CN103086050B - Dustproof film assembly accommodating container - Google Patents
Dustproof film assembly accommodating container Download PDFInfo
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- CN103086050B CN103086050B CN201210421071.XA CN201210421071A CN103086050B CN 103086050 B CN103086050 B CN 103086050B CN 201210421071 A CN201210421071 A CN 201210421071A CN 103086050 B CN103086050 B CN 103086050B
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- dustproof film
- pin
- film component
- film assembly
- vessel
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The present invention provides a dustproof film assembly accommodating container, wherein, the dustproof film assembly in a fixed state on the container body is covered by a cover, thereby preventing foreign matter adhesion. In conveying, the dustproof film assembly is truely sustained in a fixed state. Furthermore when the cover is opened, the fixed state can be simply released for taking out the dustproof film assembly. The dustproof film assembly accommodating container comprises a container body (12) for carrying the dustproof film assembly (16), and the cover (14) which covers the dustproof film assembly. The container body (12) is provided with a plurality of dustproof film assembly fixing parts (18). The container body (12) is provided with the following components: a plurality of dustproof film assembly fixing parts (18), wherein the fixing part (18) is provided with a rotatable needle (28) when inserted into the front end of a recess part (26) of a dustproof film assembly frame (16a) of the dustproof film assembly (16); needle mounting parts (32) in which the needles (28) are detachably mounted; and keeping devices which are respectively used for keeping the needle (28) in a manner that the front part (28a) of the needle (28) is not pulled out from the recess part (26) after the needle (28) is rotated for a preset angle when the front part of the needle mounting part (32) of each dustproof film assembly fixing part (18) is inserted into the recess part (26) of the dustproof film assembly frame (16a), wherein each keeping device is provided with a projection part (30) and notch parts (32a).
Description
Technical field
The present invention relates to and at semiconductor device, will use in the manufacture of printed base plate or liquid crystal indicator etc., the dustproof film component that dustproof film is attached at dustproof film component framework is accommodated in Pellicle container kit.
Background technology
The semiconductor manufacturing of LSI and super LSI etc. or be liquid crystal indicator etc. manufacture in, semiconductor wafer or liquid crystal raw sheet be carried out to use up the photoetching of carrying out irradiating the making carrying out pattern.Now, if photomask or reticle mask have dust to adhere to, described dust absorbs light, makes bendingof light, and will make the pattern deformation of transfer printing thus, edge is uneven, and the phenomenon of substrate blackening etc. is for occurring.Described operation is carried out usually in dust free room, even so, is also difficult to make photomask always keep clean, so, use the dustproof film component that transparent dustproof film attaches on dustproof film component framework.So, described dustproof film component loads on the photomask and exposes, and foreign matter does not directly adhere on the surface of photomask, but adhere on dustproof film, so during photoetching, as long as by the pattern of focus alignment of photomask, the foreign matter on dustproof film has just had nothing to do with transfer printing.
Described dustproof film component adheres to as itself there being foreign matter, likely will feed through to photomask, so require high detergency.Thus, in described keeping and when transporting, Pellicle container kit be used.As the accommodation method of described Pellicle container kit or dustproof film component, following patent documentation 1,2 can be exemplified, the thing described in 3.Specifically, in patent documentation 1, describe a kind of dustproof film component container, it is the inner bottom part of the vessel at hard resin, dustproof film component frame facet is touched mounting, it is by vertically setting up multiple support at the inner bottom part of vessel, support from the dustproof film component framework around inner bottom part loaded thus, further, vessel is coated with the lid of opening and closing hard resin freely, and have at described inner face and have when closing lid at described lid, the contact site contacted with a described side of the dustproof film component framework that inner bottom part loads.
Patent documentation 2; describe a kind of by large-scale dustproof film component storage method in a reservoir; wherein dustproof film component has framework; at the upper limb face dustproof film then of described framework; sticky material is coated with, in order to the protective film protecting described sticky material to adhere to below framework in the lower edge face of described framework.Described accommodating container has dish and lid, wherein, and one or whole projection laterally of the outer peripheral edges of the protective film of described large-scale dustproof film component; and form flanging surplus; and described flanging surplus is by adhesion bar, fixing, is accommodated in wherein by large-scale dustproof film component thus.
