TW200919081A - Large pellicle frame and a method for holding such a frame - Google Patents

Abstract

A frame of large pellicle comprising a polygonal frame having a plurality of sides, a pellicle film bonded to the upper edge surface of the frame, and an adhesive material applied on the lower edge surface of the frame wherein upon grasping the frame of a large-sized pellicle the longest side of which frame is 1m or longer, the frame has protrusions or recesses for grasping on all sides of the frame. The frame is grasped surely by grasping the protrusions or recesses for grasping at least one position or more on each side of the frame simultaneously, and the pellicle can be taken out easily from a container without causing distortion or flexure when it is stuck on a photomask, or the like.

Description

200919081 IX. Description of the Invention: [Technical Field] The present invention relates to a frame which is a component of a film which is used to prevent foreign matter from adhering to a photomask or a reticle. The photomask or the main mask is used in a lithography step in manufacturing a thin film transistor (TFT) or a color filter (CF) constituting an LSI or a liquid crystal display (LCD). In particular, the present invention relates to a component of a large-sized film for liquid crystal, that is, a frame member having a long side length of 丨m or more as a constituent member of a large-sized film. [Prior Art] The present invention relates to a technique of a frame which is a constituent member of a film, and first, a thin layer will be described. Previously, in the fabrication and processing of the device, the lithographic engraving step of forming a circuit pattern on the wafer was usually performed using a dustproof mechanism called a film to prevent foreign matter from attaching to the reticle or the main reticle. The film is formed by a transparent polymer film (hereinafter referred to as "film") having a thickness of (4) or less of nitrulose (cell) or a cellulose derivative or a fluorine compound (hereinafter referred to as "film"). The reticle or the main reticle is formed in the same shape and has a thickness of several millimeters on the upper edge of the frame. In general, the film is marketed in a number of cases where the lower edge of the frame is coated with an adhesive and the protective film is laminated on the u-stick layer. The adhesive layer is used for fixing the film on the reticle or the main reticle, and the protective film is used to protect the adhesive layer, so as to provide adhesion to the adhesive layer use. 132763.doc 200919081 Such a film is usually supplied by a film manufacturer to a manufacturer who manufactures a photomask or a main mask (hereinafter referred to as a "mask manufacturer"). The mask manufacturer peels the protective film from the film, attaches the film to the mask or the main mask by using the adhesive layer, and then supplies the mask or the main mask to the low-cost quotient for the lithography. For example, a semiconductor device manufacturer or a liquid crystal panel manufacturer. The treatment of the film must be carried out in such a manner that dust does not adhere to the property of being used as a dustproof mechanism. Generally, when processing a film, a pin-shaped jig is generally inserted into a hole formed on a side surface of the outer surface of the frame to hold the frame, and the body of the inflammator is taken up so that the human hand does not directly contact the film (refer to, for example, a patent) In addition, the following scheme is also proposed to form a groove on the outer side of (4) for inserting a rotating rod, thereby using a clamp having a rotating rod to hold the frame, and the human body is not grasped by the body of the clamp The film is directly in contact with the film (see, for example, Patent Document 2). * When the film manufacturer transports the film to the mask manufacturer, the film is generally placed in a sealed container and transported to prevent dust from adhering. Of course, since it is required to reliably fix the film in the storage container, it is also proposed to insert a pin-shaped dislocation into the hole formed on the outer side surface of the frame to fix the film in the container (see, for example, Patent Document 3). Also, the following is also proposed. The following is a method of using a tray and a lid constituting a storage container to form a horizontal projection on the outer side surface of the frame. The film is inserted thereinto to fix the film in the container (see, for example, Patent Document 4 or 5). Further, it is not limited to the function of holding or fixing the protruding portion or the groove or the hole formed on the outer surface of the frame. The study also studied the shape of the frame of the film 132763.doc 200919081. For example, to ensure that the inside and outside of the film are ventilated, the side of the frame is inserted from the side of the frame through the hole of the inner side ( For example, the distance between the pattern surface of the mask and the film is controlled (refer to, for example, Patent Documents 7 to 9), and the exposure of the reticle is controlled (for example, refer to the patent document). (1) forming a step of the reticle adhesive material (see, for example, Patent Document 丨 2), and a pressurizing region when attaching to the reticle is referred to, for example, Patent Document 13), and is proposed on the upper surface of the frame or The lower edge surface is provided with various shapes of grooves or protrusions or steps. In recent years, with the increase in the size of the LCD, the mask and the film used for the mask have also been enlarged, and the film having the longest side longer than im has been marketed. Field In the future, the technicians believe that the enlargement of the film and the mask will be indispensable for the enlargement of the LCD and the improvement of the production efficiency. In the case of a large-sized mask, the raw material is mostly a synthetic quartz substrate, so the material cost is very high. Therefore, the mask size is usually designed to be as small as possible relative to the size of the effective exposure area that has been set. For the case of a large film attached to a large mask, the size of the mask is limited and the sticker is attached. The width of the frame attached to the film from the effective exposure area to the peripheral end of the mask is also restricted, so even if the film is enlarged, the actual situation is that the width of the frame cannot be increased. Further, the mask is not enlarged. The distance (pitch) between the pattern surface and the film is restricted by the optical system of the exposure machine, so there is also a restriction on the height of the frame. Therefore, even if the film is enlarged, the actual situation is that the height of the frame is still Can't get bigger. 132763.doc 200919081 The area is 1〇〇〇 cm ′ The following method is proposed: Patent Document 14). 2 or more of the large thin side of the frame, on the other hand, the width of the method for suppressing the bending of the frame of the film film is larger than the width of the short side (in recent years, the manufacturer of the photomask and the like is taken out from the storage container) The film adopts a method of taking out the film from the interface between the protective film and the adhesive in a state where the protective tape is attached to the tray. In order to take out the film directly from the storage container, it is directly placed on the mask, but it is required to be used in the case of (4)

When the take-out operation is performed, warpage and distortion do not occur on the thin web (see, for example, Document 15). J

[Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 2 No. Hei. No. Hei. No. Hei. [Patent Document 5] Japanese Laid-Open Patent Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. Japanese Patent Laid-Open Publication No. 2002-1 82373 [Patent Document 8] Japanese Patent Laid-Open Publication No. 2002-182371 (Patent Document No. JP-A-2000-298333) JP-A-2005-338722 [Patent Document 11] Japanese Patent Laid-Open Publication No. 2000-292910 (Patent Document 12) Japanese Patent Laid-Open Publication No. Hei. No. 2006-16303 No. 5, FIG. 6 [Patent Document 13] [Patent Document 1] Japanese Patent Laid-Open Publication No. 2001-109135 [Patent Document I5] Japanese Patent Laid-Open No. 2007-017811 No. 132763.doc 200919081 [Disclosure] [Problems to be Solved by the Invention] As mentioned above, in the large film, due to the width and height of the frame, The bending of the edge portion of the film as the size increases. Further, the inventors of the present invention conducted research on the production of a large thin raft having a length of 1.4 m to 2.0 m on the longest side, and found that it is extremely difficult to use the previous method to hold the frame. In other words, as described in the above Patent Documents 1 to 5, a pin, a slide, or the like is inserted into a groove or a hole formed on the outer surface of the opposite sides of the frame to hold or fix the frame. In the prior method, since the side portions of the frame are bent, the jigs such as the pins and the sliders are easily detached from the grooves or the holes, and thus the grooves or holes on the outer side of the frame are not able to be grasped and fixed. For example, a method of inserting a pin into a hole (Patent Document 丨) or a method of inserting a rotating rod into a groove (Patent Document 2) 'Because it is supported by a large λ point on each side of the frame body, the load is easy Concentration, so the pin or the rotating rod can easily fall off due to the bending of the side of the frame. In view of the fact that the high rigidity caused by the change of the material of the frame is also considered as a countermeasure, in view of the fact that there is no dust or the like in the film quality requirement, the actual situation is that the material of the frame cannot be easily changed. In view of the above, various shapes are considered in the shape of the frame, but basically, the shape of the frame in the range of the width and height of the frame to be restrained is considered (see, for example, Patent Documents 6 to 12). Not very helpful for the high rigidity of the frame. In addition, the design of the frame shape 132763.doc 200919081 outside the range of the width and height of the frame is also being studied (see, for example, Patent Document 4 or 5). This is a technique that is excellent in terms of constraints on the frame at the time of the original application. That is, in the case of the original application of Patent Document 4 or 5, the thin enamel for LSI use has become the mainstream, and the reticle size for LSI use is usually 5 to 7 inches (m to 178 mm) on one side, and a liquid crystal display (LCD) ) The large size of the reticle used (the side is smaller than the smaller one), so compared with the size of the large reticle, the size of the reticle can be larger than the size of the film. Because & The design of the shape of the frame outside the range of the width and the height of the frame is not a problem. However, in the future, it is considered that the size of the mask is as small as possible as the surface of the larger film is enlarged. However, it is still impossible to increase the width and height of the frame beyond the need, and it is necessary to improve the method of holding the film. For the film removal method, there is the following method: for example, it is disposed on the side of the rectangular frame A film (pressing sheet) corresponding to the protective film in the vicinity of the central portion is formed by a film holder by a film which is attached to the film container by a tape, and is detected by the film holder. The film is peeled off while the holder is spaced apart from the container (for example, Patent Document 13). However, in the case of a large film, the method is a fixing member (pressing piece) disposed at the center of the side of the large thin ridge. By holding the tape on the storage container, it is considered that even if the film is peeled off and the film is peeled off, the frame b cannot be avoided (see Fig. 9 of Patent Document 13). That is, it is required to be reliably held. In addition to the frame of the film, when the film is taken out from the inside of the 'inner, the film is also required to be removed without bending or twisting on the frame. i, especially for the film from 132763. Doc 200919081 The large-sized film, which has a large weight and is difficult to handle, requires not only the frame that can reliably hold the film during storage, transportation, and storage, but also the wood when it is taken out from the storage container. When the film is not warped or bent, the film is taken out from the interface between the self-protecting film and the adhesive material, so that the film can be directly attached to the mask or the like after being taken out. The present invention provides a c-body for film-forming, which can reliably hold the frame when the frame of the film is processed, and when it is stored, moved, and protected. When the film is to be attached to a reticle or the like, the film can be simply taken out from the container without causing warping or bending of the σ τ τ. Further, the present invention provides a frame using the film. [Means for Solving the Problem] [Inventors of the Invention] In order to solve the above problems, the inventors of the present invention have diligently studied to solve the above problems, and have found a method for solving the above problem: in order to prevent the film from being trapped in the frame of the film On each of the sides, a convex portion or a concave portion for holding is formed, thereby holding a large film having a longest side length of "m~2.〇m. As a result of the research, it is found that the length of the longest side of the method is The large film of m or more can also be effectively used to complete the invention of the present application. That is, the present invention is as described below. a frame having a large-sized film having a polygonal shape frame formed by a plurality of sides, and wherein the length of the longest side of the frame is im or more, and the frame may be provided next to the frame The film on the upper edge surface and the adhesive material coated on the lower edge surface of the frame body, the frame body has a convex portion or a concave portion for holding on all of the side portions. 1 The frame of the large-sized film as described in i above, the convex portion for holding therein I32763.doc 200919081

