CN102681334A

CN102681334A - Grasping method of frame of large pellicle

Info

Publication number: CN102681334A
Application number: CN2012101407228A
Authority: CN
Inventors: 谷村彰浩; 前田拓郎
Original assignee: Asahi Chemical Co Ltd
Current assignee: Mitsui Chemicals Inc
Priority date: 2007-07-06
Filing date: 2008-07-02
Publication date: 2012-09-19
Anticipated expiration: 2028-07-02
Also published as: TWI641904B; JP5792274B2; CN101689018B; TW200919081A; JP2014098913A; KR101191055B1; TWI498671B; CN102681334B; TW201523125A; WO2009008294A1; JP2010102357A; CN101689018A; KR20100028040A; KR101264571B1; KR20120074334A

Abstract

The invention provides a grasping method of a frame of a large pellicle. The frame comprises a polygonal frame having a plurality of sides, a pellicle film bonded to the upper edge surface of the frame, and an adhesive material applied on the lower edge surface of the frame wherein upon grasping the frame of a large-sized pellicle the longest side of which frame is 1m or longer, the frame has protrusions or recesses for grasping on all sides of the frame. The frame is grasped surely by grasping the protrusions or recesses for grasping at at least one position or more on each side of the frame simultaneously, and the pellicle can be taken out easily from a container without causing distortion or flexure when it is stuck on a photomask, or the like.

Description

The holding method of the framework of large pellicle member

Dividing an application of the application for a patent for invention of the holding method that the present invention is that application number is 200880023582.8, the applying date is July 2, denomination of invention in 2008 framework that is the large pellicle member and this framework.

Technical field

The present invention relates to the framework as the member of formation of pellicle member (pellicle), this pellicle member is used for preventing adhering to foreign matter in photomask that the photo-mask process when making the thin film transistor (TFT) (TFT) that constitutes LSI, LCD (LCD), color filter (CF) etc. uses, the reticle mask (reticle).Particularly relating to as liquid crystal uses the member of formation of large pellicle member, i.e. conduct to grow the framework of edge lengths as the member of formation of the large pellicle member more than the 1m.

Background technology

The present invention relates to the technology as the framework of the member of formation of pellicle member, at first the instruction card film structural component.

, in the manufacturing of semiconductor device, on wafer, formed in the photo-mask process of circuit pattern in the past, and used the dust proof member that is known as the pellicle member to prevent that foreign matter is attached to photomask, reticle mask usually.The pellicle member be the shape-consistent of shape and photomask or reticle mask, thickness is that the upper limb face of the framework of several millimeter is sprawled and bonding thickness is that transparent polymeric membrane such as cellulose nitrate, cellulose derivative (cellulose derivative) or fluorine-based polymer etc. below the 10 μ m (below be called " pellicle ") forms.Usually, the pellicle member Product Status shipment to apply jointing material and to form mostly at this bonding material layer laminated diaphragm at the lower edge face of this framework.

Above-mentioned bonding material layer is used for the pellicle member is adhered to photomask or reticle mask, and said protection film is protected the bonding plane of this bonding material layer in order before this bonding material layer is used to such use, to keep the bonding force of jointing material.

This pellicle member offers the fabricator that makes photomask or reticle mask (below be called " mask maker ") by pellicle member fabricator usually.Mask maker is peeled off said protection film from the pellicle member; Utilize bonding material layer that the pellicle member is pasted on after photomask or the reticle mask, this mask or reticle mask are offered fabricator, for example semiconductor device fabricator or the liquid crystal panel fabricator who carries out photoetching.

As aspect the characteristic of dust proof member, the processing of this pellicle member need be treated to non-cohesive dust at the pellicle member.Usually, when the processing list film structural component, control through in the hole that is formed on the framework lateral surface, inserting pin shape instrument usually, make staff can directly not contact pellicle member (for example with reference to patent documentation 1) through controlling tool body.In addition, also proposed to use instrument to control, made staff can directly not contact pellicle member (for example with reference to patent documentation 2) through the main body of controlling this instrument with swingle through the groove that the lateral surface in framework is formed for supplying swingle to insert.

In addition, with the pellicle member when pellicle member fabricator is transported to mask maker, for non-cohesive dust, usually the pellicle member is put in the storage container with sealing and is carried.Certainly, owing to require the pellicle member to be fixed on reliably in the storage container, therefore, also proposed the pellicle member to be fixed in the method (for example with reference to patent documentation 3) in the storage container through in the hole that is formed on the framework lateral surface, inserting pin shape merit tool.

In addition, also proposed through clipping the horizontal teat that is formed on the framework lateral surface pellicle member is fixed in the method (for example with reference to patent documentation 4 or 5) of storage container by pallet that constitutes storage container and lid.

And, not only be directed to the controlling of the teat, groove or the hole his-and-hers watches film structural component that are formed on the framework lateral surface, fixed function, go back the framework shape of his-and-hers watches film structural component and also carried out various researchs.For example, in order to ensure pellicle component inside and outside gas penetration potential, proposed setting and extended through the hole (for example with reference to patent documentation 6) that medial surface has filtrator from the framework lateral surface.

In addition; Stretch out (for example with reference to patent documentation 10 or 11), the step (for example with reference to patent documentation 12) that forms the mask jointing material, the pressurised zone (for example with reference to patent documentation 13) when guaranteeing to be pasted on photomask for what control distance (stand-off) (for example with reference to patent documentation 7～9) from the pattern plane of photomask to pellicle, control mask jointing material, proposed the different shape of establishing groove, projection, step at the upper limb face or the lower edge face of framework.

In recent years, along with the maximization of LCD, the pellicle member of photomask and use thereof also maximizes, and the length of longest edge has emerged greater than the pellicle member of 1m.It is generally acknowledged that from now on, for the maximization of tackling LCD, enhance productivity, the maximization of photomask also will be absolutely necessary.

Under the situation of large-scale photomask, raw material is synthetic quartz substrate mostly, and fee of material is very expensive.Therefore, with respect to the effective exposure area size of setting, the photomask size designs minimumly usually.

Be to be pasted under the situation of the large pellicle member on the large-scale photomask; Restriction in view of the photomask size; Also there is restriction in framework width for the table mould between the outer circumference end that is secured at from the effective exposure area to the photomask; Even the pellicle member maximizes, the width of framework in fact also can't increase.

And, because the distance (stand-off) from the pattern plane of photomask to pellicle receives the optical system restriction of exposure machine, therefore, also there is restriction for the height of framework, even the pellicle member maximizes, the height of framework in fact also can't increase.

On the other hand, be 1000cm as the area that suppresses pellicle ²The method of the framework deflection of above large pellicle member, the long hem width degree that has proposed to make framework is greater than minor face width (for example with reference to patent documentation 14).

In addition; In recent years; The fabricator of mask etc. is in order directly to be installed on mask with the pellicle member after storage container takes out; The method that is employed in when storage container takes out the pellicle member, under the state that diaphragm is pasted on pallet, takes out the pellicle member from the interface of diaphragm and jointing material requires when taking out, can not make the pellicle member with the method (for example with reference to patent documentation 15) of its taking-up with producing the distortion deflection.

Patent documentation 1: japanese kokai publication hei 9-204039 communique

Patent documentation 2: TOHKEMY 2005-326634 communique

Patent documentation 3: TOHKEMY 2006-267179 communique

Patent documentation 4: japanese kokai publication hei 10-48812 communique

Patent documentation 5: japanese kokai publication hei 10-48811 communique

Patent documentation 6: TOHKEMY 2001-133960 communique

Patent documentation 7: TOHKEMY 2002-182373 communique

Patent documentation 8: TOHKEMY 2002-182371 communique

Patent documentation 9: TOHKEMY 2000-298333 communique

Patent documentation 10: TOHKEMY 2005-338722 communique

Patent documentation 11: TOHKEMY 2000-292910 communique

Patent documentation 12: TOHKEMY 2006-163035 communique, Fig. 6

Patent documentation 13: TOHKEMY 2005-308901 communique

Patent documentation 14: TOHKEMY 2001-109135 communique

Patent documentation 15: TOHKEMY 2007-017811 communique

As stated, in the large pellicle member, because the restriction of the width of framework, height, the deflection meeting of framework limit portion becomes big along with the maximization of pellicle member.So the inventor is that the making of the large pellicle member of 1.4m～2.0m is studied to the size of longest edge, the result find to adopt in the past method extremely difficulty control framework.

Promptly; Of above-mentioned patent documentation 1～5; Employing is controlled or fixing previous methods through inserting instruments such as pin, slide block in the groove on two the relative limit lateral surfaces that are formed on framework, the hole; Exist deflection to be easy to cause instruments such as pin, slide block to break away from, the situation that adopts groove, the hole of framework lateral surface can't control, fixes from groove, hole owing to framework limit portion.For example; Insert the method (patent documentation 1) of pin at Xiang Kongzhong, in groove, insert under the situation of method (patent documentation 2) of swingle, because more roughly the supporting of each limit of framework, therefore; Load is easy to concentrate, and the deflection because of framework limit portion breaks away from easily sometimes.

The high rigidization of being realized by the change of the raw material of framework also is considered countermeasure, but in view of the desired quality such as dustless of pellicle member, in fact can't easily change the raw material of framework.

So far, as stated, the framework shape has been carried out various imaginations, but be basically in the framework that is restricted width, the height scope in the design framework shape (for example with reference to patent documentation 6～12), therefore, extremely do not help the high rigidization of framework.

In addition, also carried out studying (for example with reference to patent documentation 4 or 5) for design framework shape outside the scope of the width of framework, height.It can be described as good technology to the restriction of framework at that time with respect to application.Promptly; In the application of

patent documentation

4 or 5 at that time, the pellicle member of LSI purposes was a main flow, Yi Bian the photomask size of LSI purposes is 5～7 inch (127～178mm) usually; Large-scale photomask size less than LCD (LCD) purposes (is 330～1400mm) on one side; Therefore, with large-scale photomask size compared, can make the photomask size greater than the pellicle scantling.Therefore, design framework shape is not a problem outside the scope of the width of framework, height.

But; From now on; To popularizing along with the pellicle member of enlarged more the problem of Considering Surfaceization, promptly can't come to the expectation that the table mould maximizes owing to do one's utmost to reduce the photomask size correspondingly to make the width of framework, highly increase to problem such more than the required degree, need improve the holding method of pellicle member.