Patent documentation 3, describes a kind of Pellicle container kit, comprising: dustproof film component mounting vessel; While dustproof film component is covered, with vessel mutually at the chimeric locking lid of circumference; At the metal parts that described vessel engages; At least arrange 1 at each lateral surface on the limit of be parallel to each other a group of dustproof film component framework, arrange the hole of more than 3 altogether, in this some holes, the framework inserted respectively with number keeps pin; To the location decided part that described framework keeps the position of pin to determine, in this Pellicle container kit, described location decided part is mechanically fixed on described metal parts.
[look-ahead technique document]
[patent documentation]
[patent documentation 1] real fair 6-45965 publication
[patent documentation 2] JP 2004-361647 publication
[patent documentation 3] patent No. 4391435 publication
Dustproof film component container described in patent documentation 1 is ejection formation, has the advantage that parts are few, as semiconductor dustproof film component storage and use.But described dustproof film component container is, lid and vessel all want high precision to be shaped, the storage that the length of side is the super such liquid crystal dustproof film component of 500mm can not be used for.Formed well because so large-scale container is difficult to carry out precision in a vacuum, the rigidity of container itself is also difficult to guarantee in addition.
Thus, when the process of container and when transporting, easily cause distortion of vessel, thus container and the friction of dustproof film component framework, there is dust, thus make quality variation.As the accommodating container of the described length of side more than such large-scale dustproof film component of 500mm; as as described in patent documentation 2; make one of the lining of protection photomask adhesive coating projection laterally; vessel is fixed in adhesion bar; or as described in patent documentation 3; insert a needle in the recess that dustproof film component framework lateral surface is arranged; fixing on vessel, it is also proposed dustproof film component method positively fixing on vessel in existing document.
But; patent documentation 2 such; one of the outer peripheral edges of the protective film of dustproof film component or it is attached on vessel fixing occasion for the flanging surplus being all projected on outside bar of adhering, described operation is had to manually carrying out, and is difficult to be fixed on dish in peace and quiet state.Further, when bar of adhering peels off taking-up, there is staff close near dustproof film component framework, have the worry that foreign matter adheres to.
On the other hand, as patent documentation 3, in the hole of dustproof film component framework lateral surface, carry out pin insert and extract the occasion that dustproof film component is loaded and unloaded to vessel, during the handling of dustproof film component, staff is not too close to dustproof film component, and foreign matter attachment is few.
But, when being transported by the Pellicle container kit of storage dustproof film component, be necessary that the insertion position of the pin inserted in the hole to dustproof film component framework lateral surface carries out continuing to maintain.In order to maintain the insertion position of this pin, can consider by pin further by the stationary installation that the fastening device of other screw etc. is fixed, or make pin form some to resemble cone and be fitted together to, the stationary installation be fixed by described friction force.But, the occasion of pin being fixed with the fastening device of screw etc., pin is really with being fixed, but the danger having dust to occur.In addition, pin is made generally tapered, the occasion be fixed by friction force, be difficult to friction force to be adjusted to appropriate size, so credible poor.
In order to be that described problem solves to the present invention, the invention provides a kind of Pellicle container kit, it is while the dustproof film component lid covering being in fixing state in the assigned position of vessel prevents foreign matter from adhering to, while stationary state is also maintained really described in transport, and when lid is opened Kaifeng, simply described stationary state is removed, by the taking-up of dustproof film component.
Summary of the invention
Object of the present invention, can reach by following technical scheme:
1. a Pellicle container kit, comprise mounting dustproof film be attached at the vessel of the dustproof film component that dustproof film component framework is formed and be fitted together to locking at the circumference of described vessel, the lid covered by described dustproof film component is formed
It is characterized in that: at described vessel, arrange multiple dustproof film component fixed part, this dustproof film component fixed part is included in by rotary pin under the state of leading section insertion in the recess of the lateral surface of the described dustproof film component framework loaded; The pin installing department that described pin can be installed from described recess with extracting, each dustproof film component fixed part described, the holding device kept by described pin is housed, after the described pin that the recess of described dustproof film component framework is inserted in the described leading section that described pin installing department is installed carries out the rotation of predetermined angular, the leading section of described pin is not extracted from described recess.
2. the Pellicle container kit according to technical scheme 1, it is characterized in that: described holding device, by the jut that described pin is formed and described pin installing department formed when described pin rotates with predetermined angular and the locking notch of described jut formed.
3. the Pellicle container kit according to technical scheme 2, it is characterized in that: the internal face of the described lid that the described dustproof film component loaded described vessel covers, contact with a part for the described jut of described pin, the rotation of described pin can be prevented thus.