Or the recessed portion is located on the outer surface of the casing D3. The casing of the large-sized film according to the above 2, wherein the convex portion or the concave portion for holding is located on the outer side surface of the casing and away from the upper edge surface and the lower edge surface. Location. t is as described above in the range of 1 to 1, and is a body in which the convex portion or the concave portion for holding is a groove or a hole. 5: The frame of the large-sized film described in the above 4, wherein the convex portion or the concave portion for holding is a groove or a hole having a space portion widened at a deep portion. 6. The casing of the large-sized film according to the above 4, wherein the convex portion or the concave portion for holding is a groove or a hole having a space portion which is narrowed in the depth. The frame of the large-sized film according to any one of the above-mentioned items, wherein the convex portion or the concave portion for holding is occupied by the convex portion or the concave portion on the side of the frame body The length is 1% or more with respect to the length of each side. 8. The casing of the large-sized film according to the above 7, wherein the convex portion or the concave portion for holding is a groove provided over the entire circumference of all the side portions of the frame. 9. The casing of the large-sized film according to the above 7, wherein the convex portion or the concave portion for holding is a groove partially provided on a side portion of the frame. The frame of the large-sized film according to any one of the above 1 to 6, wherein the convex portion or the concave portion of the holding portion or the concave portion is formed. Each of the plurality of sides of the frame is provided with a plurality of large-sized films, which comprise: a frame of a large film in the above-mentioned frame, and a frame, and A ^ <[body" in the frame The film on the upper edge and the adhesive attached to the lower edge of the frame. • The large film of the above 11 is the longest side of the frame. 132763.doc -13- 200919081 The degree is 1.4 m or more and 2.0 m or less. 13. The frame of the large 4 film recorded in any one of the above ni12, wherein the ratio of the width of the frame to the height is 15 to 4 〇. The casing of the film is a frame of a large film described in any one of the above items, and the method of drawing is to apply to all the sides of the frame of the large film. , „ M 77 Do not hold at least one or more convex or concave parts for holding. r' 15, as described in the above-mentioned 13, the method of holding the large thin and the hips is as follows, in all the side portions, convex portions or concave portions of the frame of the large film. ...the method of correcting the shape of the frame of the large-sized film, which is described in any one of the above-mentioned items. The correction method is that, in the above-mentioned large order, the side of the frame of the film is not to be held at least! The convex portion or the concave portion for holding the above, the deformation of at least the i-body of the frame of the large-sized film. Therefore, the frame 1 is reduced. 7. As shown in any of the above-mentioned 1 to 3, the frame 4 of the large-sized film holding device of the above-mentioned 1 to 3 is also a frame for holding the large film for holding, and the frame is detachable. unit. U 疋8 on the side of the frame. The frame p of the large film as described in the above 1 to 3 and 17rb / middle. The sag is a plate-like protrusion or a rod-shaped protrusion. 19· As shown in the above-mentioned 1-3 to 3, the large-scale 膛 膛 4 4 其中 其中 其中 其中 其中The protrusion of the convex portion is a plate-like protrusion and the 132763.doc -14-200919081 of the 5H protruding portion becomes larger from the four corners of the frame to the central portion of the side. 20. As in the above-mentioned i to 3 and 17 to 19 - m , ^ . The frame of the large-sized film that has been loaded: the convex portion or the concave portion for the middle holding is the front end of the fish-shaped body T and 17 to 2 ° - the frame of the large film described in the item;;: the convex portion or the concave portion for holding is formed by the protrusion p' in the manner of attaching the film to the reticle, and arranging the film The peripheral side and/or the groove formed on the front cover are connected. To 3 and Η to 2m — ^, the convex or concave part of the two holdings is a protrusion formed in the following manner, and when the scorpion is covered, the physical properties of the corpus callosum are combined with other parts. Fixed to the reticle. The casing of the large-sized film as described in the above 7 §, wherein the holding or the recessed portion is the entire portion of the frame. A plate-like projection that is placed on the side of the king's body. 24. The large or concave portion as described in the above 7 is a convex portion M u which is partially provided in the frame body. A plate-like projection placed on the side of the frame. 25. The above-mentioned 1 to 3 and the body, wherein the frame of the large thin enamel described in any one of the items 8 is ^- yt Λ ' ° 卩. Each of the plurality is disposed on all sides of the frame. Rod-shaped projection. Body 26·—a large thin sputum, which is a frame of a large thin mold, which is described in any one of 4i7~25, and is attached to the thin pancreas on the upper edge of the frame. Adhesive attached to the lower edge of the frame. 27. The film having a largeness of 2 or more as described in the above 26, wherein the longest side of the frame has a length of 2 ϋ m or less. 132763.doc 15 200919081 28. The ratio of the width to the height of the large film as described in any one of the above items 26 to 27 is! 5~4 〇. The frame body 29·- a method for holding a frame of a large-sized film, a frame of a large-sized film described in the frame, and all the sides of the frame of the large film of 誃^~25: 丨寺 method It is a convex portion or a concave portion for holding the above. Do not hold at least 1 knife

30. The convex portion or the concave portion of the frame of the large thin crucible as described in the above 29. The method of holding the frame of the thin enamel is on all the sides, and all the holdings are taken, and the 3*--the method of the frame shape of the large-sized film is used, and any one of the 26~28 is used. Speaking of *丄/ The shape of the frame of the large-sized film described above is green: 'The method of the bridge is 'the frame of the above-mentioned large film; the upper " knife is not at least! The convex portion or the concave portion for holding the above: The stress of at least one of the frames of the large-sized film is deformed by the body. < eve 4 box

[Effects of the Invention] According to the frame of the large-sized film of the present invention and the method for holding the frame, the frame can be taken up during handling, storage, transportation, and storage of the film, and the film is attached. When it is placed on a reticle or the like, the film can be simply taken out in the container without causing a click or bend. [Embodiment] An embodiment of the present invention will be described with reference to the accompanying drawings. The embodiment is an example of the constitution of the present invention, and the present invention is not limited to the embodiment of the invention. In the range in which the effects of the present invention are exerted, it is also possible to change various forms of = i32763.doc -16· 200919081. The frame system of the large-sized film of the present invention has a polygonal frame body composed of a plurality of sides, and the length of the longest side of the frame body is 丨m or more, and the film may have a film attached to the upper edge surface thereof. And the adhesive material applied to the lower edge surface thereof. The frame system has a convex portion or a concave portion for holding on all of the side portions. Here, the polygonal shape of the frame generally means a substantially square shape, but may be a polygonal shape in which the corner portion has a notch or an R portion. Fig. 1A is a perspective view showing one embodiment of a casing of a large-sized film according to the present embodiment. Figs. 1A and 1D show a large film attached to a reticle, and Figs. 1B and 1E show a partially enlarged longitudinal section including a frame. Figure, Figure (1) and Figure 1F show the frame of the large film. Fig. 2 is a perspective view for explaining one of the frames of the prior small film (for example, the type of Patent Document 2), Fig. 2A shows a film which is attached to the reticle, and Fig. 2B shows a portion of the groove including the frame. In the cross-sectional view, Fig. 2C shows the frame of the film. As shown in Fig. 1, for example, a large-sized film is composed of a frame 10, a film 1 attached to the upper edge surface 3 of the frame 1A, and an adhesive 2 coated on the lower edge surface 4 of the frame 10. Here, the film 接着 is adhered to the upper surface 3 of the frame 1 through an adhesive (not shown). Further, in Fig. 1A and Fig. 1B, the film frame 1 is adhered to the mask 9 via the adhesive member 2. Before being attached to the reticle 9, the large-sized film has a structure in which a protective ridge (not shown) is adhered to the lower edge surface 4 of the casing 1 via the adhesive member 2. The material of the film 1, the material and shape of the adhesive 2, the material of the adhesive, the material and shape of the protective film, and the like can be used. 132763.doc 200919081: For the film, a transparent polymer film can be used, for example, a derivative or a gas polymer. The film thickness test rate: ^ & good 疋, for example, 1G _ or less, called above. When the film is applied to the upper and upper edges of the frame, for example, a propylene-based adhesive, an epoxy resin, and a yttrium-based yttrium oxide polymer are used. 3

As a sticky material, it can be used as a field. This ethylene-ethylene butylene styrene (sty (10)e-ethylene_butylene_styrene), styrene-ethylene-pr-pylene-egg (10) Or a hot-melt adhesive material such as a thin smoke system; a polysulfide-based adhesive material; an acrylic acid-based adhesive material; or a foam-based adhesive knee-based adhesive tape. The thickness of the adhesive layer is set such that the total thickness of the frame and the thickness of the adhesive does not exceed the distance between the prescribed film and the reticle. Preferably, for example, i 〇 follows 1 _ or more as a protective film. A film composed of a polyparaphenylene m-tree or a polyethylene resin can be used. Further, depending on the adhesive force of the adhesive, a release agent such as a polyfluorene-based release agent or a fluorine-based release agent may be applied to the surface of the protective film to ensure that the thickness of the vine film is preferably, for example, 1 Below mm, 〇.〇1 mm or more. The material of the frame 10 is not particularly limited as long as it can maintain mechanical strength. Examples thereof include a metal, a resin, and a composite material. More specifically, aluminum or an alloy thereof such as Duralumin, iron or an iron-based alloy such as stainless steel, engineering plastic, fiber reinforced plastic (FRp), and carbon fiber may be mentioned. Reinforced plastic (CFRP). Further, it is considered that the self-weight due to the enlargement is preferably increased, for example, it is preferable to use a lightweight and rigid aluminum or an alloy thereof. Regarding the manufacturing method of the frame 1 ,, you can use the method of making a whole. For example, the plate of the body can be cut and cut. In addition, in the case where it is difficult to prepare a sheet of a body due to the enlargement of the film, the top ten and the other parts of the cutting process may be exemplified by welding processing and molding processing (when the metal is taken, the die casting is performed) , for injection molding). In this case, it is preferable that the convex portion or the concave portion for gripping is formed into a body as described below, and when it is a convex portion, it is molded as a detachable part and is preferably attached from the rear portion. Further, blackening treatment such as black chrome electric m (four) treatment or black coating may be performed on the surface of the casing to prevent reflection. Moreover, an adhesive material may be applied to the inner side surface of the frame to catch foreign matter. The frame 10 of the large-sized film of the present embodiment is the longest side of the frame 1 (hereinafter also referred to as "long side". Similarly, the shortest side of the frame is also called "short".