For removing method, for example also there is the pellicle member of stating after utilizing pellicle member retainer tool to keep on one side and detects load that the his-and-hers watches film structural component keeps utensil to apply, maintenance utensil and storage container are spaced out peel off the method for pellicle member; Aforesaid pellicle member is to be fixed in (for example with reference to the patent documentation 13) that pellicle member storage container forms with the label (pressing part) that splicing tape will be equivalent to be configured near the diaphragm the central portion on limit of rectangle framework.But; It is generally acknowledged; Adopt this method, under the situation of large pellicle member, owing to the label (pressing part) that will be configured in the central portion on limit with splicing tape remains in storage container; Therefore, even peel off the deflection (with reference to Fig. 9 of patent documentation 13) that also can't avoid framework while detect load.

That is, the framework of pellicle member requires a kind of on the basis that can control reliably, in the method that when storage container takes out the pellicle member, can not make framework produce deflection, take out with reversing subsequently.And; Particularly become big, handle also the comparatively large pellicle member of difficulty, holding, carry, requiring a kind of such method when taking care of, promptly for pellicle member own wt; Keep reliably being unnecessary to mention; And,, make the taking-up of pellicle member in order after taking out, it directly to be pasted on the mask etc. when storage container takes out with can not producing crooked deflection from the interface of diaphragm and jointing material.

Summary of the invention

That is, the present invention provide a kind of when the processing of pellicle member framework, hold, carry, can control reliably during keeping framework and can not produce crooked, deflection and the framework of the pellicle member that can be simply the pellicle member be taken out from storage container in last times such as the pellicle member being pasted on photomask.A kind of holding method of large pellicle member of the framework of using this pellicle member also is provided in addition.

The framework that the holding method of the framework of large pellicle member of the present invention is controlled has the polygonal shape that is made up of many limits; Can be at the bonding pellicle of upper limb face of this framework; Lower edge face in this framework applies jointing material; The length of the longest edge of above-mentioned framework is more than the 1m, and wherein, above-mentioned framework has the protuberance or the recess of the usefulness of controlling respectively in all limit portions; In all limit portions of above-mentioned framework, control the protuberance of controlling usefulness or the recess at least 1 place respectively and carry.

In addition, the holding method of the framework of large pellicle member of the present invention is preferably controlled all protuberance of controlling usefulness or recess in all limit portions of above-mentioned framework.

The inventor etc. carry out deep research in order to solve above-mentioned problem; The result finds; In order not receive the restriction of photomask; Through in all limit portions of pellicle member framework, forming the protuberance or the recess of controlling usefulness respectively, can solve the length of controlling longest edge is the so above-mentioned problem of large pellicle member of 1.4m～2.0m.Result based on research finds that the length that this method also can be used for longest edge effectively is the above large pellicle member of 1m, thereby has accomplished the present invention.That is, the present invention is following.

1. the framework of a large pellicle member; This framework has the polygonal shape that is made up of many limits; The pellicle and the jointing material that is coated in the lower edge face of this framework that can comprise the upper limb face that is bonded in this framework; The length of the longest edge of above-mentioned framework is more than the 1m, and wherein, above-mentioned framework has the protuberance or the recess of the usefulness of controlling respectively in all limit portions.

2. according to the framework of above-mentioned 1 described large pellicle member, wherein, control on the protuberance of usefulness or the lateral surface that recess is in framework.

3. according to the framework of above-mentioned 2 described large pellicle members, wherein, control on the protuberance of usefulness or the lateral surface that recess is in framework, from position that upper limb face and lower edge face leave.

4. according to the framework of each described large pellicle member in above-mentioned 1～3, wherein, the protuberance or the recess of controlling usefulness are groove or hole.

5. according to the framework of above-mentioned 4 described large pellicle members, wherein, the protuberance or the recess of controlling usefulness are groove or the holes with the spatial portion that inwardly broadens.

6. according to the framework of above-mentioned 4 described large pellicle members, wherein, the protuberance or the recess of controlling usefulness are groove or the holes with the spatial portion that inwardly narrows down.

7. according to the framework of each described large pellicle member in above-mentioned 1～6, wherein, protuberance or the recess of controlling usefulness are on each limit of framework, and this controls the protuberance of usefulness or more than 10% of length that the shared length of recess is respectively the limit.

8. according to the framework of above-mentioned 7 described large pellicle members, wherein, control the groove on the complete cycle of the protuberance of usefulness or all limit portions that recess is provided in a side of framework.

9. according to the framework of above-mentioned 7 described large pellicle members, wherein, protuberance or the recess of controlling usefulness is that the groove in the limit portion of framework is located in the part.

10. according to the framework of each described large pellicle member in above-mentioned 1～6, wherein, the protuberance or the recess of controlling usefulness are in all limit portions of framework, respectively to be provided with a plurality of holes.

11. a large pellicle member, this large pellicle member is made up of the framework of each described large pellicle member in above-mentioned 1～10, the jointing material that is adhered to the pellicle on the upper limb face of this framework and is coated in the lower edge face of this framework.

12. according to above-mentioned 11 described large pellicle members, wherein, the length of the longest edge of framework is 1.4m～2.0m.

13. according to each described large pellicle member in above-mentioned 11～12, wherein, the width of framework is 1.5～4.0 with the ratio of height.

14. the holding method of the framework of a large pellicle member; Each is said in the framework of this large pellicle member such as above-mentioned 1～10; Wherein, in all limit portions of the framework of above-mentioned large pellicle member, control protuberance of controlling usefulness or the recess more than at least 1 place respectively.

15., wherein, in all limit portions of the framework of large pellicle member, control all protuberance of controlling usefulness or recess according to the holding method of the framework of above-mentioned 13 described large pellicle members.

16. the antidote of the framework shape of a large pellicle member; This antidote is used for correcting the framework shape of above-mentioned 11～13 each described large pellicle members; Wherein, In all limit portions of the framework of above-mentioned large pellicle member, control protuberance of controlling usefulness or the recess more than at least 1 place respectively, reduce the distortion of this framework at least through 1 place's stress application the framework of above-mentioned large pellicle member.

17. according to the framework of each described large pellicle member in above-mentioned 1～3, wherein, the protuberance or the recess of controlling usefulness are the teats that loads and unloads in the limit portion of freely being fixed in framework.

18. according to the framework of each described large pellicle member in above-mentioned 1～3 and 17, wherein, the protuberance or the recess of controlling usefulness are tabular teat or bar-shaped teat.

19. according to the framework of each described large pellicle member in above-mentioned 1～3 and 17, wherein, the protuberance or the recess of controlling usefulness are tabular, and are that the overhang of this teat becomes big teat from the central portion of four bights towards the limit of framework.

20. according to the framework of each described large pellicle member in above-mentioned 1～3 and 17～19, wherein, the protuberance or the recess of controlling usefulness are the teats that front end forms hook shape.

21. framework according to each described large pellicle member in above-mentioned 1～3 and 17～20; Protuberance or the recess of wherein, controlling usefulness be form when the pellicle member is pasted on photomask, with the circumferential lateral surface of photomask and/or be formed at the teat that the groove on the photomask contacts.

22. framework according to each described large pellicle member in above-mentioned 1～3 and 17～21; Protuberance or the recess of wherein, controlling usefulness be form when the pellicle member is pasted on photomask, through with another part combination and can utilize physical method framework to be fixed in the teat of this photomask.

23., wherein, control the tabular teat on the complete cycle of the protuberance of usefulness or all limit portions that recess is arranged on framework according to the framework of above-mentioned 7 described large pellicle members.

24. according to the framework of above-mentioned 7 described large pellicle members, wherein, protuberance or the recess of controlling usefulness is that the part is arranged at the tabular teat in the limit portion of framework.

25. according to the framework of each described large pellicle member in above-mentioned 1～3 and 17～18, wherein, the protuberance or the recess of controlling usefulness are in all limit portions of framework, respectively to be provided with a plurality of bar-shaped teats.

26. a large pellicle member, wherein, this large pellicle member is made up of the framework of each described large pellicle member in above-mentioned 17～25, the jointing material that is adhered to the pellicle on the upper limb face of this framework and is coated in the lower edge face of this framework.

27. according to above-mentioned 26 described large pellicle members, wherein, the length of the longest edge of framework is 1.4m～2.0m.

28. according to each described large pellicle member in above-mentioned 26～27, wherein, the width of framework is 1.5～4.0 with the ratio of height.

29. the holding method of the framework of a large pellicle member; Each is said in the framework of this large pellicle member such as above-mentioned 17～25; Wherein, in all limit portions of the framework of above-mentioned large pellicle member, control protuberance of controlling usefulness or the recess more than at least 1 place respectively.

30., wherein, in all limit portions of the framework of large pellicle member, control all protuberance of controlling usefulness or recess according to the holding method of the framework of above-mentioned 29 described large pellicle members.

31. the antidote of the framework shape of a large pellicle member; This antidote is used for correcting the framework shape of above-mentioned 26～28 each described large pellicle members; Wherein, In all limit portions of the framework of above-mentioned large pellicle member, control protuberance of controlling usefulness or the recess more than at least 1 place respectively, reduce the distortion of this framework at least through 1 place's stress application the framework of above-mentioned large pellicle member.

Adopt the holding method of framework and this framework of large pellicle member of the present invention, when the processing of pellicle member, hold, carry, can control framework reliably during keeping and when the pellicle member is pasted on photomask, can not produce crooked, deflection and can simply the pellicle member be taken out from storage container.

Description of drawings

Figure 1A is the stereographic map of a mode (recess of controlling usefulness is a groove) of framework that is used to explain the large pellicle member of this embodiment, and expression is adhered to the large pellicle member of photomask.

Figure 1B is the figure of a mode (recess of controlling usefulness is a groove) of framework that is used to explain the large pellicle member of this embodiment, and expression comprises the part of framework and amplifies longitudinal section.

Fig. 1 C is the figure of a mode (recess of controlling usefulness is a groove) of framework that is used to explain the large pellicle member of this embodiment, the framework of expression large pellicle member.

Fig. 1 D is the stereographic map of a mode (protuberance of controlling use is tabular) of framework that is used to explain the large pellicle member of this embodiment, and expression is adhered to the large pellicle member of photomask.

Fig. 1 E is the figure of a mode (protuberance of controlling use is tabular) of framework that is used to explain the large pellicle member of this embodiment, and expression comprises the part of framework and amplifies longitudinal section.

Fig. 1 F is the figure of a mode (protuberance of controlling use is tabular) of framework that is used to explain the large pellicle member of this embodiment, the framework of expression large pellicle member.