4. the Pellicle container kit according to technical scheme 2 or 3, is characterized in that: described pin carry out 30-180 degree rotate time, the jut of described pin and the notch of described pin installing department locking.
5. the Pellicle container kit according to any one of technical scheme 1-4, is characterized in that: the buffer unit that the leading section as described pin contacts with described dustproof film component framework, is provided with elastic body.
6. the Pellicle container kit according to any one of technical scheme 1-5, is characterized in that: at the rear end face of described pin, the instrument recess that the instrument forming the rotation of described pin inserts.
[effect of invention]
In the present invention, Pellicle container kit is, with easy structure, positively keep making dustproof film component at the pin that vessel is fixing, coming off of pin can not be there is in transport, also the secure detached of dustproof film component can not be made, and also do not make the dustproof film component breakage of storage and the danger of foreign matter attachment, reliability is high.In addition, open lid, when the dustproof film component loaded is taken out, only pin is carried out the rotation of predetermined angular, unload from pin installing department, just dustproof film component can be taken out from vessel in vessel.Due to so extremely easy operation, just from Pellicle container kit, the taking-up of dustproof film component can be become possibility, the danger of adhering to along with the foreign matter to dustproof film component taking out operation is also few.
Accompanying drawing explanation
The front view (FV) of an example of Pellicle container kit in [Fig. 1] the present invention.
The front view (FV) of the state that the lid 14 of the Pellicle container kit 10 that [Fig. 2] Fig. 1 represents unloads.
The sectional view in the X-X face of the Pellicle container kit 10 that [Fig. 3] Fig. 1 represents.
[Fig. 4] comprises the enlarged cross section figure of dustproof film component fixed part 18 part of the Pellicle container kit 10 that Fig. 3 represents.
The oblique view of the pin 28 that [Fig. 5] Fig. 4 represents.
[Fig. 6] comprises (a), (b) and (c) 3 figure, and the pin 28 represented for Fig. 4 is installed in the explanation oblique view of the situation of pin installing department 32.
What the pin that pin installing department is installed by [Fig. 7] carried out by the friction force of installation hole the comparative example kept represents oblique view.
Embodiment
Below, embodiment is described in detail, but scope of the present invention is not by their restriction.
One such as shown in Fig. 1 of Pellicle container kit of the present invention.The Pellicle container kit 10 that Fig. 1 represents, is made up of OBL vessel 12 and lid 14.The state that described lid 14 unloads is represented with Fig. 2.The dustproof film component 16 of the central portion mounting of vessel 12, by by the tabular surface 20 formed along the long limit of vessel 12, on 20, the dustproof film component fixed part 18 that 4 of configuration are closely close in each bight of dustproof film component 16 is fixed.
Described dustproof film component 16 is, the dustproof film 16b metal dustproof film component framework 16a of OBL aluminium etc. attaching transparent fluororesin etc. is formed.The vessel 12 that dustproof film component 16 and dustproof film component fixed part 18 load, as represented in the sectional view Fig. 3 in the X-X face of Fig. 1, has projection 12a in the bottom of vessel 12, and 12a is formed and by reinforcement.Described vessel 12 and lid 14, use the synthetic resin of ABS and acrylic acid etc. carry out vacuum forming and obtain.Vacuum forming method is, mould covers the resin of heating, only carries out vacuum attraction, just easily can form tun.In contrast, by the ejection forming method being carried out by resin injecting at a high speed in mould at one or several places ground entrance, the distance of the flowing of resin is long, the inconvenient tendency of manufacture of tun.
In described vessel 12, as represented in Fig. 4, between lining 22 and photomask adhesive coating 24, dustproof film component 16 is loaded, and dustproof film component 16 is by 4 dustproof film component fixed part 18(Fig. 3) fix in assigned position.Described dustproof film component 16, as represented in Fig. 3, is covered by lid 14, is incorporated in Pellicle container kit 10.Vessel 12 and lid 14, be fitted together to locking at described circumference.In addition, dustproof film component fixed part 18, as represented in Fig. 4, comprises rotary pin 28 under the state that leading section 28a inserts by the recess 26 to the lateral opening of the dustproof film component framework 16a loaded in the assigned position of vessel 12; The pin installing department 32 that pin 28 can be installed from recess 26 with extracting.Described pin 28, as represented in Fig. 5, comprises leading section 28a, pars intermedia 28b, rearward end 28c, between pars intermedia 28b and rearward end 28c, is formed with the jut 30 of the holding device forming pin 28.Jut 30, is formed with the dip plane that leading section is tapered.The rearward end 28c of pin 28, be the operating portion of operation pin 28 rotation etc., it is thicker than leading section 28a and pars intermedia 28b.The end face of this rearward end 28c, the instrument recess 36 that the instrument being formed with the rotation of pin 28 inserts.
