JP5618888B2 - Method for producing pellicle and pellicle film - Google Patents

Description

  The present invention relates to a pellicle used as a dust prevention when manufacturing a semiconductor device, a printed circuit board, a liquid crystal display, or the like, and a method for manufacturing a pellicle film.

  In the manufacture of semiconductors such as LSI and VLSI, or the manufacture of liquid crystal displays and the like, a pattern is produced by irradiating a semiconductor wafer or a liquid crystal master plate with light. If dust adheres to the photomask or reticle (hereinafter simply referred to as photomask) used at this time, the dust absorbs light or bends the light, so that the transferred pattern is deformed, The edges of the pattern are sticky. Further, the size, quality, appearance, etc. of the transferred pattern may be impaired, for example, the ground on which the pattern is transferred becomes black and dirty. For this reason, these operations are usually performed in a clean room, but it is still difficult to keep the photomask clean. Therefore, exposure is performed by attaching a pellicle with a pellicle film attached to the photomask to prevent dust on the surface of the photomask.

  As such a pellicle, for example, in Patent Document 1 below, a vent hole is formed on a side surface of a rectangular pellicle frame having a transparent pellicle film affixed on the upper surface side to eliminate swelling and dent of the pellicle film due to a difference in internal and external pressure. In addition, a pellicle provided with a filter so that dust from the outside does not enter the inside is described in the opening of the vent hole.

Japanese Utility Model Publication No. 63-39703

  The pellicle described in Patent Document 1 is supplied to an exposure machine or the like with its lower surface attached to a photomask. During the exposure, the photomask is covered with the pellicle, so that the foreign matter does not directly adhere to the surface of the photomask but adheres to the pellicle film. Therefore, if the focus is set on the pattern of the photomask during lithography, the foreign matter on the pellicle film will not have any influence on the transferred image.

  According to the study by the present inventors, in the exposure apparatus, the photomask pattern is usually arranged so that the pattern formation surface faces downward. For this reason, the pellicle attached to the pattern formation surface of the photomask also faces downward. In the downward pellicle, the pellicle film hangs downward due to its own weight, and the convex portion protrudes downward. Since this convex portion has a risk of interfering with parts of the exposure apparatus, it is necessary to suppress the protrusion amount (self-weight droop amount) to a predetermined value or less. On the other hand, in the manufacture of liquid crystal displays and the like in recent years, photomasks have been increased in size, and a large pellicle is being demanded. However, as the side length of the pellicle becomes longer (as the pellicle becomes larger), the weight of the pellicle film increases and the amount of drooping of the weight of the pellicle increases. It is 8 mm, preferably 0.6 mm or less.

  The amount of the pellicle membrane hanging down tends to decrease when the tension of the pellicle membrane is increased. However, when the tension of the pellicle membrane is excessive, the amount of deflection to the inside of the pellicle frame is excessively increased. The size is reduced, and a predetermined exposure area cannot be secured. In addition, since the tension of the pellicle film is relaxed due to the bending of the pellicle frame due to the tension of the pellicle film, it is difficult to adjust the amount of drooping of its own weight by adjusting the tension of the pellicle film. Also, the amount of the pellicle film that hangs down due to its own weight varies depending on the change in the pressure or temperature in the pellicle. In order to keep the pressure in the pellicle constant with respect to the change in pressure or temperature in the pellicle, a vent hole is provided. A filter is attached to the opening of the vent hole. Resistance. For this reason, it is difficult to instantaneously match the internal and external environments of the pellicle, and there is a possibility that the amount of drooping of the pellicle film will exceed the predetermined amount.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a pellicle and a method for manufacturing the pellicle film that can suppress the amount of the self-pile sagging of the pellicle film as much as possible.

The pellicle according to claim 1, which has been made to achieve the above object, is a pellicle in which a pellicle film is attached to a polygonal pellicle frame, and has a maximum thickness of 100 μm. some linear reinforcing member consisting of at least one of the iron-based alloy or stainless steel, is bonded to the pellicle film, characterized in that it is stretched between two sides facing each other of the pellicle frame It is .

