod-shaped thing. In the present invention, the plate-like convex portion is a convex portion formed on the outer side surface, inner side surface, upper edge surface, or lower edge surface of the frame, and the periphery of the convex portion on these surfaces. The length in the direction is 1.5 times or more the length in the height direction. The rod-shaped convex part is the length in the circumferential direction of the convex part in the height direction of the convex part. Is less than 1.5 times.

  First, the convex part (henceforth "protrusion part") formed in the frame is demonstrated. FIG. 14 is a partially enlarged longitudinal sectional view showing various forms of the frame body of the large pellicle according to the present embodiment, and FIGS. 14A to 14G are forms in which a protrusion is provided on the outer surface of the frame body. FIGS. 15A and 15B are partially enlarged longitudinal sectional views showing various examples of the frame of the large pellicle according to the present embodiment, and A to D are examples in which a protrusion is provided on the upper edge surface of the frame. FIG. 16 is a partially enlarged longitudinal sectional view showing various forms of the frame of the large pellicle according to the present embodiment, and A to D are forms in which a protrusion is provided on the lower edge surface of the frame. FIG. 17 is a partially enlarged longitudinal sectional view showing various examples of the frame of the large pellicle according to the present embodiment, and A to G are examples in which protrusions are provided on the inner side surface of the frame.

  As shown in FIG. 14, the frame 10 of the large pellicle according to the present embodiment has a protruding portion 7 that faces outward from the outer surface 5 of the frame. Further, the frame body 10 of the large pellicle according to the present embodiment may have a protruding portion 7 directed upward from the upper edge surface 3 of the frame body as shown in FIG. Further, the frame body 10 of the large pellicle according to the present embodiment may have a protruding portion 7 directed downward from the lower edge surface 4 of the frame body as shown in FIG. Further, the frame 10 of the large pellicle according to the present embodiment may have a protruding portion 7 directed inward from the inner side surface 6 of the frame as shown in FIG.

  Here, the projecting portion 7 directed outward from the outer surface 5 of the frame body may be configured to project in an oblique direction with respect to the normal direction in addition to the configuration projecting in the normal direction of the outer surface 5. The protruding portion directed upward from the upper edge surface 3 of the frame body may have a shape protruding in an oblique direction with respect to the normal direction in addition to a shape protruding in the normal direction of the upper edge surface 3. The protruding portion 7 directed downward from the lower edge surface 4 of the frame body may have a shape protruding in an oblique direction with respect to the normal direction in addition to a shape protruding in the normal direction of the lower edge surface 4. The protruding portion 7 directed inward from the inner side surface 6 of the frame may have a shape protruding obliquely with respect to the normal direction in addition to a shape protruding in the normal direction of the inner side surface 6. The amount of protrusion of the protruding portion directed outward from the outer surface of the frame and the protruding portion directed inward from the inner surface of the frame is 0.1 of the width of the frame on the basis of the surface of the protruding frame. The length is 10 to 10 times, preferably 0.1 to 5 times, and more preferably 0.1 to 3 times. In addition, the amount of protrusion of the projecting portion facing upward from the upper edge surface of the frame and the projecting portion facing downward from the lower edge surface of the frame is based on the width of the frame body based on the surface of the projecting frame body. The length is 0.1 to 10 times, preferably 0.1 to 5 times, and more preferably 0.1 to 3 times.

  When the protrusion 7 directed upward from the upper edge surface 3 of the frame is provided and when the protrusion 7 directed downward from the lower edge surface 4 of the frame is provided, the gripping / fixing is ensured. In addition, the protrusion 7 acts as a reinforcing rib against the deflection in the normal direction of the surface of the pellicle film 1.

  On the other hand, in the case where the projecting portion 7 facing outward from the outer surface 5 of the frame is provided, and in the case of providing the projecting portion 7 facing inward from the inner surface 6 of the frame, ensuring gripping and fixing In addition to this, when the pellicle film 1 is stretched, it acts as a reinforcing rib against the frame body being bent in the center direction by tension applied in a direction parallel to the surface of the pellicle film 1.