The frame of a large film having a length of 1 m or more is used as a target. For such a frame, although the length of the side of the frame (the length B of the long side of FIG. 1A and FIG. 1D, the length s of the short side) is long, the width of the frame body (8B, height of FIG. 1B and FIG. (Fig. 1B and Fig. 1Eih) is small, so the rigidity has to be reduced as compared with the frame of the small film. When the length L of the long side of the frame 10 becomes 丨m or more, the tendency of the rigidity to be lowered tends to be observed. In the conventional small-sized film assembly 30 for LSI shown in FIG. 2, the length l of the long side is at most μ cm, the length S of the short side is at most 13 cm, and the width w of the frame 30 is The ratio of height h (w/h) = 132763.doc 19 200919081 0.3~〇.8. However, in this issue, there may also be a frame of a large film of the long side of the long L and the object of the Feng object. More than the above and reach 2 -, the length of the short side is 8 for example, and the short side, the wide piece of the frame in the frame: the above case. ^ ^, the ratio of two degrees h such as (w / h) = L5 ~ 4.0 Ye Tian this ratio value gentleman (w / h) = 2 3 4 n is larger, so the rigidity drops more, for (w / ~ -2.3~4.0 The frame is large, and the drop is very large. In addition, there may be cases where (w/h) exceeds 4. Therefore, in the frame of the large film of the image of the present invention, Compared with the first ", the amount of bending in the normal direction of the film surface is very large, and the bending direction of the frame of the large film is different from the bending direction of the previous small film; The ratio of the width w to the height ^ (W/h) is larger than that of the previous frame, and since the edge of the frame itself is long: the MW amount parallel to the film surface under the action of the tension of the film In the frame of the large-sized film of the present embodiment, it is also possible to correct the deformation of the frame by the tension of the film by using the convex portion or the concave portion for holding. This viewpoint will be described below. The frame system of the present invention has a rectangular shape similar to that of the reticle, but is not particularly limited as long as it has a polygonal shape as long as it corresponds to various shapes such as a reticle. Further, in the present invention, the long side is used. The frame with a length of 丨m or more is targeted, but it can also be divided into Do not use the following frame as the object: when the shape of the frame is (1) rectangle, the length of the long side is 1 m or more; when the shape of the frame is (2) square, the length of one side is 1 claw. The above frame; when the shape of the frame is (3) polygonal, the length of the longest side is 1 m to the frame on 132763.doc • 20-200919081. In the present invention, the conditions described below are satisfied. In the case of the above-described frame system, the frame body having the concave portions for holding on all the side portions will be described. The concave portion has grooves or holes. Further, in the invention of the present application, the term "groove" means a recess # formed on the side surface, the inner side surface, the upper edge surface or the lower edge surface of the frame body, and the concave portion on the φ The length of the opening in the circumferential direction is equal to or greater than the height fs of the opening. The term "hole" means that the length of the opening in the circumferential direction is less than 15 times the length of the opening in the height direction. By. Hereinafter, the groove or hole for holding formed on the frame will be described. Fig. 3 is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and Fig. 3A to Fig. 3G are diagrams showing an example in which the grooves or holes for holding are excavated from the outer surface of the casing. Fig. 4 is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and Fig. 4A: Fig. 4B shows an example in which the groove or the hole for holding is excavated from the upper edge surface of the casing. Fig. 5 is a partially enlarged longitudinal cross-sectional view showing various shapes of the casing of the large-sized film of the embodiment, and Fig. 5A to Fig. 5A for the holding of the groove or the I hole from the lower edge of the frame. Formal example. Fig. 6 is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and Figs. 6A to 6G are views showing a state in which the groove or the hole for holding is taken out from the inner side surface of the casing. The frame 10 of the large-sized film of the present embodiment has a groove or hole 7 for holding from the outer surface 5 of the frame toward the inner side. In the following, the groove and the hole are not distinguished unless there is no special notice in advance, and the groove or hole 7 for holding is described. Further, as shown in Fig. 4, the casing 1 of the large-sized film of the present embodiment may have grooves or holes 7 for holding from the upper edge surface 3 of the casing toward the lower direction. Further, as shown in Fig. 5, the frame 1 of the large-sized film of the present embodiment may have a groove or hole 7 for holding the upper edge surface 4 of the frame upward. Further, as shown in Fig. 6, the frame ι of the large-sized film of the present embodiment may have a groove or hole 7 for holding the inner side surface 6 of the frame toward the outer side. Regarding which side of the frame is to be provided for the groove or the hole for holding, it can be placed at a position corresponding to the design of the jig or device used for the gripping, and the groove or the hole is disposed outside the frame. The side is preferred for the design of the fixture or device. Moreover, when the groove or the hole for holding is provided on the outer side surface or the inner side surface of the frame body, it is preferably provided at a position away from the upper edge surface and the lower edge surface so as to be in the film at the time of holding. Excessive forces on the layer of adhesive or the layer of adhesive adhered to the reticle will not work. Therefore, it is more preferable to provide the groove or hole for holding on the outer side surface of the frame and away from the upper edge surface and the lower edge surface. The groove or hole 7 for holding from the upper edge surface 3 of the frame body in the downward direction may be formed to be excavated in the normal direction of the upper edge surface 3, and may be formed in a direction relative to the normal direction. The form that is excavated in the oblique direction. The groove or hole 7 for holding from the lower edge surface 4 of the frame body is formed to be excavated in the normal direction of the lower edge surface 4, and may be formed in a direction relative to the normal direction. The form that is excavated in the oblique direction. The groove or hole 7 for holding the inner side surface 6 of the frame body toward the outer side may be formed to be excavated in the normal direction of the inner side surface 6, and may be formed to be opposite to I32763.doc -22· 200919081 A form that is excavated in the oblique direction of the normal direction. The depth of the groove or hole 7 for holding is based on the surface of the frame. For the groove or hole 7 excavated from the inner side of the outer surface, it is preferable that the depth is the width of the frame. The ratio 'better is 0.01 to 0.5 times' and further preferably 〇〇 = 〇 3 times. Further, it is preferable that the depth of the groove or the hole 7 excavated from the upper edge surface or the lower edge surface is 0. W times the height of the frame body (again, i times is the case of penetration), and more preferably 0.1 to 0.5 times, and further preferably 〇i~〇3 times. Further, as shown in Fig. 7, the frame (4) of the large thin cymbal according to the present embodiment may have a plurality of grooves or holes 7 for holding on the side portions of the frame. Fig. 7 is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and Figs. 7A to 7C are views showing a configuration in which a plurality of grooves or holes for holding are provided. As a combination, there is a groove having a (10) groove or a moon shape, that is, a holding direction from the upper edge of the frame toward the lower direction. The groove for the lower edge of the body facing the upper direction or the body is: The groove or hole for holding the upper edge surface in the downward direction is self-closing. Further, the groove or hole for holding the VI in the outer direction (for example, the case has two grooves or holes as shown below), that is, the lower edge surface faces upward from the body surface toward the outer square hole and the self-frame The groove or the hole for holding the inner side (for example, Fig. 7C). In the present embodiment, the large-sized film holding (4) or the hole, the (4) & (4) is taken for the groove cutting bucket for the following side direction. The groove or hole for the upper groove surface of the hole or the hole 1 or the inner side surface of the upper body facing the upper direction is oriented upward. 132763.doc -23- 200919081 For example, there are two slots or holes having a groove or a hole for holding from the outer side of the frame toward the inner side and a downward direction from the upper edge of the frame. a groove or a hole for holding (for example, FIG. 7B) 'a groove or hole for holding from the outer side of the frame toward the inner side and a groove or hole for holding the upper edge from the lower edge of the frame' ·From the outside of the frame to the inside direction The groove or the hole and the groove or hole for holding the inner side surface of the frame toward the outer side. Further, the groove or the hole for holding is three surfaces of the four surfaces of the frame. The form of excavation, or the form in which all the four surfaces of the frame are excavated from the groove or hole for holding. The grooves or holes for holding are provided on a plurality of surfaces of the frame, thereby enabling the holding and fixing Further, there are two or more types of holding devices for holding different surfaces of the frame, and there is also an advantage that it can be corresponding to the same frame. i,.. Further, the large film of the embodiment In addition to the groove or the hole 7 for holding the above, the frame 1 may have a hole for ventilation (used when the film and the mask are closed and the outside is ventilated when the film is attached to the reticle) Holes or grooves used for other purposes, etc. In order to provide such holes or grooves for use, it is preferable that the protrusions or recesses for holding are grooves or holes provided on the sides of the frame. Thereby, the section of the groove or hole 7 for holding the processing can be improved. The shape is a rectangle (for example, Figure), a ladder paste, Figure 5Α, Figure 6Ε), a polygon) 2 oval (such as Figure 6Β), etc., +囫 or for example, the width of the groove or '如(四) It is shown that the inner diameter of the second hole is deeper along the groove or the hole I32763.doc -24· 200919081. Curvature R or C face as needed. Further, in the frame of the large-sized film of the present embodiment, it is preferable that the groove or the hole 7 has a space portion which is widened at a deep portion. ❹ _ use (example * Figure 3C, Figure 4B15B, Figure 6C and Figure (6), Figure π) '] word = shape (for example, Figure 3D, _). In the case of the space portion ^ which does not exist in the depth, (4), since the wire can be hung on the material, the holding and fixing are more reliable. Furthermore, as the shape of the crotch portion which is widened in the depth, as above