The instrument recess 36 of the pin 28 shown in Fig. 5, the sexangle that the leading section for hex wrench can be inserted.Further, the pars intermedia 28b of pin 28, also thicker than leading section 28a, the leading section 28a of pin 28 and the boundary of pars intermedia 28b are formed with ladder 28E.Described ladder 28E, contacts with the side of dustproof film component framework 16a.As the buffer unit that the side of described ladder 28E and dustproof film component framework 16a contacts, the elastic body 34 of ring-type is had to install at ladder 28E.As elastic body 34, nitrile rubber can be used, ethylene propylene rubber, silicone rubber, the rubber of fluororubber etc.
Described pin 28 thereon by the pin installing department 32 lightheartedly loaded and unloaded, as represented in Fig. 4, the tabular surface 20 of vessel 12 can be installed with the coupling arrangement (not shown) of screw etc.Described pin installing department 32, as represented in Fig. 6 (a), is tetrahedron, and the one end of the U-shaped ditch 32a that the jut 30 of pin 28 and rearward end 28c insert is a tetrahedral side opening.The other end of described U-shaped ditch 32a is, a side opening of the internal face of the notch 32b of the square shape that tetrahedral central portion is closely close to.Described notch 32b, forms holding device with jut 30, and the jut 30 between the pars intermedia 28b of pin 28 and rearward end 28c is for inserting rotationally.Further, in the internal face of notch 32b, the opposite side relative with the side of the other end opening of U-shaped ditch 32a, forms the inserting hole 32c of the leading section 28a of pin 28 and the part insertion of pars intermedia 28b.
On described pin installing department 32, as represented in Fig. 6 (a), there is the pin 28 on ladder 28E with elastic body 34.The leading section 28a of pin 28 and pars intermedia 28b inserts the hole 32c of pin installing department 32, and while the jut 30 of pin 28 inserts from U-shaped ditch 32a to notch 32b, rearward end 28c inserts U-shaped ditch 32a.When pin 28 is installed by pin installing department 32, as represented in Fig. 6 (b), the leading section 28a of pin 28 and a part of pars intermedia 28b are given prominence to from pin installing department 32.The pin 28 of the state that described Fig. 6 (b) represents, can extract from the U-shaped ditch 32a of pin installing department 32 and notch 32b.Thus, the direction of the arrow that can represent by Fig. 6 (b) makes pin 28 rotate.By the rotation of described pin 28, jut 30 also rotates, and as represented in Fig. 6 (c), the internal face of jut 30 and notch 32b is locking.Described jut 30 and notch 32b locking, thus, pin 28 becomes and is kept by pin installing department 32, thus is not pulled out.
On the one hand, as represented in Fig. 6 (c), when by the locking releasing of jut 30 and notch 32b, pin 28 is pressed the arrow reverse direction represented with Fig. 6 (b) rotate, thus, as represented in Fig. 6 (b), during the locking releasing of the internal face of jut 30 and notch 32b, pin 28 can be extracted simply from pin installing department 32.In order to by described jut 30 with notch 32b is locking or remove, the rotational angle of pin 28, from preferably 30-180 degree, the particularly preferably scope of 45-90 degree such as the viewpoint of operability and locking certainty.The rotation of described pin 28, the leading section of inserting hex wrench in the instrument recess 36 by the end face of the rearward end 28c to pin 28 is carried out.
As represented in Fig. 6 (c), the pin installing department 32 being carried out by pin 28 keeping, as the dustproof film component fixed part 18 be fixed by the dustproof film component 16 of mounting on vessel 12, is install in the place of the regulation of the tabular surface 20 formed along the long limit of vessel 12.Now, dustproof film component fixed part 18, the leading section 28a of described pin 28, as represented in Fig. 4, inserts the recess 26 of dustproof film component framework 16a.The coupling arrangement of described installation screw etc. carries out.As described fastening device, in pin installing department 32, internal thread part is set by the insertion parts etc. of metal, from the outside of vessel 12, bolt is fixed, can make in Pellicle container kit 10, not having the parts of screw etc. not expose, is good from clean point.Further, bolt is fixed, and is preferably fixed between resin washer etc., particularly, wire connecting portion organic solvent etc. between resin component, after vessel 12 is fixing, carries out dissolving then by pin installing department 32 further, and this is preferred to the point that dust do not occur.
