JP2009054628A - Substrate holder - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate holder capable of fully securing rigidity, even when a substrate is large-sized. <P>SOLUTION: The substrate holder has a base which has flexibility and can be bent, a plurality of bars 3 which are arrayed on the base 11 that face a liquid crystal glass substrate 10, and adhesive layers 5, laminated and formed on opposite surfaces 4 of the respective bars 3 which face the liquid crystal glass substrate 10, and the adhesive layers 5 of the respective bars 3 are stuck detachably on the liquid crystal glass substrate 10. The plurality of bars 3 are united with the liquid crystal glass substrate 10, with the adhesive layers 5 interposed therebetween to constitute a structure; and since the respective bars 3 are extended in an X direction as plate bodies which are sectioned substantially in rectangular form to obtain sufficient rigidity, even when the liquid crystal glass substrate 10 is large-sized, there is no need for the base 11 itself to be enhanced in rigidity or made heavy. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a substrate holder for adhering and holding various substrates such as semiconductor wafers and glass substrates.

  Liquid crystal glass substrates for semiconductor wafers and displays are becoming thinner and thinner in light of the reduction in thickness, weight, and size of electronic devices and home appliances. Therefore, it is necessary to pay attention to storage and transportation.

Therefore, in the past, when storing or transporting a semiconductor wafer or a liquid crystal glass substrate, these are bonded to a hard support substrate to ensure rigidity, and stored or transported while being bonded to this support substrate. (See Patent Documents 1 and 2). Although not shown, the support substrate is formed using, for example, metal, glass, ceramic, hard plastic, or the like.
Japanese Patent Laid-Open No. 10-92776 JP 2007-103637 A

  However, since recent semiconductor wafers and liquid crystal glass substrates have been made thinner and larger, it is necessary to increase the rigidity of the support substrate in order to secure the rigidity by bonding to the support substrate. Along with this, there is a problem that the weight of the support substrate increases, which hinders storage, transportation and handling.

  The present invention has been made in view of the above, and an object of the present invention is to provide a substrate holder that can ensure sufficient rigidity even when the substrate is large.

In the present invention, in order to solve the above problems, the substrate is detachably adhered and held,
A flexible bendable base material, a plurality of bars arrayed on the base material and facing the substrate, and an adhesive layer formed on an opposing surface of the plurality of bars facing the substrate, A plurality of bars are arranged at intervals in one direction, each bar is formed in a substantially rectangular cross section, and an adhesive layer is detachably adhered to the substrate.

In addition, the corner | angular part of the arrangement direction in the opposing surface of a bar can be chamfered.
Also, the bar can be formed hollow.
Moreover, an adhesion layer can be made into the photocurable type which adhesiveness falls by irradiation of a light ray.

  Here, the substrate in the claims includes a thin and fragile large substrate such as a large-diameter semiconductor wafer (for example, 300 mm or 450 mm) or a large glass substrate for liquid crystal. The substrate is not particularly limited to a rectangle, polygon, circle, ellipse, transparent, opaque, translucent or the like. The bar may be solid or hollow. Furthermore, the adhesive layer is made of an adhesive elastomer, a sheet, a film, an adhesive, or the like, and may be formed on the opposing surface of any bar, or may be formed on the opposing surface of each bar.

  According to the present invention, for example, when a large substrate is stored, transported, etc., a plurality of bars arranged with substrate holders are opposed to the substrate, and the adhesive layer of the bar is adhered to the substrate. It can be stored or transported. Conversely, when removing the substrate holder from the substrate, the substrate holder can be removed from the substrate by pulling the base material of the substrate holder away from the substrate and peeling the adhesive layer of the bar from the substrate.

According to the present invention, there is an effect that it is possible to provide a substrate holder that can ensure sufficient rigidity even if the substrate is large.
In addition, if the corners in the arrangement direction on the opposing surface of the bar are chamfered, it is easy to introduce a gas for releasing the adhesion when the base material of the substrate holder is separated, and the adhesive layer of the bar is easily peeled from the substrate. be able to.

Further, if the bar is formed hollow, the bar can be reduced in weight, and the substrate holder can be easily handled.
Furthermore, when the pressure-sensitive adhesive layer is a photo-curing type, it is possible to prevent the substrate from easily falling off because the pressure-sensitive adhesive layer is reduced in adhesiveness by irradiating the pressure-sensitive adhesive layer with light.

  Hereinafter, a preferred embodiment of a substrate holder according to the present invention will be described with reference to the drawings. A substrate holder in this embodiment includes a base material 1 having flexibility as shown in FIGS. And a plurality of bars 3 arranged on the surface of the base material 1 so as to face the large liquid crystal glass substrate 10 and a slightly adhesive layer 5 formed on each bar 3. 3 adhesive layers 5 are detachably adhered.

  The base material 1 is molded into a flat rectangular thin plate that can be bent using, for example, a molding material containing a resin, and has a size corresponding to the liquid crystal glass substrate 10 to be stored and transported. As the molding material for the flat base material 1, for example, a molding material containing ABS, PC / ABS, PC, or the like is used. The end portion of the base material 1 is formed in an elongated shape, an uneven shape, or a curved shape in a substantially semicircular arc shape as necessary, and is used as a grip margin 2 that is easy for an operator to operate.

  As shown in FIG. 3, the plurality of bars 3 are formed in the same size and length, and are arranged in parallel at a predetermined interval in one direction on the surface of the base material 1, that is, in the Y direction in the same figure. It functions to form a strong structure together with the substrate 1. As a manufacturing method of the plurality of bars 3, for example, (1) a manufacturing method in which the base material 1 and the plurality of bars 3 are integrally formed, and (2) an adhesive layer is formed by vacuum forming a plate body or a sheet into a plurality of continuous irregularities. Examples include a method of forming a plurality of bars 3 with 5 and laminating and bonding the plurality of bars 3 and the flat substrate 1.