The pellicle according to claim 2 is the one according to claim 1, wherein the linear reinforcing body has a thickness of 50 μm or less, and is entirely encapsulated in the pellicle membrane. It is characterized by being.

Claimed described in claim 3 pellicle be those described in claim 1, wherein the linear reinforcement is for the thickness exceeds 50 [mu] m, at least in part within the pellicle film It is characterized by being joined in a recessed state .

A pellicle according to a fourth aspect is the one according to the first aspect, wherein the pellicle frame has a rectangular shape and a long side is at least 1000 mm .

Claims described in claim 5 pellicle be those described in claim 1, wherein the linear reinforcement is characterized by blackening treatment is applied to the surface.

The pellicle according to claim 6 is a pellicle in which a pellicle film is attached to a polygonal pellicle frame, and a linear reinforcing body made of at least one carbon fiber having a thickness of at most 100 μm, the pellicle membrane is bonded to, it is characterized in that it is stretched between two sides facing each other of the pellicle frame.

The pellicle according to claim 7 is the pellicle according to claim 6 , wherein the carbon fiber is a stranded wire, and the whole is included in the pellicle membrane. To do.

The method for producing a pellicle film according to claim 8 includes a step of applying a pellicle film forming solution to a flat surface to form a base layer that is thinner than a pellicle film to be formed, and iron on the base layer. A step of stretching a linear reinforcing body made of a base alloy, stainless steel or carbon fiber; and the pellicle film-forming solution is applied on the underlayer so as to cover the linear reinforcing body, and the linear reinforcing body the is characterized in that it comprises a step of forming a pellicle film having a predetermined thickness which inclusions.

The method for producing a pellicle film according to claim 9 is the method according to claim 8, wherein the thickness of the underlayer is 60% or less of the pellicle film to be formed. .

  Since the pellicle according to the present invention supports the pellicle film with a linear reinforcing body, it is possible to suppress the amount of drooping of the pellicle film by its own weight. Further, since the linear reinforcing member has a thickness of 100 μm at the maximum, when the photomask pattern is exposed or the like, if the focus is set on the photomask pattern, the linear reinforcing member can be It is focused and does not affect the exposure quality. As a result, even if the size of the pellicle is increased, it is possible to eliminate the risk of the pellicle film sagging and interfering with apparatus members in the exposure machine or the like.

It is a perspective view which shows an example of the pellicle which concerns on this invention. It is a partial expanded sectional view explaining the condition of the linear reinforcement body joined to the pellicle film | membrane shown in FIG. It is explanatory drawing explaining the state which mounted | wore the photomask with the pellicle shown in FIG. FIG. 3 is a process diagram illustrating a method for manufacturing the pellicle film shown in FIG. 1. It is a perspective view which shows the tension jig | tool of a linear reinforcement body. It is a perspective view which shows the peeling jig | tool of a pellicle film. It is a partial expanded sectional view explaining the other situation of the linear reinforcement body joined to the pellicle film. It is process drawing explaining the manufacturing method of the pellicle film | membrane shown in FIG. It is a perspective view which shows the other example of the pellicle which concerns on this invention.

  Hereinafter, although the form for implementing this invention is demonstrated in detail, the scope of the present invention is not limited to these forms.

  An example of a pellicle according to the present invention is shown in FIG. The pellicle 42 shown in FIG. 1 uses a rectangular pellicle frame 10. In this pellicle frame 10, corners on the outer peripheral side and the inner peripheral side are chamfered in an arc shape. A plurality of ventilation holes 16 are opened on the outer side surface of the long side of the pellicle frame 10, and a filter 47 is attached to the opening so as to prevent intrusion of dust from the outside. Furthermore, a concave portion 18 for handling is also formed on the outer surface of the long side. Further, handling grooves 22 are also formed in the outer surfaces of both short sides of the pellicle frame 10 and in the vicinity of the central portion of the long sides. Note that the pellicle frame 10 is formed of a material such as aluminum, stainless steel, or polyethylene.