But, dustproof film component fixed part 18, as represented in Fig. 6 (c), even if be in locking state at jut 30 and notch 32b, also pin 28 can be rotated because vibration in transit waits, make the locking danger having releasing of jut 30 and notch 32b.The rotation of described pin 28, as represented in Fig. 4, is covered dustproof film component 16 by the internal face of lid 14, a part for the locking jut 30 of itself and notch 32b is contacted and prevents.Also can pass through unloading lid 14 in this occasion, pin 28 is rotated, by the locking releasing of notch 32b and jut 30.
Shown in Fig. 1-Fig. 6 28, for resin ejection formed, the one-body molded making such as transfer molding.As material, epoxy resin can be used, ABS resin (acrylonitrile butadiene styrene resin), PPS resin, PE resin (polyvinyl resin), PEEK resin (polyether-ether-ketone resin) etc., preferably according to necessity, the filler etc. of glass fibre etc. can be mixed into improve intensity.The pin installing department 32 that described pin 28 is installed, for resin ejection formed, the one-body molded of transfer molding etc. makes.As material, epoxy resin can be used, ABS resin (acrylonitrile butadiene styrene resin), PPS resin, PE resin (polyvinyl resin), PEEK resin (polyether-ether-ketone resin) etc.
According to the Pellicle container kit 10 that Fig. 1-Fig. 6 represents, the leading section 28a of the pin 28 that the pin installing department 32 forming dustproof film component fixed part 18 is installed, after inserting the recess 26 of the dustproof film component framework 16a that vessel 12 loads, pin 28 is rotated, and dustproof film component 16 is positively kept by vessel 12.Further, contacted with the internal face of the lid 14 being installed in vessel 12 by a part for the jut 30 of the pin 28 locking with pin installing department 32, the pin 28 caused vibration in transit etc. prevents for rotation, thus to having in transporting because pin 28 fixing the coming off of the dustproof film component 16 caused such as to come off positively prevents.Use described Pellicle container kit 10, the dustproof film component 16 of its storage does not just have the danger of breakage and foreign matter attachment, so credible high.In addition, open lid 14, when the dustproof film component 16 of mounting on vessel 12 is taken out, only pin 28 is carried out the rotation of predetermined angular, take out from pin installing department 32, just dustproof film component 16 can be taken out from vessel 12.Thus, use Pellicle container kit 10, the taking-up operation of described dustproof film component 16 is also simple.
The Pellicle container kit 10 that Fig. 1-Fig. 6 represents, dustproof film component 16 is by the tabular surface 20 in the long limit formation along vessel 12,4 dustproof film component fixed parts 18 that configuration is closely close in each bight of the dustproof film component 16 on 20 are fixed, but the dustproof film component fixed part 18 arranging more than 4 is also passable.In addition, dustproof film component fixed part 18 be configured to along vessel 12 minor face configuration also can, each limit along long limit and minor face all configures also passable.
[embodiment 1]
Below, embodiments of the invention are described in detail, but scope of the present invention is not by their restriction.
(embodiment 1)
With the charged sheet material preventing ABS resin, the vessel 12 of the shape represented with vacuum forming construction drawing 1 and Fig. 2 and lid 14.Vessel 12 and lid 14, be fitted together to locking at described circumference, forms the Pellicle container kit 10 that Fig. 1 represents.The size of described Pellicle container kit 10 is, profile 890 × 690mm, high 70mm.The sheet material used in shaping is, as lid 14, is the thing of transparent 3mm, as vessel 12 Yong Wei ?the thing of 5mm of look.
Further, preferably use ejection formation, the pin installing department 32 that ABS resin construction drawing 6 represents, the pin 28 represented as Fig. 5 by PPS resin-made.Pin 28 is by leading section 28a, and pars intermedia 28b, rearward end 28c are formed, and between pars intermedia 28b and rearward end 28c, forms the jut 30 of the holding device forming pin 28.Jut 30 is, forming leading section is the dip plane of tapered.The rearward end 28c of pin 28 is operating portion pin 28 being rotated etc., also thicker than leading section 28a and pars intermedia 28b.At the end face of rearward end 28c, the instrument recess 36 that the leading section for the hex wrench of the rotation by pin 28 is inserted.Described pin 28 pars intermedia 28b is also thicker than leading section 28a, and the leading section 28a of pin 28 and the boundary of pars intermedia 28b go out to be formed ladder 28E.