Fig. 2 A is the stereographic map of a mode that is used to explain the framework of mini table film structural component in the past, and expression is adhered to the pellicle of photomask.

Fig. 2 B is the figure of a mode that is used to explain the framework of mini table film structural component in the past, and expression comprises the part of the groove of framework and amplifies longitudinal section.

Fig. 2 C is the figure of a mode that is used to explain the framework of mini table film structural component in the past, the framework of expression pellicle member.

Fig. 3 A is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that lateral surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 3 B is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that lateral surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 3 C is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that lateral surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 3 D is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that lateral surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 3 E is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that lateral surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 3 F is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that lateral surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 3 G is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that lateral surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 4 A is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that upper limb face from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 4 B is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that upper limb face from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 5 A is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that lower edge face from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 5 B is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that upper limb face from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 6 A is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that medial surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 6 B is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that medial surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 6 C is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that medial surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 6 D is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that medial surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 6 E is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that medial surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 6 F is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that medial surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 6 G is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is that medial surface from framework excavates and controls the groove of usefulness or the mode example in hole.

Fig. 7 A is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is to be provided with a plurality of groove of usefulness or mode examples in hole of controlling.

Fig. 7 B is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is to be provided with a plurality of groove of usefulness or mode examples in hole of controlling.

Fig. 7 C is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is to be provided with a plurality of groove of usefulness or mode examples in hole of controlling.

Fig. 8 A is the skeleton diagram that is used to explain direction configuration, that see pellicle of the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Fig. 8 B is the skeleton diagram that is used to explain direction configuration, that see pellicle of the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Fig. 8 C is the skeleton diagram that is used to explain direction configuration, that see pellicle of the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Fig. 8 D is the skeleton diagram that is used to explain direction configuration, that see pellicle of the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Fig. 9 A is the skeleton diagram that is used to explain direction configuration, that see pellicle of the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Fig. 9 B is the skeleton diagram that is used to explain direction configuration, that see pellicle of the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Fig. 9 C is the skeleton diagram that is used to explain direction configuration, that see pellicle of the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Figure 10 A is skeleton diagram configuration, that see from the side surface direction of framework that is used to explain the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Figure 10 B is skeleton diagram configuration, that see from the side surface direction of framework that is used to explain the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Figure 11 A be used to explain that member is controlled with controlling, the part of a mode example the during framework of the large pellicle member of fixing this embodiment amplifies longitudinal section.

Figure 11 B be used to explain that member is controlled with controlling, the part of a mode example the during framework of the large pellicle member of fixing this embodiment amplifies longitudinal section.

Figure 11 C be used to explain that member is controlled with controlling, the part of a mode example the during framework of the large pellicle member of fixing this embodiment amplifies longitudinal section.

Figure 11 D be used to explain that member is controlled with controlling, the part of a mode example the during framework of the large pellicle member of fixing this embodiment amplifies longitudinal section.

Figure 11 E be used to explain that member is controlled with controlling, the part of a mode example the during framework of the large pellicle member of fixing this embodiment amplifies longitudinal section.

Figure 12 A is the local skeleton diagram mode example, that see from the lateral surface direction of framework that is used to explain the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Figure 12 B is the local skeleton diagram mode example, that see from the direction of seeing pellicle that is used to explain the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Figure 12 C is the local skeleton diagram mode example, that see from the direction of seeing pellicle that is used to explain the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Figure 12 D is the local skeleton diagram mode example, that see from the direction of seeing pellicle that is used to explain the groove of controlling usefulness on the framework of large pellicle member of this embodiment.

Figure 13 A is the figure that is used to explain the configuration in hole on the framework of large pellicle member, that be arranged at corner part, is the local skeleton diagram of seeing from the lateral surface direction of framework.

Figure 13 B is the figure that is used to explain the configuration in hole on the framework of large pellicle member, that be arranged at corner part, is the local skeleton diagram of seeing from the direction of seeing pellicle.

Figure 14 A is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the lateral surface of framework.

Figure 14 B is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the lateral surface of framework.

Figure 14 C is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the lateral surface of framework.

Figure 14 D is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the lateral surface of framework.

Figure 14 E is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the lateral surface of framework.

Figure 14 F is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the lateral surface of framework.

Figure 14 G is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the lateral surface of framework.

Figure 15 A is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the upper limb face of framework.

Figure 15 B is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the upper limb face of framework.

Figure 15 C is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the upper limb face of framework.

Figure 15 D is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the upper limb face of framework.

Figure 16 A is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the lower edge face of framework.

Figure 16 B is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the lower edge face of framework.

Figure 16 C is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the lower edge face of framework.

Figure 16 D is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the lower edge face of framework.

Figure 17 A is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the medial surface of framework.

Figure 17 B is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the medial surface of framework.

Figure 17 C is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the medial surface of framework.

Figure 17 D is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the medial surface of framework.

Figure 17 E is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the medial surface of framework.

Figure 17 F is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the medial surface of framework.

Figure 17 G is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with teat at the medial surface of framework.

Figure 18 A is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with a plurality of teats.

Figure 18 B is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with a plurality of teats.

Figure 18 C is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with a plurality of teats.

Figure 18 D is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with a plurality of teats.

Figure 18 E is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with a plurality of teats.

Figure 18 F is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with a plurality of teats.

Figure 18 G is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, is the mode example that is provided with a plurality of teats.

Figure 19 A is the skeleton diagram that is used for explaining in direction configuration, that see pellicle of the framework teat of the large pellicle member of this embodiment.

Figure 19 B is the skeleton diagram that is used for explaining in direction configuration, that see pellicle of the framework teat of the large pellicle member of this embodiment.

Figure 19 C is the skeleton diagram that is used for explaining in direction configuration, that see pellicle of the framework teat of the large pellicle member of this embodiment.

Figure 19 D is the skeleton diagram that is used for explaining in direction configuration, that see pellicle of the framework teat of the large pellicle member of this embodiment.

Figure 20 A is the skeleton diagram that is used for explaining in direction configuration, that see pellicle of the framework teat of the large pellicle member of this embodiment.

Figure 20 B is the skeleton diagram that is used for explaining in direction configuration, that see pellicle of the framework teat of the large pellicle member of this embodiment.

Figure 20 C is the skeleton diagram that is used to explain direction configuration, that see pellicle of the teat on the framework of large pellicle member of this embodiment.

Figure 20 D is the skeleton diagram that is used to explain direction configuration, that see pellicle of the teat on the framework of large pellicle member of this embodiment.

Figure 20 E is the skeleton diagram that is used to explain direction configuration, that see pellicle of the teat on the framework of large pellicle member of this embodiment.

Figure 21 A is arranged at teat loading and unloading on the framework of the large pellicle member part when freely being fixed in the mode of framework limit portion to amplify longitudinal section, and the expression screw thread is fixed.

Figure 21 B is arranged at teat loading and unloading on the framework of the large pellicle member part when freely being fixed in the mode of framework limit portion to amplify longitudinal section, and expression utilizes fixing that unitor carries out.

Figure 21 C is arranged at teat loading and unloading on the framework of the large pellicle member part when freely being fixed in the mode of framework limit portion to amplify longitudinal section, and expression utilizes fixing that elastic body carries out.

Figure 21 D is arranged at teat loading and unloading on the framework of the large pellicle member part when freely being fixed in the mode of framework limit portion to amplify longitudinal section, and expression is through sandwiching carry out fixing.

Figure 22 A is the stereographic map of other type (teat is bar-shaped) of framework that is used to explain the large pellicle member of this embodiment, and expression is adhered to the large pellicle member of photomask.

Figure 22 B is the stereographic map of other type (teat is bar-shaped) of framework that is used to explain the large pellicle member of this embodiment, the framework of expression large pellicle member.

Figure 23 A is the skeleton diagram that is used to explain direction configuration, that see pellicle of the bar-shaped teat on the framework of large pellicle member of this embodiment, is that the mode with Figure 12 is identical, respectively is provided with the situation of 3 teats on minor face and long limit respectively.

Figure 23 B is the skeleton diagram that is used to explain direction configuration, that see pellicle of the bar-shaped teat on the framework of large pellicle member of this embodiment, is that the mode with Figure 12 is identical, at minor face with long limit respectively is provided with 1 teat respectively and respectively be provided with the situation of 1 teat at 4 angles.

Figure 23 C is the skeleton diagram that is used to explain direction configuration, that see pellicle of the bar-shaped teat on the framework of large pellicle member of this embodiment, the incorporate situation of teat that be that the mode with Figure 12 is identical, makes each limit among Figure 23 A.

Figure 24 A is that longitudinal section is amplified in the part that comprises the teat in the framework that is arranged at the large pellicle member, the mode that the limit portion that the expression teat is the L font, front end is crooked contacts with photomask.

Figure 24 B is that longitudinal section is amplified in the part that comprises the teat in the framework that is arranged at the large pellicle member, and the expression teat is that L font, front end penetrate into the mode in the groove that is arranged on the photomask.

Figure 25 is another member of teat combination and the fixing part amplification longitudinal section during the large pellicle member on the framework that is arranged at the large pellicle member.

Figure 26 A be used to explain that member is controlled with controlling, the part of the situation the during framework of the large pellicle member of fixing this embodiment amplifies longitudinal section, expression is controlled, constant cross-section is the mode of the teat of rectangle.

Figure 26 B be used to explain that member is controlled with controlling, the part of the situation the during framework of the large pellicle member of fixing this embodiment amplifies longitudinal section, expression control, be fixedly set in the lateral surface of framework teat, be that the cross section is the mode of the teat of L font.

Figure 26 C be used to explain that member is controlled with controlling, the part of the situation the during framework of the large pellicle member of fixing this embodiment amplifies longitudinal section, expression control, be fixedly set in the upper limb face of framework teat, be that the cross section is the mode of the teat of L font.

Figure 26 D be used to explain that member is controlled with controlling, the part of the situation the during framework of the large pellicle member of fixing this embodiment amplifies longitudinal section, the teat of the medial surface of framework, the i.e. mode of the teat of 2 rectangles are controlled, are fixedly set in expression.

Figure 27 is the synoptic diagram of the flat shape of the diaphragm that uses of expression embodiment 1.

Description of reference numerals

1, pellicle frame; 2, mask jointing material; 3, the upper limb face of framework; 4, the lower edge face of framework; 5, the lateral surface of framework; 6, the medial surface of framework; 7, control groove or the hole or the teat of usefulness; The inner space that has inwardly broadened in 7a, the groove of controlling usefulness or hole or control the leading section of the teat of usefulness; 7b, control the peristome of the groove of usefulness; 7c, control the deep of the groove of usefulness; 9, photomask; 10,20, framework; 11, diaphragm; 11a, pressing part; 11b, pressing part; 15, another member; 16, control member; 21, groove; 30, framework (product in the past).