  A mask adhesive layer 46 for mounting on a photomask is formed on the lower end surface of the pellicle frame 10, and a separator 48 is affixed. The mask adhesive layer 46 is formed of polybuden resin, polyvinyl acetate resin, acrylic resin, silicone resin, or the like. A transparent pellicle film 44 is bonded to the upper end surface of the pellicle frame 10 by a pellicle film adhesive layer (not shown). The pellicle film 44 is formed of nitrocellulose, cellulose acetate, a fluororesin, or the like that transmits light well. In the pellicle film 44, a plurality of linear reinforcing bodies 12 are joined to the pellicle film 44 and stretched between long sides of the pellicle frame 10 facing each other. The linear reinforcing body 12 is joined to the pellicle film 44. In particular, the linear reinforcing body 12 having a thickness of 50 μm or less can be joined while being encapsulated in the pellicle film 44 as shown in FIG. In such a joined state, the adhesive strength between the pellicle film 44 and the linear reinforcing body 12 becomes extremely high, and the possibility of peeling between the linear reinforcing body 12 and the pellicle film 44 can be eliminated.

  The linear reinforcement 12 is preferably made of metal from the viewpoint of strength, reliability, and light resistance. Examples of the metal include brass, copper, titanium, and alloys thereof. Iron-based alloys such as carbon steel and piano wire, and particularly stainless steel is preferable from the viewpoint of corrosion resistance. The surface of the metal linear reinforcing body 12 is preferably blackened. This is to minimize the influence on the foreign object inspection and prevent stray light. Examples of the blackening treatment include black chrome plating, black nickel plating, galvanizing black chromate treatment, radiant treatment, and parkerizing. Further, as the matting treatment, it is also preferable that the surface is subjected to a satin treatment by means such as pickling before the plating treatment. The cross-sectional shape of the linear reinforcing body 12 is preferably a circular shape from the viewpoint of ease of manufacturing and ease of handling, but may be a shape such as a square or a hexagon.

  Examples of the linear reinforcing body 12 include carbon fibers. This is because carbon fiber is excellent in strength and resistant to ultraviolet rays. Since carbon fiber is generally used as a stranded wire, there is a concern about the occurrence of whiskers and the like, but the concern is that the linear reinforcing body 12 is included in the pellicle film 44 as shown in FIG. Is also resolved. As such a linear reinforcement body 12, what is formed from the material which does not transmit ultraviolet rays is calculated | required. This is because when the linear reinforcing body 12 made of an ultraviolet light transmissive material is used, the linear reinforcing body 12 may act like a prism and affect the exposure quality.

  The pellicle 42 shown in FIGS. 1 and 2 is arranged in the exposure machine or the like so that the formation surface of the pattern 64 of the photomask 62 faces downward as shown in FIG. For this reason, the pellicle 42 attached to the pattern formation surface of the photomask 62 also faces downward. In the downward pellicle 42, as shown in FIG. 3, the pellicle film 44 hangs downward due to its own weight, and the convex portion 44 'projects downward. In the pellicle 42 shown in FIGS. 1 and 2, since the pellicle film 44 is supported by a plurality of linear reinforcing bodies 12, the amount of protrusion of the convex portion 44 ′ (self-weight drooping amount A) can be suppressed. The concern that the portion 44 'interferes with parts such as an exposure machine can be eliminated.

  When the pellicle film 44 shown in FIGS. 1 and 2 is manufactured, as shown in FIG. 4A, the pellicle film solution is discharged from the slit die 32 onto the smooth polished surface of the molded substrate 30 such as quartz glass. However, the undercoat layer 43a is formed. The formed undercoat layer 43a is heated by a heating means such as a hot plate, oven, IR lamp, etc., dried and hardened to form the lower layer 44a. The lower layer 44a is thinner than the pellicle film 44 to be formed. Specifically, it is preferably 60% or less, particularly 40% or less of the pellicle film 44 to be formed. Next, as shown in FIG. 4B, a plurality of linear reinforcing bodies 12 are brought into close contact with each other at a predetermined interval on the lower layer 44a. At this time, it is preferable to use a tension jig 34 shown in FIG. As shown in FIG. 5A, the tension jig 34 is inserted into the guide holes 35 and 35 opened at predetermined intervals on the side surface of a support frame 37 formed of a metal such as an aluminum alloy. Thus, both ends are fixedly stretched by the clamp means 36. The support frame 37 is formed in such a size that its height is lower than that of the molded substrate 30 and its inner peripheral surface is in sliding contact with the side surface of the molded substrate 30. For this reason, as shown in FIG. 5B, when the stretching jig 34 is attached to the side surface of the molded substrate 30 on which the base layer 44a is formed so as to slidably contact the inner peripheral surface of the support frame 37, the lower layer 44a is placed on the lower layer 44a. A plurality of linear reinforcement bodies 12 can be brought into close contact with each other at a predetermined interval. In FIG. 4B, the tension jig 34 is omitted.