In addition, pin installing department 32 is tetrahedron, and the one end of the U-shaped ditch 32a that the jut 30 of pin 28 and rearward end 28c insert is the opening of tetrahedral side.The other end of described U-shaped ditch 32a is, an opening of the internal face of the notch 32b of the square shape that tetrahedral central portion is closely close to.Described notch 32b, forms holding device together with the jut 30 of pin 28, and the jut 30 between the pars intermedia 28b of pin 28 and rearward end 28c is for inserting rotationally.Further, in the internal face of notch 32b, the another side of the opening surface of the other end of corresponding U-shaped ditch 32a, the hole 32c that the leading section 28a of formation pin 28 and pars intermedia 28b inserts.The following side of described pin installing department 32, brazen insertion nut (not shown) is 4 local settings.
Then, as represented in Fig. 6 (a), pin 28 inserts pin installing department 32, and as represented in Fig. 6 (b), the jut 30 of pin 28 inserts the notch 32b of pin installing department 32.Further, the rearward end 28c right direction of pin 28 carries out 45 degree of rotations, and as represented in Fig. 6 (c), the internal face of jut 30 and notch 32b is locking, and now, the dip plane of jut 30 is level.Further, at the ladder 28E of the boundary from the leading section 28a of pin installing department 32 projection and pars intermedia 28b, the endless elastomeric 34 of the fluororubber of thickness 0.5mm is mounted, and forms dustproof film component fixed part 18.The regulation described dustproof film component fixed part 18 being placed in the tabular surface 20 of regulation vessel 12 is local, as represented in Fig. 4, and the position of the recess 26 of the dustproof film component framework 16a that the leading section 28a being arranged on pin 28 inserts.Describedly to be installed as, to carry out with stainless steel hexagonal belt hole bolt (not shown) from the outside of vessel 12.Now, the resin plate (thickness 1.5mm) of POM is held under the arm into, improve sealing.The Pellicle container kit 10 of formation like this is moved into 10 grades of dust free rooms, after cleaning well with interfacial agent and pure water, and bone dry.In addition, the jut 30 of pin 28, as represented in Fig. 6 (c), rotates pin 28, makes the internal face of jut 30 and notch 32b locking, becomes the dip plane of level, and when lid 14 is loaded on vessel 12, the internal face in lid 14 contacts.
In in described dust free room, outside Pellicle container kit 10, make outside dimension 797mm × 474mm, the dustproof film component 16 of interior cun of 789mm × 456mm, high 5.9mm.Described dustproof film component 16, uses the dustproof film component framework 16a(thickness 4.8mm of aluminum alloy), use siloxane sticker as photomask sticker and dustproof film solid, as dustproof film 16b, use the fluororesin of thickness 3 μm.In addition, each long limit of dustproof film component framework 16a, with the interval of 710mm, arranges the recess 26 of 2 diameter 2.5mm × degree of depth 1.8mm, the ditch (not shown) of the wide 1.5mm of each minor face set handling, degree of depth 2.3mm.Described dustproof film component 16 in darkroom in carry out inspection of foreign substance with light harvesting lamp after, in Pellicle container kit 10 storage.Now, after the leading section of pin 28 of the dustproof film component fixed part 18 that vessel 12 is arranged is inserted into the recess 26 of dustproof film component framework 16a, as represented in Fig. 6 (c), pin 28 is rotated, dustproof film component 16 is fixed in vessel 12, is covered by lid 14.Further, the edge of lid 14 and vessel 12 with PVC system adhesion bar (not shown) of wide 35mm attach fixing after, with the 2 local installations of poly-urethane clip (not shown) on each long limit.Then, carry out 2 with the charged PE of the preventing bag of cleaning inside and heavily pack, there is with inside strengthening corrugated paperbox (not shown) storage of padded coaming.
