JP6462525B2

JP6462525B2 - Adhesive transport tray and manufacturing method thereof

Info

Publication number: JP6462525B2
Application number: JP2015158221A
Authority: JP
Inventors: 祥子大出; 田中　清文; 清文田中
Original assignee: Shin Etsu Polymer Co Ltd
Current assignee: Shin Etsu Polymer Co Ltd
Priority date: 2015-08-10
Filing date: 2015-08-10
Publication date: 2019-01-30
Anticipated expiration: 2035-08-10
Also published as: JP2017037958A

Description

本発明は、微細デバイス等からなる小物品の保持、検査、管理、搬送、輸送等の際に使用される粘着搬送トレイ及びその製造方法に関するものである。 The present invention relates to an adhesive transport tray used for holding, inspecting, managing, transporting, transporting and the like of small articles made of a fine device and the like, and a method for manufacturing the same.

従来の粘着トレイは、図示しないが、樹脂製のトレイと、このトレイの平坦な表面に固定されて半導体デバイス等の電子部品を着脱自在に粘着保持する粘着層と、トレイに穿孔されて粘着層に被覆される真空防止孔とを備えて構成されている。真空防止孔は、例えばトレイの厚さ方向にφ２ｍｍ程度の丸孔が貫通して穿孔されることにより形成され、相対向するトレイの表面と粘着層との間の隙間に連通しており、空気の給排作用により、電子部品が剥離してピックアップされる際、粘着層を円滑に変形させるよう機能する（特許文献１参照）。 Although not shown, the conventional adhesive tray is made of a resin tray, an adhesive layer that is fixed to the flat surface of the tray and detachably holds an electronic component such as a semiconductor device, and an adhesive layer that is perforated in the tray. And a vacuum prevention hole to be covered. The vacuum prevention hole is formed, for example, by penetrating a round hole having a diameter of about 2 mm in the thickness direction of the tray and communicating with a gap between the opposite surface of the tray and the adhesive layer. When the electronic component is peeled off and picked up, the adhesive layer functions so as to smoothly deform the adhesive layer (see Patent Document 1).

このような粘着トレイは、電子部品が２ｍｍ角以上の大きさを有する部品の場合、換言すれば、一辺が２ｍｍ以上の平面正方形の電子部品の場合には、粘着層と電子部品との接触面積を十分確保することができるので、粘着層に電子部品を適切に粘着保持させることができる。 When such an adhesive tray is a component having a size of 2 mm square or more, in other words, in the case of a planar square electronic component having a side of 2 mm or more, the contact area between the adhesive layer and the electronic component Can be secured sufficiently, so that the electronic component can be appropriately adhered and held on the adhesive layer.

ところで、粘着層には大きな電子部品ではなく、真空防止孔の径よりも小さい２ｍｍ角未満の大きさの微細デバイス（例えば、セラミックコンデンサ、サーミスタ、ＭＥＭＳ、フォトダイオード、フォトトランジスタ等）が着脱される場合がある。この場合には、粘着層と小さな微細デバイスとの接触面積を十分に確保することができないので、微細デバイスを適切に粘着保持させるには、粘着層に対する押圧力を増大させる必要がある。 By the way, not a large electronic component but a micro device (for example, a ceramic capacitor, thermistor, MEMS, photodiode, phototransistor, etc.) having a size less than 2 mm square smaller than the diameter of the vacuum prevention hole is attached to and detached from the adhesive layer. There is a case. In this case, a sufficient contact area between the adhesive layer and the small fine device cannot be ensured. Therefore, in order to appropriately hold the fine device in an adhesive state, it is necessary to increase the pressing force on the adhesive layer.

特許第５２３４６４４号Japanese Patent No. 5234644

従来の粘着トレイは、以上のように構成されているが、トレイに真空防止孔を穿孔しようとすると、粘着トレイの製造作業が複雑化したり、煩雑化することがある。また、トレイに真空防止孔が穿孔されていると、真空防止孔の開口と粘着層との圧接に伴い、粘着層に微細デバイスを適切な姿勢で粘着保持させることが困難な場合がある。また、粘着層が部分的に変形したり、繰り返しの使用が困難になる事態が予想される。 The conventional adhesive tray is configured as described above. However, if an anti-vacuum hole is made in the tray, the manufacturing operation of the adhesive tray may be complicated or complicated. In addition, when the tray is provided with a vacuum prevention hole, it may be difficult to hold the fine device in an appropriate posture on the adhesive layer in accordance with the pressure contact between the opening of the vacuum prevention hole and the adhesive layer. In addition, it is expected that the adhesive layer may be partially deformed or difficult to be used repeatedly.

係る弊害を解消する手段としては、トレイに真空防止孔を穿孔せず、省略する方法があげられる。しかしながら、トレイ表面と粘着層間の隙間が真空防止孔を介して外部と連通しないと、粘着層の変形に支障を来し、繰り返しの使用が期待できなくなる事態が予想される。 As a means for solving such an adverse effect, there is a method of omitting the tray without forming a vacuum prevention hole. However, if the gap between the tray surface and the adhesive layer does not communicate with the outside through the vacuum prevention hole, it is expected that the adhesive layer will be deformed and repeated use cannot be expected.

本発明は上記に鑑みなされたもので、例え一辺が２ｍｍ未満の小物品でも、粘着シートに適切に粘着保持させることができ、しかも、トレイと粘着シート間の隙間を外部と連通させることにより、粘着シートの部分的な変形を防ぎ、繰り返し使用することのできる粘着搬送トレイ及びその製造方法を提供することを目的としている。 The present invention has been made in view of the above, for example, even a small article having a side of less than 2 mm can be appropriately adhered and held on the adhesive sheet, and by communicating the gap between the tray and the adhesive sheet with the outside, An object of the present invention is to provide an adhesive transport tray that can prevent partial deformation of the adhesive sheet and can be used repeatedly, and a method for manufacturing the same.