Embodiment

With reference to description of drawings embodiment of the present invention.Below the embodiment of explanation is a formation example of the present invention, and the present invention is not limited to following embodiment.As long as play effect of the present invention, also can carry out the change of variety of way.

The framework of large pellicle member of the present invention is the framework with the polygonal shape that is made up of many limits; This framework can comprise the pellicle and the jointing material that is coated on the lower edge face of this framework of the upper limb face that is adhered to this framework; Length at the longest edge of above-mentioned framework is in the above-mentioned framework of the large pellicle member more than the 1m, and above-mentioned framework has protuberance or the recess that keeps usefulness respectively in all limit portions.At this, the polygonal shape of framework is quadrilateral shape roughly normally, but also can be the polygonal shape that has breach, arc sections (R portion) in the bight.

Figure 1A is the stereographic map of an embodiment of framework that is used to explain the large pellicle member of this embodiment; Figure 1A and Fig. 1 D represent to be adhered to the large pellicle member of photomask; Figure 1B and Fig. 1 E represent to comprise the part amplification longitudinal section of framework, and Fig. 1 C and Fig. 1 F represent the framework of large pellicle member.Fig. 2 is the stereographic map of the embodiment (the for example type of patent documentation 2) that is used to explain mini table film structural component framework in the past; Fig. 2 A representes to be adhered to the pellicle member of photomask; Fig. 2 B representes to comprise the part of the groove of framework and amplifies longitudinal section, and Fig. 2 C representes the framework of pellicle member.

For example, as shown in Figure 1, the large pellicle member is made up of framework 10, the pellicle 1 that is adhered to the upper limb face 3 of framework 10, the jointing material 2 that is coated on the lower edge face 4 of framework 10.At this, pellicle 1 is adhered to the upper limb face 3 of framework 10 by bonding agent (not shown).In addition, in Figure 1A and Figure 1B, pellicle member framework 10 is adhered to photomask 9 by jointing material 2.The large pellicle member had the structure that is bonded with diaphragm (not shown) at the lower edge face 4 of framework 10 by jointing material 2 before being adhered to photomask 9.

The material of the material of the material of pellicle 1, jointing material 2, shape, bonding agent, the material of diaphragm, shape can be used material, the shape that in the past adopted usually.

As pellicle, can use transparent polymeric membrane, for example cellulose nitrate, cellulose derivative or fluorine-based polymer.The thickness consideration light transmittance of pellicle, film strength are set, and for example are preferably 0.1 μ m～10 μ m.When pellicle being adhered to the upper limb face of framework, can use bonding agent, for example acryl resin bonding agent, epoxy resin adhesive, silicone adhesive or fluorine-containing fluorine-based polymers such as silicon bonding agent.

As jointing material, can use the hot-melt adhesive material, silicon class jointing material, acrylic compounds jointing material of styrene ethylene butylene styrene, styrene ethylene acrylonitrile-styrol or olefines etc. or with the adhesive strip of foaming body as base material.The thickness of bonding material layer does, framework thickness and jointing material thickness are aggregated in the scope of the film that is no more than regulation and the distance between the mask and set, and for example are preferably 0.01mm～10mm.

As diaphragm, can use the film that constitutes by polyethylene terephthalate or polyvinyl resin.In addition, also can release agent, for example silicon class release agent or fluorine class release agent be coated in the surface of diaphragm according to the bounding force of jointing material.The thickness of diaphragm for example is preferably 0.01mm～1mm.

As long as the material of framework 10 can keep physical strength, there is not special qualification.For example metal, resin, compound substance be can enumerate, more particularly, aluminium or its alloy for example duralumin, iron or iron class alloy, for example stainless steel, engineering plastics, fiber-reinforced plastic (FRP) and carbon fiber reinforced plastic (CFRP) preferably adopted.In addition, consider by maximization to cause deadweight to increase preferred light weight and material, for example preferred aluminium or its alloy with rigidity.

Framework 10 is that the method for making of in the past carrying out usually gets final product.For example, the plate with the one thing cuts off, cut gets final product.In addition, under the situation of the plate that is difficult to prepare the one thing along with the maximization of pellicle member, except that cutting off, also can enumerating welding processing, processing and forming (if metal then is die cast, if resin then is injection-molded moulding) the cut.At this moment, protuberance or the recess that preferably will control usefulness are one-body molded, and be of the back, under the situation that is protuberance, also preferably is shaped to detachable part, installs afterwards again.

In addition, in order to prevent reflection, also can implement black processing such as black chromium plating, black alumite, black application to the surface of framework.In addition, in order to catch foreign matter, also can apply jointing material at the medial surface of framework.

The framework 10 of the large pellicle member of this embodiment with the longest edge of framework 10 (below be also referred to as " long limit ".Equally the minor face with framework is also referred to as " minor face ") length be that the framework of the above large pellicle member of 1m is as object.The width of framework (w of Figure 1B and Fig. 1 E), highly (h of Figure 1B and Fig. 1 E) less with respect to the ratio of the length of such framework, the limit of framework (long edge lengths L, the bond length S of Figure 1A and Fig. 1 D), its rigidity has to be lower than the framework of mini table film structural component.

At the long edge lengths L of framework 10 is 1m when above, sees the tendency that rigidity reduces significantly.In the framework 30 of the mini table film structural component that LSI in the past shown in Figure 2 uses, long edge lengths L is at most below the 15cm, and bond length S is at most below the 13cm, and the width w of framework 30 is (w/h)=0.3～0.8 with the ratio of height h.But in the framework of the present invention as the large pellicle member of object, long edge lengths L is more than the 1m, also has the situation that reaches 2m, also possibly have situation about maximizing more from now on.In addition, in minor face, bond length S also for example is more than the 75cm.In addition, because the ratio of width w and the height h of the framework in the framework of large pellicle member is greatly to for example (w/h)=1.5～4.0, therefore, the reduction of rigidity is bigger, and in the framework of (w/h)=2.3～4.0, the reduction of rigidity is big especially.In addition, owing to maximize more, also possibly exist (w/h) greater than 4 situation.

Thereby, in the framework of the present invention, to compare with framework in the past as the large pellicle member of object, the deflection on the pellicle normal to a surface direction is very big.Like this, the deflection mode of the framework of large pellicle member is different fully with the deflection mode of in the past mini table film structural component.And; On the ratio (w/h) of the width w of framework and the height h basis greater than the width w of framework in the past and the ratio (w/h) of height h, the limit of framework itself is just very long, therefore; Tension force according to pellicle is different, and the deflection of the direction parallel with the surface of pellicle also can become big.In the framework of the large pellicle member of this embodiment, also can utilize the protuberance of controlling usefulness or recess to correct the distortion of the framework that the tension force by pellicle causes.This point is seen after and is stated.

The rectangle that framework of the present invention is normally similar with mask shape, but corresponding with the different shape of mask etc., so long as polygonal framework gets final product, there is not special qualification.In addition, in the present invention, be that framework more than the 1m is as object with long edge lengths; But be shaped as under the situation of (1) rectangle in framework; With long edge lengths be framework more than the 1m as object, be shaped as in framework under (2) foursquare situation, be that framework more than the 1m is as object with an edge lengths; Being shaped as in framework under (3) polygonal situation, is that framework more than the 1m is as object with longest edge length.In the present invention, if the condition of explanation just can play bigger effect below satisfying, therefore, below describe.

The first, be to describe to above-mentioned framework in the mode of framework that all limit portions have the recess of the usefulness of controlling respectively.As this recess, there are groove or hole.In addition; In the present invention; Groove is meant that the circumferencial direction length of peristome of recess and this recess in these faces of the lateral surface, medial surface, upper limb face or the lower edge face that are formed on framework is more than 1.5 times of short transverse length of this peristome, and the circumferencial direction length that the hole is meant this peristome is less than 1.5 times of the short transverse length of this peristome.

Groove of controlling usefulness or hole to being formed on the framework describe.Fig. 3 is that longitudinal section is amplified in the part of variety of way example of the large pellicle member framework of this embodiment of expression, and Fig. 3 A～G excavates from the framework lateral surface to control the groove of usefulness or the mode example in hole.Fig. 4 is that longitudinal section is amplified in the part of variety of way example of the large pellicle member framework of this embodiment of expression, and Fig. 4 A～B is that the upper limb face from framework excavates and controls the groove of usefulness or the mode example in hole.Fig. 5 is that longitudinal section is amplified in the part of variety of way example of the large pellicle member framework of this embodiment of expression, and Fig. 5 A～B is that the lower edge face from framework excavates and controls the groove of usefulness or the mode example in hole.Fig. 6 is that longitudinal section is amplified in the part of variety of way example of the large pellicle member framework of this embodiment of expression, and Fig. 6 A～G is that the medial surface from framework excavates and controls the groove of usefulness or the mode example in hole.

As shown in Figure 3, the framework 10 of the large pellicle member of this embodiment has from the lateral surface 5 of framework groove of controlling usefulness or the hole 7 towards interior side direction.Below, do not having under the situation of special suggestion, do not distinguish groove and hole and explain as groove or the hole 7 of controlling usefulness.

In addition, as shown in Figure 4, the framework 10 of the large pellicle member of this embodiment also can have from the upper limb face 3 of framework groove of controlling usefulness or the hole 7 towards the below.In addition, as shown in Figure 5, the framework 10 of the large pellicle member of this embodiment also can have from the lower edge face 4 of framework groove of controlling usefulness or the hole 7 towards the top.In addition, as shown in Figure 6, the framework 10 of the large pellicle member of this embodiment also can have from the medial surface 6 of the framework groove of controlling usefulness or the hole 7 of direction toward the outer side.

Groove of controlling usefulness or hole are arranged on the anchor clamps or the corresponding position of Design of device that can both be in and be used to control on which face of framework, but are considering preferably to be arranged on lateral surface aspect anchor clamps or the Design of device.In addition; Be arranged in the groove that will control usefulness or hole under the situation of lateral surface or medial surface of framework; In order when controlling, the bond layer of pellicle or pellicle and the bonding bonding material layer of mask not to be applied extra power, preferably be arranged on the position of leaving from upper limb face and lower edge face.Thereby, control on the groove of usefulness or the lateral surface that the hole more preferably is arranged on framework, from position that upper limb face and lower edge face leave.