  Furthermore, the frame 10 of the large pellicle according to the present embodiment may have a plurality of protrusions 7 on the frame as shown in FIG. FIG. 18 is a partially enlarged longitudinal sectional view showing various forms of the frame of the large pellicle according to the present embodiment, and A to G are forms provided with a plurality of protrusions. As a combination, when it has two protrusions facing outward from the outer surface of the frame and two protrusions facing upward from the upper edge surface of the frame, the protrusion is directed outward from the outer surface of the frame. If there are two protrusions facing downward from the lower edge surface of the frame and the frame, a protrusion facing outward from the outer surface of the frame and a protrusion facing inward from the inner surface of the frame May have two. In addition, if there are two protrusions facing upward from the upper edge surface of the frame and two protrusions facing downward from the lower edge surface of the frame, the protrusion is directed upward from the upper edge surface of the frame. There may be two protrusions directed inward from the inner surface of the part and the frame. Furthermore, there may be two protrusions facing downward from the lower edge surface of the frame and two protrusions facing inward from the inner surface of the frame. Furthermore, there is a form in which protrusions are provided on three surfaces of the four surfaces of the frame or a form in which protrusions are provided on all four surfaces of the frame. By providing the protrusions on the plurality of surfaces of the frame body, the gripping / fixing is more reliable, and the reinforcement direction of the frame body can be increased. There is also an advantage that two or more types of gripping tools that grip different surfaces of the frame can be handled by the same single frame.

  The cross-sectional shape of the protrusion 7 is rectangular (for example, FIGS. 14A and B, FIGS. 15A, 16A, 17A and B), trapezoid (for example, FIGS. 14F, 15D, 16A, and 17F), polygon, circular, semi There is no particular limitation such as a circle (for example, FIGS. 15B and 15C) or an ellipse (for example, FIGS. 14G and 17G). If necessary, a curvature R or C surface may be provided at the corner.

  19 and 20 are schematic views in the direction of viewing the pellicle film for explaining the arrangement of the protrusions in the frame of the large pellicle according to the present embodiment. As shown in FIGS. 19A, 19C and 19 and FIG. 20, the protrusion 7 is arranged over the entire periphery of the side of the frame 10 as long as it has convex grips on all four sides. (FIG. 19A) or may be partially arranged on the side of the frame 10 (FIGS. 19C to 19D and 20A to 20E). In the case of partial arrangement, the frame body is adapted to the gripping / fixing position when handling the attached photomask, the alignment mark position of the photomask, and the gripping / fixing position when setting the photomask to the exposure machine. It is also possible to arrange the protrusion at a specific location. When partially disposing on the protruding portion, it is preferable to dispose on any side of the frame. Strength reinforcement against frame deflection.

  In the frame of the large pellicle according to this embodiment, when the gripping convex portion is plate-shaped, the length occupied by the gripping convex portion is 10% or more with respect to the length of each side. However, it is more preferable because the load unevenness due to its own weight can be uniformly dispersed. More preferably, it is 20% or more, and most preferably 30% or more. Further, when it is necessary to leave room for forming a portion having a function other than gripping in the frame, the length occupied by the gripping convex portion is 90% of the length of each side. The following is preferable. More preferably, it is 80% or less, and most preferably 70% or less. It is preferable that the arrangement of the convex portions for gripping on each side is symmetric with respect to each center of each side, so that the load bias due to its own weight can be uniformly dispersed.

  In the frame of the large pellicle according to the present embodiment, when the convex portions for gripping are rod-shaped, it is preferable to arrange a plurality of them at any side of the frame. When gripping the frame of the pellicle, it is possible to uniformly disperse the load due to its own weight, and to suppress the occurrence of deflection.

  FIG. 10 is a schematic view seen from the side of the frame for explaining the arrangement of the protrusions in the frame of the large pellicle according to the present embodiment. As shown in FIG. 10A, the protrusions can be arranged obliquely from the upper edge surface side to the lower edge surface side in the side direction when viewed from the side surface direction of the frame. Furthermore, as shown in FIG. 10B, it is also possible to repeatedly arrange in the side direction from the upper edge surface side to the lower edge surface side and from the lower edge surface side to the upper edge surface side as seen from the side surface direction of the frame. .

  FIG. 21 is a partially enlarged vertical cross-sectional view when the protrusion provided on the frame of the large pellicle is detachably fixed to the side of the frame, FIG. 21A is screwed, and FIG. 21B is a coupler. Fig. 21C shows fixation by an elastic body, and Fig. 21D shows fixation by pinching. As shown in FIG. 21, in the frame of the large pellicle according to the present embodiment, it is preferable that the protruding portion 7 of the frame 10 is detachably fixed to the side of the frame 10. After attaching to a photomask with higher rigidity than the pellicle frame, the rigidity of the pellicle frame will not be questioned, so the protrusions used for rigidity improvement and fixation / grip should be removable. You can leave it. By doing this, it is possible to avoid restrictions from the gripping / fixing position when handling the photomask and the gripping / fixing position when setting the photomask to the exposure apparatus.