Corrugated paperbox is strengthened in using of Pellicle container kit 10 like this, back and forth transports test (group horse Ken Tokyo is automobile, is aircraft between Fukuoka, Tokyo) from group horse to Fukuoka.Pellicle container kit 10 after transport moves into dust free room, carries out inner confirmation.Pin 28 is positively kept by pin installing department 32, and described leading section 28a also inserts and do not move in the recess 26 of dustproof film component framework 16a, and dustproof film component 16 is positively fixed at vessel 12.In a state in which, light harvesting light irradiation, confirms the dust Fa Sheng Zhuan Condition on vessel 12, does not find the generation of foreign matter near dustproof film component fixed part 18 and on vessel 10.Further, hex wrench inserts with in recess 36 by the instrument to pin 28, and pin 28 rotates, by the locking releasing of jut 30 and notch 32b.Then, dustproof film component 16 is taken out from vessel 12, move in darkroom, carry out the inspection Check of the foreign matter of the attachment on the surface of dustproof film component 16 with light harvesting lamp.Described result, does not find the attachment of foreign matter completely at dustproof film component 16, be maintained at extremely clean state.
(comparative example 1)
The dustproof film component fixed part 100 that construction drawing 7 represents.The pin 102 of the formation dustproof film component fixed part 100 that Fig. 7 represents, is formed by the resinous columnar component of PPS, has leading section 102a, pars intermedia 102b and rearward end 102c.Thickness is, the order of leading section 102a < pars intermedia 102b < rearward end 102c, and the boundary of leading section 102a and pars intermedia 102b has ladder to be formed, the elastic body 106 of the ring-type of installing fluororubber.Described pin 102, does not form the jut 30 formed at pin 28 that Fig. 5 represents.The pin installing department 104 having described pin 102 is formed with ABS resin ejection formation.Pin installing department 104 is, the leading section 102a of pin 28 and a part of pars intermedia 102b can be passed through, and the remainder of pars intermedia 102b and rearward end 102c insert through hole 108.Described pin installing department 104, does not have as the pin installing department 32 that Fig. 6 (a) represents, forms U-shaped ditch 32a and notch 32b.Thus, in pin installing department 104, the internal diameter of through hole 108 diminishes gradually along the direction of insertion of pin 102, and pin 28 is fixed by the friction force of the internal face of described outside wall surface and through hole 108 by the pin 102 inserting through hole 108 thus.So, in the dustproof film component fixed part 100 that Fig. 7 represents, in the through hole 108 of pin installing department 104, by friction force, pin 102 is fixed.
The dustproof film component fixed part 100 that Fig. 7 represents similarly to Example 1, is arranged on vessel 12.Then, in the recess 26 of the dustproof film component framework 16a of the dustproof film component 16 that vessel 12 loads, the leading section 102a forming the pin 102 of dustproof film component fixed part 100 inserts, and dustproof film component 16 is by fixing on vessel 12.Further, vessel 12 loads onto lid 14, is accommodated in Pellicle container kit 10 by dustproof film component 16.After this, similarly to Example 1, Pellicle container kit 10 is packed, carry out transport experiment.
Pellicle container kit 10 after transport moves into dust free room, carries out inner confirmation.In addition, dustproof film component 16 is also stayed on vessel 12, but in 4 local dustproof film component fixed parts 100,1 local pin 102 is just deviate from from pin installing department 104.In addition, described leading section 104a also extracts from the recess 26 of dustproof film component framework 16a, and the outside of leading section 104a and dustproof film component framework 16a rubs, and is attached with the foreign matter dozens of of diameter tens of μm.In addition, under state described in this, light harvesting light irradiation confirms the dust Fa Sheng Zhuan Condition on vessel 12, finds that the periphery of the dustproof film component fixed part 100 relative with the dustproof film component fixed part 100 to be ready extracting also has the attachment of foreign matter.Further, pin 102, carefully extracts from pin installing department 104 with the hand of the gloves putting on poly-butyronitrile, moves in darkroom by dustproof film component 16, checks with the foreign matter of light harvesting lamp effects on surface attachment.Described result, finds foreign matter dustproof film 16b being attached with diameter 10-20 μm degree.In addition, among them, about half is distributed in the periphery of dustproof film component fixed part 100.
Pellicle container kit in the present invention, can use as the Pellicle container kit of semiconductor device, also can use as the Pellicle container kit of the large-scale liquid crystal larger than the dustproof film component of semiconductor device.
[explanation of symbol]
10 is Pellicle container kit, and 12 is vessel; 12a is projection; 14 is lid; 16 is dustproof film component; 16a is dustproof film component framework; 16b is dustproof film; 18,100 is dustproof film component fixed part; 20 is tabular surface; 22 is lining; 24 is photomask adhesive coating; 26 is recess; 28,102 is pin; 28a, 102a are leading section; 28b, 102b are pars intermedia; 28c, 102c are rearward end; 28E is ladder; 30 is jut; 32,104 is pin installing department; 32a is U-shaped ditch; 32b is notch; 32c is hole; 34,106 is elastic body; 36 is instrument recess; 108 is through hole.