From the upper limb face 3 of framework towards the groove of controlling usefulness of below or hole 7 except the mode of excavating along the normal direction of upper limb face 3, also can make the mode of excavating along the direction that tilts with respect to normal direction.From the lower edge face 4 of framework towards the groove of controlling usefulness of top or hole 7 except the mode of excavating along the normal direction of lower edge face 4, also can make the mode of excavating along the direction that tilts with respect to normal direction.The groove of controlling usefulness or the hole 7 of direction except the mode of excavating along the normal direction of medial surface 6, also can make the mode of excavating along the direction that tilts with respect to normal direction toward the outer side from the medial surface 6 of framework.Be that surface with framework is under the situation in benchmark and the groove that excavates from lateral surface or medial surface or hole 7, the degree of depth of controlling groove or the hole 7 of usefulness is preferably 0.01～0.9 times of framework width, and more preferably 0.01～0.5 times, further preferred 0.01～0.3 times degree of depth.In addition, under the situation that is the groove that excavates from upper limb face or lower edge face or hole 7, the degree of depth of controlling groove or the hole 7 of usefulness is preferably 0.1～1 times (in addition, 1 times is situation about running through) of framework height, and more preferably 0.1～0.5 times, further preferred 0.1～0.3 times.

And as shown in Figure 7, the framework 10 of the large pellicle member of this embodiment also can have a plurality of groove or holes 7 of controlling usefulness in each limit portion of framework.Fig. 7 is that longitudinal section is amplified in the part of variety of way example of the large pellicle member framework of this embodiment of expression, and Fig. 7 A～C is provided with a plurality of groove of usefulness or mode examples in hole of controlling.As combination, exist the upper limb have from framework face downwards the groove of controlling usefulness or hole and from the lower edge face of framework towards the situation in the groove of controlling usefulness of top or these two kinds of grooves of hole or hole, have upper limb from framework face downwards the groove of controlling usefulness or hole and from the medial surface of the framework groove of controlling usefulness of direction or the situation (for example Fig. 7 A) in these two kinds of grooves of hole or hole toward the outer side.In addition, also exist and have from the lower edge face of framework towards the groove of controlling usefulness of top or hole with from the medial surface of the framework groove of controlling usefulness of direction or the situation (for example Fig. 7 C) in these two kinds of grooves of hole or hole toward the outer side.

In the framework 10 of the large pellicle member of this embodiment; Also can face downwards the groove of controlling usefulness or hole with respect to upper limb from framework, from the lower edge face of framework towards the groove of controlling usefulness of top or hole or from the medial surface of the framework groove of controlling usefulness or the hole of direction toward the outer side, make up respectively from the lateral surface of framework groove of controlling usefulness or hole towards interior side direction.For example, exist have from the lateral surface of framework towards the groove of controlling usefulness of interior side direction or hole and from the upper limb of framework face downwards the groove of controlling usefulness or these two kinds of grooves of hole or hole situation (for example Fig. 7 B), have from the lateral surface of framework towards the groove of controlling usefulness of interior side direction or hole and from the lower edge face of framework towards the situation in the groove of controlling usefulness of top or these two kinds of grooves of hole or hole, have from the lateral surface of framework towards the groove of controlling usefulness of interior side direction or hole with from the medial surface of the framework groove of controlling usefulness of direction or the situation in these two kinds of grooves of hole or hole toward the outer side.

And, the groove that also exists from 4 surfaces of framework 3 surfaces to excavate to control usefulness or the mode in hole or all excavate the groove of controlling usefulness from 4 surfaces of framework or the mode in hole.The groove or the hole of usefulness are controlled in a plurality of surfaces setting through in framework, control, fix more reliable.In addition, with respect to the holding tool more than 2 kinds of the different surfaces of controlling framework, also have and to deal with such advantage with same framework.

In addition; Except that above-mentioned groove or hole 7 of controlling usefulness, the framework 10 of the large pellicle member of this embodiment also can have hole or the groove that other purposes are waited in the hole (being used to supply the space and outside hole of breathing freely by pellicle member and mask sealing when the pellicle member is installed on mask) that is used for ventilative usefulness.For such hole that is used for other purposes or groove are set, the recess or the protuberance of controlling usefulness are groove or the holes that the part is arranged on framework limit portion, process degree of freedom like this and raise, and be even more ideal.

Controlling the groove of usefulness or the cross sectional shape in hole 7 is rectangle (for example Fig. 6 A), trapezoidal (for example Fig. 4 A, Fig. 5 A, Fig. 6 E), polygon, circle, semicircle perhaps oval (for example Fig. 6 B) etc., does not have special requirement.In addition, for example shown in Fig. 4 A, also can be the mode that the internal diameter in width or the hole of the direction that deepens along groove or hole and groove diminishes.Also curvature R, C face can be set in the bight in groove or hole as required.

In the framework of the large pellicle member of this embodiment, groove or the hole 7 of controlling usefulness preferably have the spatial portion 7a that inwardly broadens.For example be L font (for example Fig. 3 C, Fig. 4 B, Fig. 5 B, Fig. 6 C and G, Fig. 7 C), T font (for example Fig. 3 D, Fig. 6 D).Compare with the situation that does not have the spatial portion 7a that inwardly broadens, can collude to be hung on and control member, therefore, control, fix more reliable.In addition; As the shape of the spatial portion that has inwardly broadened, as stated, can be that the cross sectional shape of the Width of framework inwardly broadens; The cross sectional shape that can be the short transverse of framework inwardly broadens, and also can be that the cross sectional shape of the length direction of framework inwardly broadens.

In addition, groove or the hole of also preferably controlling usefulness have the spatial portion that inwardly narrows down.In this case, insert inlet than groove or hole littler control member the time, control member through this and contact with the part that inwardly narrows down and be positioned, can control when member misplaces with respect to groove or hole preventing to control.Shape as the spatial portion that inwardly narrows down; Shown in Fig. 3 B, Fig. 4 A, Fig. 5 A; The cross sectional shape that can be the Width of framework inwardly narrows down, and can be that the cross sectional shape of the short transverse of framework inwardly narrows down, and also can be that the cross sectional shape of the length direction of framework inwardly narrows down.

The example of cross sectional shape as the length direction of framework for inwardly narrowing down; Can be set forth in the groove of the local circumferencial direction that exists of limit portion, promptly the circumferencial direction length of the peristome of this groove is greater than the groove (with reference to Figure 12) of the degree of depth of this groove (being meant the bee-line in deep of peristome and the groove of groove).In addition, the circumferencial direction length of peristome that also can enumerate this groove is less than the situation of the degree of depth of this groove.If have the framework of the handle part of this shape, utilize this holding tool to control with then can the tabular holding tool that front end narrows down being positioned in this groove.In addition, the circumferencial direction length of the peristome of groove is preferably 0.5～30 times with the ratio of the degree of depth of groove, more preferably 2～20 times, most preferably is 3～10 times.If this is than being then to be easy to more than 0.5 insert control member, if this is than being 30 to be difficult to pull down holding tool with next.

As shown in Figure 3; Another embodiment of the framework of the large pellicle member of this embodiment is to have the following groove of controlling usefulness or the form in hole 7; Above-mentioned groove of controlling usefulness or hole 7 towards interior side direction, and have the spatial portion 7a that has inwardly broadened from the lateral surface 5 of framework 10.At this, from the lateral surface 5 of framework towards the groove of controlling usefulness of interior side direction or hole 7 except that the mode of excavating along the normal direction of lateral surface 5, also can make the mode of excavating along the direction that tilts with respect to normal direction.The shape of spatial portion 7a framework, that inwardly broaden of the large pellicle member of this embodiment for example is L font (for example Fig. 3 C and G), T font (for example Fig. 3 D).Compare with the situation that does not have the spatial portion 7a that inwardly broadens, can collude to be hung on and control member, therefore control more reliable.

Fig. 8 and Fig. 9 are the skeleton diagrams that is used to explain direction configuration, that see pellicle in groove on the framework of large pellicle member of this embodiment, that control usefulness or hole 7.Like Fig. 8 A, C and D and shown in Figure 9; Control the groove of usefulness or the configuration in hole 7 and need only the recess that on 4 limits, all has the usefulness of controlling; Can be configured on the limit portion complete cycle of framework 10 (Fig. 8 A), also can local configuration in the limit of framework 10 one (on Fig. 8 C～D, Fig. 9 A～C).Under the situation of local configuration, also can correspondingly control the groove or the hole of usefulness with the position that instrument, device etc. is controlled member in the appointed part configuration of framework.Control in local configuration under the situation of groove of usefulness, preferably be pre-configured in any limit portion of framework.When controlling the framework of pellicle member, the load that can disperse equably to be produced by deadweight is setovered, thereby can suppress the generation of deflection.On the other hand, as after shown in the comparative example stated, only on 2 relative limits, having in the mode (Fig. 8 B) of the protuberance or the recess of the usefulness of controlling, can't fully suppress the generation of deflection.

Recess on the framework of the large pellicle member of this embodiment, that control usefulness is under the situation of groove; This is controlled the shared length of the recess of usefulness and is respectively more than 10% with respect to the length on each limit; The load that can disperse equably to be produced by deadweight is setovered, and is more preferred.Further be preferably more than 20%, most preferably be more than 30%.In addition, need leave on the framework under the situation of utilizing the leeway be processed to form the part with the function except that controlling, preferably this is controlled the shared length of the recess of usefulness and is respectively below 90% with respect to the length on each limit.More preferably below 80%, most preferably be below 70%.If this controls the recess of usefulness each centrosymmetric mode with respect to each limit portion that is configured in each limit portion, the load that then can disperse equably to be produced by deadweight is setovered, and is comparatively desirable.

Recess on the framework of the large pellicle member of this embodiment, that control usefulness is under the situation in hole, and its configuration is preferably all disposed a plurality of in advance in each limit portion of framework.When controlling the framework of pellicle member, the load that can disperse equably to be produced by deadweight is setovered, thereby can suppress the generation of deflection.