  Further, when the pellicle is peeled off from the photomask, a protruding portion may be attached. By doing so, the rigidity of the frame of the pellicle can be improved, and the protruding portion can be gripped and fixed, so that the peeling force can be reliably transmitted during peeling.

  Any detachable mechanical fixing method may be used. For example, as shown in FIG. 21, there are a screw, a coupler, insertion of an elastic body, pinching, and the like. Preferably, the contact portion may be subjected to some surface treatment to prevent dust generation. For example, covering with cushion materials, such as silicone rubber, is mentioned. When the protrusion is detachable, the protrusion may be formed of a material having higher rigidity than the frame. The size (inner diameter) of the hole or groove for attaching the protrusion is 0.01 to 1 times the height of the frame when the protrusion is attached to the outer surface or the inner surface of the frame, The size is preferably 0.01 to 0.5 times, more preferably 0.01 to 0.2 times. Moreover, when attaching a protrusion part to the upper edge surface or lower edge surface of a frame, the magnitude | size of 0.01-1 times the width of a frame, Preferably the magnitude | size of 0.01-0.5 times, More preferably, the size is 0.01 to 0.2 times. In order to avoid a decrease in the rigidity of the frame, it is preferable that the holes or grooves are small.

  In the frame of the large pellicle according to the present embodiment, for example, as shown in FIG. 19 or FIG. 20, the shape of the protruding portion of the frame 10 is preferably a plate shape. The thickness of the plate is smaller than the width W or height h of the frame on which the plate is provided. For example, the thickness is preferably 0.01 times or more of the protruding amount of the protruding portion 7, and is 0.1 times or more thick. Is more preferable. When the projecting portion 7 has a hook shape, the hook-shaped bent tip portion 7a may be larger than the width W or height h of the frame body on which the plate is provided. Here, as shown in FIG. 20C, when the protruding portion 7 is plate-shaped, the protruding amount of the protruding portion may be continuously increased from the four corners of the frame to the center of the side. By doing so, the rigidity in the vicinity of the center of the side part having weak rigidity is reinforced, and the rigidity of the four corners and the rigidity of the side part of the frame body become uniform.

  In the frame of the large pellicle according to the present embodiment, for example, as shown in FIG. 22, the shape of the protruding portion 7 of the frame 20 may be a rod shape. FIG. 22 is a perspective view for explaining another form of the frame body of the large pellicle according to the present embodiment (the protruding portion is a rod), wherein A is a large pellicle bonded to a photomask, and B is a frame of the large pellicle. Showing the body. The cross-sectional shape of the rod-shaped protrusion 7 is not particularly limited, such as a rectangle, a trapezoid, a polygon, a circle, or an ellipse. If necessary, a curvature R or C surface may be provided at the corner. The protruding portion 7 may be provided on any of the upper edge surface, the lower edge surface, the outer surface, and the inner surface of the frame body 20. FIG. 22 shows an example in which a protrusion is provided on the outer surface. For example, when the diameter of the rod is provided on the upper edge surface 3 or the lower edge surface 4, the length is preferably 0.1 to 2 times the width of the frame, and 0.1 to 0.5 times the length. More preferred. For example, when providing in the outer surface 5 or the inner surface 6, the length of 0.1-3 times the height of a frame is preferable, and the length of 0.1-1 times is more preferable. FIG. 23 is a schematic view in the direction of viewing the pellicle film for explaining the arrangement of the rod-like protrusions in the frame of the large pellicle according to the present embodiment, and A is the same as the form of FIG. When three protrusions are provided on each of the long sides, B is provided with one protrusion on each of the short and long sides, and when one protrusion is provided on each of the four corners, C is This is a case where the protruding portion is integrated for each side. In FIG. 23C, since the three rod-like protrusions 7 are integrated, an improvement in strength can be expected, and workability is good when removing.

  In the frame of the large pellicle according to the present embodiment, it is preferable that the tip of the projecting portion has a hook shape. For example, it is L-shaped (for example, FIGS. 14C and E, FIGS. 15C, 16D, 17C and E), and T-shaped (for example, FIGS. 14D and 17D). Compared to the case where there is no key, the gripping member can be hooked, so that gripping and fixing are more reliable.

