JP2004361647A - Method for housing large-size pellicle - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To securely hold and fix a pellicle in a stable state to a tray by an extremely easy work. <P>SOLUTION: The outside of the outer edge of a protective film 5 for a large size pellicle A is provided with a protruding press margin 5a having a specified dimension. When the large size pellicle A is mounted on a tray 6 of the pellicle housing case B, the press margin 5a is adhered and fixed with a pressure-sensitive adhesive tape 9 to the surface of the tray 6. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a large pellicle having an area of 1000 cm ² or more used for preventing foreign matter from adhering to a photomask or a reticle used in a lithography process when manufacturing an LSI or the like, by using a tray and a lid. The present invention relates to a method for storing a large pellicle which can be stably stored in a case.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, in the production of semiconductor circuit patterns and the like, as described in Patent Document 1 described below, it is generally possible to prevent dust from adhering to a photomask or a reticle using dustproof means called a pellicle. Is being done. The pellicle is a transparent polymer film (hereinafter, referred to as nitrocellulose or cellulose derivative having a thickness of about 10 μm or less) on the upper edge of a frame having a thickness conforming to the shape of a photomask or a reticle having a thickness of about several millimeters. Pellicle film) is stretched and adhered, an adhesive is applied to the lower edge surface of the frame, and a protective film is adhered on the adhesive with a predetermined adhesive force.
[0003]
The adhesive is for fixing the pellicle to a photomask or a reticle, and the protective film is used for maintaining the adhesive strength of the adhesive until the adhesive is used. This protects the adhesive surface of. When transporting the pellicle from the manufacturer to the user, the pellicle is stored in a case consisting of a tray and a lid in order to prevent foreign substances from adhering to the pellicle film or the like or to prevent the pellicle from being damaged. In general, they are stored in a dustproof bag or the like and transported.
[0004]
As in the present invention, a case composed of a tray and a lid for accommodating a large pellicle having an area of 1000 cm ² or more is usually formed by a vacuum forming method, and the large pellicle is placed on the tray and then closed. It was stored in the case by being covered. In the manufacture of the case described above, the space between the lid and the frame of the large pellicle housed in the case is designed and manufactured systematically so that it is in the range of 0 mm or more and 1 mm or less. The pellicle was suppressed to prevent the large pellicle from moving and rubbing in the case due to vibration during transportation or the like to generate dust.
[0005]
However, a large case for storing a pellicle having an area of 1000 cm ² or more has the following problems. That is, in manufacturing a large case, there is a problem of clearance between the pellicle and the case, or a problem such as difficulty in satisfying the flatness of the case. The distance between the lid and the lid cannot be accurately controlled to be 0 mm or more and 1 mm or less, which makes it difficult to manufacture while maintaining molding accuracy to satisfy the conventional design concept.
[0006]
Therefore, when a large pellicle is housed in a large case manufactured by the conventional design concept, and the gap between the large pellicle and the lid is 0 mm and the lid is in contact with the large pellicle, the lid forms the frame of the large pellicle. Because of the pressing, there is a problem in that when the large pellicle is transported or the like, rubbing occurs between the two to generate dust and foreign matter adheres to the large pellicle.
[0007]
When the distance between the large pellicle and the lid is 1 mm or more, the large pellicle cannot be stabilized by pressing the large pellicle with the lid, and the large pellicle moves or vibrates in the case during transportation. There has been a problem that friction occurs between the pellicle and the pellicle and dust is generated, and foreign matter adheres to the large pellicle.
[0008]
In order to solve many of the problems described above, the present applicant has already completed the invention as exemplified in Patent Document 2, Patent Document 3, or Patent Document 4 described below, and has filed a patent application.
[0009]
The technology described in Patent Document 2 below discloses a technique in which a protruding portion is provided upright on a tray surface of a pellicle storage case, an undercut portion is provided on a side surface of the protruding portion, and a pellicle protection film is provided in the undercut portion. Is a technique for holding and fixing a pellicle placed on a tray by inserting a pellicle. Further, in the technology described in Patent Document 3, an adhesive having a predetermined adhesive strength is applied to the lower surface of a protective film of a pellicle, and when the pellicle is mounted on the tray, the protective film is adhered to the tray. In this technique, the pellicle is held and fixed on a tray.