Claims (6)
1. a Pellicle container kit, comprise mounting dustproof film be attached at the vessel of the dustproof film component that dustproof film component framework is formed and be fitted together to locking at the circumference of described vessel, the lid covered by described dustproof film component is formed, it is characterized in that: at described vessel, arrange multiple dustproof film component fixed part, this dustproof film component fixed part is included in by rotary pin under the state of leading section insertion in the recess of the lateral surface of the described dustproof film component framework loaded; The pin installing department that described pin can be installed from described recess with extracting, each dustproof film component fixed part described, the holding device kept by described pin is housed, after the described pin that the recess of described dustproof film component framework is inserted in the described leading section that described pin installing department is installed carries out the rotation of predetermined angular, the leading section of described pin is not extracted from described recess.
2. Pellicle container kit according to claim 1, it is characterized in that: described holding device, formed by the jut that described pin is formed and at the notch locking with described jut after described pin rotates with predetermined angular that described pin installing department is formed.
3. Pellicle container kit according to claim 2, it is characterized in that: the internal face of the described lid that the described dustproof film component loaded described vessel covers, contact with a part for the described jut of described pin, the rotation of described pin can be prevented thus.
4. the Pellicle container kit according to Claims 2 or 3, is characterized in that: after described pin carries out the rotation of 30-180 degree, the jut of described pin and the notch of described pin installing department locking.
5. Pellicle container kit according to claim 1, is characterized in that: the buffer unit that the leading section as described pin contacts with described dustproof film component framework, is provided with elastic body.
6. Pellicle container kit according to claim 1, is characterized in that: at the rear end face of described pin, the instrument recess that the instrument forming the rotation of described pin inserts.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011237389A JP5586559B2 (en) | 2011-10-28 | 2011-10-28 | Pellicle container |
| JP2011-237389 | 2011-10-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103086050A CN103086050A (en) | 2013-05-08 |
| CN103086050B true CN103086050B (en) | 2014-12-24 |
Family
ID=48199272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210421071.XA Active CN103086050B (en) | 2011-10-28 | 2012-10-29 | Dustproof film assembly accommodating container |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5586559B2 (en) |
| KR (1) | KR101938158B1 (en) |
| CN (1) | CN103086050B (en) |
| HK (1) | HK1180658A1 (en) |
| TW (1) | TWI474957B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6351178B2 (en) * | 2015-07-13 | 2018-07-04 | 信越化学工業株式会社 | Pellicle storage container and pellicle removal method |
| JP6706575B2 (en) * | 2016-12-22 | 2020-06-10 | 信越化学工業株式会社 | Pellicle frame and pellicle using the same |
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| JP4649363B2 (en) * | 2006-04-19 | 2011-03-09 | 信越化学工業株式会社 | Pellicle storage container |
| JP5052106B2 (en) * | 2006-11-22 | 2012-10-17 | 旭化成イーマテリアルズ株式会社 | How to store the pellicle |
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2011
- 2011-10-28 JP JP2011237389A patent/JP5586559B2/en active Active
-
2012
- 2012-08-13 KR KR1020120088299A patent/KR101938158B1/en active IP Right Grant
- 2012-10-26 TW TW101139766A patent/TWI474957B/en active
- 2012-10-29 CN CN201210421071.XA patent/CN103086050B/en active Active
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2013
- 2013-07-04 HK HK13107847.5A patent/HK1180658A1/en not_active IP Right Cessation
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| JPH09204039A (en) * | 1996-01-25 | 1997-08-05 | Shin Etsu Chem Co Ltd | Pellicle frame holder |
| JP2000173887A (en) * | 1998-12-02 | 2000-06-23 | Asahi Kasei Denshi Kk | Pellicle housing case |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR101938158B1 (en) | 2019-01-14 |
| CN103086050A (en) | 2013-05-08 |
| KR20130047562A (en) | 2013-05-08 |
| JP2013097046A (en) | 2013-05-20 |
| HK1180658A1 (en) | 2013-10-25 |
| TWI474957B (en) | 2015-03-01 |
| TW201345806A (en) | 2013-11-16 |
| JP5586559B2 (en) | 2014-09-10 |
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