The shape of the L-shaped and the cross-sectional shape of the L-shaped direction may be widened in the depth direction of the frame body, and the cross-sectional shape of the frame body may be widened in the depth direction, and may also be a cross-sectional shape in the longitudinal direction of the frame body. Widened in the depths. Further, it is preferable that the groove or the hole for holding has a space portion which is narrowed in the depth. In this case, the temple is smaller than the entrance of the groove or the hole: when the piece is inserted The member is positioned in contact with the narrowed portion in the deep portion, whereby the gripping member can be prevented from being displaced while being displaced relative to the groove or the hole. As the shape of the space portion which is narrowed in the depth, as shown in FIG. 3B, FIG. 4A, and FIG. 5A, the cross-sectional shape in the width direction of the frame body may be changed in the depth direction or may be the height direction of the frame body. If the cross-sectional shape is narrowed in the depth, the cross-sectional shape in the longitudinal direction of the frame may be narrowed in the depth. An example in which the cross-sectional shape of the longitudinal direction of the casing is narrowed in the depth is a groove partially present in the circumferential direction of the side portion, and the length of the circumferential direction of the opening of the groove is larger than the depth of the groove. (referred to as the shortest distance between the opening of the groove and the deepest part of the groove) (refer to FIG. 12). Further, a case where the length of the opening portion of the groove in the circumferential direction is smaller than the depth of the groove may be mentioned. If 132763.doc •25-200919081 is a frame having a grip portion having such a shape, it can be positioned and held in the groove by a plate-shaped holding tool whose front end is narrowed. Further, the length of the circumferential direction of the opening portion of the groove is preferably 〇. 5 to 30 times, more preferably 2 to 20 times, and most preferably 3 to 1 times. When the ratio is 〇·5 or more, the gripping member is easily inserted, and when the ratio is 3 〇 or less, the appliance is hard to fall off. As shown in Fig. 3, another embodiment of the casing of the large-sized film of the present embodiment is a groove for holding the space portion 7a which is widened from the outer side surface 5 of the casing 10 toward the inner side direction. Or the form of the hole 7. Here, the groove or hole 7 for holding from the outer side surface 5 of the casing in the inward direction may be formed in a direction opposite to the normal direction in addition to the form in which the outer side surface 5 is excavated in the normal direction. The form that is excavated in the oblique direction. The shape of the space portion in which the frame of the large-sized film of the present embodiment is widened in the depth is, for example, an L-shape (for example, Figs. 3C and 3G) and a τ-shape (for example, Fig. 3A). The holding is more reliable because it can be hung on the gripping member as compared with the case where the space portion 7a which is not widened in the depth is present. Figs. 8 and 9 are schematic views for observing the observation direction of the film in order to explain the arrangement of the grooves or holes 7 for holding the frame of the large-sized film of the present embodiment. As shown in FIG. 8A, FIG. 8C and FIG. 8D and FIG. 9 'for the arrangement of the grooves or holes 7 for holding, if all four sides have recesses for holding, the grooves or holes 7 may be spread over The side portion of the casing 10 is disposed over the entire circumference (Fig. 8a), and may be partially disposed on the side of the casing 10 (Figs. 8C to 8D, Figs. 9A to 9C). In the case of partial arrangement, the position of the holding member such as a jig or a device may be aligned, and the groove or hole for holding may be disposed in a specific portion of the frame 132763.doc •26·200919081. In the case where the groove for v ^ holding is partially configured, it is preferable to also provide w on either side of the frame. Λ 配置 在 在 在 在 在 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取 取On the one hand, as in the comparison below, there is another occurrence of bending of the convex portion or the concave ridge. ^^之峨图, can not be adequately suppressed: the frame of the large film of this embodiment makes 'when f: / i. = more is the length of the recess for holding Each: ...·! is 10% or more 'by this, the bias caused by its own weight can be dispersed. Further, it is preferable that the ratio is 2, and the remaining portion is left to be processed, and the member having the function of holding the material on the frame is preferably formed. ^ The length of each side is 90% or less with respect to the length of each side, and further preferably 80% or less. 'Best is 7Q%. For example, the concave portion for the extraction is better on each side. It is 'symmetric with respect to each center of each side: thereby making the bias of the load due to its own weight evenly dispersed. In the frame of the large-sized film of the present embodiment, when the concave portion for holding is used, it is preferably arranged on either side of the frame. When the frame of the film is taken, the negative weight due to its own weight can be uniformly dispersed, and the occurrence of bending can be suppressed. In the frame of the large-sized film of the present embodiment, the groove 7 for holding can also be a groove having a layer shape which is missing from one side of the side wall. Further, the hole 7 for holding may be a longitudinally slit cylindrical hole which is missing from one side of the side wall surface of the hole. That is, for the groove or the hole 7 for holding, the side wall surface of the groove or the side of the hole may also constitute a part of the surface of the frame body 1 763. As such a form, there are grooves or holes of a lower shape: for example, the side wall surface of the groove of the groove reaches the surface of the frame and the surface of the frame is excavated from the groove or the surface of the side wall of the hole. Further, in the hole of the longitudinally cut cylinder, the cross section cut by the longitudinal section of the main shaft naturally contains the hole of the longitudinal section of the main axis (4): it also contains the hole by the unconnected ... v. Examples of the cross-sectional shape are shown in, for example, Figs. 6F and 6G and Fig. 7B. A particularly preferable form is that the wall surface of the groove or the side wall surface of the hole constitutes a frame body! One of the lower edge faces of the ^ is, for example, FIG. 3F and FIG. 3G, FIG. 6F and FIG. 6G, and Β7Β) β under the frame 1〇 = on face 4 'attached with adhesive 2 'the distance between the lower edge surface 4 and the surface of the mask 9 is only widened. The thickness of the adhesive material 2 is known as the wood #真和4香香2 The amount of the gripping member can be easily inserted, and since the diameter of the groove or the hole can be reduced, the strength of the frame is less likely to fall. When using the frame of the above-described form, care must be taken not to apply excessive force to the adhesive layer or the film at the end of the film. In the frame of the large thin shackles of the present invention, it is also possible to prevent the groove or the hole or the groove or the hole in the contact portion of the member, or at least one of the holding members dust. For example, it may be coated with a cushioning material such as polysulfide rubber. Fig. 10 is a view showing the arrangement of the grooves 7 for gripping on the frame of the large-sized film of the present embodiment, as viewed from the side surface of the frame: as shown in Fig. 10A, 'the direction from the side of the frame It is observed that the groove 7 disposed in the side direction may be inclined from the upper edge surface side toward the lower edge surface side, and as shown in FIG. 10A, viewed from the side direction of the frame body, in the direction of the side 132763.doc -28 200919081 The groove 7 for holding may be arranged to be repeated from the upper edge surface side toward the lower edge surface side and from the lower edge surface side toward the upper edge surface side. Further, on the outer side surface of the casing, a hole penetrating in the oblique direction as shown in Fig. 13 may be provided on the four corner portions. By providing such a through hole, it is also possible to insert a rod-shaped ware in the through hole. r In the frame of the large-sized film of the embodiment, the width of each groove or the inner diameter of the hole 2 is smaller than the width W or height h of the frame provided with the frame, for example, when it is disposed on the upper edge surface 3 or the lower edge surface 4 Preferably, the groove or the hole: the length is 0.0W times the width of the frame, more preferably 〇〇1~〇5 times, and further preferably 〇·01~〇.2 times. For example, when it is disposed on the outer side surface 5 or the inner side surface 6, it is preferable that the length of the groove or the hole is 0.0W times the height of the frame body, more preferably 0.01 to 0.5 times, and further preferably 〇〇1~ 〇 2 times. Further, when the degree of ice of the hole or the hole is large, in order to prevent the rigidity of the frame from being lowered, it is preferable that the width of the groove or the inner diameter of the hole is small. When a groove for holding or a space in which the hole 7 is widened is provided, the width or the inner diameter of the widened space is smaller than the width W of the frame or the groove or hole 7 for holding the space. It is used for holding the frame of the film (including two =, the holding of the frame before the film, and the holding of the frame after the film), and effectively utilizing the thin medium. At the time of processing, when the phase is stored in the storage container, and when the film is taken out from the storage container. W will be described in the instructions for holding or holding the groove or hole for holding. FIG. 11A is a partially enlarged longitudinal cross-sectional view for explaining a state in which a large-sized film frame of a configuration is grasped and fixed by a holding member, and FIG. 11A shows a state in which a cross-sectional view is taken in a τ shape. The groove or the hole I32763.doc -29-200919081 is inserted into the upper edge surface of the gripping body having the locking mechanism made of the elastic member 16 such as plastic (4). L shape is used to hold the L-shaped skin sister, slot or hole 7 to insert

(4), the cabinet holding member] 6 for holding and fixing ~® Π The C system indicates that the hole is placed in the shape of the frame and is connected to the side of the frame. The groove for holding the part of the body surface „戈=1: the holding part of the hook portion of the “character shape” (four): the form of holding the ～, and the figure of FIG. 11D is the holding of the frame: _ or the shape of the hole 7 is taken from the other end of the two pieces 16 and is fixed. The form on the inner side of the frame is rectangular = 7 is inserted into the holding member 16 for holding and fixing. In the two-hole pattern, the holding member 16 is reliable in the FIG. 11Α~ hole. The groove for holding and fixing the holding is also used in the present invention, preferably, the above-mentioned large film. On the side portion, 'at least one of the convex and concave portions for holding at the same time is taken at the same time' to reduce the bending of the frame body. It is better to simultaneously hold all the edges on the sides of the large thin frame body. The convex portion or the concave portion is held. When the film is peeled off from the photomask, peeling can be performed after the holder hole is taken up, so that the film is peeled off. . Billion transferred by stripping

Secondly, the above-described frame body will be described with respect to each of the side portions. In the invention of the present application, the so-called plate-like convex portion is formed on the outer side, the inner side surface, and the upper edge of the frame body of 132763.doc • 30· 200919081. The convex portion of the surface or the lower edge surface and the length of the convex portion in the circumferential direction is 1.5 times or more the length in the height direction. The so-called rod-shaped convex portion refers to the length of the convex portion in the circumferential direction. Less than 1.5 times the length of the convex portion in the height direction. First, the convex portion (hereinafter also referred to as "protrusion portion") formed in the casing will be described. Fig. 14 is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and Figs. 4A to 14G are views showing a configuration in which the projecting portion is provided on the side surface of the casing. Fig. 15 is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and Figs. 15A to 15D are diagrams in which the projections are provided on the upper edge surface of the casing. A partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and FIGS. 6A to 6D are examples in which the projections are provided on the lower edge surface of the casing. Fig. 7 is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and Figs. 7A to 7G are examples in which the projecting portions are provided on the inner side surface of the casing.