  As shown in FIG. 4C, the upper layer 43b is applied to the lower layer 44a in which the plurality of linear reinforcing bodies 12 are in close contact with each other using the stretching jig 34 while discharging the pellicle film solution from the slit die 32. Form. The gap B between the discharge port of the slit die 32 and the lower layer 44a is a pellicle to be formed together with the lower layer 44a when the overcoat layer 43b covers the plurality of linear reinforcing bodies 12, and is dried and cured. The thickness of the film 44 is adjusted. The formed overcoat layer 43b is left to stand and leveling to dry the solvent, and then heated by heating means such as a hot plate, oven, IR lamp, etc., to completely evaporate and cure the solvent. The upper layer 44b shown in FIG. The upper layer 44b can be integrated with the lower layer 44a to form a pellicle film 44 that completely encloses the plurality of linear reinforcing bodies 12. Thereafter, the pellicle film 44 formed on the molded substrate 30 is peeled off. At that time, the cutting means such as a cutter knife is moved along the inner peripheral surface of the tension jig 34 to cut the ends of the plurality of linear reinforcing bodies 12 and the tension jig 34 is removed. Next, after the frame body 38 made of aluminum alloy or the like shown in FIG. 6 is bonded to the pellicle film 44, the pellicle film 44 can be peeled from the molded substrate 30 by gently lifting the frame body 38.

  A pellicle 42 shown in FIG. 1 is formed using the obtained pellicle film 44. At that time, a pellicle film 44 is stretched on the upper end surface of a rectangular pellicle frame 10 made of aluminum alloy or the like via a pellicle film adhesive layer made of silicone adhesive or the like. At this time, the alignment of the pellicle film 44 is performed so that each of the plurality of linear reinforcing bodies 12 included in the pellicle film 44 is stretched between the opposing long sides of the pellicle frame 10. A mask adhesive layer 46 is formed on the lower end surface of the pellicle frame 10. The mask adhesive layer 46 is formed of an acrylic adhesive, a rubber adhesive, a hot melt adhesive, a silicone adhesive, or the like. A separator 48 provided with a release agent layer on a thin resin film such as PET is attached to the surface of the mask adhesive layer 46 to protect the mask adhesive layer 46. Further, the filter 47 prevents dust from entering the pellicle 42 from the outside into the vent hole 16 penetrating the side surface of the pellicle frame 10 so as to eliminate the swelling and dent of the pellicle film 44 due to the pressure difference between the inside and outside of the pellicle 42. Is provided.

  In the obtained pellicle 42 shown in FIG. 1, a plurality of linear reinforcing bodies 12 included in a pellicle film 44 are stretched between opposing long sides. As shown in FIG. Even when the pellicle film 44 is mounted downward on 62, the amount A of the pellicle film 44 depending on its own weight can be reduced as much as possible. Even if the pellicle 42 is a large pellicle 42 with a side length of at least 1000 mm, or an ultra-large pellicle 42 with a side length of over 2000 mm, the amount A of the pellicle film 44 hangs down as much as possible. The possibility of interference with parts such as devices can be eliminated.

  When the linear reinforcing body 12 having a thickness exceeding 50 μm is used, it is difficult to bond the pellicle film 44 in a state of being included in the pellicle film 44 as shown in FIG. Bonding is performed in a state in which a part of the reinforcing member 12 is embedded in the pellicle film 44. Even in such a bonded state, even if the pellicle film 44 vibrates or the like, it is possible to prevent the pellicle film 44 from being damaged due to rubbing or the like with the linear reinforcing body 12. Further, since the linear reinforcing body 12 is disposed outside the pellicle film 44, the possibility of generating foreign matter in the pellicle 42 can be eliminated. However, even in the joined state shown in FIG. 7, the thickness of the linear reinforcing body 12 should be 100 μm at the maximum. The linear reinforcing body 12 having a thickness of more than 100 μm becomes difficult to join with the pellicle film 44 and may affect the amount of light applied to the photomask during exposure.