[0010]
Further, the technique described in Patent Document 4 suspends a rod-shaped pressing body from the ceiling surface of a case lid, and covers the pellicle protection film mounted on the tray when the lid is covered with the tray. In this technique, the pellicle is held and fixed to a tray by being pressed from above by the pressing body.
[0011]
[Patent Document 1]
Japanese Patent Publication No. 54-28718 [Patent Document 2]
JP-A-11-38597 [Patent Document 3]
JP-A-11-24238 [Patent Document 4]
JP-A-11-52553
[Problems to be solved by the invention]
The inventions described in the above-mentioned Patent Documents 2 to 4 are extremely effective for a case for accommodating a 5-inch or 6-inch semiconductor pellicle which has been generally used in the past. When the present invention is applied to a case that accommodates a large pellicle having a pellicle area of 1000 cm ² or more, the present invention has a problem of a weak crown as described later.
[0013]
In the technique of Patent Document 2, it is not sufficient to provide a relatively deep undercut portion on the side surface of a protruding portion provided on the surface of the tray by using a vacuum forming method which is inexpensive and easy to manufacture. There was a problem that it was difficult to obtain molding accuracy. In addition, when the tray is formed by using the injection molding method, molding is possible because the molding accuracy is good, but when a large pellicle of 1000 cm ² or more, which is the object of the present invention, is molded by the injection molding method. In addition to the fact that a very large forming bar is required, the cost is high and it is not practical, and the size of the tray is very large, so that forming distortion occurs, and a narrow and deep undercut portion is provided on the side surface of the projecting portion with high precision. Was difficult.
[0014]
In the technique of Patent Document 3, a method of applying an adhesive to the lower surface of a protective film of a pellicle and attaching the protective film to the surface of the tray is not applicable to a case of a small size such as a case of a pellicle for a semiconductor. Although effective, in a large case for storing a large pellicle as in the present invention, the pellicle mounting portion of the tray may be warped because molding accuracy is not always perfect. For this reason, the distortion due to the warpage of the tray is transferred to the protective film and becomes a distortion of the protective film, or a part of the protective film is peeled off from the adhesive, and the adhesive strength of the adhesive is reduced. There is a problem that it is difficult to uniformly attach the pellicle to the photomask as a cause.
[0015]
The technique of Patent Document 4 is a method of holding and fixing a pellicle by pressing a protective film of a pellicle mounted on a tray with a pressing body suspended from a ceiling surface of a case lid. In this case as well, in the case of a small case of 5 or 6 inches like a semiconductor pellicle storage case, the molding accuracy can be maintained, but as described above, a large pellicle to which the present invention is applied is stored. In a large case, the molding accuracy is not sufficient, and the molded case is warped.When the case is covered with a lid, the pressing body provided on the lid side accurately and accurately protects the pellicle protective film. There is a problem that it is difficult to securely press and hold and fix.
[0016]
The method for storing a large pellicle according to the present invention is a completely new technique developed in view of the above-mentioned many problems, and in particular, a method in which a part or all of the outer peripheral edge of a protective film of a large pellicle is projected outward. The present invention is to provide a method for securely holding and fixing the pellicle to the tray by sticking the pressing margin to the surface of the tray with an adhesive tape when a pellicle is mounted on the tray by forming a pressing margin.
[0017]
[Means for Solving the Problems]
The method for storing a large pellicle according to the present invention is a technique which fundamentally solves the above-mentioned problems, and the gist of the first invention is to provide a frame and a pellicle film adhered to an upper edge surface of the frame. A method of storing a large pellicle made of an adhesive applied to a lower edge surface of the frame and a protective film adhered to a lower surface of the frame to protect the adhesive in a case including a tray and a lid In the above, a part or all of the outer peripheral edge of the protective film of the large pellicle is projected outward to form a press allowance, and the press allowance is fixed to the tray via an adhesive tape to form the large pellicle. This is a method for storing a large pellicle, which is stored in a case.
[0018]
In the first aspect of the present invention, since a part of or the entire outer peripheral edge of the protective film of the pellicle is projected outward to form the press allowance, when the pellicle is mounted on the tray, the outer periphery of the pellicle is removed. The pressing margin protruding outside the frame can be overlapped on the surface of the tray. Further, in the present invention, since the press allowance is adhered to the tray via the adhesive tape, the pellicle can be securely held and fixed to the tray in a very simple operation by a very simple operation.