As shown in Fig. 14, the casing 1 of the large-sized film of the present embodiment has a projecting portion 7 which faces outward from the outer surface 5 of the casing. Further, as shown in Fig. 15, the frame 1 of the large-sized film of the present embodiment may have a protruding portion 7 that faces upward from the upper edge surface 3 of the frame. Further, as shown in Fig. 16, the casing 10 of the large-sized film of the present embodiment may have a projecting portion 7 that faces downward from the lower edge surface 4 of the casing. X, as shown in Fig. 17, the large-sized film body 1 of the present embodiment may have a protruding portion 7 facing the inner side from the inner side surface 6 of the frame. Here, the outer side surface 5 of the frame faces the outer side. In addition to the formation of 132763.doc 200919081, the protruding portion 7 is formed so that the direction of the normal direction of the outward side surface 5 is inclined with respect to the normal direction. : Above the surface: surface == outside, it can also be formed into a shape that is inclined toward the law. The protruding portion 7 protruding from the direction of the lower edge of the frame to the normal direction of the lower edge surface 4 protrudes in a direction oblique to the normal direction of the frame 2: The protrusion in the medial direction 八 八 ^. The inner side of the frame protrudes from the inside of the frame. The shape of the inner side of the inner side surface 6 is also formed in a shape that protrudes toward the line. From the outside of the frame, the side of the line is inclined from the inner side of the frame toward the inner side. = protrusion: the surface of the protruding frame is the reference, and the length is:: Self-frame: good ^.1~5 Times, the protrusion of the i-edge face in the upward direction and the amount of protrusion from the frame to the protrusion are based on the surface of the protrusion and the body, and the length of the frame is the frame of the cabinet. 0·1~5 times, better is 〇”~3 times. ~1Q times 'better' = the upper edge of the frame; the protrusion in the upward direction is in the direction of the lower edge of the frame from the lower edge 4, except for the holding and fixing In addition to the reliability, the curved side of the film Γ:: the curved 'protrusion portion 7 functions as a reinforcing rib. The surface method highlights the direction of the outer side of the Qiu 7 scented body 5 toward the outside direction ===:r.........The condition of the second condition T is in addition to the reliability of holding and fixing, for the exhibition 132763.doc •32· 200919081 Parallel direction When the upper tension acting portion 7 functions as a reinforcing rib, the frame body is bent in the center direction with respect to the surface of the thin raft, and is protruded. As shown in Fig. 18, the frame 10 of the large-sized film of the present embodiment is also in the form of a frame having a plurality of large-sized film frames protruding from the frame. A partially enlarged longitudinal cross-sectional view of the morphological example in the form of 18 Δ ^ , and an example of the form in which the plural number is in the plural number of the upper part in the figure 18 Α to i8G. As a combination, the shape of the protrusion is such that the protrusion from the outer side of the frame toward the outer side of the frame and the upper side of the upper surface of the frame protrude upward from the outer side of the frame toward the outer side. a protruding portion that faces downward from the frame edge surface; a protruding portion that faces the outer side from the outer surface of the body and a protruding portion that faces the inner side from the inner side surface of the frame. Secondly, there are two protrusions, that is, a protrusion from the upper edge of the frame toward the upper direction and a protrusion from the lower edge of the frame toward the lower direction, and facing from the upper edge of the frame a protruding portion in the upward direction and a protruding portion in the inner direction from the inner side surface of the frame. Further, there is a case where (10) a protruding portion is formed, that is, a protruding portion that faces downward from the lower edge surface of the frame and a protruding portion that faces inward from the inner side surface of the frame. Further, it is also provided in a form in which a projection is provided on three of the four surfaces of the casing: a shape in which the projections are provided on all four surfaces of the casing. The protrusions are arranged on the plurality of surfaces of the frame, so that the holding and fixing are more reliable, and the reinforcing direction of the frame can be increased. χ For the two or more types of holding devices that hold different surfaces of the frame, there are advantages in that they can correspond to the same frame. 132763.doc •33· 200919081 The cross-sectional shape of the protruding portion 7 is a rectangle (for example, FIGS. 14A and 14B, FIG. 15A, FIG. 16A, FIG. 17A and FIG. 17B), and a trapezoid (for example, FIG. 14F, FIG. 15D, FIG. ), polygonal, circular, semi-circular (for example, FIG. 15B, be) or elliptical (for example, FIG. 14G, FIG. 17G) and the like, and there is no particular problem. The curvature r or C plane can also be set at the corner as needed.

Fig. 19 and Fig. 20 are schematic views for observing the observation direction of the film in order to explain the arrangement of the protruding portions on the frame of the large-sized film of the present embodiment. As shown in FIG. 19A, FIG. 19C, FIG. 19D, and FIG. 20, in the arrangement of the protruding portions 7, if all of the four sides have the convex portions for holding, the protruding portions may be spread over the frame. The side portions are arranged all over the circumference (FIG. 19A), and may be partially disposed on the side of the frame ίο (FIG. 19C to FIG. 19D, FIG. 2A to FIG. 2E). For partial configuration, it is also possible to: handle the position of the holding position when the mask is attached, the position of the alignment mark of the mask, and the holding when the mask is placed on the exposure machine. The m is placed, and the protruding portion is placed at a specific portion of the frame. When the projections are partially disposed, it is preferably disposed on any of the sides of the frame. For the f-curve of the frame, the projection becomes a part of the strength enhancement. In the casing of the large (four) film of the present embodiment, when the convex portion of #4 (4) is a plate shape, it is more preferable that the length of the convex portion for holding is given to the length of each side. In the above, the weight of the load due to its own weight can be dispersed. Further preferably, it is 20% or more, and most preferably more than 3%. Further, when it is necessary to leave room for forming a portion having a function other than holding on the frame by machining, it is preferable that the length of the holding portion of the holding member is 9 with respect to the length of each side. 〇% below...good is I32763.doc • 34· 200919081 _The following is the best 7G% or less. The convex portion for the last day's fortune is arranged at each side, and is symmetric with respect to the respective centers of the respective side portions, whereby the bias of the load due to its own weight can be uniformly dispersed. In the case of the large-sized film frame of the present embodiment, when the convex portion for holding the field is in the shape of a rod, it is preferable to arrange a plurality of the convex portions on the side of the frame. The refusal to do the transcripts of the shovel can be made by the self-biased uniform dispersion, thereby suppressing the occurrence of bending. Fig. 10 is a view showing the projection of the human enamel film frame in order to explain the present embodiment. A schematic view of the arrangement of the parts from the side of the frame. As shown in Fig. 10, the side of the frame is oriented from the side of the frame, and the side of the frame is oriented from the upper edge to the lower edge. Further, as shown in the figure, the side of the frame may be viewed from the side of the frame, and the protrusion may be formed from the upper edge side toward the lower edge side and from the lower edge side toward the upper edge. Fig. 21 is a partially enlarged longitudinal sectional view showing a shape (4) in which a protruding portion provided on a frame of a large thin casing is detachably fixed to a side portion of the frame body, and Fig. 21A shows a screwing, Fig. 21A shows the fixing by the consumable device, and Fig. 21C shows the fixing by the elastic body, Fig. 21 In the case of the large-sized film of the present embodiment, it is preferable that the protruding portion 7 of the frame 10 is detachably fixed to the frame 1 as shown in FIG. On the side of the cymbal. After being attached to the reticle with a higher rigidity than the frame of the film, since the rigidity of the frame of the film is not a problem, the protrusion for improving rigidity or solidity and holding can be removed. In this way, it is possible to avoid restrictions on the holding and fixing positions during the processing of the mask and the holding and fixing positions when the mask is placed on the exposure machine. 132763.doc -35- 200919081 :Second: When the cover is peeled off, (4) The protruding portion is attached. By the rigidity of the adjacent frame, and the peeling force can be reliably transmitted due to the pick-up and fixing, the peeling force can be reliably transmitted. For all, it is necessary for the mechanical fixing method of loading and unloading, and the number is strong. As shown in Fig. 21, for example, a screw, a coupling a, an insertion of an elastic body, a clip eight, etc. are mentioned. Good 彳: The touch part performs some kind of surface treatment. For example: Covering. When the protrusion is high, the rubber is high. When the loading and unloading, the protruding portion can also be formed of a rigid material. When the protruding portion is attached to the outer surface or the (four) surface of the frame, the hole for mounting the protruding portion or the simple The imaginary inner Γ is the height of the frame body. 01~1 times, preferably (MH~0.5 times, better; double. Also install the protrusion on the upper surface of the frame or the frame Wide sound: The size (inner diameter) of the hole or groove for mounting the protrusion is: 0.0H times the width of the body, preferably 〇〇1~〇5 times. To avoid the rigidity reduction of the frame' Preferably, the hole or the groove is as shown in Fig. 19 or the circle 2G. In the frame of the large (four) film of the present embodiment, for example, the shape of the protruding portion of the frame 10 is preferably a plate shape. The thickness of the plate is thinner than The width or height h of the frame of the plate is set. For example, it is preferable that the thickness is 1 or more times the protrusion amount of the protruding portion 7, and more preferably (U times or more. When the protruding portion 7 is hook-shaped, the curved front end portion 7a may be larger than the width or height of the frame in which the plate is provided. "Here, as shown in Fig. 20 (4), when the protruding portion 7 is plate-shaped Alternatively, the protruding amount of the protruding portion may be continuously changed from the four corners of the frame to the central portion of the side of the frame. 132763.doc • 36 - 200919081 Therefore, the rigidity near the center of the weakly rigid side portion is strengthened, so that the rigidity of the four corner portions is As shown in Fig. 22, in the frame of the large-sized film of the present embodiment, the shape of the protruding portion 7 of the frame 20 can be made into a rod shape. Other forms of the frame of the large-sized film (the perspective view of the protrusion is shown in the month, and FIG. 22A shows the large film attached to the mask). 22B shows the frame of the large-sized film. The cross-sectional shape of the protrusion 7 of the bar shape: rectangular , trapezoidal, polygonal, circular, circular, etc., there is no special problem: If necessary, the curvature (four) surface can also be set on the corner. The protrusion 7 can also be placed on the upper and lower edges of the frame 20 On the side, the outer side or the inner side. Figure 22 is on the outside For example, when the rod is disposed on the upper edge surface 3 or the lower edge surface 4, the length of the rod diameter is preferably the width of the frame (M 2 times, more preferably 〇 1) ~ 〇 5 times. For example, when the rod is placed on the outer side surface 5 or the inner side surface 6, the length of the rod diameter is preferably the height of the frame body, 1 to 3 times, more preferably 〇·ι~1 Fig. 23 is a schematic view showing the observation direction of the film in the arrangement of the rod-shaped protruding portions on the frame of the large-sized film of the present embodiment, and Fig. 23 and FIG. Three protruding portions are respectively disposed on the short side and the long side; FIG. 23B is a case where the (10) protruding portion is respectively provided on the short side and the long side, and the Hgl protruding portion is respectively disposed at the four corners. Fig. 23c is a case in which the projections on each side of Fig. 2 are integrated. In Fig. 23Ct, since the three rod-like projections 7 are formed into a body, in addition to the foreseeable improvement in strength, the operation is performed at the time of unloading. In the frame of the large film of the present embodiment, it is preferred that the front end of the projection portion is 132763.doc -37-200919081 The hook shape is, for example, an L shape (for example, a figure and a figure uE'FIG. 15C, FIG. 16D, FIG. 17C, and FIG. 17E), and a τ shape (for example, FIG. 14A and FIG. 4). Compared with the case of no hook, since Because it is hung on the holding member, it is more reliable to hold and fix. In the frame of the large-sized film of the embodiment, when the film is attached to the reticle, the protruding portion of the frame can be formed as Alternatively, in the frame of the large-sized film of the present embodiment, when the film is attached to the reticle, the protruding portion of the frame may be formed to be connected to the groove formed on the reticle. Fig. 24 is a partially enlarged longitudinal sectional view showing a protruding portion provided on a casing of a large-sized film, and Fig. 24A is a view showing a state in which the protruding portion is a [word shape and the side of the front end of the blue curvature is connected to the reticle. The lanthanum system has a shape in which the protruding portion has an L shape and the front end is inserted into a groove provided in the reticle. As shown in Fig. 24A, when the front end portion 7a of the U-shaped projection portion in the vertical direction with respect to the lower edge (four) protrudes more than the lower edge surface of the adhesive member 2, the front end portion 7a of the L-shaped projection portion is used with the photomask. 9 is arranged in such a manner that the outer sides are substantially connected. Alternatively, as shown in FIG. 24B, when it is necessary to arrange the end portion 7a of the l-shaped projection with respect to the vertical direction of the lower edge surface 4 so as to be closer to the outer side surface of the mask 9, the light can be set to g.夕 | The surface is dug into the same shape as the front end. In the case of any of Figs. 24A and 24B, when the film is attached to the photomask, the alignment of the film can be simplified, and the accuracy of the attachment position of the film can be improved. Attached to the frame of the large thin enamel that is stored in the shape of the sorrow, the protrusion of the frame can be formed and formed on the side of the blister and the light when the enamel is attached to the outer hood. The slots on the cover are connected. For example, it is formed in such a manner that either one of the left and right of the protruding portion of the frame body of 132763.doc -38-200919081 is connected to the outer peripheral side surface of the reticle, and the other is connected to the groove formed on the reticle. Or in a form in which the protruding portion of the frame body has a U-shape, and the bent portion of the front end side is connected to the outer peripheral side surface of the reticle, and the bent portion of the front side is connected to the groove formed on the reticle. . In this way, when the ruthenium film is attached to the reticle, the morphological effect can be performed within a range in which the alignment of the film can be simplified and the precision of the attachment position of the film can be improved. Deformation. Fig. 25 is a partially enlarged longitudinal sectional view showing the combination of other parts on the projections provided on the frame of the large film to make a large (four) material. As shown in Fig. 10, in the frame of the large-sized film of the present embodiment, when the film is attached to the cover 9, it is preferable to form the projecting portion 7 of the frame and other parts 15 as follows. Combined to physically fix the frame to the reticle 9. Thereby, the film can be reliably placed on the reticle to prevent detachment 4 . As a method of attaching the other component 15 to the protruding portion 7 of the casing, various fixing methods such as a screw crushing, a light clutch, an elastic body, and a clip 1 can be used. The protruding portion is also used for holding and fixing, and can be effectively utilized when the film is processed and the film is taken out from the container when the film is processed. Hereinafter, a description will be given of a method of holding and fixing the protruding portion by the holding member. Fig. 26 is a partially enlarged longitudinal sectional view showing a state in which a large-sized film frame is taken up by a holding member, and Fig. 26A shows a section in which the solid body is dead and has a profile. In the shape of the protrusion of the rectangle, the lake shows that the opening of the protrusion provided on the outer side of the frame and the protrusion of the L-shaped object can be 〇A p ±, Figure 26C It means that the holding and fixing settings 132763.doc •39- 200919081 are on the upper edge of the frame and w (10) means the form of the protrusion having the L-shaped cross section, and ^ U疋 is provided in the frame. The shape of the two rectangular-shaped dogs on the inner side is the shape of the soil, ~ heart. In Figs. 26A and 26C, the holding member 16 is sinly grasped, and the fixed space Φ is enlarged and enlarged. In Fig. 26B, before the protrusion is formed