  The pellicle film 44 bonded to the plurality of linear reinforcing bodies 12 in the state shown in FIG. 7 can be obtained by the process shown in FIG. First, as shown in FIG. 8A, the pellicle film solution is discharged from the slit die 32 on the smooth polished surface of the quartz molded substrate 30 to form the coating layer 43c. Next, after the coating layer 43c is made into a semi-dry layer 43d in a semi-dry state, as shown in FIG. 8 (b), a plurality of linear reinforcement bodies 12 are pressed onto the semi-dry layer 43d to form a linear reinforcement body. Natural drying is performed with a part of 12 semi-fixed to the semi-drying layer 43d. At this time, it is preferable to use a tension jig 34 shown in FIG. Thereafter, the semi-dry layer 43d is heated by heating means such as an oven, a hot plate, an IR lamp, etc., and the solvent of the semi-dry layer 43d is completely evaporated and cured to obtain the pellicle film 44 shown in FIG. it can. During the heating, the semi-dry layer 43d is softened, and the semi-solid linear reinforcing body 12 is partially sunk into the semi-dry layer 43d, so that a part thereof is fused. .

  In the pellicle 42 shown in FIGS. 1 to 8, a plurality of linear reinforcing bodies 12 are stretched on a pellicle film 44 between long sides facing each other of the rectangular pellicle frame 10. This is because the rectangular pellicle frame 10 is most effective because the length between the long sides can shorten the length of the linear reinforcement body 12. When the fibrous reinforcing body 12 is stretched in a direction in which the pellicle frame 10 is largely bent due to the tension of the pellicle film 44, the pellicle frame 44 contracts when the pellicle frame 10 is bent inward. The linear reinforcement body 12 that cannot be shrunk together with the pellicle film 44 may cause defects such as stretching and undulation on the surface of the pellicle film 44. Therefore, when the bending between the long sides of the pellicle frame 10 is lower than the rigidity between the short sides and a large amount of bending occurs, the pellicle film 44 between the short sides facing each other as shown in FIG. A plurality of linear reinforcing bodies 12 may be stretched. The tension of the pellicle film 44 is preferably determined in consideration of the balance with the rigidity of the pellicle frame 10. Further, in the pellicle 42 shown in FIGS. 1 and 9, the number of the linear reinforcing bodies 12 is three, but this number is appropriately determined from the size of the pellicle 42 and the size of the generated self-weight droop amount A. In some cases, the number of the linear reinforcing bodies 12 may be one. In this case, it is preferable to stretch the linear reinforcing body 12 so as to cross the central portion of the pellicle film 44 of the pellicle 42. The pellicle 42 described above has a rectangular shape, but may be a square or an octagon.

  Examples of the present invention will be described in detail below, but the scope of the present invention is not limited to these examples.

(Example)
Production of Pellicle Frame 10 A pellicle frame 10 shown in FIG. 1 was produced by machining using an A5052 aluminum alloy material. The rectangular pellicle frame 10 has an outer size of 2000 × 2500 mm, an inner size of 1960 × 2460 mm, a thickness of 6.2 mm, and each corner has an inner side R2 and an outer side R6. Further, four concave portions 18 for handling each having a diameter of 2.5 mm and a depth of 2 mm are provided on the long side, and a groove 22 having a height of 2 mm and a depth of 3 mm is provided at the center of the short side and the long side. . In addition, each of the long sides was provided with 14 vent holes 16 each having a diameter of 1.5 mm. The pellicle frame 10 was carried into a clean room, thoroughly washed with a surfactant and pure water, and dried. The pellicle frame 10 has a silicone adhesive as a pellicle film adhesive layer (not shown) on one side of its end face, and a silicone adhesive (trade name KR3700, Shin-Etsu Chemical Co., Ltd.) as a mask adhesive layer 46 on the other end face. Co., Ltd.) was diluted with toluene, applied with an air pressure dispenser, and heated to cure. To the formed mask adhesive layer 46, a separator 48 produced by cutting a PET film provided with a release agent on the surface into a shape substantially the same as that of the pellicle frame 10 with a cutting plotter was attached.