本発明においては上記課題を解決するため、剛性を有するトレイ本体と、このトレイ本体に取り付けられて小物品を着脱自在に粘着保持する可撓性の粘着シートとを備えたものであって、
トレイ本体の表面に、粘着シートを包囲して遊嵌する包囲壁を立設し、この包囲壁により、トレイ本体の裏面にスタック用の凹み穴を形成し、
粘着シートを非シリコーン製としてその表面の周縁部には包囲壁に遊嵌されるエンドレスの抑えフレームを第一の粘着材により粘着し、粘着シートの裏面周縁部に、包囲壁に区画されたトレイ本体の表面に粘着する第二の粘着材を粘着し、この第二の粘着材により、包囲壁に区画されたトレイ本体の表面と粘着シートとの間に粘着シート用の撓み隙間を区画形成し、
トレイ本体の包囲壁と粘着シート、抑えフレーム、及び第一、第二の粘着材との間に気体流通路を形成し、包囲壁に区画されたトレイ本体の表面と第二の粘着材の粘着面との間に、粘着シート用の撓み隙間と気体流通路とを連通する非粘着領域を部分的に形成したことを特徴としている。 In the present invention, in order to solve the above-mentioned problem, a tray body having rigidity and a flexible adhesive sheet attached to the tray body and detachably sticking and holding small articles are provided,
On the surface of the tray body, an enclosure wall that surrounds the adhesive sheet and loosely fits is erected, and by this enclosure wall, a recess hole for stacking is formed on the back surface of the tray body,
The adhesive sheet is made of non-silicone, and the endless restraining frame loosely fitted to the surrounding wall is adhered to the peripheral portion of the surface by the first adhesive material, and the tray partitioned by the surrounding wall is provided on the rear peripheral portion of the adhesive sheet. A second adhesive material that adheres to the surface of the main body is adhered, and by this second adhesive material, a flexible gap for the adhesive sheet is formed between the surface of the tray main body partitioned by the surrounding wall and the adhesive sheet. ,
A gas flow path is formed between the surrounding wall of the tray main body and the adhesive sheet, the holding frame, and the first and second adhesive materials, and the surface of the tray main body partitioned by the surrounding wall and the second adhesive material is adhered. It is characterized in that a non-adhesive region that communicates the bending gap for the adhesive sheet and the gas flow passage is partially formed between the surface and the surface.

なお、包囲壁に区画されたトレイ本体の表面と粘着シートの裏面の少なくともいずれか一方に非粘着処理を施すことができる。
また、小物品を、一辺が２ｍｍ未満の平面略四角形の微細デバイスとすることができる。
また、粘着シートを略２〜２０％延伸してその表面周縁部に抑えフレームを第一の粘着材により粘着することができる。 In addition, a non-adhesion process can be performed on at least one of the front surface of the tray main body and the back surface of the adhesive sheet partitioned by the surrounding wall.
Further, the small article can be a fine device having a substantially rectangular plane with a side of less than 2 mm.
Further, the pressure-sensitive adhesive sheet can be stretched by about 2 to 20%, and the frame can be adhered to the peripheral edge portion of the surface by the first pressure-sensitive adhesive material.

また、本発明においては上記課題を解決するため、請求項１、２、又は３に記載した粘着搬送トレイの製造方法であって、
粘着シートの表面と抑えフレームとを第一の粘着材により粘着し、抑えフレームの外周縁部に沿って粘着シートを切断することにより、抑えフレームの外周縁部から外方向に食み出た粘着シートの余剰部を除去し、粘着シートの裏面周縁部に第二の粘着材を粘着し、
トレイ本体の包囲壁内に粘着シートを遊嵌して包囲壁に区画されたトレイ本体の表面に第二の粘着材を粘着するとともに、包囲壁の内周面と粘着シート、抑えフレーム、及び第一、第二の粘着材との間に気体流通路を形成し、第二の粘着材により、包囲壁に区画されたトレイ本体の表面と粘着シートとの間に粘着シート用の撓み隙間を区画形成し、包囲壁に区画されたトレイ本体の表面と第二の粘着材の粘着面との間に、気体流通路と粘着シート用の撓み隙間とを連通する非粘着領域を部分的に形成することを特徴としている。 Further, in the present invention, in order to solve the above-mentioned problem, it is a method for manufacturing an adhesive transport tray according to claim 1, 2, or 3,
Adhesion sticking out from the outer peripheral edge of the restraining frame by sticking the surface of the adhesive sheet and the restraining frame with the first adhesive material and cutting the adhesive sheet along the outer peripheral edge of the restraining frame Remove the excess part of the sheet, adhere the second adhesive material to the back surface peripheral edge of the adhesive sheet,
The adhesive sheet is loosely fitted in the surrounding wall of the tray body to adhere the second adhesive material to the surface of the tray body partitioned by the surrounding wall, and the inner peripheral surface of the surrounding wall, the adhesive sheet, the holding frame, and the first A gas flow path is formed between the first and second adhesive materials, and the second adhesive material defines a flexible gap for the adhesive sheet between the surface of the tray body defined on the surrounding wall and the adhesive sheet. A non-adhesive region is formed between the surface of the tray body that is formed and defined by the surrounding wall and the adhesive surface of the second adhesive material, and communicates the gas flow path and the flexible gap for the adhesive sheet. It is characterized by that.

ここで、特許請求の範囲におけるトレイ本体や粘着シートは、平面矩形、多角形、円形、楕円形等に形成することができ、透明、不透明、半透明を特に問うものではない。包囲壁は、平面枠形やリング形等に形成することができる。また、小物品には、少なくとも一辺が２ｍｍ未満の平面略正方形等の微細デバイス（例えば、セラミックコンデンサ、サーミスタ、ＭＥＭＳ、フォトダイオード、フォトトランジスタ、薄チップ等）が単数複数含まれる。第一、第二の粘着材は、包囲壁の形状に応じた形に適宜形成することができる。 Here, the tray main body and the pressure-sensitive adhesive sheet in the claims can be formed into a plane rectangle, a polygon, a circle, an ellipse or the like, and are not particularly limited to transparency, opaqueness, and translucency. The surrounding wall can be formed in a flat frame shape, a ring shape, or the like. In addition, the small article includes a plurality of fine devices (for example, a ceramic capacitor, a thermistor, a MEMS, a photodiode, a phototransistor, a thin chip, etc.) such as a substantially square plane with a side of less than 2 mm. The first and second adhesive materials can be appropriately formed in a shape corresponding to the shape of the surrounding wall.