  Each bar 3 is formed into a plate body (also a prismatic body) having a substantially rectangular cross section extending linearly in the X direction of FIG. 3 and has sufficient rigidity in the X direction of FIG. Each bar 3 is formed in a solid shape with a substantially rectangular cross section, but if necessary, it is formed into a hollow shape with a substantially rectangular cross section to reduce the weight.

  The pressure-sensitive adhesive layer 5 is made of a photo-curing pressure-sensitive adhesive whose adhesiveness is lowered by irradiation of a predetermined light beam including, for example, ultraviolet rays, and the pressure-sensitive adhesive is screened on the flat facing surface 4 facing the liquid crystal glass substrate 10 of each bar 3. Lamination is formed by printing or the like.

  In the above configuration, when the liquid crystal glass substrate 10 is stored or transported, the plurality of bars 3 of the substrate holder are respectively opposed to the liquid crystal glass substrate 10, and each bar 3 is placed on the flat surface of the liquid crystal glass substrate 10. If the pressure-sensitive adhesive layer 5 is pressed and adhered without any gap, the liquid crystal glass substrate 10 can be stored or transported (see FIG. 1).

  On the other hand, when removing the substrate holder from the liquid crystal glass substrate 10, as shown in FIG. 2, the substrate 1 of the substrate holder is gradually pulled up in a bow shape from the gripping margin 2 at its end, and the liquid crystal glass substrate 10 is removed. The substrate holder can be removed from the liquid crystal glass substrate 10 by peeling the adhesive layer 5 to which each bar 3 adheres from the flat surface. At this time, when the adhesive layer 5 is a photo-curing type, the adhesive layer 5 may be peeled after the adhesive layer 5 is irradiated with light to reduce the adhesiveness.

  According to the above configuration, the plurality of bars 3 are integrated with the liquid crystal glass substrate 10 via the adhesive layer 5 to form a strong structure, and each bar 3 is extended in the X direction as a plate body having a substantially rectangular cross section. Since sufficient rigidity can be obtained by these, even when the liquid crystal glass substrate 10 is large, there is no need to increase the rigidity by increasing the thickness of the base material 1 itself or to increase the weight. Therefore, it is possible to reliably solve the problem that the weight of the base material 1 corresponding to the support substrate increases and hinders storage, transportation, and handling.

  In addition, since it is not necessary to use a plurality of base materials 1 as in the conventional example, the configuration of the substrate holder can be simplified and reduced in weight, and can be manufactured at low cost. Furthermore, when the adhesive layer 5 is a photo-curing type, the adhesiveness of the adhesive layer 5 is reduced only by irradiating each adhesive layer 5 with light, so that the glass substrate 10 can be easily removed. Suppression can be prevented.

  Next, FIG. 4 shows a second embodiment of the present invention. In this case, the corners 6 in the arrangement direction (Y direction in FIG. 3) on the facing surface 4 of each bar 3 are rounded and chamfered. The curved R shape is formed. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  Also in this embodiment, the same effect as the above embodiment can be expected, and the ridge line of the adhesive layer 5 forming portion is formed in an R shape, so that the adhesive 1 is released when the substrate 1 of the substrate holder is pulled up like a bow. It is clear that the air can be easily introduced, and the adhesive layer 5 of each bar 3 can be easily peeled from the liquid crystal glass substrate 10 regardless of the large area of the liquid crystal glass substrate 10.

  In the above embodiment, the base material 1 of the substrate holder is simply pulled up, but the base material 1 of the substrate holder may be pulled up manually or automatically by a working robot. Moreover, although the adhesion layer 5 was formed from the photocurable adhesive in the said embodiment, it is not limited to this at all. For example, the adhesive layer 5 may be formed using a predetermined thin film material having flexibility. The adhesive layer 5 in this case is (1) a type in which an adhesive urethane gel is laminated on a support substrate, and (2) a type having a micro suction cup with little transfer of the adhesive (trade name: μ-fit, etc. ), (3) A type in which an acrylic re-peeling adhesive layer is laminated on a support substrate, and the like.

It is explanatory drawing which shows typically the use condition in embodiment of the board | substrate holder which concerns on this invention. It is explanatory drawing which shows typically the peeling state from the liquid crystal glass substrate in embodiment of the board | substrate holder which concerns on this invention. It is a perspective explanatory view showing an embodiment of a substrate holder concerning the present invention typically. It is principal part explanatory drawing which shows typically 2nd Embodiment of the board | substrate holder which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Base material 2 Grasp allowance 3 Bar 4 Opposite surface 5 Adhesion layer 6 Corner | angular part 10 Liquid crystal glass substrate (board | substrate)

Claims (4)

  A substrate holder for adhering and holding a substrate detachably, a flexible base material that can be bent, a plurality of bars arranged on the base material and facing the substrate, and the plurality of bars And an adhesive layer formed on the opposing surface facing the substrate, and a plurality of bars are arranged at intervals in one direction, and each bar is formed in a substantially rectangular cross section so that the adhesive layer is detachably attached to the substrate. A substrate holder characterized by that.   The substrate holder according to claim 1, wherein corners in the arrangement direction on the opposing surface of the bar are chamfered.   The substrate holder according to claim 1 or 2, wherein the bar is formed hollow.   The substrate holder according to claim 1, 2, or 3, wherein the adhesive layer is a photo-curing type whose adhesiveness is reduced by irradiation with light.

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