JPH1048811A - Mask protecting device and pellicle frame - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily grasp a pellicle frame or a mask protecting device from a distant place and to prevent contamination by providing a frame with handles so that the frame can be caught by mechanical hands. SOLUTION: The both sides of a pellicle frame 5 are provided with wide handles 6. The handles are required to have only a function to be caught by mechanical hands, and therefore, such accuracy as required for processing or production of insertion holes or fine grooves on a pellicle frame 5 is not required for the handle. Otherwise, accurate control of tools to engage insertion holes or fine grooves is not required. The pellicle frame 5 can be grasp and held on both sides or one side. The only function required for the handle is that the handle can be grasp from one side, and therefore, the structure is simple and the automatic production line can be made more compact. By supporting the pellicle frame with engaged handles on the mount placed at a specified distance on a conveyer, the pellicle frame 5 or a mask protecting device can be carried in a noncontact state from the conveyer so that contamination by the belt can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for the purpose of preventing dust and the like from adhering to a mask or a reticle (hereinafter, referred to as "mask") used in a photolithography process in a manufacturing process of an integrated circuit such as an LSI. A mask protection device, that is, a pellicle frame of a size surrounding the mask pattern, and a mask protection device formed of a transparent thin film stretched on one side of the frame and attached to the mask so as to surround the mask pattern. The present invention relates to a pellicle frame of the device.

[0002]

2. Description of the Related Art Movement of a pellicle frame and a mask protection device in a production line of a mask protection device is performed by a hand with a jig attached thereto or a belt conveyor or the like in order to eliminate the handling by humans and to promote automation in production. Has been done by Among them, the conveyance by the belt conveyor has a problem that the contamination by the belt easily occurs, while the carrying by the hand has an advantage that such a problem is hardly caused.

Conventionally, a hand-held device is used to remove a mask protection device attached to a mask by using a jig insertion hole formed in a pellicle frame or a narrow groove formed around a pellicle frame. Insert the jig into the insertion hole from both sides of the pellicle frame with the hand with the jig attached,
The pellicle frame was gripped by engaging with the narrow groove.

[0004]

When the pellicle frame is gripped by the hand, foreign objects may adhere to the pellicle frame and the mask protection device because the hand having a complicated mechanism moves back and forth near the pellicle frame. Even if you try to grip the frame from a distance using a long jig to prevent foreign matter from adhering, the insertion hole of the pellicle frame is small and the groove is narrow, so the jig is accurately controlled and inserted into the insertion hole However, it is difficult to engage with the narrow groove. Enlarging the insertion hole or widening the groove width to cope with this problem is not preferable because the strength of the pellicle frame is impaired.

[0005] It is an object of the present invention to solve the above-mentioned problem when moving a pellicle frame or a mask protection device using a hand.

[0006]

Therefore, the present invention provides a pellicle frame or a pellicle frame of a mask protection device which has a handle which can be gripped by a hand. The handle of the present invention may have any function that can be grasped with a hand, and may have any shape or structure such as a tongue-like shape or a handle shape. This is preferable because the structure is simple and no space is required.

The handle of the present invention may be provided with irregularities or holes so that it can be held firmly and securely when grasped with a hand.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a mask protection device 1 in which a pair of tongue-shaped handles 3 are protrudingly provided on the left and right sides of a pellicle frame 2, and FIG. A wide handle 6 is protruded. The mask protection device of the present embodiment has the following effects.

(1) Since the handle is merely grasped by the hand, the mask protection device can be easily grasped even from a distance.
Pollicle frame and mask protection device are less likely to be contaminated. (2) The handle only needs to have a function that can be gripped by a hand, and the formation of the handle requires processing precision to a pellicle frame and manufacturing accuracy, such as when forming an insertion hole or a narrow groove. In addition, there is no need to control the jig with high precision as when the jig is engaged with the insertion hole or the narrow groove.

(3) The pellicle frame can be gripped from both sides, and one side can be gripped from either side. (4) The cantilever grip makes it easy to bring it to an arbitrary place, and the hand only needs to have a function that can grip the handle from one side, and it is also necessary to control precisely. Because of this, the structure is simple and the automation line can be made more compact.

(5) Even when the pellicle frame and the mask protection device are not brought into contact with the conveyor, the pellicle frame and the mask protection device are supported by holding the handles on both sides on a table placed at a predetermined interval on the conveyor. , And contamination by the belt can be prevented. (6) Even when a person has to intervene in a foreign substance inspection or the like, the mask protection device and the pellicle frame can be carried by grasping the handle with one hand, and there is no need to directly grasp and carry the frame. Therefore, contamination hardly occurs.

[0012]

The present invention is configured as described above and has the following effects. According to the pellicle and mask protection device according to the first and second aspects, the pellicle frame and the mask protection device can be easily gripped even from a long distance by gripping the handle, and contamination hardly occurs. And the hand is the same,
It is only necessary to have a function of gripping the handle, and it is not necessary to perform control with high precision. If the pellicle frame and the mask protection device are gripped from one side, the structure can be simplified and made compact.

According to the third aspect of the present invention, if the handle is formed in a protruding shape, the structure of the handle is simple, and it does not take up space and is not bulky. According to the fourth aspect of the present invention, if the projections are provided with irregularities or holes, they can be firmly and reliably gripped when gripping with a hand.

[Brief description of the drawings]

FIG. 1 is a plan view of a mask protection device according to the present invention.

FIG. 2 is a plan view of another example of the mask protection device according to the present invention.

[Explanation of symbols]

 1. Mask protection device 2, 5, Pellicle frame 3, 6, ... Handle

Claims (4)

[Claims] 1. A pellicle for a mask protection device, comprising a pellicle frame having a size surrounding a mask pattern, and a transparent thin film stretched on one side of the frame, and attached to a mask so as to surround the mask pattern. A pellicle frame with a handle that can be gripped by hand. 2. A mask protection device comprising a pellicle frame having a size surrounding a mask pattern and a transparent thin film stretched on one side of the frame, the mask protection device being attached to the mask so as to surround the mask pattern. A mask protection device with a handle that can be gripped by hand on the pellicle frame. 3. A pellicle frame according to claim 1 or claim 2.
The handle protruding from the pellicle frame of the mask protection device described above has a tongue shape. 4. A pellicle frame according to claim 1 or claim 2.
The handle protruding from the pellicle frame of the mask protection device described above has a tongue shape having irregularities or holes.