Production of Pellicle Film 44 First, as shown in FIG. 3 (a), a slit die 32 is moved at a constant speed onto a smooth-polished quartz-made substrate 30 of 2200 × 2580 × thickness 22 mm to obtain a fluorine-based A pellicle film solution in which a polymer (trade name Cytop, manufactured by Asahi Glass Co., Ltd.) was dissolved was applied to form an undercoat layer 43a. The coating amount at this time was set so that the film thickness after drying was 2.0 μm. After coating, the undercoat layer 43a was allowed to stand for a certain period of time to dry the solvent to some extent, and then heated to 180 ° C. with an IR lamp (not shown) to dry and cure the solvent, thereby forming the lower layer 44a.

  Next, a high-strength stainless steel wire having a diameter of 16 μm (trade name: PD wire φ0.016, manufactured by Suzuki Metal Industry Co., Ltd.) is pickled with hydrochloric acid as the linear reinforcing body 12, and then subjected to black chrome plating to obtain a diameter. Finished to 20 μm. Three of the linear reinforcing bodies 12 were stretched so as not to sag in the aluminum alloy stretching jig 34 shown in FIG. 5, and thoroughly washed with a surfactant and pure water in a clean room and completely dried. The support frame 37 of the tension jig 34 had an inner size of 2202 × 2582 × thickness of 21 mm. The linear reinforcing body 12 was stretched through the guide holes 35, 35 formed in the support frame 37, and the end portions thereof were fixed by the clamping means 36 using screws. By fitting this tensioning jig 34 on a molding substrate 30 placed on a surface plate (not shown) of a slit coater as shown in FIG. 4B, three linear shapes stretched on the tensioning jig 34 are provided. As shown in FIG. 4B, the reinforcing body 12 can be brought into close contact with the lower layer 44 a formed on the molded substrate 30.

  Furthermore, the molded substrate 30 is vacuum-sucked on a surface plate (not shown) of a slit coater, and the surface of the lower layer 44a on which the linear reinforcing body 12 is placed, as shown in FIG. The above-mentioned fluoropolymer pellicle film solution is applied while moving the film at a constant speed to form the overcoat layer 43b. At this time, the gap B between the discharge port of the slit die 32 and the lower layer 44a was set to 200 μm so that the tip of the slit die 32 did not contact the linear reinforcing body 12. Further, the thickness of the overcoat layer 43b was set so that the film thickness after drying was 4.0 μm. Thereafter, the molded substrate 30 is moved to a stationary table (not shown) while being careful not to displace the tensioning jig 34, air-dried for a while while leveling the overcoat layer 43b, and then 180 ° C. with an IR lamp (not shown). Until the solvent was completely evaporated to obtain a cured upper layer 44b. The upper layer 44b can be integrated with the lower layer 44a to obtain the pellicle film 44 including the three linear reinforcing bodies 12.

  The linear reinforcing body 12 included in the pellicle film 44 was cut using a cutter knife inside the support frame 37 of the tension jig 34, and the tension jig 34 was removed from the molding substrate 30. Further, as shown in FIG. 6, the pellicle film 44 formed on the molded substrate 30 is bonded to the aluminum alloy frame 38 formed in substantially the same outer shape as the molded substrate 30, and then the frame 38 is gently removed. The pellicle film 44 was peeled from the molded substrate 30 by lifting, and a 6 μm thick pellicle film 44 including the three linear reinforcing bodies 12 was obtained.

Production of Pellicle 42 The prepared pellicle film 44 is adhered to the pellicle film adhesive layer of the pellicle frame 10 produced in advance, and unnecessary pellicle film 44 around the pellicle frame 10 is cut and removed with a cutter knife. The shown pellicle 42 was completed.