In the framework of the large pellicle member of this embodiment, the groove 7 of controlling usefulness also can be the groove of the staged cutting shape that forms of a side of cutting slot sidewall.In addition, the hole 7 of controlling usefulness also can be the hole of the rip cutting tubular that forms of a side of the side wall surface of cutting hole.That is the side wall surface in side wall surface or hole of groove of, controlling groove or the hole 7 of usefulness also can constitute the part on framework 10 surfaces.As such mode, the groove or the hole that for example exist the side wall surface in groove or hole to arrive the surface of framework, excavate the shape that the side wall surface in groove or hole forms from the surface of framework.In addition, in the hole of rip cutting cylinder, cut with the longitudinal section through main shaft, xsect is that the hole of semicircle is unnecessary to mention, and also comprises the hole of cutting through the longitudinal section of main shaft with not.If the example of its cross sectional shape of expression for example is Fig. 3 F and G, Fig. 6 F and G, Fig. 7 B.The side wall surface of preferred especially groove or the side wall surface in hole constitute the mode (for example Fig. 3 F and G, Fig. 6 F and G, Fig. 7 B) of the lower edge face part of framework 10.Lower edge face 4 in framework 10 is pasted with jointing material 2, but the distance between the surface of lower edge face 4 and photomask 9 only enlarges the amount of the thickness of jointing material 2, is easy to insert control member; And; Can reduce the diameter in groove or hole, therefore, the possibility that framework intensity reduces is less.But, to state in the use under the situation of framework of mode, the adhesive portion that when controlling, need be careful not jointing material, pellicle applies unnecessary power.

In the framework of the large pellicle member of this embodiment, in order to have prevented dirt, also can to groove or hole and control member contact site, groove or hole or at least one side of controlling member implement certain surface treatment.For example can enumerate padded coamings such as utilizing silica gel coats.

Figure 10 is skeleton diagram configuration, that see from the side surface direction of framework that is used to explain the groove of controlling usefulness 7 on the framework of large pellicle member of this embodiment.Shown in Figure 10 A, see that from the side surface direction of framework the groove 7 of controlling usefulness also can tiltedly dispose from the inclination of upper limb face side direction lower edge face on edge direction.And, shown in Figure 10 B, see from the side surface direction of framework, also can be on edge direction from upper limb face side direction lower edge face side, so repeatedly dispose from lower edge face side direction upper limb face side.

In addition, on the lateral surface of framework, the hole of running through along vergence direction shown in Figure 13 can be set also 4 angle parts.Through such through hole is set, also can bar-shaped instrument be passed in this through hole and control.

In the framework of the large pellicle member of this embodiment; The width of each groove or the internal diameter in hole are less than the width W or the height h of the framework that is provided with this groove or hole; For example be arranged under the situation of upper limb face 3 or lower edge face 4; The width of each groove or the internal diameter in hole are preferably 0.01～1 times of framework width, more preferably 0.01～0.5 times, further are preferably 0.01～0.2 times.For example be arranged under the situation of lateral surface 5 or medial surface 6, the width of each groove or the internal diameter in hole are preferably 0.01～1 times of framework height, more preferably 0.01～0.5 times, further are preferably 0.01～0.2 times.In addition, under the bigger situation of the degree of depth in groove or hole, for fear of the rigidity reduction of framework, the width of preferred groove or the internal diameter in hole are less.Under the situation that is provided with the space 7a that broadens to the inside in groove of controlling usefulness or hole 7, the width of the space 7a that broadens or internal diameter are less than the width W or the height h of framework.

Control the groove of usefulness or the framework that hole 7 can be used for controlling the pellicle member (comprising the framework of controlling before the bonding pellicle and these two kinds of the frameworks of controlling after the bonding pellicle), can be when the processing list film structural component, when the pellicle member is contained in storage container, when storage container takes out the pellicle member, effectively utilize.

Utilization controlled the groove of usefulness is controlled, fixedly controlled to member or the method in hole describes.Figure 11 be used to explain utilize control that member is controlled, the part of the situation the during framework of the large pellicle member of fixing this embodiment amplifies longitudinal section; Figure 11 A representes in the cross section is the groove of controlling usefulness or the hole 7 of T font, to insert and control, fixedly have the mode of controlling member 16 of the locking mechanism that is formed by elastic bodys such as plastics; Figure 11 B represent to be arranged on framework upper limb face, the cross section is to insert and control, fixedly have the mode of controlling member 16 of the hang part of L font in the groove of controlling usefulness or the hole 7 of L font; Figure 11 C represent to be arranged on the framework lateral surface, the cross section be the L font, side wall surface constitutes in the groove of controlling usefulness or the hole 7 of a surface part of framework and inserts and control, fixedly have the mode of controlling member 16 of the hang part of L font; Figure 11 D represent to be arranged on framework lower edge face, the cross section be insert in trapezoidal groove of controlling usefulness or the hole 7 and control, the mode of the leading section of controlling member 16 of fixed L font, Figure 11 E represent to be arranged on the framework medial surface, the cross section is the mode of inserting and controlling, fixedly control member 16 in the groove of controlling usefulness or the hole 7 of rectangle.In Figure 11 A～E, control member 16 and control reliably, be fixed in the groove or hole of controlling usefulness.

In the present invention,, reduce deflection through the protuberance of controlling usefulness or the mode of recess of controlling simultaneously respectively in each limit portion of framework more than at least 1 place for the framework of above-mentioned large pellicle member, therefore preferred.More preferably control all protuberance of controlling usefulness or recess simultaneously in each limit portion of the framework of large pellicle member.

In addition, when peeling off the pellicle member, can after groove of controlling usefulness or hole, peel off, when peeling off, can transmit peeling force reliably from photomask.

The second, above-mentioned framework is described in the form that all limit portions have the protuberance of the usefulness of controlling respectively.As this protuberance, there are tabular form or bar-shaped form.In addition; In the present invention; Tabular protuberance is meant the protuberance of the lateral surface, medial surface, upper limb face or the lower edge face that are formed on framework; And the circumferencial direction length of this protuberance in these faces is more than 1.5 times of short transverse length, and bar-shaped protuberance is meant that the length of circumferencial direction of this protuberance is less than 1.5 times of the short transverse length of this protuberance.

At first, the protuberance that is formed on the framework (below be also referred to as " teat ") is described.Figure 14 is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, and Figure 14 A～G is the mode example that is provided with teat at the lateral surface of framework.Figure 15 is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, and Figure 15 A～D is the mode example that is provided with teat at the upper limb face of framework.Figure 16 is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, and Figure 16 A～D is the mode example that is provided with teat at the lower edge face of framework.Figure 17 is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, and Figure 17 A～G is the mode example that is provided with teat at the medial surface of framework.

Shown in figure 14, the framework 10 of the large pellicle member of this embodiment has from the lateral surface 5 of the framework outstanding teat 7 of direction toward the outer side.In addition, shown in figure 15, the framework 10 of the large pellicle member of this embodiment also can have from the upper limb face 3 of the framework teat 7 outstanding towards the top.In addition, shown in figure 16, the framework 10 of the large pellicle member of this embodiment also can have from the lower edge face 4 of the framework teat 7 outstanding towards the below.In addition, shown in figure 17, the framework 10 of the large pellicle member of this embodiment also can have the teat of giving prominence to towards interior side direction from the medial surface 6 of framework 7.

At this, except the mode outstanding, also can make along the outstanding mode of the direction that tilts with respect to normal direction along the normal direction of lateral surface 5 from the lateral surface 5 of the framework teat 7 that direction is outstanding toward the outer side., except the mode outstanding, also can make from the upper limb face 3 of the framework teat outstanding along the outstanding mode of the direction that tilts with respect to normal direction along the normal direction of upper limb face 3 towards the top., except the mode outstanding, also can make from the lower edge face 4 of the framework teat 7 outstanding along the outstanding mode of the direction that tilts with respect to normal direction along the normal direction of lower edge face 4 towards the below.From the medial surface 6 of framework towards the outstanding teat 7 of interior side direction except the mode outstanding along the normal direction of medial surface 6, also can make along the outstanding mode of the direction that tilts with respect to normal direction.Is benchmark towards the overhang of the outstanding teat of interior side direction with the surface of outstanding framework from the lateral surface of the framework teat that direction is outstanding toward the outer side and from the medial surface of framework; Outstanding length is 0.1～10 times of framework width; Be preferably 0.1～5 times, more preferably 0.1～3 times.In addition; The overhang that faces outstanding teat from the upper limb face of the framework teat outstanding towards the top and from the lower edge of framework downwards is a benchmark with the surface of outstanding framework; Outstanding length is 0.1～10 times of framework width, is preferably 0.1～5 times, more preferably 0.1～3 times.

Be provided with from the upper limb face 3 of framework towards above outstanding teat 7 situation and be provided with from the lower edge face 4 of framework towards below under the situation of outstanding teat 7; Except that the reliabilization of controlling, fixing, teat 7 plays the effect of stiffening rib for the deflection of the normal to a surface direction of pellicle 1.

On the other hand; Be provided with from the situation of the lateral surface 5 of the framework teat 7 that direction is outstanding toward the outer side and be provided with medial surface 6 from framework under the situation of the outstanding teat 7 of interior side direction; Except that control, the fixing reliabilization, for when sprawling pellicle 1 because to making framework play the effect of stiffening rib to the deflection of center direction with tension force that pellicle 1 surperficial parallel direction applies.

And shown in figure 18, the framework 10 of the large pellicle member of this embodiment also can have a plurality of teats 7 on framework.Figure 18 is that longitudinal section is amplified in the part of variety of way example of framework of the large pellicle member of this embodiment of expression, and Figure 18 A～G is the mode example that is provided with a plurality of teats.As combination, exist have from the lateral surface teat that direction is outstanding toward the outer side of framework and from the situation of upper limb face outstanding these two kinds of teats of teat of framework towards the top, have from the lateral surface teat that direction is outstanding toward the outer side of framework and from the lower edge of framework face outstanding downwards these two kinds of teats of teat situation, have from the lateral surface teat that direction is outstanding toward the outer side of framework with from the medial surface of framework situation towards outstanding these the two kinds of teats of teat of interior side direction.In addition, also exist have from the upper limb face of the framework teat outstanding towards the top and from the lower edge of framework face outstanding downwards these two kinds of teats of teat situation, have from the upper limb face of the framework teat outstanding with from the medial surface of framework situation towards outstanding these the two kinds of teats of teat of interior side direction towards the top.Also exist the lower edge have from framework to face outstanding teat downwards and from the medial surface of framework situation towards outstanding these the two kinds of teats of teat of interior side direction.And, exist in also that 3 surfaces in 4 surfaces of framework are provided with the mode of teat or the mode of teat all be set on 4 surfaces of framework.Through a plurality of surfaces in framework be provided with teat make control, fixing more reliable, and, can increase the reinforcement direction of framework.In addition, with respect to the holding tool more than 2 kinds of the different surfaces of controlling framework, also have and to deal with such advantage with same framework.