本発明によれば、小物品を保管したり、搬送する場合には、粘着シートに小物品を押圧して粘着保持させれば、小物品を保管したり、搬送することができる。この際、粘着シートが凹凸の少ない平坦なので、小物品の保持面積を広く確保することができる。また、真空防止孔の開口に粘着シートが接触して部分的に変形することがないので、粘着シートに小物品を適切な姿勢で粘着保持させることができる。 According to the present invention, when a small article is stored or transported, the small article can be stored or transported by pressing the small article against the pressure-sensitive adhesive sheet to hold it in an adhesive state. At this time, since the pressure-sensitive adhesive sheet is flat with little unevenness, a large holding area for small articles can be secured. In addition, since the pressure-sensitive adhesive sheet does not come into contact with the opening of the vacuum prevention hole and is not partially deformed, the small article can be held on the pressure-sensitive adhesive sheet in an appropriate posture.

これに対し、粘着シートから小物品を剥がす場合には、粘着シートを撓ませれば、粘着シートと小物品との接触面積が減少するので、粘着シートから小物品を剥離することができる。この際、空気等の気体は、気体流通路から非粘着領域を経由して撓み隙間に流入し、粘着シートを円滑に変形させる。 On the other hand, when peeling a small article from an adhesive sheet, if the adhesive sheet is bent, the contact area between the adhesive sheet and the small article is reduced, so that the small article can be peeled from the adhesive sheet. At this time, a gas such as air flows into the bending gap from the gas flow path via the non-adhesive region and smoothly deforms the adhesive sheet.

本発明によれば、一辺が２ｍｍ以上の小物品の他、例え一辺が２ｍｍ未満の小物品でも、粘着シートに適切に粘着保持させることができるという効果がある。また、トレイ表面と粘着シート間の撓み隙間を外部と連通させ、気体を流通させるので、粘着シートの部分的な変形を防ぎ、粘着シートを繰り返し使用することができる。 According to the present invention, there is an effect that, in addition to a small article having a side of 2 mm or more, even a small article having a side of less than 2 mm can be appropriately adhered and held on the adhesive sheet. Moreover, since the bending clearance between the tray surface and the pressure-sensitive adhesive sheet is communicated with the outside and gas is circulated, partial deformation of the pressure-sensitive adhesive sheet can be prevented and the pressure-sensitive adhesive sheet can be used repeatedly.

請求項２記載の発明によれば、包囲壁に区画されたトレイ本体の表面と粘着シートとが粘着して張り付き、粘着シートの変形に支障を来すのを防ぐことができる。
請求項３記載の発明によれば、例え小物品が一辺２ｍｍ未満の微細デバイスでも、粘着シートに適切に粘着保持させ、脱落や紛失を防止することが可能になる。 According to the second aspect of the present invention, it is possible to prevent the surface of the tray main body partitioned by the surrounding wall and the adhesive sheet from sticking to each other and hindering deformation of the adhesive sheet.
According to invention of Claim 3, even if it is a micro device with a small article having a side of less than 2 mm, it can be appropriately adhered and held on the adhesive sheet, and can be prevented from falling off or being lost.

本発明に係る粘着搬送トレイの実施形態を模式的に示す平面説明図である。It is a plane explanatory view showing typically an embodiment of an adhesion conveyance tray concerning the present invention. 本発明に係る粘着搬送トレイの実施形態を模式的に示す一部断面説明図である。It is a partial cross section explanatory view showing typically an embodiment of an adhesion conveyance tray concerning the present invention. 本発明に係る粘着搬送トレイの実施形態を模式的に示す裏面図である。It is a reverse view which shows typically embodiment of the adhesion conveyance tray which concerns on this invention.

以下、図面を参照して本発明の好ましい実施の形態を説明すると、本実施形態における粘着搬送トレイは、図１ないし図３に示すように、剛性を有するトレイ本体１と、このトレイ本体１に取り付けられて一辺が２ｍｍ未満の微細デバイス２０を保持する可撓性の粘着シート１０とを備え、外部の空気を気体流通路１４から非粘着領域１５を介して粘着シート１０用の撓み隙間１３に流入させ、粘着シート１０を上下方向に簡単に変形させるようにしている。 Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 3, the adhesive transport tray in the present embodiment includes a rigid tray body 1 and the tray body 1. And a flexible pressure-sensitive adhesive sheet 10 that holds the fine device 20 having a side of less than 2 mm, and external air is passed from the gas flow path 14 to the bending gap 13 for the pressure-sensitive adhesive sheet 10 through the non-adhesive region 15. The pressure-sensitive adhesive sheet 10 is easily deformed in the vertical direction.

トレイ本体１は、図１ないし図３に示すように、所定の樹脂を含有する成形材料により平面略矩形の板に射出成形され、その平坦な表面２の周縁部寄りに、粘着シート１０を僅かな隙間を介して包囲遊嵌する平面枠形の包囲壁３が一体的に立設されており、この包囲壁３が断面略倒Ｚ字形に屈曲形成されてその略下半分が幅方向外側に突出する。 As shown in FIGS. 1 to 3, the tray main body 1 is injection-molded into a substantially rectangular plate by a molding material containing a predetermined resin, and a pressure-sensitive adhesive sheet 10 is slightly placed near the periphery of the flat surface 2. A flat frame-shaped surrounding wall 3 that surrounds and fits through a gap is integrally provided, and the surrounding wall 3 is formed to be bent in a substantially inverted Z-shape in cross section, with its substantially lower half outward in the width direction. Protruding.

トレイ本体１用の樹脂としては、剛性が確保できるのであれば、特に限定されるものではないが、例えばＡＢＳ、ＡＡＳ、アクリル系樹脂、ポリカーボネート等が使用される。剛性の他、耐熱性が要求される場合には、スーパーエンジニアリングプラスチック（例えば、ＰＥＳ、ＰＥＩ、ＰＰＳ、ＰＡＲ等）が使用される。また、トレイ本体１用の成形材料には、導電性カーボンやイオン伝導性材料等の帯電防止剤が必要に応じて配合される。 The resin for the tray body 1 is not particularly limited as long as rigidity can be ensured. For example, ABS, AAS, acrylic resin, polycarbonate, or the like is used. When heat resistance is required in addition to rigidity, super engineering plastics (for example, PES, PEI, PPS, PAR, etc.) are used. Further, the molding material for the tray body 1 is blended with an antistatic agent such as conductive carbon or ion conductive material as necessary.