  In the frame of the large pellicle according to the present embodiment, the protruding portion of the frame may be formed so as to contact the outer peripheral side surface of the photomask when the pellicle is attached to the photomask. Alternatively, in the frame of the large pellicle according to the present embodiment, the projecting portion of the frame may be formed so as to be in contact with the groove formed in the photomask when the pellicle is attached to the photomask. FIG. 24 is a partially enlarged longitudinal sectional view including a protruding portion provided on a frame of a large pellicle. A is a shape in which the protruding portion is L-shaped and a bent side portion of the tip is in contact with the photomask. Shows a form in which the protrusion is L-shaped and the tip is stuck in a groove provided in the photomask. As shown in FIG. 24A, when the tip portion 7a of the L-shaped projecting portion perpendicular to the lower edge surface 4 projects from the lower surface of the adhesive material 2, the tip portion 7a of the L-shaped projecting portion is It arrange | positions so that the outer surface of the photomask 9 may be touched substantially. Alternatively, as shown in FIG. 24B, when the tip portion 7a of the L-shaped projecting portion in the direction perpendicular to the lower edge surface 4 must be disposed inside the outer surface of the photomask 9, the surface of the photomask 9 May be cut into the same shape as the tip 7a. In both cases of FIGS. 24A and 24B, when the pellicle is attached to the photomask, the effect of simplifying the alignment of the pellicle and improving the accuracy of the attachment position of the pellicle is achieved.

  Further, in the frame of the large pellicle according to the present embodiment, when the pellicle is attached to the photomask, the protruding part of the frame is formed so as to contact the outer peripheral side surface of the photomask and the groove formed in the photomask. May be. For example, one of the left and right projections of the frame is formed so as to be in contact with the outer peripheral side surface of the photomask, and the other is formed so as to be in contact with the groove formed in the photomask. Alternatively, the projecting portion of the frame is formed in an F shape, the bent portion on the front end side is formed so as to contact the outer peripheral side surface of the photomask, and the bent portion on the front side is contacted with the groove formed on the photomask. It is a form to form. As described above, when the pellicle is attached to the photomask, the form may be modified as long as the effect of simplifying the alignment of the pellicle and improving the accuracy of the attachment position of the pellicle can be obtained.

  FIG. 25 is a partially enlarged vertical cross-sectional view when a large pellicle is fixed by combining another part with a protrusion provided on a frame of the large pellicle. As shown in FIG. 25, in the frame of the large pellicle according to the present embodiment, the protrusion 7 of the frame is combined with another part 15 when the pellicle is affixed to the photomask 9, so that the photomask 9 It is preferable that the frame 10 is formed so as to be physically fixed. In this way, the pellicle can be securely attached to the photomask and can be prevented from falling off. As a method of attaching the separate component 15 to the projecting portion 7 of the frame body, various fixing methods such as screwing, coupler, fitting using an elastic body, and pinching may be used.

  The protruding portion is also used for gripping and fixing, and is effectively used when handling the pellicle, when storing it in the storage container, and when taking out the pellicle from the storage container. A method for holding and fixing the protruding portion with the holding member will be described. FIG. 26 is a partially enlarged longitudinal sectional view for explaining a state in which the frame body of the large pellicle according to the present embodiment is gripped / fixed by the gripping member, and A is a grip / fixed protrusion having a rectangular cross section. A projection provided on the outer surface of the B frame, a configuration in which the L-shaped projection is gripped and fixed, and C is a projection provided on the upper edge surface of the frame, The form in which the cross-section of the L-shaped projecting part is gripped and fixed, and D is the projecting part provided on the inner surface of the frame, and the form in which the two rectangular projecting parts are gripped and fixed is shown. In FIGS. 26A and 26C, the gripping member 16 securely grips and fixes the protruding portion. In FIG. 26B, the L-shaped tip (ridge portion) of the protruding portion is hooked on the gripping member 16 and is gripped and fixed more reliably. In FIG. 26D, the gripping member 16 is caught between the two rectangular protrusions and is securely gripped and fixed. As described above, the aspect in which the frame body has the gripping concave portions on all the side portions and the aspect in which the frame body has the gripping convex portions on all the side portions are included in one frame body. Needless to say, the concave and convex portions for gripping may be used in combination. A concave portion is preferable when emphasizing space efficiency, and a convex portion is preferable when emphasizing the reinforcing effect of the frame, but it can be designed in accordance with the design of the gripping tool within the scope of the various aspects described above. .