The cross sectional shape of teat 7 is rectangle (for example Figure 14 A and B, Figure 15 A, Figure 16 A, Figure 17 A and B), trapezoidal (for example Figure 14 F, Figure 15 D, Figure 16 A, Figure 17 F), polygon, circle, semicircle (for example Figure 15 B, Figure 15 C) or ellipse (for example Figure 14 G, Figure 17 G) etc., does not have special requirement.Also curvature R, C face can be set in the bight as required.

Figure 19 and Figure 20 are the skeleton diagrams that is used to explain direction configuration, that see pellicle on the framework of large pellicle member of this embodiment, teat.Like Figure 19 A, C and D and shown in Figure 20; The configuration of teat 7 is as long as the protuberance that on 4 limits, all has the usefulness of controlling; Can be configured on the limit portion complete cycle of framework 10 (Figure 19 A), also can local configuration in the limit of framework 10 one (on Figure 19 C～D, Figure 20 A～E).Under the situation of local configuration, the alignment mark position of controlling in the time of also can be with photomask that handle to paste, fixed position, photomask, controlling when photomask is fixed in exposure machine, fixed position are accordingly at the appointed part configuration teat of framework.Under the situation of local configuration teat, preferably be pre-configured in any limit portion of framework.Intensity is strengthened in deflection with respect to framework.

The protuberance of in the framework of the large pellicle member of this embodiment, controlling usefulness is under the tabular situation; This is controlled the shared length of the protuberance of usefulness and is respectively more than 10% with respect to the length on each limit; The load that can disperse equably to be produced by deadweight is setovered, and is more preferred.Further be preferably more than 20%, most preferably be more than 30%.In addition, under the situation that need leave the leeway through being processed to form the part with the function except that controlling on the framework, preferably this is controlled the shared length of the protuberance of usefulness and is respectively below 90% with respect to the length on each limit.More preferably below 80%, most preferably be below 70%.This controls the protuberance of usefulness each centrosymmetric mode with respect to each limit portion that is configured in each limit portion, and the load that can disperse equably to be produced by deadweight is setovered, and is comparatively desirable.

The protuberance of in the framework of the large pellicle member of this embodiment, controlling usefulness is that its configuration is preferably all disposed a plurality of in advance in each limit portion of framework under the bar-shaped situation.When controlling the framework of pellicle member, the load that can disperse equably to be produced by deadweight is setovered, thereby can suppress the generation of deflection.

Figure 10 is used to explain skeleton diagram configuration on the framework of large pellicle member of this embodiment, teat, that see from the side surface direction of framework.Shown in Figure 10 A, see that from the side surface direction of framework teat 7 also can tiltedly dispose from the inclination of upper limb face side direction lower edge face on edge direction.And, shown in Figure 10 B, see from the side surface direction of framework, also can be on edge direction from upper limb face side direction lower edge face side, so repeatedly dispose from lower edge face side direction upper limb face side.

Figure 21 is arranged at teat loading and unloading on the framework of the large pellicle member part when freely being fixed on the mode of framework limit portion to amplify longitudinal section; Figure 21 A representes that screw thread fixes; Figure 21 B representes to be fixed by what unitor carried out; Figure 21 C is that expression is fixed by what elastic body carried out, and Figure 21 D is that expression is fixed through what clamping was carried out.Shown in figure 21, in the framework of the large pellicle member of this embodiment, the teat 7 preferred loading and unloading of framework 10 freely are fixed on the limit portion of framework 10.The framework of pellicle member be glued to rigidity than the high photomask of the framework of pellicle member after owing to needn't worry the rigidity of the framework of pellicle member, therefore, be used to improve rigidity and also can pull down with the teat of fixing, controlling.Through such operation, also can avoid receiving the restriction of controlling when handling photomask, fixed position, controlling when photomask is fixed in exposure machine, fixed position.

In addition, when peeling off the pellicle member, also teat can be installed in advance from photomask.Through such operation, seek to improve the rigidity of the framework of pellicle member, can control, fixed salient, therefore, when peeling off, can transmit peeling force reliably.

Handling method so long as the mechanical fixed method that can load and unload get final product.For example shown in Figure 21, can enumerate screw thread, unitor, elastomeric insertion, sandwich etc.In order to have prevented dirt, be preferably also and can implement certain surface treatment in advance contact site.For example, can enumerate and coat by padded coamings such as silicon rubber.Under the situation that teat can load and unload, teat also can be formed by the rigidity raw material higher than framework.Under the situation that the lateral surface or the medial surface of framework has teat, be used to install the hole of teat or the size of groove (internal diameter) 0.01～1 times for the framework height, be preferably 0.01～0.5 times of framework height, more preferably 0.01～0.2 of the framework height times.In addition; Under the situation that the upper limb face or the lower edge of framework are worn teat; Be used to install the hole of teat or the size of groove (internal diameter) 0.01～1 times, be preferably 0.01～0.5 times of framework height, more preferably 0.01～0.2 of the framework height times for the framework width.Rigidity for fear of framework reduces, and preferred hole or groove are less.

In the framework of the large pellicle member of this embodiment, Figure 19 or shown in Figure 20 for example, the teat shape of framework 10 is preferably tabular.The thickness of plate for example is preferably the thickness more than 0.01 times of the overhang of teat 7, more preferably the thickness more than 0.1 times less than the width W or the height h of the framework that this plate is set.Make teat 7 under the situation of hook-type, the leading section 7a of the bending of hook-type also can be greater than the width W or the height h of the framework that plate is set.At this, shown in Figure 20 (c), under teat 7 is tabular situation, also can increase the overhang of teat continuously towards the central portion on limit from four bights of framework.Through like this, near the rigidity the more weak limit central authorities of portion of rigidity can be strengthened the rigidity in four bights of framework and the rigid uniform of limit portion.

In the framework of the large pellicle member of this embodiment, for example shown in Figure 22, also can make the shape of the teat 7 of framework 20 bar-shaped.Figure 22 is the stereographic map of other type (teat is bar-shaped) of framework that is used to explain the large pellicle member of this embodiment, and Figure 22 A representes to be adhered to the large pellicle member of photomask, and Figure 22 B representes the framework of large pellicle member.The cross sectional shape of bar-shaped teat 7 is rectangle, trapezoidal, polygon, circle, ellipse etc., does not have special requirement.Also curvature R, C face can be set in the bight as required.Teat 7 also can be arranged on any face in upper limb face, lower edge face, lateral surface or the medial surface of framework 20.Figure 22 is the mode example that is provided with teat at lateral surface.For example, under the situation that is arranged at upper limb face 3 or lower edge face 4, the diameter of rod is preferably 0.1～2 times length of framework width, more preferably 0.1～0.5 times length.For example under the situation that is arranged at lateral surface 5 or medial surface 6, the diameter of rod is preferably 0.1～3 times length of framework height, more preferably 0.1～1 times length.Figure 23 is the skeleton diagram that is used to explain direction configuration, that see pellicle on the framework of large pellicle member of this embodiment, bar-shaped teat; Figure 23 A is identical with the mode of Figure 22; It is the situation that respectively is provided with 3 teats on minor face and long limit respectively; Figure 23 B is the situation that respectively is provided with 1 teat respectively on minor face and long limit and respectively is provided with 1 teat at 4 angles, and Figure 23 C is the incorporate situation of teat on each limit that makes among Figure 23 A.In Figure 23 C, because 3 bar-shaped teats 7 are integrated, therefore, remove the expectation raising intensity, operation property is also preferable during dismounting.

In the framework of the large pellicle member of this embodiment, preferred its front end of teat is made hook-type.For example be L font (for example Figure 14 C and E, Figure 15 C, Figure 16 D, Figure 17 C and E), T font (for example Figure 14 D, Figure 17 D).Compare with the situation that does not have key, can collude to be hung on and control member, therefore, control, fix more reliable.

In the framework of the large pellicle member of this embodiment, when the pellicle member was pasted on photomask, the teat of framework also can form with the circumferential lateral surface of photomask and contact.Perhaps, in the framework of the large pellicle member of this embodiment, when the pellicle member is pasted on photomask, the teat of framework also can form be formed at photomask on groove contact.Figure 24 is that longitudinal section is amplified in the part that comprises the teat on the framework that is arranged at the large pellicle member; Figure 24 A representes that teat is the mode that the crooked limit portion of L font, front end contacts with photomask, and Figure 24 B representes that teat is that L font, front end penetrate into the mode in the groove that is arranged on the photomask.Shown in Figure 24 A, under the outstanding situation of the lower surface of the leading section 7a self adhesive material 2 of the L font teat on the direction vertical with lower edge face 4, the leading section 7a of L font teat is configured to contact substantially with the lateral surface of photomask 9.Perhaps, shown in Figure 24 B, the leading section 7a of the L font teat on must the direction vertical with lower edge face 4 is configured under the lateral surface situation in the inner part than photomask 9, can be the shape identical with leading section 7a with the surfacing cut of photomask 9 also.Under any situation of Figure 24 A and B, when the pellicle member is pasted on photomask, all play the effect that the paste position precision of pellicle member is simplified, improved in the contraposition that makes the pellicle member.

And in the framework of the large pellicle member of this embodiment, when the pellicle member was pasted on photomask, the teat of framework also can form with the circumferential lateral surface of photomask and the groove that is formed on the photomask and contact.For example, a teat in the teat about framework is formed with the circumferential lateral surface of photomask contact, with another teat form be formed at photomask on the mode that contacts of groove.Perhaps, be with the teat of framework make F font, the part that front is crooked form with the circumferential lateral surface of photomask and contact, with the part of front lateral bending song form be formed at photomask on the mode that contacts of groove.Like this, as long as when the pellicle member is pasted on photomask, play the effect that the paste position precision of pellicle member is simplified, improved in the contraposition that makes the pellicle member, also can mode be out of shape.

Another part of combination in the teat of Figure 25 on the framework that is arranged at the large pellicle member and the fixing amplification of the part during large pellicle member longitudinal section.Shown in figure 25, in the framework of the large pellicle member of this embodiment, be preferably when the pellicle member is pasted on photomask 9, the teat 7 of framework and another part 15 combinations can utilize physical method that framework 10 is fixed in photomask 9 thereby form.Through like this, can the pellicle member be installed on photomask reliably, can prevent to come off etc.As the method that another part 15 is installed on the teat 7 of framework, can use that screw thread fastening, unitor, employing elastic body carry out chimeric, various fixing meanss such as sandwich.