トレイ本体１の表面２は、図２に示すように、包囲壁３の広い内部では高く、包囲壁３の狭い外部では内部よりも低く形成されており、包囲壁３の内部が浅底とされる。この包囲壁３に区画されたトレイ本体１の表面２は、粘着シート１０の裏面が粘着して張り付かないよう、シボ加工、マット加工、エンボス加工等の非粘着処理が適宜施される。この非粘着処理がシボ加工の場合、シボ加工は、例えばトレイ本体１を成形する金型の成形面をエッチングして化学処理したり、鏡面仕上げにしない研磨処理等により形成される。また、エンボス加工の場合、トレイ本体１を成形する金型の成形面に、丸や楕円形状等を施すことにより形成される。 As shown in FIG. 2, the surface 2 of the tray body 1 is formed so as to be high inside the surrounding wall 3 and lower than the inside in the narrow outside of the surrounding wall 3, and the inside of the surrounding wall 3 is a shallow bottom. The The front surface 2 of the tray main body 1 partitioned by the surrounding wall 3 is appropriately subjected to non-adhesion processing such as embossing, mat processing, embossing and the like so that the back surface of the adhesive sheet 10 does not adhere and stick. When this non-adhesion process is a texturing process, the texturing process is formed by, for example, etching and chemically processing a molding surface of a mold for molding the tray body 1, or a polishing process that does not have a mirror finish. Moreover, in the case of embossing, it forms by giving a round, an ellipse shape, etc. to the molding surface of the metal mold | die which shape | molds the tray main body 1. FIG.

トレイ本体１の四隅部のうち、少なくとも一隅部には図１や図３に示すように、位置決めや位置合わせ用の切り欠き４が選択的に斜めに形成される。また、トレイ本体１の裏面には図２や図３に示すように、平面枠形の包囲壁３により、スタック用の凹み穴５が平面矩形に区画形成され、この凹み穴５に他の粘着搬送トレイの包囲壁３の上部が嵌入して積層される。トレイ本体１の裏面四隅部のうち、少なくとも一隅部には、図示しない任意の位置合わせ穴が穿孔される。 As shown in FIG. 1 and FIG. 3, notches 4 for positioning and alignment are selectively formed obliquely at least at one corner among the four corners of the tray body 1. Further, as shown in FIG. 2 and FIG. 3, a concave hole 5 for stacking is formed in a flat rectangular shape on the back surface of the tray main body 1 by a flat frame-shaped surrounding wall 3. The upper part of the surrounding wall 3 of the transport tray is fitted and stacked. Of the four corners on the back surface of the tray body 1, at least one corner is drilled with an arbitrary alignment hole (not shown).

粘着シート１０は、図１や図２に示すように、複数の微細デバイス２０を搭載可能な平面略矩形の樹脂フィルムからなり、その表面の周縁部には、包囲壁３内に僅かな隙間を介して遊嵌される抑えフレーム１１が第一の両面粘着テープ１２により粘着される。粘着シート１０の樹脂フィルムは、非シリコーンで粘着性が確保でき、弾性変形可能なフィルムが好適である。この樹脂フィルムとしては、例えばアクリルゲルやウレタンゲル、又はエチレン‐アクリル酸エステルコポリマーからなるエラストマー、ポリプロピレンにゴムが分散したエラストマー等、いわゆるポリオレフィン系エラストマーからなる薄膜フィルムが用いられる。 As shown in FIGS. 1 and 2, the pressure-sensitive adhesive sheet 10 is made of a substantially rectangular resin film on which a plurality of fine devices 20 can be mounted, and a slight gap is formed in the surrounding wall 3 at the periphery of the surface. The holding frame 11 that is loosely fitted through the adhesive is adhered by the first double-sided adhesive tape 12. The resin film of the pressure-sensitive adhesive sheet 10 is preferably a non-silicone film that can ensure adhesiveness and is elastically deformable. As this resin film, for example, a thin film made of a so-called polyolefin-based elastomer such as an elastomer made of acrylic gel, urethane gel or ethylene-acrylic acid ester copolymer, an elastomer in which rubber is dispersed in polypropylene, or the like is used.

粘着シート１０は、微細デバイス２０の粘着保持、生産性や変形性を容易にする観点から、厚さ２０〜２００μｍ、引張り破断強度がＪＩＳＫ７１２７下で５ＭＰａ以上、好ましくは９ＭＰａ以上、引張り破断伸びがＪＩＳＫ７１２７下で５００％以上、好ましくは６００％以上、常温の曲げ弾性率がＪＩＳＫ７１７１下で１０〜２３０ＭＰａの範囲に調整されることが好ましい。 The pressure-sensitive adhesive sheet 10 has a thickness of 20 to 200 μm and a tensile breaking strength of 5 MPa or more, preferably 9 MPa or more and a tensile breaking elongation under JIS K 7127, from the viewpoint of facilitating the adhesion holding, productivity and deformability of the microdevice 20. However, it is preferable that the bending elastic modulus at normal temperature is adjusted to a range of 10 to 230 MPa under JIS K 7171.

粘着シート１０は、微細デバイス２０の脱落防止の観点から、抑えフレーム１１に略２〜２０％延伸された状態で粘着固定されることが好ましい。これは、２％未満の延伸の場合には、粘着シート１０が弛むことにより、粘着シート１０の周縁部と微細デバイス２０との形成する角度が大きくなり、微細デバイス２０から粘着シート１０が剥離される方向の力が作用しやすくなるので、好ましくないからである。逆に、粘着シート１０が２０％を越えて延伸される場合には、粘着シート１０が切れ易くなるからである。 From the viewpoint of preventing the fine device 20 from falling off, the pressure-sensitive adhesive sheet 10 is preferably adhesively fixed to the holding frame 11 while being stretched by about 2 to 20%. This is because in the case of stretching less than 2%, the pressure-sensitive adhesive sheet 10 is loosened, so that the angle formed between the peripheral portion of the pressure-sensitive adhesive sheet 10 and the fine device 20 is increased, and the pressure-sensitive adhesive sheet 10 is peeled off from the fine device 20. This is because a force in a certain direction is likely to act, which is not preferable. Conversely, when the pressure-sensitive adhesive sheet 10 is stretched over 20%, the pressure-sensitive adhesive sheet 10 is easily cut.