[0019]
Further, in the present invention, since the protective film of the large pellicle is adhered to the tray via a highly flexible adhesive tape, if the molding accuracy of the tray is insufficient, or if the tray is warped. Even if it occurs, the large pellicle can be accurately and reliably held and fixed to the tray without any influence.
[0020]
The gist of the second invention of the method for accommodating a large pellicle according to the present invention is that the width of the press allowance of the protective film is 6 mm or more and the length is 20 mm or more. Is the way.
[0021]
In the second aspect of the present invention, the size of the press allowance provided on the protective film of the large pellicle is formed to be 6 mm or more in width and 20 mm or more in length. It can be widely overlapped on the surface of the tray, and the holding allowance can be stably and reliably fixed to the surface of the tray via the adhesive tape.
[0022]
The gist of the third invention of the method for storing a large pellicle according to the present invention is that an interval of at least 1 mm or more is provided between the frame of the large pellicle mounted on the tray of the case and the lid covered by the tray. A method for storing a large pellicle according to the first invention or the second invention, wherein the large pellicle is stored.
[0023]
In the third aspect of the present invention, the large pellicle is accommodated at least 1 mm or more between the frame of the large pellicle mounted on the tray of the case and the lid covered by the tray. Also, there is no fear that the large pellicle will come into contact with the lid and be rubbed due to vibration or the like even when transported. In addition, since the large pellicle is held and fixed to the tray in a stable state via the adhesive tape as described above, there is no need to press the large pellicle with the lid. The problems of molding accuracy and distortion can all be solved.
[0024]
BEST MODE FOR CARRYING OUT THE INVENTION
One embodiment of the method for storing a large pellicle according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a longitudinal sectional view of the method for storing a large pellicle according to the present invention, and FIG. FIG. 3 is an enlarged explanatory view of a main part of the method, FIG. 3 is a plan view of a protective film for a large pellicle used in the method for storing a large pellicle in FIG. 1, and FIG. 4 is also used in the method for storing a large pellicle in FIG. 1 is a plan view of a large pellicle protection film to be used.
[0025]
In FIGS. 1 and 2A and 2B, A is a large pellicle, which is a large pellicle having a pellicle area of 1000 cm ² or more as already described in detail. A pellicle film 3 adhered to an upper edge surface of the frame 1 via an adhesive 2, an adhesive material 4 applied to a lower edge surface of the frame, and an adhesive material 4 for protecting the adhesive material 4. It is composed of an adhered protective film 5.
[0026]
In the above-described embodiment, the adhesive 1 is applied to the lower edge surface of the frame 1 to form the adhesive. However, when a layered adhesive in which the adhesive 4 and the protective film 5 are formed in a layer in advance is used. May simply be formed by laminating a layered pressure-sensitive adhesive on the lower edge surface of the frame 1 and sticking the same (however, in this specification, including such a case, it is collectively referred to simply as "coating"). ). Next, the large pellicle A configured as described above is stored in a case B including the tray 6 and the lid 7. Clips 8 are attached to the corners between the tray 6 and the lid 7, and the clips 8 are fixed so that the lid 7 does not come off the tray 6.
[0027]
Outside the outer peripheral edge of the protective film 5 of the large pellicle A, a press allowance 5a that is adhesively fixed to the surface of the tray 6 with an adhesive tape described later protrudes. The inventors of the present invention have conducted various experiments on the dimensions of the presser allowance 5a, and as a result, it has become clear that the width W is preferably 6 mm or more and the length L is preferably 20 mm or more. The holding allowance 5a having such dimensions could be easily and stably adhered to the surface of the tray 6 via the adhesive tape 9.
[0028]
In carrying out the storing method of the present invention, as shown in FIGS. 1 and 2 described above, the large pellicle A is mounted on the center of the tray 6 of the case B, and the outside of the frame 1 of the large pellicle A. The large-sized pellicle A is attached to the center of the tray 6 in an extremely stable state by adhering the holding allowance 5a of the protective film 5 projecting toward the surface of the tray 6 using an adhesive tape 9 having a predetermined length. It can be held and fixed easily and reliably.