  When gripping the frame body of the large pellicle of the present invention, it is preferable to simultaneously grip at least one gripping convex portion or concave portion at each side portion of the frame body, and at each side portion of the frame body, respectively. It is more preferable to grip at least two gripping convex portions or concave portions at the same time, and it is most preferable to grip all grip convex portions or concave portions at each side of the frame at the same time.

  The frame body to which the pellicle film is bonded is subjected to stress that is pulled inward by the tension of the pellicle film to be contracted. In this embodiment, in the case where a gripping groove or hole is dug from the inner surface of the frame body, external stress is applied to the side of the frame body via a gripping member inserted into the gripping groove or hole. It is possible to apply. This makes it possible to correct slight deformation of the frame body caused by the stress. Further, a grip groove or hole is dug from the upper edge surface of the frame, a grip groove or hole is dug from the lower edge surface of the frame, or a grip is taken from the outer surface of the frame. In any of the forms in which the groove or hole is dug, for example, by providing a space portion that expands in the depth of the groove or hole, and providing a lock mechanism at the distal end of the insertion of the gripping member, the frame body is the inner side of the pellicle film It is possible to correct the deformation. Similarly, with respect to the convex portion formed on the frame body, it is possible to correct the deformation of the frame body in the inner direction by the pellicle film by gripping the convex portion. The above-mentioned method of correcting the inward deformation of the frame body is not limited to correcting the inward deformation due to the contraction tension of the pellicle film, but the deformation is corrected by the weight of the frame body or an external force other than the film tension. Needless to say, the present invention can also be applied.

  In correcting the frame shape of the large pellicle, at least one gripping convex portion or concave portion is simultaneously held in each side portion of the large pellicle frame, and at least one of the large pellicle frame is It is preferable to reduce the deformation of the frame by applying stress to the location.

  As a result of experiments using the frame of the large pellicle of the present invention having the above-described configuration, the present inventors have obtained good results as shown in the following examples.

[Example 1]
A quadrilateral aluminum alloy frame having a long side length of 1600 mm, a short side length of 1400 mm, a width of 14 mm, and a height of 6 mm was prepared. The circumferential length of the opening is 200 mm and the height of the opening is 1.5 mm centering on the center of each side and three points of 250 mm from both ends of each side at the position of 3 mm in height on the outer surface of each side. Grooves having a depth of 3 mm were formed by cutting each of three sides on all four sides of the frame.
A polyethylene foam base material (thickness 1 mm) having an acrylic adhesive applied on the surface was attached to the lower edge surface of the frame as an adhesive material layer. Next, it is a protective film having the same frame shape as that of the frame body, the size is 10 mm wide × 900 mm long at the center of the long side, and the width 10 mm × length 750 mm at the short side center. Made of polyethylene terephthalate resin with a press-off allowance and a press-off allowance with a radius of 10mm centered at the apexes of the four corners so as to protrude outward from the frame body (see FIG. 27) The protective film was laminated on the adhesive material layer.
The frame of a large pellicle with a protective film thus obtained is mounted on a tray of a storage container that is vacuum-formed with an ABS resin material, and the pressing margin is placed on an adhesive tape (tape size: long side 15 mm). × 940 mm, short side 15 mm × 790 mm, four corners 15 mm × 60 mm).

[Example 2]
A frame similar to that of Example 1 was prepared except that the length of the long side was 1800 mm, the length of the short side was 1600 mm, and the width was 16 mm, and was fixed to the tray in the same manner as in Example 1.

[Example 3]
A frame similar to that of Example 1 was prepared except that the length of the long side was 2000 mm, the length of the short side was 1800 mm, and the width was 18 mm, and was fixed to the tray in the same manner as in Example 1.

[Example 4]
A circular hole with a diameter of 3 mm and a depth of 3 mm of the opening on the outer surface of the frame at three points 150 mm from the center of each side and both ends of each side, three on each side for all four sides of the frame Except for the formation, a frame similar to that in Example 2 was prepared and fixed to the tray in the same manner as in Example 1.

[Comparative Example 1]
Except that a groove having an opening height of 1.5 mm and a groove depth of 3 mm is formed over the entire circumference of the outer surface of the short side, and a gripping part is not formed on the long side, the embodiment described above A frame similar to 2 was prepared and fixed to the tray in the same manner as in Example 1.