^Sickle knife) is reliably held and fixed by being hung on the gripping member 16. Further, in Fig. 2fin ^ U coffee ', 〒' is hung on the holding member 16, and the two rectangular shapes and the upper parts are available for comparison with each other. For the frame described above, 疒... i. Right, “The upper part has the concave part for holding, and the frame is in the

Each of the frames i 具有 has a convex portion for holding, and it is of course possible to use a combination of the concave portion and the convex portion for holding. In the 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视 重视In the case of holding the frame of the film of the present invention, it is preferable that at least one or more of the convex portions or the concave portions for holding are simultaneously held on each side portion of the frame body, and more preferably At least two or more holding convex portions or concave portions are simultaneously held on each side of the frame body, and preferably, all the convex portions for holding are simultaneously held on each side portion of the frame body. Or a recess. On the frame in which the connector has a phase, the tensile stress is applied in the inner direction by the tension of the film to be contracted. In the present embodiment, in the form in which the groove or the hole for holding is excavated from the inner side surface of the casing, the outer side stress can be applied via the holding member (4) inserted into the groove or hole for holding. Thereby, the curvature caused by the above stress can be bridged. Further, in any of the following forms, that is, the groove for holding or 132763.doc • 40' 200919081, the hole is excavated from the upper edge of the frame, and the groove or hole is used for the frame. The form in which the lower edge surface of the body is excavated, or the groove or hole for holding the body is excavated from the outer side surface of the frame body, for example, a space portion which is widened in the inner side of the groove of the groove, and Before the insertion of the gripping member, the locking mechanism is placed on the end portion, whereby the short positive frame body is deformed toward the inner side 2 by the influence of the thin cymbal. Similarly, for the convex portion formed on the frame body, the bran 1 is grasped by the convex portion

However, the frame can be corrected to be deformed inward by the influence of the film. Furthermore, the method of correcting the deformation of the frame inward is not only suitable for correcting the inward deformation caused by the contraction tension of the thin tendon, but also suitable for correcting the force due to the self weight or film tension of the frame. When the shape of the frame of the large-sized film is corrected, it is preferable that the convex portions or the concave portions for holding at least the above-mentioned positions are simultaneously held on the respective side portions of the frame body of the large-sized film. And stress is applied to at least the crotch of the frame of the large-sized film, thereby reducing deformation of the frame. [Examples] The inventors of the present invention conducted experiments using a frame having a large-sized film of the present invention having the above configuration, and as a result, obtained good results as shown in the following examples. [Example 1] A frame made of an aluminum alloy having a long side of 1600 mm, a short side length of 1400 mm, a visibility of 14 mm, and a height of 6 mm was prepared. The height of the side of each side is 3 mm, centered on the sides and 3 points from the sides of each side of 250 mm, and all the four sides of the frame are 132763.doc •41 · 200919081 Three parts of each side are machined 'to form a groove having a length of 200 mm in the circumferential direction of the opening, a height of the opening portion of 爪$ claws, and a groove depth of 3 mm. A polyethylene foam substrate (having a thickness of 1 mm) having an acrylic pressure-sensitive adhesive applied to the surface thereof was attached as an adhesive layer to the lower edge surface of the frame. Next, the protective film having the same frame shape as that of the above-mentioned frame, that is, the pressing piece having a width of 10 mmx and a length of 9 mm in the central portion of the long side, and a central portion of the short side having a width of 10 mm×length 75 The pressing piece of 〇mm and the pressing piece having a radius of 1 mm around the apex of the four corners are exposed to the outside of the frame (see FIG. 27), and the surface is coated with polyoxyl A protective film made of a polyethylene terephthalate resin of a film is laminated on the adhesive layer. The frame of the large-sized film with the protective film obtained in this manner is mounted on the tray of the storage container vacuum-formed by the ABS resin material, and the pressing pieces of the above-mentioned eight parts are passed through the adhesive tape (tape size: long side i5) 940 mm, short side 15 _x790 mm, four corners 15 _ χ 6 〇匪) adhesively fixed on the tray. [Embodiment 2] A frame having the same length as that of the first embodiment is prepared in the same manner as in the first embodiment except that the length of the long side is 1800 mm, the length of the short side is 16 mm, and the width is 16 ηππ. The frame is fixed to the tray. [Example 3] A frame having the same length as the length of the long side of 2000 mm, a length of the short side of 18 〇〇 claws, and a width of 18 mm was prepared, and 132763.doc - 42- 200919081 The frame was fixed to the tray in the same manner as in the first embodiment. [Embodiment 4] The center of each side and the points of the claws on both sides of each side are centered on the outer side of the frame, and the three sides of each of the four sides of the frame are formed on the side of the frame. A frame having the same opening diameter as that of 3 mm and a depth of 3 mm was prepared, and a frame similar to that of the above-described Example 2 was prepared, and the frame was fixed to the tray in the same manner as in Example 。. [Comparative Example 1] A groove having a height of i·5 mm and a groove depth of 3 mm was formed over the entire circumference of the outer side of the short side, and a gripping portion was not formed on the long side, and other preparations were made. The frame was the same as that of the above-described second embodiment, and the frame was fixed to the tray in the same manner as in the first embodiment. [Example 5] A circular hole having a diameter of 3 mm and a depth of 3 claws was formed at three positions on the outer side surface of the frame at a position of 150 mm from the center of the long side and at both ends of the frame. In the center of the short side, a circular hole having a diameter of 3 mm and a depth of 3 mm is formed on the outer side of the frame, and the same as in the above-described second embodiment. The frame was fixed to the tray in the same manner as in Example j. The evaluation results of the above Example 5 and Comparative Example i are shown in Table 1 below. The reliable evaluation of the film frame is carried out by adhering the frame to the front of the tray. In the embodiment 丨~3, 12 sets of clamps having a shape of a plate having a width of 100 mm and a thickness of 〇75 mm made of reinforced plastic and holding 132763.doc-43-200919081 holding members are prepared as holding members. The holding member is inserted into each side of the frame to be held in all the grooves for holding, and the frame is lifted horizontally. Further, in Comparative Example 1, the same jig was inserted into the six portions centering on the two short sides and the two sides of the two short sides being 25 () _, and the frame was Lift up horizontally. Moreover, in the embodiment, a rod having a diameter of 2 mm made of reinforced plastic is prepared as a holding member, and the holding member is inserted into all the holes for holding each side of the frame, and is held at the same time. And raise the frame horizontally. After lifting horizontally, in a horizontal state, the frame body is up and down five times at a height of 300 in a ratio of one second, and all the holding members are not detached from all the grooves or holes for holding. In the case of "〇", it means that the part of the holding part is used for the partial holding:: or the case of the detachment in the hole, which is indicated by "△", and all the holding parts are used for all holdings. The groove or the hole is detached, and the film is frame-shaped, and is represented by "X". The bending prevention evaluation of the 凊Guang film frame is carried out by a frame that is adhered to the tray placed horizontally by a protective film. In the embodiment, 12 sets of the width of the reinforced plastic are made. (10)_, the clamp of the holding member of the plate shape of the thick production is used as the holding member, and the pieces are inserted into the sides of the frame (4) in the holding groove and simultaneously inserted and the body is lifted horizontally. Further, in the comparative example, the same ugly = two short sides of the ten sides and six ends of the two short sides are 250 mm real two, and the frame is lifted horizontally. In addition, in the rod as & 5, a diameter of 2 made of reinforced plastic is prepared, and the holding member is inserted into each side of the frame. 132763.doc -44- 200919081 Hold the hole for holding, hold it at the same time, and lift the frame horizontally. The lifting speed is set to 1 cm per second, and the bending amount of the side of the film frame immediately before the interface between the protective film and the adhesive material is completely peeled off is less than 10 mm, expressed as "◎", for 10 mm or more. In the case of less than 15 mm, it is indicated by "〇". For the case of 15 mm or more and less than 20 mm, it is represented by "△" (the lower limit level which is practically no problem), and for the case of 20 mm or more, Expressed as "X" (at a practical level). [Table 1] I _ Example 1 Example 2 Example 3 Example 4 Comparative Example 1 Example 5 Long side length [mm] 1600 1800 2000 1800 1800 1800 Short side length [mm] 1400 1600 1800 1600 1600 1600 slot Or slot groove slot groove? L slot or hole arrangement 3 sides of each side x4 side only short side full length long side 3 parts short side 1 part slot proportion (%) long side 38 33 30 - 0 - Short side 43 38 33 100 - Reliable holding of the film frame 〇〇〇〇X Δ Preventing bending of the film frame ◎ ◎ 〇Δ X Δ [Simplified illustration] Fig. 1A is a view for explaining the embodiment A perspective view of one of the casings of the large-sized film (the recess for holding is a groove), which shows a large film attached to the reticle. Fig. 1B is a view showing an embodiment of the casing of the large-sized film of the embodiment (the recess for holding is a groove), and shows a partially enlarged longitudinal cross-sectional view including the casing. Fig. 1C is a view showing an embodiment of the casing of the large-sized film of the embodiment (the recess for holding is a groove), and shows a frame of a large-sized film. 132 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。. Fig. 1E is a view showing an embodiment of the casing of the large-sized film of the embodiment (the convex portion for holding is a plate shape), and shows a partially enlarged longitudinal cross-sectional view including the casing.