抑えフレーム１１は、図１や図２に示すように、所定の樹脂を含有する成形材料により平面枠形の断面矩形に形成され、包囲壁３の幅と同じ幅、又はより広い幅に調整されており、好ましくはトレイ本体１の表面２の面積に応じて０．５〜１０ｍｍの範囲に調整される。この抑えフレーム１１は、包囲壁３の上面と同じ高さ、又はより低位に位置する。 As shown in FIGS. 1 and 2, the holding frame 11 is formed into a plane frame-shaped cross-sectional rectangle by a molding material containing a predetermined resin, and is adjusted to the same width as the width of the surrounding wall 3 or a wider width. Preferably, it is adjusted to a range of 0.5 to 10 mm according to the area of the surface 2 of the tray body 1. The holding frame 11 is located at the same height as the upper surface of the surrounding wall 3 or at a lower position.

抑えフレーム１１用の樹脂としては、剛性が確保できるのであれば、特に限定されるものではないが、例えばＡＢＳ、ＡＡＳ、アクリル系樹脂、ポリカーボネート等が使用される。剛性の他、耐熱性が要求される場合には、スーパーエンジニアリングプラスチック（例えば、ＰＥＳ、ＰＥＩ、ＰＰＳ、ＰＡＲ等）が用いられる。抑えフレーム１１用の成形材料には、導電性カーボンやイオン伝導性材料等の帯電防止剤が必要に応じて配合される。 The resin for the restraining frame 11 is not particularly limited as long as rigidity can be ensured. For example, ABS, AAS, acrylic resin, polycarbonate, or the like is used. When heat resistance is required in addition to rigidity, super engineering plastics (for example, PES, PEI, PPS, PAR, etc.) are used. The molding material for the restraining frame 11 is blended with an antistatic agent such as conductive carbon or ion conductive material as necessary.

第一の両面粘着テープ１２としては、例えば耐久性に優れる厚さ２０〜２００μｍのアクリル系両面粘着テープ等が使用される。この第一の両面粘着テープ１２は、抑えフレーム１１に対応するよう、平面枠形の断面矩形に形成される。第一の両面粘着テープ１２は、予め平面枠形に形成されたタイプでも良いし、枠形に組み合わされる複数の両面粘着テープでも良い。 As the first double-sided pressure-sensitive adhesive tape 12, for example, an acrylic double-sided pressure-sensitive adhesive tape having a thickness of 20 to 200 μm excellent in durability is used. The first double-sided pressure-sensitive adhesive tape 12 is formed in a plane frame-shaped cross-sectional rectangle so as to correspond to the holding frame 11. The first double-sided pressure-sensitive adhesive tape 12 may be of a type formed in a flat frame shape in advance, or may be a plurality of double-sided pressure-sensitive adhesive tapes combined in a frame shape.

粘着シート１０の裏面の周縁部には図２に示すように、包囲壁３に区画されたトレイ本体表面２に粘着する第二の両面粘着テープ１２Ａが粘着され、この第二の両面粘着テープ１２Ａの厚みにより、包囲壁３に区画されたトレイ本体１の平坦な表面２と粘着シート１０の裏面との間に、粘着シート１０を上下方向に変形させる薄い撓み隙間１３が区画形成される。 As shown in FIG. 2, a second double-sided pressure-sensitive adhesive tape 12 </ b> A that adheres to the tray body surface 2 partitioned by the surrounding wall 3 is adhered to the peripheral edge of the back surface of the pressure-sensitive adhesive sheet 10. Depending on the thickness, a thin bending gap 13 is formed between the flat surface 2 of the tray body 1 partitioned by the surrounding wall 3 and the back surface of the adhesive sheet 10 to deform the adhesive sheet 10 in the vertical direction.

第二の両面粘着テープ１２Ａは、第一の両面粘着テープ１２同様、アクリル系の両面粘着テープ等が使用され、平面枠形の断面矩形に形成されて抑えフレーム１１や第一の両面粘着テープ１２に反対側から対向する。この第二の両面粘着テープ１２Ａも、予め平面枠形に形成されたタイプでも良いし、枠形に組み合わされる複数の両面粘着テープでも良い。 Similar to the first double-sided pressure-sensitive adhesive tape 12, the second double-sided pressure-sensitive adhesive tape 12 is an acrylic double-sided pressure-sensitive adhesive tape or the like, which is formed into a flat frame-shaped cross-sectional rectangle and has a restraining frame 11 or the first double-sided pressure-sensitive adhesive tape 12. Opposite to the opposite side. The second double-sided pressure-sensitive adhesive tape 12A may also be a type formed in a flat frame shape in advance, or a plurality of double-sided pressure-sensitive adhesive tapes combined in a frame shape.

このようなトレイ本体１の包囲壁３内周面と粘着シート１０、抑えフレーム１１、及び第一、第二の両面粘着テープ１２・１２Ａとの間には、図１や図２に示すように、矢印で示す空気を流通させる狭い気体流通路１４が区画形成され、包囲壁３に区画されたトレイ本体１の表面２と第二の両面粘着テープ１２Ａの粘着面との間には、粘着シート１０用の撓み隙間１３と気体流通路１４とを連通する非粘着領域１５が部分的に形成される。この非粘着領域１５は、図１に示すように、平面視で例えば第二の両面粘着テープ１２Ａの一辺部中央、側部、一隅部等に形成される。 As shown in FIGS. 1 and 2 between the inner peripheral surface of the surrounding wall 3 of the tray main body 1 and the adhesive sheet 10, the holding frame 11, and the first and second double-sided adhesive tapes 12 and 12A. A narrow gas flow passage 14 for circulating air indicated by an arrow is defined, and an adhesive sheet is provided between the surface 2 of the tray main body 1 partitioned by the surrounding wall 3 and the adhesive surface of the second double-sided adhesive tape 12A. The non-adhesive area | region 15 which connects the bending gap 13 for 10 and the gas flow path 14 is partially formed. As shown in FIG. 1, the non-adhesive region 15 is formed, for example, at the center, side, or corner of one side of the second double-sided adhesive tape 12 </ b> A in plan view.