[Example 5]
Three circular holes with a diameter of 3 mm and a depth of 3 mm are formed on the outer surface of the frame body at positions 150 mm from the center and both ends of the long side, and the outer surface of the frame body is formed at the center of the short side. A frame body similar to that of Example 2 was prepared except that circular holes each having a diameter of 3 mm and a depth of 3 mm were formed in each of the openings, and fixed to the tray in the same manner as in Example 1.

  Table 1 below shows the evaluation results for Examples 1 to 5 and Comparative Example 1.

  Reliable gripping evaluation of the pellicle frame was performed on the frame prior to adhesive fixing to the tray. In the case of Examples 1-3, as a gripping member, 12 sets of jigs each having a plate-shaped gripping member made of reinforced plastic and having a width of 100 mm and a thickness of 0.75 mm are prepared. It was inserted into all the holding grooves on the side and held at the same time, and the frame was lifted horizontally. Moreover, in the case of the comparative example 1, the same jig | tool was inserted in six places centering on a total of 6 points of 250 mm from the center of both short sides and both ends of both short sides, and the frame was lifted horizontally. In the case of Examples 4 to 5, a rod having a diameter of 2 mm made of reinforced plastic is prepared as a gripping member, and the gripping member is inserted into all the gripping holes on each side of the frame body and gripped at the same time. The frame was lifted horizontally. After lifting horizontally, the height of 300 mm was raised and lowered 5 times in a horizontal state at a rate of once per second, and all gripping members did not slip out of all gripping grooves or holes. "△" when some gripping members come out of the corresponding gripping grooves or holes, "△", all gripping members slipped out of all the gripping grooves or holes and the pellicle frame dropped Cases are indicated by “x”.

  In addition, the evaluation for preventing the deflection of the pellicle frame was performed with a frame that was adhesively fixed to a horizontally placed tray via a protective film. In the case of Examples 1-3, as a gripping member, 12 sets of jigs each having a plate-shaped gripping member made of reinforced plastic and having a width of 100 mm and a thickness of 0.75 mm are prepared. It was inserted into all the holding grooves on the side and held at the same time, and the frame was lifted horizontally. Moreover, in the case of the comparative example 1, the same jig | tool was inserted in six places centering on a total of 6 points of 250 mm from the center of both short sides and both ends of both short sides, and the frame was lifted horizontally. In the case of Examples 4 to 5, a rod having a diameter of 2 mm made of reinforced plastic is prepared as a gripping member, and the gripping member is inserted into all the gripping holes on each side of the frame body and gripped at the same time. The frame was lifted horizontally. The lifting speed is 1 cm per second, “◎” when the deflection of the side of the pellicle frame is less than 10 mm immediately before the interface between the protective film and the adhesive is completely peeled off, and “◯” when it is 10 mm or more and less than 15 mm. The case of less than 20 mm is indicated by “Δ” (lower limit level that is not practically problematic), and the case of 20 mm or more is indicated by “x” (level that is practically problematic).

DESCRIPTION OF SYMBOLS 1 Pellicle frame 2 Mask adhesive material 3 Upper edge surface of a frame 4 Lower edge surface of a frame body 5 Outer surface of a frame body 6 Inner side surface of a frame body 7 Groove or hole or protrusion for holding 7a Groove or hole for holding The inner space or the tip of the gripping protrusion 7b The opening of the gripping groove 7c The deepest part of the gripping groove 9 Photomask 10, 20 Frame 11 Protective film 11a Pressing margin 11b Pressing margin 15 Separate parts 16 Holding member 21 Groove 30 Frame (Conventional product)

Claims (3)

A method for removing a large pellicle from a storage container,
The frame of the large pellicle has a polygonal shape consisting of a plurality of sides, and the frame is coated on the pellicle film adhered to the upper edge surface of the frame and the lower edge surface of the frame. The frame body has a length of the longest side of 1 m or more, and the frame body has a gripping convex portion or a concave portion on all of the side portions, A method for taking out a large pellicle from a storage container, wherein each side of the frame body holds and takes out at least one gripping convex portion or concave portion.   The method for removing a large pellicle from a storage container according to claim 1, wherein the gripping convex portion or concave portion is a groove or a hole.   The method for taking out a large pellicle from a storage container according to claim 1 or 2, wherein all the gripping convex portions or concave portions are grasped and taken out at all sides of the large pellicle frame.