Fig. 1F is a view showing an embodiment of the casing of the large-sized film of the embodiment (the convex portion for holding is in a plate shape), and shows a frame of a large-sized film. Fig. 2A is a perspective view showing the form of one of the frames of the prior small thin cymbal, showing a film which is attached to the reticle. Fig. 2B is a view for explaining a form of a frame of a conventional small film. Fig. 2B is a partially enlarged longitudinal sectional view showing a groove including a frame. Fig. 2C is a view for explaining the form of one of the frames of the prior small film, which shows the frame of the film. Fig. 3A is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is a form in which the groove or the hole for holding is taken out from the side surface of the casing. Fig. 3B is a partially enlarged longitudinal sectional view showing various shapes of the frame of the large-sized film of the embodiment. The groove or the hole for holding is taken out from the outer surface of the frame. Fig. 3C is a partially enlarged longitudinal cross-sectional view showing various examples of the housing of the large-sized film of the embodiment, which is an example of a form in which the groove or the hole for taking out is excavated from the outside of the frame. FIG. 3D shows a partially enlarged longitudinal cross-sectional view of the large-sized 132763.doc-46-200919081 of the present embodiment, in which the grooves or holes of the wire (4) are excavated from the outer side surface of the frame. example. Fig. 3E is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and the wire holding (four) groove or the hole is excavated from the side surface of the casing. Fig. 3F is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and the wire holding (four) groove or the hole is excavated from the side surface of the casing. Fig. 3G is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and the groove or the hole for wire holding is excavated from the side surface of the casing. Fig. 4A is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is a configuration example in which the groove or the hole for holding is taken out from the upper edge surface of the casing. Fig. 4B is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is an example of a form in which the groove or the hole for holding is taken out from the upper edge surface of the casing. Fig. 5A is a partially enlarged longitudinal cross-sectional view showing various examples of the frame of the large-sized film of the fourth embodiment of the present invention, which is an example of a form in which a groove or a hole for holding is taken out from the lower edge surface of the frame. Fig. 5B is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is a form in which the groove or the hole for holding is taken out from the lower edge surface of the casing. Fig. 6A shows a groove or a hole of various forms of the frame of the frame of the large thin frame of the present embodiment, 132763.doc • 47·200919081; A partially enlarged longitudinal cross-sectional view of the inside is an example of a form in which the side surface for picking up is excavated. Fig. 6B is a partially enlarged longitudinal sectional view showing a large and thin portion of the embodiment, which is an example of a form in which the side surface for picking up is excavated. Fig. 6 is a partially enlarged longitudinal cross-sectional view showing various examples of the frame of the large scraping film of the present embodiment, which is obtained by taking the groove or the hole for the holding from the inner side of the frame. The form of the form.