非粘着領域１５は、例えば（１）包囲壁３に区画されたトレイ本体１の表面周縁部に窪みを部分的に切り欠く、（２）第二の両面粘着テープ１２Ａの粘着面に非粘着処理を部分的に施す、（３）第二の両面粘着テープ１２Ａの粘着面の粘着度を部分的に低下させる、（４）第二の両面粘着テープ１２Ａを平面視で溝形やリップ溝形等に屈曲形成することで形成される。 The non-adhesive region 15 is, for example, (1) a notch is partially cut out at the peripheral edge of the surface of the tray body 1 partitioned by the surrounding wall 3, and (2) non-adhesive treatment is performed on the adhesive surface of the second double-sided adhesive tape 12A. (3) Partially lowering the adhesiveness of the adhesive surface of the second double-sided adhesive tape 12A, (4) Groove shape, lip groove shape, etc. in the plan view of the second double-sided adhesive tape 12A It is formed by forming a bend.

微細デバイス２０は、図１に示すように、２ｍｍ角未満、好ましくは１ｍｍ角未満の大きさを有する平面略四角形のデバイス、例えばセラミックコンデンサ、サーミスタ、ＭＥＭＳ等からなり、粘着シート１０の表面に着脱自在に粘着保持される。 As shown in FIG. 1, the micro device 20 is a substantially square device having a size of less than 2 mm square, preferably less than 1 mm square, such as a ceramic capacitor, thermistor, MEMS, etc., and is attached to and detached from the surface of the adhesive sheet 10. Adhesion is held freely.

上記において、粘着搬送トレイを製造する場合には、先ず、幅広の粘着シート１０を用意し、この粘着シート１０を略２〜２０％程度延伸してその表面と枠形の抑えフレーム１１とを第一の両面粘着テープ１２を介して粘着し、抑えフレーム１１の外周縁部に沿って粘着シート１０を切断することにより、抑えフレーム１１の外周縁部から外方向に食み出た粘着シート１０の余剰部を除去し、粘着シート１０の大きさや形をトレイ本体１用に整える。 In the above, when manufacturing an adhesive conveyance tray, first, a wide adhesive sheet 10 is prepared, the adhesive sheet 10 is stretched by about 2 to 20%, and the surface and the frame-shaped restraining frame 11 are formed first. The pressure-sensitive adhesive sheet 10 sticks through the double-sided pressure-sensitive adhesive tape 12 and cuts the pressure-sensitive adhesive sheet 10 along the outer peripheral edge portion of the holding frame 11 so that the pressure-sensitive adhesive sheet 10 protrudes outward from the outer peripheral edge portion of the holding frame 11. The surplus portion is removed, and the size and shape of the pressure-sensitive adhesive sheet 10 are adjusted for the tray body 1.

この際、抑えフレーム１１と第一の両面粘着テープ１２とを粘着した後、この第一の両面粘着テープ１２に粘着シート１０を延伸して粘着することが好ましい。粘着シート１０を整えたら、粘着シート１０の裏面周縁部に、抑えフレーム１１や第一の両面粘着テープ１２に反対側から対向する第二の両面粘着テープ１２Ａをエンドレスに粘着する。 At this time, it is preferable that the pressure-sensitive adhesive sheet 10 is stretched and adhered to the first double-sided adhesive tape 12 after the restraining frame 11 and the first double-sided adhesive tape 12 are adhered. When the pressure-sensitive adhesive sheet 10 is prepared, the second double-sided pressure-sensitive adhesive tape 12 </ b> A facing the holding frame 11 and the first double-sided pressure-sensitive adhesive tape 12 from the opposite side is adhered endlessly to the peripheral edge of the back surface of the pressure-sensitive adhesive sheet 10.

次いで、予め成形しておいたトレイ本体１の包囲壁３内に粘着シート１０を第二の両面粘着テープ１２Ａが下向きになるよう遊嵌し、この粘着シート１０を包囲壁３に区画されたトレイ本体１の表面２に第二の両面粘着テープ１２Ａを介して粘着固定する。 Next, the pressure-sensitive adhesive sheet 10 is loosely fitted in the surrounding wall 3 of the tray body 1 that has been molded in advance so that the second double-sided pressure-sensitive adhesive tape 12A faces downward. It is adhesively fixed to the surface 2 of the main body 1 via a second double-sided adhesive tape 12A.

この際、包囲壁３の内周面と粘着シート１０、抑えフレーム１１、及び第一、第二の両面粘着テープ１２・１２Ａとの間に気体流通路１４を区画形成し、第二の両面粘着テープ１２Ａにより、包囲壁３に区画されたトレイ本体１の表面２と粘着シート１０の裏面との間に粘着シート１０用の撓み隙間１３を区画形成し、包囲壁３に区画されたトレイ本体１の表面２と第二の両面粘着テープ１２Ａの粘着面との間に、気体流通路１４と粘着シート１０用の撓み隙間１３とを連通する非粘着領域１５を部分的に形成すれば、粘着搬送トレイを製造することができる。 At this time, a gas flow passage 14 is defined between the inner peripheral surface of the surrounding wall 3 and the pressure-sensitive adhesive sheet 10, the holding frame 11, and the first and second double-sided pressure-sensitive adhesive tapes 12 and 12 </ b> A. By the tape 12A, a bending gap 13 for the pressure-sensitive adhesive sheet 10 is defined between the front surface 2 of the tray main body 1 partitioned by the surrounding wall 3 and the back surface of the pressure-sensitive adhesive sheet 10, and the tray main body 1 partitioned by the surrounding wall 3 is formed. If a non-adhesive region 15 that communicates the gas flow path 14 and the bending gap 13 for the adhesive sheet 10 is partially formed between the surface 2 of the adhesive and the adhesive surface of the second double-sided adhesive tape 12A, the adhesive conveyance A tray can be manufactured.