[0029]
In the storing method according to the present invention, as described above, the flexible presser allowance 5a of the protective film 5 protruding outward from the frame 1 of the large pellicle A is interposed via the highly flexible adhesive tape 9. Since the tray 6 of the case B is adhesively fixed to the surface of the tray 6, the molding accuracy of the tray 6 of the case B is not sufficient, or even if the tray 6 is warped, regardless of these problems, the large pellicle A can be easily fixed to the tray 6 in a stable state.
[0030]
Further, in the storage method of the present invention, the large pellicle A can be securely held and fixed to the tray 6 of the case B in a stable state, so that there is no need to press the large pellicle A with the lid 7 of the case B. Therefore, the distance D between the lid 7 and the frame 1 of the large pellicle A can be set to 1 mm or more. Therefore, since the large pellicle A and the lid 7 have a sufficient space, the large pellicle A and the lid do not rub against each other due to vibration during transportation or the like, and there is no fear that a problem of dust generation occurs.
[0031]
In providing the press allowance 5a on the protective film 5 of the large pellicle A, for example, as shown in FIGS. 3 (a) to 3 (d) or 4 (a) to 4 (d), A presser allowance 5a having a width W of 6 mm or more and a length L of 20 mm or more can be provided outside the outer edge.
[0032]
That is, in the case of FIG. 3 (a), the large pellicle A has a structure in which a pressing margin 5a is provided at the center of the outside of the long side of the protection film 5 from which the center is removed, and in the case of FIG. This is a structure in which a pressing margin 5a is provided at the center of the outside of the short side of the removed protective film 5. FIG. 6C shows a structure in which a presser allowance 5a is provided at the center of each of the long side and the short side of the protective film 5 which is centrally cut out, and in the case of FIG. This is a structure in which a pressing margin 5a is provided at the center of the outside of each of the long side and the short side of the protective film 5 that is not removed.
[0033]
In the case of FIG. 4 (a), the holding film 5a is provided over substantially the entire length outside the center of the long side and the outside of the short side of the center-cut protective film 5, and in the case of FIG. 4 (b). Has a structure in which a holding margin 5a is provided at substantially the entire length outside the long side and the center of the short side of the protection film 5 whose center is removed. In addition, in the case of FIG. 3C, the press allowance 5a is provided continuously over the entire length of each of the long side and the short side of the protective film 5 that is cut out at the center. FIG. 4D shows a structure in which the press allowance 5a is provided continuously over the entire length of each of the long side and the short side of the protective film 5 that is not centered.
[0034]
The inventor conducted an experiment using the method for storing a large pellicle of the present invention having the above-described configuration, and as a result, good results as shown in the following examples were obtained.
[0035]
Embodiment 1
Case B in which a large pellicle A having an outer dimension of 427 mm × 294 mm and a pressing margin 5 a of W10 mm × L100 mm provided at the center of the long side and the short side of the protective film 5 is vacuum-formed with ABS resin material. After the holding portion 5a is adhesively fixed to the tray 6 via the adhesive tape 9, a lid 7 is covered on the tray 6, and the tray 6 and the lid 7 A clip 8 was attached to the corner portion of the above, and both were fixed. At this time, the distance D between the frame 1 of the large pellicle A and the lid 7 was maintained at 3.6 mm. As a result of a long-distance transport test of the large pellicle A in this state, no rubbing was observed between the large pellicle A and the case B. Further, the large pellicle A was held and fixed in a state where it was initially mounted.
[0036]
Embodiment 2
A large pellicle A having an outer dimension of 904.5 mm x 750 mm, and a press allowance 5a having a size of W10 mm x L100 mm at the center of the long side and the short side of the protective film 5, respectively, under exactly the same conditions as in the first embodiment. As a result of the transportation test, no rubbing was observed between the large pellicle A and the case B, and the large pellicle A was held and fixed in a stable state on the tray 6 as in the first installation. .
[0037]
[Comparative Example 1]
A large pellicle A having an outer size of 427 mm × 294 mm is mounted on a tray 6 formed by vacuum molding of an ABS resin material (without using an adhesive tape 9). A transport test was carried out under the same conditions as in Example 1 as a result of carrying out a transport test under the same conditions as in Example 1 by fixing with the clip 8 and keeping the distance D between the lid 7 and the frame 1 of the large pellicle A at 0.5 mm. 7 was observed, and fine dust was found to adhere to a part of the pellicle film 3 of the large pellicle A.