Teat also can be used to control, fixing, can be when the processing list film structural component, when it is contained in storage container, when storage container takes out the pellicle member, effectively utilize.Member is controlled, the method for fixed salient by controlling in explanation.Figure 26 be used to explain that member is controlled by controlling, the part of the situation the during framework of the large pellicle member of fixing this embodiment amplifies longitudinal section; Figure 26 A representes to control, constant cross-section is the mode of the teat of rectangle; Figure 26 B represent to control, be fixedly set in the framework lateral surface teat, be that the cross section is the mode of the teat of L font; Figure 26 C represent to control, be fixedly set in framework upper limb face teat, be that the cross section is the mode of the teat of L font, Figure 26 D representes to control, be fixedly set in the mode of the teat of the teat of framework medial surface, 2 rectangles.In Figure 26 A and C, control that member 16 is controlled reliably, fixed salient.In Figure 26 B, the L word leading section (hook portion) of teat collude be hung on control member 16 and controlled more reliably, fixing.In addition, in Figure 26 D, between the teat of 2 rectangles, collude hang control member 16 and controlled reliably, fixing.Has the form of the protuberance of the usefulness of controlling respectively in all limit portions for form and framework above explanation, framework has the recess of the usefulness of controlling respectively in all limit portions; Self-evident, the use that combines of recess and the protuberance that also can in a framework, will control usefulness.Under the situation of stressing space efficiency, be preferably recess, under the situation of the stiffening effect of stressing framework, be preferably protuberance, but in the scope of above-mentioned various forms, can design in combination with the design of controlling member.

For the framework of controlling large pellicle member of the present invention; Preferably control protuberance of controlling usefulness or recess more than at least 1 place respectively simultaneously in each limit portion of framework; More preferably control protuberance of controlling usefulness or recess more than at least 2 places respectively simultaneously, most preferably control all protuberance of controlling usefulness or recess simultaneously in each limit portion of framework in each limit portion of framework.

The framework that is bonded with pellicle is applied the stress of the stretching of direction to the inside of the tension force generation of shrinking by the pellicle desire.In this embodiment, under the situation of the mode of excavating the groove of controlling usefulness or hole from the medial surface of framework, can be through being inserted into member applies the outside to the limit portion of framework the stress of controlling in the groove of controlling usefulness or the hole.Thus, can correct the microdeformation of the framework that produces by above-mentioned stress.And; In the mode of excavating the groove of controlling usefulness or hole from the upper limb face of framework, excavate the mode in the groove of controlling usefulness or hole or excavate in any mode in the mode in the groove of controlling usefulness or hole from the lateral surface of framework from the lower edge face of framework; For example through the spatial portion that broadens to the inside in groove or hole is set; And locking mechanism is set at the leading section of the insertion of controlling member, all can correct the distortion to the inside that framework is produced by pellicle.Equally, for the protuberance that is formed on the framework,, also can correct the distortion of direction to the inside that framework is produced by pellicle through controlling protuberance.In addition; Self-evident; The situation of the distortion to the inside of correcting method that above-mentioned framework is out of shape to the inside and causing except that the shrink tension that can be applied to correct by pellicle, the situation of the distortion that also can be applied to cause by the deadweight of framework, external force outside the membrane removal tension force.

When correcting the framework shape of large pellicle member; Preferably control protuberance of controlling usefulness or recess more than at least 1 place respectively simultaneously in each limit portion of the framework of above-mentioned large pellicle member; To at least 1 place's stress application of the framework of above-mentioned large pellicle member, thereby reduce the distortion of this framework.

Embodiment

The framework that uses such as the inventor have the large pellicle member of the present invention of above-mentioned structure experimentizes, and the result can obtain the good result shown in following examples.

Embodiment 1

Prepare long edge lengths and be 1600mm, bond length and be 1400mm, width and be 14mm, highly be the framework of the tetragonal aluminium alloy system of 6mm.Height at each limit lateral surface is the position of 3mm; To be the center, utilize the circumferencial direction length that forms 3 place's peristomes on cut each limit in all 4 limits of framework respectively to be the degree of depth of 1.5mm, groove groove for 3mm for the height of 200mm, peristome apart from the central authorities on each limit and 3 of the two ends 250mm on each limit.

At the lower edge face of framework, as bonding material layer and adhesive surface is coated with the foam polyethylene base material (thickness is 1mm) of acrylic-based adhesives.Then; Diaphragm at this bonding material layer laminated frame shape identical with above-mentioned framework; Promptly be covered with the diaphragm of the pet resin system of silicon class release agent in surfaces coated, this diaphragm is set to stretch out the pressing part that is of a size of wide 10mm * long 900mm, stretch out the pressing part that is of a size of wide 10mm * long 750mm, be the pressing part (with reference to Figure 27) that the lateral direction of middle mind-set framework is stretched out radius 10mm on four jiaos summits with the summit to the lateral direction of framework at the central portion of minor face to the lateral direction of framework at the central portion on long limit.

The framework of the large pellicle member that has diaphragm that obtains is in this wise carried on the pallet that utilizes the vacuum-formed storage container of ABS resin material, and (mark cun: long limit 15mm * 940mm, minor face 15mm * 790mm, four jiaos 15mm * 60mm) 8 places with above-mentioned pressing part are adhesively fixed on pallet by adhesive strip.

Embodiment 2

Except that long edge lengths is that 1800mm, bond length are that 1600mm, width are the 16mm, prepare the framework same with the foregoing description 1, likewise be fixed on the pallet with embodiment 1.

Embodiment 3

Except that long edge lengths is that 2000mm, bond length are that 1800mm, width are the 18mm, prepare the framework same with the foregoing description 1, likewise be fixed on the pallet with embodiment 1.

Embodiment 4

Except that being that 3mm, the degree of depth are the hole of circle of 3mm apart from 3 points of the central authorities on each limit and the two ends 150mm on each limit, at the diameter that forms 3 place's peristomes on each limit in the lateral surface of framework, all 4 limits respectively in framework; Prepare the framework same, likewise be fixed on the pallet with embodiment 1 with the foregoing description 2.

Comparative example 1

Except that the degree of depth that at the height that forms peristome on the complete cycle of minor face lateral surface is 1.5mm, groove be 3mm groove, on long limit, do not form the handle part, prepare the framework same with the foregoing description 2, likewise be fixed on the pallet with embodiment 1.

Embodiment 5

Except that being that 3mm, the degree of depth are the hole of the circle of 3mm, are that 3mm, the degree of depth are the hole of circle of 3mm at the diameter that the lateral surface of the framework of minor face central authorities respectively forms 1 place's peristome apart from the position of the central authorities on long limit and two ends 150mm, at the diameter that the lateral surface of framework respectively forms 3 place's peristomes; Prepare the framework same, likewise be fixed on the pallet with embodiment 1 with the foregoing description 2.

The evaluation result of expression the foregoing description 1～5 and comparative example 1 in the following table 1.

Framework his-and-hers watches film structural component framework before utilization is adhesively fixed on pallet is controlled evaluation reliably.Under the situation of embodiment 1～3; As controlling member; Preparation has the width 100mm that is processed by reinforced plastics, tabular 12 groups of instruments of controlling member of thickness 0.75mm; This is controlled in all grooves of controlling usefulness on each limit that member is inserted into framework control simultaneously, flatly lift framework.In addition, under the situation of comparative example 1, with identical instrument be inserted into apart from the central authorities of two minor faces and the two ends 250mm of two minor faces to amount at 6 be 6 places at center, flatly lift framework.In addition, under the situation of embodiment 4～5, as controlling member, the rod of the diameter 2mm for preparing to be processed by reinforced plastics is controlled this in all holes of controlling usefulness on each limit that member is inserted into framework and to be controlled simultaneously, flatly lifts framework.After flatly lifting; Under horizontality, make it the height of 300mm 5 times up and down with per 1 second 1 time ratio; Represent all situation that member is not all deviate from from all grooves of controlling usefulness or hole of controlling with " zero "; Control member with " △ " expression part and control the groove of usefulness or the situation that deviate from the hole, represent all to control that member is deviate from from all grooves of controlling usefulness or hole and situation that pellicle member framework falls with " * " from the part of correspondence.

In addition, utilize across be adhesively fixed framework on the pallet of horizontal positioned of diaphragm and this pellicle member framework is carried out deflection prevent to estimate.Under the situation of embodiment 1～3; As controlling member; Preparation has the width 100mm that is processed by reinforced plastics, tabular 12 groups of instruments of controlling member of thickness 0.75mm; This is controlled in all grooves of controlling usefulness on each limit that member is inserted into framework control simultaneously, flatly lift framework.In addition, under the situation of comparative example 1, with identical instrument be inserted into apart from the central authorities of two minor faces and the two ends 250mm of two minor faces to amount at 6 be 6 places at center, flatly lift framework.In addition, under the situation of embodiment 4～5, as controlling member, the rod of the diameter 2mm for preparing to be processed by reinforced plastics is controlled this in all holes of controlling usefulness on each limit that member is inserted into framework and to be controlled simultaneously, flatly lifts framework.The speed of lifting is per second 1cm; The deflection on limit of interface pellicle member framework before that is about to complete strip off diaphragm and jointing material with " ◎ " expression is less than the situation of 10mm; The deflection on limit of interface pellicle member framework before that is about to complete strip off diaphragm and jointing material with " zero " expression is more than or equal to 10mm and less than the situation of 15mm; The deflection on limit that is about to the pellicle member framework before the interface of complete strip off diaphragm and jointing material with " △ " (in practical application no problem threshold level) expression is more than or equal to 15mm and less than the situation of 20mm, and the deflection on limit of interface pellicle member framework before that is about to complete strip off diaphragm and jointing material with " * " (in-problem level in practical application) expression is more than or equal to the situation of 20mm.

Table 1

Claims

1. the holding method of the framework of a large pellicle member, this framework has the polygonal shape that is made up of many limits, can be at the bonding pellicle of upper limb face of this framework; Lower edge face in this framework applies jointing material; The length of the longest edge of above-mentioned framework is more than the 1m, wherein

Above-mentioned framework has the protuberance or the recess of the usefulness of controlling respectively in all limit portions;

In all limit portions of above-mentioned framework, control the protuberance of controlling usefulness or the recess at least 1 place respectively and carry.

2. the holding method of the framework of large pellicle member according to claim 1 is characterized in that,

In all limit portions of the framework of above-mentioned large pellicle member, control all protuberance of controlling usefulness or recess.