> Fig. 6 is a partially enlarged longitudinal sectional view showing various aspects of the casing of the large thin shovel according to the embodiment, and is a configuration example in which the groove or the hole for holding is taken out from the inner side surface of the casing. Fig. 6E is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is a form in which the groove or the hole for holding is taken out from the inner side surface of the casing. Fig. 6 is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is a view showing an example in which the groove or the hole for holding is taken out from the inner side surface of the casing. Fig. 6G is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is an example of a form in which the groove or the hole for holding is taken out from the inner side surface of the casing. Fig. 7A is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and is a configuration example in which a plurality of grooves or holes for holding are provided. Fig. 7B is a (9) plan view showing various examples of the frame of the large-sized film of the present embodiment, which is a form of a plurality of holes.价 耆 7 7 7 7 7 7 7 7 7 CM CM CM CM CM CM CM CM CM CM CM CM CM CM CM CM 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力Fig. 8A is a schematic view for observing the arrangement direction of the thin groove for explaining the arrangement of the grooves for holding the frame of the large-sized film of the embodiment. Fig. 8B is a view for explaining the frame of the large film of the embodiment. A schematic view of the observation direction of the film is observed in the arrangement of the upper holding grooves. Fig. 8C is a view showing the observation direction of the film for explaining the arrangement of the grooves for holding the frame of the large-sized film of the present embodiment. Fig. 8D is a schematic view showing the direction in which the film is observed in order to explain the arrangement of the grooves for holding the frame of the large-sized film of the present embodiment. Fig. 9A is a view for explaining the large film of the embodiment. A schematic view of the observation direction of the film is observed in the arrangement of the grooves for holding on the frame. Fig. 9B is a view for explaining the arrangement of the grooves for holding the frame of the large-sized film of the embodiment. Fig. 9C is a schematic view showing the direction in which the film is observed in order to explain the arrangement of the grooves for holding the frame of the large-sized film of the present embodiment. Fig. 1A is for explaining A schematic view of the arrangement of the grooves for holding the frame of the large-sized film of the present embodiment as seen from the side surface of the frame. Fig. 1 〇B is for explaining the frame of the large-sized film of the present embodiment. The outline of the arrangement of the grooves for holding is shown in the direction of the side of the frame. 132763.doc -49- 200919081. The figure shows the frame of the large phase of the present embodiment which is held and fixed by the holding member. In the embodiment of the present invention, a partially enlarged longitudinal cross-sectional view of the embodiment of the large-sized film of the present embodiment is shown in the drawing. UC is a partially enlarged longitudinal cross-sectional view for explaining an example of a case where a large-sized film of the present embodiment is held and fixed by a holding member. The Δ drawing is used to describe the holding member. Hold, fix An enlarged longitudinal sectional view of a frame-shaped example of a large-sized film of the embodiment of the present invention is an enlarged cross-sectional view of a frame of a large-sized film of the present embodiment by a holding member. A partially enlarged longitudinal cross-sectional view of the large-sized film of the present embodiment is used to explain a portion of the outer surface of the large-sized film of the present embodiment. A schematic view of a form of a groove for finding a frame, which is a schematic view of a portion from a thin portion. The observation direction is observed for the frame of the large film of the present embodiment. A schematic view of the portion taken in the direction of the sharp direction = a schematic view of a part taken on the frame of the large film of the present embodiment. The observation of the direction of the observation "eight lines are used to illustrate the large film. The arrangement of the holes 132763.doc 50-200919081 on the frame is shown in the outline of the outer surface of the frame. σ Fig. 13 is a schematic view for explaining the arrangement of the corner portions provided on the frame of the large-sized film, which is a schematic view of the portion observed from the direction in which the film is observed. Fig. 14 is an enlarged longitudinal sectional view showing the various forms of the casing of the large-sized film of the present embodiment, which is an example in which the projections are provided on the outer surface of the casing. Fig. i4B is a view showing an example in which various forms of the casing of the large-sized film of the present embodiment are attached to the side surface of the casing, and the projections are provided on the outer surface of the casing. Fig. 14C shows various aspects of the casing of the large-sized film of the embodiment. The enlarged longitudinal sectional view is an example in which a protruding portion is provided on the outer side surface of the casing. The drawings show various forms of the frame of the large-sized film of the present embodiment. A partially enlarged longitudinal cross-sectional view of the U example is an example in which the protruding portion is provided on the outer surface of the frame. Fig. 14E is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and is an example in which the outer surface of the casing is provided with a projection. Fig. WF is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and is a configuration example in which the protruding portion is provided on the outer surface of the casing. Fig. 14G is a partially enlarged longitudinal sectional view showing an example of a casing of a large-sized film according to the present embodiment. Fig. 14G is a partially enlarged longitudinal sectional view showing an example in which a projection is provided on the outer surface of the casing. Fig. 15 is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is an example in which a projection is provided on the upper edge surface of the casing. Fig. 1 is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is a form in which a projection and an outlet are provided on the upper edge surface of the casing. Fig. 1 is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is an example in which a projection is provided on the upper edge surface of the casing. Fig. 1 is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is an example in which a projection is provided on the upper edge surface of the casing. Fig. 1 is a partially enlarged longitudinal sectional view showing various forms of the casing of the large-sized film of the present embodiment, and is an example in which the projections are provided on the lower edge surface of the casing. Fig. 16B is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is provided on the lower edge surface of the casing. The circle 16C is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the present embodiment, and is an example in which the projections are provided on the lower edge surface of the casing. Fig. 1 6D shows various forms of the frame of the large-sized film of the present embodiment, and an enlarged longitudinal sectional view of 327 «.d〇c - 52 - 200919081 J, which is provided with a projection on the lower edge of the frame. The form of the department. Fig. 17A shows various aspects of the casing of the large-sized film of the embodiment. The enlarged longitudinal sectional view is an example in which the protruding portion is provided on the inner side surface of the casing. Fig. 1 7B shows various forms of the casing of the large-sized film of the present embodiment. The split longitudinal sectional view is an example in which the projection f is provided on the inner side surface of the frame body and the outlet portion is provided. Fig. 1 is a partially enlarged longitudinal sectional view showing various forms of the casing of the large-sized film of the present embodiment, which is an example in which a projection is provided on the inner side surface of the casing. Fig. 17D is a partially enlarged longitudinal sectional view showing various examples of the casing of the large-sized film of the embodiment, and is an example in which the projections are provided on the inner side surface of the casing. Fig. 17E is a view showing a form of a frame of a large-sized film according to the present embodiment, and a partially enlarged longitudinal sectional view showing an example in which a protruding portion is provided on the inner side surface of the casing. Fig. 1717 shows various aspects of the casing of the large-sized film of the present embodiment. A partially enlarged longitudinal sectional view showing an example of a configuration in which the protruding portion is provided on the inner side surface of the casing. Fig. 17G shows various forms J of the casing of the large-sized film of the present embodiment. The enlarged longitudinal sectional view is an example in which the protruding portion is provided on the inner side surface of the casing. Fig. 1 is a partial enlarged longitudinal sectional view showing a plurality of forms of a frame of a large-sized film according to the present embodiment. Fig. 1 is a partial enlarged longitudinal sectional view of an example in which a plurality of protruding portions are provided. A partially enlarged longitudinal cross-sectional view showing various examples of the frame of the large-sized thin casing of the present embodiment, and a configuration example in which a plurality of protruding portions are provided. Fig. 1 is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is a view showing a configuration in which a plurality of projections are provided. Fig. 1 is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the embodiment, and is a configuration in which a plurality of projections are provided. Fig. 18E shows a frame of a large film of the present embodiment. FIG. 18F is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the present embodiment, and is a partially enlarged longitudinal sectional view showing a plurality of types of projections. Example 10 in which a plurality of protruding portions are provided. Fig. 1G is a partially enlarged longitudinal cross-sectional view showing various examples of the casing of the large-sized film of the present embodiment, and is a configuration example in which a plurality of protruding portions are provided. Fig. 19A is a schematic view showing the direction in which the film is observed in order to explain the arrangement of the projections on the frame of the large-sized film of the embodiment. Fig. 19B is a schematic view showing the direction in which the film is observed in order to explain the arrangement of the projections on the frame of the large-sized film of the embodiment. 132763.doc -54- 200919081" The outline of the observation direction of the film is observed in the frame of the large-sized thin mold of the present embodiment. A schematic view of the observation direction of the film is observed on the frame of the large-sized film. The Γ: =τ indicates the protruding tearing on the frame of the large-sized film of the present embodiment, and the observation direction of the film is observed. Fig. 20C is a schematic view for observing the direction in which the film is observed in order to explain the protruding paste on the frame of the large-sized film of the embodiment. Fig. 20C is a view for explaining the frame of the large-sized film of the present embodiment. Fig. 20D is a schematic view showing the direction in which the film is observed in order to explain the arrangement of the protruding portions on the frame of the large thin boring of the present embodiment. A schematic view of the direction in which the film is observed is observed in the arrangement of the frame outlets of the large-sized thin rafts of the embodiment. Fig. W is a detachable view of the protruding portion provided on the frame of the large-sized film. The partially enlarged longitudinal section of the frame is fixed by screws. [^ Fig. 21] The protruding portion provided on the frame of the large film is detachably fixed to the frame side. In the form of a partial enlarged cross section, the coupler is fixed by a coupler. Fig. 21C is a partially enlarged longitudinal cross-sectional view showing a state in which a protruding portion provided on a frame of a large film is detachably fixed to a side portion of a frame body. A partially enlarged longitudinal sectional view in which the projections provided on the frame of the large film are detachably fixed to the side of the frame by the fixing of the elastic body, and the projections are fixed to the frame portion of the frame 132763.doc-55-200919081. Fig. 22A is a perspective view showing another embodiment of the casing of the large-sized film of the embodiment (the projection is a rod shape), which shows a large film attached to the reticle. A perspective view showing another form of the frame of the large-sized film of the present embodiment (the protruding portion is a rod shape), which shows a frame of a large-sized film. Fig. 23A is a view for explaining the bar on the frame of the large-sized film of the embodiment.A schematic view of the observation direction of the film is observed in the arrangement of the protruding portions, and is similar to the embodiment of Fig. 12, in which three protruding portions are provided on the short side and the long side. ^3B is for explaining the embodiment. A schematic view of the observation direction of the film is observed in the arrangement of the rod-like projections on the frame of the large thin cymbal, and is the same as the shape of FIG. 12, which is provided with a protrusion on the short side and the long side, respectively. Further, in the case where the four protruding portions are provided at the four corners, FIG. 23C is a schematic view showing the observation direction of the film in order to explain the arrangement of the rod-shaped protruding portions on the frame of the large-sized film of the present embodiment, and FIG. The form of U is the same, which is the case where the projections on each side of Fig. 23A are integrated. Fig. 24A is a partially enlarged longitudinal sectional view showing a projection provided on a frame of a large film, which shows that the projection is The shape in which the L-shaped side is connected to the reticle. Figure 24B is a partially enlarged longitudinal cross-sectional view of the protruding portion provided on the frame of the large film, which shows that the protruding portion has an L shape, and the front end purple is placed on the reticle I32763.doc -56-200919081 The shape in the trough. Fig. 25 is a sectional view of a projection placed on a frame of a large-sized film and a human part; t large (four) (four). ,. - Fig. 26A is a view showing a partial enlargement of the state when the frame of the large-sized film of the component state is taken up: two solids: a shape in which the projections having a rectangular cross section are fixed and fixed. -clothes

Wide B is a partially enlarged longitudinal sectional view showing a state in which a frame of a large-sized film of the present embodiment is fixed by a holding member, and the table is held and fixed outside the frame. The shape on the side and the cross section is a large l-shaped shape. FIG. 26C is a partially enlarged longitudinal cross-sectional view showing a state in which the casing of the large-sized film of the present embodiment is gripped and fixed by the gripping member, and the gripping and fixing are provided on the upper surface of the casing. The upper part has a shape of an L-shaped protruding portion. FIG. 26D is a partially enlarged longitudinal cross-sectional view showing a state in which the frame of the large-sized film of the present embodiment is gripped and fixed by the holding member, and is shown on the inner side of the frame. The shape of the two rectangular protrusions. Fig. 2 <7> shows a schematic view of the planar shape of the protective film used in the first embodiment. [Description of main component symbols] Film frame reticle adhesive frame upper edge 132763.doc 57- 200919081 4 5 6 7 7a 7b 7c 9 10,20 11 11a lib 15 16 21 30 Frame lower edge frame a groove or a hole for holding the inner side surface of the outer side frame or an inner space in which the protruding portion is widened at a depth of the groove or the hole for holding, or a groove for holding the front end portion of the protruding portion for holding The deepest part of the groove for holding the opening, the mask frame protective film, the pressing piece, the pressing piece, the other parts, the holding member, the groove frame (previous product) 132763.doc -58-

Claims (1)

200919081 X. Patent application scope: 1. A large-sized film frame having a polygonal shape frame formed by a plurality of sides, and the length of the longest side of the frame body is a film which is attached to the upper edge surface of the frame and an adhesive material applied to the lower edge surface of the frame body, wherein the frame body has a convex portion or a concave portion for holding on each of the side portions thereof . 2. The frame of the large thin raft of claim 1, wherein the protrusion or recess for holding is located on the outer side of the frame. 3. The frame of the large film of claim 2, wherein the protrusion or recess for holding is located on the outer side of the frame and away from the upper edge and the lower edge. 4. For the frame of the large film of the request item, the convex portion or the concave portion for holding is a groove or a hole. 5. The frame of the large film of claim 2, wherein the protrusion or recess for holding is a groove or a hole. 6. The frame of the large film of claim 3, wherein the protrusion or recess for J' holding is a groove or a hole. 7. The frame of the large film of claim 4, wherein the projection or recess for holding is a groove or a hole having a space portion which is widened in the depth. 8. The frame of the large film of claim 5, wherein the convex portion or the concave portion is a groove or a hole having a space portion which is widened in the depth. 9. The frame of the large film of claim 6, wherein: 132763.doc 200919081 ίο. 11. 12. 13. The protrusion or recess for holding has a groove or a hole. The frame of the large film of claim 4, wherein the convex portion or the concave portion for holding is a frame having a large film which is narrowed in a deep groove or a hole, as in claim 5. The protrusion or recess for holding is formed in a deep groove or a hole. The frame of the large film of claim 6, wherein the convex portion or the concave portion for holding is a groove or a hole which is narrowed in the depth. The frame of the large thin raft according to any one of claims 1 to 12, wherein the convex portion or the concave portion for holding is t' on each side of the four body, the convex portion or the concave portion for holding The length of the space portion relative to the length of each side is 以上% of the space portion of the space portion. 14. 15. 16. The large film frame of claim 13 wherein the protrusion or the holding portion is The recess is a groove provided over the entire circumference of all the sides of the frame. The frame of the large-sized film of claim 13, wherein the convex portion or the concave portion for holding is a groove partially provided at a side portion of the frame. The frame of the large-sized film according to any one of claims 1 to 2, wherein the convex portion or the concave portion for holding is a plurality of holes provided in all of the side portions of the frame. 132763.doc 200919081 I7. A large-sized film comprising: a frame of a large film according to any one of claims 1 to 16, a film attached to an upper edge of the frame, and a film attached thereto Adhesive material on the lower edge of the body. 18. The large thin raft of claim 17, wherein the length of the longest side of the frame is 1.4 m or more and 2 〇 m or less. The large film according to any one of claims 17 to 18, wherein the ratio of the width of the frame to the height is 1.5 to 4. 2. A method for holding a frame of a large-sized film, which is used for holding a frame of a large film according to any one of claims 1 to 16, and the method of holding the frame of the large-sized film On the side portions, the convex portions or the concave portions for holding at least '^ or more are respectively taken. A method of holding a frame of a large-sized film according to claim 20, wherein all of the side portions of the frame of the film are provided with all the convex/concave portions for holding. °丨22. The method of correcting the shape of the frame of a large-sized film, which is the shape of the frame of the large (four) film of any of items 17 to 19, which is determined by the above-mentioned large-scale method. <all of the frames of the deciduous film, each of which is provided with a convex portion or a concave portion for at least one of the ridges, and a stress is applied to at least one of the large-sized film frames The deformation of the frame. Less ^ 132763.doc