上記構成において、微細デバイス２０を搬送する場合には、粘着シート１０の平坦な表面に複数の微細デバイス２０を圧接して粘着保持させ、その後、粘着搬送トレイの包囲壁３の開口を保護フィルムや無塵性の層間フィルムで被覆したり、あるいは粘着搬送トレイの包囲壁３と他の粘着搬送トレイの凹み穴５とを嵌合して微細デバイス２０を保護すれば、複数の微細デバイス２０を搬送することができる。トレイ本体１裏面の凹み穴５は粘着搬送トレイの包囲壁３と嵌合することができるので、トレイ本体１を粘着搬送トレイの開口部を被覆する蓋として単独で使用することができる。 In the above configuration, when the micro device 20 is transported, the micro device 20 is pressed and held on the flat surface of the pressure-sensitive adhesive sheet 10, and then the opening of the surrounding wall 3 of the pressure-sensitive transport tray is protected with a protective film or A plurality of fine devices 20 can be transported by covering them with a dust-free interlayer film or by fitting the surrounding wall 3 of the adhesive transport tray and the recessed hole 5 of another adhesive transport tray to protect the micro devices 20. can do. Since the recessed hole 5 on the back surface of the tray main body 1 can be fitted to the surrounding wall 3 of the adhesive conveyance tray, the tray main body 1 can be used alone as a lid that covers the opening of the adhesive conveyance tray.

微細デバイス２０を圧接する際、粘着シート１０が凹凸のない平坦な平面なので、微細デバイス２０の保持面積を最大限に確保することができる。また、トレイ本体１に真空防止孔が存在せず、真空防止孔の開口に粘着シート１０が圧接して一部変形することがないので、粘着シート１０に微細デバイス２０を適切な姿勢で粘着保持させたり、粘着シート１０が部分的に変形するのを防止することができる。 When the fine device 20 is pressed, the pressure-sensitive adhesive sheet 10 is a flat flat surface having no irregularities, so that the holding area of the fine device 20 can be ensured to the maximum. Further, since the tray body 1 has no vacuum prevention hole and the adhesive sheet 10 is not pressed and partially deformed against the opening of the vacuum prevention hole, the fine device 20 is adhered to the adhesive sheet 10 in an appropriate posture. It is possible to prevent the adhesive sheet 10 from being partially deformed.

これに対し、粘着シート１０から微細デバイス２０を剥離して使用する場合には、例えば微細デバイス２０の表面に吸着具を押し当ててバキュームし、粘着シート１０を撓ませれば、粘着シート１０と微細デバイス２０との接触面積が減少するので、粘着シート１０の表面から微細デバイス２０を剥離することができる。この際、外部の空気は、気体流通路１４から非粘着領域１５を経由して撓み隙間１３に流入（図２の矢印参照）し、撓み隙間１３が真空になるのを防いで粘着シート１０を上下方向に円滑に変形させる。 On the other hand, when the fine device 20 is peeled off from the pressure-sensitive adhesive sheet 10 and used, for example, the suction device is pressed against the surface of the fine device 20 to vacuum and the pressure-sensitive adhesive sheet 10 is bent. Since the contact area with the fine device 20 decreases, the fine device 20 can be peeled from the surface of the pressure-sensitive adhesive sheet 10. At this time, external air flows from the gas flow passage 14 into the bending gap 13 via the non-adhesive region 15 (see the arrow in FIG. 2), and prevents the bending gap 13 from being evacuated. Smoothly deform in the vertical direction.

上記構成によれば、トレイ本体１に真空防止孔を穿孔する作業を省略し、トレイ本体１の構成を簡素化するので、粘着搬送トレイの製造作業が複雑化したり、煩雑化するのを防止することができる。また、真空防止孔の省略により、粘着シート１０に１ｍｍ角未満の微細デバイス２０を適切な姿勢で粘着保持させたり、粘着シート１０が部分的に変形したり、繰り返しの使用が困難になるのを防止することができる。また、撓み隙間１３と気体流通路１４とが非粘着領域１５により連通し、これらに空気が流通するので、粘着シート１０を容易に変形させたり、繰り返しの使用が期待できる。 According to the above configuration, the work of punching the vacuum preventing hole in the tray body 1 is omitted, and the structure of the tray body 1 is simplified, so that the manufacturing work of the adhesive transport tray is prevented from being complicated or complicated. be able to. In addition, by omitting the vacuum prevention hole, it is possible to cause the pressure-sensitive adhesive sheet 10 to hold the fine device 20 of less than 1 mm square in an appropriate posture, or the pressure-sensitive adhesive sheet 10 is partially deformed, and it is difficult to repeatedly use it. Can be prevented. Moreover, since the bending gap 13 and the gas flow passage 14 communicate with each other through the non-adhesive region 15 and air flows therethrough, the adhesive sheet 10 can be easily deformed or repeatedly used.

また、包囲壁３に区画されたトレイ本体１の表面２に非粘着処理が施されるので、包囲壁３に区画されたトレイ本体１の表面２に粘着シート１０の大部分が密着して張り付き、粘着シート１０の変形に支障を来すのを有効に防ぐことが可能になる。また、トレイ本体１が剛性を有し、ハンドリングに支障を来すことがないので、微細デバイス２０を傷付ける危険性がなく、搬送時や出荷時の作業効率を大幅に向上させることが可能になる。 In addition, since the surface 2 of the tray main body 1 partitioned by the surrounding wall 3 is subjected to non-adhesion treatment, most of the adhesive sheet 10 adheres to and adheres to the surface 2 of the tray main body 1 partitioned by the surrounding wall 3. It is possible to effectively prevent the deformation of the pressure-sensitive adhesive sheet 10 from being hindered. In addition, since the tray body 1 has rigidity and does not interfere with handling, there is no risk of damaging the fine device 20, and the work efficiency at the time of transportation and shipment can be greatly improved. .

また、抑えフレーム１１に粘着シート１０が略２〜２０％延伸された状態で粘着固定されるので、例えトレイ本体１が上下逆に反転されても、粘着シート１０が下方に弓なりに撓むことがない。さらに、粘着シート１０が非シリコーンの樹脂フィルムなので、微細デバイス２０に低分子シロキサンが移行することがなく、微細デバイス２０の汚染を排除することができる。 Further, since the adhesive sheet 10 is adhesively fixed to the holding frame 11 in a state of being stretched by about 2 to 20%, even if the tray body 1 is inverted upside down, the adhesive sheet 10 bends downward in a bow shape. There is no. Furthermore, since the pressure-sensitive adhesive sheet 10 is a non-silicone resin film, low molecular siloxane does not migrate to the fine device 20, and contamination of the fine device 20 can be eliminated.