[0038]
[Comparative Example 2]
A large pellicle A having an outer size of 427 mm × 294 mm is mounted on the tray 6 as in Comparative Example 1, and the distance D between the lid 7 covered by the tray 6 and the frame 1 of the large pellicle A is set to 3. As a result of a transport test under the same conditions as in Example 1 in a state where the size of the pellicle was set to 6 mm, traces of rubbing between the large pellicle A and the lid 7 were observed. Further, fine dust adhered around the frame 1 of the large pellicle A.
[0039]
The pressure-sensitive adhesive tape 9 is not particularly specified. For example, polyethylene, polypropylene, polyethylene terephthalate, polyvinyl chloride, non-woven fabric, or the like can be used as the base material. In addition, an acrylic adhesive, polyvinyl alcohol, or the like can be used as the paste. It is preferable that the tape used has a small amount of outgas.
[0040]
【The invention's effect】
In the method for accommodating a large pellicle according to the present invention, a part of or the entire outer peripheral edge of the protective film of the pellicle is formed to protrude outward to form a press allowance, so that when the pellicle is mounted on the tray, This has the effect that the presser allowance protruding outside the outer frame of the pellicle can be overlapped on the surface of the tray. In addition, in the present invention, since the press allowance is adhered to the tray via the adhesive tape, there is also an effect that the pellicle can be securely held and fixed to the tray in an extremely simple operation in a stable state. I have.
[0041]
Furthermore, since the flexible presser allowance of the protective film of the pellicle is adhered to the tray via a flexible adhesive tape, if the molding accuracy of the tray is insufficient, or the tray may be warped. In this case, the pellicle can be accurately and reliably held and fixed to the tray without any influence.
[0042]
Further, in the present invention, when the size of the press allowance provided on the protective film of the pellicle is 6 mm or more in width and 20 mm or more in length, when the pellicle is mounted on the tray, the press allowance is applied to the surface of the tray. This has the effect of being able to be stacked over a wide area, and the effect of being able to stably and reliably hold and fix the press allowance to the surface of the tray via an adhesive tape.
[0043]
Further, in the present invention, when the large pellicle is stored with a space of at least 1 mm or more between the frame of the large pellicle mounted on the tray of the case and the lid covered by this tray, the large pellicle is removed. Even when transported, there is no fear that the large pellicle will come into contact with the lid and be rubbed by vibration or the like. Also, when the large pellicle is held and fixed to the tray in a stable state via the adhesive tape as described above, it is not necessary to press the large pellicle with the lid. This has the effect that all problems of molding accuracy and distortion can be solved.
[Brief description of the drawings]
FIG. 1 is an explanatory longitudinal sectional view of a method for storing a large pellicle according to the present invention.
FIG. 2 is an enlarged explanatory view of a main part of a method for storing the large pellicle of FIG. 1;
FIG. 3 is a plan view of a protective film for a large pellicle used in the method for storing a large pellicle of FIG. 1;
FIG. 4 is a plan view of a protective film for a large pellicle used in the method for storing a large pellicle of FIG. 1;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Frame 2 ... Adhesive 3 ... Pellicle film 4 ... Adhesive material 5 ... Protective film 5a ... Pressing allowance 6 ... Tray 7 ... Lid 8 ... Clip 9 ... Adhesive tape A ... Large pellicle B ... Case D ... Lid and large pellicle … Length W… Width

Claims (3)

A frame, a pellicle film adhered to an upper edge surface of the frame, an adhesive applied to a lower edge of the frame, and adhered to a lower surface of the frame to protect the adhesive. In a method of storing a large pellicle made of a protective film in a case made up of a tray and a lid, a part or all of the outer peripheral edge of the protective film of the large pellicle is projected outward to form a press allowance, and A method for storing a large pellicle, comprising fixing the holding allowance to the tray via an adhesive tape and storing the large pellicle in a case. 2. The method for storing a large pellicle according to claim 1, wherein a width of a press allowance of the protective film is 6 mm or more and a length thereof is 20 mm or more. 3. The case according to claim 1, wherein a space is provided at least 1 mm or more between a frame of a large pellicle mounted on a tray of the case and a lid covered by the tray. How to store large pellicles.

Images