Evaluation The prepared pellicle 42 was brought into a dark room in a clean room, and the film surface of the pellicle film 44 was inspected with a condenser lamp having a light intensity of 400,000 lux. As a result, no abnormality such as generation of foreign matters was observed in the vicinity of the linear reinforcing body 12. Moreover, the surface reflection of the linear reinforcing body 12 was sufficiently suppressed during the inspection, which did not hinder foreign matter inspection. Further, the pellicle 42 was placed horizontally from a surface plate surface (not shown) having a flatness of 5 μm via a fixed gap, and the amount A of the pellicle film 44 depending on the self-weight was measured (FIG. 3). As a result, the self-weight sag amount A reached the maximum value at the center of the pellicle film 44 and was 0.3 mm. Further, air blow was performed on the pellicle film 44 at a primary pressure of 4.0 kgf / cm ² using an air gun having a diameter of 2 mm, and the adhesion between the linear reinforcing body 12 and the pellicle film 44 was confirmed, but peeling occurred. There was no strong adhesion. From the above, it was confirmed that the pellicle 42 has no problem when used as a normal pellicle.

(Comparative example)
In the example, a pellicle film having a thickness of 6 μm was manufactured in the same manner as in the example except that the pellicle film solution was applied only once and the linear reinforcing body 12 was not included. The manufactured pellicle film was adhered to the pellicle frame 10 similar to that prepared in the example to obtain a pellicle. The obtained pellicle was evaluated in the same manner as in the example. As a result, the amount A of the pellicle film hanging down was 0.9 mm at the center of the pellicle. The pellicle 42 of the example was larger than the amount of drooping A of its own weight.

  Since the pellicle according to the present invention supports the pellicle film with a linear reinforcing body, it is possible to suppress the amount of the pellicle film that hangs down by itself, and to eliminate the risk of interfering with the apparatus member in the exposure machine or the like. For this reason, the pellicle can be increased in size.

  10 is a pellicle frame, 12 is a linear reinforcing body, 16 is a vent hole, 18 is a recess, 22 is a groove, 30 is a molded substrate, 32 is a slit die, 34 is a tensioning jig, 35 is a guide hole, 36 is a clamping means, 37 is a support frame; 38 is a frame; 42 is a pellicle; 43a is an undercoat layer; 43b is an overcoat layer; 43c is a coating layer; 43d is a semi-dry layer; 44 is a pellicle film; 44a is a lower layer; Layer, 44 'is a convex portion, 46 is a mask adhesive layer, 47 is a filter, 48 is a separator, 64 is a pattern, and A is the amount of drooping.

Claims (9)

A pellicle having a pellicle film attached to a pellicle frame having a polygonal shape and having a thickness of at most 100 μm, and a linear reinforcing body made of iron-based alloy or stainless steel is bonded to the pellicle film. The pellicle is stretched between two opposite sides of the pellicle frame. 2. The pellicle according to claim 1, wherein the linear reinforcing body has a thickness of 50 μm or less and is entirely enclosed in the pellicle membrane. 2. The pellicle according to claim 1, wherein the linear reinforcing member has a thickness of more than 50 μm and is joined in a state in which at least a part thereof is embedded in the pellicle film. 2. The pellicle according to claim 1, wherein the pellicle frame has a rectangular shape and a long side is at least 1000 mm . 2. The pellicle according to claim 1 , wherein a surface of the linear reinforcing body is blackened . A pellicle in which a pellicle film is attached to a polygonal pellicle frame, wherein a linear reinforcing body made of at least one carbon fiber having a maximum thickness of 100 μm is bonded to the pellicle film, and the pellicle features and to Lupe trickle that is stretched between two sides facing each other of the frame. The pellicle according to claim 6 , wherein the carbon fiber is a stranded wire, and the entirety thereof is included in the pellicle film . Applying a pellicle film-forming solution to a flat surface to form a base layer that is thinner than the pellicle film to be formed;
Stretching a linear reinforcing body made of an iron-based alloy, stainless steel, or carbon fiber on the underlayer; and
Applying the pellicle film-forming solution onto the underlayer so as to cover the linear reinforcement, and forming a pellicle film having a predetermined thickness including the linear reinforcement. A method for manufacturing a pellicle film. The method for producing a pellicle film according to claim 8, wherein the thickness of the underlayer is 60% or less of a pellicle film to be formed .

Images