なお、上記実施形態のトレイ本体１と粘着シート１０とに透明性を付与する場合、可視光線透過率は、微細デバイス２０の目視検査が容易になるのであれば、特に限定されるものではないが、少なくとも７０％以上、好ましくは８０％以上、より好ましくは８５％以上、さらに好ましくは８８％以上が良い。また、トレイ本体１の周縁部に、位置決めや位置合わせ用の切り欠きを平面略半円形に必要数形成し、隅部の切り欠き４を省略しても良い。また、粘着シート１０に２ｍｍ角以上の大きさの半導体チップや回路素子等を粘着保持させても良い。 In addition, when providing transparency to the tray main body 1 and the adhesive sheet 10 of the above embodiment, the visible light transmittance is not particularly limited as long as the visual inspection of the fine device 20 becomes easy. , At least 70% or more, preferably 80% or more, more preferably 85% or more, and still more preferably 88% or more. Further, the necessary number of notches for positioning and alignment may be formed in a substantially semicircular shape on the peripheral edge of the tray body 1 and the notches 4 at the corners may be omitted. Further, a semiconductor chip or a circuit element having a size of 2 mm square or more may be adhered and held on the adhesive sheet 10.

また、特に支障を来さなければ、包囲壁３に区画されたトレイ本体表面２に対向する粘着シート１０の裏面に非粘着処理を施しても良いし、包囲壁３に区画されたトレイ本体表面２と粘着シート１０の裏面とに非粘着処理をそれぞれ施しても良い。また、抑えフレーム１１と第一、第二の両面粘着テープ１２・１２Ａとは、透明でも良いが、不透明や半透明にすることも可能である。さらに、第一、第二の両面粘着テープ１２・１２Ａの代わりに各種の粘着剤を使用することが可能である。 In addition, if there is no particular problem, the back surface of the pressure-sensitive adhesive sheet 10 facing the tray body surface 2 partitioned by the surrounding wall 3 may be subjected to non-sticking treatment, or the tray body surface partitioned by the surrounding wall 3 2 and the back surface of the pressure-sensitive adhesive sheet 10 may be subjected to non-adhesive treatment, respectively. The holding frame 11 and the first and second double-sided pressure-sensitive adhesive tapes 12 and 12A may be transparent, but may be opaque or translucent. Furthermore, various adhesives can be used in place of the first and second double-sided adhesive tapes 12 and 12A.

本発明に係る粘着搬送トレイ及びその製造方法は、例えば音楽機器、光学機器、情報機器、精密機器、半導体の製造分野等で使用される。 The adhesive conveyance tray and the manufacturing method thereof according to the present invention are used in, for example, music equipment, optical equipment, information equipment, precision equipment, semiconductor manufacturing fields, and the like.

１トレイ本体
２表面
３包囲壁
５凹み穴
１０粘着シート
１１抑えフレーム
１２第一の両面粘着テープ（第一の粘着材）
１２Ａ第二の両面粘着テープ（第二の粘着材）
１３撓み隙間
１４気体流通路
１５非粘着領域
２０微細デバイス（小物品） DESCRIPTION OF SYMBOLS 1 Tray body 2 Surface 3 Surrounding wall 5 Recess hole 10 Adhesive sheet 11 Holding frame 12 First double-sided adhesive tape (first adhesive material)
12A Second double-sided adhesive tape (second adhesive)
13 Deflection gap 14 Gas flow passage 15 Non-adhesive region 20 Fine device (small article)

Claims

An adhesive transport tray provided with a rigid tray body and a flexible adhesive sheet attached to the tray body and detachably holding a small article,
On the surface of the tray body, an enclosure wall that surrounds the adhesive sheet and loosely fits is erected, and by this enclosure wall, a recess hole for stacking is formed on the back surface of the tray body,
The adhesive sheet is made of non-silicone, and the endless restraining frame loosely fitted to the surrounding wall is adhered to the peripheral portion of the surface by the first adhesive material, and the tray partitioned by the surrounding wall is provided on the rear peripheral portion of the adhesive sheet. A second adhesive material that adheres to the surface of the main body is adhered, and by this second adhesive material, a flexible gap for the adhesive sheet is formed between the surface of the tray main body partitioned by the surrounding wall and the adhesive sheet. ,
A gas flow path is formed between the surrounding wall of the tray main body and the adhesive sheet, the holding frame, and the first and second adhesive materials, and the surface of the tray main body partitioned by the surrounding wall and the second adhesive material is adhered. A pressure-sensitive adhesive transport tray in which a non-adhesive region that communicates a bending gap for a pressure-sensitive adhesive sheet and a gas flow passage is partially formed between the surface and the surface.

The pressure-sensitive adhesive transport tray according to claim 1, wherein at least one of the front surface of the tray main body and the back surface of the pressure-sensitive adhesive sheet partitioned by the surrounding wall is subjected to non-adhesive treatment.

The pressure-sensitive adhesive transport tray according to claim 1 or 2, wherein the small article is a fine device having a substantially rectangular plane with a side of less than 2 mm.

It is a manufacturing method of the adhesive conveyance tray of Claim 1, 2, or 3, Comprising: The surface of an adhesive sheet and the control frame are adhere | attached with a 1st adhesive material, and an adhesive sheet is along the outer periphery part of the control frame. By removing the excess part of the adhesive sheet that protrudes outward from the outer peripheral edge of the holding frame, and adheres the second adhesive material to the rear peripheral edge of the adhesive sheet,
The adhesive sheet is loosely fitted in the surrounding wall of the tray body to adhere the second adhesive material to the surface of the tray body partitioned by the surrounding wall, and the inner peripheral surface of the surrounding wall, the adhesive sheet, the holding frame, and the first A gas flow path is formed between the first and second adhesive materials, and the second adhesive material defines a flexible gap for the adhesive sheet between the surface of the tray body defined on the surrounding wall and the adhesive sheet. A non-adhesive region is formed between the surface of the tray body that is formed and defined by the surrounding wall and the adhesive surface of the second adhesive material, and communicates the gas flow path and the flexible gap for the adhesive sheet. A method for producing a pressure-sensitive adhesive transport tray.